阅读说明：本技术 智能栈板 (Intelligent pallet ) 是由 颜晖展 陈健福 于 2018-12-19 设计创作，主要内容包括：一种智能栈板,包含栈板座及感测装置。所述感测装置包括至少一设置在所述栈板座上的感测器。通过在所述栈板座上设置所述感测装置,能在所述智能栈板承载物件的运送过程中,即时侦测所述栈板座所承受的重量状态或通过远端监控定位所述栈板座的位置资讯。(An intelligent pallet comprises a pallet base and a sensing device. The sensing device comprises at least one sensor arranged on the pallet seat. By arranging the sensing device on the pallet seat, the weight state borne by the pallet seat can be detected in real time or the position information of the pallet seat can be positioned by remote monitoring in the conveying process of the intelligent pallet bearing object.)

1. An intelligent pallet; the method is characterized in that:

the intelligent pallet comprises a pallet seat and a sensing device, wherein the sensing device comprises at least one sensor arranged on the pallet seat.

2. The intelligent pallet according to claim 1 wherein: the sensing device includes a plurality of sensors.

3. The intelligent pallet according to claim 1 wherein: the sensor comprises a pressure sensor.

4. The intelligent pallet according to claim 1 wherein: the sensor comprises a position sensor.

5. The intelligent pallet according to claim 1 wherein: the sensor comprises a photoelectric sensor.

6. The intelligent pallet according to claim 3 wherein: the sensing device further comprises a weight prompter arranged on the pallet seat, the pressure sensor is arranged at the bottom of the pallet seat and electrically connected with the weight prompter, and the sensed weight state of the pallet seat is displayed on the weight prompter or prompted by the weight prompter.

7. The intelligent pallet according to claim 1 wherein: the pallet seat comprises a base body and a supporting module arranged on the base body.

8. The intelligent pallet according to claim 7 wherein: the supporting module comprises a shockproof sheet.

9. The intelligent pallet according to claim 7 wherein: the supporting module comprises two shockproof pieces which are arranged at intervals and a plurality of shockproof blocks which are arranged between the shockproof pieces in an array mode.

10. The intelligent pallet according to claim 7 or 8 wherein: each shockproof sheet is provided with an inner layer, an outer layer and a porous structure positioned between the inner layer and the outer layer.

11. The intelligent pallet according to claim 7 wherein: the pallet seat further comprises a plurality of grooves formed by sinking the upper surface of the base body, and a plurality of shockproof pieces respectively arranged in the grooves and used for supporting the supporting module.

12. The intelligent pallet according to claim 11 wherein: the shockproof piece is a shockproof rubber block.

13. The intelligent pallet according to claim 11 wherein: the shockproof piece is a spiral shockproof device.

14. The intelligent pallet according to claim 11 wherein: the shockproof piece is formed by respectively and alternately arranging a plurality of shockproof rubber blocks and a plurality of spiral shockproof devices in the groove.

15. The intelligent pallet according to claim 13 or 14 wherein: the spiral shock absorbers are arranged towards the same direction.

16. The intelligent pallet according to claim 9 wherein: the shock-proof block is made of shock-absorbing material.

17. The intelligent pallet according to claim 16 wherein: the shock absorption material is silica gel.

18. The intelligent pallet according to claim 8 or 9 wherein: the shockproof sheet is made of polypropylene.

19. The intelligent pallet according to claim 1 wherein: also includes an identification means.

20. The intelligent pallet according to claim 19 wherein: the identification means is a bar code or a radio frequency identification tag.

21. The intelligent pallet according to claim 1 wherein: the sensing device also comprises a transmission device used for outputting the data sensed by the sensing device, and the transmission device is electrically connected with the sensing device.

22. The intelligent pallet according to claim 21 wherein: the transmission device is a wireless transmission device.

23. The intelligent pallet according to claim 1 wherein: the solar charging device is characterized by further comprising a solar charging module arranged on the pallet base, and the solar charging module is electrically connected with the sensing device.

Technical Field

The present invention relates to a carrier, and more particularly, to an intelligent pallet capable of transporting objects.

Background

Nowadays, science and technology products are increasingly precise, and therefore, the protection requirements in the transportation process are also increasingly increased. For example, wafers used in semiconductor manufacturing processes are typically transported in an environment outside the semiconductor fab by placing the wafers in a clean substrate container, such as a front opening wafer pod (FOSB), which is typically carried by a pallet when transporting a plurality of clean substrate containers.

However, the conventional pallet does not have a protection or buffering structure and a monitoring or monitoring function, and cannot provide sufficient protection, and a carrier or a transporter cannot confirm the state of the loaded wafer, and the quality of the wafer is often affected by factors such as collision during the transportation process of the clean substrate container carried by the pallet, so it is necessary to detect and control the state of the clean substrate container carried by the pallet at any time during the transportation process.

Disclosure of Invention

The invention aims to provide an intelligent pallet.

The intelligent pallet comprises a pallet seat and a sensing device, wherein the sensing device comprises at least one sensor arranged on the pallet seat.

The invention discloses an intelligent pallet, wherein a sensing device comprises a plurality of sensors.

The sensor comprises a pressure sensor.

The sensor comprises a position sensor.

The sensor comprises a photoelectric sensor.

The sensing device of the intelligent pallet comprises a weight prompter arranged on the pallet seat, wherein the pressure sensor is arranged at the bottom of the pallet seat and is electrically connected with the weight prompter, so that the sensed weight state of the pallet seat is displayed on the weight prompter or prompted by the weight prompter.

The invention discloses an intelligent pallet, wherein a pallet seat comprises a base body and a supporting module arranged on the base body.

According to the intelligent pallet, the supporting module comprises the shockproof sheet.

The support module comprises two shockproof sheets arranged at intervals and a plurality of shockproof blocks arranged between the shockproof sheets in an array mode.

According to the intelligent pallet, each shockproof sheet is provided with an inner layer, an outer layer and a porous structure located between the inner layer and the outer layer.

The intelligent pallet comprises a base body, a plurality of grooves and a plurality of shockproof pieces, wherein the grooves are formed in the upper surface of the base body in a sunken mode, and the shockproof pieces are arranged in the grooves respectively and used for supporting the supporting modules.

The invention relates to an intelligent pallet, wherein a shockproof piece is a shockproof rubber block.

According to the intelligent pallet, the shockproof piece is a spiral shockproof device.

The invention relates to an intelligent pallet, wherein a shockproof piece is formed by respectively and alternately arranging a plurality of shockproof rubber blocks and a plurality of spiral shockproof devices in a groove.

According to the intelligent pallet, the spiral shock absorbers are arranged in the same direction.

The intelligent pallet of the invention is characterized in that the shockproof block is made of shock-absorbing materials.

According to the intelligent pallet, the shock absorption material is silica gel.

The intelligent pallet of the invention is characterized in that the shockproof sheet is made of polypropylene.

The intelligent pallet of the invention also comprises an identification means.

The intelligent pallet of the invention adopts the identification means of bar codes or radio frequency identification labels.

The intelligent pallet also comprises a transmission device for outputting the data sensed by the sensing device, and the transmission device is electrically connected with the sensing device.

The invention relates to an intelligent pallet, wherein a transmission device is a wireless transmission device.

The intelligent pallet also comprises a solar charging module arranged on the pallet seat, and the solar charging module is electrically connected with the sensing device.

The invention has the beneficial effects that: by arranging the sensing device on the pallet seat, the weight state borne by the pallet seat can be detected in real time or the position information of the pallet seat can be monitored and positioned by a remote end in the conveying process of the object borne by the intelligent pallet.

Drawings

Fig. 1 is a perspective view illustrating one embodiment of the intelligent pallet of the present invention;

FIG. 2 is a perspective view illustrating the sensing device of the embodiment;

FIG. 3 is an enlarged view of a portion of the pallet base illustrating a shock absorbing rubber block of the pallet base;

FIG. 4 is an enlarged view of a portion of the pallet base illustrating a helical shock absorber of the pallet base;

FIG. 5 is a side view illustrating a support module of the embodiment; and

fig. 6 is a side view illustrating the structure of two anti-vibration plates of the supporting module.

Detailed Description

The present invention will be described in detail below with reference to the accompanying drawings and examples.

Referring to fig. 1 and 2, an embodiment of the intelligent pallet of the present invention is suitable for carrying a plurality of objects, and the intelligent pallet includes a pallet base 2, a sensing device 3 disposed on the pallet base 2, an identification means 4 disposed on the pallet base 2, and a transmission device 5. The object may be, for example, a cleaning substrate container, which may be a sealed type cleaning container, such as a reticle pod, a wafer pod, or the like, conventionally used in various semiconductor, solar, photovoltaic, or the like industries. In this embodiment, a front opening wafer pod (FOSB) is used as an example.

The sensing device 3 includes a plurality of sensors disposed on the pallet base 2, and can be used for sensing the status of the pallet base 2, and the type of the sensors is not particularly limited, and may be, for example, a photoelectric sensor, a pressure sensor, or a position sensor, as required. Preferably, in the present embodiment, the sensing device 3 includes a pressure sensor 31 disposed on the pallet base 2, and a weight indicator 32 and a position sensor 33 disposed on the pallet base 2.

Specifically, the pressure sensor 31 is disposed at a bottom of the pallet base 2, and the weight prompter 32 and the position sensor 33 are disposed around sides of the pallet base 2. The pressure sensor 31 is electrically connected to the weight indicator 32 and is used for sensing the loading state of the pallet base 2 for loading the objects, and the light signal of the weight indicator 32 can be used for displaying the loading state to prevent abnormal states such as short package material or missing wafers. In addition, the position sensor 33 can be connected to an external carrying device for remote connection, so as to receive the position information and position tracking of the intelligent pallet.

The intelligent pallet of this embodiment is further provided with the identification means 4 for identifying the electronic information of the intelligent pallet, and the identification means 4 may be a barcode, including a one-dimensional barcode or a two-dimensional barcode such as a quick response matrix code (QR code), or a wireless radio frequency identification tag (RFID tag), for easy identification or management of an operator or automation equipment. In addition, the transmission device 5 is electrically connected to the sensing device 3 for receiving and outputting the data sensed by the sensing device 3. The transmission device 5 can be a wired electronic device port or a wireless transmission device, which is not limited in this embodiment. The transmission device 5 is electrically connected with the sensing device 3 to receive the data sensed by the sensing device, and then outputs the data to the outside for monitoring or recording.

It should be noted that the intelligent pallet can further include a battery unit (not shown) for supplying power required by the sensing device 3 and the transmission device 5, and besides the battery unit being a detachably mounted dry battery, a solar charging module electrically connected to the sensing device 3 and the transmission device 5 can be additionally provided to generate electric energy by itself to provide the power required by the sensor.

Referring to fig. 3 and 4, the pallet base 2 includes a rectangular base 21, a plurality of grooves 22 recessed from an upper surface of the base 21, a plurality of shock-proof members 23 respectively disposed in the grooves 22, and a supporting module 25 disposed on the base 21, and the shock-proof members 23 are used for supporting the supporting module 25.

The vibration-proof member 23 is used for supporting the carrier module 25 and isolating the vibration transmitted from the substrate 21. The shock absorbing member 23 may be made of various materials or structures, such as a shock absorbing rubber block 231 made of natural rubber, silica gel, or a spiral shock absorber 232 made of metal, plastic, or composite material. The present embodiment is not limited thereto, as long as the supporting and shockproof effects can be achieved.

Preferably, the grooves 22 are respectively arranged on the base 21 in an array and equally divided, in this embodiment, nine grooves 22 are taken as an example for illustration, so that the nine grooves 22 are respectively formed at the center, four corners and between the corners of the base 21, and the vibration-proof members 23 are respectively a plurality of vibration-proof rubber blocks 231 and a plurality of spiral vibration-proof devices 232. In detail, the anti-vibration rubber blocks 231 are disposed in the grooves 22 at four corners, and the spiral anti-vibration devices 232 are disposed between the anti-vibration rubber blocks 231, that is, the anti-vibration elements 23 and the spiral anti-vibration devices 232 are alternately disposed on the outer periphery of the base 21.

Wherein, the shockproof rubber block 231 mainly provides isolation for the shock in the direction vertical to the ground; when the intelligent pallet carries an object such as a clean substrate container, the helical dampers 232 are arranged with their axes all in the same direction toward the wafer stacking direction in the clean substrate container to provide an isolation effect against jolts or vibrations along that direction. A better shock-proof effect is provided by the two differently configured shock-proof members 23.

Referring to fig. 5 and 6, the supporting module 25 includes two spaced shock-proof plates 251 and a plurality of shock-proof blocks 255 arranged in an array between the shock-proof plates 251. Each of the damping sheets 251 has an inner layer 252, an outer layer 253, and a porous structure 254 between the inner layer 252 and the outer layer 253. Preferably, the porous structure 254 may be a honeycomb structure. Therefore, the weight of the shockproof sheet 251 can be greatly reduced on the premise of extremely high structural strength, and the effect of saving the transportation cost can be achieved. It should be noted that the shock absorbing block 255 is made of a shock absorbing material, such as natural rubber, silicone, etc., in this embodiment, the shock absorbing material is illustrated by taking silicone as an example, and in addition, the supporting module 25 is not limited to use two shock absorbing pieces 251, and only a single shock absorbing piece 251 with a porous structure 254 may be used.

The material suitable for the shockproof sheet 251 is selected from polypropylene (PP), and the support module 25 has the advantages of light weight, high bearing capacity and durability, water resistance, dust resistance, good heat insulation and the like by using the polypropylene (PP) and matching a porous (honeycomb) structure; the base 21 of the pallet base 2 is manufactured by gas-assisted injection molding, blow molding or double-layer blister molding, so that the pallet base 2 has a hollow lightweight design, the overall strength is improved, the sinking, shrinking and warping deformation at the thick position are avoided, and the molding cycle is shortened.

The supporting module 25, the shockproof rubber block 231 and the spiral shockproof device 232 are arranged on the pallet base 2 to cooperate with each other, so as to enhance the shockproof effect when the object is loaded.

In summary, the sensing device 3 is disposed on the pallet base 2, so that the weight status borne by the pallet base 2 can be detected in real time or the position information of the pallet base 2 can be monitored and positioned by remote monitoring during the transportation process of the intelligent pallet carrying the objects, and in addition, the supporting module 25 is disposed on the base 21 and is matched with the anti-vibration rubber block 231 and the spiral anti-vibration device 232, so as to enhance the bearing gravity and provide a shock absorption and buffering effect for the objects carried thereon, thereby achieving the purpose of the present invention.