阅读说明：本技术 靶材抛光装置 (Target polishing device ) 是由 姚力军 潘杰 王学泽 丁向前 于 2018-09-10 设计创作，主要内容包括：一种靶材抛光装置,包括：固定板,所述固定板包括顶板和位于所述顶板一侧的侧板；抛光片,位于所述固定板内侧面上,其中位于固定板弯折处的抛光片呈弧状。所述靶材抛光装置有助于提高对靶材表面进行抛光的作业效率。(A target polishing apparatus comprising: the fixing plate comprises a top plate and a side plate positioned on one side of the top plate; and the polishing sheet is positioned on the inner side surface of the fixed plate, wherein the polishing sheet positioned at the bent part of the fixed plate is in an arc shape. The target polishing device is beneficial to improving the operation efficiency of polishing the surface of the target.)

1. A target polishing apparatus, comprising:

the fixing plate comprises a top plate and a side plate positioned on one side of the top plate;

and the polishing sheet is positioned on the inner side surface of the fixed plate, wherein the polishing sheet positioned at the bent part of the fixed plate is in an arc shape.

2. The target polishing apparatus of claim 1, wherein the polishing pad surface matches the target sidewall surface and the rounded side edges.

3. The target polishing apparatus of claim 2, wherein the bending portion of the inner side surface of the fixing plate forms an included angle, and the thickness of the polishing sheet at the bending portion of the fixing plate is not uniform.

4. The target polishing apparatus of claim 2, wherein the bent portion of the inner side surface of the fixing plate is curved, and the thickness of the polishing sheet at the bent portion of the fixing plate is uniform.

5. The target polishing apparatus of claim 1, wherein the material of the fixing plate is a metal or an alloy.

6. The target polishing apparatus of claim 1, wherein the polishing pad is sandpaper.

7. The target polishing apparatus according to claim 1, further comprising: the protective layer is positioned between the fixing plate and the polishing sheet.

8. The target polishing apparatus of claim 7, wherein the protective layer is an elastic material.

9. The target polishing apparatus of claim 8, wherein the protective layer is made of silicone, rubber, or cotton.

10. The target polishing apparatus according to claim 1, further comprising: a handle disposed on an outer surface of the fixing plate.

11. The target polishing apparatus of claim 10, wherein the number of the handles is two, one of the handles is disposed on the top of the fixing plate, and the other handle is disposed on the sidewall of the fixing plate.

Technical Field

The invention relates to the technical field of semiconductor manufacturing, in particular to a target polishing device.

Background

The sputtering coating belongs to one of the processes for preparing thin films by a physical vapor deposition method, and particularly relates to a method for forming a thin film by bombarding the surface of a target by using high-energy particles so that target atoms or molecules obtain enough energy to escape and deposit on the surface of a base material or a workpiece.

The back plate has good electric conduction and heat conduction performance and can also play a role in fixing and supporting, so the target material needs to be welded with the back plate before film coating and then assembled to the sputtering base station together.

In general, active metal targets, such as aluminum targets, are prone to oxidation of the target surface material to form a scale due to long term exposure to air. During dc pulsed, intermediate frequency sputtering, the energy of the ion impact is not sufficient to break down the scale, making it difficult for target atoms or molecules to escape, and therefore the target surface needs to be polished before mounting the target to the sputtering station. In addition, for active metal targets and inactive metal targets, the polishing operation is beneficial to improving the stability of the sputtering rate of the targets and is beneficial to improving the sputtering coating quality.

Currently, the surface of the target is usually polished manually in the industry, that is, an operator holds sand paper to polish all the surfaces of the target, so that the operation efficiency is low.

Disclosure of Invention

The invention aims to provide a target polishing device, which is beneficial to improving the working efficiency.

In order to solve the above problems, the present invention provides a target polishing apparatus, comprising: the fixing plate comprises a top plate and a side plate positioned on one side of the top plate; and the polishing sheet is positioned on the inner side surface of the fixed plate, wherein the polishing sheet positioned at the bent part of the fixed plate is in an arc shape.

Optionally, the surface of the polishing sheet is matched with the surface of the side wall of the target and the side edge subjected to fillet treatment.

Optionally, an included angle is formed at the bent position of the inner side surface of the fixing plate, and the thickness of the polishing sheet at the bent position of the fixing plate is not uniform.

Optionally, the bending part of the inner side surface of the fixed plate is arc-shaped, and the thickness of the polishing sheet at the bending part of the fixed plate is uniform.

Optionally, the fixing plate is made of metal or alloy.

Optionally, the polishing sheet is sandpaper.

Optionally, the target polishing apparatus further includes: the protective layer is positioned between the fixing plate and the polishing sheet.

Optionally, the protective layer is made of an elastic material.

Optionally, the protective layer is made of silica gel, rubber or cotton.

Optionally, the target polishing apparatus further includes: a handle disposed on an outer surface of the fixing plate.

Optionally, the number of the handles is two, one of the handles is arranged at the top of the fixing plate, and the other handle is arranged on the side wall of the fixing plate.

Compared with the prior art, the technical scheme of the invention has the following advantages:

in the technical scheme of the target polishing device provided by the invention, the target polishing device comprises: the fixing plate comprises a top plate and a side plate positioned on one side of the top plate; and the polishing sheet is positioned on the inner side surface of the fixed plate, wherein the polishing sheet positioned at the bent part of the fixed plate is in an arc shape. The surface of the polishing sheet positioned at the bent part of the fixing plate is suitable for polishing the side edge of the target subjected to fillet treatment, and the surface of the polishing sheet positioned on the side plate is suitable for polishing the surface of the side wall of the target. The target polishing device can simultaneously polish the side wall surface of the target and the side edge subjected to fillet treatment, so that the target polishing device is beneficial to improving the operation efficiency of polishing the surface of the target.

In an alternative scheme, the protective layer is made of elastic materials, the protective layer is soft, buffering can be provided between the fixing plate and the target, and the target is prevented from being damaged due to the fact that the fixing plate collides with the target.

Drawings

Fig. 1 is a schematic perspective view of a target polishing apparatus according to an embodiment of the present invention;

FIG. 2 is a schematic structural view of a target polishing apparatus according to another embodiment of the present invention;

fig. 3 is a front view of a target.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.

Referring to fig. 1, a target polishing apparatus 100 includes: a fixing plate 200, the fixing plate 200 including a top plate 210 and a side plate 220 at one side of the top plate 210; and the polishing sheet 300 is located on the inner side surface of the fixing plate 200, wherein the polishing sheet 300 located at the bent position of the fixing plate 200 is arc-shaped.

The fixing plate 200 can function as a support to fixedly support the polishing sheet 300, so that an operator can use the target polishing apparatus 100 conveniently.

In this embodiment, the top plate 210 is rectangular, and the side plates 220 are also rectangular.

In this embodiment, the bending portion of the inner side surface of the fixing plate 200 forms an included angle. Specifically, the surface of the side plate 220 is perpendicular to the surface of the top plate 210, i.e. the included angle is 90 °. In other embodiments, the included angle may also be greater than 90 ° and less than 180 °.

In this embodiment, the top plate 210 and the side plate 220 are integrally formed. In other embodiments, the top plate and the side plate can also be fixedly connected by welding, screwing or tight fitting.

In this embodiment, the fixing plate 200 is made of an alloy, and specifically, the fixing plate 200 is made of stainless steel. In other embodiments, the material of the fixing plate may also be metal.

In this embodiment, the thickness of the fixing plate 200 is 10mm to 15 mm. If the thickness of the fixing plate 200 is too large, the fixing plate 200 is too heavy and inconvenient to use, which affects the flexibility of operation. If the thickness of the fixing plate 200 is too small, the strength and toughness of the fixing plate 200 are poor, and the service life of the target polishing apparatus 100 is affected.

The surface of the polishing sheet 300 is matched with the surface of the side wall of the target and the side edge subjected to fillet treatment. The polishing sheet 300 has abrasive particles on the surface thereof for increasing the friction between the polishing sheet 300 and the target surface, thereby improving the polishing efficiency.

In this embodiment, the polishing sheet 300 is sandpaper.

In this embodiment, the polishing sheet 300 includes a polishing sheet first portion 310, a polishing sheet second portion 320, and a polishing sheet third portion 330. The polishing pad first portion 310 is disposed at the bottom of the top plate 210. The polishing sheet second portion 320 is disposed at a corner of the top plate 210 and the side plate 220 and smoothly transitions between the polishing sheet first portion 310 and the polishing sheet third portion 330. The polishing sheet third part 330 is disposed on the inner side surface of the side plate 220, and the surface of the polishing sheet third part 330 is perpendicular to the surface of the polishing sheet first part 310.

The second portion 320 of the polishing pad is arcuate and matches the rounded target edge to polish the target edge. The surface of the third portion 330 of the polishing sheet is a flat plane, and can polish the surface of the side wall of the target. Therefore, the target polishing apparatus 100 can simultaneously polish the surface of the side wall of the target and the rounded side edge, which is helpful to improve the efficiency of the polishing operation.

In addition, because the operator polishes the side wall surface of the target and the side edge processed by the round angle at the same time, the force difference applied to the side wall surface and the side edge of the target by the operator is small, and after the polishing process is finished, the side wall surface of the target and the side edge surface processed by the round angle have similar or even completely same flatness, so that the polished surface has good uniformity and is beneficial to improving the sputtering coating quality. If the side wall surface of the target and the side edge surface subjected to fillet treatment are polished in different steps, the force degrees applied by an operator in the two steps are easy to be greatly different, so that the roughness difference between the side wall surface of the target and the side edge surface is large after polishing treatment, and a step is formed at the joint of the side wall surface of the target and the side edge surface. In the sputtering coating process, the step is easy to cause point discharge, the uniformity of the sputtering coating is influenced, and the coating quality is poor.

In this embodiment, the polishing sheet first portion 310 has a uniform thickness. The polishing pad third portion 330 is of uniform thickness. The thickness of the polishing sheet 300 at the bent portion of the fixing plate 200 is not uniform, that is, the thickness of the second portion 320 is not uniform.

In this embodiment, the thickness of the first portion 310 of the polishing sheet is equal to the thickness of the third portion 330 of the polishing sheet, and both are 2mm to 3 mm.

In this embodiment, the polishing sheet first portion 310, the polishing sheet second portion 320, and the polishing sheet third portion 330 are separate bodies. In other embodiments, the first polishing sheet portion, the second polishing sheet portion, and the third polishing sheet portion may be integrally formed.

In this embodiment, the target polishing apparatus 100 further includes: a protective layer 400, wherein the protective layer 400 is located between the fixing plate 200 and the polishing sheet 300.

The protective layer 400 is made of an elastic material, and can provide buffering between the fixing plate 200 and the target material, so that the target material is prevented from being damaged due to the fact that the fixing plate 200 collides with the target material.

In this embodiment, the thickness of the protective layer 400 is 30mm to 35 mm. If the thickness of the protective layer 400 is too small, the protective layer 400 has a poor buffering effect, and it is difficult to effectively protect the target. If the thickness of the protective layer 400 is too large, the protective layer 400 has too large volume, which may cause the target polishing apparatus 100 to have too large volume, thereby causing unnecessary difficulty for an operator to use the target polishing apparatus 100.

In this embodiment, the protective layer 400 is made of silica gel. In other embodiments, the material of the protective layer may also be rubber or cotton.

In this embodiment, the protective layer 400 and the fixing plate 200 are bonded by an adhesive. The protective layer 400 and the polishing sheet 300 are also bonded by an adhesive. In other embodiments, the polishing sheet has a hook structure (not shown) on a surface facing the protective layer, and the protective layer and the polishing sheet are fixed by the hook structure.

The shielding layer 400 includes a first shielding layer and a second shielding layer, the first shielding layer covers the bottom surface of the top plate 210; the second protective layer covers the inner side of the side plate 220. The surface of the first protective layer is vertical to the surface of the second protective layer.

In this embodiment, the first protective layer and the second protective layer have the same thickness.

In this embodiment, the first protection layer and the second protection layer are integrally formed. In other embodiments, the first protective layer and the second protective layer may be separate.

In this embodiment, the target polishing apparatus 100 further includes: a handle provided on an outer surface of the fixing plate 200.

In order to facilitate the gripping of both hands of an operator, the number of the handles is two, one of the handles is disposed at the top of the fixing plate 200, and the other handle is disposed on the side wall of the fixing plate 200, which is favorable for improving the convenience of the operator holding the target polishing device 100 for polishing.

In this embodiment, the two handles are a first handle 510 and a second handle 520, respectively, the first handle 510 is disposed on the top plate 210, and the second handle 520 is disposed on the side plate 220.

In this embodiment, the first handle 510 includes a first rod portion 511 and a second rod portion 512, one end of the first rod portion 511 is connected to the top plate 210, and the other end is connected to the second rod portion 512. The first rod portion 511 extends perpendicularly to the surface of the top plate 210, and the second rod portion 512 extends parallel to the surface of the top plate 210. The first handle 510 is configured to facilitate a firm grip on the first handle 510 by an operator, preventing the operator from slipping off the first handle 510.

In this embodiment, the second handle 520 has a cylindrical structure.

In other embodiments, referring to fig. 2, the bending portion of the inner side of the fixing plate 200 is arc-shaped, the bending portion of the protective layer 400 is arc-shaped, and the thickness of the polishing sheet 300 at the bending portion of the fixing plate 200 is uniform.

In addition, unlike the previous embodiment, the polishing sheet first portion 310 (refer to fig. 1), the polishing sheet second portion 320 (refer to fig. 1) and the polishing sheet third portion 330 (refer to fig. 1) are integrally formed. And the polishing sheet first portion 310, the polishing sheet second portion 320, and the polishing sheet third portion 330 are of equal thickness.

Fig. 3 is a front view of a target, and the working principle of the target polishing apparatus 100 of the present embodiment will be described in detail with reference to fig. 1 and 3.

The target 600 is rectangular, the top surface of the target is a target sputtering surface 610, the bottom surface of the target is a target welding surface 620, the target welding surface 620 is attached to the surface of the back plate, and the target 600 is welded and fixed with the back plate through the target welding surface 620. The target 600 has four sidewall surfaces 630.

The target 600 has twelve lateral edges 601, and each lateral edge 601 is rounded. Before the fillet process, the position of the lateral edge 601 of the target 600 is sharper. If the target 600 with the side edges not subjected to fillet treatment is used for sputtering coating, the point discharge phenomenon is easily generated at the position of the side edge 601 of the target 600 in the sputtering coating process, so that the coating uniformity is poor, and the coating quality is affected. The rounding passivates the target edges 601 and helps prevent arcing.

When the target 600 is polished by the target polishing device 100, the target polishing device 100 is placed on the target 600, so that the surface of the second portion 320 of the polishing sheet is attached to the surface of the side edge 601 of the target 600, the surface of the first portion 310 of the polishing sheet is attached to the sputtering surface 610 of the target, and the surface of the third portion 330 of the polishing sheet is attached to the surface 630 of the side wall of the target 600. An operator pushes the target polishing apparatus 100 by using the handle, and the target polishing apparatus 100 moves relative to the target 600 in a direction parallel to the extending direction of the lateral edge 601 to be polished. The abrasive particles on the surface of the polishing sheet 300 rub against the surface of the target 600 to obtain a bright and flat surface of the target 600.

In addition, the two sidewall surfaces 630 where the target 600 meets may also be polished simultaneously by the target polishing apparatus 100. Specifically, the first polishing pad portion 310 is attached to one sidewall surface 630 of the target 600, the third polishing pad portion 330 is attached to the other sidewall surface 630 of the target 600, and the second polishing pad portion 320 is attached to the side edge 601 between the two sidewall surfaces 630. An operator moves the target polishing apparatus 100 relative to the target 600 in a direction parallel to the extending direction of the lateral edge 601 to be polished, so that the two sidewall surfaces 630 of the target 600 can be polished simultaneously, and the surface of the lateral edge 601 between the two sidewall surfaces 630 can be polished simultaneously, which is beneficial to improving the efficiency of polishing operation.

Although the present invention is disclosed above, the present invention is not limited thereto. Various changes and modifications may be effected therein by one skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims.