Vacuum valve with position sensor
阅读说明:本技术 带有位置传感器的真空阀 (Vacuum valve with position sensor ) 是由 克里斯托夫·伯姆 艾德里安·埃申莫瑟 凯尔·阿克塞尔·埃尔福德 于 2018-06-28 设计创作,主要内容包括:本发明涉及一种真空阀(1),其具有阀封闭件(4)和驱动单元(7),该驱动单元与所述阀封闭件(4)耦接,该驱动单元具有至少一个移调部件(5)。所述真空阀(1)还具有位置传感器(10、10’)特别是位移或距离传感器,从而可参照所述真空阀(1)的零位置特别是打开位置(O)或关闭位置(G)测量所述阀封闭件(4)的和/或至少一个所述移调部件(5)的位置。(The invention relates to a vacuum valve (1) having a valve closure (4) and a drive unit (7) which is coupled to the valve closure (4) and which has at least one adjustment element (5). The vacuum valve (1) further comprises a position sensor (10, 10'), in particular a displacement or distance sensor, so that the position of the valve closure (4) and/or of at least one adjustment element (5) can be measured with reference to a zero position, in particular an open position (O) or a closed position (G), of the vacuum valve (1).)
1. Vacuum valve (1), in particular a vacuum slide valve, a pendulum valve or a single valve, for regulating a volume or mass flow and/or for gas-tightly interrupting a flow path, having:
a valve seat having a valve opening (2) defining an opening axis (H) and a first sealing surface (3) surrounding the valve opening (2);
a valve closure (4), in particular a valve disk, for controlling a volume or mass flow and/or for interrupting a flow path, having a second sealing surface (6) corresponding to the first sealing surface (3), the variable position of which is determined by the corresponding position and orientation of the valve closure (4);
a drive unit (7) coupled to the valve closure (4) and having at least one movable adjustment element (5), wherein the drive unit (7) is designed to perform an adjustment movement (Bv, Bh, Br) such that the valve closure (4) can be adjusted from an open position (O) into a closed position (G) and vice versa,
in the open position, the valve closure member (4) and the valve seat are present in a contactless manner relative to one another,
in the closed position, in particular by means of a seal (23), there is an axially sealing contact between the first sealing surface (3) and the second sealing surface (6) with reference to the opening axis (H) and thereby hermetically closes the valve opening (2),
it is characterized in that the preparation method is characterized in that,
the vacuum valve (1) further comprises at least one position sensor (10, 10 '), wherein the position sensor (10, 10') is designed and arranged in the vacuum valve (1) such that the position of the valve closure (4) and/or of the at least one adjustment element (5) can be measured, in particular continuously, with reference to a zero position (O, G), in particular the open position (O) or the closed position (G).
2. Vacuum valve (1) according to claim 1, characterized in that the position sensor (10, 10') is constructed and arranged in the vacuum valve (1) such that a time profile of at least a part of the transposition movement (Bv, Bh, Br) can be determined, in particular such that: at least the speed of the transposition movement (Bv, Bh, Br) can be determined for at least one time segment of the transposition movement (Bv, Bh, Br).
3. Vacuum valve (1) according to claim 1 or 2, characterized in that the position sensor (10, 10 ') is configured as a displacement sensor or a distance sensor and/or as an absolute position sensor (10, 10').
4. Vacuum valve (1) according to one of the preceding claims, characterised in that the transposition movement (Bv, Bh, Br) comprises an at least substantially rectilinear transposition movement (Bv, Bh) and the position sensor (10) is constructed and arranged for detecting at least a part of the rectilinear transposition movement (Bv, Bh), in particular wherein the position sensor (10) is a linear encoder.
5. Vacuum valve (1) according to one of the preceding claims, characterized in that the transposition motion (Bv, Bh, Br) comprises an at least substantially rotational transposition motion (Br) and the position sensor (10 ') is constructed and arranged for detecting at least a part of the rotational transposition motion (Br), in particular wherein the position sensor (10') is an angular encoder.
6. Vacuum valve (1) according to any of the preceding claims, characterized in that the position sensor (10, 10')
-is an inductive, optical, magnetic, magnetostrictive, potentiometric and/or capacitive position sensor (10, 10'); and/or
Arranged outside a vacuum region defined by the vacuum valve (1) and separated from the external environment.
7. Vacuum valve (1) according to one of the preceding claims,
the position sensors (10, 10 ') are designed and arranged in the vacuum valve (1) such that position measurements with reference to at least two, in particular substantially mutually perpendicular, adjustment directions can be carried out by means of one of the position sensors (10, 10'); alternatively, the first and second electrodes may be,
the vacuum valve (1) has at least two position sensors (10, 10 ') which are designed and arranged in the vacuum valve (1) in such a way that a position can be measured by means of a first position sensor (10, 10 ') with reference to a first displacement direction and a position can be measured by means of a second position sensor (10, 10 ') with reference to a second displacement direction, in particular wherein the two displacement directions are substantially perpendicular to one another; and/or
The valve seat is formed by a part of the vacuum valve which is connected to the vacuum valve (1) in terms of design, in particular wherein the valve seat is formed on a housing (24) of the vacuum valve (1) or is provided by a process chamber, in particular a chamber housing.
8. The vacuum valve (1) as claimed in one of the preceding claims, characterized in that the vacuum valve (1) has a processing unit (11) which is designed such that a detected position sensor measurement signal can be processed by means of the processing unit (11) and status information of the vacuum valve (1) can be determined by means of the detected measurement signal.
9. Vacuum valve (1) according to claim 8, characterized in that status information is provided about the mechanical and/or structural integrity of the valve closure (4) and/or of the adjustment component (5), in particular wherein the status information is determined by means of an actual-given-comparison for the detected measurement signal.
10. Vacuum valve (1) according to claim 8 or 9, characterized in that an output signal is provided in respect of an evaluation of a process controlled by the vacuum valve (1) based on a comparison of the status information with a predefined tolerance value.
11. Method for controlling a vacuum valve (1), in particular a vacuum slide valve, a pendulum valve or a single valve, wherein the vacuum valve (1) is designed for controlling a volume or mass flow and/or for interrupting a flow path in a gas-tight manner, and the vacuum valve (1) has:
a valve seat having a valve opening (2) defining an opening axis (H) and a first sealing surface (3) surrounding the valve opening (2);
a valve closure (4), in particular a valve disk, for controlling a volume or mass flow and/or for interrupting a flow path, having a second sealing surface (6) corresponding to the first sealing surface (3), the variable position of which is determined by the respective position and orientation of the valve closure (4);
a drive unit (7) coupled to the valve closure (4) and having at least one movable adjustment element (5), wherein the drive unit (7) is designed to perform an adjustment movement (Bv, Bh, Br) such that the valve closure (4) can be adjusted from an open position (O) into a closed position (G) and vice versa,
in the open position, the valve closure member (4) and the valve seat are present in a contactless manner relative to one another,
in the closed position, in particular by means of a seal (23), there is an axially sealing contact between the first sealing surface (3) and the second sealing surface (6) with reference to the opening axis (H) and thereby hermetically closes the valve opening (2),
it is characterized in that the preparation method is characterized in that,
within the scope of the method, in particular, an absolute position of the valve closure (4) and/or of at least one of the adjustment elements (5) can be measured, in particular continuously, with reference to a zero position (O, G), in particular the open position (O) or the closed position (G).
12. The method according to claim 11, characterized in that, within the scope of the method, on the basis of the position measurement, state information of the vacuum valve (1), in particular with regard to the mechanical and/or structural integrity of the valve closure (4) or of the adjustment element (5), is ascertained, in particular,
the state information is determined by means of an actual given comparison for the detected measurement signals; and/or the presence of a gas in the gas,
-providing an output signal in respect of an evaluation of a process controlled by the vacuum valve (1) based on a comparison of the status information with a predefined tolerance value.
13. A method according to claim 11 or 12, characterized in that in the context of the method, based on the location measurement:
determining a displacement speed of the valve closure (4) and/or of at least one displacement element (5) at least for a part of the displacement movement (Bv, Bh, Br); and/or the presence of a gas in the gas,
determining the duration of the transposition movement (Bv, Bh, Br) from the open position (O) to the closed position (G) and/or vice versa.
14. A method according to any one of claims 11 to 13, characterized in that, in the context of the method, based on the location measurement:
detecting an end position, in particular an open position (O) and/or a closed position (G), of the valve closure (4) and/or of at least one of the adjustment elements (5); and/or
Detecting possible mutual collisions of these sealing surfaces (3, 6) during the transposition movement (Bv, Bh, Br); and/or
Detecting possible mutual adhesion of these sealing surfaces (3, 6).
15. A computer program product for carrying out the method according to claim 11, having a program code or a computer data signal embodied by electromagnetic waves, the program code being stored on a machine-readable carrier, in particular on a control and processing unit of a vacuum valve (1) according to claim 1.
Technical Field
The invention relates to a vacuum valve with at least one position sensor and a method for controlling a position measurement of a vacuum valve.
Background
In general, vacuum valves for regulating a volume or mass flow and/or for substantially gastight closing of a flow path through an opening formed in a valve housing are known in various embodiments of the prior art, which vacuum valves are used in particular in vacuum chamber systems in the field of IC, semiconductor or substrate manufacturing, which manufacturing has to be carried out in a protected atmosphere as far as possible without impurity particles. Such a vacuum chamber system comprises, in particular, at least one evacuable vacuum chamber which is provided for accommodating a semiconductor device or substrate to be processed or produced and has at least one vacuum chamber opening through which the semiconductor device or other substrate can be introduced into and removed from the vacuum chamber, and at least one vacuum pump for evacuating the vacuum chamber. For example, in a manufacturing apparatus for a semiconductor wafer or a liquid crystal substrate, a high-sensitivity semiconductor or liquid crystal element sequentially passes through a plurality of process vacuum chambers, and in these process vacuum chambers, portions located in the process vacuum chambers are processed by one processing device, respectively. Highly sensitive semiconductor devices or substrates must always be in a protected atmosphere, particularly in a vacuum environment, both during the processing process inside the processing vacuum chamber and during the transfer from chamber to chamber.
For this purpose, on the one hand, peripheral valves for opening and closing the gas supply or discharge are used, and on the other hand, transfer valves for opening and closing transfer ports of vacuum chambers for inserting and removing components are used.
The vacuum valves through which the semiconductor components pass are referred to as vacuum transfer valves, depending on the described field of application and the dimensioning associated therewith, also as rectangular valves, depending on their substantially rectangular opening cross section, also as slide valves, rectangular slide valves or transfer slide valves, depending on their usual mode of operation.
The peripheral valve serves in particular to control or regulate the gas flow between the vacuum chamber and the vacuum pump or the further vacuum chamber. The peripheral valves are located, for example, inside the piping between the process vacuum chamber or transfer chamber and the vacuum pump, atmosphere or another process vacuum chamber. The open cross-section of such valves (also known as pump valves) is typically smaller than that of vacuum transfer valves. Peripheral valves are also referred to as regulating valves, since they serve, depending on the field of application, not only for fully opening and closing an opening, but also for controlling or regulating the flow by continuously regulating the opening cross section between a fully open position and a gastight closed position. A pendulum valve is one possible peripheral valve for controlling or regulating the gas flow.
With a typical pendulum valve, which is known, for example, from U.S. Pat. No. 6,089,537(Olmsted), in a first step a generally circular valve disk is swiveled via a generally likewise circular opening from a position opening the opening, i.e. an open position, into an intermediate position covering the opening. In the case of the slide valve described, for example, in U.S. Pat. No. 6,416,037(Geiser) or U.S. Pat. No. 6,056,266(Blecha), the valve disk is configured like an opening, mostly rectangular, and in this first step moves linearly from a position releasing the opening to an intermediate position covering the opening. In this intermediate position, the valve disk of the pendulum valve or slide valve is spaced apart from the valve seat surrounding the opening. In a second step, the distance between the valve disk and the valve seat is reduced, so that the valve disk and the valve seat are pressed uniformly against one another, so that the valve closure reaches a closed position in which the opening is substantially hermetically closed. The second movement is preferably carried out substantially in a direction perpendicular to the valve seat.
The respective end positions of the adjustment movement, i.e. the open position and the closed position (and the intermediate position if there is an adjustment movement consisting of two partial movements in at least two different adjustment directions), are identified or held in this case by means of mechanical limit switches. For precise closure, narrow tolerance limits are disadvantageously adhered to here.
The sealing can take place, for example, either by means of a sealing ring arranged on the closing side of the valve disk or by means of a sealing ring on the valve seat, which is pressed against the valve seat surrounding the opening, against which the closing side of the valve disk is pressed. Due to the closing process which takes place in two steps, the sealing ring between the valve disk and the valve seat is hardly subjected to shear forces which damage the sealing ring, since the movement of the valve disk in the second step takes place essentially linearly perpendicular to the valve seat.
Different sealing devices are known from the prior art, for example from US 6,629,682B2 (dullli). Suitable materials for the sealing rings and seals in vacuum valves are, for example, fluororubbers, also known as FKM, in particular the fluoroelastomer known under the trade name "Viton", and perfluororubbers, abbreviated to FFKM.
Different drive systems are known from the prior art for realizing a rotary movement of the valve disk parallel to the opening for the wobble valve and a translatory movement for the slide valve and for realizing a substantially translatory movement perpendicular to the opening, for example from US 6,089,537(Olmsted) for the wobble valve and from US 6,416,037(Geiser) for the slide valve.
The pressing of the valve disk against the valve seat must be carried out appropriately, both to ensure the required gas tightness over the entire pressure range and to avoid damage to the sealing medium, in particular the sealing ring in the form of an O-ring, as a result of excessive pressure loads. To ensure this, known valves provide for a controlled regulation of the pressure of the valve disks as a function of the pressure difference which arises between the two disk sides. However, in particular in the case of high pressure fluctuations, or in the case of a change from negative to positive pressure or vice versa, a uniform force distribution along the entire circumference of the sealing ring is not always ensured. It is often desirable to disengage the seal ring from the support force generated by the pressure applied to the valve. For this purpose, for example, US 6,629,682(Duelli) proposes a vacuum valve with a sealing medium, which consists of a sealing ring and an adjacent support ring, so that the sealing ring has substantially no support force.
In order to achieve the required tightness, if necessary, both for overpressure and underpressure, in addition to or instead of the second displacement step, some known pendulum valves or slide valves provide a valve ring which can be displaced perpendicularly to the valve disk and around an opening, which ring is pressed against the valve disk in order to close the valve in a gastight manner. Such valves have a valve ring which is actively movable relative to the valve disk, and are known, for example, from DE 1264191B 1, DE 3447008C 2, US 3,145,969 (destination) and DE 7731993U. US 5,577,707(Brida) describes a pendulum valve having a valve housing with an opening and a valve disk which can be swung parallel across the opening and which serves to control the flow through the opening. The valve ring surrounding the opening can be actively moved vertically in the valve disk direction by means of a plurality of springs and compressed air cylinders. One possible improvement of such a pendulum valve is proposed in US 2005/0067603a1(Lucas et al).
Since the above-described valves are used in particular for the production of highly sensitive semiconductor components in vacuum chambers, a corresponding sealing effect must be reliably ensured even for such process chambers. For this reason, the state of the sealing material or the state of the sealing surface that is in contact with the sealing material when pressed is particularly important. During the operating life of a vacuum valve, the sealing material or sealing surface is often subject to wear.
Furthermore, the mechanical moving parts of the drive system or of the valve are prone to failure, for example due to wear or ageing phenomena, or due to external disturbing influences such as mechanical shocks or the like, which can thus lead to a loss of the sealing effect, or often to a loss of the function or reliability of the vacuum valve. To date, there is no way in the prior art to timely or pre-detect such errors.
Therefore, in order to constantly maintain the quality of the valve or the seal at a sufficiently high level, valve maintenance is frequently performed at certain time intervals in such a manner that parts of the valve, such as the seal, the drive element or the valve as a whole, are replaced or renewed. Such a maintenance cycle is usually calculated here by means of the number of opening and closing cycles expected over a certain period of time. Therefore, maintenance is usually carried out with great care in order to largely avoid leaks or other faults in advance.
Such maintenance requirements are not limited solely to sealing material or valve disks, but extend, for example, also to valve seats which form a part of the vacuum valve corresponding to the valve disk. The sealing surface structure on the valve seat, such as a groove embedded in the valve seat, is also subject to mechanical stress. Therefore, the seal may also be damaged by a change in the groove structure caused by the operation of the valve. For this purpose, corresponding maintenance intervals are usually also specified.
A disadvantage of this valve maintenance is its precaution. Maintenance-related parts are often upgraded or replaced before their normal or actual service life has expired, which means a drastic increase in costs. In addition, each such maintenance step typically requires a certain amount of downtime to perform the production process, and requires an increased technical and financial investment. In summary, this means that the time interval for the downtime is shorter than necessary, and the downtime is more frequent than necessary at all.
Disclosure of Invention
It is therefore an object of the present invention to provide an improved vacuum valve which allows an optimized operation.
It is a further object of the present invention to provide an improved vacuum valve which allows for optimal valve maintenance, thereby allowing for improved, i.e. reduced, possible process downtime.
It is another object of the present invention to provide an improved vacuum valve which extends the life of the various valve components.
It is a further object of the present invention to provide an improved vacuum valve which imposes less stringent tolerance requirements on individual components or manufacturing.
These objects are achieved by realizing the features of the characterizing part of the independent claims. Features which further improve the invention in alternative or advantageous ways can be found in the dependent claims.
The basic idea of the invention is to equip the vacuum valve with a position sensor, and to design the valve and the position sensor in such a way that a preferably continuous determination or monitoring of the position of at least one mechanically moving part of the valve is thereby possible.
The subject matter of the invention is therefore a vacuum valve, preferably a vacuum slide valve, a pendulum valve or a single valve, for regulating a volume or mass flow and/or for gas-tightly interrupting a flow path, having a valve seat with a valve opening defining an opening axis and a first sealing surface surrounding the valve opening. The valve seat can be an integral or structural component of the vacuum valve, in particular embodied as a part of the valve housing. Alternatively, the valve seat can be formed by an opening of a process chamber, for example a vacuum chamber, which forms a vacuum valve in the sense of the invention in cooperation with a valve closure which is movable relative to the valve seat.
Furthermore, the vacuum valve comprises a valve closure member, in particular a valve disk, for controlling the volume or mass flow and/or for interrupting the flow path, which valve closure member has a second sealing surface corresponding to the first sealing surface, the variable position of which second sealing surface being determined by the respective position and orientation of the valve closure member. In addition, the vacuum valve has a drive unit coupled to the valve closure member, which drive unit has at least one movable displacement element, for example a displacement arm, wherein the drive unit is designed for a displacement movement, so that the valve closure member can be displaced from an open position, in which the valve closure member and the valve seat are present in a relatively contactless manner, into a closed position, in which, in particular by means of a seal, a contact which is axially sealed with respect to the opening axis is present between the first sealing surface and the second sealing surface and thereby seals the valve opening in a gas-tight manner, and vice versa.
In particular, one or both of the two sealing surfaces have a seal made of a sealing material. The sealing material may for example be a polymer-based material (e.g. an elastomer, in particular a fluoroelastomer) which is vulcanized onto the sealing surface or which is present as an O-ring in a groove on the valve closure or valve seat. Therefore, within the scope of the present invention, a sealing surface is preferably considered to be a surface: a seal made of sealing material is present in compression to close the valve opening (closed position).
The drive unit is designed, for example, as an electric motor (stepper motor) or as a combination of several electric motors or as a pneumatic drive. In particular, the drive unit provides for movement of the valve closure in at least two (substantially mutually perpendicular) directions.
According to the invention, the vacuum valve has at least one position sensor, wherein the position sensor is designed and arranged in the vacuum valve such that the position of the valve closure and/or of the at least one adjustment component, in particular of the adjustment arm, can be measured, preferably continuously, with reference to a zero position, in particular an open position or a closed position.
The position sensor is preferably a displacement sensor with a position-specifying element. Alternatively, the sensor is designed as a distance sensor. In the case of multiple sensors, both types may also be used. The position sensor is preferably designed as an absolute position sensor, so that the position can be determined without reaching the zero position, for example by means of a unique position code on a scale, a solid body or a sensor scale.
Preferably, the sensor is constructed and arranged in the vacuum valve, so that a time curve (Verlauf) of at least a part of the transposition movement can be determined. A plurality of positions is thus determined continuously over a certain period of time, for example such that: so that at least the displacement movement or the speed of the displacement element and/or the valve closure member can be determined or derived for at least this time section of the displacement movement. Furthermore, acceleration may also be determined from the position measurements.
Optionally, the transposition motion comprises an at least substantially linear motion and the position sensor is constructed and arranged to detect at least a part or all of the linear motion, wherein the position sensor is preferably a linear encoder.
Alternatively or additionally, the transposition movement comprises an at least substantially rotational movement and the position sensor is constructed and arranged to detect at least a part or all of the rotational movement, wherein the position sensor is preferably an angular encoder.
Optionally, the position sensor is an inductive, optical, magnetic, magnetostrictive, potentiometric and/or capacitive position sensor. As a further alternative, the position sensor is arranged outside a vacuum region defined by the vacuum valve and separated from the external environment. In this case, it is therefore advantageous that the sensor assembly (sensorandnung) can be designed, for example, such that, for example, the sensor itself does not have to enter the vacuum region, so that a comparatively low construction effort can be ensured.
In some embodiments, the position sensor is designed and arranged in the vacuum valve such that a position measurement with reference to at least two, in particular substantially mutually perpendicular, adjustment directions can be carried out by means of the one position sensor, i.e. a single position sensor can determine the position with reference to a plurality of axes or directions. This is done, for example, as follows: the object of the sensor is to be received by the plurality of scales either sequentially, for example first when the adjustment is carried out in the first adjustment direction and then when the adjustment is carried out in the second adjustment direction, or simultaneously, for example by being designed as a 2D position sensor. Alternatively, the vacuum valve has at least two position sensors which are designed and arranged in the vacuum valve such that a position can be measured by means of a first position sensor with reference to a first adjustment direction and a position can be measured by means of a second position sensor with reference to a second adjustment direction, in particular the two adjustment directions being substantially perpendicular to one another.
In one embodiment, the vacuum valve has a monitoring and control unit for controlling the drive unit with a predetermined control value in order to adjust the valve closure between the open position and the closed position, wherein the drive unit, the valve closure and the sensor are designed and cooperate in such a way that the control value is set on the basis of a measurement signal of the sensor, in particular in such a way that the measurement signal continuously corresponds to a predetermined setpoint value.
In this case, the vacuum valve, the sensor assembly and the monitoring and control unit can, for example, optionally be designed such that the position sensor is in unilateral or bilateral communication, for example, for the purpose of providing and transmitting measurement signals via a conventional wired or wireless connection to the monitoring and control unit.
The vacuum valve may also have, for example, a processing unit which is configured, in particular, provided by the monitoring and control unit or the sensor assembly, such that the detected measurement signals can be processed by means of the processing unit and the status information can be generated by means of the detected measurement signals. The detected measurement signals can then be further processed and provided for providing evaluable status information, for example for valve regulation by a monitoring and control unit or as user information.
The status information can, for example, provide information about the mechanical and/or structural integrity of the valve closure and/or the adjustment element, for example, on the basis of an actual-specified comparison of the detected position measurement signal, for example on the basis of a detected and desired position of a reference position (setting) of the drive unit.
Furthermore, an output signal may be provided based on the status information, the output signal indicating the detected position sensor measurement signal in relation to the determined tolerance value. In particular, the process controlled by the vacuum valve can thus be evaluated, for example, to determine whether a desired sealing effect has been achieved or possible damage to the adjustment element or to the sealing surface can be detected, for example. For example, visual or audible signals may then be used to indicate to the user: whether the process is performed within the required tolerances or is expected to be undesirably below or exceeding such tolerances (e.g., based on the cadence speed or final position).
The invention also comprises a method for controlling a vacuum valve, in particular a vacuum slide valve, a pendulum valve or a single valve, wherein the vacuum valve is designed for regulating a volume or mass flow and/or for interrupting a flow path in a gas-tight manner. In this case, the vacuum valve to be controlled: having a valve seat with a valve opening defining an opening axis and a first sealing surface surrounding the valve opening, a valve closure member, in particular a valve disk, for regulating a volume or mass flow and/or for interrupting a flow path, the valve closure member having a second sealing surface corresponding to the first sealing surface, the variable position of which is determined by the respective position and orientation of the valve closure member; a drive unit coupled to the valve closure part and having at least one movable displacement element, wherein the drive unit is designed for a displacement movement such that the valve closure part can be displaced from an open position, in which the valve closure part and the valve seat are in a contactless manner relative to one another, into a closed position, in which, in particular, a sealing element makes axially sealing contact between the first sealing surface and the second sealing surface with reference to the opening axis, and thereby closes the valve opening in a gas-tight manner, and vice versa.
According to the invention, in the context of the method, the, in particular absolute, position of the valve closure and/or of the at least one adjustment element relative to the zero position, in particular the open position or the closed position, is measured, in particular continuously.
In a refinement of the method, it is within the scope of the method that status information of the vacuum valve, in particular with respect to the mechanical and/or structural integrity of the valve closure or the adjusting element, is determined on the basis of the position measurement, wherein preferably the status information is determined by means of an actual-given-comparison to the detected measurement signal and/or an output signal relating to the evaluation of the process controlled by the vacuum valve is provided on the basis of a comparison of the status information with a predetermined tolerance value.
Optionally, within the scope of the method, the speed of the valve closure and/or of the at least one adjusting element is determined at least for a part of the adjusting movement and/or the duration of the adjusting movement from the open position into the closed position and/or vice versa is determined on the basis of the position measurement. This information can be output to the user in the form of a graph for evaluation and/or automatically evaluated.
As a further alternative, in the context of the method, the end position, in particular the open position and/or the closed position, of the valve closure and/or of the at least one adjustment element is detected on the basis of the position measurement, and/or possible mutual impacts of the sealing surfaces and/or possible mutual adhesion of the sealing surfaces in the range of adjustment movement is detected.
The invention also relates to a computer program product for carrying out the method according to the invention, having a program code or a computer data signal embodied by electromagnetic waves, which is stored on a machine-readable carrier, in particular on a control and processing unit of the vacuum valve according to the invention.
The invention therefore advantageously provides a vacuum valve which permits continuous or continuous measurement of the position of the valve closure and/or the transposition component, so that transposition movements or transposition sequences can be monitored or checked and, if necessary, evaluated. Furthermore, the position measurement allows an automatic and continuous status verification of the vacuum valve or its individual components, such as the drive unit, the seal or the adjustment component, wherein status information about the moving component can be determined or derived not only directly, but also indirectly about the stationary component. Faults or abnormal situations indicating future errors can be discovered as early or important here and/or unnecessary maintenance can be avoided on the basis of ascertained failures. In this case, the check can advantageously be carried out in the normal process sequences, so that these process sequences do not have to be interrupted.
Drawings
The vacuum valve according to the invention will be described in more detail below purely by way of example with reference to the exemplary embodiment shown schematically in the drawing. Like parts are marked with the same reference numerals in the figures. The embodiments are generally not shown to be dimensionally precise, nor should they be construed as limiting.
Specifically, the method comprises the following steps:
fig. 1a, b show a possible first embodiment of a vacuum valve according to the invention as a single valve;
fig. 2 shows a possible second embodiment of the vacuum valve according to the invention as a single valve;
3a-c show a possible further embodiment of a vacuum valve according to the invention as a transfer valve;
FIGS. 4a, b show a schematic view of a vacuum valve as a pendulum valve according to another embodiment of the present invention;
FIGS. 5a, b show schematic views of a vacuum valve as a transfer valve according to another embodiment of the present invention;
fig. 6a, b show a schematic view of a vacuum valve as a transfer valve according to another embodiment of the invention.
Detailed Description
Fig. 1a, b schematically show a first embodiment of a vacuum valve 1 according to the invention. In this example, the valve 1 is designed as a so-called single valve and is shown in cross section in an open position O (fig. 1a) and a closed position G (fig. 1 b).
The valve 1 for the gas-tight closure of a flow path by a linear movement has a
The
For example, the curved
The
The transfer valve requires a relatively complex drive, for example, a single valve, i.e., a vacuum valve which can be closed by a single linear movement, for example, has the advantage of a relatively simple closing mechanism, in comparison to a transfer valve which can be closed by two movements. Since the closure element can also be constructed in one piece, it is subject to large acceleration forces, so that the valve can also be used for rapid and emergency closing. The closing and sealing can be performed by a single linear movement, so that a very rapid closing and opening of the valve 1 can be achieved.
In particular, the advantage of a single valve is, for example, that the
According to the invention, the vacuum valve 1 shown in fig. 1a and 1b comprises a
In this case, the
By means of the
By means of the sensor assembly according to the invention, it is thus possible, for example, to check the closing capacity of the valve during the course of a treatment, to adjust the pressure of the pressure correspondingly, and if necessary to predict a failure of the seal. In particular, the pressing situation can be adjusted individually, for example with an
The knowledge of the movement time profile is optionally utilized to determine therefrom the speed of the linear movement of the closing
Fig. 2 shows an alternative to the embodiment according to fig. 1a, 1 b. In the present example, the vacuum valve 1 has a
In order to improve the distance or position measurement, the vacuum valve 1 has a
Instead of the arrangement shown, the
Fig. 3a to 3c show a further embodiment of a vacuum valve 1 according to the invention in different closed positions, which is designed as a transfer valve in the present case.
The transfer valve shown is one particular form of spool valve. The vacuum valve has a rectangular, plate-like closing part 4 (e.g. a valve disk) with a sealing
The
The
In the open position O, the closing
By adjusting the
In this intermediate position Z (fig. 3b), the sealing
The
In the closed position G, the closing
The opening and closing of the vacuum valve is thus effected by the
The transfer valve 1 as shown is typically provided for sealing of the process chamber (vacuum chamber) and for loading and unloading of the chamber. In this use case, frequent switching between the open position O and the closed position G is common. The sealing surfaces 6, 3 and other parts of the moving mechanical components, such as the
In order to determine such wear phenomena in a timely manner, in particular, according to the invention, the vacuum valve 1 has a
In this case, the valve 1 or the
Instead of the two linear scales 9V, 9H arranged one behind the other as shown, a single 2D sensor surface (not shown) is used, which is scanned optically, for example, so that the position of the
As a further alternative, instead of a position determination for two displacement directions V, H or two displacement movements by means of a
Fig. 4a and 4b schematically show another possible embodiment of a valve in the form of a pendulum valve 1 according to the invention. The valve 1 for substantially gas-tight interruption of a flow path has a valve housing with an
The
The
In order to be able to open and close the valve 1 automatically and in a controlled manner, the valve 1 for example defines an electronic control and regulation unit (not shown) which is designed and connected to the
In the present exemplary embodiment, the
With the pendulum valve 1, the flow rate can be controlled or regulated precisely, not only by the
Both the
The
By adjusting the
For adjusting the opening cross section, the
The
According to the invention, the valve 1 has two
The
The position code is preferably an absolute position code. Alternatively, the position code is an incremental code. For the
The second position sensor 10 ', which is designed as an angular encoder, likewise has a scale 9 ' which is scanned by the read head 8 ' and which carries an absolute or incremental angular coding, so that information can be obtained about the angular position of the
By means of the first and
Instead of the pendulum valve 1 as described, the vacuum valve 1 according to the invention can be realized with another vacuum valve, for example a tilting valve, a slide valve or a so-called butterfly valve. Furthermore, it is also possible to use pendulum valves, the closure of which can be displaced only in one direction.
Fig. 5a and 5b schematically illustrate another possible position sensor assembly in the transfer valve of the present invention, shown in a closed position G (fig. 5a) and an open position O (fig. 5 b). In the illustrated figures, the
It goes without saying that the valve mechanism shown here purely exemplarily as a wobble mechanism is not to be understood in a limiting manner, but that the person skilled in the art can use the inventive sensor assembly, for example, in a similar manner for any L-shaped motion drive, for example, an L-shaped motion drive with two mutually perpendicular linear displacement directions of the valve disk.
For the controlled guidance of the
According to the invention, the guide assembly now has a
On the basis of fig. 5a, 5b, fig. 6a and 6b show another possible embodiment of the vacuum valve 1 according to the invention. In contrast to the embodiment according to fig. 5a, 5b, the
It goes without saying that the figures shown only schematically show possible embodiments. The various solutions can likewise be combined with each other and with the methods and devices of the prior art.
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