阅读说明：本技术 探针防误触方法、装置及系统 (Method, device and system for preventing false touch of probe ) 是由 薛占强 郭翠 潘奕 于 2019-10-25 设计创作，主要内容包括：本申请属于扫描成像技术领域,提供了一种探针防误触方法、装置及系统,所述方法包括：将测距仪的测距光斑和样品架调节至探针的针尖正下方第一测试距离处；控制样品架水平移动并通过测距仪随机对N个不在同一直线的检测点进行测距；若每一检测点对应的间距与第一测试距离的第一误差值均小于预设阈值,则将测距光斑和样品架调节至探针的针尖正下方第二测试距离处；根据预设扫描成像范围控制放置有样品的所述样品架移动,通过所述测距仪对若干预设的扫描点进行测距；若确定所述样品平整,则将所述测距光斑和所述样品架调节至所述探针的针尖正下方扫描距离处,以进行成像扫描。本申请实施例解决不能实时监测样品到探针的距离的问题。(The application belongs to the technical field of scanning imaging, and provides probe false touch prevention methods, devices and systems, wherein the method comprises the steps of adjusting a ranging light spot and a sample frame of a range finder to a test distance position below a probe tip, controlling the sample frame to move horizontally and randomly measuring N detection points which are not in the same line through the range finder, if the distance corresponding to each detection point and the error value of the test distance are both smaller than a preset threshold value, adjusting the ranging light spot and the sample frame to a second test distance position below the probe tip, controlling the sample frame with a sample to move according to a preset scanning imaging range, measuring the distance through the range finder to a plurality of preset scanning points, and if the sample is determined to be flat, adjusting the ranging light spot and the sample frame to a scanning distance position below the probe tip to perform imaging scanning.)

1, probe false touch prevention methods, characterized by comprising:

adjusting a ranging light spot and a sample frame of the range finder to a th test distance position right below the needle point of the probe;

controlling the sample holder to move horizontally and randomly ranging N detection points which are not on the same straight line through the range finder to obtain the distance between each detection point and the probe tip, wherein N is more than or equal to 3;

if the error value of the th test distance between the corresponding space of each detection point and the test distance is smaller than a preset threshold value, adjusting the ranging light spot and the sample holder to a second test distance right below the probe tip;

controlling the sample rack with the sample to move according to a preset scanning imaging range, and ranging a plurality of preset scanning points through the range finder to obtain the distance between each scanning point and the probe tip;

and if the sample is determined to be flat according to the corresponding intervals of the plurality of scanning points, adjusting the distance measuring light spots and the sample frame to the scanning distance position right below the needle point of the probe so as to perform imaging scanning.

2. The method for preventing the probe from being touched by mistake as claimed in claim 1, wherein after controlling the sample holder to move horizontally and randomly measuring the distance between the N detection points different from the straight line by the distance measuring instrument to obtain the distance between each detection point and the probe tip, the method further comprises:

if the error value of th between the distance corresponding to the detection point of any and the test distance of is greater than the preset threshold, adjusting the sample holder according to the distance and the position information corresponding to the N detection points, and controlling the sample holder to horizontally move again and randomly ranging the N detection points through the range finder.

3. The method for preventing the false touch of the probe according to claim 1, wherein if the sample is determined to be flat according to the corresponding distance between the plurality of scanning points, the distance measuring light spot and the sample holder are adjusted to a scanning distance right below the tip of the probe for imaging scanning, comprising:

and if the distance corresponding to each scanning point and the second error value of the second testing distance are both smaller than the preset threshold value, adjusting the ranging light spot and the sample frame to a scanning distance position right below the probe tip of the probe to perform imaging scanning.

4. The method for preventing the probe from being touched by mistake as claimed in claim 3, wherein after controlling the sample holder with the sample according to the preset scanning imaging range to move, and measuring the distance between a plurality of preset scanning points by the distance measuring instrument to obtain the distance between each of the scanning points and the probe tip, the method further comprises:

if the distance corresponding to the scanning point and the second error value of the second testing distance are greater than the preset threshold value at any , adjusting the placing position of the sample, controlling the sample rack with the sample placed therein to move again according to the preset scanning imaging range, and ranging a plurality of preset scanning points through the range finder.

5. The method of preventing false touch of a probe according to any of claims 1-4 and , wherein the method further comprises:

in the scanning imaging process, the range finder is used for ranging each scanning point to obtain the distance between each scanning point and the probe tip;

and if a third error value of the distance corresponding to the scanning point and the scanning distance of any is greater than the preset threshold, stopping imaging scanning.

6. The method for preventing the false touch of the probe as claimed in claim 5, wherein the second testing distance is smaller than the th testing distance, and the scanning distance is smaller than the second testing distance.

7. The method of claim 6, wherein the predetermined threshold is 50 μm.

8, kind of probe prevent mistake and touch device, its characterized in that includes:

the adjusting module is used for adjusting the ranging light spot and the sample rack of the range finder to a test distance position under the needle point of the probe;

an ranging module for controlling the sample rack to move horizontally and randomly ranging N detection points different from straight lines by the range finder to obtain the distance between each detection point and the probe tip, wherein N is more than or equal to 3;

a second adjusting module, configured to adjust the ranging light spot and the sample holder to a second testing distance directly below the tip of the probe if the interval corresponding to each detection point and the error value of the testing distance are both smaller than a preset threshold;

the second distance measurement module is used for controlling the sample rack with the sample to move according to a preset scanning imaging range, and measuring the distance of a plurality of preset scanning points through the distance measuring instrument to obtain the distance between each scanning point and the probe tip;

and the third adjusting module is used for adjusting the distance measuring light spot and the sample frame to a scanning distance position right below the needle point of the probe to perform imaging scanning if the sample is determined to be flat according to the distance corresponding to the scanning points.

9, kinds of probe false touch prevention system, which is characterized in that the system comprises a control device, a probe, a distance measuring instrument and a sample rack;

the probe, the range finder and the sample holder are all controlled by the control device;

the control device performs the steps of the probe false touch prevention method of any claims 1-7.

Control device of , comprising a memory, a processor and a computer program stored in the memory and executable on the processor, wherein the processor when executing the computer program implements the steps of the method of preventing false touch of a probe according to any of claims 1 to 7 and .

Technical Field

The invention relates to the technical field of scanning imaging, in particular to a method, a device and a system for preventing probes from being touched by mistake.

Background

At present, terahertz near-field imaging methods have been studied more maturely, for example, probe technology and laser self-mixing effect are utilized to detect a near-field terahertz signal of a target, and then a high-resolution imaging function is realized, the terahertz near-field imaging is limited by the attenuation of detection distance and evanescent field information, and the resolution of the near-field imaging is mostly of a sub-wavelength level.

Although some researchers can protect the probe by a laser ranging method, they fix the laser emitter at positions to detect the distance of the sample, and this method needs to control the advance of the sample movement and cannot monitor the distance from the sample to the probe in real time.

Disclosure of Invention

In view of this, the embodiment of the present invention provides methods, apparatuses, and systems for preventing false touch of a probe, so as to solve the problem that the distance from a sample to the probe cannot be monitored in real time.

The th aspect of the embodiment of the invention provides a probe false touch prevention method, which comprises the following steps:

adjusting a ranging light spot and a sample frame of the range finder to a th test distance position right below the needle point of the probe;

controlling the sample holder to move horizontally and randomly ranging N detection points which are not on the same straight line through the range finder to obtain the distance between each detection point and the probe tip, wherein N is more than or equal to 3;

if the error value of the th test distance between the corresponding space of each detection point and the test distance is smaller than a preset threshold value, adjusting the ranging light spot and the sample holder to a second test distance right below the probe tip;

controlling the sample rack with the sample to move according to a preset scanning imaging range, and ranging a plurality of preset scanning points through the range finder to obtain the distance between each scanning point and the probe tip;

and if the sample is determined to be flat according to the corresponding intervals of the plurality of scanning points, adjusting the distance measuring light spots and the sample frame to the scanning distance position right below the needle point of the probe so as to perform imaging scanning.

In implementation examples, after controlling the sample rack to move horizontally and randomly ranging N detection points different from straight lines by the range finder to obtain the distance between each detection point and the probe tip, the method further comprises:

if the error value of th between the distance corresponding to the detection point of any and the test distance of is greater than the preset threshold, adjusting the sample holder according to the distance and the position information corresponding to the N detection points, and controlling the sample holder to move horizontally again and randomly ranging the N detection points which are not in the same straight line through the range finder.

In implementation examples, if the flatness of the sample is determined according to the corresponding distance between the plurality of scanning points, adjusting the ranging light spot and the sample holder to a scanning distance right below the tip of the probe to perform imaging scanning includes:

and if the distance corresponding to each scanning point and the second error value of the second testing distance are both smaller than the preset threshold value, adjusting the ranging light spot and the sample frame to a scanning distance position right below the probe tip of the probe to perform imaging scanning.

In implementation examples, after controlling the sample rack with samples according to a preset scanning imaging range to move, and ranging a plurality of preset scanning points by the range finder to obtain the distance between each scanning point and the probe tip, the method further comprises:

if a second error value between the distance corresponding to the scanning point and the second test distance of any is greater than the preset threshold value, adjusting the placing position of the sample, controlling the sample rack with the sample placed on to move again according to a preset scanning imaging range, and ranging a plurality of preset scanning points through the range finder;

in implementation examples, the method further comprises:

in the scanning imaging process, the range finder is used for ranging each scanning point to obtain the distance between each scanning point and the probe tip;

and if a third error value of the distance corresponding to the scanning point and the scanning distance of any is greater than the preset threshold, stopping imaging scanning.

In implementation examples, the second test distance is less than the test distance and the scan distance is less than the second test distance.

In implementation examples, the preset threshold is 50 microns.

A second aspect of the embodiments of the present invention provides kinds of probe false touch prevention devices, including:

the adjusting module is used for adjusting the ranging light spot and the sample rack of the range finder to a test distance position under the needle point of the probe;

the distance measurement module is used for controlling the sample rack to move horizontally and measuring the distance of N detection points randomly by the distance measuring instrument to obtain the distance between each detection point and the probe tip, wherein N is more than or equal to 3;

a second adjusting module, configured to adjust the ranging light spot and the sample holder to a second testing distance directly below the tip of the probe if the interval corresponding to each detection point and the error value of the testing distance are both smaller than a preset threshold;

the second distance measurement module is used for controlling the sample rack with the sample to move according to a preset scanning imaging range, and measuring the distance of a plurality of preset scanning points through the distance measuring instrument to obtain the distance between each scanning point and the probe tip;

and the third adjusting module is used for adjusting the distance measuring light spot and the sample frame to a scanning distance position right below the needle point of the probe to perform imaging scanning if the sample is determined to be flat according to the distance corresponding to the scanning points.

The third aspect of the embodiment of the invention provides an probe false touch prevention system, which comprises a control device, a probe, a distance meter and a sample rack;

the probe, the range finder and the sample holder are all controlled by the control device;

the control apparatus executes the probe false touch prevention method of the aspect.

A fourth aspect of the embodiments of the present invention provides control apparatuses, including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor implements the method for preventing the probe from being touched by mistake in the aspect when executing the computer program.

The probe anti-false-touch method, the device and the system provided by the embodiment of the invention adjust a distance measuring light spot and a sample frame of a distance measuring instrument to a th test distance under a probe tip, control the sample frame to move horizontally and randomly measure N detection points which are not in the same straight line through the distance measuring instrument to obtain the distance between each detection point and the probe tip, N is not less than 3, adjust the distance between the distance measuring light spot and the sample frame to a second test distance under the probe tip of the probe if the error value of corresponding to the distance between each detection point and the test distance is less than a preset threshold value, control the sample frame with a sample according to a preset scanning imaging range to move, measure the distance between a plurality of preset scanning points through the distance measuring instrument to obtain the distance between each scanning point and the probe tip, determine the distance between the distance measuring light spot and the sample frame to be flat according to the distance between the preset scanning points, adjust the distance measuring light spot and the sample frame to the distance between the probe tip of the probe rack and the probe tip of the probe according to the preset scanning imaging range, and the distance of the probe holder to obtain the error value of the probe tip of the scanning point, and the sample frame, and the distance measuring instrument to avoid the error when the distance measuring probe passes through the distance measuring instrument, the distance measuring instrument is less than the distance measuring instrument, the distance measuring instrument is less than the distance measuring instrument when the distance measuring instrument, the distance measuring instrument is less than the distance of the distance measuring instrument, the distance measuring instrument.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed for the embodiments or the prior art descriptions will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings according to these drawings without creative efforts.

FIG. 1 is a schematic flow chart of a method for preventing a probe from being touched by mistake according to an embodiment of the present invention;

FIG. 2 is a schematic flow chart illustrating a method for preventing a probe from being touched by mistake according to a second embodiment of the present invention;

FIG. 3 is a schematic flow chart illustrating a method for preventing a probe from being touched by mistake according to a third embodiment of the present invention;

fig. 4 is a schematic structural diagram of a probe anti-false-touch device according to a fourth embodiment of the present invention;

fig. 5 is a schematic structural diagram of a probe false-touch prevention system according to a fifth embodiment of the present invention;

fig. 6 is a schematic structural diagram of a control device according to a sixth embodiment of the present invention.

Detailed Description

For those skilled in the art to better understand the technical solution of the present invention, the technical solution in the embodiment of the present invention will be clearly described below with reference to the drawings in the embodiment of the present invention, and it is obvious that the described embodiment is part of, but not all, the embodiment of the present invention.