阅读说明：本技术 智能栈板箱 (Intelligent plank case ) 是由 颜晖展 陈健福 于 2018-12-03 设计创作，主要内容包括：一种智能栈板箱,适用于承载并容装至少一洁净基板容器,包含栈板座、箱体,及感测装置。箱体包括可分离地组合在该栈板座上四周的周壁,及可分离地结合在该周壁上的上盖,该栈板座与该周壁共同界定出用来容装该至少一洁净基板容器的容置空间,且该容置空间的上、下端分别为该上盖及该栈板座封闭。感测装置包括至少一设置在该栈板座或该箱体上以感测该容置空间中或该栈板座的状态的感测器。在栈板座或箱体上设置感测器,能在智能栈板箱的运送过程中即时侦测该箱体内的环境及所容置物品多寡与重量等状态,来辅助确认甚至控制箱体内的环境状态,确保其中所容置的物品不致受到环境条件的变化而被污染甚或受损。(An intelligent pallet box is suitable for bearing and containing at least one clean substrate container and comprises a pallet seat, a box body and a sensing device. The box body comprises a peripheral wall and an upper cover, wherein the peripheral wall is detachably combined on the periphery of the pallet seat, the upper cover is detachably combined on the peripheral wall, the pallet seat and the peripheral wall jointly define a containing space for containing the at least one clean substrate container, and the upper end and the lower end of the containing space are respectively sealed by the upper cover and the pallet seat. The sensing device comprises at least one sensor which is arranged on the pallet seat or the box body and is used for sensing the state of the pallet seat or the accommodating space. The sensor is arranged on the pallet seat or the box body, so that the states of the environment in the box body, the quantity and the weight of the accommodated articles and the like can be detected in real time in the conveying process of the intelligent pallet box, the environment state in the box body can be confirmed in an auxiliary mode and even controlled, and the accommodated articles cannot be polluted or damaged due to the change of the environment condition.)

1. An intelligent plank box is suitable for bearing and containing at least one clean substrate container; the method is characterized in that:

the intelligent pallet box comprises a pallet seat, a box body and a sensing device, wherein the box body comprises a peripheral wall and an upper cover, the peripheral wall is detachably combined on the pallet seat, the upper cover is detachably combined on the peripheral wall, the pallet seat and the peripheral wall jointly define an accommodating space for accommodating the at least one clean substrate container, the upper end and the lower end of the accommodating space are respectively the upper cover and the pallet seat, the upper cover and the pallet seat are closed, and the sensing device comprises at least one sensor, the sensor is arranged on the pallet seat or the box body and used for sensing the state of the accommodating space or the pallet seat.

2. The intelligent pallet box of claim 1, wherein: the positioning buffer unit comprises a buffer bottom plate arranged on the pallet seat and a buffer top plate arranged close to the upper cover.

3. The intelligent pallet box of claim 2, wherein: the positioning buffer unit further comprises a buffer clapboard arranged between the buffer bottom plate and the buffer top plate, and the buffer clapboard separates the accommodating space from the buffer bottom plate and the buffer top plate to form a first space area and a second space area which are used for accommodating at least one clean substrate container respectively.

4. The intelligent pallet box of claim 2, wherein: the positioning buffer unit further comprises a buffer base material arranged between the upper cover and the buffer top plate.

5. The intelligent pallet box of claim 2 or 3, wherein: the material of the positioning buffer unit is selected from foaming materials.

6. The intelligent pallet box of claim 5, wherein: the foamed material may be selected from Polyethylene (PE), polypropylene (PP) or Ethylene Vinyl Acetate (EVA).

7. The intelligent pallet box of claim 5, wherein: the foaming ratio of the foaming material is between 10 and 60 times.

8. The intelligent pallet box of claim 5, wherein: the foaming material is an antistatic foaming material, and the impedance value of the foaming material is less than 10¹²Ω/sq。

9. The intelligent pallet box of claim 2, wherein: the pallet seat comprises a base body and a bearing module arranged between the base body and the buffer bottom plate.

10. The intelligent pallet box of claim 9, wherein: the bearing module comprises a shockproof sheet.

11. The intelligent pallet box of claim 10, wherein: the bearing module comprises two shockproof pieces which are arranged at intervals.

12. The intelligent pallet box of claim 11, wherein: the bearing module comprises a plurality of shockproof blocks which are arranged among the shockproof sheets in an array mode.

13. The intelligent stacker box of claim 10, 11 or 12, wherein: each shockproof sheet is provided with an inner layer, an outer layer and a porous structure positioned between the inner layer and the outer layer.

14. The intelligent pallet box of claim 9, wherein: the pallet seat further comprises a plurality of grooves which are recessed from the upper surface of the base body to the direction far away from the accommodating space.

15. The intelligent pallet box of claim 14, wherein: the pallet base further comprises a plurality of shockproof pieces which are respectively arranged in the grooves and used for supporting the bearing module.

16. The intelligent pallet box of claim 15, wherein: any one of the shockproof pieces is a shockproof rubber block.

17. The intelligent pallet box of claim 15, wherein: any one of the shock absorbing members is a helical shock absorber.

18. The intelligent pallet box of claim 15, wherein: the plurality of shockproof pieces comprise a plurality of shockproof rubber blocks and a plurality of spiral shockproof devices, and the plurality of shockproof rubber blocks and the plurality of spiral shockproof devices are respectively and alternately arranged in the plurality of grooves.

19. The intelligent stacker box of claim 17 or 18, wherein: when the pallet base comprises a plurality of the spiral shock absorbers, the spiral shock absorbers are arranged towards the same direction.

20. The intelligent stacker box of claim 10, 11 or 12, wherein: the shockproof sheet is made of polypropylene.

21. The intelligent pallet box of claim 13, wherein: the shockproof sheet is made of polypropylene.

22. The intelligent pallet box of claim 1, wherein: the peripheral wall has an inner layer, an outer layer, and a porous structure between the inner layer and the outer layer.

23. The intelligent pallet box of claim 1, wherein: the pallet seat and the upper cover are formed by gas-assisted injection molding, blow molding or double-layer plastic suction molding.

24. The intelligent pallet box of claim 22, wherein: the peripheral wall also comprises at least one light-permeable window which penetrates through the inner layer, the porous structure and the outer layer.

25. The intelligent pallet box of claim 1, wherein: the peripheral wall is provided with four peripheral plates which are connected with each other, wherein two opposite peripheral plates are respectively provided with at least one bending part which extends along the height direction of the peripheral plates, when the peripheral wall is separated from the pallet seat, the other two opposite peripheral plates can be driven to move oppositely by bending the bending parts, so that the peripheral wall is in a folding state.

26. The intelligent pallet box of claim 25, wherein: at least one of the peripheral plates is provided with a side opening which is adjacent to the upper cover and communicated with the accommodating space and a lifting part used for closing or exposing the side opening, the box body further comprises a plurality of connecting pieces, the connecting pieces are correspondingly arranged on the box body and the lifting part respectively, and when the lifting part closes or exposes the side opening, the lifting part is fixed through the connecting pieces.

27. The intelligent pallet box of claim 25, wherein: the height from the upper periphery of the peripheral wall to the lower periphery of the peripheral wall is less than or equal to the length and width of the pallet seat.

28. The intelligent pallet box of claim 1, wherein: the upper and lower peripheries of the peripheral wall are respectively provided with a concave part which is matched and positioned with the upper cover and the pallet seat.

29. The intelligent pallet box of claim 1, wherein: the sensing device includes a plurality of sensors, and the sensors may be selected from a temperature sensor, a humidity sensor, a pressure sensor, a position sensor, or any combination of the foregoing.

30. The intelligent pallet box of claim 1, wherein: the sensing device comprises a temperature sensor and a temperature controller which are positioned in the accommodating space.

31. The intelligent pallet box of claim 1, wherein: the sensing device comprises a humidity sensor and a humidity controller, wherein the humidity sensor is positioned in the accommodating space.

32. The intelligent pallet box of claim 1, wherein: the sensing device comprises a pressure sensor, the intelligent plank box is provided with a weight prompter for displaying or prompting the weight state of the intelligent plank box, and the pressure sensor is electrically connected with the weight prompter.

33. The intelligent pallet box of claim 1, wherein: and a solar charging device is arranged on the upper cover, the peripheral wall or the outer side surface of the pallet seat and is electrically connected with the sensing device.

34. The intelligent pallet box of claim 1, wherein: also includes an identification means.

35. The intelligent stacker box of claim 34, wherein: the identification means is a bar code or a radio frequency identification tag.

36. The intelligent pallet box of claim 1, wherein: the sensing device also comprises a transmission device used for outputting the data sensed by the sensing device, and the transmission device is electrically connected with the sensing device.

37. The intelligent stacker box of claim 36, wherein: the transmission device is a wireless transmission device.

38. The intelligent pallet box of claim 1, wherein: and the clamping device also comprises a plurality of clamping grooves arranged on the upper cover.

39. The intelligent stacker box of claim 38, wherein: the clamping device comprises a clamping groove, a plurality of elastic pieces and clamping pieces, wherein the clamping pieces are respectively positioned in the clamping groove, the clamping pieces are respectively connected with the elastic pieces and are respectively at least partially positioned in the clamping groove, the peripheral wall is provided with a plurality of through holes or clamping grooves respectively corresponding to the clamping pieces, and each clamping piece can move between a closing position where the clamping piece is clamped into the corresponding through hole or clamping groove and an opening position away from the corresponding through hole or clamping groove.

40. The intelligent stacker box of claim 39, wherein: the anti-theft device is arranged on the upper cover.

41. The intelligent stacker box of claim 40, wherein: the anti-theft device comprises an electromagnetic lock, and the electromagnetic lock can prop against or release the plurality of clamping pieces through the plurality of elastic pieces to enable the clamping pieces to move between the closing position and the opening position.

Technical Field

The present invention relates to a pallet box, and more particularly, to an intelligent pallet box for carrying and housing a clean substrate container for a semiconductor.

Background

In semiconductor processing, wafers are the primary substrates that are transported in the ambient environment outside of the semiconductor fab, typically by placing the wafers in a clean substrate container, such as a front opening wafer shipping box (FOSB). When transporting a plurality of clean substrate containers, the clean substrate containers are typically carried or housed by a pallet or pallet box.

However, none of the conventional pallets have a protection or buffering structure and a monitoring or monitoring function, and thus cannot provide sufficient protection and enable a carrier or a transporter to confirm the status of a loaded wafer. Although the existing plank box can provide simple protection with the box body, the protection effect is not good on one hand, and on the other hand, the prior plank box does not have the monitoring or monitoring function, and the prior plank box has huge volume, which causes difficulties in storage and storage when not used. Meanwhile, both of them cannot be used with advanced automation equipment in the semiconductor industry, thereby reducing the operation time efficiency.

Disclosure of Invention

The invention aims to provide an intelligent plank case.

The invention discloses an intelligent pallet box which is suitable for bearing and containing at least one clean substrate container, and comprises a pallet seat, a box body and a sensing device, wherein the box body comprises a peripheral wall separably combined on the periphery of the pallet seat and an upper cover separably combined on the peripheral wall, the pallet seat and the peripheral wall jointly define a containing space for containing the at least one clean substrate container, the upper end and the lower end of the containing space are respectively sealed by the upper cover and the pallet seat, and the sensing device comprises at least one sensor which is arranged on the pallet seat or the box body and is used for sensing the state of the containing space or the pallet seat.

The intelligent pallet box also comprises a positioning buffer unit arranged in the accommodating space, wherein the positioning buffer unit comprises a buffer bottom plate arranged on the pallet seat and a buffer top plate arranged adjacent to the upper cover.

According to the intelligent plank box, the positioning buffer unit further comprises a buffer clapboard arranged between the buffer bottom plate and the buffer top plate, and the buffer clapboard separates the accommodating space from the buffer bottom plate and the buffer top plate to form a first space area and a second space area which are used for accommodating at least one clean substrate container respectively.

According to the intelligent plank box disclosed by the invention, the positioning buffer unit further comprises a buffer base material arranged between the upper cover and the buffer top plate.

According to the intelligent plank box, the positioning buffer units are made of foam materials.

According to the intelligent plank box disclosed by the invention, the foaming material can be selected from Polyethylene (PE), polypropylene (PP) or ethylene-vinyl acetate copolymer (EVA).

According to the intelligent plank box disclosed by the invention, the foaming ratio of the foaming material is between 10 and 60 times.

According to the intelligent plank box, the foaming material is an antistatic foaming material, and the impedance value of the foaming material is less than 10¹²Ω/sq。

According to the intelligent pallet box, the pallet seat comprises a base body and a bearing module arranged between the base body and the buffer bottom plate.

According to the intelligent plank box, the bearing module comprises the shockproof sheet.

According to the intelligent plank box, the bearing module comprises the two shockproof pieces which are arranged at intervals.

According to the intelligent plank box disclosed by the invention, the bearing module comprises a plurality of shockproof blocks which are arranged among the shockproof pieces in an array mode.

According to the intelligent plank box, each shockproof sheet is provided with an inner layer, an outer layer and a porous structure located between the inner layer and the outer layer.

According to the intelligent pallet box, the pallet seat further comprises a plurality of grooves which are recessed from the upper surface of the base body to the direction far away from the accommodating space.

According to the intelligent pallet box, the pallet seat further comprises a plurality of shockproof pieces which are respectively arranged in the grooves and used for supporting the bearing module.

According to the intelligent plank box, any shockproof piece is a shockproof rubber block.

According to the intelligent plank box, any one shockproof piece is a spiral shockproof device.

According to the intelligent plank box, the shockproof pieces comprise the shockproof rubber blocks and the spiral shockproof devices, and the shockproof rubber blocks and the spiral shockproof devices are arranged in the grooves in an interactive mode respectively.

According to the intelligent pallet box, when the pallet seat comprises the plurality of spiral shock absorbers, the spiral shock absorbers are arranged in the same direction.

According to the intelligent plank box, the shockproof sheet is made of polypropylene.

The peripheral wall of the intelligent plank case is provided with an inner layer, an outer layer and a porous structure positioned between the inner layer and the outer layer.

According to the intelligent pallet box, the pallet seat and the upper cover are formed by gas-assisted injection molding, blowing molding or double-layer plastic suction molding.

The peripheral wall of the intelligent plank case further comprises at least one light-permeable window penetrating through the inner layer, the porous structure and the outer layer.

The peripheral wall of the intelligent plank case is provided with four peripheral plates which are connected with each other, wherein two opposite peripheral plates are respectively provided with at least one bending part which extends along the height direction of the peripheral plates, and when the peripheral wall is separated from the pallet seat, the other two opposite peripheral plates can be driven to move oppositely by bending the bending parts, so that the peripheral wall is in a folding state.

According to the intelligent plank case, at least one peripheral plate is provided with a side opening which is adjacent to the upper cover and communicated with the accommodating space, a lifting plate part used for closing or exposing the side opening, the case body further comprises a plurality of connecting pieces, the connecting pieces are correspondingly arranged on the case body and the lifting plate part respectively, and when the side opening is closed or exposed by the lifting plate part, the lifting plate part is fixed through the connecting pieces.

According to the intelligent pallet box, the height from the upper periphery of the peripheral wall to the lower periphery of the peripheral wall is less than or equal to the length and width of the pallet seat.

According to the intelligent pallet box, the upper periphery and the lower periphery of the peripheral wall are respectively provided with the concave parts which are matched and positioned with the upper cover and the pallet seat.

According to the intelligent plank box, the sensing device comprises a plurality of sensors, and the sensors can be selected from a temperature sensor, a humidity sensor, a pressure sensor, a position sensor or any combination of the sensors.

According to the intelligent plank box disclosed by the invention, the sensing device comprises a temperature sensor and a temperature controller which are positioned in the accommodating space.

According to the intelligent plank box disclosed by the invention, the sensing device comprises a humidity sensor and a humidity controller, wherein the humidity sensor is positioned in the accommodating space.

According to the intelligent plank box, the sensing device comprises the pressure sensor, the intelligent plank box is provided with the weight prompter for displaying or prompting the weight state of the intelligent plank box, and the pressure sensor is electrically connected with the weight prompter.

According to the intelligent pallet box, the solar charging device is arranged on the upper cover, the peripheral wall or the outer side face of the pallet seat and is electrically connected with the sensing device.

The intelligent plank box also comprises an identification means.

The identification means of the intelligent plank box is a bar code or a wireless radio frequency identification label.

The intelligent plank box also comprises a transmission device for outputting the data sensed by the sensing device, and the transmission device is electrically connected with the sensing device.

According to the intelligent plank box, the transmission device is a wireless transmission device.

The intelligent plank box also comprises a plurality of clamping grooves arranged on the upper cover.

The intelligent plank box also comprises a plurality of elastic parts which are respectively positioned in the clamping grooves, and a plurality of clamping and fixing parts which are respectively connected with the elastic parts and at least partially positioned in the clamping grooves respectively, wherein the peripheral wall is provided with a plurality of through holes or clamping grooves which respectively correspond to the plurality of clamping and fixing parts, and each clamping and fixing part can move between a closing position where the clamping and fixing part is clamped into the corresponding through hole or clamping groove and an opening position which is far away from the corresponding through hole or clamping groove.

The intelligent plank box also comprises an anti-theft device arranged on the upper cover.

According to the intelligent plank box, the anti-theft device comprises the electromagnetic lock, and the electromagnetic lock can abut against or release the plurality of clamping pieces through the plurality of elastic pieces so that the clamping pieces move between the closing position and the opening position.

The invention has the beneficial effects that: the sensor is arranged on the pallet seat or the box body, so that the states of the environment in the box body, the quantity and the weight of the accommodated articles and the like can be detected in real time in the conveying process of the intelligent pallet box, the environment state in the box body can be confirmed in an auxiliary mode and even controlled, and the accommodated articles cannot be polluted or damaged due to the change of the environment condition.

Drawings

FIG. 1 is a perspective view illustrating one embodiment of an intelligent pallet box of the present invention;

FIG. 2 is a perspective view of a positioning buffer unit of the embodiment with some elements omitted;

FIG. 3 is a perspective view of a pallet base of the embodiment with some elements omitted;

fig. 4 is an enlarged view of a portion of the pallet base illustrating a shock-resistant rubber block of the pallet base;

FIG. 5 is an enlarged view of a portion of the pallet seat illustrating a helical vibration isolator of the pallet seat;

FIG. 6 is a side view of a carrier module of the pallet base of FIG. 3;

FIG. 7 is an exploded perspective view illustrating the assembly of the pallet base, a peripheral wall, and a top cover according to the embodiment;

FIG. 8 is a side view illustrating the construction of the damping sheet or perimeter wall;

fig. 9 is a partially enlarged view for assisting in explaining the assembly of the peripheral wall and the upper cover of fig. 7;

FIG. 10 is a perspective view illustrating the configuration of the peripheral walls of the present embodiment during collapsing;

fig. 11 is an exploded perspective view illustrating the folded state of the peripheral wall and the stacking of the upper cover and the pallet base according to the embodiment;

FIG. 12 is a perspective view illustrating a plurality of the embodiments stacked;

FIG. 13 is a perspective view of the peripheral plate with some parts omitted to illustrate the opening of the opening and the opening of the peripheral plate;

FIG. 14 is a perspective view for assisting in explaining the opening state of the opening portion of FIG. 13;

FIG. 15 is a perspective view illustrating the sensing device of the embodiment;

FIG. 16 is a top view illustrating a solar charging device and a sensing device according to the embodiment;

FIG. 17 is a sectional side view taken along line I-I of FIG. 16, illustrating the grasping and holding member, and the piercing or holding groove of this embodiment;

FIG. 18 is a sectional side view taken along line I-I of FIG. 16 to assist in explaining the grasping and holding member of FIG. 17 as a piercing or engaging slot;

FIG. 19 is a perspective view illustrating the embodiment and a robot arm;

FIG. 20 is a perspective view illustrating an aspect of a gripper of the robot arm;

FIG. 21 is a perspective view illustrating the robot gripping the top cover of the embodiment;

FIG. 22 is a perspective view illustrating the robot gripping a buffer top plate of the positioning buffer unit of the embodiment; and

FIG. 23 is a perspective view illustrating the robot arm gripping a clean substrate container in the embodiment.

Detailed Description

The present invention will be described in detail below with reference to the accompanying drawings and examples.

Referring to fig. 1, 2 and 22, an embodiment of an intelligent stacker 1 according to the present invention is adapted to carry and hold a plurality of clean substrate containers 100. The cleaning substrate container 100 may be a closed cleaning container, such as a reticle pod or a wafer pod, which is commonly used in various industries, such as semiconductors, solar energy, photovoltaic, and the like. In this embodiment, a front opening wafer pod (FOSB) is taken as an example.

The intelligent pallet box 1 comprises a pallet base 2, a box body 3 arranged on the pallet base 2, and a sensing device 4 arranged on the pallet base 2 or the box body 3.

Specifically, the box 3 includes a peripheral wall 31 detachably assembled to the pallet base 2, and an upper cover 32 detachably coupled to the peripheral wall 31. The pallet base 2 and the peripheral wall 31 together define an accommodating space 300 for accommodating the clean substrate container 100, and the upper end and the lower end of the accommodating space 300 are respectively sealed by the upper cover 32 and the pallet base 2.

The box 3 includes a positioning buffer unit 5 disposed in the accommodating space 300. The positioning buffer unit 5 includes a buffer base plate 51 disposed on the pallet base 2, a buffer top plate 52 disposed adjacent to the upper cover 32, and a buffer partition 53 disposed between the buffer base plate 51 and the buffer top plate 52.

The buffer partition 53 separates the accommodating space 300 into a first space area 301 and a second space area 302 with the buffer bottom plate 51 and the buffer top plate 52, respectively, to accommodate a plurality of substrate cleaning containers 100, respectively. In the case of the front opening unified pod illustrated in the present embodiment, each front opening unified pod can accommodate a plurality of wafers.

As shown in fig. 2, the buffer bottom plate 51, the buffer partition plate 53 and the buffer top plate 52 also provide positioning and buffering functions in cooperation with the shape of the clean substrate container 100, so as to prevent the wafers in the clean substrate container 100 from being damaged due to shaking or impact during transportation. In addition, a buffer substrate 54 may be further disposed between the top cover 32 and the buffer top plate 52 for better buffering and protection effects.

Preferably, the positioning buffer unit 5 in the present embodiment includes a buffer bottom plate 51, a buffer top plate 52, a buffer partition plate 53 and a buffer base material 54, which may be made of a self-foaming material. Such as Polyethylene (PE), Polypropylene (PP), or Ethylene Vinyl Acetate (EVA) and the like. But is not limited thereto.

More preferably, the foaming ratio of the foaming material is between 10 and 60 times to provide better buffering effect. In addition, since the products of high-tech industries such as semiconductors are easily damaged by electrostatic discharge, the foam material can be antistatic, and the impedance value of the foam material is preferably 10¹²Omega/sq or less, so as to prevent the wafer contained therein from being damaged due to discharge after static charge accumulation.

The unit "Ω/sq" of the surface resistivity represents an ohmic value per unit area; wherein: sq refers to the unit area, and the specific size units (feet or meters) cancel out in the calculation process because of the division, so that the specific size is not related.

Referring to fig. 3 to 5, the pallet base 2 includes a rectangular base 21, a plurality of grooves 22 recessed downward from an upper surface of the base 21, a plurality of shock-proof members 23 respectively disposed in the grooves 22, and a bearing module 25 disposed between the base 21 and the buffer base 51.

The shock-proof member 23 is used to support the carrying module 25 and isolate the shock transmitted from the pallet 2. The shock absorbing member 23 may be made of various materials or structures, such as a shock absorbing rubber block 231 made of natural rubber, silicone rubber, or the like, or a helical shock absorber 232 made of metal, plastic, or composite material. The present embodiment is not limited thereto, as long as the supporting and shockproof effects can be achieved.

Specifically, the grooves 22 are arranged in an array on the substrate 21. The anti-vibration rubber blocks 231 are arranged in the grooves 22 at four corners, and the spiral anti-vibration devices 232 are arranged in the grooves 22 at the centers of four sides of the base body 21, i.e. the anti-vibration rubber blocks 231 and the spiral anti-vibration devices 232 are alternately arranged on the outer periphery of the base body 21.

Wherein, the shockproof rubber block 231 mainly provides isolation for the shock in the direction vertical to the ground; the spiral dampers 232 are disposed with their axes all oriented in the same direction toward the wafer stacking direction in the clean substrate container 100 to provide an isolation effect against shaking or vibration along the direction. A better shock-proof effect is provided by the two differently configured shock-proof members 23.

Referring to fig. 3, 6 and 8 in conjunction with fig. 2, the carrier module 25 disposed on the substrate 21 includes two spaced-apart anti-vibration plates 251 and a plurality of anti-vibration blocks 255 arranged in an array between the anti-vibration plates 251. As with the anti-vibration rubber block 231, the anti-vibration block 255 can be made of natural rubber, silica gel, or other materials.

Each of the shock absorbing sheets 251 has an inner layer 252, an outer layer 253, and a porous structure 254 between the inner layer 252 and the outer layer 253. Preferably, the porous structure 254 may be a honeycomb structure. Therefore, the weight of the shockproof sheet 251 can be greatly reduced on the premise of extremely high structural strength, and the effect of saving the transportation cost can be achieved.

Similarly, the peripheral plate 310 of the peripheral wall 31 of the case 3 may have the same structure as the vibration prevention piece 251. That is, the peripheral plate 310 also has an inner layer 303, an outer layer 304, and a porous structure 305 (shown in FIG. 8) between the inner layer 303 and the outer layer 304. The porous structure 305 may also be a honeycomb structure, so as to have the advantages of high strength and light weight.

Referring to fig. 1 and 7, the peripheral wall 31 further includes a plurality of light-transmissive windows 33 penetrating the inner layer 303, the porous structure 305 and the outer layer 304. Thus, a user or an automated facility can directly confirm the condition of the clean substrate container 100 loaded in the receiving space 300 through the transparent window 33.

The material of the peripheral wall 31 is also selected from polyethylene, polypropylene, or the like. The peripheral wall 31 has the advantages of light weight, high bearing capacity and durability, and good heat insulation performance by matching with the porous structure 305.

The pallet base 2 and the upper cover 32 can be manufactured by gas-assisted injection molding, blow molding or double-layer blister molding, so that the pallet base 2 and the upper cover 32 have the advantages of hollow and light weight, the sinking, shrinkage and warping deformation of thick parts can be avoided, the molding process period can be shortened, and the overall strength can be improved.

Referring to fig. 7 and 9, the recesses 313 and 314 at the upper and lower peripheral edges 311 and 312 of the peripheral wall 31 can be respectively matched with the positioning portion 323 of the upper cover 32 and the protrusion 26 of the pallet seat 2, so as to assemble the three components in a simple manner. For accurate alignment and assembly, the corresponding sets of the concave portions 313 and the positioning portions 323 and the corresponding sets of the concave portions 314 and the convex portions 26 on each side may have different sizes or shapes, respectively, for the assembly personnel to correctly identify.

More specifically, in the present embodiment, the upper cover 32 has a body 321, a plurality of grooves 322 recessed from the upper periphery 311 facing the peripheral wall 31 toward the body 321, and a positioning portion 323 located in the grooves 322, and the upper periphery 311 of the peripheral wall 31 has a plurality of recesses 313 corresponding to the positioning portion 323 and having matching contours.

Similarly, the pallet seat 2 has a plurality of protrusions 26 protruding along the periphery of the upper surface of the base 21, and the lower periphery 312 of the peripheral wall 31 has a plurality of recesses 314 corresponding to the protrusions 26.

Generally, the width of the groove 322 is the same as the thickness of the peripheral plate 310 of the peripheral wall 31 so that the upper peripheral edge 311 of the peripheral plate 310 can be inserted into the groove 322. The groove 322 and the positioning portion 323 of the upper cover 32 are engaged with the upper peripheral edge 311 of the peripheral wall 31 and the recessed portion 313, so that the operator can easily and accurately cover the upper cover 32 on the peripheral wall 31.

Similarly, the mating of the protrusion 26 of the pallet seat 2 and the recess 314 of the lower periphery 312 of the peripheral wall 31 can provide a foolproof positioning function when assembling the pallet seat 2 and the peripheral wall 31, so that the assembly is fast and reliable.

Referring to fig. 7 and 10, the peripheral wall 31 has four peripheral plates 310 connected to each other, wherein the centers of two opposite peripheral plates 310 respectively have a bending portion 316 extending along the height direction of the peripheral plates 310. Each bent portion 316 divides the peripheral plate 310 into two peripheral plate portions 315.

When the peripheral wall 31 is detached from the pallet seat 2, the bending portions 316 can be bent toward each other to make the peripheral plate portions 315 fit together, so as to drive the other two opposite peripheral plates 310 to move toward each other, so that the peripheral wall 31 is in a folded state.

Referring to fig. 11 and 12, if the height H from the upper edge 311 to the lower edge 312 of the peripheral wall 31 is less than or equal to the length and the width of the pallet seat 2, the peripheral wall 31 in the folded state can be flatly placed between the upper cover 32 and the pallet seat 2 for stacking and storage. Furthermore, as shown in fig. 12, a plurality of intelligent stacker boxes 1 in the storage state may be stacked on each other to reduce the storage space.

It should be noted that, when the intelligent plank case 1 is not stored, the concave-convex positioning structures matched with each other can be respectively arranged on the top surface of the upper cover 32 and the bottom surface of the pallet base 2, so that the intelligent plank cases 1 can be rapidly and stably stacked by matching the concave-convex positioning structures.

Referring to fig. 13 and 14, the other two peripheral plates 310 without the bending portion 316 in the peripheral wall 31 respectively have a peripheral plate portion 315, a side opening 320, and a lifting portion 317. The side opening 320 is adjacent to the top cover 32 and communicates with the accommodating space 300, and the lifting portion 317 is connected to the peripheral portion 315 in a lifting manner to close or expose the side opening 320.

Preferably, the box body 3 includes a plurality of connecting members 34 respectively disposed on the peripheral plate portion 315 and the lifting portion 317, and when the lifting portion 317 is opened or closed to expose or close the side opening 320, the lifting portion 317 can be fixed by the connecting members 34, and the connecting members suitable for this embodiment are exemplified by velcro, so as to achieve the effect of quickly bonding the lifting portion 317.

By the design of the lifting portion 317, the lifting portion 317 is lifted to expose the side opening 320, so that the clean substrate container 100 in the first space area 301 (see fig. 2) at the lower layer can be conveniently accessed.

Referring to fig. 15, 16 and 22, the sensing device 4 includes a plurality of sensors disposed on the pallet base 2 and the box 3 for sensing the status of the pallet base 2 or the receiving space 300.

In the present embodiment, the sensing device 4 includes a pressure sensor 41 disposed on the pallet base 2, a position sensor 43, a temperature sensor and a humidity sensor (not shown) disposed on the box 3 and located in the accommodating space 300, and a temperature and humidity display 44 disposed outside the upper cover 32.

Specifically, the pressure sensor 41 is disposed at the bottom of the pallet seat 2, and the weight prompter 42 and the position sensor 43 are disposed around the sides of the pallet seat 2. The pressure sensor 41 is electrically connected to the weight indicator 42, and is used for sensing the loading state of the clean substrate container 100 in the accommodating space 300, and displaying or warning abnormal states such as short packaging material or missing wafer through the signal display of the weight indicator 42.

The temperature sensor and the humidity sensor are electrically connected to the temperature and humidity display 44, and the temperature and humidity states in the accommodating space 300 are sensed by the temperature sensor and the humidity sensor, and the temperature and humidity information is displayed on the temperature and humidity display 44.

In addition, the sensing device 4 may further include a temperature controller (not shown) and a humidity controller (not shown), such as an electric heater or a refrigerator and an electronic dehumidifier, disposed in the accommodating space 300. When the temperature and humidity in the accommodating space 300 are abnormal, the temperature and humidity controller can regulate and control the temperature and humidity, so that the influence on the quality of the wafer caused by the abnormal temperature and humidity in the accommodating space 300 is avoided.

In addition, the intelligent pallet box 1 provided in this embodiment may further be provided with a position sensor 43, such as a GPS locator, for locating the intelligent pallet box 1, and even further providing a tracking function.

Referring to fig. 1, the solar charging device 6 of the present embodiment is disposed on the upper cover 32, but may be disposed on the peripheral wall 31 or the side of the pallet seat 2 alternatively. The power required by the sensing device 4 can be supplied by the battery, and the power required by the sensing device 4 can be supplied by the solar charging device 6 through the electrical connection with the solar charging device 6 to generate the electric energy by itself.

Preferably, the intelligent pallet box 1 of the present embodiment may further include a transmission device 92 for outputting data sensed by the sensing device 4. The transmission device 92 may be a wired electronic device port or a wireless transmission device, but the embodiment is not limited thereto. The transmission device 92 is electrically connected to the sensing device 4 to receive the data sensed by the sensing device and then output the data to the outside for monitoring or recording.

In addition, the intelligent plank case 1 can further be provided with an identification means 91. The identification means 91 may be a bar code, such as a one-dimensional bar code, a two-dimensional bar code such as a quick response matrix (QR) code, or a radio frequency identification tag (RFID tag), for easy identification or management by an operator or an automation device.

Referring to fig. 1, 16 to 20, the upper cover 32 of the present embodiment may further include a plurality of clamping slots 72, a plurality of elastic members 73 respectively located in the clamping slots 72, and a plurality of fastening members 74 located in the clamping slots 72 and connected to the elastic members 73, wherein the peripheral wall 31 has a plurality of through holes (or fastening slots) 319 respectively corresponding to the fastening members 74.

The robot arm 8 of the automated carrier apparatus includes a gripping member 81 having a gripping surface 810, an electromagnetic lock 811 provided on the gripping surface 810, and four gripping portions 812 provided on the gripping surface 810 corresponding to the gripping grooves 72. The number of the grasping portions 812 may be changed according to the number of the grasping slots 72, which is not limited in this embodiment.

When the grabbing member 81 of the robot arm 8 faces the upper cover 32 with the grabbing surface 810 facing thereto, the four grabbing portions 812 are correspondingly placed into the grabbing grooves 72, and the grabbing portions 812 respectively abut against the fastening member 74, so that the fastening member 74 can move between a closed state (as shown in fig. 17) fastened in the through hole (or slot) 319 of the peripheral wall 31 and an open state (as shown in fig. 18) away from the through hole (or slot) 319 of the peripheral wall 31.

Referring to fig. 21 to 23, when each clean substrate container 100 in the accommodating space 300 of the intelligent pallet 1 is to be gripped, the gripping part 812 abuts against the fastener 74, so as to sequentially grip the upper cover 32 and the buffer top plate 52, and then the clean substrate container 100 can be gripped (as shown in fig. 23).

Preferably, the embodiment may further include an anti-theft device 7 for controlling the locking member 74 on the upper cover 32. The anti-theft device 7 comprises an electromagnetic lock 71. An electromagnetic lock 811 is disposed on the gripping surface 810 of the gripping member 81 of the robot arm 8 corresponding to the electromagnetic lock 71. The electromagnetic lock 811 on the robot arm 8 and the electromagnetic lock 71 of the anti-theft device 7 mutually sense each other and perform data verification. If the data are matched, the anti-theft device 7 releases the locking of the clamping member 74, so as to achieve the anti-theft effect.

In summary, the intelligent pallet box 1 provided in this embodiment can detect the temperature and humidity inside the box 3 and the weight status of the pallet seat 2 in real time by installing the sensor on the pallet seat 2 or the box 3 during the transportation process of the intelligent pallet box 1, to assist in confirming and improving the environmental status inside the box 3, and the positioning buffer unit 5 is installed in the accommodating space 300 to enhance the internal anti-collision and shock absorption, and the foldable design of the peripheral wall 31 can be laid between the upper cover 32 and the pallet seat 2 for storage, and the peripheral wall 31, the upper cover 32 and the pallet seat 2 have the foolproof structures matched with each other, so that the overall structure can be assembled quickly and reliably, and in addition, through the installation of the clamping groove 72, the robot arm 8 can be automatically used for sensing opening, so that the subsequent robot arm 8 can directly clamp the clean substrate container 100, an anti-theft device 7 can be additionally arranged to ensure safety, so that the aims of the invention can be really achieved.