Optical element position detection device, control device and detection method
阅读说明:本技术 一种光学元件位置检测装置、控制装置及检测方法 (Optical element position detection device, control device and detection method ) 是由 徐建旭 兰艳平 于 2018-08-02 设计创作,主要内容包括:本发明公开了一种光学元件位置检测装置、控制装置及检测方法,该光学元件位置检测装置包括:第一测试单元,用于产生第一光束,第一光束经待测光学元件或待测光学元件的反射底座反射,形成第二光束;第一聚焦透镜,位于第二光束的光路上,用于聚焦第二光束;第一检测单元,位于第一聚焦透镜的焦面上,用于接收第二光束,根据第二光束在第一检测单元上形成的光斑的位置变化,输出第一检测信号;数据处理单元,与第一检测单元电连接,用于根据第一检测信号,计算待测光学元件的角度变化量。本发明实施例可以光学元件角度偏差进行检测和精确计算,有利于精确地对光学元件进行位置控制,减少光学元件漂移误差对光学系统产生影响。(The invention discloses an optical element position detection device, a control device and a detection method, wherein the optical element position detection device comprises: the first test unit is used for generating a first light beam, and the first light beam is reflected by the optical element to be tested or the reflection base of the optical element to be tested to form a second light beam; the first focusing lens is positioned on the light path of the second light beam and used for focusing the second light beam; the first detection unit is positioned on the focal plane of the first focusing lens and used for receiving the second light beam and outputting a first detection signal according to the position change of the light spot formed on the first detection unit by the second light beam; and the data processing unit is electrically connected with the first detection unit and used for calculating the angle variation of the optical element to be detected according to the first detection signal. The embodiment of the invention can detect and accurately calculate the angle deviation of the optical element, is favorable for accurately controlling the position of the optical element and reduces the influence of the drift error of the optical element on an optical system.)
1. An optical element position detecting apparatus, comprising:
the first test unit is used for generating a first light beam, and the first light beam is reflected by the optical element to be tested or the reflection base of the optical element to be tested to form a second light beam;
the first focusing lens is positioned on the light path of the second light beam and used for focusing the second light beam;
the first detection unit is positioned on the focal plane of the first focusing lens and used for receiving the second light beam and outputting a first detection signal according to the position change of a light spot formed on the first detection unit by the second light beam;
and the data processing unit is electrically connected with the first detection unit and used for calculating the angle variation of the optical element to be detected according to the first detection signal.
2. The position detection device according to claim 1, characterized by further comprising:
the first beam splitter is positioned on the optical path of the second light beam and is used for splitting the second light beam into a third light beam and a fourth light beam, the fourth light beam propagates along the propagation direction of the second light beam and is focused on the first detection unit through the first focusing lens;
the second detection unit is positioned on the light path of the third light beam, is used for receiving the third light beam and outputting a second detection signal according to the position change of the light spot formed on the second detection unit by the third light beam;
the data processing unit is also electrically connected with the second detection unit and used for calculating the translation variation of the optical element to be detected according to the first detection signal and the second detection signal.
3. The position detection device according to claim 1, characterized by further comprising:
the second test unit is used for generating a fifth light beam, and the fifth light beam is reflected by the optical element to be tested or the reflection base of the optical element to be tested to form a sixth light beam;
the third detection unit is used for receiving the sixth light beam and outputting a third detection signal according to the position change of the light spot formed on the third detection unit by the sixth light beam;
the data processing unit is also electrically connected with the third detection unit and is further used for calculating the translation variation of the optical element to be detected according to the first detection signal and the third detection signal.
4. The position detecting device of claim 3, wherein the first light beam and the second light beam form a first light entrance face, the fifth light beam and the sixth light beam form a second light entrance face, and the first light entrance face and the second light entrance face have a first angle.
5. The detection apparatus according to any one of claims 1 or 2, further comprising:
the second beam splitter is positioned on the light path of the first light beam and used for splitting the first light beam to form a seventh light beam and an eighth light beam, and the seventh light beam is reflected by the optical element to be measured or the reflection base of the optical element to be measured to form a second light beam;
the second focusing lens is positioned on the optical path of the eighth light beam and used for focusing the eighth light beam;
the fourth detection unit is positioned on the focal plane of the second focusing lens and used for receiving the eighth light beam and outputting a fourth detection signal according to the position change of the light spot formed on the fourth detection unit by the eighth light beam;
the data processing unit is further electrically connected with the fourth detection unit and is further used for calculating the angle variation of the first test unit according to the fourth detection signal and calculating the angle variation of the optical element to be tested according to the first detection signal and the angle variation of the first test unit.
6. The position detection device according to claim 5, characterized by further comprising:
a third beam splitter, located on the optical path of the eighth light beam, for splitting the eighth light beam into a ninth light beam and a tenth light beam, where the tenth light beam propagates along the propagation direction of the eighth light beam and is focused on the fourth detection unit by the second focusing lens;
the fifth detection unit is used for receiving the ninth light beam and outputting a fifth detection signal according to the position change of the light spot formed on the fifth detection unit by the ninth light beam;
the data processing unit is further electrically connected with the fifth detection unit and is further used for calculating the angle variation and the translation variation of the first test unit according to the fourth detection signal and the fifth detection signal and calculating the angle variation and the translation variation of the optical element to be tested according to the first detection signal, the second detection signal and the angle variation and the translation variation of the first test unit.
7. The position detecting apparatus according to claim 6, wherein the first detecting unit, the second detecting unit, the third detecting unit, the fourth detecting unit, and the fifth detecting unit are position sensing detectors.
8. The position detecting device according to claim 6, wherein the first detecting unit is perpendicular to a standard second light beam, the second detecting unit is perpendicular to a standard third light beam, the third detecting unit is perpendicular to the sixth light beam before the change, the fourth detecting unit is perpendicular to a standard eighth light beam, and the fifth detecting unit is perpendicular to a standard ninth light beam.
9. The position detecting apparatus according to claim 1, wherein the optical element to be measured is a mirror or a lens.
10. The position detecting device of claim 9, wherein when the optical element to be detected is a lens, the lens is fixedly disposed on a reflective base, and the reflective base is configured to reflect the first light beam to form a second light beam.
11. An optical element position control apparatus comprising the optical element detection apparatus according to any one of claims 1 to 10, further comprising:
the control unit is electrically connected with the optical element detection device and used for receiving the angle variation and the translation variation of the optical element to be detected output by the optical element detection device and outputting a control signal;
and the motor is electrically connected with the control unit, is mechanically connected with the optical element to be measured and is used for adjusting the position of the optical element to be measured according to the control signal.
12. A method for detecting a position of an optical element, comprising:
projecting a first light beam to an optical element to be tested or a reflection base of the optical element to be tested by using a first test unit, wherein the first light beam is reflected by the optical element to be tested or the reflection base of the optical element to be tested to form a second light beam;
focusing the second light beam to a focal plane to form a light spot;
detecting the position change of a light spot formed by the second light beam and outputting a first detection signal;
and calculating the angle variation of the optical element to be detected according to the first detection signal.
13. The position detection method according to claim 12, characterized by further comprising:
projecting a fifth light beam onto the optical element to be measured or the reflection base of the optical element to be measured, wherein the fifth light beam is reflected by the optical element to be measured or the reflection base of the optical element to be measured to form a sixth light beam, the first light beam and the second light beam form a first light incident surface, the fifth light beam and the sixth light beam form a second light incident surface, and a first included angle exists between the first light incident surface and the second light incident surface;
detecting the position change of a light spot formed by the sixth light beam and outputting a third detection signal;
and calculating the translation variation of the optical element to be detected according to the angle variation of the optical element to be detected and the third detection signal.
14. The position detection method according to claim 12, characterized by further comprising:
splitting the first light beam into a seventh light beam and an eighth light beam, wherein the seventh light beam is reflected by the optical element to be measured or the reflection base of the optical element to be measured to form a second light beam;
focusing the eighth light beam to a focal plane to form a light spot;
detecting the position change of a light spot formed by the eighth light beam and outputting a fourth detection signal;
and calculating the angle variation of the test unit according to the fourth detection signal, and calculating the angle variation of the optical element to be tested according to the first detection signal and the angle variation of the first test unit.
Technical Field
The present invention relates to optics, and in particular, to an optical element position detecting device, a control device, and a detecting method.
Background
In the optical system, because the optical element is movable, a movable mechanism is needed to adjust the optical element, in order to ensure that the movable element moves to a target position, the change of the position angle of the movable lens needs to be monitored, if the position of the optical element drifts due to the change of the environment, the position of the lens can be kept unchanged by closed-loop control according to the corresponding relation between the position change quantity and the adjustment quantity of the optical element tested by the optical element position measuring system.
Fig. 1 is a schematic structural diagram of a conventional lens monitoring device, as shown in fig. 1, a conventional monitoring scheme is that an encoder 2 is installed on a
Disclosure of Invention
The invention provides an optical element position detection device, a control device and a detection method, which are used for realizing the position detection of an optical element.
In a first aspect, an embodiment of the present invention provides an optical element position detection apparatus, including:
the first test unit is used for generating a first light beam, and the first light beam is reflected by the optical element to be tested or the reflection base of the optical element to be tested to form a second light beam;
the first focusing lens is positioned on the light path of the second light beam and used for focusing the second light beam;
the first detection unit is positioned on the focal plane of the first focusing lens and used for receiving the second light beam and outputting a first detection signal according to the position change of a light spot formed on the first detection unit by the second light beam;
and the data processing unit is electrically connected with the first detection unit and used for calculating the angle variation of the optical element to be detected according to the first detection signal.
In a second aspect, an embodiment of the present invention further provides an optical element position control apparatus, including the optical element detection apparatus according to any of the first aspects, further including:
the control unit is electrically connected with the optical element detection device and used for receiving the angle variation and the translation variation of the optical element to be detected output by the optical element detection device and outputting a control signal;
and the motor is electrically connected with the control unit, is mechanically connected with the optical element to be measured and is used for adjusting the position of the optical element to be measured according to the control signal.
In a third aspect, an embodiment of the present invention further provides an optical element position detection method, including:
projecting a first light beam to an optical element to be tested or a reflection base of the optical element to be tested by using a test unit, wherein the first light beam is reflected by the optical element to be tested or the reflection base of the optical element to be tested to form a second light beam;
focusing the second light beam to a focal plane to form a light spot;
detecting the position change of a light spot formed by the second light beam and outputting a first detection signal;
and calculating the angle variation of the optical element to be detected according to the first detection signal.
The optical element position detection device, the control device and the detection method provided by the invention have the advantages that the first test unit is arranged to generate the first light beam for testing, the first light beam is reflected on the optical element to be tested or the reflection base of the optical element to be tested to form the second light beam, the second light beam is focused on the first test unit through the focusing lens to form the light spot, the position change of the light spot is detected by the first test unit to further generate the first detection signal, and the angle change quantity of the optical element to be tested is calculated through the data processing unit.
Drawings
FIG. 1 is a schematic diagram of a prior art lens monitoring device;
fig. 2 is a schematic structural diagram of an optical element position detecting apparatus according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of the calculation of the angle change provided by the embodiments of the present invention;
FIG. 4 is a computational schematic of translational changes provided by embodiments of the present invention;
FIG. 5 is a schematic diagram of the simulation and calculation of the change in the angle of the mirror according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of the simulation and calculation of the change in the angle of the mirror according to an embodiment of the present invention;
FIG. 7 is a schematic view of a translational modification of an optical element provided by an embodiment of the invention;
FIG. 8 is a schematic diagram of the change in angle of an optical element provided by an embodiment of the present invention;
FIG. 9 is a schematic structural diagram of another optical element position detecting device according to an embodiment of the present invention;
FIG. 10 is a schematic structural diagram of another optical element position detecting apparatus according to an embodiment of the present invention;
FIG. 11 is a schematic structural diagram of an optical element detection apparatus according to an embodiment of the present invention;
FIG. 12 is a schematic diagram of the simulation and calculation of lens position change according to an embodiment of the present invention;
FIG. 13 is a schematic diagram of another simulation and calculation of lens position change provided by embodiments of the present invention;
FIG. 14 is a schematic structural diagram of another optical element position detecting apparatus according to an embodiment of the present invention;
FIG. 15 is a schematic structural diagram of another optical element position detecting apparatus according to an embodiment of the present invention;
FIG. 16 is a schematic structural diagram of an optical element position control apparatus according to an embodiment of the present invention;
fig. 17 is a flowchart of a method for detecting a position of an optical element according to an embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
Fig. 2 is a schematic structural diagram of an optical element position detecting apparatus according to an embodiment of the present invention, and referring to fig. 2, the optical element position detecting apparatus includes: the
According to the optical element position detection device provided by the invention, the first test unit is arranged to generate the first light beam for testing, the first light beam is reflected on the optical element to be tested or the reflection base of the optical element to be tested to form the second light beam, the second light beam is focused on the first test unit through the focusing lens to form the light spot, the first test unit is used for detecting the position change of the light spot to further generate the first detection signal, and then the angle change quantity of the optical element to be tested is calculated through the data processing unit.
It should be noted that the first focusing
Wherein, the position change of the
The embodiment of the present invention performs theoretical simulation and calculation on position detection of a mirror in an actual application scenario, fig. 5 is a schematic diagram of simulation and calculation on angle change of a mirror in the embodiment of the present invention, and refer to fig. 5, where an incident beam and a reflected beam in a left drawing are normal working beams in an optical system, and an incident plane where a
TABLE 1
TABLE 2
It is understood that the reflection of the light beam by the mirror can be either the front or the back of the mirror, and the skilled person can select the reflection according to the actual situation. The embodiment of the present invention performs the theoretical simulation and calculation of the position detection on the test beam reflected by the reverse side of the mirror, fig. 6 is a schematic diagram of the simulation and calculation of the angle change of the mirror, referring to fig. 6, the
TABLE 3
TABLE 4
It should be noted that, theoretically, the angle variation and the translation variation of the optical element can be calculated by the above principle, but when the centroid variation is detected on the detector 1-5 or 2-5, it is not possible to distinguish the origin of the centroid variation, i.e. it is not possible to distinguish whether the centroid variation is generated by the angle variation or the translation of the optical element, so the embodiment of the present invention has the first focusing lens on the optical path of the second light beam, fig. 7 is a schematic diagram of the translation variation of the optical element provided by the embodiment of the present invention, and referring to fig. 7, by providing the first focusing
Further, in order to detect the position change of the optical element more comprehensively and obtain the translational change amount of the optical element, this embodiment further provides an optical element position detecting apparatus, fig. 9 is a schematic structural diagram of another optical element position detecting apparatus provided in this embodiment of the present invention, referring to fig. 9, the optical element position detecting apparatus further includes a
The
Fig. 10 is a schematic structural diagram of another optical element position detecting apparatus according to an embodiment of the present invention, and referring to fig. 10, the optical element position detecting apparatus includes a
The
The optical element detection device provided by the embodiment of the invention is not only suitable for the reflector, but also suitable for the lens, namely, the optical element to be detected can be the reflector and the lens, and when the optical element to be detected is the lens, the lens can be fixedly arranged on the reflection base in order not to interfere and influence the normal work of the lens, and the reflection base is used for reflecting the first light beam to form the second light beam. Fig. 11 is a schematic structural diagram of an optical element detection apparatus according to an embodiment of the present invention, referring to fig. 11, an optical element is a lens, and the
For the position change detection of the lens using the reflective base, the theoretical simulation and calculation are also performed in the embodiment of the present invention, fig. 12 is a schematic diagram of the simulation and calculation of the position change of the lens in the embodiment of the present invention, and referring to fig. 12, it can be seen from a coordinate system that the left and right figures are different in that the
TABLE 5
TABLE 6
In addition to the incident mode shown in fig. 12, the embodiment of the present invention provides another theoretical simulation and calculation of the incident mode, fig. 13 is another schematic diagram of the simulation and calculation of the lens position change provided by the embodiment of the present invention, and referring to fig. 13, similarly, the
As can be understood from the above simulation and calculation for the lens, when the
Furthermore, when the test unit emits the test beam, the position of the test unit may be changed, the direction and position of the test beam will thus also change, which in turn will cause the centroid of the beam spot on the detection unit to change, in the course of performing the measurement of the position of the optical element, therefore, errors resulting from variations in the position of the test unit are easily introduced, in order to eliminate the error, the embodiment of the present invention further provides a schematic structural diagram of an optical element position detecting apparatus, referring to fig. 14, the position detecting apparatus includes a
The eighth
Further, in order to calculate a translational variation amount of the optical element and avoid interference of the translation of the first test unit with the translational variation of the optical element, an embodiment of the present invention further provides an optical element position detecting apparatus based on the optical element detecting apparatus shown in fig. 9, fig. 15 is a schematic structural diagram of another optical element position detecting apparatus provided in the embodiment of the present invention, and referring to fig. 9 and fig. 15, the position detecting apparatus further includes: a third beam splitter 63, located on the optical path of the eighth light beam 108, for splitting the eighth light beam 108 to form a ninth light beam 109 and a tenth light beam 1010, where the tenth light beam 1010 propagates along the propagation direction of the eighth light beam 108 and is focused on the fourth detection unit 34 by the second focusing lens 22; a fifth detection unit 35 for receiving the ninth light beam 109 and outputting a fifth detection signal according to a position change of a light spot formed on the fifth detection unit 35 by the ninth light beam 109; the data processing unit 40 is further electrically connected to the fifth detecting unit 35, and is further configured to calculate an angle variation amount and a translation variation amount of the first testing unit 11 according to the fourth detecting signal and the fifth detecting signal, and calculate an angle variation amount and a translation variation amount of the optical element 10 to be tested according to the first detecting signal, the second detecting signal, and the angle variation amount and the translation variation amount of the first testing unit.
Similarly, the fifth detecting
The detection unit of the embodiment of the invention can adopt the position sensing detector to detect the position of the centroid of the light spot, and calculate the angle and translation variation of the light beam according to the variation of the position of the centroid of the light spot, specifically, when the light spot is changed relative to the standard centroid, the position sensing detector can output corresponding current or voltage signals according to the variation, and when the displacement of the centroid of the light spot is larger, the corresponding current or voltage signals are larger. It should be noted that the angle change dimension of the corresponding optical element can be determined according to the direction of the change of the centroid position, and it can be known by continuously referring to table 1 and table 2 that when the optical element rotates around the X axis, the corresponding centroid change appears on the Y value, and when the optical element rotates around the Y axis, the corresponding centroid change appears on the X value, so that the change dimension of the optical element can be determined according to the direction of the corresponding centroid change, and the size of the angle change in the dimension can be calculated.
Alternatively, with continued reference to fig. 10 and 15, the
When the standard second light beam, the standard third light beam, the standard sixth light beam, the standard eighth light beam and the standard ninth light beam respectively show that the optical element to be detected does not have position change, the corresponding light beams incident to the detection units are set to be perpendicular to the standard light beams, namely when the optical element does not change, the light spot centroid on each detection unit is the standard light spot centroid, the energy of the light spot centroid is highest and is most concentrated, when the optical element has position change, the light spot centroid position change quantity of each light beam is based on the standard light spot centroid, the calculation standards of the light spot centroid position change quantity are guaranteed to be the same, and therefore the position change quantity of the optical element can be calculated more accurately.
Fig. 16 is a schematic structural diagram of an optical element position control apparatus according to an embodiment of the present invention, and referring to fig. 16, the position control apparatus includes any one of the optical element position detection apparatuses according to the embodiment of the present invention, and further includes: a control unit 70 electrically connected to the optical element detection device, for receiving the angle variation and the translation variation of the
The optical element position control device provided by the invention has the advantages that the first test unit is arranged in the position detection device to generate the first light beam for testing, the first light beam is reflected on the optical element to be tested or the reflection base of the optical element to be tested to form the second light beam, the second light beam is focused on the first test unit through the focusing lens to form a light spot, the position change of the light spot is detected by the first test unit to further generate a first detection signal, the angle change quantity of the optical element to be tested is calculated through the data processing unit, the motor is controlled by the control unit, and the position of the optical element is accurately adjusted according to the position change of the optical element fed back by the position detection device. The embodiment of the invention can detect and accurately calculate the angle deviation of the optical element, is favorable for accurately controlling the position of the optical element and reduces the influence of the drift error of the optical element on an optical system.
An embodiment of the present invention further provides a method for detecting a position of an optical element, and fig. 17 is a flowchart of the method for detecting a position of an optical element provided in the embodiment of the present invention, and with reference to fig. 2 and fig. 17, the method for detecting a position of an optical element includes:
s110, projecting a first light beam to the optical element to be tested 10 or a reflection base of the optical element to be tested by using the
s120, focusing the second
s130, detecting the position change of a light spot formed by the second
s140, calculating an angle variation of the
The optical element position detection method provided by the invention is characterized in that a first light beam is reflected on an optical element to be detected or a reflection base of the optical element to be detected to form a second light beam, then the second light beam is focused to form a light spot, the position change of the light spot is detected, wherein the position change of the light spot carries the position change information of the optical element, and the angle change of the optical element to be detected is calculated through a data processing unit. The embodiment of the invention can detect and accurately calculate the angle deviation of the optical element, is favorable for accurately controlling the position of the optical element and reduces the influence of the drift error of the optical element on an optical system.
Alternatively, referring to fig. 10, the optical element position detecting method further includes:
s210, projecting the fifth
s220, detecting the position change of a light spot formed by the sixth
and S230, calculating the translation variation of the optical element to be detected 10 according to the angle variation of the optical element to be detected 10 and the third detection signal.
The additionally arranged fifth light beam is reflected by the optical element to be detected or the reflection base of the optical element to be detected to form a sixth light beam, and then the position change of the light spot on the third detection unit is carried out according to the sixth light beam, wherein the position change of the light spot comprises the angle change amount and the translation change amount of the optical element to be detected, the angle change amount obtained by calculation of the first light beam and the second light beam can be removed, and the translation change amount is finally obtained.
Alternatively, referring to fig. 14, the optical element position detection method further includes:
s310, splitting the
s320, focusing the eighth
s330, detecting the position change of the light spot formed by the eighth
s340, calculating an angle variation of the
For the position detection of the optical element by using the test beam emitted by the test unit, when the test unit emits the test beam, the position of the test unit may change, obviously, the direction and the position of the test beam also change, and the direction and the position of the test beam also cause the change of the centroid of the light spot of the light beam on the test unit, so that an error caused by the position change of the test unit is easily introduced in the process of measuring the position of the optical element. Ensuring accurate calculation of the variation of the optical element.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
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