阅读说明：本技术 形状测定装置 (Shape measuring device ) 是由 金松敏裕 于 2019-08-06 设计创作，主要内容包括：本发明提供一种形状测定装置。在具备用于检测器的定位的电动进给机构的形状测定装置中,能够简化线缆类的引绕,实现检测器的平滑的移动。本发明的一个方式的形状测定装置具备具有检测对象物的表面的位置的检测器的形状测定机和使形状测定机沿轴向移动的进给机构。进给机构具有以能够绕轴旋转的方式设置的驱动轴、以从与驱动轴的轴线正交的方向夹持驱动轴的方式设置且能够在摩擦接触状态与分离状态之间切换的牵引螺母部以及将牵引螺母部与形状测定机进行连结的支架,其中,该摩擦接触状态是牵引螺母部与驱动轴摩擦接触的状态,该分离状态是牵引螺母部从驱动轴分离的状态。在支架设置用于使驱动轴旋转且具有相对于轴线倾斜的旋转轴的电动机。(The invention provides a shape measuring device. In a shape measuring apparatus provided with an electric feeding mechanism for positioning a detector, the winding of cables can be simplified, and the detector can be moved smoothly. A shape measuring apparatus according to an aspect of the present invention includes a shape measuring device having a detector for detecting a position of a surface of an object, and a feeding mechanism for moving the shape measuring device in an axial direction. The feed mechanism includes a drive shaft provided rotatably around an axis, a pull nut portion provided so as to sandwich the drive shaft from a direction orthogonal to the axis of the drive shaft and capable of switching between a frictional contact state in which the pull nut portion is in frictional contact with the drive shaft and a separated state in which the pull nut portion is separated from the drive shaft, and a holder for coupling the pull nut portion to the shape measuring machine. A motor having a rotating shaft inclined with respect to an axis for rotating a drive shaft is provided in the bracket.)

1. A shape measuring apparatus includes:

a shape measuring machine having a detector for detecting a position of a surface of an object; and

a feeding mechanism unit that moves the shape measuring machine in an axial direction,

wherein the shape measuring apparatus is characterized in that,

the feeding mechanism section includes:

a drive shaft provided rotatably around a shaft;

a pull-nut portion provided so as to sandwich the drive shaft from a direction orthogonal to an axis of the drive shaft, and being switchable between a frictional contact state in which the pull-nut portion is in frictional contact with the drive shaft and a separated state in which the pull-nut portion is separated from the drive shaft; and

a bracket for connecting the pull nut part and the shape measuring machine,

wherein the pull nut portion is provided with a torsion wheel which is rotatably supported by a shaft in a state of having an inclination angle corresponding to a lead angle with respect to an axis of the drive shaft,

the structure is as follows: wherein when the drive shaft is rotated in a state where the pull nut portion is in frictional contact with the drive shaft, the pull nut portion is slightly moved along the drive shaft in accordance with the lead angle,

the pull nut portion being capable of coarse movement freely along the drive shaft in a state where the pull nut portion is separated from the drive shaft,

the pull-nut unit further includes:

an opening/closing lever for switching the frictional contact state and the separation state of the pull nut portion; and

a force application unit for generating a force to bring the pull nut portion into frictional contact with the drive shaft,

wherein the opening/closing lever brings the pull nut portion into the separated state against the urging force of the urging unit in accordance with a user operation,

when the user releases the opening/closing lever, the pull nut portion is returned to the frictional contact state by the urging force of the urging unit,

the bracket is provided with a motor for rotating the drive shaft, and the motor has a rotating shaft inclined with respect to the axis.

2. The shape measuring apparatus according to claim 1,

the drive device further includes a rotating member that rotates about the rotation shaft of the motor and that rotates the drive shaft by contacting the drive shaft.

3. The shape measuring apparatus according to claim 2,

the rotating member is a roller or a sphere.

4. The shape measuring apparatus according to claim 1,

the motor rotates the torsion wheel.

Technical Field

The present invention relates to a shape measuring apparatus, and more particularly, to a shape measuring apparatus for measuring a surface of an object.

Background

A shape measuring apparatus for measuring the shape and roughness of the surface of an object requires high resolution accuracy. Therefore, a differential transformer or a differential inductor system is generally used as the detector. In such a shape measuring apparatus, the detection stroke width for measurement is about 1 mm. Therefore, it is very difficult to align the detector with the measurement start point of the object. In particular, positioning of the detector in the Z-axis direction (height direction) requires careful work to avoid damage to the object and the detector.

From the viewpoint of achieving both high-speed movement (coarse movement) and fine positioning (fine movement) of the detector, patent document 1 discloses a shape measuring apparatus including a pull nut portion that is switchable between a frictional contact state in which a torsion wheel is in frictional contact with a drive shaft and a separated state in which the torsion wheel is separated from the drive shaft. In this shape measuring apparatus, the pull nut portion is brought into a separated state, whereby the detector can be roughly moved along the drive shaft. On the other hand, by rotating the drive shaft with the pull nut portion brought into frictional contact, the detector can be made to perform fine movement along the drive shaft in accordance with the lead angle of the torsion wheel.

In addition, in the shape measuring apparatus, automation of positioning of the detector in the Z-axis direction is progressing, and a system capable of performing high-speed movement and low-speed movement in the total stroke range and the partial stroke range of the column shaft by the electric column which performs motor control on the column shaft is considered.

Disclosure of Invention

Problems to be solved by the invention

In such a shape measuring device, when the motor and the motor control unit are provided to automate positioning of the detector in the Z-axis direction, handling of cables connecting the motor and the motor control unit becomes a problem. For example, the cable is bent or deteriorated due to the movement of the detector. Further, the tensile force generated by such cables hinders smooth movement of the detector.

The present invention aims to simplify the winding of cables and the like and realize smooth movement of a detector in a shape measuring apparatus provided with an electric feeding mechanism for positioning the detector.

Means for solving the problems

One aspect of the present invention is a shape measuring apparatus including a shape measuring device having a detector that detects a position of a surface of an object, and a feeding mechanism that moves the shape measuring device in an axial direction.

The feeding mechanism comprises: a drive shaft provided rotatably around a shaft; a traction nut (traction nut) portion which is provided so as to sandwich the drive shaft from a direction orthogonal to the axis of the drive shaft and which is switchable between a frictional contact state in which the traction nut portion is in frictional contact with the drive shaft and a separated state in which the traction nut portion is separated from the drive shaft; and a bracket (blacket) for connecting the pull nut part and the shape measuring machine.

The pull nut portion is provided with a torsion wheel (twist roller) which is rotatably supported by a shaft in a state of having an inclination angle corresponding to a lead angle with respect to an axis of the drive shaft, and when the drive shaft is rotated in a state where the pull nut portion is in frictional contact with the drive shaft, the pull nut portion is minutely moved along the drive shaft in accordance with the lead angle.

The structure is as follows: the pull nut portion can be freely roughly moved along the drive shaft in a state where the pull nut portion is separated from the drive shaft.

The pull-nut unit further includes: an opening/closing lever for switching between a frictional contact state and a separation state of the pull nut portion; and an urging unit for generating an urging force to bring the pull nut portion into frictional contact with the drive shaft.

The opening/closing lever brings the pulling nut portion into a separated state against the urging force of the urging means in response to a user operation, and when the user releases the opening/closing lever, the pulling nut portion is returned to a frictional contact state by the urging force of the urging means.

A motor is provided in the holder, the motor rotating the drive shaft and having a rotation shaft inclined with respect to the axis.

According to this configuration, since the motor for rotating the drive shaft is provided in the carriage that moves up and down together with the shape measuring machine, the cables between the motor and the control unit can be shortened, and no load is applied to the cables even if the shape measuring machine moves up and down.

The shape measuring apparatus may further include a rotating member that rotates about a rotation shaft of the motor and rotates the drive shaft by contacting the drive shaft. The rotating member is a roller or a sphere. Thereby, the drive shaft can be rotated around the shaft by the rotating member rotated by the motor.

In the shape measuring apparatus, the motor may rotate the torsion wheel. Thus, the drive shaft can be rotated by the torque wheel of the pull nut portion without adding a structure.

Drawings

Fig. 1 is a front view illustrating a shape measuring apparatus according to the present embodiment.

Fig. 2 is a side view illustrating the shape measuring apparatus according to the present embodiment.

Fig. 3 is a cross-sectional view of the feeding mechanism section viewed in the Z direction.

Fig. 4 is a schematic view illustrating a configuration of a torsion wheel.

Fig. 5 is a sectional view illustrating a state where the opening/closing lever is swung.

Fig. 6 is a block diagram illustrating a shape measuring apparatus according to the present embodiment.

Fig. 7 is a schematic diagram illustrating another example of the rotating member.

Fig. 8 is a schematic diagram illustrating another example of the rotating member.

Description of the reference numerals

1: a base station; 2: a pillar; 10: a detector; 11: a shape measuring machine; 11B: an operation button; 11D: a display unit; 12: a detection unit; 13: measuring a needle; 100: a shape measuring device; 110: a detection circuit; 120: an X-axis motor control circuit; 125: an electric motor; 130: a column motor control circuit; 140: a monitoring unit; 150: an upper and lower limit detection unit; 160: a logic circuit; 300: a feeding mechanism section; 310: a drive shaft; 311: a handle portion; 315: a stopper; 400: a pull nut portion; 410: a fixing sheet; 411: a support; 412: a groove; 413: a threaded pin; 420: a movable piece; 421: a threaded pin; 430: a hinge plate; 440: a spring; 441: a screw; 451. 452, 453: a torsion wheel; 460: an opening/closing lever; 461: a central shaft; 462: pressing the pin; 470: a handle; 471: groove strips; 480: an electric motor; 482: a roller; 483: a sphere; 600: a computer; 610: a power source; w: an object is provided.

Detailed Description

Embodiments of the present invention will be described below with reference to the drawings. In the following description, the same members are denoted by the same reference numerals, and the description of the members that have been described once is appropriately omitted.

[ Structure of shape measuring apparatus ]

Fig. 1 is a front view illustrating a shape measuring apparatus according to the present embodiment.

Fig. 2 is a side view illustrating the shape measuring apparatus according to the present embodiment.

As shown in fig. 1 and 2, the shape measuring apparatus 100 according to the present embodiment includes a shape measuring device 11 and a feeding mechanism 300, and the shape measuring device 11 detects the position of the surface of an object W placed on a base (base) 1. The shape measuring machine 11 is provided to move up and down along the support column 2, and the support column 2 is provided upright on the base 1.

In the present embodiment, for convenience of explanation, one of the directions along the placement surface of the base 1 on which the object W is placed is referred to as the X direction, the direction orthogonal to the X direction along the placement surface is referred to as the Y direction, and the direction orthogonal to the X, Y direction (the normal direction of the placement surface) is referred to as the Z direction. The Z direction is also referred to as a vertical direction.

The shape measuring machine 11 includes a detection unit 12 and a stylus 13 provided at a distal end of the detection unit 12. The detector 10 is constituted by a detection unit 12 and a probe 13. A display unit 11D and an operation button 11B are provided on the front surface of the shape measuring machine 11. The shape measuring machine 11 measures the coordinates in the Z direction when the stylus 13 is in contact with the surface of the object W. Then, the shape or roughness of the surface of the object W is obtained by continuously measuring the coordinates in the Z direction while moving the detector 10 in the X direction.

The shape measuring apparatus 100 is provided with a feed mechanism 300 for rapidly moving the shape measuring device 11 in the Z direction in accordance with the height of the object W. The feed mechanism 300 is a mechanism for moving the shape measuring machine 11 in the axial direction (Z direction: vertical direction) of the column 2, and includes a drive shaft 310, a pull nut 400, and a holder 411.

The drive shaft 310 is erected on the base 1 so as to be parallel to the support column 2. The drive shaft 310 may be configured such that the drive shaft 310 can be rotated by a knob 311 provided at the upper end thereof.

Fig. 3 is a cross-sectional view of the feeding mechanism section viewed in the Z direction.

The pull nut portion 400 is provided to be able to be fastened and loosened with respect to the drive shaft 310. That is, the pull nut portion 400 is normally frictionally engaged with the drive shaft 310, and the pull nut portion 400 is loosened to be disengaged from the drive shaft 310 by a lever operation performed by a user.

The pull nut portion 400 includes a fixed piece 410, a movable piece 420, a hinge piece 430, a spring 440, a plurality of torsion wheels 451, 452, and 453, an opening/closing lever 460, and a handle 470.

The driving shaft 310 is clamped by the fixing piece 410 and the movable piece 420 in such a manner that fastening and loosening can be performed. The fixed piece 410 and the movable piece 420 are members having long sides in the X direction with respect to the drive shaft 310 provided upright in the Z direction. The drive shaft 310 is sandwiched between the fixed plate 410 and the movable plate 420. The end surfaces of the fixed plate 410 and the movable plate 420 are coupled by a hinge plate 430. The hinge plate 430 is a thin plate having a certain degree of elasticity. Thereby, the fixed piece 410 and the movable piece 420 can be opened and closed by a small amount like a hinge.

A bracket 411 is attached to the fixing piece 410, and the bracket 411 is connected to the shape measuring machine 11 (see fig. 2). That is, the bracket 411 serves to connect the draw nut portion 400 and the shape measuring machine 11.

A groove 412 is provided in the end of the fixing piece 410 opposite to the hinge piece 430. The groove 412 is located on the side of the fixed piece 410 that faces the movable piece 420, and has a predetermined length in the X direction. The groove 412 is a groove for mounting the opening/closing lever 460.

A spring 440 is provided at an end of the pull nut portion 400 opposite to the hinge piece 430 with the drive shaft 310 interposed therebetween. Here, the coil spring is an elastic body that generates a biasing force. The spring 440 presses the movable piece 420 from the side opposite to the fixed piece 410. A screw 441 is provided so as to penetrate the spring 440 and the movable piece 420, and the tip end of the screw 441 is screwed into the fixed piece 410. Therefore, the movable piece 420 is pressed toward the fixed piece 410 by the urging force of the spring 440.

Here, the movable piece 420 is pressed against the fixed piece 410, but the movable piece 420 may be pulled toward the fixed piece 410.

In the pull nut portion 400 according to the present embodiment, three torsion wheels 451, 452, and 453 are provided. Two of the three torsion wheels 451, 452, and 453, 451 and 452 are supported by the fixed plate 410 by the screw pin 413, and the remaining one torsion wheel 453 is supported by the movable plate 420 by the screw pin 421.

As shown in fig. 4, the three torsion wheels 451, 452, and 453 are pivotally supported so as to be rotatable with respect to the axis of the drive shaft 310 at an inclination angle corresponding to the lead angle. When the driving shaft 310 rotates in a state where the torsion wheels 451, 452, and 453, the rotation axes of which are inclined, are in contact with the driving shaft 310, the drawing nut part 400 advances and retreats in the axial direction of the driving shaft 310.

The opening/closing lever 460 is a member having a long side in the X direction, and a tip end portion thereof is inserted into the groove 412 of the fixing piece 410 with play, and is pivotally supported by the center shaft 461 so as to be capable of swinging. Further, since the center axis 461 is in the Z direction, the opening/closing lever 460 can swing in the Y direction within the XY plane. A pressing pin 462 is formed at the tip of the opening/closing lever 460. The pressing pin 462 protrudes from the fixed piece 410 in the direction of the movable piece 420. Since the movable piece 420 is pressed toward the fixed piece 410 by the spring 440, the pressing pin 462 is normally pressed toward the fixed piece 410 by the movable piece 420.

Fig. 5 is a sectional view illustrating a state after the opening/closing lever is swung.

When the opening/closing lever 460 is swung, the pressing pin 462 moves to the side opposite to the opening/closing lever 460. That is, the movable piece 420 can be pressed to the side separated from the fixed piece 410 by the swing of the opening/closing lever 460. If the movable piece 420 is separated from the fixed piece 410, the torsion wheels 451, 452, and 453 are separated from the driving shaft 310. In this state, the pulling nut part 400 should be separated from the driving shaft 310, and thus the pulling nut part 400 can be freely moved.

The handle 470 has a long side in the X direction. Also, a handle 470 is fixed to the fixing plate 410. The handle 470 has a grooved strip 471 along its axis. The groove 471 has a width to the extent that the opening/closing lever 460 can be accommodated.

The handle 470 and the opening/closing lever 460 are arranged substantially in parallel with each other in the positional relationship, and the user naturally grips the opening/closing lever 460 even if the user grips the handle 470. When the opening/closing lever 460 is held together with the handle 470, the opening/closing lever 460 is received in the groove 412 of the handle 470. This allows the swing of the opening/closing lever 460 and facilitates the simultaneous grasping of the opening/closing lever 460 and the handle 470.

That is, when the user grips the handle 470, the opening and closing lever 460 is also gripped together. At this time, the pressing pin 462 of the opening/closing lever 460 presses the movable piece 420. Then, the pull nut portion 400 is separated from the drive shaft 310 and becomes a free state. For the user, even if it is not intended, the pull nut portion 400 automatically becomes free as long as the handle 470 is gripped. Therefore, the shape measuring machine 11 may be moved in the Z direction by holding the handle 470.

On the other hand, when the user releases the handle 470, the opening/closing lever 460 is also moved away from the user's hand. At this time, the movable piece 420 approaches the fixed piece 410 by the biasing force of the spring 440. Then, the torsion wheels 451, 452, and 453 come into contact with the drive shaft 310, and friction is generated between the draw nut portion 400 and the drive shaft 310. Therefore, if the user moves his or her hand away from the handle 470, the position of the pull-nut portion 400, that is, the position of the shape measuring machine 11 is fixed.

Preferably, a balance weight is further provided in the feeding mechanism 300. When the user grips the handle 470 and lifts it upward, it may be moved largely by the force of the user. Further, if the shape measuring device 11 is not firmly supported when the device is lowered downward, the device may fall down. Therefore, a weight is preferably provided.

The feeding mechanism 300 includes an electric moving mechanism in addition to the manual moving mechanism using the handle 470. That is, as shown in fig. 2 and 4, the electric moving mechanism includes a motor 480 that rotates the drive shaft 310. The motor 480 is provided on the carriage 411 and moves together with the vertical movement of the shape measuring machine 11. The rotation shaft of the motor 480 is inclined with respect to the axis (Z direction) of the drive shaft 310. The inclination angle of the rotation shaft of the motor 480 is preferably equal to the inclination angle of the torsion wheels 451, 452, and 453 with respect to the axis.

A roller 482 is provided as a rotating member in the motor 480. The roller 482 comes into contact with the drive shaft 310 to transmit the rotation of the motor 480 to the drive shaft 310. The rotation of the motor 480 rotates the drive shaft 310, and thereby the torsion wheels 451, 452, and 453 rotate, and the draw nut portion 400 moves forward and backward in the axial direction of the drive shaft 310 according to the lead angle between the torsion wheels 451, 452, and 453 and the drive shaft 310.

The roller 482 connected to the shaft of the motor 480 is in contact with the drive shaft 310 with a degree of adhesion to allow the drive shaft 310 to rotate, because the roller is intended to rotate the drive shaft 310. On the other hand, the torsion wheels 451, 452, and 453 of the pulling nut portion 400 contact the drive shaft 310 with a degree of adhesion force that can hold the shape measuring device 11 at a predetermined vertical position, but with a degree of adhesion force that can be driven and rotated with respect to the rotation of the drive shaft 310. Thus, even in a state where the shape measuring device 11 is held at a predetermined vertical position by pulling the nut portion 400, if the drive shaft 310 is rotated by rotating the roller 482 by the motor 480, the shape measuring device 11 can be moved vertically in accordance with the lead angles of the torsion wheels 451, 452, and 453.

In the present embodiment, since the motor 480 for rotating the drive shaft 310 is provided in the holder 411 that moves up and down together with the shape measuring machine 11, the cables between the motor 480 and the control unit can be shortened, and no load is applied to the cables even if the shape measuring machine moves up and down. Therefore, the processing of the cable in consideration of the vertical movement of the shape measuring machine 11 can be eliminated.

[ Block Structure of shape measuring apparatus ]

Fig. 6 is a block diagram illustrating a shape measuring apparatus according to the present embodiment.

As shown in fig. 6, the shape measuring apparatus 100 includes a shape measuring device 11 and a feeding mechanism 300. The computer 600 and the power supply 610 are connected to the shape measuring device 11 to constitute a measuring system.

The shape measuring machine 11 includes: a detection circuit 110 that detects a coordinate in the Z direction based on a signal output from the detector 10; an X-axis motor control circuit 120 that controls a motor 125 that moves the detector in the X direction; a column motor control circuit 130 for controlling a motor 480 for moving the shape measuring machine 11 up and down; a monitoring unit 140 for monitoring the vertical position of the shape measuring machine 11; a vertical limit detection unit 150 that detects a boundary of vertical positions of the shape measuring machine 11; and a logic circuit (control circuit) 160 that controls the whole.

The feed mechanism 300 includes a drive shaft 310, a pull nut 400, and a bracket 411. The user can switch between the frictional contact and separation between the draw nut unit 400 and the drive shaft 310 by operating the opening/closing lever 460 of the handle 470, and manually move the shape measuring machine 11 up and down in a coarse motion.

Further, the user can electrically move the shape measuring device 11 up and down by operating the operation button 11B of the shape measuring device 11. When the up or down operation button 11B is selected, an instruction of forward rotation or reverse rotation is sent from the column motor control circuit 130 to the motor 480. The rotation of the motor 480 rotates the roller 482 to rotate the drive shaft 310. The shape measuring device 11 moves up and down according to the rotation direction of the drive shaft 310.

Further, the user can rotate the knob 311 provided at the upper end of the drive shaft 310 to manually rotate the drive shaft 310, thereby causing the shape measuring machine 11 to perform vertical movement in a fine motion manner.

Stoppers 315 for setting the upper and lower limit positions are provided above and below the drive shaft 310. When the shape measuring machine 11 is moved up and down manually or electrically, the upper and lower limit detecting unit 150 abuts against the stopper 315, or the distance between the upper and lower limit detecting unit 150 and the stopper 315 is equal to or less than a fixed value, the monitoring unit 140 determines that the upper and lower limit positions have been reached, and outputs a warning, for example. In the case of performing the vertical movement by the electric motor, the monitoring unit 140 may give an instruction to stop the column motor control circuit 130, and the rotation of the motor 480 may be stopped to forcibly stop the vertical movement of the shape measuring machine 11.

[ operation of shape measuring apparatus ]

Next, the measurement operation of the shape measurement device 100 will be described.

First, after the object W is placed on the base 1, the stylus 13 is positioned at the measurement start point of the object W. At this time, the position of the shape measuring machine 11 is adjusted to be higher than the object W by only a little. At this time, the user may hold the handle 470 to move the pull nut portion 400 in the Z direction. As described above, the pull nut portion 400 can naturally move as long as the handle 470 is gripped.

When the position of the shape measuring machine 11 reaches approximately the desired height, the user stops the handle 470 and then just removes the hand from the handle 470. Then, the shape measuring machine 11 stays at this position.

Next, the user operates the operation button 11B to rotate the drive shaft 310 by the motor 480, thereby electrically moving the shape measuring machine 11 up and down. In the case where further fine adjustment is required, the knob portion 311 at the upper end of the drive shaft 310 may also be turned to rotate the drive shaft 310. Accordingly, the upper and lower positions of the shape measuring machine 11 can be finely adjusted by tilting the torsion wheels 451, 452, and 453 to move the draw nut portion 400 up and down.

It is preferable that the output rotation of the motor 480 is set to a free state in advance when the motor 480 is stopped so that the manual operation feeling is not spoiled when the shape measuring machine 11 is moved up and down by the handle 470 and the knob 311. When the upper and lower limit detection unit 150 operates, a warning is issued or the motor 480 is forcibly stopped.

As described above, according to the present embodiment, the feed mechanism 300 can switch between coarse movement and fine movement and has excellent operability. Further, the cables and the like can be easily routed between the motor 480 and the control unit, and the shape measuring machine 11 can be smoothly moved.

[ other examples of the rotating member ]

Fig. 7 and 8 are schematic views for explaining another example of the rotary member.

The example of the rotating member shown in fig. 7 is an example in which one of the torsion wheels 451, 452, and 453 is used as the rotating member. For example, the torsion wheel 451 is used as a rotating member, and the torsion wheel 451 is attached to a shaft of the motor 480. The torsion wheel 451 is used as a pulling nut portion 400 for switching between a frictional contact state and a separated state with the driving shaft 310 by the operation of the handle 470 and the opening/closing lever 460, and also used as a rotating member for rotating the driving shaft 310 by an electric power. This makes it possible to eliminate the need to add another member for transmitting the rotation of the motor 480 to the drive shaft 310.

An example of a rotating member shown in fig. 8 is a sphere 483. By using the spherical body 483 instead of the roller 482 as the rotating member, the rotating member can be miniaturized compared to the roller 482, and the surface of the drive shaft 310 is in point contact with the rotating member, and abrasion can be suppressed.

As described above, according to the embodiment, in the shape measuring apparatus 100 including the electric feeding mechanism 300 for positioning the shape measuring device 11, the cable or the like can be easily routed, and the shape measuring device 11 can be smoothly moved.

[ variation of embodiment ]

Although the present embodiment has been described above, the present invention is not limited to these examples. For example, although the up-and-down movement is instructed by the operation button 11B of the shape measuring apparatus 11, the remote operation may be performed by a remote controller or the computer 600. In addition, although an example in which the tow nut portion 400 includes three torsion wheels 451, 452, and 453 has been described, the number is not limited to three. Further, a mode in which a person skilled in the art appropriately adds, deletes, changes the design of the components of the above-described embodiments, or a mode in which the features of the embodiments are appropriately combined is also included in the scope of the present invention as long as the mode is provided with the gist of the present invention.

Industrial applicability

As described above, the present invention can be preferably used for a device for measuring surface roughness, in addition to the measurement of the surface shape of the object.