阅读说明：本技术 基于塑料光纤周期性窄槽结构的高灵敏度spr折射率传感器 (High-sensitivity SPR refractive index sensor based on plastic optical fiber periodic narrow groove structure ) 是由 侯钰龙 胡彦君 刘文怡 于 2019-11-16 设计创作，主要内容包括：本发明公开了一种基于塑料光纤周期性窄槽结构的高灵敏度SPR折射率传感器及其制备方法与检测方法,涉及溶液折射率检测领域,包括一根塑料光纤,塑料光纤上取一定长度的一段沿着轴向方向开有一排周期性窄槽结构,周期性窄槽结构为等间距的径向半圆槽状结构,径向半圆槽状结构的槽宽5~20um,槽深20~100um,相邻径向半圆槽状结构之间的距离为400~900um,塑料光纤表面全部镀有一层金膜。制备方法为在塑料光纤上一定长度的部分利用紫外激光器,以相等的间距加工径向半圆槽状结构,形成周期性窄槽结构,然后利用磁控溅射仪器在整个塑料光纤表面全部溅射金膜,加工完成。本发明所提供的周期性窄槽结构提高了折射率传感器的测量精度,简化了测试系统复杂程度。(The invention discloses a high-sensitivity SPR refractive index sensor based on a plastic optical fiber periodic narrow groove structure and a preparation method and a detection method thereof, and relates to the field of solution refractive index detection. The preparation method comprises the steps of processing a radial semicircular groove-shaped structure on a part with a certain length of the plastic optical fiber at equal intervals by using an ultraviolet laser to form a periodic narrow groove structure, and then sputtering a gold film on the whole surface of the plastic optical fiber by using a magnetron sputtering instrument to complete the processing. The periodic narrow groove structure provided by the invention improves the measurement precision of the refractive index sensor and simplifies the complexity of a test system.)

1. A high sensitivity SPR refractive index sensor based on a plastic optical fiber periodic narrow groove structure is characterized in that: including a plastic optical fiber, one section of getting certain length on the plastic optical fiber is opened along axial direction has one row of periodic narrow groove structure, periodic narrow groove structure is equidistant radial semicircle trough-shaped structure, the groove width 5~20um of radial semicircle trough-shaped structure, the groove depth 20~100um, the distance between the adjacent radial semicircle trough-shaped structure is 400~900um, the plastic optical fiber surface has all plated one deck gold film.

2. The high-sensitivity SPR refractive index sensor based on the plastic optical fiber periodic narrow groove structure, according to claim 1, wherein: the length of one section of the plastic optical fiber provided with the periodic narrow groove structure is 0.5-1 cm.

3. The method for processing the high-sensitivity SPR refractive index sensor based on the plastic optical fiber periodic narrow groove structure, which is characterized in that: the method comprises the following steps:

① a plastic optical fiber is taken, an ultraviolet laser is used for processing a radial semicircular groove-shaped structure on the plastic optical fiber along the axial direction of the plastic optical fiber at a certain length, and a periodic narrow groove structure is formed, wherein the groove width is 5-20 um, the groove depth is 20-100 um, and the distance is 400-900 um;

② sputtering gold film on the plastic optical fiber surface generated in step ① by magnetron sputtering equipment.

4. The method for detecting the refractive index of the SPR refractive index sensor based on the plastic optical fiber periodic narrow groove structure, which is characterized in that: the method comprises the following steps:

① fixing the plastic optical fiber on the PDMS block to fix the part with the periodic narrow groove structure at its center, and connecting the two ends of the plastic optical fiber with the light source and the optical power meter respectively;

② the neutral solution with the needed refractive index is dropped on the surface of the periodic narrow groove structure by a dropper, the light source is modulated by intensity, then the curve is drawn by the waveform change of the optical power meter, the corresponding relation between the power variation and the SPR refractive index is found, thereby the refractive index of the neutral solution is measured.

5. The method for detecting the refractive index of the SPR refractive index sensor based on the plastic optical fiber periodic narrow groove structure, which is characterized in that: the incident wavelength of the light source is 660 nm.

Technical Field

The invention relates to the field of solution refractive index detection, in particular to a high-sensitivity SPR refractive index sensor based on a plastic optical fiber periodic narrow groove structure.

Background

When a beam of P-polarized light is incident on the prism end face within a certain angle range, surface plasmon waves are generated at the interface between the prism and the metal thin film (Au or Ag). When the propagation constant of the incident light wave is matched with that of the surface plasma wave, free electrons in the metal film are caused to generate resonance, and the surface plasma resonance-SPR effect is generated. SPR is an optical professional technique for characterizing changes in the refractive index of a surface, and is widely used in biosensing, refractive index detection, and the like. Compared with the traditional prism structure, the optical fiber SPR refractive index sensor has the advantages that the structure is miniaturized on one hand, and the difficulty degree of system building is simplified on the other hand.

For the optical fiber SPR refractive index sensor, the detection accuracy and the measurement range are main indexes for measuring the performance of the sensor, and the two indexes are mainly influenced by the structure and the surface material of the optical fiber. Aiming at the optical fiber structure, researchers respectively analyze optical fibers with different structures such as a tapered optical fiber, a U-shaped optical fiber, a D-shaped optical fiber, a multi-section splicing optical fiber and a specially-made photonic crystal optical fiber, but the optical fibers have the defects of poor processing consistency, low repeatability, high processing difficulty, huge consumption and the like, although the refractive index sensitivity can be increased to a certain degree by the optical fiber sensors with different structures, the optical fiber sensors cause larger optical fiber loss, and the application range of the optical fibers is influenced. For surface materials, the number of layers and types of materials is the direction of development. Single-layer metal films such as gold films, silver films, multi-layer metal films, and combinations of metal films and non-metal film types are gradually studied by researchers, but the difficulty of material preparation and sensor manufacturing is gradually increased, the process is gradually complicated, and the manufacturing cost is increased. In contrast to other metals, gold films are relatively stable materials and are suitable for long-term use. In summary, the following problems generally exist in the existing optical fiber SPR refractive index sensing technology: 1. the manufacturing process of the optical fiber structure is complicated, the processing consistency is poor, and the optical fiber processing loss is large; 2. for a common SPR refractive index sensor, the resolution of the refractive index sensor is generally 0.01 RIU; 3. the system is complex to build, the consumption is too high, and the requirement on the accuracy of system components is high. Thus, there is a need to improve existing fiber SPR refractive index sensors to achieve precise refractive index sensing while simplifying the measurement system and saving costs.

Disclosure of Invention

The invention provides a high-sensitivity SPR refractive index sensor based on a plastic optical fiber periodic narrow groove structure, which aims to solve the problems that the existing optical fiber SPR refractive index sensor can not realize precise refractive index detection, and has complex and complicated process and high manufacturing cost.

The invention is realized by the following technical scheme: the utility model provides a high sensitivity SPR refracting index sensor based on periodic narrow groove structure of plastic optical fiber, includes a plastic optical fiber, one section of getting certain length on the plastic optical fiber is opened along axial direction has one row of periodic narrow groove structure, periodic narrow groove structure is equidistant radial semicircle trough-shaped structure, the groove width of radial semicircle trough-shaped structure 5~20um, the groove depth 20~100um, and the distance between the adjacent radial semicircle trough-shaped structure is 400~900um, plastic optical fiber surface has all plated one deck gold film.

The invention provides a high-sensitivity SPR refractive index sensor based on a plastic optical fiber periodic narrow groove structure, which is a novel SPR refractive index sensor formed by POF optical fibers and a gold film, wherein a section of the plastic optical fiber with a certain length is provided with a row of periodic narrow groove structures along the axial direction, meanwhile, the surface of the plastic optical fiber is completely plated with a layer of gold film so as to realize the sensitivity to the refractive index, when neutral solution drops with different concentrations are on the surface of the periodic narrow groove structure, the output waveform of the power meter is changed, the refractive index of the saline is determined by utilizing the difference of the change of power values, the groove width of the radial semicircular groove structure is 5-20 um, the groove depth is 20-100 um, the distance between adjacent radial semicircular groove structures is 400-900um, the length, the width and the distance ensure the sensitivity of the periodic narrow groove structure, and the high-precision detection of the precise refractive index can be realized.

The processing method of the high-sensitivity SPR refractive index sensor based on the plastic optical fiber periodic narrow groove structure comprises the following steps:

① a plastic optical fiber is taken, an ultraviolet laser is used for processing a radial semicircular groove-shaped structure on the plastic optical fiber along the axial direction of the plastic optical fiber at a certain length, and a periodic narrow groove structure is formed, wherein the groove width is 5-20 um, the groove depth is 20-100 um, and the distance is 400-900 um;

② sputtering gold film on the plastic optical fiber surface generated in step ① by magnetron sputtering equipment.

The processing method provided by the invention provides a periodic narrow groove structure on the surface of the plastic optical fiber by using an ultraviolet laser, and the method has the characteristic of simple preparation, and the narrow groove structure is in the um level. In terms of materials, the gold film on the surface of the optical fiber can shield the interference of external light, so that the system is more stable.

The refractive index detection method of the high-sensitivity SPR refractive index sensor based on the plastic optical fiber periodic narrow groove structure comprises the following steps of:

① fixing the plastic optical fiber on the PDMS block to fix the part with the periodic narrow groove structure at its center, and connecting the two ends of the plastic optical fiber with the light source and the optical power meter respectively;

② the neutral solution with the needed refractive index is dropped on the surface of the periodic narrow groove structure by a dropper, the light source is modulated by intensity, then the curve is drawn by the waveform change of the optical power meter, the corresponding relation between the power variation and the SPR refractive index is found, thereby the refractive index of the neutral solution is measured.

The principle of the detection method provided by the invention is as follows: when incident light is incident to the interface of two media (the interface of optical fiber and gold film) with different refractive indexes at a certain angle, the resonance of metal free electrons can be caused, and the electrons absorb light energy due to the resonance, so that the reflected light is greatly weakened within a certain angle. Since the SPR effect is sensitive to refractive index, wavelength modulation is usually used to characterize different refractive index constituents to form the SPR refractive index sensor. According to the invention, the traditional SPR waveform detection technology is abandoned, the refractive index of the external environment is detected by using an intensity modulation mode, the two ends of the optical fiber are respectively connected with the 660nm light source and the power meter, when saline water drops at the periodic narrow groove structure of the optical fiber, the output waveform of the power meter has rising wave peaks, and the rising heights of the wave peaks with different saline water concentrations are different, namely the power variation is different. Therefore, the corresponding relation between the power variation and the refractive index can be found, and the high-precision measurement of the refractive index can be realized.

Compared with the prior art, the high-sensitivity SPR refractive index sensor based on the plastic optical fiber periodic narrow groove structure, the processing method and the detection method have the advantages that the novel structure ① enables the whole sensing system to have the advantages of electromagnetic interference resistance, low cost, non-electric measurement and the like of common optical fiber sensors, the SPR sensor structure can be miniaturized, the system building space is reduced, the periodic narrow groove structure on the surface of the optical fiber improves the measurement accuracy of the refractive index sensor, the method can be applied to leakage detection of different refractive indexes in industries such as petroleum, petrifaction and aerospace, the processing method ② reduces the processing difficulty of the plastic optical fiber, shortens the processing time, ensures the processing consistency and reduces the processing loss, ③ utilizes an intensity modulation mode to detect the SPR refractive index sensor, simplifies the complexity of a test system, reduces the cost, and the SPR refractive index sensor formed by the plastic optical fiber can meet the detection requirement of random arrangement and is miniaturized.

Drawings

FIG. 1 is a diagram showing a periodic narrow groove structure of a sensor according to the present invention and the surface morphology of an optical fiber after sputtering a gold film thereon, wherein the diagram is black and white and is substantially gold, and FIG. 1 (d) is a diagram showing the surface morphology of an optical fiber after plating a gold film thereon.

Fig. 2 is a schematic diagram of a refractive index sensitive sensor of the present invention.

FIG. 3 shows the variation of SPR resonance wavelength for different liquids of the present invention.

FIG. 4 is a diagram of a test system in accordance with an embodiment of the present invention.

FIG. 5 is a graph of refractive index response output versus different processing pitches in accordance with the present invention.

FIG. 6 is a graph of fiber loss curves for different processing pitches in accordance with the present invention.

FIG. 7 is a graph of the precision refractive index measurement response of the present invention.

The figures are labeled as follows: 1-plastic optical fiber, 2-gold film, 3-dropper, 4-saline, 5-optical power meter, 6-light source, 7-computer.

Detailed Description

The present invention is further illustrated by the following specific examples.

The utility model provides a high sensitivity SPR refracting index sensor based on periodic narrow groove structure of plastic optical fiber, includes a plastic optical fiber, one section of getting certain length on the plastic optical fiber is opened along axial direction has one row of periodic narrow groove structure, periodic narrow groove structure is equidistant radial semicircle trough-shaped structure, the groove width of radial semicircle trough-shaped structure 5~20um, the groove depth 20~100um, and the distance between the adjacent radial semicircle trough-shaped structure is 400~900um, plastic optical fiber surface has all plated one deck gold film. The length of one section of the plastic optical fiber provided with the periodic narrow groove structure is 0.5-1 cm.

The processing method of the high-sensitivity SPR refractive index sensor based on the plastic optical fiber periodic narrow groove structure comprises the following steps of:

① a plastic optical fiber is taken, an ultraviolet laser is used for processing a radial semicircular groove-shaped structure on the plastic optical fiber along the axial direction of the plastic optical fiber at a certain length, and a periodic narrow groove structure is formed, wherein the groove width is 5-20 um, the groove depth is 20-100 um, and the distance is 400-900 um;

② sputtering gold film on the plastic optical fiber surface generated in step ① by magnetron sputtering equipment.

In the refractive index detection method of the processed high-sensitivity SPR refractive index sensor based on the plastic optical fiber periodic narrow groove structure, a test system is shown in FIG. 4 and comprises the following steps:

① fixing the plastic optical fiber on the PDMS block to fix the part with the periodic narrow groove structure at its center, and connecting the two ends of the plastic optical fiber with the light source and the optical power meter respectively;

② the refractive index of the neutral solution is measured by dropping the neutral solution with a dropper to the surface of the periodic narrow groove structure, modulating the light source by intensity, then drawing a curve by the waveform change of an optical power meter, and finding the corresponding relation between the power variation and the SPR refractive index, wherein the incident wavelength of the light source is 660 nm.

The refractive index of the NaCl solution ranged from 1.335 to 1.354, and the refractive indices of the core and the cladding were 1.49 and 1.41, respectively, using a step-index plastic optical fiber POF. The refractive index of the gold layer is much smaller than that of NaCl when the incident wavelength is 660 nm.

FIG. 1 is a periodic narrow trench structure made using ultraviolet laser machining. The gold film is sputtered on the surface of the optical fiber by a magnetron sputtering instrument, so that the SPR refractive index sensor can be formed, and the gold film on the surface of the optical fiber can shield the interference of external light, so that the system is more stable. The left side is the finished structure and the right side is the fiber optic microscope image after sputtering the gold layer. It can be seen that the machined structure has consistency and good surface morphology, but certain wrinkles appear at the machined groove edge because heat is released during the uv laser machining process, which changes the fiber surface stress. This is material-dependent.

Figure 2 shows a sensor based on the SPR effect and the evanescent wave effect. In region a of fig. 2 (a), total reflection occurs in the core and at the cladding-air interface, and there are two critical angles. When the ambient medium changes from air to NaCl solution, the critical angle of the cladding-air interface increases and causes the cladding to allow propagation of the optical mode to decrease and cause optical attenuation. In region a of fig. 2 (b), the core-cladding and cladding-gold layers undergo total reflection. Since the refractive index of the gold film is much less than that of air and NaCl solution, the attenuation of light is less than that of a sensor without gold layer, and this part of the attenuation is called EW loss.

Region B of fig. 2 (a) shows a narrow groove structure. As RI increases, the critical angle of the core-air total reflection interface increases, which greatly increases optical loss. In the region B of fig. 2 (B), when the gold film is sputtered on the surface of the groove, the SPR effect occurs and absorbs a specific wavelength, thereby causing light attenuation. FIG. 3 shows SPR resonance waveforms tested using a sensor having a wavelength of 600 um. When the refractive index was changed from water (RI = 1.33) to NaCl solution (RI = 1.34), the resonance wavelength was changed from b to a. Compared with other POF-SPR sensors, the SPR effect of the sensor is weaker, and the main reason is that the proposed structure has less damage to the fiber core, so that the loss of light intensity in a sensitive area is less. Further, as can be seen from fig. 3, as RI increases, power loss decreases. The change in power is more pronounced than the change in resonant wavelength, which also provides a basic criterion for intensity interrogation used in the present invention.

In this example, we detected the refractive index of the NaCl solution, prepared saline of different concentrations, and measured the refractive index of the saline respectively with an abbe refractometer, the accuracy of the instrument was 0.0002 RIU. By utilizing the refractive index sensor, the detection of the refractive index is realized by monitoring the output of the optical power meter.

The sensitivity of narrow slot spacing to refractive index was tested at refractive indices of 1.335, 1.343, 1.354. Fig. 5 is a graph of the experimental result of narrow groove spacing of 400-900um, and it can be seen from the graph that the linearity of the output curve is highest when the spacing is 400um, because the contact area between the gold film and the saline to be measured can be increased in the process of reducing the spacing, and the SPR effect is enhanced. Fig. 6 is a loss diagram of a processed optical fiber, and the optical fiber is gradually increased in the process of gradually decreasing the distance, so that two output parameters of the optical fiber loss and the refractive index sensitivity are considered, and a structure with the processing distance of 600um is selected for the next test.

In order to further test the output curve of the precision refractive index, the output curve of the refractive index of 1.335-1.343 was measured, and the result is shown in FIG. 7, where it can be seen that the input and output have a good quadratic relationship. It can therefore be concluded that the output curve is a quadratic curve under precise refractive index changes, and that the linear relationship over a large range is due to insufficient points of measurement, thus causing some deviation of the fitted curve.

The scope of the invention is not limited to the above embodiments, and various modifications and changes may be made by those skilled in the art, and any modifications, improvements and equivalents within the spirit and principle of the invention should be included in the scope of the invention.