Power supply system for vacuum pump and vacuum pump

文档序号:1471872 发布日期:2020-02-21 浏览:4次 中文

阅读说明:本技术 用于真空泵的电力供应系统以及真空泵 (Power supply system for vacuum pump and vacuum pump ) 是由 A.J.佩蒂 N.J.格兰特 于 2018-07-05 设计创作,主要内容包括:用于真空泵的电力供应系统,包括:电力供应器件,以向真空泵供应电能,用于操作;以及能量储存器件,连接到真空泵,以在真空泵的降速期间储存由真空泵产生的能量。(A power supply system for a vacuum pump comprising: a power supply to supply electrical energy to the vacuum pump for operation; and an energy storage device connected to the vacuum pump to store energy generated by the vacuum pump during a de-rating of the vacuum pump.)

1. A power supply system for a vacuum pump comprising:

a power supply means (22) to supply electrical energy to the vacuum pump (11) for operation; and

an energy storage device (24) connected to the power supply device (22) or motor controller (20) to store energy transferred from the vacuum pump (11) during a de-acceleration of the vacuum pump (11).

2. The power supply system according to claim 1, characterized in that during the ramping up of the vacuum pump (11) the energy stored in the energy storage means (24) is used.

3. An electric power supply system according to claim 1 or 2, characterized in that the energy in the energy storage device (24) is stored as electric, mechanical, chemical and/or thermal energy.

4. An electric power supply system according to any one of claims 1 to 3, characterized in that the energy storage device comprises a battery (24), a capacitor, a pressure vessel, a fuel cell or a flywheel.

5. The power supply system according to any one of claims 1 to 4, characterized in that the electrical energy provided to the vacuum pump is completely supplied by the energy storage means (24).

6. Vacuum pump, in particular turbomolecular pump, comprising:

a stator (10);

a rotating assembly (14) rotated by an electric motor (18) relative to the stator (10), wherein the rotating assembly (14) comprises at least one rotor element (16) for conveying gas from a pump inlet towards a pump outlet;

a controller (20) connected to the electric motor (18), an

A power supply system connected with the controller (20);

characterized by an energy storage device connected to the power supply system or the controller to store energy transmitted from the vacuum pump (11) during a rundown of the vacuum pump (11).

7. Method for switching off a vacuum pump, wherein a power supply (22) is switched off and energy generated by the vacuum pump (11) after switching off the power supply (22) is stored.

8. Method for starting a vacuum pump, wherein an electrical power supply means (22) is switched on and electrical energy of the electrical power supply means (22) is combined with electrical energy generated by the energy storage means (24).

9. Method according to claim 7 or 8, comprising a power supply system according to any one of claims 1 to 5 and/or a vacuum pump (11) according to claim 6.

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