阅读说明：本技术 一种多材料激光诱导转移3d打印方法及装置 (Multi-material laser-induced transfer 3D printing method and device ) 是由 谢小柱 黄亚军 龙江游 任庆磊 胡伟 何梓裕 于 2021-06-24 设计创作，主要内容包括：本发明涉及3D打印的技术领域,更具体地,涉及一种多材料激光诱导转移3D打印方法及装置,包括以下步骤：激光器产生激光束,将激光束调整为水平偏振状态,后对激光束进行扩束准直；经准直的激光束经反射进入空间光调制器调制得到目标光光束形状；对调整好的激光束进行收拢聚焦,使得激光束发散角度变小,并对收拢的激光束进行再次准直得到平行激光束；平行激光束中特定波长的激光经物镜再次聚焦用于加工,同时,CCD视觉系统实时监测加工过程。本发明的多材料激光诱导转移3D打印方法及装置,通过空间光调制器对激光光束整形并结合激光诱导转移技术,实现对任意形状、多材料的3D微结构的制备,扩大了激光诱导向前转移技术的适用范围。(The invention relates to the technical field of 3D printing, in particular to a multi-material laser induced transfer 3D printing method and device, which comprises the following steps: the laser generates a laser beam, adjusts the laser beam to be in a horizontal polarization state, and then performs beam expanding collimation on the laser beam; the collimated laser beam is reflected to enter a spatial light modulator to be modulated to obtain a target light beam shape; the adjusted laser beams are folded and focused, so that the divergence angle of the laser beams is reduced, and the folded laser beams are collimated again to obtain parallel laser beams; the laser with specific wavelength in the parallel laser beams is focused again through the objective lens for processing, and meanwhile, the CCD vision system monitors the processing process in real time. According to the multi-material laser induced transfer 3D printing method and device, the laser beam is shaped through the spatial light modulator and the laser induced transfer technology is combined, the preparation of the multi-material 3D microstructure with any shape is achieved, and the application range of the laser induced forward transfer technology is expanded.)

1. A multi-material laser-induced transfer 3D printing method is characterized by comprising the following steps:

s10, generating a laser beam by a laser (3), adjusting the laser beam to be in a horizontal polarization state, and then expanding and collimating the laser beam;

s20, reflecting the collimated laser beam to enter a spatial light modulator (8) for modulation to obtain a target light beam shape;

s30, folding and focusing the adjusted laser beams to reduce the divergence angles of the laser beams, and collimating the folded laser beams again to obtain parallel laser beams;

s40, refocusing the laser with the specific wavelength in the parallel laser beam through an objective lens (96) for processing, and simultaneously, observing laser focusing light spots in real time and monitoring the processing process in real time by a CCD (charge coupled device) vision system (1);

in step S40, the processing is performed according to the following steps:

s41, acquiring the type and thickness of a material to be processed, and setting laser parameters according to the type and thickness of the material;

s42, controlling the target material layer structure (23) with the required material and the required thickness to rotate to the position below the laser focusing spot;

s43, focusing laser focusing light spots on the target layer structure (23) through the transparent constraint layer structure (22), and transferring and depositing a target material with the shape consistent with that of a target light beam on a receiving substrate (24) to prepare a 3D structure.

2. The multi-material laser induced transfer 3D printing method according to claim 1, wherein in step S20: designing a geometric mask based on the target pattern and loading the geometric mask to a spatial light modulator (8); when the collimated beam is incident on the spatial light modulator (8), the diffracted zero-order light is filtered out to obtain a target light beam consistent with a target image.

3. The multi-material laser induced transfer 3D printing method according to claim 1, wherein in step S40, the distance between the objective lens (96) and the target layer is adjusted to be equal to the focal length of the objective lens (96) during processing.

4. The multi-material laser induced transfer 3D printing method according to claim 1, wherein in step S42, the target layer structure (23) is a solid target film prepared on the transparent constraining layer structure by magnetron sputtering or electron beam evaporation plating, or is a liquid target film prepared on the transparent constraining layer structure by blade coating or spin coating.

5. The multi-material laser induced transfer 3D printing method according to claim 4, wherein a plurality of transparent constraining layer structures are uniformly installed around the rotating shaft (26), and the rotating shaft (26) rotates to rotate the target material layer with the required material and the required thickness to the position below the laser focusing spot.

6. The multi-material laser induced transfer 3D printing method according to claim 4, wherein in step S42, the transparent constraining layer structure is quartz glass, the receiving substrate (24) is a flexible substrate selected from one of polyimide and PDMS or a solid substrate selected from one of glass, glass fiber plate and ceramic.

7. The multi-material laser-induced transfer 3D printing device is characterized by comprising a computer control system (10), a CCD visual system (1), a transfer module (2), and a laser (3), an attenuator (4), an 1/2 wave plate (5), a beam expander (6), a first reflector (7), a spatial light modulator (8) and a light path adjusting module (9) which are sequentially arranged: the laser (3) generates a laser beam, the laser beam is adjusted to be in a horizontal polarization state through the attenuator (4) and the 1/2 wave plate (5), and then the laser beam is incident into the beam expanding lens (6) to be expanded and collimated; the collimated laser beam is reflected by a first reflector (7) and then enters a spatial light modulator (8) to be modulated to obtain a target light beam shape, and the target light beam is focused, collimated and refocused by a light path adjusting module (9) and then used for processing; the CCD visual system (1) is connected with the computer control system (10) and is used for observing laser focusing light spots for processing and monitoring the processing process in real time;

the transfer module (2) comprises a three-dimensional moving platform (21), a transparent constraint layer structure (22), a target layer structure (23), a receiving substrate (24) and a two-dimensional moving platform (25), the rotating shaft (26) is arranged on the three-dimensional moving platform (21), the transparent constraint layer structure (22) is clamped on the rotating shaft (26), the target material layer structure (23) is attached below the transparent constraint layer structure (22), the receiving substrate (24) is positioned below the target layer structure (23), the receiving substrate (24) is arranged on a two-dimensional moving platform (25), the transparent constraint layer structures (22), the target layer structures (23) and the receiving substrate (24) are equal in number and are in one-to-one correspondence, the target layer structures (23) can be a plurality of groups with different materials and different thicknesses, the two-dimensional moving platform (25) and the three-dimensional moving platform (21) are both connected to the computer control system (10).

8. The multi-material laser induced transfer 3D printing device according to claim 7, wherein the optical path adjusting module (9) comprises a second reflecting mirror (91), a first lens (92), a second lens (93), a third reflecting mirror (94), a second polarization beam splitter prism (95) and an objective lens (96) which are sequentially arranged, the target light beam is reflected to the first lens (92) through the second reflecting mirror (91), the first lens (92) collects and focuses the laser beam, the collected laser beam enters the second lens (93), the collected laser beam is collimated again, the collimated laser beam is reflected to the second polarization beam splitter prism (95) through the third reflecting mirror (94), and the second polarization beam splitter prism (95) reflects the laser beam with a specific wavelength to the objective lens (96) and is focused again through the objective lens (96) for processing.

9. The multi-material laser induced transfer 3D printing device according to claim 8, wherein the CCD vision system (1) comprises a first polarization beam splitter prism (11), an illumination light source (12) and a CCD camera (13) connected to the computer control system (10), the illumination light source (12) emits illumination laser light with a specific wavelength to be projected to a second polarization beam splitter prism (95) to reach the surface of the workpiece, and reflected light reflected from the surface of the workpiece reaches through an objective lens (96) and the second polarization beam splitter prism (95) and is reflected to the CCD camera (13) through the first polarization beam splitter prism (11).

10. The multi-material laser induced transfer 3D printing method according to claim 7, wherein the incident light of the spatial light modulator (8) is angled less than 15 ° from the reflected light.

Technical Field

The invention relates to the technical field of 3D printing, in particular to a multi-material laser induced transfer 3D printing method and device.

Background

At present, photolithography, screen printing and ink jet printing techniques are mainly used in the field of precision printing. Although the photoetching printing has high precision and is suitable for mass production, high-precision mask plates are required, the cost is high during small-batch production, and flexible adjustment cannot be made according to market demands; the screen printing also needs a mask plate, and the size is relatively large; the ink jet printing can quickly realize the direct writing processing of large-area complex patterns by moving the nozzle to control the accurate position of an ink drop, has simple operation and low cost, but cannot realize high-precision printing and the direct writing processing of high-viscosity materials and solid materials due to the limitation of the diameter of the nozzle.

The laser-induced forward transfer technology (LIFT) is a laser printing technology developed in recent years, and has the advantages of strong adaptability, high processing precision, low cost, environmental friendliness, wide application range and the like. Compared with photoetching printing and silk-screen printing, forward transfer induced by laser does not need to prepare a mask, and meanwhile, materials can be saved and pollution can be reduced; compared with ink-jet printing, the method can enlarge the range of available materials, can realize the processing precision of micron order, and does not influence the practical use due to the blockage of the nozzle. The existing laser-induced forward transfer technology has already realized the processing of different materials such as gold, silver, copper and the like, and the linear line with the line width of about 5 microns is prepared, but at present, research mainly focuses on ensuring the uniformity of a single material when printing continuous patterns, and does not consider the printing of multiple materials, thereby limiting the popularization and application of the laser-induced forward transfer technology.

Chinese patent CN110666169A discloses a multi-material laser-induced forward transfer 3D printing device and method, the 3D printing device includes a computer control system, a laser, a beam expander, a diaphragm, a CCD camera, a dichroic mirror, a focusing lens, a Z-axis vertical moving platform, a base, a W-axis vertical moving platform, a C-axis rotating platform, a UV-axis hollow horizontal moving platform, material substrates, a receiving substrate, an air chuck and a plurality of material substrates of the XY-axis horizontal moving platform can be simultaneously installed on the UV-axis hollow horizontal moving platform, two-dimensional printing of multi-materials can be realized along with the movement of the XY-axis horizontal moving platform and the UV-axis hollow horizontal moving platform, then laser parameters are changed to perform curing and sintering, and the printing and curing operations before one layer is printed are repeated. Although the scheme can realize 3D printing of multiple materials, the method cannot be applied to preparation of 3D microstructures of various different shapes.

Disclosure of Invention

The invention aims to overcome the defects in the prior art, and provides a multi-material laser-induced transfer 3D printing method and device, which can realize 3D printing of various materials in any shapes and expand the application range of a laser-induced forward transfer technology.

In order to solve the technical problems, the invention adopts the technical scheme that:

the multi-material laser-induced transfer 3D printing method comprises the following steps:

s10, generating a laser beam by a laser, adjusting the laser beam to be in a horizontal polarization state, and then expanding and collimating the laser beam;

s20, reflecting the collimated laser beam to enter a spatial light modulator for modulation to obtain a target light beam shape;

s30, folding and focusing the adjusted laser beams to reduce the divergence angles of the laser beams, and collimating the folded laser beams again to obtain parallel laser beams;

s40, focusing the laser with the specific wavelength in the parallel laser beam again through an objective lens for processing, and simultaneously, observing laser focusing light spots in real time and monitoring the processing process in real time by a CCD vision system;

in step S40, the processing is performed according to the following steps:

s41, acquiring the type and thickness of a material to be processed, and setting laser parameters according to the type and thickness of the material;

s42, controlling the target material layer structure with the required material and the required thickness to rotate to the position below the laser focusing light spot;

s43, focusing laser focusing light spots on a target material layer structure through the transparent constraint layer structure, transferring the target material with the shape consistent with that of the target light beam, and depositing the target material on a receiving substrate to prepare the 3D structure.

According to the multi-material laser induced transfer 3D printing method, a laser generates a laser beam, the laser beam is adjusted to be in a horizontal polarization state, and then the laser beam is expanded and collimated; the collimated laser beam enters a spatial light modulator to be modulated to obtain a target light beam shape, and the target light beam is focused, collimated and focused again by a light path adjusting module and then used for processing; before processing, the target material layer structure with the required material and the required thickness is rotated to the position below the laser focusing light spot, and the CCD vision system is used for observing the laser focusing light spot for processing and monitoring the processing process in real time. The multi-material laser transfer 3D printing device can realize the preparation of the multi-material 3D microstructure with any shape, and enlarges the application range of the laser-induced forward transfer technology.

Preferably, in step S20: designing a geometric mask based on the target graph, and loading the geometric mask to the spatial light modulator; when the collimated light beam is incident to the spatial light modulator, the diffracted zero-order light is filtered out to obtain a target light beam consistent with a target image.

Preferably, in step S40, during processing, the distance between the objective lens and the target layer is adjusted to be equal to the focal length of the objective lens.

Preferably, in step S42, the target layer structure is a solid target film prepared on the transparent constraining layer structure by magnetron sputtering or electron beam evaporation plating method, or is a liquid target film prepared on the transparent constraining layer structure by blade coating or spin coating method.

Preferably, the plurality of transparent constraint layer structures are uniformly arranged around the rotating shaft, and the rotating shaft rotates to enable the target material layer with the required material and the required thickness to rotate below the laser focusing spot.

Preferably, in step S42, the transparent constraining layer structure is quartz glass, the receiving substrate is a flexible substrate or a solid substrate, the flexible substrate is selected from one of polyimide and PDMS, and the solid substrate is selected from one of glass, glass fiber plate and ceramic.

The invention also provides a multi-material laser transfer 3D printing device, which comprises a CCD visual system, a transfer module, a laser, an attenuator, an 1/2 wave plate, a beam expander, a first reflector, a spatial light modulator and a light path adjusting module, wherein the laser, the attenuator, the 1/2 wave plate, the beam expander, the first reflector, the spatial light modulator and the light path adjusting module are sequentially arranged: the laser generates a laser beam, the laser beam is adjusted to be in a horizontal polarization state through the attenuator and the 1/2 wave plate, and then the laser beam is incident into the beam expander to be expanded and collimated; the collimated laser beam enters a spatial light modulator to be modulated after being reflected by a first reflector to obtain a target light beam shape, and the target light beam is focused, collimated and refocused by a light path adjusting module and then used for processing; the CCD vision system is used for observing laser focusing light spots for processing and monitoring the processing process in real time;

the transfer module comprises a three-dimensional moving platform, a transparent constraint layer structure, a target layer structure, a receiving substrate and a two-dimensional moving platform, wherein the rotating shaft is arranged on the three-dimensional moving platform, the transparent constraint layer structure is clamped on the rotating shaft, the target layer structure is attached to the lower portion of the transparent constraint layer structure, the receiving substrate is located below the target layer structure, the receiving substrate is arranged on the two-dimensional moving platform, the transparent constraint layer structure, the target layer structure and the receiving substrate are equal in number and correspond to each other one by one, the target layer structure can be a plurality of groups with different materials and different thicknesses, and the two-dimensional moving platform and the three-dimensional moving platform are connected to a computer control system.

According to the multi-material laser transfer 3D printing device, a laser generates a laser beam, the laser beam is adjusted to be in a horizontal polarization state through an attenuator and an 1/2 wave plate, and then the laser beam is incident into a beam expander to be expanded and collimated; the collimated laser beam enters a spatial light modulator to be modulated after being reflected by a first reflector to obtain a target light beam shape, and the target light beam is focused, collimated and refocused by a light path adjusting module and then used for processing; the CCD vision system is used for observing laser focusing light spots for processing and monitoring the processing process in real time; the rotating shaft rotates the material to be processed below the objective lens. The multi-material laser transfer 3D printing device can realize the preparation of the multi-material 3D microstructure with any shape, and enlarges the application range of the laser-induced forward transfer technology.

Furthermore, the optical path adjusting module comprises a second reflecting mirror, a first lens, a second lens, a third reflecting mirror, a second polarization beam splitter prism and an objective lens which are sequentially arranged, a target light beam is reflected to the first lens through the second reflecting mirror, the first lens folds and focuses the laser beam, the folded laser beam enters the second lens, the folded laser beam is collimated again, the collimated laser beam is reflected to the second polarization beam splitter prism through the third reflecting mirror, the second polarization beam splitter prism reflects the laser beam with a specific wavelength to the objective lens, and the laser beam is focused again through the objective lens and then is used for processing.

Furthermore, the CCD vision system comprises a first polarization beam splitter prism, an illumination light source and a CCD camera connected to the computer control system, the illumination light source emits illumination laser with specific wavelength, the illumination laser projects to a second polarization beam splitter prism to reach the surface of a workpiece, and reflected light reflected from the surface of the workpiece reaches the second polarization beam splitter prism through an objective lens and is reflected to the CCD camera through the first polarization beam splitter prism (11).

Further, the angle between the incident light and the reflected light of the spatial light modulator is less than 15 °.

Compared with the prior art, the invention has the beneficial effects that:

according to the multi-material laser transfer 3D printing method and device, the laser beam is shaped through the spatial light modulator and the laser induced transfer technology is combined, the preparation of the multi-material 3D microstructure with any shape is realized, and the application range of the laser induced forward transfer technology is expanded.

Drawings

FIG. 1 is a schematic diagram of a multi-material laser induced transfer 3D printing method;

fig. 2 is a schematic structural diagram of a multi-material laser induced transfer 3D printing apparatus;

FIG. 3 is a schematic view of the installation of the transparent constraining layer structure with the rotating shaft;

in the drawings: 1. a CCD vision system; 11. a first polarization splitting prism; 12. an illumination light source; 13. a CCD camera; 2. a transfer module; 21. a three-dimensional mobile platform; 22. a transparent constraining layer structure; 23. a target layer structure; 24. receiving a substrate; 25. a two-dimensional moving platform; 26. a rotating shaft; 3. a laser; 4. an attenuator; 5. 1/2 a wave plate; 6. a beam expander; 7. a first reflector; 8. a spatial light modulator; 9. a light path adjusting module; 91. a second reflector; 92. a first lens; 93. a second lens; 94. a third reflector; 95. a second polarization beam splitter prism; 96. an objective lens; 10. a computer control system.

Detailed Description

The present invention will be further described with reference to the following embodiments.

Example one

Fig. 1 shows an embodiment of the multi-material laser induced transfer 3D printing method of the present invention, which includes the following steps:

s10, generating a laser beam by a laser 3, adjusting the laser beam to be in a horizontal polarization state, and then expanding and collimating the laser beam;

s20, reflecting the collimated laser beam to enter a spatial light modulator 8 for modulation to obtain a target light beam shape;

s30, folding and focusing the adjusted laser beams to reduce the divergence angles of the laser beams, and collimating the folded laser beams again to obtain parallel laser beams;

s40, focusing the laser with the specific wavelength in the parallel laser beam again for processing through an objective lens 96, and simultaneously, observing laser focusing light spots in real time and monitoring the processing process in real time by the CCD vision system 1;

in step S40, the processing is performed according to the following steps:

s41, acquiring the type and thickness of a material to be processed, and setting laser parameters according to the type and thickness of the material;

s42, controlling the target material layer structure 23 with the required material and the required thickness to rotate to the position below the laser focusing spot;

s43, focusing laser focusing light spots on the target layer structure 23 through the transparent constraint layer structure 22, and transferring and depositing a target material with the shape consistent with that of a target light beam on the receiving substrate 24 to prepare a 3D structure.

In this embodiment, the laser 3 generates a laser beam, the laser beam is adjusted to a horizontal polarization state, and then the laser beam is expanded and collimated; the collimated laser beam enters a spatial light modulator 8 to be modulated to obtain a target light beam shape, and the target light beam is focused, collimated and focused again by a light path adjusting module 9 and then used for processing; before processing, the target material layer structure 23 with the required material and the required thickness is rotated to the position below the laser focusing light spot, and the processing of the 3D structure with multiple materials and any shape can be realized.

In step S20: designing a geometric mask based on the target pattern and loading the geometric mask to the spatial light modulator 8; when the collimated beam is incident on the spatial light modulator 8, the diffracted zero-order light is filtered out to obtain a target light beam consistent with a target image.

In step S40, during processing, the distance between the objective lens 96 and the target layer is adjusted to be equal to the focal length of the objective lens 96.

In step S42, the target layer structure 23 is a solid target film prepared on the transparent constraining layer structure 22 by magnetron sputtering or electron beam evaporation plating, or is a liquid target film prepared on the transparent constraining layer structure 22 by blade coating or spin coating. The forming process of the solid target film and the liquid target film is not limited to the present invention, and other methods capable of forming a solid film and a liquid film can be applied to the present invention. Wherein, a plurality of transparent constrained layer structures 22 are uniformly arranged around the rotating shaft 26, and the rotating shaft 26 rotates to rotate the target material layer with required material and required thickness to the lower part of the laser focusing spot.

In step S42, the transparent constraining layer 22 is made of quartz glass, the receiving substrate 24 is a flexible substrate or a solid substrate, the flexible substrate is selected from one of polyimide and PDMS, and the solid substrate is selected from one of glass, glass fiber plate and ceramic. Of course, other materials of the same nature may be used for the transparent constraining layer structure and receiving substrate 24 of the present invention.

Example two

Fig. 2 to 3 show an embodiment of a multi-material laser induced transfer 3D printing apparatus according to the present invention, which includes a CCD vision system 1, a transfer module 2, and a laser 3, an attenuator 4, an 1/2 wave plate 5, a beam expander 6, a first reflector 7, a spatial light modulator 8, and an optical path adjusting module 9 arranged in sequence: the laser 3 generates a laser beam, the laser beam is adjusted to a horizontal polarization state through the attenuator 4 and the 1/2 wave plate 5, and then the laser beam is incident into the beam expander 6 for beam expanding collimation; the collimated laser beam is reflected by a first reflector 7 and then enters a spatial light modulator 8 to be modulated to obtain a target light beam shape, and the target light beam is focused, collimated and refocused by a light path adjusting module 9 and then is used for processing; the CCD vision system 1 is used for observing laser focusing light spots for processing and monitoring the processing process in real time; the angle between the incident light and the reflected light of the spatial light modulator 8 is less than 15 deg..

The transfer module 2 comprises a three-dimensional moving platform 21, a transparent constraint layer structure 22, a target layer structure 23, a receiving substrate 24 and a two-dimensional moving platform 25, wherein a rotating shaft 26 is installed on the three-dimensional moving platform 21, the transparent constraint layer structure 22 is clamped on the rotating shaft 26, the target layer structure 23 is attached below the transparent constraint layer structure 22, the receiving substrate 24 is located below the target layer structure 23, the receiving substrate 24 is installed on the two-dimensional moving platform 25, the transparent constraint layer structure 22, the target layer structure 23 and the receiving substrate 24 are equal in number and correspond to each other one by one, the target layer structure 23 can be a plurality of groups of materials with different thicknesses, and the two-dimensional moving platform 25 and the three-dimensional moving platform 21 are both connected to the computer control system 10.

In the implementation of this embodiment, the laser 3 generates a laser beam, the laser beam is adjusted to a horizontal polarization state by the attenuator 4 and the 1/2 wave plate 5, and then the laser beam is incident into the beam expander 6 for beam expanding and collimation; the collimated laser beam is reflected by a first reflector 7 and then enters a spatial light modulator 8 to be modulated to obtain a target light beam shape, and the target light beam is focused, collimated and refocused by a light path adjusting module 9 and then is used for processing; the CCD vision system 1 is used for observing laser focusing light spots for processing and monitoring the processing process in real time; during transfer, the rotating shaft 26 is controlled to rotate to enable the target layer structure 23 with the required material and the required thickness to rotate to the position below the laser focusing spot, the three-dimensional moving platform 21 is controlled to move up and down to enable the laser beam to be focused on the target layer structure 23, the laser focusing spot is focused on the target layer structure 23 through the transparent constraint layer structure 22, and the target material with the shape consistent with that of the target light beam is transferred and deposited on the receiving substrate 24 to prepare the 3D structure.

The optical path adjusting module 9 includes a second reflecting mirror 91, a first lens 92, a second lens 93, a third reflecting mirror 94, a second polarization beam splitter 95 and an objective lens 96, which are sequentially disposed, a target light beam is reflected to the first lens 92 through the second reflecting mirror 91, the first lens 92 collects and focuses the laser beam, the collected laser beam enters the second lens 93, the collected laser beam is collimated again, the collimated laser beam is reflected to the second polarization beam splitter 95 through the third reflecting mirror 94, the second polarization beam splitter 95 reflects the laser beam with a specific wavelength to the objective lens 96, and the laser beam is focused again through the objective lens 96 and then used for processing.

CCD visual system 1 includes first polarization beam splitter 11, illumination source 12 and connects in computer control system 10's CCD camera 13, illumination source 12 launches the illumination laser of specific wavelength and throws to second polarization beam splitter 95 and reach the work piece surface, and the reflection light that reflects from the work piece surface arrives and reflects to CCD camera 13 through first polarization beam splitter 11 through objective 96 and second polarization beam splitter 95.

In this embodiment, the CCD camera 13, the laser 3, the spatial light modulator 8, the three-dimensional moving platform 21, and the two-dimensional moving platform 25 are all connected to the computer control system 10, so that the computer control system 10: can be used for controlling the parameters of the laser 3, controlling the target beam shape of the spatial light modulator 8, receiving image signals transmitted by the CCD camera 13 and controlling the actions of the two-dimensional moving platform 25 and the three-dimensional moving platform 21.

It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.