Vacuum drying device
阅读说明:本技术 真空干燥装置 (Vacuum drying device ) 是由 黄辉 于 2019-10-21 设计创作,主要内容包括:本发明公开了一种真空干燥装置,所述真空干燥装置包括腔室、进气口以及至少一个冷凝回收室,所述腔室用于放置基板,所述进气口设置于所述腔室的一侧,用于向所述腔室内通入气体,以将所述基板挥发的溶剂带走,且所述至少一个冷凝回收室与所述腔室相连通,用于接收所述气体并回收所述基板挥发的溶剂。本发明通过在真空干燥装置的腔室中设置进气口以及与腔室相连通的冷凝回收室,能够及时带走并回收腔室内挥发的溶剂,有效的防止了溶剂凝结并滴落至基板上,从而防止了基板被污染,减少了保养擦洗的工序,并可以回收溶剂再次利用。(The invention discloses a vacuum drying device which comprises a cavity, an air inlet and at least one condensation recovery chamber, wherein the cavity is used for placing a substrate, the air inlet is arranged on one side of the cavity and used for introducing air into the cavity so as to take away a solvent volatilized by the substrate, and the at least one condensation recovery chamber is communicated with the cavity and used for receiving the air and recovering the solvent volatilized by the substrate. According to the invention, the air inlet and the condensation recovery chamber communicated with the cavity are arranged in the cavity of the vacuum drying device, so that the solvent volatilized in the cavity can be taken away and recovered in time, the solvent is effectively prevented from being condensed and dropping on the substrate, the substrate is prevented from being polluted, the maintenance and scrubbing processes are reduced, and the solvent can be recovered for reuse.)
1. A vacuum drying apparatus, comprising:
a chamber for placing a substrate;
the gas inlet is arranged on one side of the chamber and used for introducing gas into the chamber so as to take away the solvent volatilized by the substrate;
at least one condensation recovery chamber in communication with the chamber for receiving the gas and recovering the solvent volatilized by the substrate.
2. The vacuum drying apparatus of claim 1, further comprising a circulation conduit, and wherein the at least one condensate recovery chamber is in communication with the gas inlet via the circulation conduit to return the gas to the gas inlet.
3. The vacuum drying apparatus according to claim 2, wherein a strainer is disposed at a position where the circulation duct communicates with the at least one condensation recovery chamber.
4. Vacuum drying apparatus according to claim 3, wherein the mesh of the sieve has a diameter of 0.2mm to 1 mm.
5. Vacuum drying apparatus according to claim 2, wherein the circulation duct is provided with heating means to heat the gas within the circulation duct.
6. The vacuum drying apparatus of claim 1, wherein the outlet of the chamber to the at least one condensate recovery chamber is at the same level as the inlet and is on opposite sides of the chamber.
7. The vacuum drying apparatus of claim 1, wherein each of said at least one condensate recovery chamber is provided with a valve arrangement in communication with said chamber.
8. The vacuum drying apparatus of claim 1, wherein each of the at least one condensing recovery chamber recovers a solvent.
9. The vacuum drying apparatus according to claim 1, wherein the temperature of the gas is 40 to 80 ℃.
10. The vacuum drying apparatus according to claim 1, wherein the condensing manner of each of the at least one condensing recovery chamber includes at least one of cooling water condensation, dry cool air condensation, normal temperature condensation, and coolant condensation.
Technical Field
The invention relates to the field of panel manufacturing processes, in particular to a vacuum drying device.
Background
At present, the development trend of the OLED is towards the direction of inkjet printing, but in the process of inkjet printing, there are processes of drying, baking, printing, etc. respectively, and the printed film layer has at least three layers (a hole injection layer, a transport layer and a light emitting layer), and after each printing, operations such as drying, baking, etc. are required.
At present, drying is mainly carried out in a vacuum mode, and in order to improve drying efficiency and form better film morphology, the drying is generally carried out in a mode that an upper cooling source and a lower cooling source are arranged.
Although the method can well help the film morphology, the amount of the solvent taken away in a vacuumizing mode is limited, the solvent cannot be completely pumped away, the solvent is often condensed at the upper end of a vacuum drying device, and the solvent drips on the surface of the substrate after long-term accumulation to pollute devices, so that the manufacturing process is influenced.
Disclosure of Invention
The invention provides a vacuum drying device which can timely recover a solvent volatilized in a cavity so as to solve the technical problem that in the prior art, the solvent is condensed in the cavity, so that liquid drops to a substrate and pollutes the substrate, and further the manufacturing process is influenced.
In order to solve the above problems, the technical scheme provided by the invention is as follows:
the present invention provides a vacuum drying apparatus, comprising:
a chamber for placing a substrate;
the gas inlet is arranged on one side of the chamber and used for introducing gas into the chamber so as to take away the solvent volatilized by the substrate;
at least one condensation recovery chamber in communication with the chamber for receiving the gas and recovering the solvent volatilized by the substrate.
According to a preferred embodiment of the present invention, the vacuum drying apparatus further comprises a circulation duct, and the at least one condensation recovery chamber is communicated with the gas inlet through the circulation duct to return the gas to the gas inlet.
According to a preferred embodiment of the present invention, a filter screen is disposed at a position where the circulation duct communicates with the at least one condensing and recovering chamber.
According to a preferred embodiment of the invention, the diameter of the holes of the sieve is between 0.2mm and 1 mm.
According to a preferred embodiment of the invention, the circulation duct is provided with heating means to heat the gas in the circulation duct.
According to a preferred embodiment of the present invention, the outlet of the chamber to the at least one condensation recovery chamber is located at the same level as the inlet and on opposite sides of the chamber.
According to a preferred embodiment of the present invention, valve means are provided at each of the at least one condensate recovery chamber in communication with the chamber.
According to a preferred embodiment of the present invention, each of the at least one condensing recovery chamber recovers a solvent.
According to a preferred embodiment of the invention, the temperature of the gas is 40 to 80 ℃.
According to a preferred embodiment of the present invention, the condensing manner of each of the at least one condensing recovery chamber includes at least one of cooling water condensation, dry cold air condensation, normal temperature condensation, and coolant condensation.
The invention has the beneficial effects that: according to the invention, the air inlet and the condensation recovery chamber communicated with the cavity are arranged in the cavity of the vacuum drying device, so that the solvent volatilized in the cavity can be taken away and recovered in time, the solvent is effectively prevented from being condensed and dropping on the substrate, the substrate is prevented from being polluted, the maintenance and scrubbing processes are reduced, and the solvent can be recovered for reuse.
Drawings
In order to illustrate the embodiments or the technical solutions in the prior art more clearly, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the invention, and it is obvious for a person skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a vacuum drying apparatus according to an embodiment of the present invention.
Fig. 2 is a schematic structural diagram of another vacuum drying apparatus according to an embodiment of the present invention.
Detailed Description
The following description of the various embodiments refers to the accompanying drawings that illustrate specific embodiments in which the invention may be practiced. The directional terms mentioned in the present invention, such as [ upper ], [ lower ], [ front ], [ rear ], [ left ], [ right ], [ inner ], [ outer ], [ side ], are only referring to the directions of the attached drawings. Accordingly, the directional terms used are used for explanation and understanding of the present invention, and are not used for limiting the present invention. In the drawings, elements having similar structures are denoted by the same reference numerals.
The invention aims at the technical problems that the solvent is condensed and drips on the substrate to pollute the substrate and further influence the manufacturing process because the solvent volatilized in the cavity can not be eliminated in time in the conventional vacuum drying device, and the embodiment can solve the defect.
The embodiment of the invention provides a vacuum drying device, and the vacuum drying device comprises:
a chamber for placing a substrate;
the gas inlet is arranged on one side of the chamber and used for introducing gas into the chamber so as to take away the solvent volatilized by the substrate;
at least one condensation recovery chamber in communication with the chamber for receiving the gas and recovering the solvent volatilized by the substrate.
As shown in fig. 1, a schematic structural diagram of a vacuum drying apparatus according to an embodiment of the present invention includes a
The
In the implementation and application process, because the amount of the solvent brought away by the vacuumizing mode is limited, the solvent cannot be thoroughly pumped away, the solvent is often condensed at the upper end of the vacuum drying device, and the solvent can drip on the surface of the substrate after long-term accumulation to pollute devices, so that the manufacturing process is influenced.
In addition, the vacuum drying device provided by the embodiment of the invention is also provided with a conventional air pump device to perform normal vacuum drying operation, and is not shown in the figure.
Specifically, as shown in fig. 1, a
Further, the vacuum drying apparatus further includes a
Then after the gas brings the solvent into the
Furthermore, a regulating device is arranged at the connection between the
It should be noted that the gas introduced into the
Further, a
A
And the diameter of the meshes of the
The vacuum drying device comprises at least one
Wherein, a
And the vacuum drying device comprises one or more condensing and
Specifically, when the vacuum drying device includes a
When the vacuum drying apparatus includes a plurality of condensing and
Furthermore, the outlet of the
And each
Thereby, the drying effect of the vacuum drying device can be optimized.
In one embodiment of the present invention, as shown in fig. 1, the vacuum drying apparatus includes a
A carrying table 108 is disposed in the
The connecting part of the
A
A
A
The
To sum up, the vacuum drying system that provides in this embodiment, when accomplishing the processing procedure, the external hot air supply of air inlet, let in the gas that has the uniform temperature in order to take away the solvent in the cavity fast in the cavity, and be provided with the condensation recovery room, keep the lower temperature in the condensation recovery room, the purpose is the gas that the hot-blast flows of collection, and cool off rapidly, the condensation collects the solvent, also can avoid the liquid drop phenomenon that the solvent can't be eliminated in the cavity and form simultaneously, and the gas that gets into in the condensation recovery room returns to the air inlet through the circulating line, obtain reuse, and heat to the uniform temperature through the heating device on the circulating line, improve vacuum drying device's drying effect.
In another embodiment of the present invention, as shown in fig. 2, the vacuum drying apparatus includes a
A carrying table 108 is disposed in the
The connecting part of the
A
A
A
A
When the vacuum drying device is used for drying a first solvent, the corresponding condensation recovery chamber is 1021, the
When the vacuum drying device is used for drying the second solvent correspondingly, and the corresponding condensation recovery chamber is 1022, the
A
A
The
To sum up, the vacuum drying system that provides in this embodiment, when accomplishing the processing procedure, the external hot air supply of air inlet, let in the gas that has the uniform temperature in order to take away the solvent in the cavity fast in the cavity, and be provided with the condensation recovery room, every condensation recovery room can correspond retrieves a solvent, keep the lower temperature in the condensation recovery room, the purpose is the gas that the hot-blast flows of collection, and cool off rapidly, the condensation collects the solvent, also can avoid the unable elimination of solvent in the cavity and the liquid drop phenomenon that forms simultaneously, and the gas that gets into in the condensation recovery room returns to the air inlet through the circulating line, obtain reuse, and heat to the uniform temperature through the heating device on the circulating line, improve vacuum drying device's drying effect.
The invention can take away and recover the solvent volatilized in the cavity in time by arranging the air inlet and the condensation recovery chamber, effectively prevents the solvent from condensing and dripping on the substrate, thereby preventing the substrate from being polluted, reducing the working procedures of maintenance and scrubbing, and recovering the solvent for reuse.
In summary, although the present invention has been described with reference to the preferred embodiments, the above-described preferred embodiments are not intended to limit the present invention, and those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, therefore, the scope of the present invention shall be determined by the appended claims.
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