阅读说明：本技术 超高真空分析检测装置的减振系统 (Vibration reduction system of ultrahigh vacuum analysis and detection device ) 是由 刘大猛 庞华 房亮 王冲 雒建斌 于 2019-11-26 设计创作，主要内容包括：本发明公开了一种超高真空分析检测装置的减振系统,其分析检测装置和所述超高真空管道安装在气浮光学平台上方,真空抽送系统安装在气浮光学平台下方,真空抽送系统的部分结构与地面连接,超高真空管道上设置有快拆接口,超高真空管道中间设置有双波纹管连接段,分子泵采用一拖三的方式,超高真空样品腔内具有弹簧-电磁阻尼复合减振系统,通过上述复合、系统化减振,可降低装置的振动幅度,满足超高真空分析检测装置对振动幅度的要求。(The invention discloses a vibration reduction system of an ultrahigh vacuum analysis and detection device, wherein the analysis and detection device and an ultrahigh vacuum pipeline are arranged above an air floatation optical platform, a vacuum pumping system is arranged below the air floatation optical platform, part of the structure of the vacuum pumping system is connected with the ground, a quick-release interface is arranged on the ultrahigh vacuum pipeline, a double-corrugated-pipe connecting section is arranged in the middle of the ultrahigh vacuum pipeline, a molecular pump adopts a one-to-three mode, a spring-electromagnetic damping composite vibration reduction system is arranged in an ultrahigh vacuum sample cavity, and the vibration amplitude of the device can be reduced through the composite and systematic vibration reduction, so that the requirement of the ultrahigh vacuum analysis and detection device on the vibration amplitude is met.)

1. The vibration reduction system of the ultrahigh vacuum analysis and detection device comprises an analysis and detection device, an ultrahigh vacuum pipeline and a vacuum pumping system, wherein a sample cavity of the analysis and detection device is in an ultrahigh vacuum environment, a sample conveying device is arranged in the ultrahigh vacuum pipeline, the number of the analysis and detection devices is multiple, the sample cavities of the analysis and detection devices are communicated through the ultrahigh vacuum pipeline, and a sample to be detected is transmitted to the sample cavity of the analysis and detection device by the sample conveying device in the ultrahigh vacuum pipeline, and the vibration reduction system is characterized in that: still include air supporting optical platform, air supporting optical platform bottom is supported by a plurality of gas legs, air supporting optical platform cross section is cellular structure, air supporting optical platform is a plurality of, analysis and detection device with the ultra-high vacuum pipe installation is in air supporting optical platform top, vacuum pumping system installs in air supporting optical platform below, vacuum pumping system's partial structure and ground are connected, be provided with the quick detach interface on the ultra-high vacuum pipe, be provided with the double bellows connecting segment in the middle of the ultra-high vacuum pipe.

2. The vibration damping system of an ultra-high vacuum analysis and detection device according to claim 1, wherein: the spring-electromagnetic damping composite vibration attenuation system is arranged in the sample cavity and comprises an external frame, a sample table support, an internal scanning sample table and an electromagnetic eddy current damping grid; external frame includes top base and infrabasal plate, the top surface of the top base is fixed with the sample chamber, and the bottom surface evenly is fixed with 4 downwardly extending's support pipeline, all suspended in the support pipeline has the spring, the infrabasal plate is fixed the lower extreme of 4 support pipelines, the sample platform support passes through the spring suspends in the top of the external frame, just the sample platform support with be provided with between the infrabasal plate the electromagnetic eddy current damping grid, inside scanning sample platform sets up on the sample platform support.

3. The vibration damping system of an ultra-high vacuum analysis and detection device according to claim 2, wherein: the upper base and the lower base plate are both circular and have the same diameter.

4. The vibration damping system of an ultra-high vacuum analysis and detection device according to claim 1, wherein: the vacuum pumping system comprises a molecular pump and an ion pump, wherein the ion pump is independently arranged in a corresponding sample cavity of each analysis monitoring device, and the molecular pump is shared by a plurality of sample cavities.

5. The vibration damping system of an ultra-high vacuum analysis and detection device according to claim 1 or 2, wherein: each analysis detection device is independently arranged on one air-floating optical platform, and two adjacent air-floating optical platforms are isolated from each other and are not in contact with each other; the quick-release interface is arranged on the ultrahigh vacuum pipeline between the adjacent analysis and detection devices.

6. The vibration damping system for an ultra-high vacuum analysis and detection device according to claim 1, wherein: the analysis and detection device comprises a phonon detection component in a friction process, a molecular structure orientation detection component in a friction shearing process and a high-sensitivity friction emission detection component.

7. The vibration damping system for an ultra-high vacuum analysis and detection device according to claim 1, wherein: and a baking heating plate is also arranged on the optical platform.

Technical Field

The invention relates to a vibration damping system, in particular to a vibration damping system of an ultrahigh vacuum analysis and detection device, and particularly relates to a vibration damping system applied to an ultrahigh vacuum analysis and detection device in a high-resolution in-situ real-time friction energy dissipation measurement system.

Background

Friction is a ubiquitous phenomenon in the world of materials, in recent years, the discovery of the ultra-slip phenomenon has attracted high attention of researchers in the fields of tribology, mechanics, physics and chemistry, and the research on the intrinsic mechanism of the ultra-slip phenomenon needs the help of a high-resolution in-situ real-time friction energy dissipation measurement system.

The ultrahigh vacuum analysis and detection device is an important component of a high-resolution in-situ real-time friction energy dissipation measurement system and an important place for analyzing and researching the ultra-smooth phenomenon of a sample, and the ultrahigh vacuum sample transmission system interconnects different ultrahigh vacuum analysis and detection devices, so that the sample to be detected is transmitted to different analysis and detection devices in an ultrahigh vacuum environment, different types of analysis and detection are performed, the transmission efficiency is high, and the experiment efficiency is high. Generally, ultrahigh vacuum pipelines are connected between different ultrahigh vacuum analysis and detection devices, and a sample to be detected is conveyed to the different ultrahigh vacuum analysis and detection devices in the ultrahigh vacuum pipelines; each ultrahigh vacuum analysis and detection device and the ultrahigh vacuum pipeline are respectively connected with a vacuum pump to form a vacuum environment.

However, some mechanisms in the ultra-vacuum system, such as a stepping motor, a refrigerator, a vacuum pump, etc., generate vibration during operation, and the vibration can seriously affect the detection result of the partial analysis detection device, so how to reduce the vibration of the ultra-vacuum analysis detection device becomes an urgent technical problem to be solved.

Disclosure of Invention

The invention aims to provide a vibration reduction system of an ultrahigh vacuum analysis and detection device, which is used for reducing the vibration amplitude of the device and meeting the requirement of the ultrahigh vacuum analysis and detection device on the vibration amplitude.

In order to achieve the purpose, the technical scheme adopted by the invention is as follows:

the vibration reduction system of the ultrahigh vacuum analysis and detection device comprises an analysis and detection device, an ultrahigh vacuum pipeline and a vacuum pumping system, wherein a sample cavity of the analysis and detection device is in an ultrahigh vacuum environment, a sample conveying device is arranged in the ultrahigh vacuum pipeline, the analysis and detection device is provided with a plurality of analysis and detection devices, the sample cavities of the analysis and detection devices are communicated through the ultrahigh vacuum pipeline, a sample to be detected is transmitted into the sample cavity of the analysis and detection device by the sample conveying device in the ultrahigh vacuum pipeline, the vibration reduction system also comprises an air floatation optical platform, the bottom of the air floatation optical platform is supported by a plurality of air legs, so that a certain distance is reserved between the air floatation optical platform and the ground, the air floatation optical platform plays a transverse vibration reduction role, and the air legs play a longitudinal vibration reduction role; the air supporting optical platform cross section is cellular structure, air supporting optical platform is a plurality of, analysis and detection device with super high vacuum tube way is installed in air supporting optical platform top, vacuum pumping system installs in air supporting optical platform below for the entire system focus moves down, and stability is high, vacuum pumping system's partial structure is connected with ground, thereby carries out further damping, be provided with the quick detach interface on the super high vacuum tube way, be provided with the dual bellows connecting band in the middle of the super high vacuum tube way, the dual bellows plays the damping effect, and can offset atmospheric pressure, indeformable.

Further, a spring-electromagnetic damping composite vibration damping system is arranged in the sample cavity and comprises an external frame, a sample table support, an internal scanning sample table and an electromagnetic eddy current damping grid; external frame includes upper base and infrabasal plate, the upper base top surface is fixed with the sample chamber, and the bottom surface evenly is fixed with 4 downwardly extending's support pipeline, all suspended in the support pipeline has the spring, the infrabasal plate is fixed the lower extreme of 4 support pipelines, the sample platform support passes through the spring suspends in midair in the external frame to isolated vibration is from the passageway of cavity to sample platform support transmission, just sample platform support with be provided with between the infrabasal plate electromagnetic vortex damping grid, its and spring system cooperate the speed of multiplicable vibration decay to prevent that the system from producing resonance, inside scanning sample platform sets up on the sample platform support. The upper base and the lower base plate are both circular and have the same diameter.

Further, the vacuum pumping system comprises a molecular pump and an ion pump, wherein one ion pump is individually arranged in each sample cavity of the analysis and monitoring device, and one molecular pump is shared by a plurality of sample cavities.

Furthermore, each analysis detection device is independently arranged on one air-floating optical platform, and two adjacent air-floating optical platforms are isolated from each other and are not in contact with each other, so that different analysis detection devices can perform independent experiments to isolate a vibration source; the quick-release interface is arranged on the ultrahigh vacuum pipeline between the adjacent analysis and detection devices, can be quickly disassembled or connected, and can isolate vibration after being disassembled, for example, the ultrahigh vacuum pipeline connected with the analysis and detection device which does not participate in the detection is partially separated.

Furthermore, the analysis and detection device is a phonon detection component in a friction process, a molecular structure orientation detection component in a friction shearing process and a high-sensitivity friction emission detection component respectively.

In addition, be provided with the heating plate that toasts on optical platform, when needs toast the device, detain in vacuum pipeline and analysis and detection device outside and establish the cover that toasts (toast the tent) to toast the heating plate and also detain and locate toasting in the cover, use and toast the heating plate and heat, in order to heat vacuum pipeline and vacuum cavity. So set up, need not the winding and toast the area, avoided loaded down with trivial details winding and toasted the process of area, can avoid again toasting the potential safety hazard that the area overlaps and probably causes the conflagration. The tent is dismantled after the baking is finished, heating traces can not be left on the outer side of the pipeline, and the outer side of the instrument is kept clean and attractive.

The invention adopts a plurality of vibration reduction modes to carry out compound and systematic vibration reduction on the ultra-vacuum analysis detection device, and can achieve the following effects: (1) the air-float optical platform is adopted to carry out transverse vibration reduction, and the air legs are adopted to carry out longitudinal vibration reduction. (2) The optical platform is formed by splicing a plurality of platens, and the platens are detachable, so that the detection devices on different platens can be independently operated and vibration isolated from other devices which are not operated. (3) The vacuum pump and other vibration sources are arranged below the optical platform and fixed with the bottom surface, so that the center of gravity of the whole system moves downwards, the stability is high, and part of the structure of the vacuum pumping system is connected with the ground to further reduce vibration. (4) And the use of the molecular pump with relatively violent vibration is reduced by adopting a mode of driving three molecular pumps one by one. (5) The ultrahigh vacuum pipeline is provided with a quick-release interface, and an unused area can be separated from a vibration source. (6) Through the spring-electromagnetic damping composite vibration damping system, the vibration transmission between the vacuum cavity and the scanning sample table can be further isolated, and the vibration damping effect is good.

By the comprehensive vibration reduction of the vibration reduction system, the vibration amplitude of the internal scanning sample table of the ultrahigh vacuum analysis and detection device in the horizontal direction is lower than +/-10 nm, and the vibration amplitude in the vertical direction is lower than +/-100 nm.

Drawings

Fig. 1 is a perspective view of a vibration damping system of the ultrahigh vacuum analysis and detection device according to the present invention.

FIG. 2 is a front view of the vibration damping system of the ultra-high vacuum analysis and detection device of the present invention.

Fig. 3 is a structural plan view of a vibration damping system of the ultrahigh vacuum analysis and detection device of the present invention.

Fig. 4 is a perspective view of the spring-electromagnetic damping composite vibration damping system of the present invention.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.

As shown in fig. 1-3, the vibration reduction system of the ultra-high vacuum analysis and detection device of the present invention comprises analysis and detection devices (1, 2, 3), an ultra-high vacuum pipeline 4 and a vacuum pumping system 7, wherein the sample chambers of the analysis and detection devices (1, 2, 3) are in an ultra-high vacuum environment, a sample conveying device is arranged in the ultra-high vacuum pipeline 4, the number of the analysis and detection devices is 3, the sample chambers of the 3 analysis and detection devices are communicated through the ultra-high vacuum pipeline 4, a sample to be detected is transferred to the sample chambers of the analysis and detection devices (1, 2, 3) by the sample conveying device in the ultra-high vacuum pipeline 4, and further comprises an air-floating optical platform 5, the bottom of the air-floating optical platform 5 is supported by a plurality of air legs 6, so that a certain distance is provided between the air-floating optical platform 5 and the ground, the air-floating optical platform 5 plays, the air leg 6 plays a role in longitudinal vibration reduction; 5 cross sections of air supporting optical platform are cellular structure, air supporting optical platform 5 is 3, analysis and detection device (1, 2, 3) and ultrahigh vacuum pipeline 4 installs in 5 tops of air supporting optical platform, vacuum pumping system 7 installs in 5 below of air supporting optical platform for the entire system focus moves down, and stability is high, vacuum pumping system 7's partial structure is connected with ground, thereby carries out further damping, be provided with the quick detach interface on the ultrahigh vacuum pipeline 4, be provided with dual bellows 8 connecting band in the middle of the ultrahigh vacuum pipeline, dual bellows 8 plays the damping effect, and can offset atmospheric pressure, indeformable.

As shown in fig. 4, the spring-electromagnetic damping composite vibration damping system includes an external frame, a sample stage support 13, an internal scanning sample stage 14, and an electromagnetic eddy current damping grid 15; external frame includes top base 10 and infrabasal plate 11, the top surface of the top base is fixed with the sample chamber, and the bottom surface evenly is fixed with 4 downwardly extending's support pipeline 12, all hang in the support pipeline 12 spring (not shown in the drawing) in, infrabasal plate 11 is fixed 4 support pipeline 12's lower extreme, sample platform support 13 passes through the spring hangs in the external frame, just sample platform support 13 with be provided with between the infrabasal plate 11 electromagnetic eddy current damping grid 15, inside scanning sample platform 14 sets up 13 on the sample platform support. The upper base 10 and the lower base 11 are both circular and have the same diameter.

The vacuum pumping system 7 comprises a molecular pump and an ion pump, wherein one ion pump is individually arranged in each sample cavity of the analysis monitoring device, and one molecular pump is shared by a plurality of sample cavities. Specifically, the molecular pump adopts an Edwardsiella STP series full magnetic floating molecular pump, the vibration of a pump port can be controlled within 100nm, a vibration reduction module can be added, and the stability is continued to be within 10 nm. The ion pump adopts a Gamma Vacuum ion pump compounded with NEG.

Each analysis detection device (1/2/3) is independently arranged on one air-floating optical platform 5, and two adjacent air-floating optical platforms 5 are isolated from each other and are not in contact with each other, so that different analysis detection devices can perform independent experiments to isolate vibration sources; the quick-release interface is arranged on the ultrahigh vacuum pipeline 4 between the adjacent analysis and detection devices, can be quickly disassembled or connected, and can isolate vibration after disassembly, for example, the ultrahigh vacuum pipeline connected with the analysis and detection device which does not participate in the detection is partially separated.

The analysis detection devices (1, 2 and 3) are a phonon detection component in a friction process, a molecular structure orientation detection component in a friction shearing process and a high-sensitivity friction emission detection component respectively.

In addition, be provided with toasting heating plate 9 on optical platform, when needs toast the device, detain and establish the cover of toasting (toast the tent) in vacuum pipeline and analytical testing device outside to will toast the heating plate and also detain and establish in toasting the cover, use toast the heating plate and heat, with heating vacuum pipeline and vacuum cavity. So set up, need not the winding and toast the area, avoided loaded down with trivial details winding and toasted the process of area, can avoid again toasting the potential safety hazard that the area overlaps and probably causes the conflagration. The tent is dismantled after the baking is finished, heating traces can not be left on the outer side of the pipeline, and the outer side of the instrument is kept clean and attractive.

The above description is only for the purpose of illustrating the preferred embodiments of the present invention, and the present invention is not limited thereto, and any person skilled in the art can substitute or change the technical solution of the present invention and its inventive concept within the technical scope of the present invention.