Transfer equipment, method, device, electronic equipment and medium

文档序号：139715 发布日期：2021-10-22 浏览：19次中文

阅读说明：本技术 一种转移设备、方法、装置、电子设备及介质 (Transfer equipment, method, device, electronic equipment and medium ) 是由何烽光冯晓庆刘晏刘正勇盛俭于 2021-06-30 设计创作，主要内容包括：本发明提供了一种转移设备、方法、装置、电子设备及介质,所述方法包括：基于两个转移执行器的设备坐标和第一距离阈值,调整两个转移执行器沿第一坐标方向的距离；其中第一距离阈值是基准间距值的第一整数倍；基准间距值为沿第一坐标方向的任意两个相邻的转移目标的间距；移动基准龙门,以使两个转移执行器分别对准一个转移目标；以及移动两个辅助龙门,以使两个转移执行器分别对准一个待转移器件；控制两个转移执行器分别将对准的待转移器件转移至对准的转移目标上。该方法预先调整两个转移执行器沿第一坐标方向的距离,可以控制两个转移执行器微调以对准转移目标,最终分别将对准的待转移器件转移至对准的转移目标上,实现快速的转移。(The invention provides a transfer device, a transfer method, a transfer apparatus, an electronic device and a transfer medium, wherein the method comprises the following steps: adjusting the distance of the two transfer actuators along the first coordinate direction based on the device coordinates of the two transfer actuators and the first distance threshold; wherein the first distance threshold is a first integer multiple of the reference pitch value; the reference distance value is the distance between any two adjacent transfer targets along the first coordinate direction; moving the reference gantry to align the two transfer actuators with one transfer target, respectively; moving the two auxiliary gantries to enable the two transfer actuators to be respectively aligned to a device to be transferred; and controlling the two transfer actuators to respectively transfer the aligned devices to be transferred to the aligned transfer targets. The method adjusts the distance of the two transfer actuators along the first coordinate direction in advance, can control the two transfer actuators to fine tune to align the transfer targets, and finally transfers the aligned devices to be transferred to the aligned transfer targets respectively to realize rapid transfer.)

1. A transfer apparatus for transferring a device to be transferred onto a transfer target, the transfer apparatus comprising:

a reference table having a carrying surface for carrying a substrate; the bearing surface is provided with a reference origin; the reference origin is used for determining the coordinates of the first coordinate direction and the coordinates of the second coordinate direction; the first coordinate direction and the second coordinate direction are perpendicular to each other and are parallel to the bearing surface; the substrate is used for bearing the transfer targets distributed in an array;

the first coordinate direction is the first coordinate direction, the reference gantry is arranged in parallel with the two auxiliary gantries, and the reference gantry is positioned between the two auxiliary gantries; the reference gantry extends along the second coordinate direction and can move along the first coordinate direction; the reference gantry is provided with two transfer actuators, and the two transfer actuators are respectively positioned on two sides of the reference gantry along the first coordinate direction; each of the transfer actuators is movable in the second coordinate direction and movable in the first coordinate direction with respect to the reference gantry;

each auxiliary gantry can move along the first coordinate direction relative to the reference working table, and one side, facing the reference gantry, of each auxiliary gantry is connected with an auxiliary working table; each auxiliary worktable can move along the second coordinate direction relative to the connected auxiliary gantry; each auxiliary worktable is provided with an elastic bearing surface; each elastic bearing surface is provided with an auxiliary reference origin; the auxiliary workbench is used for bearing the device to be transferred.

2. The transfer apparatus according to claim 1, wherein each transfer actuator is connected to the reference gantry by a first motion group; each auxiliary worktable is connected with the corresponding auxiliary gantry through a second motion group.

3. The transfer apparatus of claim 1 wherein each of said transfer actuators is movable relative to said reference gantry along a third coordinate direction, said third coordinate direction being perpendicular to said load-bearing surface; each of the auxiliary tables is movable in the third coordinate direction with respect to the auxiliary gantry.

4. A transfer method for transferring using a transfer apparatus according to any one of claims 1 to 3, for transferring a device to be transferred onto the transfer target, comprising:

adjusting the distance of the two transfer actuators along the first coordinate direction based on the device coordinates of the two transfer actuators and a first distance threshold; wherein the first distance threshold is a first integer multiple of a reference pitch value; the reference distance value is the distance between any two adjacent transfer targets along the first coordinate direction; the device coordinates are coordinates relative to a reference origin;

moving a reference gantry to align the two transfer actuators with one of the transfer targets, respectively; moving the two auxiliary gantries to enable the two transfer actuators to be respectively aligned with one device to be transferred;

controlling two transfer actuators to transfer the aligned devices to be transferred onto the aligned transfer targets, respectively.

5. The transfer method according to claim 4, characterized in that each transfer actuator is connected to the reference gantry by means of a first kinematic group; each auxiliary worktable is connected with the corresponding auxiliary gantry through a second motion group;

the adjusting the distance of the two transfer actuators along the first coordinate direction based on the device coordinates of the two transfer actuators and the first distance threshold comprises:

based on the device coordinates of the two transfer actuators and the first distance threshold, both motion sets are moved to adjust the distance of the two transfer actuators in the first coordinate direction.

6. The transfer method according to claim 4, wherein the two transfer actuators include a first transfer actuator and a second transfer actuator; the first transfer actuator and the second transfer actuator are respectively positioned on two sides of the reference gantry along the direction of the first coordinate axis; the moving reference gantry to align the two transfer actuators with one of the transfer targets, respectively, includes:

moving a reference gantry in the first coordinate direction and at least one of the first motion sets in the second coordinate direction to align the first and second transfer actuators with one of the transfer targets in the first and second selected columns of the substrate, respectively; the distance between the first selected column and the second selected column along the first coordinate direction is the first distance threshold;

the moving two auxiliary gantries to enable two transfer actuators to be respectively aligned with one device to be transferred comprises:

and moving the auxiliary gantry and the second motion group based on the equipment coordinates of the auxiliary reference original points of the two auxiliary workbenches, so that the two transfer actuators are respectively aligned with one device to be transferred and are respectively aligned with one transfer target in the first selected column and the second selected column of the substrate.

7. The transfer method of claim 6, wherein prior to moving a reference gantry in the first coordinate direction and moving at least one of the first motion sets in the second coordinate direction, the method further comprises:

and selecting two rows of transfer targets which are not transferred and have the distance along the first coordinate direction as the first distance threshold value from the substrate to serve as the first selected row and the second selected row.

8. The transfer method according to claim 7, wherein the number of columns of the transfer targets of the substrate is a second integer; the second integer is an even multiple of the first integer; the method further comprises the following steps:

sequentially transferring each transfer target of the first selected column and the second selected column until all transfer targets in the first selected column and the second selected column are transferred;

according to a first preset sequence rule, two rows of transfer targets which are not transferred and have the distance along the first coordinate direction as the first distance threshold are sequentially selected from the substrate and are re-determined as the first selected row and the second selected row;

and transferring each transfer target which is determined to be in the first selected column and the second selected column until all the transfer targets carried by the substrate are transferred.

9. The transfer method of claim 4, wherein prior to said adjusting the distance of the two transfer actuators in the first coordinate direction based on the device coordinates of the two transfer actuators and the first distance threshold, the method further comprises:

moving the reference gantry and the first motion group connected with the first transfer actuator to enable the first transfer actuator to coincide with the reference origin, and calibrating the reference equipment coordinates of the first transfer actuator; the reference device coordinates of the first transfer actuator are used to determine the device coordinates of the first transfer actuator;

moving the reference gantry and the first motion group connected with the second transfer actuator to enable the second transfer actuator to coincide with the reference origin, and calibrating the reference equipment coordinates of the second transfer actuator; the reference device coordinates of the second transfer actuator are used to determine the device coordinates of the second transfer actuator.

10. The transfer method according to claim 6, wherein the auxiliary tables include a first auxiliary table and a second auxiliary table, the first auxiliary table and the second auxiliary table being respectively located at both sides of the reference gantry in the first coordinate direction; the auxiliary reference origin points corresponding to the first auxiliary worktable and the second auxiliary worktable are respectively a first auxiliary reference origin point and a second auxiliary reference origin point; before the adjusting the distance of the two transfer actuators in the first coordinate direction based on the device coordinates of the two transfer actuators and the first distance threshold, the method further comprises:

moving the reference gantry, the first motion group, the first auxiliary gantry and the second motion group to enable the first transfer actuator to coincide with the first auxiliary reference origin, and calibrating the reference equipment coordinates of the first auxiliary reference origin; the reference device coordinates of the first auxiliary reference origin are used to determine device coordinates of the first auxiliary reference origin;

moving the reference gantry, the first motion group, the second auxiliary gantry and the second motion group to enable the second transfer actuator to coincide with the second auxiliary reference origin, and calibrating the reference equipment coordinates of the second auxiliary reference origin; the reference device coordinates of the second auxiliary reference origin are used to determine the device coordinates of the second auxiliary reference origin.

11. The transfer method according to claim 4, wherein controlling the two transfer actuators to transfer the aligned to-be-transferred devices onto the aligned transfer targets, respectively, comprises:

and controlling the two transfer actuators to respectively move along a third coordinate direction relative to the reference gantry so as to transfer the aligned to-be-transferred device to the aligned transfer target.

12. The transfer method according to claim 4, wherein the reference pitch value is a pitch of any two adjacent transfer targets in the first coordinate direction when pitches of the adjacent transfer targets are the same.

13. A transfer device, comprising:

the first adjusting unit is used for adjusting the distance between the two transfer actuators along the first coordinate direction based on the device coordinates of the two transfer actuators and a first distance threshold value; wherein the first distance threshold is a first integer multiple of a reference pitch value; the reference distance value is the distance between any two adjacent transfer targets along the first coordinate direction; the device coordinates are coordinates relative to a reference origin;

the second adjusting unit is used for moving the reference gantry so as to enable the two transfer actuators to be respectively aligned with one transfer target; moving the two auxiliary gantries to enable the two transfer actuators to be respectively aligned with one device to be transferred;

a transfer unit for controlling the two transfer actuators to transfer the aligned to-be-transferred devices onto the aligned transfer targets, respectively.

14. An electronic device comprising a memory and a processor, wherein:

the memory is used for storing a computer program;

the processor is used for reading the program in the memory and executing the transfer method of any one of claims 4 to 12.

15. A computer-readable storage medium, on which a computer program is stored which, when being executed by a processor, carries out the steps of the transfer method according to any one of claims 4 to 12.

Technical Field

The present invention relates to the field of semiconductor technologies, and in particular, to a transfer apparatus, a transfer method, a transfer apparatus, an electronic apparatus, and a transfer medium.

Background

In a manufacturing process of a display device, for example, in a manufacturing process of a display device, a device such as a chip needs to be transferred onto a substrate to drive a screen display of a display panel. In the transferring process of the devices such as the chip, the transferring speed and the transferring precision are directly related to the transferring efficiency and the transferring quality of the devices such as the chip.

In the existing transfer equipment, a quick moving driving mechanism is needed to realize quick transfer so as to improve the transfer speed. But the transfer speed is limited by the drive mechanism's ultimate capacity and load, etc.

With the continuous development of the display device industry, higher demands are made on the capacity of the transfer equipment. Therefore, it is necessary to improve the transfer efficiency of the transfer process to ensure that the huge demand for transferring products can be met, thereby promoting the further development of the whole display device industry.

Disclosure of Invention

The invention provides a transfer device, a transfer method, a transfer device, an electronic device and a transfer medium, and solves the problems of how to further improve the efficiency of a transfer process and how to realize rapid transfer.

In a first aspect, the present invention provides a transfer apparatus for transferring a device to be transferred onto a transfer target, the device transfer apparatus comprising:

a reference table having a carrying surface for carrying a substrate; the bearing surface is provided with a reference origin; the reference origin is used for determining the coordinates of the first coordinate direction and the coordinates of the second coordinate direction; the first coordinate direction and the second coordinate direction are mutually vertical and are parallel to the bearing surface; the substrate is used for bearing the transfer targets distributed in an array;

Optionally, each transfer actuator is connected to the reference gantry via a first motion set; each auxiliary worktable is connected with the corresponding auxiliary gantry through a second motion group.

Optionally, each of the transfer actuators is movable relative to the reference gantry along a third coordinate direction, the third coordinate direction being perpendicular to the carrying surface; each of the auxiliary tables is movable in the third coordinate direction with respect to the auxiliary gantry.

In a second aspect, the present invention provides a transfer method for transferring by using the transfer apparatus according to any one of the first aspects, for transferring a device to be transferred onto a transfer target, including:

controlling two transfer actuators to transfer the aligned devices to be transferred onto the aligned transfer targets, respectively.

the adjusting the distance of the two transfer actuators along the first coordinate direction based on the device coordinates of the two transfer actuators and the first distance threshold comprises:

Optionally, the two transfer actuators comprise a first transfer actuator and a second transfer actuator; the first transfer actuator and the second transfer actuator are respectively positioned on two sides of the reference gantry along the direction of the first coordinate axis; the moving reference gantry to align the two transfer actuators with one of the transfer targets, respectively, includes:

the moving two auxiliary gantries to enable two transfer actuators to be respectively aligned with one device to be transferred comprises:

Optionally, before moving the reference gantry in the first coordinate direction and moving at least one of the first motion sets in the second coordinate direction, the method further comprises:

Optionally, the number of columns of the transfer targets of the substrate is a second integer; the second integer is an even multiple of the first integer; the method further comprises the following steps:

and transferring each transfer target which is determined to be in the first selected column and the second selected column until all the transfer targets carried by the substrate are transferred.

Optionally, before the adjusting the distance of the two transfer actuators in the first coordinate direction based on the device coordinates of the two transfer actuators and the first distance threshold, the method further comprises:

Optionally, the auxiliary working tables include a first auxiliary working table and a second auxiliary working table, and the first auxiliary working table and the second auxiliary working table are respectively located at two sides of the reference gantry along the first coordinate direction; the auxiliary reference origin points corresponding to the first auxiliary worktable and the second auxiliary worktable are respectively a first auxiliary reference origin point and a second auxiliary reference origin point; before the adjusting the distance of the two transfer actuators in the first coordinate direction based on the device coordinates of the two transfer actuators and the first distance threshold, the method further comprises:

Optionally, controlling two of the transfer actuators to respectively transfer the aligned to-be-transferred devices onto the aligned transfer targets includes:

Optionally, the reference pitch value is a pitch of any two adjacent transfer targets along the first coordinate direction when pitches of the adjacent transfer targets are the same.

In a third aspect, the present invention provides a transfer device comprising:

a transfer unit for controlling the two transfer actuators to transfer the aligned to-be-transferred devices onto the aligned transfer targets, respectively.

the first adjusting unit is specifically configured to:

Optionally, the two transfer actuators comprise a first transfer actuator and a second transfer actuator; the first transfer actuator and the second transfer actuator are respectively positioned on two sides of the reference gantry along the direction of the first coordinate axis; the second adjusting unit is specifically configured to:

the second adjusting unit is further configured to: and moving the auxiliary gantry and the second motion group based on the equipment coordinates of the auxiliary reference original points of the two auxiliary workbenches so that the two transfer actuators are respectively aligned with one device to be transferred and are respectively aligned with one transfer target in the first selected column and the second selected column of the substrate.

Optionally, the apparatus further comprises:

and a transfer column selection unit configured to select two columns of transfer targets, which are not transferred and have a distance in the first coordinate direction as the first distance threshold, from the substrate as the first selected column and the second selected column.

Optionally, the number of columns of the transfer targets of the substrate is a second integer; the second integer is an even multiple of the first integer; the apparatus further comprises a loop transfer unit for:

and transferring each transfer target which is determined to be in the first selected column and the second selected column until all the transfer targets carried by the substrate are transferred.

Optionally, the apparatus further comprises a first calibration unit, the first calibration unit being configured to:

moving the reference gantry and the first motion group connected with the first transfer actuator to enable the first transfer actuator to coincide with the reference origin, and calibrating the reference equipment coordinates of the first transfer actuator; a reference device coordinate of the first transfer actuator is used to determine the device coordinate of the first transfer actuator;

Optionally, the auxiliary working tables include a first auxiliary working table and a second auxiliary working table, and the first auxiliary working table and the second auxiliary working table are respectively located at two sides of the reference gantry along the first coordinate direction; the auxiliary reference origin points corresponding to the first auxiliary worktable and the second auxiliary worktable are respectively a first auxiliary reference origin point and a second auxiliary reference origin point; the device further comprises a second calibration unit, wherein the second calibration unit is used for:

Optionally, the transfer unit is specifically configured to:

Optionally, the reference pitch value is a pitch of any two adjacent transfer targets along the first coordinate direction when pitches of the adjacent transfer targets are the same.

In a fifth aspect, the present invention provides an electronic device comprising a memory and a processor, wherein:

the memory is used for storing a computer program;

the processor is configured to read a program in the memory and execute the steps of the transfer method according to any one of the second aspects.

In a sixth aspect, the present invention provides a computer program medium having stored thereon a computer program which, when executed by a processor, carries out the steps of the transfer method as set forth in any of the second aspects above.

The transfer equipment, the transfer method, the transfer device, the electronic equipment and the transfer medium have the following beneficial effects:

by adjusting the distance between the two transfer actuators along the first coordinate direction in advance, the two transfer actuators can be controlled to be finely adjusted in the first coordinate direction in the transfer process, and finally the aligned devices to be transferred are transferred to the aligned transfer targets respectively, so that rapid transfer is realized.

Drawings

Fig. 1 is a schematic structural diagram of a transfer apparatus according to an embodiment of the present invention;

FIG. 2 is a flow chart of a transfer method according to an embodiment of the present invention;

FIG. 3 is a schematic diagram of calibrating reference device coordinates of a first transfer actuator according to an embodiment of the present invention;

FIG. 4 is a schematic diagram of calibrating reference device coordinates of a second transfer actuator according to an embodiment of the present invention;

FIG. 5 is a schematic diagram of coordinates of a reference device for calibrating a first auxiliary reference origin according to an embodiment of the present invention;

FIG. 6 is a schematic diagram of coordinates of a reference device for calibrating a second auxiliary reference origin according to an embodiment of the present invention;

FIG. 7 is a schematic diagram illustrating a location of a branch target according to an embodiment of the present invention;

FIG. 8 is a schematic diagram illustrating a position of a device to be transferred according to an embodiment of the present invention;

FIG. 9 is a schematic diagram illustrating a position of another device to be transferred according to an embodiment of the present invention;

FIG. 10 is a schematic view of a transfer actuator fixed offset adjustment provided in accordance with an embodiment of the present invention;

FIG. 11 is a schematic view of a single-transfer position provided by an embodiment of the present invention;

FIG. 12 is a schematic diagram of a transfer sequence provided by an embodiment of the present invention;

fig. 13 is a schematic structural diagram of a transfer device according to an embodiment of the present invention;

fig. 14 is a schematic structural diagram of a second transfer device according to an embodiment of the present invention;

fig. 15 is a schematic structural diagram of a third transfer device provided in an embodiment of the present invention;

fig. 16 is a schematic structural diagram of a fourth transferring device according to an embodiment of the present invention;

fig. 17 is a schematic structural diagram of a fifth transfer device according to an embodiment of the present invention;

fig. 18 is a schematic structural diagram of an electronic device according to an embodiment of the present invention.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

It should be noted that the embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present disclosure. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the present disclosure, as detailed in the appended claims.

Hereinafter, some terms in the embodiments of the present disclosure are explained to facilitate understanding by those skilled in the art.

(1) The term "TCP" in the embodiments of the present disclosure refers to a device center Point (Tool center Point).

(2) The term "flexible object" in the embodiments of the present disclosure refers to an object that has the property of deforming when subjected to a force and of recovering its original shape when the force is lost.

(3) The term "axial coordinates" in the embodiments of the present disclosure means coordinates where the position of the motor encoding region corresponds to the coordinate on the coordinate axis of the workbench, and the axial coordinates can be directly obtained on the device.

To make the objects, technical solutions and advantages of the present disclosure clearer, the present disclosure will be described in further detail with reference to the accompanying drawings, and it is apparent that the described embodiments are only a part of the embodiments of the present disclosure, rather than all embodiments. All other embodiments, which can be derived by one of ordinary skill in the art from the embodiments disclosed herein without making any creative effort, shall fall within the scope of protection of the present disclosure.

Various embodiments of the present application will be described in detail below with reference to the accompanying drawings. It should be noted that the display sequence of the embodiment of the present application only represents the sequence of the embodiment, and does not represent the merits of the technical solutions provided by the embodiments.

Example 1

As shown in fig. 1, an embodiment of the present invention provides a transfer apparatus, where the transfer apparatus is merely an example, and is not limited, and in a specific implementation, some components may be added or deleted in the transfer apparatus. The transfer apparatus for transferring the devices 203 and 303 to be transferred onto the transfer target 402 includes:

a reference table 400, the reference table 400 having one carrying surface for carrying a substrate; the bearing surface is provided with a reference origin 401; the reference origin 401 is used to determine the coordinates of the first coordinate direction x and the coordinates of the second coordinate direction y; the first coordinate direction x is vertical to the second coordinate direction y and is parallel to the bearing surface; the substrate is used for bearing array distributed transfer targets 402;

the gantry comprises a reference gantry 100 and two auxiliary gantries, wherein the two auxiliary gantries are a first auxiliary gantry 200 and a second auxiliary gantry 300 respectively, the reference gantry 100 and the two auxiliary gantries are arranged in parallel along a first coordinate direction x, and the reference gantry 100 is positioned between the first auxiliary gantry 200 and the second auxiliary gantry 300; the reference gantry 100 extends along a second coordinate direction y and is movable along a first coordinate direction x; two transfer actuators are arranged on the reference gantry 100, wherein the two transfer actuators are a first transfer actuator 101 and a second transfer actuator 102 respectively, and are located on two sides of the reference gantry 100 respectively along a first coordinate direction x; each transfer actuator is movable in the second coordinate direction y and in the first coordinate direction x with respect to the reference gantry 100;

each auxiliary gantry can move along a first coordinate direction x relative to the reference workbench 400, one side of each auxiliary gantry, facing the reference gantry 100, is connected with the auxiliary workbench, one side of the first auxiliary gantry 200, facing the reference gantry 100, is connected with the first auxiliary workbench 201, and one side of the second auxiliary gantry 300, facing the reference gantry 100, is connected with the second auxiliary workbench 301; each auxiliary worktable can move along a second coordinate direction y relative to the connected auxiliary gantry; each auxiliary worktable is provided with an elastic bearing surface; each elastic bearing surface is provided with an auxiliary reference origin, wherein the elastic bearing surface of the first auxiliary worktable 201 is provided with a first auxiliary reference origin 202, and the elastic bearing surface of the second auxiliary worktable 301 is provided with a second auxiliary reference origin 302; the auxiliary table is used for carrying the devices 203 and 303 to be transferred. In the following embodiments of the present application, the first transfer actuator 101 and the second transfer actuator 102 may be simply referred to as a transfer actuator 1 and a transfer actuator 2, respectively; devices to be transferred 203 and 303 may be referred to as devices to be transferred Diem1 and Diem2, respectively; branch target 402 may be referred to as branch target Padn.

It should be noted that the elastic bearing surface is a flexible object, and has the property of deforming after being stressed and restoring the original shape after the applied force is lost.

It should be noted that the above description of each auxiliary worktable having an elastic bearing surface is to ensure that the transfer actuator can transfer the device to be transferred and the transfer target through the movement in the z direction, and is not an absolute limitation.

Illustratively, the first transfer actuator 101 is connected to the reference gantry 100 through a first motion set 103, and the second transfer actuator 102 is connected to the reference gantry 100 through a first motion set 104; the first auxiliary working table 201 is connected with the corresponding first auxiliary gantry 200 through the second motion group 204, and the second auxiliary working table 301 is connected with the corresponding second auxiliary gantry 300 through the second motion group 304.

As an alternative embodiment, each transfer actuator can move along a third coordinate direction relative to the reference gantry, the third coordinate direction being perpendicular to the bearing surface; each auxiliary table is movable in a third coordinate direction relative to the auxiliary gantry.

Each transfer actuator is, for example, movable with respect to the reference gantry 100 along a third coordinate direction z, which is perpendicular to the bearing surface; each auxiliary table is movable in a third coordinate direction z relative to the connected auxiliary gantry.

The transfer equipment provided by the embodiment of the invention provides a structure with a double-transfer actuator and a double-auxiliary workbench, and the transfer equipment is provided with a reference gantry and two auxiliary gantries, wherein the reference gantry and the two auxiliary gantries are arranged in parallel along a first coordinate direction, and the reference gantry is positioned between the two auxiliary gantries; the reference gantry extends along the second coordinate direction and can move along the first coordinate direction; the reference gantry is provided with two transfer actuators, and the two transfer actuators are respectively positioned on two sides of the reference gantry along the first coordinate direction; each transfer actuator is movable in the second coordinate direction and movable in the first coordinate direction relative to the reference gantry; each auxiliary gantry can move along a first coordinate direction relative to the reference working table, and one side, facing the reference gantry, of each auxiliary gantry is connected with the auxiliary working table; each auxiliary worktable can move along a second coordinate direction relative to the connected auxiliary gantry; each auxiliary worktable is provided with an elastic bearing surface. Therefore, when the transfer equipment works, the distance of the two transfer actuators along the first coordinate direction can be adjusted based on the equipment coordinates of the two transfer actuators, so that the distance of the two transfer actuators in the first coordinate direction is just integral multiple of the interval of the transfer targets in the first coordinate direction, the two transfer actuators can be respectively aligned to one transfer target, and the two auxiliary gantries and the second motion group are respectively adjusted, so that the devices to be transferred on the two auxiliary workbenches are respectively aligned to the transfer targets, therefore, the two transfer actuators can be simultaneously controlled to complete the transfer of the two transfer targets, and the rapid transfer is realized.

As shown in fig. 2, an embodiment of the present invention provides a flowchart of a transfer method, which may use the transfer apparatus in any one of the foregoing embodiments for transfer. The method is used for transferring a device to be transferred and a transfer target, and comprises the following steps:

step S201, based on the device coordinates of the two transfer actuators and the first distance threshold, adjusts the distance of the two transfer actuators along the first coordinate direction.

Wherein the first distance threshold is a first integer multiple of the reference pitch value; the reference distance value is the distance between any two adjacent transfer targets along the first coordinate direction; the device coordinates are coordinates relative to a reference origin.

As an alternative embodiment, each transfer actuator is connected to the reference gantry via a first kinematic group; each auxiliary worktable is connected with the corresponding auxiliary gantry through a second motion group; the adjusting of the distance of the two transfer actuators along the first coordinate direction based on the device coordinates of the two transfer actuators and the first distance threshold may be moving the two motion groups to adjust the distance of the two transfer actuators along the first coordinate direction based on the device coordinates of the two transfer actuators and the first distance threshold.

As an alternative embodiment, the reference pitch value is a pitch of any two adjacent transfer targets in the first coordinate direction when the pitches of the adjacent transfer targets are the same.

Step S202, moving the reference gantry to enable the two transfer actuators to be respectively aligned to one transfer target; and moving the two auxiliary gantries to enable the two transfer actuators to be respectively aligned with one device to be transferred.

In an embodiment of the present invention, the coordinate system corresponding to the transfer target is a coordinate system having a reference origin of the mark pattern fixed on the reference table as a coordinate origin, and is referred to as an apparatus coordinate system in this embodiment.

As an alternative embodiment, when the reference gantry is moved so that the two transfer actuators are aligned with one transfer target respectively, two columns of transfer targets, which have a distance along the first coordinate direction as the first distance threshold and are not transferred, are selected from the substrate as the first selected column and the second selected column.

As an alternative embodiment, when the reference gantry is moved to align the two transfer actuators with one transfer target respectively, if there are no two columns of transfer targets that are not transferred and have the distance along the first coordinate direction that is the first distance threshold, then sequentially selecting one column of transfer targets that are not transferred from the substrate along the first coordinate direction as the first selected column.

As an alternative embodiment, the two transfer actuators comprise a first transfer actuator and a second transfer actuator; along the direction of a first coordinate axis, a first transfer actuator and a second transfer actuator are respectively positioned at two sides of the reference gantry; moving the reference gantry to align the two transfer actuators with a respective transfer target, comprising:

moving the reference gantry in a first coordinate direction and at least one first motion group in a second coordinate direction to align the first and second transfer actuators with one of the transfer targets in the first and second selected columns of the substrate, respectively; the distance between the first selected column and the second selected column along the first coordinate direction is a first distance threshold;

moving the two auxiliary gantries to align the two transfer actuators with one device to be transferred, respectively, comprising:

and moving the auxiliary gantry and the second motion group based on the equipment coordinates of the auxiliary reference original points of the two auxiliary workbenches so that the two transfer actuators are respectively aligned with one device to be transferred and are respectively aligned with one transfer target in the first selected column and the second selected column of the substrate.

Step S203, controlling the two transfer actuators to transfer the aligned devices to be transferred to the aligned transfer targets, respectively.

As an alternative embodiment, the two transfer actuators are controlled to transfer the aligned transfer target and the aligned device to be transferred respectively, and the two transfer actuators may be controlled to move along the third coordinate direction relative to the reference gantry respectively so as to transfer the aligned transfer target and the aligned device to be transferred.

As an alternative embodiment, the number of columns of the transfer targets of the substrate is a second integer; the second integer is an even multiple of the first integer; the method further comprises the following steps:

transferring the transfer targets of the first selected column and the second selected column in sequence until all the transfer targets in the first selected column and the second selected column are transferred;

according to a first preset sequence rule, two rows of transfer targets which are not transferred and have the distance along a first coordinate direction as a first distance threshold are sequentially selected from the substrate and are re-determined as a first selected row and a second selected row;

and transferring each transfer target newly determined to be in the first selected column and the second selected column until all the transfer targets carried by the substrate are transferred.

According to the transfer method provided by the embodiment of the invention, the distance between the two transfer actuators along the first coordinate direction is adjusted in advance, so that the two transfer actuators can be controlled to respectively transfer the aligned to-be-transferred devices to the aligned transfer targets in the transfer process, and the rapid transfer is realized.

As an alternative embodiment, before adjusting the distance of the two transfer actuators in the first coordinate direction based on the device coordinates of the two transfer actuators and the first distance threshold, the following steps are also performed:

and A01, moving the reference gantry and the first motion group connected with the first transfer actuator to enable the first transfer actuator to coincide with the reference origin, and calibrating the reference equipment coordinates of the first transfer actuator.

The reference device coordinates of the first transfer actuator are used to determine the device coordinates of the first transfer actuator.

And A02, moving the reference gantry and the first motion group connected with the second transfer actuator to enable the second transfer actuator to coincide with the reference origin, and calibrating the reference device coordinates of the second transfer actuator.

The reference device coordinates of the second transfer actuator are used to determine the device coordinates of the second transfer actuator.

As an alternative embodiment, the auxiliary worktable comprises a first auxiliary worktable and a second auxiliary worktable, and the first auxiliary worktable and the second auxiliary worktable are respectively positioned at two sides of the reference gantry along the first coordinate direction; the auxiliary reference original points corresponding to the first auxiliary workbench and the second auxiliary workbench are respectively a first auxiliary reference original point and a second auxiliary reference original point; before adjusting the distance of the two transfer actuators in the first coordinate direction based on the device coordinates of the two transfer actuators and the first distance threshold, the following steps are also performed:

and step B01, moving the reference gantry, the first motion group, the first auxiliary gantry and the second motion group to enable the first transfer actuator to coincide with the first auxiliary reference origin, and calibrating the reference equipment coordinates of the first auxiliary reference origin.

The reference device coordinates of the first auxiliary reference origin are used for determining the device coordinates of the first auxiliary reference origin;

and step B02, moving the reference gantry, the first motion group, the second auxiliary gantry and the second motion group to enable the second transfer actuator to coincide with the origin of the second auxiliary reference, and calibrating the reference equipment coordinates of the origin of the second auxiliary reference.

The reference device coordinates of the second auxiliary reference origin are used to determine the device coordinates of the second auxiliary reference origin.

In the above embodiments of calibrating the device coordinates of the transfer actuator and the device coordinates of the auxiliary reference origin, the relative positional relationship with a part of the reference gantry, the first motion group, the second motion group, and the auxiliary gantry may be calibrated. In one possible embodiment, the reference origin is used as the origin of the whole device, the center point of the transfer actuator 1 is the feature point of the first motion group 104, the first auxiliary reference origin 202 is the feature point of the second motion group 204, the center point of the transfer actuator 2 is the feature point of the first motion group 103, and the second auxiliary reference origin 302 is the feature point of the second motion group 304. Specific possible embodiments are given below.

1) And calibrating the reference equipment coordinates of the first transfer actuator.

In implementation, the reference equipment coordinates of the first transfer actuator are calibrated by moving the reference gantry and the first motion group connected with the first transfer actuator to enable the first transfer actuator to be superposed with the reference origin.

The reference device coordinates of the first transfer actuator are used to determine the device coordinates of the first transfer actuator.

As shown in fig. 3, an embodiment of the present invention provides a schematic diagram for calibrating the reference device coordinates of the first transfer actuator.

The center of the transfer actuator 1 is set as a feature point of the first motion group 104

The reference gantry is moved along the X direction, and the first motion group 104 moves along the Y direction relative to the reference gantry, so that the center of the transfer actuator 1 and the center of the reference origin coincide

Recording the axial coordinate Xh1_ org of the reference gantry at the moment, recording the axial coordinate Yh1_ org of the first motion group 104 at the moment, and recording the axial coordinate Xh01_ org of the first motion group 104 at the X direction at the moment

The relationship between the device coordinates (Xh1, Yh1) of the transfer actuator 1 and the axis coordinate X0axis of the reference gantry, the Y-axis coordinate Y01axis of the first motion group 104, and the X-axis coordinate X01axis of the first motion group 104 is:

Xh1＝X0axis+X01axis–Xh1_org–Xh01_org

Yh1＝Y01axis–Yh1_org

2) and calibrating the reference device coordinates of the second transfer actuator.

As shown in fig. 4, an embodiment of the present invention provides a schematic diagram for calibrating the reference device coordinates of the second transfer actuator.

The center of the transfer actuator 2 is taken as a feature point of the first motion group 103;

moving the reference gantry along the X direction, moving the first motion group 103 relative to the reference gantry along the Y direction so that the center of the transfer actuator 2 coincides with the center of the reference origin, recording the axis coordinate of the reference gantry at this time as Xh2_ org, recording the Y-direction axis coordinate of the first motion group 103 at this time as Yh2_ org, and recording the axis coordinate of the first motion group 104 at this time as Xh02_ org, wherein the relationship between the device coordinate (Xh2, Yh2) of the transfer actuator 2, the axis coordinate X0axis of the reference gantry, the Y-direction axis coordinate Y02axis of the first motion group 103, and the X-direction axis coordinate X02axis of the first motion group 103 is as follows:

Xh2＝X0axis+X02axis–Xh2_org–Xh02_org

Yh2＝Y02axis–Yh2_org

the above-described determination of the device coordinates of the transfer actuator is the device coordinates of the tool center point TCP of the transfer actuator.

3) And calibrating the reference equipment coordinates of the first auxiliary reference origin of the first auxiliary workbench.

As shown in fig. 5, an embodiment of the present invention provides a schematic diagram of calibrating the coordinates of a reference device of a first auxiliary reference origin.

Taking the center of a first auxiliary reference origin 202 of the first auxiliary table as a feature point of the second motion group 204;

the reference gantry and the first auxiliary gantry are moved along the X direction, the first motion group 104 moves along the Y direction relative to the reference gantry, the second motion group 204 moves along the Y direction relative to the first auxiliary gantry, so that the center of the transfer actuator 1 coincides with the center of the first auxiliary reference origin 202, at this time, the axis coordinate of the reference gantry is X0axis _ d1, the axis coordinate of the Y direction of the first motion group 104 is Y01axis _ d1, the axis coordinate of the X direction of the first motion group 104 is X01axis _ d1, the axis coordinate of the first auxiliary gantry is X1axis _ d1, and the axis coordinate of the second motion group 204 is Y1axis _ d 1.

From the reference apparatus coordinates of the first transfer actuator, the apparatus coordinates of the transfer actuator 1 at this time are (X0axis _ d1+ X01axis _ d 1-Xh 1_ org-Xh 01_ org, Y01axis _ d 1-Yh 1_ org).

Since the transfer actuator 1 is aligned with the first auxiliary reference origin 202, the machine coordinates of the first auxiliary reference origin 202 at this time are also (X0axis _ d1+ X01axis _ d 1-Xh 1_ org-Xh 01_ org, Y01axis _ d 1-Yh 1_ org).

That is, when the Y-axis coordinate of the first motion group 104 is Y01axis _ d1, the X-axis coordinate of the first motion group 104 is X01axis _ d1, the axis coordinate of the first auxiliary gantry is X1axis _ d1, and the axis coordinate of the second motion group 204 is Y1axis _ d1, the device coordinate of the first auxiliary reference origin 202 is (X0axis _ d1+ X01axis _ d 1-Xh 1_ org-Xh 01_ org, Y01axis _ d 1-Yh 1_ org).

Let Xd1_ org be X1axis _ d1- (X0axis _ d1+ X01axis _ d 1-Xh 1_ org-Xh 01_ org),

let Yd1_ org be Y1axis _ d1- (Y01axis _ d 1-Yh 1_ org),

the device coordinates (Xd1, Yd1) of the first auxiliary reference origin 202 and the axis coordinates X1axis of the first auxiliary gantry and the axis coordinates Y1axis of the second motion set 204 are in relation to each other:

Xd1＝X1axis–Xd1_org

Yd1＝Y1axis–Yd1_org

4) and calibrating the reference equipment coordinates of a second auxiliary reference origin of the second auxiliary worktable.

As shown in fig. 6, an embodiment of the present invention provides a schematic diagram of the reference device coordinates for calibrating the second auxiliary reference origin.

A second auxiliary reference origin center of the second auxiliary table is set as a feature point of the second motion group 304;

the reference gantry and the second auxiliary gantry are moved along the X direction, the first motion group 103 moves along the Y direction relative to the reference gantry, the second motion group 304 moves along the Y direction relative to the second auxiliary gantry, so that the center of the transfer actuator 2 coincides with the center of the second auxiliary reference origin, at this time, the axis coordinate of the reference gantry is X0axis _ d2, the Y-direction axis coordinate of the first motion group 103 is Y02axis _ d2, the X-direction axis coordinate of the first motion group 103 is X02axis _ d2, the axis coordinate of the second auxiliary gantry is X2axis _ d2, and the axis coordinate of the second motion group 304 is Y2axis _ d 2.

From the reference apparatus coordinates of the second transfer actuator, the apparatus coordinates of the transfer actuator 1 at this time are (X0axis _ d2+ X02axis _ d 2-Xh 2_ org-Xh 02_ org, Y02axis _ d 2-Yh 2_ org).

Since the transfer actuators 2 are aligned with the second auxiliary reference origin, the machine coordinates of the second auxiliary reference origin are also at this time (X0axis _ d2+ X02axis _ d 2-Xh 2_ org-Xh 02_ org, Y02axis _ d 2-Yh 2_ org).

That is, when the Y-axis coordinate of the first motion group 103 is Y02axis _ d2, the X-axis coordinate of the first motion group 103 is X02axis _ d2, the axis coordinate of the second auxiliary gantry is X2axis _ d2, and the axis coordinate of the second motion group 304 is Y2axis _ d2, the device coordinate of the second auxiliary reference origin is (X0axis _ d2+ X02axis _ d 2-Xh 2_ org-Xh 02_ org, Y02axis _ d 2-Yh 2_ org).

Let Xd2_ org be X2axis _ d2- (X0axis _ d2+ X02axis _ d 2-Xh 2_ org-Xh 02_ org),

let Yd2_ org be Y2axis _ d2- (Y02axis _ d 2-Yh 2_ org),

the relationship between the device coordinates (Xd2, Yd2) of the second auxiliary reference origin and the axis coordinates X2axis of the second auxiliary gantry and the axis coordinates Y2axis of the second motion set 304 is:

Xd2＝X2axis–Xd2_org

Yd2＝Y2axis–Yd2_org

5) the position of the transfer target Padn of the substrate is described.

As shown in fig. 7, an embodiment of the present invention provides a schematic diagram illustrating a position of a transfer target.

As known, the substrate is placed on the reference worktable in a static state, and the transfer targets on the substrate are distributed basically in an array, wherein the x direction is in cm columns, and the y direction is in cn rows.

Ideally, the distance between any two adjacent columns in the x direction is Dis _ PadX, and the distance between any two adjacent rows in the y direction is Dis _ PadY; the transfer target distribution may not be a completely regular array distribution, actually influenced by the environment or the manufacturing process.

In the embodiment of the present invention, the device coordinates (Xpadn, Ypadn) of any one transfer destination Padn are known.

6) Position specification of a device to be transferred Diem 1.

As shown in fig. 8, an embodiment of the present invention provides a schematic diagram illustrating the position of a device to be transferred.

Knowing that the offset of any one device to be transferred Diem1 with respect to the first auxiliary reference origin 202 is (Xdiem1_ ofs, ydim 1_ ofs), from the reference device coordinates of the first auxiliary reference origin of the first auxiliary table, it is known that:

the device coordinates (Xdiem1, Ydiem1) of any one device Diem1 to be transferred and the axial coordinates X1axis of the first auxiliary gantry and the axial coordinates Y1axis of the second motion group 204 are in a relationship of

Xdiem1＝X1axis–Xd1_org+Xdiem1_ofs

Ydiem1＝Y1axis–Yd1_org+Ydiem1_ofs

7) Position specification of a device to be transferred Diem 2.

As shown in fig. 9, an embodiment of the present invention provides a schematic diagram illustrating the position of another device to be transferred.

Knowing that the offset of any one of the devices to be transferred Diem2 with respect to the second auxiliary reference origin is (Xdiem2_ ofs, ydim 2_ ofs), from the reference device coordinates of the second auxiliary reference origin of the second auxiliary table, it is known that:

the device coordinates (Xdiem2, Ydiem2) of any one device Diem2 to be transferred and the axis coordinates X2axis of the second auxiliary gantry and the axis coordinates Y2axis of the second motion set 304 are in a relationship of

Xdiem2＝X2axis–Xd2_org+Xdiem2_ofs

Ydiem2＝Y2axis–Yd2_org+Ydiem2_ofs

8) And before the transfer, the fixed offset of the two transfer actuators in the first coordinate direction is adjusted.

In specific implementation, the distance between the two transfer actuators along the first coordinate direction is adjusted based on the device coordinates of the two transfer actuators and the first distance threshold. Wherein the first distance threshold is a first integer multiple of the reference pitch value; the reference distance value is the distance between any two adjacent transfer targets along the first coordinate direction; the device coordinates are coordinates relative to a reference origin.

As shown in fig. 10, an embodiment of the present invention provides a schematic diagram of a transfer actuator fixed offset adjustment.

The first motion group 104 is fine-tuned in the X direction relative to the reference gantry and the first motion group 103 is fine-tuned in the X direction relative to the reference gantry such that the fixed offset in the X direction of the transfer actuators 1 and 2 is exactly an integer multiple q of the distance Dis _ PadX in the X direction of Pad in the ideal case.

In order to achieve the above-described effects, the fine adjustment distance of the transfer actuator 1 in the X direction with respect to the reference gantry is required to be greater than Dis _ PadX/2, and the fine adjustment distance of the transfer actuator 2 in the X direction with respect to the reference gantry is required to be greater than Dis _ PadX/2.

In order to enable the transfer actuator to cope with the non-ideality of the transfer target position Pad by fine adjustment in the X direction in the subsequent transfer process, the fine adjustment distance in the X direction of the transfer actuator 1 with respect to the reference gantry is required to be larger than Dis _ PadX, and the fine adjustment distance in the X direction of the transfer actuator 2 with respect to the reference gantry is required to be larger than Dis _ PadX.

9) Description of the transfer position of a single transfer.

As shown in fig. 11, the embodiment of the present invention provides a schematic diagram of a transfer position of a single transfer.

The transfer actuator 1 and a certain device to be transferred Diem1 of the first auxiliary table are aligned with a certain transfer target Padn1 of the a-th column, and the transfer actuator 2 and a certain device to be transferred Diem2 of the second auxiliary table are aligned with a certain transfer target Padn2 of the (a + q) -th column, and the transfer is started, as shown in fig. 11.

The device coordinates of all transfer targets in column a are known as:

(Xpad_a_1,Ypad_a_1),(Xpad_a_2,Ypad_a_2)，……(Xpad_a_cn,Ypad_a_cn)，

then the mean value in the X direction of the device coordinates of all the transfer targets in the a-th column is:

Xpad_a_avg＝(Xpad_a_1+Xpad_a_2+……+Xpad_a_cn)/cn；

the device coordinates of a certain transfer target Padn1 in column a are known as: the device coordinates of a certain branch target Padn2 in (Xpad _ a _ e, Ypad _ a _ e) th column (a + n) are: (Xpad _ an _ f, Ypad _ an _ f):

9.1) to align the transfer actuator 1 with Padn1 in the a-th column and align the transfer actuator 2 with Padn2 in the (a + q) -th column, it is necessary to move the reference gantry, the first motion group 104, and the first motion group 103, and from the method of calculating the reference device coordinates of the first transfer actuator/the reference device coordinates of the second transfer actuator, it is known that:

the axis coordinates of the reference gantry should satisfy: x0bond ═ Xpad _ a _ avg + Xh1_ org + Xh01_ org;

the X-axis coordinate X01bond of the first motion set 104 — Xpad _ a _ e-Xpad _ a _ avg;

the Y-axis coordinate Y01bond of the first motion group 104 — Ypad _ a _ e + Yh1_ org;

the X-axis coordinate X02bond ═ Xpad _ an _ f-X0bond + Xh2_ org + Xh02_ org of the first kinematic group 103;

the Y-axis coordinate Y02bond of the first motion group 103 is Ypad _ an _ f + Yh2_ org;

9.2) to align a certain Diem1 of the first auxiliary table with Padn1 of the a-th column, the first auxiliary gantry and the second motion group 204 are moved, and according to the position of the device Diem1 to be transferred, it can be known that:

the axis coordinates of the first auxiliary gantry should satisfy: x1bond ═ Xpad _ a _ e + Xd1_ org-Xdiem1_ ofs;

the axis coordinates of the second motion set 204 should satisfy: y1bond ═ Ypad _ a _ e + Yd1_ org-ydim 1_ ofs;

9.3) to align a certain Diem2 of the second auxiliary table with Padn2 of the (a + q) th column, the second auxiliary gantry and the second motion group 304 are moved, and according to the position of the device Diem2 to be transferred, it can be known that:

the axis coordinates of the second auxiliary gantry should satisfy: x2bond ═ Xpad _ an _ f + Xd2_ org-Xdiem 2_ ofs;

the axis coordinates of the second motion set 304 should satisfy: y2bond ═ Ypad _ an _ f + Yd2_ org-ydim 2_ ofs;

after the above movement, transfer actuator 1 and Diem1 have been aligned with Padn1, transfer actuator 2 and Diem2 have been aligned with Padn2, and by controlling the downward pressing of transfer actuator 1 and transfer actuator 2, the corresponding Diem can be transferred to the corresponding Pad.

10) Description of the overall transfer sequence.

As shown in fig. 12, an embodiment of the invention provides a schematic diagram of a transfer sequence.

As shown in fig. 12, the S-shaped phase shift is taken as an example for explanation, and the overall shift sequence is as follows:

11.1) moving the reference gantry, the first auxiliary gantry, the first motion group 104 and the second motion group 204 so that the transfer actuator 1 and a certain device to be transferred Diem1 on the first auxiliary table are aligned with the 1 st Pad closest to the negative Y direction of the 1 st column of the substrate; the second auxiliary gantry, the first motion group 103 and the second motion group 304 are simultaneously moved so that the transfer actuator 2 and a certain device to be transferred Diem2 on the second auxiliary table are aligned with the 1 st Pad closest to the Y forward direction of the (1+ q) th column of the substrate.

11.2) simultaneously controlling the transfer actuator 1 and the transfer actuator 2 to execute the pressing movement until the Die and the Pad are attached to each other, and completing the transfer of 2 pads; and after the transfer is finished, controlling the transfer actuator 1 and the transfer actuator 2 to perform ascending movement until the transfer actuator is separated from the second auxiliary workbench.

11.3) sequentially transferring all the pads in the column according to the direction shown in the figure until the transfer of the pads in the column is completed.

11.4) then starting to carry out Pad transfer of the 2 nd column and the (q +2) th column according to the same method of the 11.1) to the 11.2) steps; until the transfer of the n-th and 2 q-th columns of Pad is completed.

11.5) continuing to perform Pad transfer of the (2q +1) th column and the (3q +1) th column according to the same method as the steps 11.1) to 11.2) until the transfer of the 3q and the 4q th columns of Pad is completed.

11.6) and so on until all Pad transfers for the entire substrate are complete.

Example 2

The embodiment of the invention provides another transfer method, which comprises the following steps:

12.1) moving the reference gantry and the first motion group 104 so that the transfer actuator 1 is aligned with the reference origin, and confirming the relationship between the apparatus coordinates of the transfer actuator 1 and the axis coordinates of the reference gantry and the axis coordinates of the first motion group 104.

With the reference origin as the entire apparatus origin, the transfer actuator 1 center point is a feature point of the first motion group 104, the first auxiliary reference origin 202 is a feature point of the second motion group 204, the transfer actuator 2 center point is a feature point of the first motion group 103, and the second auxiliary reference origin is a feature point of the second motion group 304.

12.2) moving the reference gantry, the first motion group 104, the first auxiliary gantry, and the second motion group 204 so that the transfer actuator 1 is aligned with the first auxiliary reference origin 202 of the first auxiliary table, and confirming the relationship between the apparatus coordinates of the first auxiliary reference origin 202 and the axis coordinates of the first auxiliary gantry and the axis coordinates of the second motion group 204.

12.3) moving the reference gantry and the first motion group 103 so that the transfer actuator 2 is aligned with the reference origin, and confirming the relationship between the apparatus coordinates of the transfer actuator 2 and the axis coordinates of the reference gantry and the axis coordinates of the first motion group 103.

12.4) moving the reference gantry, the first motion group 103, the second auxiliary gantry, and the second motion group 304 so that the transfer actuator 2 is aligned with the second auxiliary reference origin of the second auxiliary table, and confirming the relationship between the apparatus coordinates of the second auxiliary reference origin and the axis coordinates of the second auxiliary gantry and the axis coordinates of the second motion group 304.

12.5) before the transfer work, the first motion group 104 and the first motion group 103 are adjusted to move in the small range in the X direction so that the transfer actuators 1 and 2 are spaced apart from the transfer target Padn in the X direction by an integer q times the interval in the X direction.

12.6) moving the reference gantry, the first auxiliary gantry, the first motion group 104 and the second motion group 204 so that the transfer actuator 1 and a certain device to be transferred Diem1 on the first auxiliary table are aligned with a certain Pad of the 1 st column of the substrate; the second auxiliary gantry, the first motion group 103 and the second motion group 304 are simultaneously moved so that the transfer actuator 2 and a certain device to be transferred Diem2 on the second auxiliary table are aligned with a certain Pad of the (q +1) th column of the substrate.

12.7) simultaneously controlling the transfer actuator 1 and the transfer actuator 2 to execute the pressing motion, and simultaneously completing the transfer of 2 pads.

12.8) transferring all the pads in the column in turn until the transfer of the pads in the column is completed.

12.9) then starting to carry out Pad transfer of the 2 nd column and the (q +2) th column according to the same method of the 12.6) step; until the q-th and 2 q-th columns of Pad transfers are complete.

12.10) continuing the Pad transfer of the (2q +1) th column and the (3q +1) th column according to the same method of the step 12.6) until the completion of the Pad transfer of the 3q th column and the 4q th column.

12.11) and so on until all Pad transfers for the entire substrate are complete.

Example 3

An embodiment of the present invention provides a transfer device, as shown in fig. 13, including:

a first adjusting unit 1301, configured to adjust a distance between the two transfer actuators along the first coordinate direction based on the device coordinates of the two transfer actuators and a first distance threshold; wherein the first distance threshold is a first integer multiple of the reference pitch value; the reference distance value is the distance between any two adjacent transfer targets along the first coordinate direction; the device coordinates are coordinates relative to a reference origin;

a second adjusting unit 1302, configured to move the reference gantry so that the two transfer actuators are aligned with one transfer target respectively; moving the two auxiliary gantries to enable the two transfer actuators to be respectively aligned to a device to be transferred;

and a transfer unit 1303 for controlling the two transfer actuators to transfer the aligned devices to be transferred to the aligned transfer targets, respectively.

the first adjusting unit 1301 is specifically configured to:

based on the device coordinates of the two transfer actuators and the first distance threshold, the two motion sets are moved to adjust the distance of the two transfer actuators in the first coordinate direction.

Optionally, the two transfer actuators comprise a first transfer actuator and a second transfer actuator; along the direction of a first coordinate axis, a first transfer actuator and a second transfer actuator are respectively positioned at two sides of the reference gantry; the second adjusting unit 1302 is specifically configured to:

the second adjusting unit 1302 is further configured to: and moving the auxiliary gantry and the second motion group based on the equipment coordinates of the auxiliary reference original points of the two auxiliary worktables so that the devices to be transferred on the two auxiliary worktables are respectively aligned with one transfer target in the first selected column and the second selected column of the substrate.

Optionally, as shown in fig. 14, the apparatus further includes:

a transfer column selecting unit 1401 configured to select two columns of transfer targets, which are not transferred and have a distance along the first coordinate direction as a first distance threshold, from the substrate as a first selected column and a second selected column.

Optionally, the number of columns of the transfer targets of the substrate is a second integer; the second integer is an even multiple of the first integer; as shown in fig. 15, the apparatus further includes a loop transfer unit 1501, the loop transfer unit 1501 is configured to:

and transferring each transfer target newly determined to be in the first selected column and the second selected column until all the transfer targets carried by the substrate are transferred.

Optionally, as shown in fig. 16, the apparatus further includes a first calibration unit 1601, where the first calibration unit 1601 is configured to:

moving the reference gantry and a first motion group connected with the first transfer actuator to enable the first transfer actuator to be superposed with the reference origin, and calibrating the reference equipment coordinate of the first transfer actuator; the reference device coordinates of the first transfer actuator are used for determining the device coordinates of the first transfer actuator;

moving the reference gantry and a first motion group connected with a second transfer actuator to enable the second transfer actuator to coincide with a reference origin point, and calibrating the reference equipment coordinate of the second transfer actuator; the reference device coordinates of the second transfer actuator are used to determine the device coordinates of the second transfer actuator.

Optionally, the auxiliary tables include a first auxiliary table and a second auxiliary table, and the first auxiliary table and the second auxiliary table are respectively located at two sides of the reference gantry along the first coordinate direction; the auxiliary reference original points corresponding to the first auxiliary workbench and the second auxiliary workbench are respectively a first auxiliary reference original point and a second auxiliary reference original point; as shown in fig. 17, the apparatus further includes a second calibration unit 1701, the second calibration unit 1701 being configured to:

moving the reference gantry, the first motion group, the first auxiliary gantry and the second motion group to enable the first transfer actuator to coincide with the first auxiliary reference origin, and calibrating the reference equipment coordinates of the first auxiliary reference origin; the reference device coordinates of the first auxiliary reference origin are used for determining the device coordinates of the first auxiliary reference origin;

Optionally, the transfer unit 1303 is specifically configured to:

and controlling the two transfer actuators to respectively move along the third coordinate direction relative to the reference gantry so as to transfer the aligned to-be-transferred device to the aligned transfer target.

Alternatively, the reference pitch value is a pitch of any two adjacent transfer targets in the first coordinate direction when the pitches of the adjacent transfer targets are the same.

An embodiment of the present invention provides an electronic device 1800, including a memory 1801 and a processor 1802, as shown in fig. 18, wherein:

the memory is used for storing a computer program;

the processor is configured to read the program in the memory and execute the steps of the transfer method as provided in any of the above embodiment 1.

The present invention also provides a computer program medium having stored thereon a computer program that, when executed by a processor, implements the steps of any of the transfer methods provided in embodiment 1 above.

In the several embodiments provided in the present application, it should be understood that the disclosed system, apparatus and method may be implemented in other manners. For example, the above-described apparatus embodiments are merely illustrative, and for example, the division of the modules is merely a logical division, and in actual implementation, there may be other divisions, for example, multiple modules or components may be combined or integrated into another system, or some features may be omitted, or not implemented. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection through some interfaces, devices or modules, and may be in an electrical, mechanical or other form.

The modules described as separate parts may or may not be physically separate, and parts displayed as modules may or may not be physical modules, may be located in one place, or may be distributed on a plurality of network modules. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of the present embodiment.

In addition, functional modules in the embodiments of the present application may be integrated into one processing module, or each of the modules may exist alone physically, or two or more modules are integrated into one module. The integrated module can be realized in a hardware mode, and can also be realized in a software functional module mode. The integrated module, if implemented in the form of a software functional module and sold or used as a stand-alone product, may be stored in a computer readable storage medium.

In the above embodiments, the implementation may be wholly or partially realized by software, hardware, firmware, or any combination thereof. When implemented in software, may be implemented in whole or in part in the form of a computer program product.

The computer program product includes one or more computer instructions. When loaded and executed on a computer, cause the processes or functions described in accordance with the embodiments of the application to occur, in whole or in part. The computer may be a general purpose computer, a special purpose computer, a network of computers, or other programmable device. The computer instructions may be stored in a computer readable storage medium or transmitted from one computer readable storage medium to another, for example, from one website site, computer, server, or data center to another website site, computer, server, or data center via wired (e.g., coaxial cable, fiber optic, Digital Subscriber Line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.). The computer-readable storage medium can be any available medium that a computer can store or a data storage device, such as a server, a data center, etc., that is integrated with one or more available media. The usable medium may be a magnetic medium (e.g., floppy disk, hard disk, magnetic tape), an optical medium (e.g., DVD), or a semiconductor medium (e.g., Solid State Disk (SSD)), among others.

The technical solutions provided by the present application are introduced in detail, and the present application applies specific examples to explain the principles and embodiments of the present application, and the descriptions of the above examples are only used to help understand the method and the core ideas of the present application; meanwhile, for a person skilled in the art, according to the idea of the present application, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present application.

As will be appreciated by one skilled in the art, embodiments of the present application may be provided as a method, system, or computer program product. Accordingly, the present application may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, the present application may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, and the like) having computer-usable program code embodied therein.

The present application is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems), and computer program products according to the application. It will be understood that each flow and/or block of the flow diagrams and/or block diagrams, and combinations of flows and/or blocks in the flow diagrams and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.

These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.

These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.

It will be apparent to those skilled in the art that various changes and modifications may be made in the present application without departing from the spirit and scope of the application. Thus, if such modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is intended to include such modifications and variations as well.

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Transfer equipment, method, device, electronic equipment and medium

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