阅读说明：本技术 易于设置的半导体及液晶显示器制造工序的废气加热用三重管加热装置 (Triple tube heating device for exhaust gas heating of semiconductor and liquid crystal display manufacturing process easy to install ) 是由 李承龙 于 2018-03-27 设计创作，主要内容包括：本发明涉及具有三重管结构,以在不使用氮气的情况下仅用少量的热量就能够有效加热废气,并且可以伸缩及弯曲,从而易于设置且可以快速检测废气泄漏及过热的半导体及液晶显示器制造工序的废气加热用三重管加热装置。(The present invention relates to a triple tube heating apparatus for exhaust gas heating, which has a triple tube structure to effectively heat exhaust gas with a small amount of heat without using nitrogen gas, and which can be extended and bent to be easily installed and to rapidly detect exhaust gas leakage and overheating in a semiconductor and liquid crystal display manufacturing process.)

1. A triple tube heating apparatus for heating exhaust gas, which is a heating apparatus for preventing solidification of exhaust gas by heating exhaust gas transferred between a vacuum pump and a scrubber in a semiconductor and liquid crystal display manufacturing process, comprising:

a connection pipe connected between the vacuum pump and the scrubber to circulate the exhaust gas to the inside, and formed by continuously combining a plurality of short pipes having a ring shape, so that the remaining part except for one part of the both ends can be extended and bent;

an inner bellows which is provided in close contact with an outer peripheral surface of the remaining portion of the connection pipe excluding both end portions thereof and is capable of expanding and contracting and bending together with the connection pipe;

a heating member closely attached to an outer peripheral surface of the inner bellows, and configured to heat the connection pipe through the inner bellows; and

and an outer bellows surrounding the inner bellows with a space therebetween, blocking external air to create a thermal atmosphere, and being capable of expanding and contracting and bending in correspondence with the connection pipe and the inner bellows.

2. The triple tube heating apparatus for heating exhaust gas according to claim 1, wherein the heating member has a predetermined width, is formed in a long and flat band shape, is spirally wound around an outer circumferential surface of the inner bellows, and is wound with side end portions thereof spaced apart so as not to overlap with each other, thereby preventing interference when the inner bellows expands and contracts and bends.

3. The triple tube heating apparatus for heating exhaust gas according to claim 2, wherein the wrinkles of the inner bellows are smaller than those of the outer bellows, and the inner bellows is in close contact with an outer peripheral surface of the connection tube.

4. Triple tube heating apparatus for exhaust gas heating according to claim 2,

the heating member includes:

a heat generating line that generates heat by receiving electric power;

a lower layer part formed in a state of containing the heat generating line, having a lower surface contacting the inner bellows, and formed by mixing a polypropylene resin and fine carbon particles, wherein the fine carbon particles are contained in an amount of 20 to 30 wt% with respect to the polypropylene resin, thereby smoothly discharging heat generated from the heat generating line;

an upper layer part formed in an inverted U-shape surrounding an upper surface and a side surface of the lower layer part, and formed by mixing a polypropylene resin and fine aluminum hydroxide particles, wherein the content of the fine aluminum hydroxide particles is 50 to 60 wt% with respect to the polypropylene resin, thereby blocking heat generated from the heat generating line from being released to other parts of the lower layer part except the lower surface; and

a middle layer part formed by fine fumed silica particles on an intermediate interface between the lower layer part and the upper layer part, and doubly blocking heat generated from the heat generating line from being released to other parts of the lower layer part except for the lower surface together with the upper layer part,

the heating member guides heat generated from the heat generating wire to a connection pipe side through the inner bellows.

5. The triple tube heating apparatus for heating exhaust gas according to claim 2, further comprising a first cover member and a second cover member, the first cover member and the second cover member being provided so as to surround an outer peripheral surface of a front end portion and an outer peripheral surface of a rear end portion of the connection tube, which are not surrounded by the inner bellows, with a space therebetween, and the open front end portion and the open rear end portion of the outer bellows are closed by being closed in a state where the inner space is formed, wherein the first temperature sensor provided in the first cover member for closing the front end portion of the outer bellows is capable of measuring a temperature of the closed inner space of the outer bellows, and the controller is capable of controlling the heat generating line based on the temperature measured by the first temperature sensor to maintain an appropriate temperature.

6. Triple tube heating apparatus for exhaust gas heating according to claim 5,

further comprising:

a short connection pipe penetrating the first cover member and connected to a tip end portion of the connection pipe;

a closed box which surrounds the connection part of the front end part of the short connecting pipe and the scrubber side pipeline and the connection part of the rear end part of the connecting pipe and the vacuum pump side pipeline respectively in a closed manner to form a small-scale temperature measuring space in the closed box, and is formed by combining a half body divided into two parts on the left side and the right side; and

a second temperature sensor for measuring the temperature of the inner space of each of the closed boxes,

the controller can be made to determine whether the heat generation line is abnormal and whether the exhaust gas leaks, based on the temperature of the internal space of the closed box measured by the second temperature sensor.

7. The triple tube heating apparatus for heating exhaust gas according to claim 6, wherein a leak port for guiding leaked exhaust gas to the scrubber is provided in the first lid member and the close box provided at each of a front end connection portion of the short connection pipe and a rear end connection portion of the connection pipe,

the rear end of the connecting pipe is connected with the flange of the vacuum pump side pipeline, the front end of the short connecting pipe is connected with the flange of the washer side pipeline, the flange connection is carried out by an annular clamp,

the front end of the external bellows is coupled to a first cover member flange, the rear end of the external bellows is coupled to a second cover member flange, and the respective flange couplings are performed by a plurality of claw clamps.

Technical Field

The present invention relates to semiconductor and liquid crystal display manufacturing equipment, and more particularly, to a triple tube heating apparatus for exhaust gas heating having a triple tube structure to effectively heat exhaust gas with a small amount of heat without using nitrogen gas, and to be retractable and bendable, thereby being easily installed and rapidly detecting exhaust gas leakage and overheating in a semiconductor and liquid crystal display manufacturing process.

Background

Generally, a semiconductor manufacturing process generally includes a pre-process (Fabrication) of manufacturing a semiconductor Chip (Chip) by repeatedly performing a process of depositing a thin film on a Wafer (Wafer) and selectively etching the deposited thin film in various process chambers (chambers) to process a specific pattern, and a post-process (Assembly) of separately separating the Chip manufactured in the pre-process and then assembling the Chip with a lead frame to form a finished product.

In this case, the step of depositing a thin film on the wafer or etching the thin film deposited on the wafer is performed at a high temperature in the process chamber by using a harmful gas such as Silane (Silane), hydrogen arsenide (Arsine), or boron chloride, or a process gas such as hydrogen, and various flammable gases, corrosive foreign substances, and exhaust gas containing toxic components are generated in a large amount in the process chamber during the step.

Therefore, in a semiconductor manufacturing process, a Scrubber (Scrubber) for purifying an exhaust gas discharged from a process chamber and then discharging the exhaust gas into the atmosphere is provided at the rear side of a vacuum pump for forming the process chamber in a vacuum state. However, toxic exhaust gas generated from the process chamber is easily solidified and accumulated in the process of passing from the process chamber to the vacuum pump and the scrubber through the pipes, and then a clogging phenomenon is generated.

Therefore, as a method for solving the problem of the clogging phenomenon caused by the solidification of the exhaust gas, in recent years, for example, korean laid-open patent publication No. 2010-0102393 (09/18/2012) discloses a "nitrogen gas injector device with a mixed conductor" which prevents the solidification of the exhaust gas by injecting high-temperature nitrogen gas into the inside of a pipe through which reaction by-products flow to mix the nitrogen gas with the exhaust gas.

However, such a prior art apparatus, although very useful for preventing solidification of exhaust gas, requires additional facilities for generating high-temperature nitrogen, and installation of the apparatus is not easy. Further, there is a risk of exhaust gas leakage at the connection portion with the conventional transfer duct, but in actual circumstances, measures against this are insufficient.

Disclosure of Invention

Technical problem

Accordingly, the present invention has been made to solve the above-mentioned problems occurring in the prior art, and an object of the present invention is to provide a triple tube heating apparatus for heating exhaust gas, which has a triple tube structure, can effectively heat exhaust gas with a small amount of heat without using nitrogen gas, can be extended and contracted and bent, is easy to install, and can rapidly detect leakage and overheating of exhaust gas in a semiconductor or liquid crystal display manufacturing process.

Means for solving the problems

In order to achieve the above object, a triple tube heating apparatus for heating exhaust gas according to the technical idea of the present invention is a heating apparatus for preventing solidification of exhaust gas by heating exhaust gas transferred between a vacuum pump and a scrubber in a semiconductor and liquid crystal display manufacturing process, comprising: a connection pipe connected between the vacuum pump and the scrubber to circulate the exhaust gas to the inside, and formed by continuously combining a plurality of short pipes having a ring shape, so that the remaining part except for one part of the both ends can be extended and bent; an inner bellows which is provided in close contact with an outer peripheral surface of the remaining portion of the connection pipe excluding both end portions thereof and is capable of expanding and contracting and bending together with the connection pipe; a heating member closely attached to an outer peripheral surface of the inner bellows, and configured to heat the connection pipe through the inner bellows; and an external bellows surrounding the internal bellows in a spaced manner and blocking external air to create a heat insulating atmosphere, the external bellows being capable of expanding and contracting and bending in correspondence with the connection pipe and the internal bellows.

The present invention is characterized in that the heating member may have a predetermined width, be formed in a long and flat band shape, and be spirally wound around an outer circumferential surface of the inner bellows, and the side end portions of the heating member may be wound so as not to overlap with each other, thereby preventing interference from occurring when the inner bellows expands and contracts and bends.

Further, the present invention is characterized in that the heating member may include: a heat generating line that generates heat by receiving electric power; a lower layer part formed in a state of containing the heat generating line, having a lower surface contacting the inner bellows, and formed by mixing a polypropylene resin and fine carbon particles, wherein the fine carbon particles are contained in an amount of 20 to 30 wt% with respect to the polypropylene resin, thereby smoothly discharging heat generated from the heat generating line; an upper layer part formed in an inverted U-shape surrounding an upper surface and a side surface of the lower layer part, and formed by mixing a polypropylene resin and fine aluminum hydroxide particles, wherein the content of the fine aluminum hydroxide particles is 50 to 60 wt% with respect to the polypropylene resin, thereby blocking heat generated from the heat generating line from being released to other parts of the lower layer part except the lower surface; and a middle layer part formed of fine fumed silica particles at an intermediate interface between the lower layer part and the upper layer part, and doubly blocking heat generated from the heat generating wire from being released to other parts of the lower layer part except for a lower surface together with the upper layer part, wherein the heating member guides the heat generated from the heat generating wire to a connection pipe side through the internal bellows.

In addition, the present invention is characterized in that the connection pipe further includes a first cover member and a second cover member, the first cover member and the second cover member may be provided to surround an outer peripheral surface of a front end portion and an outer peripheral surface of a rear end portion of the connection pipe, which are not surrounded by the inner bellows, in a spaced manner, and when the open front end portion and the open rear end portion of the outer bellows are closed by the closing in a state where the inner space is formed, a first temperature sensor provided in the first cover member for closing the front end portion of the outer bellows may measure a temperature of the closed inner space of the outer bellows, and the controller may control the heat generating line based on the temperature measured by the first temperature sensor to maintain an appropriate temperature.

Further, the present invention may further include: a short connection pipe penetrating the first cover member and connected to a tip end portion of the connection pipe; a closed box which surrounds the connection part of the front end part of the short connecting pipe and the scrubber side pipeline and the connection part of the rear end part of the connecting pipe and the vacuum pump side pipeline respectively in a closed manner to form a small-scale temperature measuring space in the closed box, and is formed by combining a half body divided into two parts on the left side and the right side; and a second temperature sensor for measuring the internal space temperature of each closed box, wherein the controller can judge whether the heating wire is abnormal and whether the waste gas leaks based on the internal space temperature of the closed box measured by the second temperature sensor.

Further, the present invention may be characterized in that the first lid member and the seal case provided at the front end connection portion of the short connection pipe and the rear end connection portion of the connection pipe, respectively, may be provided with a leak port for guiding the leaked exhaust gas to the scrubber, the rear end portion of the connection pipe may be coupled to the vacuum pump side pipe flange, the front end portion of the short connection pipe may be coupled to the scrubber side pipe flange, each flange coupling may be performed by a ring clamp, the front end portion of the outer bellows may be coupled to the first lid member flange, the rear end portion of the outer bellows may be coupled to the second lid member flange, and each flange coupling may be performed by a plurality of claw clamps.

ADVANTAGEOUS EFFECTS OF INVENTION

The triple tube heating device for heating exhaust gas has the following advantages: has a triple pipe structure to effectively heat the exhaust gas with a small amount of heat without using nitrogen gas, and is flexible and bendable, thereby being easily installed.

And, the present invention can detect leakage and overheating of exhaust gas more rapidly through the closed box.

Drawings

Fig. 1 is a perspective view of a triple tube heating apparatus for heating exhaust gas according to an embodiment of the present invention.

Fig. 2 is a sectional view of a triple tube heating apparatus for heating exhaust gas according to an embodiment of the present invention.

Fig. 3 is an enlarged view of a portion a of fig. 2, and fig. 4 is an enlarged view of a portion B of fig. 2.

Fig. 5 is a partially cutaway view of a triple tube heating apparatus for exhaust gas heating according to an embodiment of the present invention.

Fig. 6 is an exploded perspective view of a triple tube heating apparatus for heating exhaust gas according to an embodiment of the present invention.

Fig. 7 is a diagram for explaining control performed in the exhaust gas heating triple tube heating apparatus according to the embodiment of the present invention.

Description of reference numerals

110: connecting pipe 120: internal corrugated pipe

130: the outer bellows 140: heating member

150: the sensor module 160: cover module

Detailed Description

The exhaust gas heating triple tube heating apparatus according to the embodiment of the present invention will be described in detail with reference to the accompanying drawings. While the invention is susceptible to various modifications and alternative forms, specific embodiments thereof are shown by way of example in the drawings and will herein be described in detail. However, it should be understood that the present invention is not intended to be limited to the particular forms disclosed, but to include all modifications, equivalents, and alternatives falling within the spirit and scope of the present invention. In describing the various figures, like reference numerals have been used for like structural elements. In the drawings, the size of the structures may be exaggerated relative to the actual size for clarity of description or may be reduced relative to the actual size for understanding the simple structure.

Also, the terms "first", "second", and the like may be used to describe various structural elements, but the structural elements are not limited by the terms. The above terms are only used to distinguish one structural element from another. A first structural element can be termed a second structural element, and similarly, a second structural element can be termed a first structural element. On the other hand, unless otherwise defined, all terms including technical and scientific terms used in the present specification have the same meaning as commonly understood by one of ordinary skill in the art to which the present invention belongs. Terms defined in commonly used dictionaries should be interpreted as having meanings consistent with those of relevant art documents, and should not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

Fig. 1 is a perspective view of a triple tube heating apparatus for heating exhaust gas according to an embodiment of the present invention, fig. 2 is a sectional view of the triple tube heating apparatus for heating exhaust gas according to the embodiment of the present invention, fig. 3 is an enlarged view of a portion a of fig. 2, fig. 4 is an enlarged view of a portion B of fig. 2, fig. 5 is a partially cutaway view of the triple tube heating apparatus for heating exhaust gas according to the embodiment of the present invention, fig. 6 is an exploded perspective view of the triple tube heating apparatus for heating exhaust gas according to the embodiment of the present invention, and fig. 7 is a view for explaining control performed in the triple tube heating apparatus for heating exhaust gas according to the embodiment of the present invention.

As shown in the drawings, the triple pipe heating apparatus for heating exhaust gas according to the embodiment of the present invention includes a connection pipe 110, an inner corrugated pipe 120, an outer corrugated pipe 130, a heating member 140 for heating exhaust gas, a sensor module 150, and a cover module 160 as main structural elements, wherein the connection pipe 110, the inner corrugated pipe 120, and the outer corrugated pipe 130 form a triple pipe structure, thereby maximizing a heat insulation effect, and since these can be extended and contracted and bent, the triple pipe heating apparatus can be easily installed even in a limited environment.

With the above-described configuration, the triple tube heating apparatus for heating exhaust gas according to the embodiment of the present invention is simple in arrangement, can heat exhaust gas efficiently with only a small amount of heat, and can take measures by quickly detecting whether exhaust gas leaks and is overheated.

Hereinafter, the exhaust gas heating triple tube heating apparatus according to the embodiment of the present invention will be described in more detail with reference to the above-described components.

The connection pipe 110 is connected between a vacuum pump and a scrubber to allow exhaust gas to flow therein. As shown in fig. 2, the connection pipe 110 is formed by continuously coupling a plurality of short pipes 111 having a ring shape, so that the remaining portion of the main body except for a portion of both end portions can be expanded and contracted and bent. It should be noted that, in the case of the connection pipe 110, in order to be able to expand and contract and bend, the main body is configured by continuously coupling a plurality of short pipes 111, unlike the case of the inner bellows 120 or the outer bellows 130, which uses a bellows. According to the above-described structure, the connection pipe 110 can be extended and bent, and has a relatively smooth inner circumferential surface, unlike a bellows, which is not greatly rugged, thereby having an advantage of minimizing the problem of obstructing the flow of the exhaust gas.

The inner bellows tube 120 is provided in close contact with and surrounds the outer peripheral surface of the remaining portion of the connection tube 110 except for both end portions, and is formed of a corrugated tube, also called a bellows tube, which is corrugated. The inner bellows 120 performs a function of first insulating the connection pipe 110 and uniformly transferring heat generated from the heating member 140 to the connection pipe 110. In the case of the inner bellows tube 120, some inner space is formed between the connection tube 110 and the inner bellows tube by its own wrinkles in a state of being almost closely attached to the outer circumferential surface of the connection tube 110, thereby contributing to uniformly transferring heat generated from the heating member 140 to the surface of the heating tube. As described above, the inner bellows tube 120 uniformly transfers heat supplied from the heating member 140 to the connection tube 110, and functions to retain the heat transferred by capturing the heat. The inner bellows 120 may be extended and contracted and bent together with the connection pipe 110 and the outer bellows 130, thereby facilitating installation of the entire apparatus. In the above-described structure of the inner bellows 120, it is noted that the wrinkles of the inner bellows 120 are smaller than those of the outer bellows 130, so that the inner bellows can be brought into close contact with the outer circumferential surface of the connection pipe 110 and the heating member 140.

The outer bellows 130 performs a function of insulating the connection pipe 110 together with the inner bellows 120, and is expandable and bendable. Accordingly, the outer bellows 130 is formed of a corrugated bellows surrounding the inner bellows 120 with a space therebetween to create a thermal atmosphere by blocking the external air, and is capable of expanding and contracting and bending together with the connection pipe 110 and the inner bellows 120. In the case of the external bellows 130, since the open portions at both ends are wide, it is important to close the open portions to close (even if not completely close) the internal space in order to effectively keep the connection pipe 110 warm, and the first cover member 161 and the second cover member 162 belonging to the cover module 160 function as described above. The first cover member 161 and the second cover member 162 will be described later.

The heating member 140 is closely attached to the outer circumferential surface of the inner bellows 120, and serves to heat the connection pipe 110 through the inner bellows 120. Therefore, the heating member 140 has a predetermined width, is formed in a long and flat band shape, and is spirally wound around the outer circumferential surface of the inner bellows 120. In this case, the winding is spaced to prevent the side end portions of the heating member 140 from overlapping, thereby ensuring flexibility when the inner bellows 120 is expanded and contracted and bent to prevent interference.

As shown in fig. 5, the heating part 140 as described above includes: a heat generating line 141 that generates heat by receiving power; a lower portion 142 formed to include the heat generating wire 141 and having a lower surface contacting the inner bellows 120, and capable of smoothly discharging heat generated from the heat generating wire to the inner bellows 120; an upper portion 144 formed in an inverted U shape surrounding an upper surface and a side surface of the lower portion 142, for blocking heat generated from the heat generating line 141 from being released to other portions of the lower portion 142 except the lower surface; and a middle portion 143 formed at an intermediate interface between the lower portion 142 and the upper portion 144, and doubly blocking heat generated from the heat generating line 141 from being released to other portions of the lower portion 142 except for a lower surface thereof together with the upper portion 144.

In order to smoothly release heat, the lower portion 142 is formed by mixing polypropylene resin and fine carbon particles with a thermally conductive material, and the content of the fine carbon particles is 20 to 30 wt% with respect to the polypropylene resin. The upper layer 144 is formed by mixing a polypropylene resin and fine aluminum hydroxide particles as a heat insulating material, and the fine aluminum hydroxide particles are contained in an amount of 50 to 60 wt% based on the polypropylene resin. The middle layer 143 is formed of fumed silica particles that have attracted attention as an effective heat insulator in recent years, and the middle layer 143 is formed in a state in which the fumed silica particles are impregnated in flame-retardant ceramic fibers.

According to the structure of the heating member 140 as described above, the heat generated from the heat generating wire 141 is directed toward the direction in which the connection pipe 110 is located, and is prevented from being released toward the outside in the opposite direction, thereby minimizing the loss.

The cover module 160 includes first and second cover members 161 and 162, a first temperature sensor 164, a bimetal 165, and a cap 166.

In the cover module 160, the first cover member 161 and the second cover member 162 are provided to surround the outer peripheral surface of the front end and the outer peripheral surface of the rear end of the connection pipe 110, which are not surrounded by the inner bellows 120, with a space therebetween, and the open front end and the open rear end of the outer bellows 130 are closed by the closing member in a state where an inner space is formed. The front end of the outer bellows 130 and the first cover member 161, and the rear end of the outer bellows 130 and the second cover member 162 have a plurality of flanges 131a, 161a, 131b, and 162a, respectively, and are flange-coupled to each other, and the coupling between the flanges is simply performed by a plurality of claw clamps 132 (gripper type clamps).

On the other hand, a first temperature sensor 164 for measuring a surface temperature of the first cover member 161 is provided on an outer peripheral surface thereof. The first temperature sensor 164 measures the heat of the inner space of the external bellows 130 in the closed state by the first cover member 161 and the second cover member 162, and the surface temperature of the first cover member 161 formed by receiving the heat from the tip end portion of the connection pipe 110 directly coupled to the first cover member 161. As such, when the first temperature sensor 164 measures the surface temperature of the first cover member 161, a controller (not shown) may control the temperature of the heat generating wire 141 based on the measured temperature to maintain an appropriate temperature. A power supply and sensor port 164 and a bimetal 165 are provided outside the first cover module 160, and a cap 166 is provided to cover them to prevent exposure to the outside.

The sensor modules 150 are respectively provided at the front end and rear end connection portions of the connection pipe 110, and serve to detect whether the heating wire 141 is abnormal and whether exhaust gas is leaked. To this end, the sensor module 150 further includes a closed box 151, and the closed box 151 encloses a connection portion between the front end of the connection pipe stub 167 connected to the front end of the connection pipe 110 and the scrubber-side pipe P2 and a connection portion between the rear end of the connection pipe 110 and the vacuum pump-side pipe P1 in a closed manner, respectively, to form a small-scale temperature measurement space therein. The closed casing 151 described above plays a role in improving the assembling property of the apparatus by a structure in which the half bodies 151a and 151b divided into two are joined at the left and right sides. Each of the closed boxes 151 is provided with a second temperature sensor 154 for measuring the temperature of the internal space thereof. Thus, the controller can determine whether the heat generating line 141 is abnormal and whether the exhaust gas leaks based on the temperature of the inner space of the closed casing 151 measured by the second temperature sensor 154. However, as shown in fig. 6, the short connection pipe 167 is a short pipe connected to the distal end of the connection pipe 110 via a through hole 161b formed at the distal end of the first cover member 161. On the other hand, an inner flange 161b is provided on the inner surface of the front end of the first cover member 161 to be flange-coupled to a flange 112a provided at the front end of the connection pipe 110.

In the structure of the sensor module 150 as described above, since the close tank 151 is provided to respectively surround the connection portion of the front end portion of the connection stub 167 and the scrubber-side pipe P2 and the connection portion of the rear end portion of the connection pipe 110 and the vacuum pump-side pipe P1 in a closed manner, even if a small amount of exhaust gas leaks through the connection portions, the temperature change can be rapidly detected by the second temperature sensor 154, and thus the controller can more rapidly issue a warning and can interrupt the operation of the apparatus as needed.

On the other hand, the first cover member 161 and the closed casing 151 provided at the front end connection portion of the short connection pipe 167 and the rear end connection portion of the connection pipe 110 are provided with gas leakage ports 153 and 163 for guiding the leaked exhaust gas to the scrubber. As shown in fig. 7, these leakage ports are merged at one pipe toward the scrubber, so that they are safely guided to the scrubber even if the leakage amount of the exhaust gas is not large.

The rear end of the connection pipe 110 is flange-coupled to the vacuum pump side pipe P1, and the front end of the short connection pipe 167 is flange-coupled to the scrubber side pipe P2, and the respective flange couplings are performed by the ring clamp 156. The front end of the outer bellows 130 is flange-coupled to the first cover member 161, and the rear end of the outer bellows 130 is flange-coupled to the second cover member 162, and the flange-coupling is performed by a plurality of claw clamps 132. Viewing the structure as described above, although the present invention is formed of a relatively complex triple tube structure, it can be easily assembled and disassembled, and can be easily connected between existing pipes.

While the preferred embodiments of the present invention have been described, the present invention is susceptible to various changes, modifications and equivalents. Obviously, the present invention can be applied in the same manner by appropriately modifying the above-described embodiments. Therefore, the above description does not limit the scope of the present invention defined by the following claims.