阅读说明：本技术 一种高真空用微型插板阀装置 (Miniature gate valve device for high vacuum ) 是由 关波 袁震 岳纪玲 李祥 于 2019-11-29 设计创作，主要内容包括：本发明公开了一种高真空用微型插板阀装置。所述微型插板阀装置包括用于装载待测样品的样品台；用于封闭样品的密封腔室；密封腔室供样品与大气环境隔绝且进入高真空环境、供样品离开高真空环境进行样品回收及转移；与密封腔室相连接的传送机构；密封腔室为由第一密封滑块和第二密封滑块形成的封闭空间,第一和第二密封滑块通过楔形结构相配合,从而使第一密封滑块能够水平正向推动以及水平反向拉动第二密封滑块运动。通过将样品装载于微型插板阀装置内,从而实现待测样品在制样、转移、观察及回收过程中与大气环境的隔绝,保证待测样品从制样到观察至回收的整个过程都在惰性气体或真空环境下完成,可大大提高检测结果的可靠性和准确度。(The invention discloses a micro gate valve device for high vacuum. The micro gate valve device comprises a sample table for loading a sample to be tested; a sealed chamber for enclosing a sample; the sealed chamber is used for isolating the sample from the atmospheric environment, entering a high vacuum environment and enabling the sample to leave the high vacuum environment for sample recovery and transfer; the conveying mechanism is connected with the sealed chamber; the sealing chamber is a closed space formed by a first sealing slide block and a second sealing slide block, and the first sealing slide block and the second sealing slide block are matched through a wedge-shaped structure, so that the first sealing slide block can be pushed in the horizontal forward direction and pulled in the horizontal reverse direction to move. Through loading the sample in the miniature gate valve device to realize the sample that awaits measuring and the isolation of atmospheric environment in system appearance, transfer, observation and recovery process, guarantee that the sample that awaits measuring accomplishes under inert gas or vacuum environment from system appearance to observation to the whole process of retrieving, can improve the reliability and the degree of accuracy of testing result greatly.)

1. The utility model provides a miniature push-pull valve device for high vacuum which characterized in that: the device comprises:

the sample stage is used for loading a sample to be tested;

a sealed chamber for enclosing a sample; the sealed chamber is used for isolating the sample from the atmospheric environment, enabling the sample to enter a high-vacuum environment and enabling the sample to leave the high-vacuum environment for sample recovery and transfer;

the conveying mechanism is connected with the sealed chamber; the conveying mechanism can drive the sealing chamber to move.

2. The micro gate valve device for high vacuum according to claim 1, characterized in that: the sealing chamber is a closed space formed by a first sealing slide block and a second sealing slide block;

the first sealing slide block and the second sealing slide block are matched through wedge-shaped structures of the first sealing slide block and the second sealing slide block, so that the first sealing slide block can be pushed in the forward direction horizontally and pulled in the reverse direction horizontally to move;

the lower surface of the first sealing slide block and the upper surface of the second sealing slide block are provided with the wedge-shaped structures.

3. The micro gate valve device for high vacuum according to claim 2, characterized in that: and four corners of the bottom of the second sealing sliding block are respectively provided with a first supporting spring, a second supporting spring, a third supporting spring and a fourth supporting spring which are respectively embedded into the first groove, the second groove, the third groove and the fourth groove.

4. The micro gate valve device for high vacuum according to claim 2 or 3, characterized in that: a first sealing ring groove is formed in the middle of the lower part of the second sealing slide block; a first sealing ring is embedded in the first sealing groove.

5. The micro gate valve device for high vacuum according to any one of claims 2 to 4, wherein: a separating spring is arranged on the wall of the second sealing slide block, and the other end of the separating spring is connected with the first sealing slide block;

the separation spring is embedded in a separation spring groove in the first sealing slide block.

6. The micro gate valve device for high vacuum according to any one of claims 1 to 5, wherein: the transmission mechanism comprises a transmission shaft which penetrates through the first sealing sliding block in a communicating mode, a locking ring which fixes the transmission shaft, a limiting ring which limits the longitudinal displacement of the locking ring, a hollow cup motor which provides power for the transmission shaft and is connected with the transmission shaft, and a planetary reducer;

a first gap is formed between the locking ring and the limiting ring, and a second gap is formed between the limiting ring and the first sealing sliding block.

7. The micro gate valve device for high vacuum according to any one of claims 1 to 6, wherein: the high-vacuum miniature gate valve device also comprises a remote control mechanism for controlling the movement and the stop of the conveying mechanism;

the remote control mechanism comprises a remote control module for controlling the rotation direction of the transmission shaft, a miniature lithium battery for supplying power to the miniature gate valve and a wireless remote controller for controlling the miniature gate valve to work.

8. The micro gate valve device for high vacuum according to any one of claims 1 to 7, wherein: the high-vacuum miniature gate valve device also comprises a fixing mechanism which connects and fixes the sealing cavity and the conveying mechanism;

the fixing mechanism comprises a flashboard valve shell for accommodating the sealed cavity, a first fixing plate for fixing the flashboard valve shell, a second fixing plate for fixing the transmission mechanism and the flashboard valve shell, a flashboard valve fixing hole for fixing the sealed cavity to the sample platform, and a first through hole and a second through hole for allowing an electron beam to pass through.

Technical Field

The invention relates to a sealing device for high vacuum, in particular to a micro gate valve device for high vacuum.

Background

With the rapid development of modern microscopic analysis technology, Scanning Electron Microscopes (SEM), focused ion beam-electron beam electron microscope (FIB), X-ray photoelectron spectrometers, and the like have become indispensable instruments for characterizing the microscopic morphology and composition of substances. These instruments use an electron beam, an X-ray, or the like as a light source and interact with a sample to obtain information on the microstructure and composition of the sample. When the detection is carried out, a sample to be detected firstly enters the instrument exchange chamber from the air and then enters the instrument sample chamber from the instrument exchange chamber for analysis.

Instruments such as SEM, X-ray spectrometer, FIB and the like need to work in a high vacuum environment (usually, the vacuum degree of a sample chamber is higher than 10)^-4Pa), which accordingly requires the observed sample to be dry, and requires the test sample to be non-volatile, non-volatile solvent, non-deliquescent, non-crystalline water, etc. Therefore, in general, during the processes of transferring from a glove box or the atmosphere to a sample chamber of a high vacuum instrument and recovering a sample from the high vacuum instrument, some materials with characteristics of easy oxidation and easy deliquescence, such as lithium battery materials, perovskite materials and the like, are easy to deliquesce or oxidize by using a conventional sample loading device, so that the real morphological and compositional information of the sample cannot be obtained. To solve such problems, the method adopted at present is to place the sample in a specially-made sample transfer box and a high vacuum instrument exchange chamber, so as to avoid the sample from contacting with the air environment during the sample transfer and sample introduction process. However, different types of high vacuum instruments from different manufacturers have different sample introduction exchange chambers, so that the defect of poor universality generally exists, and the increasingly diversified microscopic analysis requirements cannot be met.

At present, the research on new materials is a hotspot of the research in the field of material science, and particularly relates to the fields of energy conversion and storage materials, nano science, catalysis and the like. In the research in these hot fields, air-sensitive solid substances that are easily oxidized and easily deliquesced are usually involved, and such substances require high-vacuum instruments such as SEM, X-ray spectrometer, FIB, etc. to analyze important information such as microstructure, components, etc. of the substances, so that the problems of oxidation and deliquescence of such samples in the processes of sample preparation, transfer, sample introduction, detection and recovery are solved, and an important basis is provided for the research of new materials.

Disclosure of Invention

The invention aims to provide a micro gate valve device for high vacuum, which has good sealing performance and can be isolated from the atmospheric environment.

Specifically, the micro gate valve device for high vacuum provided by the invention comprises:

a sealed chamber for enclosing a sample; the sealed chamber is used for isolating the sample from the atmospheric environment, enabling the sample to enter a high-vacuum environment and enabling the sample to leave the high-vacuum environment for sample recovery and transfer;

the sealing chamber is a closed space formed by a first sealing slide block and a second sealing slide block;

a transport mechanism; the conveying mechanism can drive the first sealing slide block and the second sealing slide block to move horizontally, and then sealing of a sample is achieved.

In the micro gate valve device for high vacuum, the first sealing slide block and the second sealing slide block are matched through wedge structures of the first sealing slide block and the second sealing slide block, so that the first sealing slide block can be pushed in the forward direction horizontally and pulled in the reverse direction horizontally to move;

the lower surface of the first sealing slide block and the upper surface of the second sealing slide block are provided with the wedge-shaped structures.

In the miniature gate valve device for high vacuum, the bottom of the second sealing slide block is provided with a first sealing ring groove, and a first sealing ring is embedded in the first sealing ring groove and used for increasing the sealing performance between the first sealing ring groove and the sample table.

In the micro gate valve device for high vacuum, the four corners of the bottom of the second sealing slide block are respectively provided with a first supporting spring, a second supporting spring, a third supporting spring and a fourth supporting spring which are respectively embedded into the first groove, the second groove, the third groove and the fourth groove; because the second sealing slide block can generate friction force with the surface of the fixing mechanism to block the movement when moving horizontally, and at the moment, the first supporting spring, the second supporting spring, the third supporting spring and the fourth supporting spring are in a compressed state, the upward supporting force of the second sealing slide block can greatly reduce the resistance between the second sealing slide block (or the sealing ring) and the surface of the fixing mechanism, so that the second sealing slide block can keep moving horizontally.

In the micro gate valve device for high vacuum, the wall of the second sealing slide block is provided with the separation spring, and the other end of the separation spring is connected with the first sealing slide block (on the right side wall) and can assist the horizontal movement of the second sealing slide block.

In the above-mentioned micro gate valve device for high vacuum, the transmission mechanism includes a transmission shaft passing through the first sealing slider, a locking ring fixing the transmission shaft, a limiting ring limiting axial displacement of the transmission shaft, a hollow cup motor providing power to the transmission shaft and connected to the transmission shaft, and a planetary reducer.

In the micro gate valve device for high vacuum, a first gap is formed between the locking ring and the limiting ring to provide a space for the axial rotation of the locking ring;

and a second gap is formed between the limiting ring and the first sealing sliding block so as to ensure that the horizontal movement of the first sealing sliding block is not hindered by the friction of the limiting ring.

In the above-mentioned micro gate valve device for high vacuum, the micro gate valve device for high vacuum further comprises a control mechanism for controlling the movement and stop of the conveying mechanism;

the control mechanism comprises a remote control module for controlling the rotation direction of the transmission shaft, a miniature lithium battery for supplying power to the miniature gate valve and a wireless remote controller for controlling the miniature gate valve to work.

In the above-mentioned micro gate valve device for high vacuum, the micro gate valve device for high vacuum further comprises a fixing mechanism for connecting and fixing the sealing chamber and the conveying mechanism;

the fixing mechanism comprises a flashboard valve shell for accommodating the sealed cavity, a first fixing plate for fixing the flashboard valve shell, a second fixing plate for fixing the transmission mechanism and the flashboard valve shell, a flashboard valve fixing hole for fixing the sealed cavity on the sample platform, and a first through hole and a second through hole for allowing an electron beam to pass through;

the picture peg valve casing for 3D print one shot forming.

Through with the sample load in sealed miniature push-pull valve device to realize the sample that awaits measuring and the isolation of atmospheric environment in system appearance, transfer, observation and recovery process, guarantee that the sample that awaits measuring accomplishes under inert gas or vacuum environment from system appearance to the whole process of observing to retrieving, can improve the reliability and the degree of accuracy of testing result greatly. In addition, the device has the advantages of strong universality, small volume, simple and convenient operation and control and high cost performance, is suitable for high-vacuum instruments of different types, does not influence the performance index of the original instrument, and has important significance for meeting increasingly diversified scientific research requirements and expanding the application field of the high-vacuum instruments.

Drawings

FIG. 1 is a schematic view of the overall structure of the high vacuum micro gate valve of the present invention;

FIG. 2 and FIG. 3 are schematic cross-sectional views of the high vacuum micro gate valve according to the present invention;

FIG. 4 is a schematic view of the sealing mechanism, the conveying mechanism and the control mechanism of the high-vacuum micro gate valve sealing structure of the present invention;

FIG. 5 is a schematic structural diagram of a scanning electron microscope sample stage in the example;

FIG. 6 is a schematic structural diagram of the high vacuum micro gate valve shown in FIG. 1 and the scanning electron microscope sample stage in the embodiment.

Description of reference numerals:

10 sealed chamber 20 transport mechanism

30 control mechanism 40 sample table

50 securing mechanism 60 sample

101 first sealing slide 102 second sealing slide

103 flashboard valve casing

201 drive shaft 202 spacing ring

203 lock ring 204 planetary reducer

205 coreless motor 301 remote control module

302 micro lithium battery 303 remote controller

401 second seal 402 second seal groove

1011 first separation spring 1012 second separation spring

1013 first split spring recess 1014 second split spring recess

1015 first wedge structure

1021 first supporting spring 1022 and second supporting spring

1023 third support spring 1024 and a fourth support spring

1025 first seal ring groove 1026 first seal ring

1027 first groove 1028 second groove

1029 third groove 1020 fourth groove

1020A second wedge Structure

2031 first gap 2021 second gap

1031 first fixing hole 1032 and second fixing hole

1033 first and second limit nuts 1034 and

1035 first nut aperture 1036 second nut aperture

1037 first fixing plate 1038 second fixing plate

1039 first through hole 1030 second through hole

Detailed Description

The present invention will be further described with reference to the accompanying drawings, but the present invention is not limited to the following embodiments.

As shown in fig. 1, fig. 2 and fig. 5, the high vacuum micro gate valve of the present invention comprises a sealed chamber 10 for enclosing a sample, a transfer mechanism 20 connected to the sealed chamber 10, a control mechanism 30 for controlling the transfer mechanism 20 to move and stop and a fixing mechanism 50 for connecting and fixing the sealed chamber 10, the transfer mechanism 20 and the control mechanism 30; the sealed chamber 10 is used for isolating the sample from the atmosphere, entering the high vacuum environment, and leaving the high vacuum environment for sample recovery and transfer.

In the micro gate valve device for high vacuum of the present invention, the sealing chamber 10 is a closed chamber formed by the first sealing slider 101 and the second sealing slider 102, and the two are attached by the first wedge structure 1015 at the bottom of the first sealing slider 101 and the wedge structure 1020A at the bottom of the second sealing slider 102 (as shown in fig. 3), and the structure is used for the movement of the first sealing slider 101 horizontally pushing forward and pulling the second sealing slider 102 backward. As shown in fig. 2 and 4, the bottom of the second sealing slider 102 is respectively provided with a first supporting spring 1021, a second supporting spring 1022, a third supporting spring 1023 and a fourth supporting spring 1024 perpendicular to the moving direction thereof, which are respectively embedded in the first groove 1027, the second groove 1028, the third groove 1029 and the fourth groove 1020. A first sealing ring groove 1025 is formed in the middle of the bottom of the second sealing slider 102, and a first sealing ring 1026 is embedded in the first sealing ring groove 1025. The right outer side of the first seal slider 101 is provided with a first separation spring 1011 and a second separation spring 1012 which are parallel to the moving direction of the second seal slider 102, and the other end is connected with the right outer side wall of the second seal slider 102.

In the micro gate valve device for high vacuum of the present invention, the transmission mechanism 20 includes a transmission shaft 201 passing through the first sealing slider 101, a locking ring 203 for fixing the transmission shaft 201, a limiting ring 202 for limiting the longitudinal displacement of the locking ring 203, a planetary reducer 204 for providing the power to the transmission shaft 201 and connected to the transmission shaft 201, and a hollow cup motor 205, wherein a first gap 2031 is formed between the locking ring 203 and the limiting ring 202, and a second gap 2021 is formed between the limiting ring 202 and the first sealing slider 101.

In the micro gate valve device for high vacuum of the present invention, the control mechanism 30 comprises a remote control module 301 for controlling the rotation direction of the transmission shaft 201, a micro lithium battery 302 for supplying power to the micro gate valve, and a wireless remote controller 303 for controlling the micro gate valve to work.

In the micro gate valve device for high vacuum of the present invention, the fixing mechanism 50 includes a gate valve housing 103 accommodating the sealing chamber 10 (the gate valve housing is 3D printed and formed at one time), a first fixing plate 1037 fixing the gate valve housing 103 and a second fixing plate 1038 fixing the driving mechanism 20 and the gate valve housing 103, a first fixing hole 1031 and a second fixing hole 1032 fixing the sealing chamber 10 to the sample stage 40, and a first through hole 1039 and a second through hole 1030 allowing an electron beam to pass therethrough.

When the micro gate valve device for high vacuum is used, as shown in fig. 6, the micro gate valve device is matched with a scanning electron microscope sample stage (shown in fig. 5), and the specific use process is as follows:

the use of the micro gate valve mainly comprises the sealing and opening processes.

And (3) sealing the sample: a forward switch of a wireless remote controller is operated outside an instrument or a glove box (the environment inside the instrument is generally a vacuum environment, and the environment inside the glove box is generally an inert gas environment), a remote control module 301 of a micro gate valve receives a signal, a hollow cup motor 205 rotates forward, a transmission shaft 201 connected with the hollow cup motor 205 and a planetary reducer 201 drives a first sealing slide block 101 to move horizontally and forwardly, at the moment, the first sealing slide block 101 and a second sealing slide block 102 are in wedged fit, the second sealing slide block 102 moves horizontally along with the first sealing slide block 101, as a first sealing ring 1026 is arranged at the bottom of the second sealing slide block 102, the friction force between the first sealing ring 1026 and the surface of a fixing mechanism can block the horizontal movement of the second sealing slide block 102, and at the moment, a first supporting spring, a second supporting spring, a third supporting spring and a fourth supporting spring are in a compression state, the resistance between the first sealing ring 1026 and the gate valve shell 103 can be greatly reduced by the upward supporting force, the second sealing slide block 102 is enabled to keep moving in the horizontal direction, in addition, separation springs 1011 and 1012 are arranged between the first sealing slide block 101 and the second sealing slide block 102, compression of the separation springs can also assist in providing horizontal movement of the second sealing slide block 102, the supporting effect of the supporting springs and the separation springs on the second sealing slide block 102 can effectively prevent the first sealing slide block 101 and the second sealing slide block 102 from being separated from a sealing chamber to be damaged, after the second sealing slide block 102 contacts a limiting nut of the gate valve shell 103, the horizontal movement of the second sealing slide block stops, the first sealing slide block 101 still moves in the horizontal forward direction and generates downward pressure on the second sealing slide block 102 until a first sealing ring 1026 located on the second sealing slide block 102 is completely attached to the sample platform 40, and the sealing process is completed. At this time, the first seal sliding block 101 still moves in the horizontal forward direction to the right inner sidewall of the seal chamber 10, and contacts the first limit nut 1033 (disposed in the first nut hole 1035) and the second limit nut 1034 (disposed in the second nut hole 1036), and the movement thereof is stopped.

The opening process is opposite to the sealing process, a reverse switch of a wireless remote controller is controlled outside an instrument or a glove box, a remote control module 301 of a micro gate valve receives signals, a hollow cup motor 205 rotates reversely, a transmission shaft 201 connected with the hollow cup motor 205 and a planetary reducer 204 drives a first sealing slide block 101 to move horizontally and reversely, at the moment, a second sealing slide block 102 is still in a sealing state, after the first sealing slide block 101 moves to be attached to the second sealing slide block 102 in a wedge shape, the second sealing slide block 102 drives the first sealing slide block 101 to move horizontally and reversely, and when the second sealing slide block 102 moves to the first sealing slide block and a separation spring is completely compressed, the second sealing slide block stops moving. At this time, the first sealing slide 101 continues to move horizontally in the opposite direction until reaching the position of the stop collar, and the movement is stopped. At the moment, the micro gate valve is in an open state.