Electronic gun device for fuse wire additive manufacturing
阅读说明:本技术 一种用于熔丝增材制造的电子枪装置 (Electronic gun device for fuse wire additive manufacturing ) 是由 许海鹰 巩水利 左从进 桑兴华 于 2019-11-20 设计创作,主要内容包括:一种用于熔丝增材制造的电子枪装置,包括溜板,及倒立安装在溜板上的至少一把电子枪,电子枪通过法兰组件连通横向设置的束流导引通道,电子枪输出束流一侧从上到下依次设有送丝机构和导丝嘴;电子枪包括枪体,枪体的内部从下到上依序同轴设置阴极、栅极、阳极和第一聚焦线圈,以及绝缘子;束流导引通道包括壳体,壳体内依序设有第一偏转线圈、第二聚焦线圈和第二偏转线圈。本发明通过倒立安装在真空室内的电子枪使其出束口背对着成形零件,采用强磁偏转系统使得电子束大角度偏转到金属丝材上进行熔丝成形,避免了金属蒸气直接侵入电子枪内部对电子枪的阴极造成污染,提高阴极使用寿命,减少放电,保障电子枪长期稳定工作。(An electron gun device for fuse wire additive manufacturing comprises a slide carriage and at least one electron gun which is arranged on the slide carriage in an inverted mode, wherein the electron gun is communicated with a beam flow guide channel which is transversely arranged through a flange assembly; the electron gun comprises a gun body, wherein a cathode, a grid, an anode, a first focusing coil and an insulator are coaxially arranged inside the gun body from bottom to top in sequence; the beam guide channel comprises a shell, and a first deflection coil, a second focusing coil and a second deflection coil are sequentially arranged in the shell. According to the invention, the electron gun arranged in the vacuum chamber is inverted, so that the beam outlet of the electron gun is opposite to the formed part, and the electron beam is deflected to the metal wire in a large angle by adopting the strong magnetic deflection system to perform fuse forming, so that the phenomenon that metal steam directly invades into the electron gun to pollute the cathode of the electron gun is avoided, the service life of the cathode is prolonged, discharge is reduced, and the long-term stable work of the electron gun is ensured.)
1. An electron gun device for fuse wire additive manufacturing is characterized by comprising a slide carriage arranged on an electron gun motion mechanism in a vacuum chamber and at least one electron gun arranged on the slide carriage in an inverted mode, wherein an electron beam outlet of the electron gun is communicated with a transversely arranged beam flow guide channel through a flange assembly, one side of the electron gun, which outputs a beam flow, is sequentially provided with a wire feeding mechanism and a wire guide nozzle from top to bottom, and the wire feeding mechanism is used for feeding metal wire materials to the upper surface of a workpiece from the wire guide nozzle;
the electron gun comprises a gun body, wherein a cathode, a grid, an anode and a first focusing coil are coaxially arranged inside the gun body from bottom to top in sequence, and an insulator used for mounting the cathode and the grid is arranged inside the gun body;
the beam guiding channel comprises a shell, a first deflection coil, a second focusing coil and a second deflection coil are sequentially arranged in the shell, and the first deflection coil and the second deflection coil are used for deflecting an electron beam output by the electron gun so that the electron beam irradiates a metal wire positioned on the upper surface of a workpiece to perform fuse forming.
2. The electron gun apparatus for fuse additive manufacturing according to claim 1, wherein when the number of the electron guns is not less than two, the respective electron guns are installed symmetrically centering on the metal wire material.
3. The electron gun device for fuse additive manufacturing according to claim 1, wherein the first deflection coil and the second deflection coil have the same structure, the same number of turns of wire, and the same direction of generated magnetic field, wherein,
the first deflection coil is used for deflecting the electron beam output by the electron gun by 90 degrees;
the second deflection coil is used for adjusting the deflection angle of the electron beam, and the adjustment angle range is 45-90 degrees.
4. The electron gun device for fuse additive manufacturing as recited in claim 3, wherein the first deflection coil comprises a bobbin made of a high temperature resistant insulating material, and a pair of windings of a Hertzian coil structure wound in the same direction on the bobbin;
the bottom of skeleton is equipped with into restrainting mouth, top and is equipped with leaks and restraints detection mouth B, and a side is equipped with out restrainting mouth, opposite side is equipped with leaks and restraints detection mouth A, leak and restraint the detection sensor A of leaking in the detection mouth A, leak and restraint the detection sensor B of leaking in the detection mouth B, leak and restraint detection sensor A and be used for judging whether take place the phenomenon that the magnetic field that first deflection coil produced is opposite with the design direction, leak and restraint detection sensor B and be used for judging whether take place first deflection coil does not produce magnetic field phenomenon.
5. The electron gun apparatus for fuse additive manufacturing according to claim 4, wherein the leakage beam detection sensor a and the leakage beam detection sensor B have the same structure, and include a metal plate and a sampling resistor, the metal plate and the sampling resistor are connected to the frame in an insulated manner, one end of the sampling resistor is connected to the metal plate, the other end of the sampling resistor is grounded, a beam trajectory detection circuit is connected between the sampling resistor and the metal plate, and the beam trajectory detection circuit is configured to detect a voltage change at the connection to determine whether a deflection magnetic field exists or not and whether a beam deflection direction is opposite.
6. The electron gun apparatus for fuse additive manufacturing as recited in claim 4, wherein windings of the Helmholtz coil structure are parallel and symmetrical to a plane of an electron beam trajectory.
7. The electron gun apparatus for fuse additive manufacturing as recited in claim 1, wherein the first focusing coil and the second focusing coil are identical in structure and are concentric coils with a yoke structure.
8. The electron gun device for fuse additive manufacturing as recited in claim 1, wherein the cathode and grid are connected to a high voltage power supply outside the vacuum chamber by a multi-conductor high voltage cable;
the anode and the gun body are grounded, and an electron gun molecular pump interface is arranged on the side wall of the gun body.
9. The electron gun apparatus for fuse wire additive manufacturing according to claim 1, wherein a water cooling channel is provided inside the gun body, and the water cooling channel is connected with a water cooling system outside the vacuum chamber through a water inlet and a water outlet provided on a side wall of the gun body.
10. The electron gun apparatus for fuse additive manufacturing as recited in claim 1, wherein the flange assembly comprises an electron gun connection flange and a beam guide channel connection flange.
Technical Field
The invention relates to the technical field of fuse wire additive manufacturing, in particular to an electron gun device for fuse wire additive manufacturing.
Background
The electron beam fuse material additive manufacturing technology has the advantages of high forming speed, controllable defects, excellent mechanical property and the like, is suitable for manufacturing high-performance large metal components, and can effectively shorten the production period and reduce the manufacturing cost. At present, the size and length of the electron beam fuse forming part are from hundreds of millimeters to several meters, and the deposition efficiency reaches 1000cm3More than h, the forming material comprises stainless steel, titanium alloy and the like. The large size of the formed parts and the high deposition efficiency require long-term stable operation of the fuse forming device, especially the electron beam source system providing its device with high power energy.
The electron beam source system typically used in fuse additive manufacturing techniques is a hot cathode electron beam source with electron beam sources powers of up to tens of kilowatts. The hot cathode electron beam source adopts the method that electrons are emitted by directly or indirectly heating a cathode, and the emitted electrons are accelerated by a high-voltage electric field between a cathode and an anode and are focused by an electromagnetic focusing system to form an electron beam. Generally, an electron beam is generated and then directly irradiates a workpiece, and after being emitted from an anode, the electron beam needs to pass through a beam current channel of an electron gun and vacuum between the electron gun and the workpiece to reach the workpiece. The diameter of the beam channel is generally only about phi 30mm, and the length of the beam channel reaches hundreds of mm, which causes the vacuum pressure difference between the vacuum chamber and the space where the cathode and the anode of the electron gun are located, and the vacuum degree of the space where the cathode and the anode are located is usually higher than that of the vacuum chamber by one order of magnitude. The high-power electron beam irradiates a metal workpiece to generate a large amount of metal steam, and the metal steam returns to the space where the cathode and the anode are positioned along the beam channel, so that the cathode emission surface and part of the surface of the insulator are easily polluted, the cathode emission efficiency is reduced, and the extra loss of an electron beam source is increased; meanwhile, the discharge of the electron gun is easily caused, so that the working engineering is unstable.
Electron beam fuse wire vibration material disk equipment is divided into two types of outdoor fixed gun structure and indoor movable gun structure according to the electron gun mounting mode. An outdoor gun fixing structure, wherein an electron beam is required to melt and feed metal wires at a constant speed, and a worktable in a vacuum chamber runs according to a preset track and is stacked layer by layer to form a part; the indoor movable gun structure requires that an electronic gun and a wire feeding mechanism are installed together to move synchronously, an electron beam melts and feeds metal wires at a constant speed, the electronic gun, the wire feeding mechanism and a workbench move according to a preset track, and the melted metal wires are stacked layer by layer to obtain parts with preset shapes.
At present, hot cathode electron beam fuse additive manufacturing equipment with a fixed gun structure or a movable gun structure adopts an axis side wire feeding mode that an electron beam is directly aligned with a metal wire and a workpiece to be output, the metal wire is horizontally fed or fed from an axis side of an electron beam outlet according to a certain angle, and the electron beam is emitted from the beam outlet and then directly irradiates the metal wire and the workpiece. The metal vapor generated in the processing process easily pollutes the cathode and the insulator, so that the service life of the cathode is shortened, and the insulator is easily polluted to generate a discharge phenomenon to influence the stability of the working process. In addition, shadow areas heated by energy exist in the mode of wire feeding at the side of the shaft, so that the degree of freedom of fuse forming is reduced; the bending deflection of the metal wire is constantly changed, and the filament bundle is difficult to center, so that the forming efficiency is influenced; compared with a forming area, the area of the metal wire is small, the energy of the electron beam received by the wire is far less than that of the electron beam received by a formed part, and the microstructure of the formed part is coarse due to large heat input.
Disclosure of Invention
The embodiment of the invention provides an electron gun device for fuse wire additive manufacturing, which enables a beam outlet to be opposite to a formed part through an electron gun arranged in a vacuum chamber in an inverted mode and enables an electron beam to be deflected to a metal wire in a large angle through a strong magnetic deflection system, thereby avoiding the pollution of metal vapor directly invading the inside of the electron gun to the cathode of the electron gun, prolonging the service life of the cathode, reducing discharge and ensuring the long-term stable work of the electron gun.
The embodiment of the invention provides an electron gun device for fuse wire additive manufacturing, which comprises a slide carriage arranged on an electron gun motion mechanism in a vacuum chamber, and at least one electron gun arranged on the slide carriage in an inverted manner, wherein an electron beam outlet of the electron gun is communicated with a transversely arranged beam guide channel through a flange assembly, one side of the electron gun outputting a beam is sequentially provided with a wire feeding mechanism and a wire guide nozzle from top to bottom, and the wire feeding mechanism is used for feeding metal wires to the upper surface of a workpiece from the wire guide nozzle;
the electron gun comprises a gun body, wherein a cathode, a grid, an anode and a first focusing coil are coaxially arranged inside the gun body from bottom to top in sequence, and an insulator used for mounting the cathode and the grid is arranged inside the gun body;
the beam guide channel comprises a subject, a first deflection coil, a second focusing coil and a second deflection coil are sequentially arranged in the shell, and the first deflection coil and the second deflection coil are used for deflecting the electron beams output by the electron gun so that the electron beams irradiate the metal wire positioned on the upper surface of the workpiece to perform fuse forming.
Further, when the number of the electron guns is not less than two, the electron guns are symmetrically installed by taking the metal wire as the center.
Furthermore, the first deflection coil and the second deflection coil have the same structure, the same number of winding turns and the same direction of generated magnetic field, wherein,
the first deflection coil is used for deflecting the electron beam output by the electron gun by 90 degrees;
the second deflection coil is used for adjusting the deflection angle of the electron beam, and the adjustment angle range is 45-90 degrees.
Further, the first deflection coil comprises a framework made of high-temperature-resistant insulating materials, and a pair of windings with Hertzian coil structures and the same winding direction are arranged on the framework;
the bottom of skeleton is equipped with into restrainting mouth, top and is equipped with leaks and restraints detection mouth B, and a side is equipped with out restrainting mouth, opposite side is equipped with leaks and restraints detection mouth A, leak and restraint the detection sensor A of leaking in the detection mouth A, leak and restraint the detection sensor B of leaking in the detection mouth B, leak and restraint detection sensor A and be used for judging whether take place the phenomenon that the magnetic field that first deflection coil produced is opposite with the design direction, leak and restraint detection sensor B and be used for judging whether take place first deflection coil does not produce magnetic field phenomenon.
Further, leak and restraint the structure that detects sensor A and leak and restraint detection sensor B the same, include with metal polar plate and sampling resistor that the skeleton insulation is connected, sampling resistor one end is connected with the metal polar plate, other end ground connection, connect beam track detection circuitry between sampling resistor and the metal polar plate junction, beam track detection circuitry is used for detecting the voltage variation of junction to judge whether have magnetic field and the beam deflection direction opposite.
Further, the Helmholtz coil is parallel to the plane of the electron beam trajectory and is symmetrical.
Further, the first focusing coil and the second focusing coil have the same structure and are concentric coils with outer magnetic yoke structures.
Furthermore, the cathode and the grid are connected with a high-voltage power supply outside the vacuum chamber through a multi-core high-voltage cable;
the anode and the gun body are grounded, and an electron gun molecular pump interface is arranged on the side wall of the gun body.
Furthermore, the inside of the gun body is provided with a water cooling channel, and the water cooling channel is connected with a water cooling system outside the vacuum chamber through a water inlet and a water outlet which are arranged on the side wall of the gun body.
Further, the flange assembly comprises an electron gun connecting flange and a beam guide channel connecting flange.
In conclusion, the electron gun is arranged in the vacuum chamber in an inverted mode, the beam outlet is opposite to the forming part, the electron beam is deflected to the metal wire in a large angle by the strong magnetic deflection system to perform fuse forming, metal steam is prevented from directly invading into the electron gun to pollute the cathode of the electron gun, the service life of the cathode is prolonged, discharge is reduced, and long-term stable work of the electron gun is guaranteed. In addition, two electron gun devices symmetrically and inversely installed by taking the metal wire as the center can improve the fuse forming efficiency, reduce shadow areas heated by the fuse forming electron beams and improve the flexibility of electron beam fuse additive manufacturing.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments of the present invention will be briefly described below, and it is obvious that the drawings described below are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic view of an electron gun apparatus for additive manufacturing of fuse according to the present invention.
Fig. 2 is a top view of the first deflection coil of fig. 1.
Fig. 3 is an isometric view of the first deflection coil of fig. 1.
Fig. 4 is a cross-sectional view of the first deflection coil of fig. 1.
Fig. 5 is a schematic diagram of a missing beam detection sensor in the first deflection coil of the present invention.
Fig. 6 is a schematic view of a two-gun mounting application of the present invention.
In the figure:
1-a cathode; 2-a grid; 3-an anode; 4-a first focusing coil; 5-a first deflection coil; 6-a second focusing coil; 7-a second deflection coil; 8, an insulator; 9-gun body; 91-electron gun connection flange; 10-beam guide channel A; 100-electron gun A; 101-connecting a beam guide channel with a flange; 1001-beam inlet; 1002-a beam outlet; 1003-leak bundle detection port a; 1004-leak beam detection port B; 1005-a metal plate; 1006-a sampling resistor; 1007-beam trajectory detection circuit; 102-leak beam measurement sensor a; 103-missing beam detection sensor B; 104-missing beam detection sensor C; 105-missing beam detection sensor D; 106-water inlet A; 107-water outlet A; 108-high voltage cable a; 11-a wire feeder; 12-a metal wire; 13-a thread guide nozzle; 14-an electron beam; 15-electron gun molecular pump interface; 16-a housing; 17-a slide carriage; 18-a backbone; 181-deflection coil winding a; 182-deflection coil winding B; 20-beam guide channel B; 200-electron gun B; 206-water inlet B; 207-water outlet B; 208-high voltage cable B; 24-electron beam B.
Detailed Description
The embodiments of the present invention will be described in further detail with reference to the drawings and examples. The following detailed description of the embodiments and the accompanying drawings are provided to illustrate the principles of the invention and are not intended to limit the scope of the invention, i.e., the invention is not limited to the embodiments described, but covers any modifications, alterations, and improvements in the parts, components, and connections without departing from the spirit of the invention.
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.
The first embodiment:
fig. 1 is a schematic diagram of an overall structure of an electron gun apparatus for fuse additive manufacturing according to an embodiment of the present invention, as shown in fig. 1, including a
Specifically, in this embodiment, the electron gun a100 includes a
Specifically, in this embodiment, the beam guiding path a10 includes a
It should be noted that, in other embodiments, at least one electron gun is mounted on the
In a preferred embodiment, the first and
the
the
Referring to fig. 2 to 4, the
the bottom of the
Referring to fig. 1, 4 and 5, the leakage beam detection sensor a 102 and the leakage beam detection sensor B103 have the same structure, and include a metal plate 1005 and a sampling resistor 1006 in insulated connection with the
In a preferred embodiment, the windings of the Helmholtz coil structure are parallel and symmetrical to the plane of the trajectory of the electron beam A14.
In a preferred embodiment, the first focusing
Referring to fig. 1, the cathode 1 and the grid 2 are connected to a high voltage power supply outside the vacuum chamber through a multi-core high voltage cable a 108 to provide a high voltage power supply for the whole electron gun apparatus;
the
In a preferred embodiment, a water cooling channel is arranged inside the
Referring to fig. 1 again, in order to facilitate the connection between the electron gun a100 and the beam guide passage a10, the flange assembly includes an electron gun connection flange and a beam guide passage connection flange.
It should be clear that, in this embodiment, the
Second embodiment:
referring to FIG. 6, two electron guns A100 and B200 having the same structure are symmetrically and inversely mounted on a
Specifically, in this embodiment, the
In this embodiment, the electron beam a 14 generated by the electron gun a100, the electron beam B24 generated by the electron gun B200, and the
In conclusion, the electron gun is arranged in the vacuum chamber in an inverted mode, the beam outlet is opposite to the forming part, the electron beam is deflected to the
It should be clear that the embodiments in this specification are described in a progressive manner, and the same or similar parts in the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. The present invention is not limited to the specific steps and structures described above and shown in the drawings. Also, a detailed description of known process techniques is omitted herein for the sake of brevity.
The above description is only an example of the present application and is not limited to the present application. Various modifications and alterations to this application will become apparent to those skilled in the art without departing from the scope of this invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the scope of the claims of the present application.
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