阅读说明：本技术 致动传感模块 (Actuation sensing module ) 是由 莫皓然 陈世昌 廖家淯 廖鸿信 高中伟 黄启峰 韩永隆 蔡长谚 李伟铭 于 2020-04-24 设计创作，主要内容包括：本案提供一种致动传感模块,包含：一底板,具有一泄压通孔、一排气通孔及一连通孔；一气压传感器,设置于该底板且封盖该连通孔；一薄型气体传输装置,设置于该底板且封盖该排气通孔及该泄压通孔；以及一盖板,设置于该底板,且罩盖该气压传感器及该薄型气体传输装置,其中,该盖板具有一进气通孔；其中,驱动该薄型气体传输装置,将气体经由该进气通孔导入,通过该薄型气体传输装置将气体由该排气通孔排出,并由该气压传感器检测气体的气压变化。(The present disclosure provides an actuation sensing module, including: a bottom plate having a pressure relief through hole, an exhaust through hole and a communication through hole; a gas pressure sensor arranged on the bottom plate and covering the communication hole; the thin gas transmission device is arranged on the bottom plate and covers the exhaust through hole and the pressure relief through hole; the cover plate is arranged on the bottom plate and covers the air pressure sensor and the thin gas transmission device, wherein the cover plate is provided with an air inlet through hole; the thin gas transmission device is driven to introduce gas through the gas inlet through hole, the gas is discharged from the gas outlet through the thin gas transmission device, and the gas pressure sensor detects the gas pressure change of the gas.)

1. An actuation sensing module, comprising:

a bottom plate having a pressure relief through hole, an exhaust through hole and a communication through hole;

a gas pressure sensor arranged on the bottom plate and covering the communication hole;

the thin gas transmission device is arranged on the bottom plate and covers the exhaust through hole and the pressure relief through hole; and

the cover plate is arranged on the bottom plate and covers the air pressure sensor and the thin gas transmission device, wherein the cover plate is provided with an air inlet through hole;

the thin gas transmission device is driven to introduce gas through the gas inlet through hole, the gas is discharged from the gas outlet through the thin gas transmission device, and the gas pressure sensor detects the gas pressure change of the gas.

2. The motion sensor module of claim 1, wherein the air inlet hole is disposed in correspondence with the air pressure sensor.

3. The motion sensor module of claim 1, wherein the vent hole is connected to a positive pressure load.

4. The motion sensor module of claim 3, wherein the positive pressure load is a bladder.

5. The motion sensor module of claim 3, wherein the positive pressure load is a gas cylinder.

6. The motion sensor module of claim 1, wherein the inlet vent is connected to a negative pressure load.

7. The motion sensor module of claim 6, wherein the negative pressure load is an airbag.

8. The motion sensor module of claim 6, wherein the negative pressure load is a gas cylinder.

9. The motion sensor module of claim 1, wherein the low profile gas delivery device comprises:

a thin gas pump comprising:

an intake plate having:

a first surface;

a second surface opposite to the first surface;

a plurality of air inlets respectively penetrating from the first surface to the second surface;

a converging chamber formed by recessing from the second surface and located at the center of the second surface; and

a plurality of air inlet channels formed by the second surface in a concave way, wherein one end of each air inlet channel is respectively connected with the plurality of air inlet holes, and the other end of each air inlet channel is connected with the confluence chamber;

a resonator plate, bonded to the second surface, having:

a central hole located at the center of the resonance sheet;

a vibration part located at the periphery of the central hole and corresponding to the confluence chamber; and

the fixing part is positioned at the outer edge of the vibrating part, and the resonator plate is combined to the air inlet plate through the fixing part;

an actuating member coupled to the fixing portion of the resonator plate;

a first insulating frame combined with the actuating member;

a conductive frame combined with the first insulating frame; and

a second insulating frame combined with the conductive frame; and

a thin valve structure, which is combined with the second insulating frame and has:

a first thin plate having a hollow area;

a valve frame having a valve plate receiving area;

the valve plate is arranged in the valve plate accommodating area and is provided with a valve hole, and the valve hole is staggered with the hollowed area; and

a second sheet having:

an air outlet surface;

a pressure relief surface opposite the vent surface;

an air outlet groove which is sunken from the air outlet surface and is staggered with the excavated area part of the first thin plate;

an air outlet hole hollowed from the air outlet groove to the pressure relief surface, wherein the air outlet hole is arranged corresponding to the valve hole;

the pressure relief hole is arranged at an interval with the air outlet groove; and

a pressure relief trench recessed from the pressure relief surface and communicating with the pressure relief hole;

wherein, the first thin plate, the valve frame and the second thin plate are sequentially stacked and fixed.

10. The actuation sensing module of claim 9, wherein the actuation member comprises:

a vibrating plate in a square shape;

a frame surrounding the periphery of the vibrating plate;

a plurality of connection parts respectively connected between the vibration plate and the frame to elastically support the vibration plate; and

and the shape and the area of the piezoelectric sheet correspond to those of the vibrating plate and are attached to the vibrating plate.

11. The actuation sensing module according to claim 9, wherein the vent hole has a larger aperture than the valve hole.

12. The motion sensor module of claim 9, wherein the first plate, the valve frame, and the second plate are all a metal.

13. The motion sensor module of claim 12, wherein the metal material is a stainless steel material.

14. The motion sensor module of claim 9, wherein the hollowed-out region is the same shape as the air vent groove.

15. The motion sensor module of claim 1, wherein the module has a length less than 18mm, a width less than 16mm, and a height less than 4 mm.

Technical Field

The present disclosure relates to an actuating sensor module, and more particularly, to an actuating sensor module capable of connecting a positive pressure load and a negative pressure load and controlling gas transmission.

Background

With the increasing development of technology, gas delivery devices are being used more and more frequently, and even recently, the image is seen in wearable devices, such as industrial applications, biomedical applications, medical care, electronic heat dissipation, etc., and conventional pumps are gradually becoming smaller and larger.

The conventional thin gas transmission device is often used for inflating a positive pressure load or assisting negative pressure load to release gas, but the inflation and the release of gas are difficult to regulate, so how to provide an actuating sensing module which can miniaturize the volume, easily assemble with the positive pressure load or the negative pressure load and regulate the inflation or release efficiency is a difficult problem to overcome at present.

Disclosure of Invention

The main objective of the present disclosure is to provide an actuation sensing module, which generates a pressure gradient in a designed flow channel by means of gas fluctuation generated by high-frequency actuation of a piezoelectric film, so as to enable gas to flow at a high speed, and transmit the gas from a suction end to a discharge end through impedance difference in the inlet and outlet directions of the flow channel, so as to solve the disadvantages of large volume, difficulty in thinning, incapability of achieving portable purpose, and loud noise of an apparatus or equipment using a gas transmission device in the prior art.

To achieve the above object, a broader aspect of the present invention provides an actuated sensing module, including: a bottom plate having a pressure relief through hole, an exhaust through hole and a communication through hole; an air pressure sensor arranged on the bottom plate and covering the communication hole; the thin gas transmission device is arranged on the bottom plate and covers the exhaust through hole and the pressure relief through hole; the cover plate is arranged on the bottom plate and covers the air pressure sensor and the thin gas transmission device, wherein the cover plate is provided with an air inlet through hole; the thin gas transmission device is driven to introduce gas through the gas inlet through hole, the gas is discharged from the gas outlet through the thin gas transmission device, and the gas pressure sensor detects the gas pressure change of the gas.

Drawings

Fig. 1A is a schematic perspective view of the present actuation sensing module.

Fig. 1B is an exploded schematic view of the actuation sensor module of the present disclosure.

Fig. 2 is a perspective view of the micro gas transmission device.

Fig. 3A is an exploded view of the thin gas pump.

Fig. 3B is an exploded view of the thin gas pump at another angle.

FIG. 4A is a schematic cross-sectional view of a thin gas pump of the present invention.

Fig. 4B to 4D are schematic operation diagrams of the thin gas pump of the present invention.

Fig. 5A is an exploded view of the thin valve structure.

Fig. 5B is an exploded view of another aspect of the thin valve structure of the present invention.

Fig. 6A is a schematic cross-sectional view of the thin gas delivery device of the present invention.

Fig. 6B is a schematic gas outlet view of the thin gas transmission device.

Fig. 6C is a schematic pressure relief view of the thin gas transmission device according to the present disclosure.

Fig. 7A is a schematic cross-sectional view of an active sensing module according to the present disclosure.

Fig. 7B is an operation schematic diagram of the actuation sensing module connected to the positive pressure load.

Fig. 7C is a schematic view of the pressure relief of the actuation sensing module connected to the positive pressure load.

Fig. 7D is an operation schematic diagram of the actuation sensing module connected to the negative pressure load.

Fig. 7E is a schematic view of the pressure relief of the actuation sensing module connected to the negative pressure load.

Description of the reference numerals

100: actuation sensing module

1: base plate

11: pressure relief through hole

12: exhaust through hole

13: communicating hole

2: air pressure sensor

200: positive pressure load

3: thin gas transmission device

300: negative pressure load

31: thin gas pump

311: air inlet plate

3111: first surface

3112: second surface

3113: air intake

3114: confluence chamber

3115: air inlet flow channel

312: resonance sheet

3121: center hole

3122: vibrating part

3123: fixing part

313: actuating element

3131: vibrating plate

3131 a: upper surface of

3131 b: lower surface

3131 c: convex part

3132: frame structure

3132 a: first conductive pin

3133: connecting part

3134: piezoelectric patch

3135: gas channel

314: first insulating frame

315: conductive frame

3151: frame part

3152: electrode part

3153: second conductive pin

316: second insulating frame

317: vibration chamber

32: thin valve structure

321: first thin plate

3211: excavated area

322: valve frame

3221: valve plate accommodating area

323: valve plate

3231: valve bore

324: second thin plate

3241: air outlet surface

3242: pressure relief surface

3243: air outlet groove

3244: air outlet

3245: pressure relief hole

3246: pressure relief trench

4: cover plate

41: air inlet through hole

Detailed Description

Some exemplary embodiments that embody the features and advantages of this disclosure will be described in detail in the description that follows. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

The motion sensor module 100 can be applied to a mobile phone, a tablet computer, a wearable device, or any similar mobile electronic device configured to include a microprocessor, a RAM, and the like. Please refer to fig. 1A and 1B, which are schematic structural diagrams of an actuation sensing module according to a preferred embodiment of the present disclosure. As shown, the actuating sensor module 100 includes a base plate 1, a pressure sensor 2, a thin gas transmission device 3 and a cover plate 4.

The bottom plate 1 is provided with a pressure relief through hole 11, an exhaust through hole 12 and a connecting through hole 13 which are arranged in an array, the air pressure sensor 2 is arranged on the bottom plate 1 and covers the connecting through hole 13, the thin gas transmission device 3 is arranged on the bottom plate 1 and covers the exhaust through hole 12 and the pressure relief through hole 11, the cover plate 4 is arranged on the bottom plate 1 and covers the air pressure sensor 2 and the thin gas transmission device 3, so that the air pressure sensor 2 and the thin gas transmission device 3 are accommodated between the bottom plate 1 and the cover plate 4, the cover plate 4 is provided with an air inlet through hole 41, the air inlet through hole 41 is arranged corresponding to the air pressure sensor 2, and in the embodiment, the air inlet through hole 41 is correspondingly positioned above the air pressure sensor 2; the thin gas transmission device 3 is driven to start gas to flow into the cover plate 4 through the gas inlet through hole 41, the thin gas transmission device 3 exhausts the gas through the gas outlet through hole 12, and the gas pressure sensor 2 detects the change of the gas pressure.

Referring to fig. 2, the thin gas transmission device 3 includes a thin gas pump 31 and a thin valve structure 32, and the thin gas pump 31 is stacked on the thin valve structure 32.

Referring to fig. 3A and 3B, the thin gas pump 31 includes a gas inlet plate 311, a resonator plate 312, an actuator 313, a first insulating frame 314, a conductive frame 315, and a second insulating frame 316; the intake plate 311 has a first surface 3111, a second surface 3112, a plurality of intake holes 3113, a converging chamber 3114 and a plurality of intake runners 3115. The first surface 3111 and the second surface 3112 are two surfaces corresponding to each other. The number of the air intake holes 3113 is 4 in this embodiment, but not limited thereto, and the air intake holes 3111 penetrate through the second surface 3112 from the first surface 3111. The junction chamber 3114 is formed by the second surface 3112 and is located at the center of the second surface 3112. The number and positions of the intake runners 3115 correspond to those of the intake ports 3113, so the number is 4 in this embodiment as well. One end of each of the inlet channels 3115 is connected to a corresponding inlet port 3113, and the other end is connected to the collecting chamber 3114, so that the gas enters from the inlet ports 3113, passes through the corresponding inlet channels 3115, and finally collects in the collecting chamber 3114.

The resonator plate 312 is coupled to the second surface 3112 of the intake plate 311, the resonator plate 312 includes a central hole 3121, a vibration portion 3122, and a fixing portion 3123, the central hole 3121 is formed through the center of the resonator plate 312, the vibration portion 3122 is located at a peripheral region of the central hole 3121, the fixing portion 3123 is located at an outer edge of the vibration portion 3122, and the resonator plate 312 is coupled to the intake plate 311 through the fixing portion 3123. When the resonance plate 312 is coupled to the intake plate 311, the central hole 3121, the vibration portion 3122 will vertically correspond to the confluence chamber 3114 of the intake plate 311.

The actuator 313 is coupled to the resonator plate 312, and the actuator 313 includes a vibrating plate 3131, a frame 3132, a plurality of connecting portions 3133, a piezoelectric plate 3134, and a plurality of gas passages 3135. The vibrating plate 3131 has a square shape. The frame 3132 is a square frame surrounding the periphery of the vibrating plate 3131 and has a first conductive pin 3132a, wherein the first conductive pin 3132a extends from the periphery of the frame 3132 in a horizontal direction. The plurality of gas passages 3135 are formed between the vibrating plate 3131, the frame 3132, and the plurality of connecting portions 3133. The actuator 313 is coupled to the fixing portion 3123 of the resonator plate 312 through the frame 3132, and the number of the connecting portions 3133 is 4 in the present embodiment, but not limited thereto. The connection portions 3133 are respectively connected between the vibration plate 3131 and the frame 3132 to elastically support the vibration plate 3131. The piezoelectric sheet 3134 has a shape and an area corresponding to those of the vibrating plate 3131, in this embodiment, the piezoelectric sheet 3134 is also square, has a side length less than or equal to that of the vibrating plate 3131, and is attached to the vibrating plate 3131. Further, the vibration plate 3131 has opposite surfaces: a top surface 3131a and a bottom surface 3131b, wherein the top surface 3131a has a protrusion 3131c, and the piezoelectric sheet 3134 is attached to the bottom surface 3131 b.

The first insulating frame 314 and the second insulating frame 316 have the same shape as the frame 3132 of the actuator 313, and are both square frames. The conductive frame 315 includes a frame portion 3151, an electrode portion 3152 and a second conductive pin 3153, the frame portion 3151 is a square frame as the first insulating frame 314 and the second insulating frame 316, the electrode portion 3152 extends from the inner side of the frame portion 3151 to the center, and the second conductive pin 3153 extends from the outer periphery of the frame portion 3151 in the horizontal direction; the first insulating frame 314 is coupled to the actuator 313, the conductive frame 315 is coupled to the first insulating frame 314, and the second insulating frame 316 is coupled to the conductive frame 315.

Referring to fig. 4A and 3A, fig. 4A is a cross-sectional view of a thin gas pump. The intake plate 311, the resonator plate 312, the actuating member 313, the first insulating frame 314, the conductive frame 315, and the second insulating frame 316 are sequentially stacked, and a vibration chamber 317 is formed between the resonator plate 312 and the vibration plate 3131. In addition, the electrode portion 3152 of the conductive frame 315 abuts against the piezoelectric sheet 3134 of the actuator 313 and is electrically connected, so that the first conductive pin 3132a of the actuator 313 and the second conductive pin 3153 of the conductive frame 315 can receive a driving signal (including a driving voltage and a driving frequency) to the outside and transmit the driving signal to the piezoelectric sheet 3134.

Referring to fig. 4B to 4D, after receiving the driving signal, the piezoelectric sheet 3134 begins to deform due to the piezoelectric effect, and then drives the vibrating plate 3131 to move up and down. Referring to fig. 4B, when the vibration plate 3131 moves downward, the vibration portion 3122 of the resonance plate 312 is driven to move downward, so that the volume of the collecting chamber 3114 increases, and external air starts to be drawn into the collecting chamber 3114 through the air inlet holes 3113 and the air inlet channels 3115. As shown in fig. 4C, when the vibrating plate 3131 is driven upwards by the piezoelectric plate 3134, the gas in the vibrating chamber 317 is pushed outwards from the center to the gas passage 3135, and is guided downwards through the gas passage 3135, and the resonance plate 312 moves upwards, so that the gas in the collecting chamber 3114 is pushed and transmitted downwards through the central hole 3121. Finally, as shown in fig. 4D, when the vibrating plate 3131 is displaced downward to reset, the vibrating portion 3122 of the resonator plate 312 is synchronously driven to move downward, the vibrating portion 3122 approaches the protrusion 3131c of the vibrating plate 3131, pushing the gas in the vibrating chamber 317 to move outward, so as to enter the gas passage 3135, and due to the downward displacement of the vibrating portion 3122, the volume of the manifold chamber 3114 is greatly increased, so that the gas inlet 3113 and the gas inlet 3115 draw the external gas into the manifold chamber 3114, and the above actions are repeated continuously, so as to continuously transmit the gas downward to the thin valve structure 32.

Referring to fig. 5A to 5B, fig. 5A is an exploded view of the thin valve structure 32, and fig. 5B is an exploded view of the thin valve structure 32 from another angle. The thin valve structure 32 includes a first thin plate 321, a valve frame 322, a valve plate 323 and a second thin plate 324.

The first thin plate 321 has a hollow area 3211. The valve frame 322 has a valve plate receiving area 3221. The valve plate 323 is disposed in the valve plate accommodating area 3221 and has a valve hole 3231, and the valve hole 3231 is staggered from the hollow area 3211. The shape of the valve plate receiving area 3221 is the same as the shape of the valve plate 323, so that the valve plate 323 can be fixed and positioned.

Second sheet 324 has an outlet face 3241, a pressure relief face 3242, an outlet groove 3243, an outlet hole 3244, a pressure relief hole 3245, and a pressure relief trench 3246. Vent surface 3241 and relief surface 3242 are two opposing surfaces. The air outlet groove 3243 is concavely formed from the air outlet surface 3241 and partially dislocated from the hollow portion 3211 of the first thin plate 321. The gas outlet hole 3244 is hollowed from the gas outlet groove 3243 toward the pressure release surface 3242, and the gas outlet hole 3244 is positioned to correspond to the valve hole 3231 of the valve plate 323. In addition, the bore diameter of the outlet port 3244 is larger than that of the valve bore 3231. The pressure relief hole 3245 is spaced apart from the air outlet groove 3243. A pressure relief channel 3246 is recessed from pressure relief surface 3242 and has one end in communication with pressure relief hole 3245 and another end extending to an edge of second web 324. The shape of the air outlet groove 3243 of the second thin plate 324 and the shape of the hollow portion 3211 of the first thin plate 321 may be the same, and may correspond to each other.

The first thin plate 321, the valve frame 322 and the second thin plate 324 are made of metal, and in one embodiment, can be made of the same metal material, such as stainless steel.

Referring to fig. 6A, fig. 6A is a schematic cross-sectional view of a thin gas transmission device according to the present invention. The first thin plate 321, the valve frame 322 and the second thin plate 324 of the thin valve structure 32 are sequentially stacked and fixed. The valve sheet 323 is accommodated in the valve sheet accommodating area 3221 of the valve frame 322, and the thin-type valve structure 32 is combined with the second insulating frame 316, so that the thin-type gas pump 31 is stacked on the thin-type valve structure 32. When the thin gas pump 31 transmits gas to the thin valve structure 32, as shown in fig. 6B, the gas enters the hollow 3211 of the first thin plate 321 and pushes the valve plate 323, and at this time, the partial area of the valve plate 323 above the gas outlet groove 3243 is pushed downward, so that the gas enters the gas outlet groove 3243 and is discharged through the valve hole 3231 and the gas outlet hole 3244 of the second thin plate 324; fig. 6C is a schematic pressure relief view of the thin valve structure 32. When the thin gas transmission device 3 stops transmitting gas, i.e. starts to perform pressure relief operation through the thin valve structure 32, as shown in fig. 6C, the gas will be transmitted back to the second thin plate 324 from the gas outlet 3244, and at the same time, the valve plate 323 will be pushed upward, at this time, the valve hole 3231 of the valve plate 323 will be closed by the first thin plate 321, and the partial region of the valve plate 323 located in the hollow region 3211 of the first thin plate 321 will be pushed upward, the gas will enter the hollow region 3211 from the gas outlet groove 3243, and the gas will be exhausted through the pressure relief hole 3245 and the pressure relief channel 3246, thereby completing the pressure relief operation.

Referring to fig. 7A, the air outlet 3244 of the thin gas transmission device 3 is connected to the exhaust through hole 12 of the bottom plate 1, and the pressure relief hole 3245 is connected to the pressure relief through hole 11 of the bottom plate 1, and referring to fig. 7B, the actuation sensing module 100 of the present application can be connected to a positive pressure load 200, the positive pressure load 200 is connected to the exhaust through hole 12 and the communication hole 13 of the bottom plate, when the thin gas transmission device 3 starts to operate, the air is transmitted into the positive pressure load 200 through the air outlet 3244 and the exhaust through hole 12, the positive pressure load 200 is filled with air, the air pressure sensor 2 on the communication hole 13 obtains the air pressure value of the positive pressure load 200 to adjust the thin gas transmission device 3, referring to fig. 7C, when the positive pressure load 200 needs to operate, the thin gas transmission device 3 stops operating and is assisted by the thin valve structure 32, the gas is discharged through the gas discharge through-hole 12.

Referring to fig. 7D, the actuating sensing module 100 of the present disclosure may also be connected to a negative pressure load 300, the negative pressure load 300 is connected to the air inlet hole 41 of the cover plate 4, when the thin gas transmission device 3 starts to operate, the negative pressure load 300 starts to draw gas, the air is exhausted through the air outlet hole 12, the gas entering the actuating sensing module 100 obtains its air pressure value through the air pressure sensor 2, so as to further regulate and control the thin gas transmission device 3, and when the thin gas transmission device 3 is pointed to operate, as shown in fig. 7E, the pressure relief operation is assisted by the thin valve structure 32, and the gas backflow is prevented.

The positive pressure load 200 and the negative pressure load 300 may be a gas bag, or a gas bottle, a gas tank, or other containers capable of being filled with gas.

The actuating sensing module 100 of the present disclosure can be a standard modular IC, wherein the bottom plate 1 and the cover plate 4 can be both shells of IC package, and the thin gas transmission device 3 is embedded therein when the IC is packaged; it should be noted that the motion sensor module 100 of the present disclosure may be an IC chip with a length less than 18mm, a width less than 16mm, and a height less than 4 mm.

In summary, the actuating sensing module provided by the present disclosure can be used for both positive pressure load and negative pressure load of the airbag or the gas cylinder, and both the positive pressure load and the negative pressure load can be detected by the gas pressure sensor, so as to further regulate and control the thin gas transmission device.

Various modifications may be made by those skilled in the art without departing from the scope of the invention as defined by the appended claims.