Target material rolling device and rolling method
阅读说明:本技术 靶材的轧制装置及轧制方法 (Target material rolling device and rolling method ) 是由 姚力军 潘杰 王学泽 丁向前 于 2018-08-01 设计创作,主要内容包括:一种靶材的轧制装置及轧制方法,靶材的轧制装置包括:轧机主体,轧机主体包括:上扎混和下扎混,上扎混的旋转中心轴和下扎混的旋转中心轴平行,上扎混和所述下扎混之间具有缝隙;自动运载平台,自动运载平台位于轧机主体的侧部,且自动运载平台朝向缝隙,自动运载平台用于传送靶材至上扎混和下扎混之间;自动运载平台包括:基台、电机组、若干传动滚棒和若干轴承,若干传动滚棒位于基台上并沿平行于基台表面的方向排布,若干传动滚棒的中心轴均平行于下扎混的旋转中心轴,若干轴承固定于位于所述基台的表面,且轴承分别与各传动滚棒的两端套接在一起,电机组用于驱动各传动滚棒围绕传动滚棒的中心轴旋转。所述轧制装置提高了传送效率和安全性。(A rolling device and a rolling method of a target material are provided, the rolling device of the target material comprises: a mill body comprising: mixing the upper bundle and the lower bundle, wherein a rotating central shaft of the upper bundle and a rotating central shaft of the lower bundle are parallel, and a gap is formed between the upper bundle and the lower bundle; the automatic carrying platform is positioned on the side part of the rolling mill main body, faces the gap and is used for conveying the target materials to the space between the upper binding and the lower binding; the automatic carrying platform comprises: the transmission rolling rods are located on the base platform and are arranged along the direction parallel to the surface of the base platform, the central shafts of the transmission rolling rods are all parallel to the rotary central shaft mixed with the base platform, the bearings are fixed on the surface of the base platform and are sleeved with the two ends of each transmission rolling rod respectively, and the motor set is used for driving each transmission rolling rod to rotate around the central shaft of the transmission rolling rod. The rolling device improves the conveying efficiency and the safety.)
1. A rolling device of target material is used for rolling the target material, and is characterized by comprising:
a mill body, the mill body comprising: mixing the mixture in an upper bundle and mixing the mixture in a lower bundle, wherein a rotating central shaft of the mixture in the upper bundle is parallel to a rotating central shaft of the mixture in the lower bundle, the mixture in the upper bundle is positioned above the mixture in the lower bundle, and a gap is formed between the mixture in the upper bundle and the mixture in the lower bundle;
the automatic carrying platform is positioned on the side part of the rolling mill main body and faces the gap, and the automatic carrying platform is used for conveying the target material to the space between the upper binding and the lower binding;
the automated carrier platform comprises: the bearing is fixed on the surface of the base platform, the bearing is respectively sleeved with the two ends of each transmission rolling rod, and the motor unit is used for driving each transmission rolling rod to rotate around the central shaft of the transmission rolling rod.
2. The apparatus for rolling a target according to claim 1, wherein the motor set comprises a plurality of motors, the number of the motors is the same as the number of the transmission rollers, and one motor is used for driving one transmission roller to rotate around the central axis of the transmission roller.
3. The apparatus for rolling a target according to claim 1, wherein the top end of each driving roller is at the same height as the top end of the downmixing.
4. The apparatus for rolling a target according to claim 1, wherein the heights of the tips of the driving rollers are the same; and the distance from the top end of the transmission rolling rod to the top end of the downmixed rod in the vertical direction is more than or equal to zero and less than or equal to 200 mm.
5. The apparatus for rolling a target according to claim 1, wherein the automatic carrying platforms are respectively located on both sides of the rolling mill body, and a direction from a center of the automatic carrying platform on one side of the rolling mill body to a center of the automatic carrying platform on the other side of the rolling mill body is perpendicular to a rotation center axis of the downmixing.
6. The apparatus for rolling a target according to claim 1, wherein a slit is formed between adjacent driving rollers; the base platform is provided with a plurality of openings penetrating through the base platform, and the openings are respectively positioned at the bottoms of the slits;
the rolling device further comprises: the top supporting device is positioned at the bottom of the base station and comprises a supporting seat and a plurality of discrete top piece units, the supporting seat is provided with a first supporting surface, the first supporting surface faces the base station, the top piece units are fixed on the first supporting surface, and the top piece units are perpendicular to the first supporting surface; the top sheet unit is adapted to pass through the opening and the slit and to reciprocate in a direction perpendicular to the first support surface.
7. The apparatus for rolling a target according to claim 6, wherein the supporting base further has a second supporting surface opposite to and parallel to the first supporting surface, the second supporting surface facing away from the base; the rolling device further comprises: the power device is positioned at the bottom of the top bracing device; the transmission rod is positioned between the power device and the top bracing device, one end of the transmission rod is connected with the power device, and the other end of the transmission rod is fixedly connected with the second supporting surface; the power device is used for driving the transmission rod to reciprocate along the direction vertical to the first supporting surface.
8. The apparatus for rolling a target according to claim 6, wherein the distance between adjacent driving rollers is 100 mm to 200 mm, the diameter of the driving rollers is 150 mm to 200 mm, and the width of the top plate unit is 50mm to 70 mm.
9. A method for rolling a target material, comprising:
providing a rolling apparatus according to claim 1;
providing a target material;
placing the target material on a transmission roller of an automatic carrying platform;
after the target material is placed on the transmission roller of the automatic carrying platform, the motor group drives the transmission rollers to rotate around the central shaft of the transmission rollers;
conveying the target material to the space between the upper binding and the lower binding through the rotation of a transmission roller;
and rolling the target material between the upper binding and the lower binding through the rotation of the upper binding and the lower binding.
10. The method for rolling a target according to claim 9, wherein a slit is formed between adjacent drive rollers; the base platform is provided with a plurality of openings penetrating through the base platform, and the openings are respectively positioned at the bottoms of the slits; the rolling device further comprises: the top supporting device is positioned at the bottom of the base station and comprises a supporting seat and a plurality of discrete top piece units, the supporting seat is provided with a first supporting surface, the first supporting surface faces the base station, the top piece units are fixed on the first supporting surface, and the top piece units are perpendicular to the first supporting surface; the top sheet unit is adapted to pass through the opening and the slit and reciprocate in a direction perpendicular to the first support surface;
the rolling method further comprises: before the target is placed on a transmission roller of an automatic carrying platform, the jacking device is driven to ascend, so that the top piece unit passes through the opening and the slit, and the distance from the top of the top piece unit to the surface of the base platform is greater than the distance from the top of the transmission roller to the surface of the base platform; after the top plate units pass through the openings and the seams, the target material is placed on the top end surfaces of the top plate units; and after the target material is placed on the top end surfaces of the top plate units, the top support device is driven to descend until the top plate units are separated from the target material and the target material is contacted with the transmission roller.
11. The method of rolling a target according to claim 9, wherein the size of the gap is adjusted before the target is transferred between the upper and lower rolling mixes by rotation of a drive roller.
12. The method for rolling a target according to claim 9, further comprising: and repeating the steps of placing the target material on a transmission roller of an automatic carrying platform and rolling the target material between the upper rolling and the lower rolling to form the target material belt.
13. The method of rolling a target according to claim 9, wherein a transfer rate of the target by the driven roller is a first rate in transferring the target between the upper and lower rolling mixes by rotation of the driven roller; the linear velocities of the upper and lower mixing surfaces are both a second velocity; the first rate is 95% to 105% of the second rate.
14. The method for rolling a target according to claim 9, further comprising: heating the target material before placing the target material on a transmission roller of an automatic carrying platform.
Technical Field
The invention relates to the field of machining, in particular to a target rolling device and a target rolling method.
Background
Physical vapor deposition is one of the most critical processes in the production of semiconductor chips and TFT-LCDs. The sputtering metal target material used in physical vapor deposition is one of the most important raw materials in the production of semiconductor chips and the preparation and processing of TFT-LCD. The sputtering metal target is obtained by a certain plastic deformation processing technology of a metal material piece.
There are many plastic deformation processes, and the common processes include free forging, die forging, sheet stamping, extrusion, drawing, rolling, and the like. Among them, the rolling process is widely used for plastic deformation processing of metal material pieces.
However, the transfer efficiency and safety of the existing rolling process are to be improved.
Disclosure of Invention
The invention aims to provide a target rolling device and a target rolling method, which can improve the conveying efficiency and safety.
In order to solve the above problems, the present invention provides a target rolling apparatus for rolling a target, including: a mill body, the mill body comprising: mixing the mixture in an upper bundle and mixing the mixture in a lower bundle, wherein a rotating central shaft of the mixture in the upper bundle is parallel to a rotating central shaft of the mixture in the lower bundle, the mixture in the upper bundle is positioned above the mixture in the lower bundle, and a gap is formed between the mixture in the upper bundle and the mixture in the lower bundle; the automatic carrying platform is positioned on the side part of the rolling mill main body and faces the gap, and the automatic carrying platform is used for conveying the target material to the space between the upper binding and the lower binding; the automated carrier platform comprises: the bearing is fixed on the surface of the base platform, the bearing is respectively sleeved with the two ends of each transmission rolling rod, and the motor unit is used for driving each transmission rolling rod to rotate around the central shaft of the transmission rolling rod.
Optionally, the motor set includes a plurality of motors, the number of the motors is the same as the number of the transmission rollers, and one motor is used for driving one transmission roller to rotate around a central shaft of the transmission roller.
Optionally, the top end of each transmission roller is the same as the top end of the downmixed rod in height.
Optionally, the top ends of the transmission rollers are the same in height; and the distance from the top end of the transmission rolling rod to the top end of the downmixed rod in the vertical direction is more than or equal to zero and less than or equal to 200 mm.
Optionally, the automatic carrying platforms are respectively located at two sides of the rolling mill main body, and a direction from a center of the automatic carrying platform at one side of the rolling mill main body to a center of the automatic carrying platform at the other side of the rolling mill main body is perpendicular to the rotation central axis of the downrolling mixture.
Optionally, a seam is arranged between the adjacent transmission rollers; the base platform is provided with a plurality of openings penetrating through the base platform, and the openings are respectively positioned at the bottoms of the slits; the rolling device further comprises: the top supporting device is positioned at the bottom of the base station and comprises a supporting seat and a plurality of discrete top piece units, the supporting seat is provided with a first supporting surface, the first supporting surface faces the base station, the top piece units are fixed on the first supporting surface, and the top piece units are perpendicular to the first supporting surface; the top sheet unit is adapted to pass through the opening and the slit and to reciprocate in a direction perpendicular to the first support surface.
Optionally, the supporting seat further has a second supporting surface, the second supporting surface is opposite to and parallel to the first supporting surface, and the second supporting surface faces away from the base platform; the rolling device further comprises: the power device is positioned at the bottom of the top bracing device; the transmission rod is positioned between the power device and the top bracing device, one end of the transmission rod is connected with the power device, and the other end of the transmission rod is fixedly connected with the second supporting surface; the power device is used for driving the transmission rod to reciprocate along the direction vertical to the first supporting surface.
Optionally, the distance between adjacent driving rollers is 100 mm to 200 mm, the diameter of the driving rollers is 150 mm to 200 mm, and the width of the top sheet unit is 50mm to 70 mm.
The invention also provides a target rolling method, which comprises the following steps: providing the rolling device; providing a target material; placing the target material on a transmission roller of an automatic carrying platform; after the target material is placed on the transmission roller of the automatic carrying platform, the motor group drives the transmission rollers to rotate around the central shaft of the transmission rollers; conveying the target material to the space between the upper binding and the lower binding through the rotation of a transmission roller; and rolling the target material between the upper binding and the lower binding through the rotation of the upper binding and the lower binding.
Optionally, a seam is arranged between the adjacent transmission rollers; the base platform is provided with a plurality of openings penetrating through the base platform, and the openings are respectively positioned at the bottoms of the slits; the rolling device further comprises: the top supporting device is positioned at the bottom of the base station and comprises a supporting seat and a plurality of discrete top piece units, the supporting seat is provided with a first supporting surface, the first supporting surface faces the base station, the top piece units are fixed on the first supporting surface, and the top piece units are perpendicular to the first supporting surface; the top sheet unit is adapted to pass through the opening and the slit and reciprocate in a direction perpendicular to the first support surface; the rolling method further comprises: before the target is placed on a transmission roller of an automatic carrying platform, the jacking device is driven to ascend, so that the top piece unit passes through the opening and the slit, and the distance from the top of the top piece unit to the surface of the base platform is greater than the distance from the top of the transmission roller to the surface of the base platform; after the top plate units pass through the openings and the seams, the target material is placed on the top end surfaces of the top plate units; and after the target material is placed on the top end surfaces of the top plate units, the top support device is driven to descend until the top plate units are separated from the target material and the target material is contacted with the transmission roller.
Optionally, the size of the gap is adjusted before the target is transferred between the upper and lower binders by rotation of the drive rollers.
Optionally, the method further includes: and repeating the steps of placing the target material on a transmission roller of an automatic carrying platform and rolling the target material between the upper rolling and the lower rolling to form the target material belt.
Optionally, in the process of conveying the target material between the upper binding and the lower binding by the rotation of the transmission roller, the conveying speed of the target material by the transmission roller is a first speed; the linear velocities of the upper and lower mixing surfaces are both a second velocity; the first rate is 95% to 105% of the second rate.
Optionally, the method further includes: heating the target material before placing the target material on a transmission roller of an automatic carrying platform.
Compared with the prior art, the technical scheme of the invention has the following advantages:
according to the rolling method provided by the technical scheme of the invention, the motor set drives the plurality of transmission rollers to rotate around the central shaft of the transmission rollers, so that the target on the transmission rollers is conveyed to the position between the upper binding and the lower binding, the target is prevented from being pushed to a gap by manpower, and the target conveying efficiency is improved. Secondly, the target is stably transported to the gap between the upper binding and the lower binding by controlling the transmission speed of the transmission roller through the motor set, so that the safety of target transmission is improved.
Further, before the target is placed on a transmission rolling rod of the automatic carrying platform, the target is heated, namely the target is rolled by hot rolling. The target material is stably conveyed to the space between the upper binding and the lower binding and mixing by controlling the conveying speed of the transmission roller, so that the conveying time for conveying the target material to the space between the upper binding and the lower binding and mixing can be accurately controlled, and the large time difference caused by manually conveying the target material is avoided, so that the cooling time of the target material exposed in the air can be effectively controlled, the rolling process is highly stable, and the rolling effect of the target material is effectively controlled.
Furthermore, the automatic carrying platforms are respectively positioned at two sides of the rolling mill main body, the target is conveyed to the gap by the automatic carrying platform at one side of the rolling mill main body and is carried by the automatic carrying platform at the other side of the rolling mill main body after being rolled, and then the target is conveyed to the gap by the automatic carrying platform at the other side of the rolling mill main body and is rolled, so that the target does not need to be manually moved in the rolling process of two adjacent passes.
Further, the top support device is driven to ascend, the top plate units penetrate through the openings and the seams, then the target materials are placed on the top end surfaces of the top plate units, and then the top support device is driven to descend until the top plate units are separated from the target materials and the target materials are in contact with the transmission rolling rods, so that the target materials are placed on the transmission rolling rods. Therefore, the target material can be accurately placed on the transmission roller efficiently, impact or loss caused by improper manual target material placement on the transmission roller can be avoided, and the effect of protecting the transmission roller is achieved.
Drawings
FIG. 1 is a schematic view of a rolling apparatus;
FIG. 2 is a schematic view of a rolling apparatus according to an embodiment of the present invention;
FIG. 3 is a schematic view of the structure of FIG. 2 taken along line A-A1;
FIG. 4 is a flow chart of a rolling process in another embodiment of the present invention;
fig. 5 to 8 are schematic structural views of a rolling process according to another embodiment of the present invention.
Detailed Description
As described in the background, the transfer efficiency and safety of the existing rolling process are to be improved.
A rolling apparatus, with reference to fig. 1, comprising: the mixing device comprises an
In the process of using the rolling device, a forklift is usually used to transport the
However, the manual pushing of the
On this basis, the present invention provides a rolling apparatus comprising: the automatic carrying platform is positioned on the side part of the rolling mill main body, faces the gap and is used for conveying the target materials to the space between the upper binding and the lower binding; the automatic carrying platform comprises: the transmission rolling rods are located on the base platform and are arranged along the direction parallel to the surface of the base platform, the central shafts of the transmission rolling rods are all parallel to the rotary central shaft mixed with the base platform, the bearings are fixed on the surface of the base platform and are sleeved with the two ends of each transmission rolling rod respectively, and the motor set is used for driving each transmission rolling rod to rotate around the central shaft of the transmission rolling rod. The rolling device improves the efficiency and the safety of conveying the target material.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.
The present embodiment provides a rolling apparatus for rolling a target material, which is characterized by, with reference to fig. 2, including:
a
an
the
The
The central axis of the
The motor group comprises a plurality of motors, the number of the motors is the same as that of the
In one embodiment, the top of each
In another embodiment, the top ends of the transmission rollers are the same in height; and the distance from the top end of the transmission rolling rod to the top end of the downmixed rod in the vertical direction is more than or equal to zero and less than or equal to 200 mm. If the distance from the top end of the drive roller to the top end of the lower binding mixer in the vertical direction is greater than 200 mm, the target is less aligned with the gap when the target is conveyed by the drive roller to approach the upper
In this embodiment, the motor set drives the plurality of
In this embodiment, the
The
In other embodiments, the automated carrying platform is located on only one side of the mill body.
In this embodiment, referring to fig. 3, a slit is formed between the
In this embodiment, the rolling apparatus further includes: a top supporting device 340 (refer to fig. 2 and 3 in combination) located at the bottom of the
The supporting
The rolling device further comprises: a power device (not shown) positioned at the bottom of the
In this embodiment, the distance between the
If the distance between the
If the diameter of the driving
The width of the
The width of the
The width of the
The width of the seam refers to: the minimum distance between the edges of
The rolling mill
Accordingly, the present embodiment also provides a rolling method, referring to fig. 4, including:
providing the rolling device described above (see fig. 2);
providing a target 400 (see fig. 5);
placing the
after the
transferring the
the
The rolling method further comprises: before the
The top supporting
The size of the gap is adjusted before the
The rolling method further comprises: the steps of placing the
For example, if the
The distance between the upper and
When the
The rolling quantity of each pass is decreased gradually, and the advantages comprise: the microstructure, such as crystal grains and crystal orientations, inside the target material belt is better shaped.
In other embodiments, the rolling quantity of each pass is the same for several passes of the rolling process.
In one embodiment, the transfer rate of the target material by the drive rollers is a first rate during the transfer of the target material between the upwrap and the downwrap mixing by rotation of the drive rollers; the linear velocities of the upper and lower mixing surfaces are both a second velocity; the first rate is 95% to 105%, such as 100%, of the second rate.
If the first rate is larger than 105% of the second rate, the target material causes larger impact damage to the upper binding and the lower binding; if the first speed is less than 95% of the second speed, the transmission efficiency of the target material is low, and the rolling productivity is affected.
In the rolling method provided by the embodiment, the motor group drives the plurality of transmission rollers to rotate around the central axis of the transmission rollers, so that the target on the transmission rollers is transmitted to the upper binding and mixed with the lower binding and mixed, the target is prevented from being pushed to a gap by manpower, and the target transmission efficiency is improved. Secondly, the target is stably transported to the gap between the upper binding and the lower binding by controlling the transmission speed of the transmission roller through the motor set, so that the safety of target transmission is improved.
The rolling method further comprises: heating the target material before placing the target material on a transmission roller of an automatic carrying platform.
In one embodiment, the target is heated to 190-210 ℃ and then placed on a transmission roller of an automatic carrying platform.
Before the target is placed on a transmission rolling rod of an automatic carrying platform, the target is heated, namely the target is rolled by hot rolling. The target material is stably conveyed to the space between the upper binding and the lower binding and mixing by controlling the conveying speed of the transmission roller, so that the conveying time for conveying the target material to the space between the upper binding and the lower binding and mixing can be accurately controlled, and the large time difference caused by manually conveying the target material is avoided, so that the cooling time of the target material exposed in the air can be effectively controlled, the rolling process is highly stable, and the rolling effect of the target material is effectively controlled.
In other embodiments, the target is not heated before being placed on the driving roller of the automatic carrying platform, i.e. the target is rolled by cold rolling.
Although the present invention is disclosed above, the present invention is not limited thereto. Various changes and modifications may be effected therein by one skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims.