阅读说明：本技术 一种气敏探测模块、制造方法及系统 (Gas-sensitive detection module, manufacturing method and system ) 是由 耿魁伟 徐志平 刘玉荣 于 2019-09-26 设计创作，主要内容包括：本发明公开了一种气敏探测模块、制造方法及系统,该气敏探测模块,包括半导体基底,在所述半导体基底上集成有若干个气敏传感器阵列单元和外部电路；所述外部电路,用于对外部电压进行分压；所述气敏传感器阵列单元均包括电极阵列和气体探测薄膜阵列；所述气体探测薄膜阵列用于探测环境中的气体种类和浓度；所述电极阵列和所述外部电路相连接,所述气体探测薄膜阵列覆盖在电极阵列上,当气体探测薄膜阵列在遇到敏感气体时,电极阵列用于调整气体探测薄膜阵列的薄膜电阻。通过将气体探测薄膜阵列覆盖在电极阵列上,当气体探测薄膜阵列在遇到敏感气体时,在电极阵列的作用下能够维持薄膜电阻不会发生改变,从而提高探测的精度以及抗干扰能力。(The invention discloses a gas-sensitive detection module, a manufacturing method and a system, wherein the gas-sensitive detection module comprises a semiconductor substrate, wherein a plurality of gas-sensitive sensor array units and an external circuit are integrated on the semiconductor substrate; the external circuit is used for dividing external voltage; the gas sensor array units respectively comprise an electrode array and a gas detection film array; the gas detection film array is used for detecting the gas species and the concentration in the environment; the electrode array is connected with the external circuit, the gas detection film array covers the electrode array, and when the gas detection film array meets sensitive gas, the electrode array is used for adjusting the film resistance of the gas detection film array. Through covering the gas detection film array on the electrode array, when the gas detection film array meets sensitive gas, the film resistance can be maintained to be unchanged under the action of the electrode array, so that the detection precision and the anti-interference capability are improved.)

1. A gas-sensitive detection module is characterized by comprising a semiconductor substrate, wherein a plurality of gas-sensitive sensor array units and an external circuit are integrated on the semiconductor substrate;

the external circuit is used for dividing external voltage;

the gas sensor array units respectively comprise an electrode array and a gas detection film array; the gas detection film array is used for detecting the gas species and the concentration in the environment; the electrode array is connected with the external circuit, the gas detection film array covers the electrode array, and when the gas detection film array meets sensitive gas, the accuracy of detecting the resistance change of the film array can be improved under the action of the electrode array.

2. The gas detection module of claim 1, wherein a heating resistor is further integrated on the semiconductor substrate beside each gas sensor array unit to enable the gas detection membrane array to operate at a suitable operating temperature by means of indirect heating.

3. The gas detection module of claim 1, wherein the array of electrodes is in the form of a combination of a plurality of electrodes, and wherein individual electrodes are in the form of interdigitated electrodes.

4. A method of manufacturing a gas sensitive detection module, comprising:

step 1: adopting a basic semiconductor manufacturing process, firstly preparing an external circuit and an electrode array on a semiconductor substrate;

step 2: coating photoresist on the surface of the semiconductor substrate to protect external circuits; sputtering a zinc oxide seed layer in the area of the electrode array, then hydrothermally growing a zinc oxide nano rod as a sacrificial layer, and finally corroding the zinc oxide nano rod through a displacement reaction to obtain an iron oxide nano column array;

and step 3: doping the film prepared in the step 2, and performing different doping on each film part by using magnetron sputtering;

and 4, step 4: and removing the photoresist, and performing aging treatment to obtain the gas-sensitive detection module.

5. A gas detection system is characterized by comprising a power supply module, a gas-sensitive detection module, a data acquisition module and a mode identification and display module;

the power supply module is used for supplying electric quantity for the work of the gas-sensitive detection module, the data acquisition module and the mode identification and display module;

the gas-sensitive detection module is used for detecting sensitive gas in the environment and comprises a semiconductor substrate, wherein a plurality of gas-sensitive sensor array units and an external circuit are integrated on the semiconductor substrate; the external circuit is used for dividing the voltage of the power supply module; the gas sensor array units respectively comprise an electrode array and a gas detection film array; the gas detection film array is used for detecting the gas species and concentration in the environment and outputting the gas species and concentration in a voltage signal mode; the electrode array is connected with the external circuit, the gas detection film array covers the electrode array, and when the gas detection film array meets sensitive gas, the electrode array is used for adjusting the film resistance of the gas detection film array;

the data acquisition module is used for acquiring a voltage signal output in real time in the gas-sensitive detection module, converting the voltage signal into a digital signal and inputting the digital signal to the mode identification and display module;

the mode identification and display module is used for analyzing the digital signals transmitted by the data acquisition module so as to output and display the identified gas types and concentrations.

6. The gas detection system of claim 5, wherein the pattern recognition and display module is configured to analyze the digital signals transmitted from the data acquisition module to output recognized gas species and concentrations and display the recognized gas species and concentrations comprising:

preprocessing data and identifying a pattern;

the early-stage data processing comprises the following steps: determining an optimal size by repeated gas sensitive detection module manufacturing; measuring the temperature response at the optimal size for a plurality of times to determine an optimal operating temperature; measuring gas-sensitive response values of the gas-sensitive detection module under different gases and different concentrations at the optimal working temperature, and repeatedly measuring for multiple times to obtain gas-sensitive response curve data;

the pattern recognition includes:

and A, initializing, namely reading initialization parameters including initial resistance value, voltage value information and gas response characteristic curve data.

B: reading the measurement data, and reading the digital signal in the data acquisition part into the FPGA under the control signal of the FPGA;

c: and (4) calculating and processing the responsiveness, calculating according to the data read in the step B and the initial data to obtain a responsiveness value, and processing the responsiveness value into a set precision value.

D: searching the gas type in the gas-sensitive detection module, and searching a corresponding value point in a gas response curve according to the gas responsivity;

e: according to the classification information of the gas, concentration information is searched;

f: and outputting and displaying.

7. The gas detection system of claim 6, wherein the finding a gas type in the gas detection module, and the finding a corresponding value point in the gas response curve based on the gas responsivity comprises:

determining a certain gas sensor array unit in the gas sensor detection module as a standard unit, after searching for gas responsivity in the standard unit, outputting if only one gas responsivity meets the requirement, and supplementing from other gas sensor array units if multiple gases meet the requirement; when one gas is satisfied, finishing outputting the classification information and the response value to the next step; if a plurality of groups of the gas concentration data are simultaneously satisfied, the gas concentration data are returned to the data reading stage when the current gas concentration is less than the detection precision limit.

8. The gas detection system of claim 5, wherein a heating resistor is further integrated on the semiconductor substrate beside each gas sensor array unit to enable the gas detection membrane array to operate at a suitable operating temperature by means of indirect heating.

9. The gas detection system of claim 5, wherein the electrode array is formed as a combination of a plurality of electrodes, and wherein individual electrodes are in the form of interdigitated electrodes.

Technical Field

The invention relates to a detection technology, in particular to a gas-sensitive detection module of a gas-sensitive detection module, a manufacturing method and a system.

Background

With the development of the technological level, gas detection is more and more widely applied in various fields such as mine safety, pollution source detection, medical treatment and health.

The electronic nose is an artificial olfaction system capable of identifying and quantifying target gas, and generally comprises a gas sensor array, a data acquisition system and a mode identification system, wherein the gas sensor array generally comprises a plurality of different material systems and discrete sensor elements with different manufacturing processes and working modes, the temperature and humidity requirements of the gas sensors on the working environment are necessarily different, although the requirements can be adjusted by an external compensation mode, the system volume is inevitably increased, and the power consumption is increased, so that the integrated development of the system is not facilitated.

In the aspect of gas detection, a traditional gas sensor usually responds to a category of gases, for example, an iron oxide @ graphene gas sensor has a certain response to reducing gases such as ethanol, acetone and ammonia. On the other hand, the responsivity of a gas sensor generally increases as the concentration of the gas increases, up to saturation. Therefore, when the traditional gas sensor is used for detecting gas, the traditional gas sensor needs to be set and selected according to the gas condition, and the gas concentration can be accurately detected. Conventional gas sensor elements lack the ability to process interfering gases.

Disclosure of Invention

In order to solve the problem that the conventional gas sensor element lacks the capability of processing interfering gas, the present invention aims to provide a gas-sensitive detection module, a manufacturing method and a system.

In order to achieve the purpose, the invention adopts the following technical scheme:

in a first aspect, an embodiment of the present invention provides a gas-sensitive detection module, including a semiconductor substrate, on which a plurality of gas-sensitive sensor array units and an external circuit are integrated;

the external circuit is used for dividing external voltage;

the gas sensor array units respectively comprise an electrode array and a gas detection film array; the gas detection film array is used for detecting the gas species and the concentration in the environment; the electrode array is connected with the external circuit, the gas detection film array covers the electrode array, and when the gas detection film array meets sensitive gas, the electrode array is used for adjusting the film resistance of the gas detection film array.

Furthermore, a heating resistor is integrated on the semiconductor substrate, so that the gas detection film array can work at a proper working temperature in an indirectly heating mode.

Further, the electrode array is formed by combining a plurality of electrodes, and the single electrode is in the form of an interdigital electrode.

In a second aspect, an embodiment of the present invention provides a method for manufacturing a gas-sensitive detection module, including:

step 1: adopting a basic semiconductor manufacturing process, firstly preparing an external circuit and an electrode array on a semiconductor substrate;

step 2: coating photoresist on the surface of the semiconductor substrate to protect external circuits; sputtering a zinc oxide seed layer in the area of the electrode array, then hydrothermally growing a zinc oxide nano rod as a sacrificial layer, and finally corroding the zinc oxide nano rod through a displacement reaction to obtain an iron oxide nano column array;

and step 3: doping the film prepared in the step 2, and performing different doping on each film part by using magnetron sputtering;

and 4, step 4: and removing the photoresist, and performing aging treatment to obtain the gas-sensitive detection module.

In a third aspect, an embodiment of the present invention provides a gas detection system, including a power module, a gas-sensitive detection module, a data acquisition module, and a mode identification and display module;

the power supply module is used for supplying electric quantity for the work of the gas-sensitive detection module, the data acquisition module and the mode identification and display module;

the gas-sensitive detection module is used for detecting sensitive gas in the environment and comprises a semiconductor substrate, wherein a plurality of gas-sensitive sensor arrays and external circuits are integrated on the semiconductor substrate; the external circuit is used for dividing the voltage of the power supply module; the gas sensor array units comprise electrode arrays and gas detection film arrays; the gas detection film array is used for detecting the gas species and concentration in the environment and outputting the gas species and concentration in a voltage signal mode; the electrode array is connected with the external circuit, the gas detection film array covers the electrode array, and when the gas detection film array meets sensitive gas, the electrode array is used for adjusting the film resistance of the gas detection film array;

the data acquisition module is used for acquiring a voltage signal output in real time in the gas-sensitive detection module, converting the voltage signal into a digital signal and inputting the digital signal to the mode identification and display module;

the mode identification and display module is used for analyzing the digital signals transmitted by the data acquisition module so as to output and display the identified gas types and concentrations.

Further, the pattern recognition and display module is used for analyzing the digital signals transmitted by the data acquisition module so as to output the recognized gas types and concentrations and display the gas types and concentrations, and comprises:

preprocessing data and identifying a pattern;

the early-stage data processing comprises the following steps: determining an optimal size by repeated gas sensitive detection module manufacturing; measuring the temperature response at the optimal size for a plurality of times to determine an optimal operating temperature; measuring gas-sensitive response values of the gas-sensitive detection module under different gases and different concentrations at the optimal working temperature, and repeatedly measuring for multiple times to obtain gas-sensitive response curve data;

the pattern recognition includes:

and A, initializing, namely reading initialization parameters including initial resistance value, voltage value information and gas response characteristic curve data.

B: reading the measurement data, and reading the digital signal in the data acquisition part into the FPGA under the control signal of the FPGA;

c: and (4) calculating and processing the responsiveness, calculating according to the data read in the step B and the initial data to obtain a responsiveness value, and processing the responsiveness value into a set precision value.

D: searching the gas type in the gas-sensitive detection module, and searching a corresponding value point in a gas response curve according to the gas responsivity;

e: according to the classification information of the gas, concentration information is searched;

f: and outputting and displaying.

Further, the searching for the gas type in the gas-sensitive detection module, and the searching for the corresponding value point in the gas response curve according to the gas responsivity includes:

determining a certain gas sensor array unit in the gas sensor detection module as a standard unit, after searching for gas responsivity in the standard unit, outputting if only one gas responsivity meets the requirement, and supplementing from other gas sensor array units if multiple gases meet the requirement; when one gas is satisfied, finishing outputting the classification information and the response value to the next step; if a plurality of groups of the gas concentration data are simultaneously satisfied, the gas concentration data are returned to the data reading stage when the current gas concentration is less than the detection precision limit.

Furthermore, a heating resistor is further integrated on the semiconductor substrate and beside each gas sensor array unit, so that the gas detection film array can work at a proper working temperature in an indirectly heating type heating mode.

The invention has the beneficial effects that:

according to the gas-sensitive detection module provided by the embodiment, the plurality of gas-sensitive sensor array units and the external circuit are integrated on the semiconductor substrate, so that the integration level of the gas-sensitive detection module is greatly improved; meanwhile, the gas detection film array covers the electrode array, when the gas detection film array meets sensitive gas, the film resistance can be maintained to be unchanged under the action of the electrode array, and therefore detection accuracy and anti-interference capability are improved.

The gas detection system provided by the embodiment is externally formed, the mode identification is realized by using the FPGA, the volume of the system can be effectively controlled, the performance processing is realized, and the mode of searching is adopted in the realization of the mode identification (FPGA) algorithm, so that the processing speed can be accelerated. The gas sensor can accurately and quickly identify the specific gas type and concentration, and improve the anti-interference capability of the gas sensor.

Drawings

Fig. 1 is a schematic composition diagram of a gas sensing module according to an embodiment of the present invention;

FIG. 2 is a schematic cross-sectional view taken along line A-A of FIG. 1;

FIG. 3 is a schematic diagram of a gas detection system according to a second embodiment of the present invention;

FIG. 4 is a flow chart of early data processing;

FIG. 5 is a flow chart of pattern recognition;

in the figure: 1. a semiconductor substrate; 2. a gas sensor array unit; 21. an array of electrodes; 22. a gas detection membrane array; 3. an external circuit; 4. a heating resistor; 10. a power supply module; 20. a gas sensitive detection module; 30. a data acquisition module; 40. and a mode identification and display module.

Detailed Description

The invention will be further described with reference to the accompanying drawings and the detailed description below: