Cathode and focusing electrode coaxiality adjusting device, system and method for electron guns
阅读说明:本技术 一种电子枪的阴极与聚焦极同轴度调整装置、系统及方法 (Cathode and focusing electrode coaxiality adjusting device, system and method for electron guns ) 是由 王建 王庆祥 刘泳良 于 2019-07-24 设计创作,主要内容包括:本发明实施例公开了一种电子枪的阴极与聚焦极同轴度调整装置、系统及方法,该装置包括:底座、微分头定位件、微分头、螺母、螺钉和聚焦极压块;底座的外表面设置有与螺母和微分头定位件配合的螺纹,底座的内表面用于与电子枪的下框架组件的外表面滑配,底座的端面用于与下框架组件的法兰贴合;微分头定位件设置有第一通孔,第一通孔的轴线与微分头定位件的轴线成第一角度,第一角度为锐角,并通过螺钉将微分头固定于第一通孔中;螺母与微分头定位件反向紧固,用于为调整微分头提供支撑;聚焦极压块的内表面用于与电子枪的聚焦极组件的外表面滑配。本发明实施例实现了同轴度调整装置结构简单,易于加工制造,且无需要求被装配组件有较高的同轴度。(The embodiment of the invention discloses a device, a system and a method for adjusting the coaxiality of a cathode and a focusing electrode of a type electron gun, wherein the device comprises a base, a differential head positioning piece, a differential head, a nut, a screw and a focusing electrode pressing block, the outer surface of the base is provided with threads matched with the nut and the differential head positioning piece, the inner surface of the base is used for being matched with the outer surface of a lower frame assembly of the electron gun in a sliding mode, the end face of the base is used for being attached to a flange of the lower frame assembly, the differential head positioning piece is provided with a through hole, the axis of a through hole and the axis of the differential head positioning piece form a angle, a angle is an acute angle, the differential head is fixed in a through hole through the screw, the nut and the differential head positioning piece are fastened reversely and used for providing support for adjusting the differential head, and the inner surface of the focusing electrode pressing block is used for being matched with the outer surface of the focusing electrode assembly of the electron gun in a.)
The coaxiality adjusting device of the cathode and the focusing electrode of the electron guns is characterized by comprising a base, a differential head positioning piece, a differential head, a nut, a screw and a focusing electrode pressing block;
the outer surface of the base is provided with threads matched with the nut and the differential head positioning piece, the inner surface of the base is used for being matched with the outer surface of a lower frame assembly of the electron gun in a sliding mode, and the end face of the base is used for being attached to a flange of the lower frame assembly;
the differential head positioning piece is provided with an th through hole, the axis of the th through hole and the axis of the differential head positioning piece form a th angle, the th angle is an acute angle, and the differential head is fixed in the th through hole through the screw;
the nut is fastened with the differential head positioning piece in the opposite direction and is used for providing support for adjusting the differential head;
the inner surface of the focusing pole pressing block is used for being matched with the outer surface of a focusing pole assembly of the electron gun in a sliding mode.
2. The apparatus as claimed in claim 1, wherein the differential head positioning member further comprises a second through hole having an axis forming a second angle with the axis of the differential head positioning member;
the second through hole is used for providing a laser welding channel.
3. The apparatus of claim 1, wherein the differential head positioning member and the end surface of the differential head are configured to provide a focusing space for a measuring lens of a measuring instrument, and the measuring instrument is configured to measure the coaxiality of the cathode and the focusing electrode of the electron gun.
4. The apparatus of claim 1, wherein the focusing electrode pressing block has a chamfer on its outer surface, and the normal of the chamfer is in the same direction as the axis of the differential head.
5. The apparatus as claimed in any one of claims 1 to 4 and , wherein the number of the through holes is three, the through holes are uniformly distributed on the differential head positioning member, and the degree is greater than or equal to 60 ° and less than or equal to 70 °.
6. The apparatus as claimed in any one of claims 1 to 4 and , wherein the number of the second through holes is three, and the second through holes are uniformly distributed on the differential head positioning member.
The system for adjusting the coaxiality of a cathode and a focusing electrode of an electron gun of , comprising the device for adjusting the coaxiality of the cathode and the focusing electrode of the electron gun of any of claims 1-6, further comprising an electron gun comprising a cathode assembly, the lower frame assembly and the focusing electrode assembly;
and the coaxiality adjusting device of the cathode and the focusing electrode of the electron gun is used for adjusting the coaxiality of the cathode assembly and the focusing electrode of the focusing electrode assembly.
A method for adjusting the coaxiality of a cathode and a focusing electrode of an electron gun according to claim 7, in , comprising:
connecting the cathode assembly and the lower frame assembly through laser welding, placing the cathode assembly and the lower frame assembly on the base, and buckling the focusing electrode assembly and the focusing extreme pressure block;
locking the differential head on the differential head positioning piece through the screw, mounting the differential head positioning piece on the base, and rotating the differential head positioning piece until the distance between the differential head and the focusing pole pressing block is smaller than or equal to a distance threshold value;
through rotating set up in differential head on the th through-hole, in order to realize focus utmost point briquetting drives focus utmost point subassembly slides on the horizontal direction, until the negative pole cake of negative pole subassembly with the axiality more than or equal to second axiality threshold value and less than or equal to axiality threshold value of the focus utmost point hole of focus utmost point subassembly, axiality threshold value is greater than the second axiality threshold value.
9. The method of claim 8, wherein the rotating the differential head disposed on the th through hole enables the focusing electrode pressing block to slide the focusing electrode assembly in a horizontal direction until a coaxiality between a cathode cake of the cathode assembly and a focusing electrode hole of the focusing electrode assembly is greater than or equal to a second coaxiality threshold and less than or equal to a th coaxiality threshold, further comprises:
and placing the cathode and focusing electrode coaxiality adjusting system of the electron gun on a measuring instrument, obtaining the coaxiality and the eccentric direction of the cathode cake and the focusing electrode hole through the measuring instrument, and continuously adjusting the coaxiality of the cathode cake and the focusing electrode hole by adjusting the tightness of the differential head arranged on the th through hole until the coaxiality of the cathode cake and the focusing electrode hole is smaller than the second coaxiality threshold value.
10. The method for adjusting the coaxiality of the cathode and the focusing electrode of the electron gun as claimed in claim 9, wherein said adjusting system is placed on a measuring instrument, the coaxiality and the eccentric direction of the focusing electrode hole and the cathode cake are obtained by the measuring instrument, and the coaxiality of the focusing electrode hole and the cathode cake is continuously adjusted by adjusting the tightness of the differential head arranged on the through hole until the coaxiality of the focusing electrode hole and the cathode cake is less than the second coaxiality threshold, further comprising:
and pre-fixedly connecting the focusing electrode assembly and the lower frame assembly through laser welding, and completely welding the focusing electrode assembly and the lower frame assembly by taking down the differential head positioning piece.
Technical Field
The embodiment of the invention relates to the product allocation technology of an electric vacuum device, in particular to a device, a system and a method for adjusting the coaxiality of a cathode and a focusing electrode of electron guns.
Background
The assembling die is known and widely used in the manufacturing and processing industry by , and is considered to be an essential part in the manufacturing and processing industry because the assembling die can maintain the correct position relation of the processed parts in the manufacturing and processing processes of stamping, riveting, welding, solidification and the like, and is also an important part for calculating the processing cost, and is also an important part which needs to be considered by the logistics part .
The electron gun has the advantages that the coaxiality precision requirement is far higher than other parts for the cathode and the focusing electrode which are core components of the electron gun according to the requirements on the structure and the performance of the electron gun, the coaxiality precision requirement is directly determined by key performance indexes such as laminar flow characteristics, column waist positions and passing rates of electrons, the coaxiality precision requirement is that the coaxiality of the cathode and the focusing electrode is phi 0.02mm, the cathode specifically refers to a cathode cake of a cathode assembly, the focusing electrode specifically refers to a focusing electrode hole of a focusing electrode assembly, the assembling of cathode assemblies and the focusing electrode assemblies of the electron gun is different from that of common mechanical products, the cathode assemblies and the focusing electrode assemblies of the electron gun have own characteristics, so that a new challenge is brought to the design of an assembling mold, the cathode assemblies are , the cathode assemblies are electric vacuum devices, the contact of oil stains, dust, organic matters and the like can cause pollution inside cavities of the electron gun, the vacuum degree is greatly reduced during working, the cathode assemblies are poisoned or increased, even the cathode assemblies are two-electrode assemblies are an electric vacuum device, the cathode assemblies are contacted with oil, dust, the sponge assemblies, the cathode assemblies are contacted with a sponge, the cathode assemblies and the cathode assemblies have the heat insulation effect is reduced, the cathode assembly has the cathode assembly is reduced by the cathode assembly, the cathode assembly has the defect of tungsten filament pressure loss, the tungsten filament pressure loss caused by the fragile cathode assembly, the fragile.
Disclosure of Invention
The embodiment of the invention provides devices, systems and methods for adjusting the coaxiality of a cathode and a focusing electrode of an electron gun, so as to simplify the structure of the coaxiality adjusting device, reduce the coaxiality requirement on assembled components and improve the manufacturing precision of the electron gun.
, the embodiment of the invention provides a device for adjusting the coaxiality of a cathode and a focusing electrode of electron guns, which comprises a base, a differential head positioning piece, a differential head, a nut, a screw and a focusing electrode pressing block;
the outer surface of the base is provided with threads matched with the nut and the differential head positioning piece, the inner surface of the base is used for being matched with the outer surface of a lower frame assembly of the electron gun in a sliding mode, and the end face of the base is used for being attached to a flange of the lower frame assembly;
the differential head positioning piece is provided with an th through hole, the axis of the th through hole and the axis of the differential head positioning piece form a th angle, the th angle is an acute angle, and the differential head is fixed in the th through hole through the screw;
the nut is fastened with the differential head positioning piece in the opposite direction and is used for providing support for adjusting the differential head;
the inner surface of the focusing pole pressing block is used for being matched with the outer surface of a focusing pole assembly of the electron gun in a sliding mode.
, the differential head is further provided with a second through hole, and the axis of the second through hole forms a second angle with the axis of the differential head positioning piece;
the second through hole is used for providing a laser welding channel.
, the differential head positioning piece and the end face of the differential head are used to provide focusing space for the measuring lens of the measuring instrument, and the measuring instrument is used to measure the coaxiality of the cathode and the focusing pole of the electron gun.
And , arranging a chamfer on the outer surface of the focusing pole pressing block, wherein the normal of the chamfer is in the same direction with the axis of the differential head.
, the number of the through holes is three, the through holes are evenly distributed on the differential head positioning piece, and the angle is more than or equal to 60 degrees and less than or equal to 70 degrees.
, the number of the second through holes is three, and the second through holes are uniformly distributed on the differential head positioning piece.
In a second aspect, the present invention further provides an system for adjusting coaxiality of a cathode and a focusing electrode of an electron gun, the system for adjusting coaxiality of a cathode and a focusing electrode of an electron gun comprises the device for adjusting coaxiality of a cathode and a focusing electrode of an electron gun according to of the present invention, and further comprises an electron gun;
and the coaxiality adjusting device of the cathode and the focusing electrode of the electron gun is used for adjusting the coaxiality of the cathode assembly and the focusing electrode of the focusing electrode assembly.
In a third aspect, an embodiment of the present invention further provides an method for adjusting coaxiality of a cathode and a focusing electrode of an electron gun, where the method includes:
connecting the cathode assembly and the lower frame assembly through laser welding, placing the cathode assembly and the lower frame assembly on the base, and buckling the focusing electrode assembly and the focusing extreme pressure block;
locking the differential head on the differential head positioning piece through the screw, mounting the differential head positioning piece on the base, and rotating the differential head positioning piece until the distance between the differential head and the focusing pole pressing block is smaller than or equal to a distance threshold value;
through rotating set up in differential head on the th through-hole, in order to realize focus utmost point briquetting drives focus utmost point subassembly slides on the horizontal direction, until the negative pole cake of negative pole subassembly with the axiality more than or equal to second axiality threshold value and less than or equal to axiality threshold value of the focus utmost point hole of focus utmost point subassembly, axiality threshold value is greater than the second axiality threshold value.
, the rotating the differential head disposed on the th through hole to realize that the focusing pole pressing block drives the focusing pole assembly to slide in the horizontal direction until the coaxiality between the cathode cake of the cathode assembly and the focusing pole hole of the focusing pole assembly is greater than or equal to the second coaxiality threshold and less than or equal to the th coaxiality threshold, further includes:
and placing the cathode and focusing electrode coaxiality adjusting system of the electron gun on a measuring instrument, obtaining the coaxiality and the eccentric direction of the cathode cake and the focusing electrode hole through the measuring instrument, and continuously adjusting the coaxiality of the cathode cake and the focusing electrode hole by adjusting the tightness of the differential head arranged on the th through hole until the coaxiality of the cathode cake and the focusing electrode hole is smaller than the second coaxiality threshold value.
, the step of placing the adjustment system on a measuring instrument, obtaining the coaxiality and the eccentric direction of the cathode cake and the focusing pole hole through the measuring instrument, and continuing to adjust the coaxiality of the cathode cake and the focusing pole hole by adjusting the tightness of the differential head arranged on the th through hole until the coaxiality of the cathode cake and the focusing pole hole is less than the second coaxiality threshold value, further comprises:
and pre-fixedly connecting the focusing electrode assembly and the lower frame assembly through laser welding, and completely welding the focusing electrode assembly and the lower frame assembly by taking down the differential head positioning piece.
The embodiment of the invention designs the coaxiality adjusting device comprising a base, a differential head positioning piece, a differential head, a nut, a screw and a focusing electrode pressing block, wherein the outer surface of the base is provided with threads matched with the nut and the differential head positioning piece, the inner surface of the base is used for being in sliding fit with the outer surface of a lower frame assembly of an electron gun, the end surface of the base is used for being attached to a flange of the lower frame assembly, the differential head positioning piece is provided with a through hole, the axis of a through hole and the axis of the differential head positioning piece form a angle, the angle is an acute angle, the differential head is fixed in a through hole through the screw, the nut and the differential head positioning piece are fastened reversely for providing support for adjusting the differential head, and the inner surface of the focusing electrode pressing block is used for being in sliding fit with the outer surface of the focusing electrode assembly of the electron gun.
Drawings
FIG. 1 is a schematic structural diagram of a coaxiality adjusting device for cathodes and a focusing electrode of electron guns in an embodiment of the present invention;
FIG. 2 is an isometric view of a coaxiality adjustment apparatus for the cathode and the focusing electrode of electron guns in an embodiment of the present invention;
FIG. 3 is a schematic diagram of a system for adjusting the coaxiality of the cathode and the focusing electrode of electron guns according to an embodiment of the present invention;
FIG. 4 is a schematic partial cross-sectional view of a cathode and focusing electrode coaxiality adjustment system of electron guns in an embodiment of the present invention;
FIG. 5 is a schematic structural view of a cathode assembly of kinds of electron guns in the embodiment of the invention;
fig. 6 is a schematic structural view of a lower frame assembly of kinds of electron guns in the embodiment of the present invention;
FIG. 7 is a schematic diagram of a focusing electrode assembly of electron guns in an embodiment of the invention;
FIG. 8 is a flow chart of a method for adjusting the coaxiality of the cathode and the focusing electrode of electron guns in an embodiment of the present invention;
fig. 9 is a schematic structural view of kinds of die assemblies in an embodiment of the present invention.
Detailed Description
The present invention will now be described in further detail with reference to the drawings and examples, it being understood that the specific embodiments herein described are merely illustrative of the invention and are not limiting thereof, and that various features described in the examples can be combined to form multiple alternatives.
Fig. 1 is a schematic structural diagram of an apparatus for adjusting the coaxiality of a cathode and a focusing electrode of an electron gun, which is applicable to the case of adjusting the coaxiality of the cathode and the focusing electrode of the electron gun according to the present embodiment, as shown in fig. 1, the apparatus 10 for adjusting the coaxiality of the cathode and the focusing electrode of the electron gun may specifically include a
The outer surface of the
The differential
The
The inner surface of the focusing pole compact 106 may be adapted to slip fit with the outer surface of a focusing pole assembly (not shown in fig. 1) of the electron gun.
In an embodiment of the present invention, the device 10 for adjusting the coaxiality of the cathode and the focus electrode of the electron gun may specifically include a
The differential
It should be noted that the th through holes can be set according to actual conditions, and are not specifically limited herein, for example, if the th through holes are three, if the th through holes are at least three, the intervals between the th through holes can be the same or different, and are also specifically set according to actual conditions, and are not specifically limited herein, if the intervals between the th through holes are the same, it can be stated that the th through holes are uniformly distributed on the differential
The
The technical scheme of the embodiment is that the coaxiality adjusting device comprises a base, a differential head positioning piece, a differential head, a nut, a screw and a focusing electrode pressing block, wherein threads matched with the nut and the differential head positioning piece are arranged on the outer surface of the base, the inner surface of the base is used for being in sliding fit with the outer surface of a lower frame assembly of an electron gun, the end surface of the base is used for being attached to a flange of the lower frame assembly, the differential head positioning piece is provided with a through hole, the axis of a through hole and the axis of the differential head positioning piece form a angle, the angle is an acute angle, the differential head is fixed in a through hole through the screw, the nut and the differential head positioning piece are fastened reversely and used for providing support for adjusting the differential head, and the inner surface of the focusing electrode pressing block is used for being in sliding fit with the outer surface of the focusing electrode assembly of the electron gun.
Optionally, on the basis of the above technical solution, the differential
The second through hole may be used to provide a laser welding channel.
In an embodiment of the present invention, the differential
In addition, the assembling die can compress the area to be laser welded to ensure that the stress direction of the part is consistent with the deformation direction caused by thermal stress, thereby ensuring that no additional stress deformation occurs after the welding is finished.
Optionally, on the basis of the above technical solution, the end surfaces of the differential
In an embodiment of the present invention, the end surface of the differential
Optionally, on the basis of the above technical solution, the outer surface of the focusing
In an embodiment of the present invention, the outer surface of the focusing pole compact 106 may be provided with a chamfer, and a normal direction of the chamfer may be in the same direction as the axial direction of the
Optionally, on the basis of the above technical solution, the number of the th through holes may be three, and the th through holes may be uniformly distributed on the differential
Optionally, on the basis of the above technical solution, the angle of the th through hole may be greater than or equal to 60 ° and less than or equal to 70 °.
Optionally, on the basis of the above technical solution, the number of the second through holes may be three, and the second through holes may be uniformly arranged on the differential
Optionally, on the basis of the above technical solution, the second angle may be 90 °.
Optionally, on the basis of the above technical solution, the number of the th through holes may be equal to the number of the second through holes, and the th through holes and the second through holes may be uniformly arranged on the differential
It should be noted that the cathode and the focusing electrode coaxiality adjusting device of the electron gun provided by the embodiment of the invention has a simple structure, is easy to process and manufacture, and does not need to require higher coaxiality of the assembled components (namely the cathode component, the lower frame component and the focusing electrode component of the electron gun). In addition, the manufacturing precision of the electron gun is greatly improved.
Fig. 3 is a schematic structural diagram of a coaxiality adjustment system for cathodes and a focusing electrode of electron guns according to an embodiment of the present invention, which is applicable to the case of adjusting the coaxiality of the cathodes and the focusing electrodes of the electron guns, as shown in fig. 3, the coaxiality adjustment system for cathodes and the focusing electrodes of the electron guns may specifically include a cathode and focusing electrode coaxiality adjustment device 10 (not shown in fig. 3) of the electron guns according to an embodiment of the present invention, and may specifically include an electron gun 11, and the electron gun 11 may specifically include a
The cathode and focus pole coaxiality adjusting device of the electron gun can be used for adjusting the coaxiality of the
In the embodiment of the present invention, it should be noted that the coaxiality of the
It should be noted that the assembly mold (i.e. the cathode and the focusing electrode coaxiality adjusting device of the electron gun) provided by the embodiment of the present invention can stabilize the assembly process of the lower frame assembly and the focusing electrode assembly, and the contact between the assemblies is good and the stress is uniform.
It should be noted that the adjustment of the height difference and the parallelism can be individually designed into groups by adjusting the assembly sequence, and specifically, after the adjustment is completed by using a simple mold, the coaxiality of the cathode and the focusing electrode of the electron gun provided by the embodiment of the present invention can be rapidly adjusted.
The technical scheme of this embodiment has realized that axiality adjusting device simple structure, easily manufacturing, and need not to require to be assembled the subassembly and have higher axiality, and then has also improved the manufacturing accuracy of electron gun.
FIG. 8 is a flow chart of an method for adjusting the coaxiality of the cathode and the focus of an electron gun, which can be applied to the case of adjusting the coaxiality of the cathode and the focus of an electron gun, according to an embodiment of the present invention, which can be executed by a system for adjusting the coaxiality of the cathode and the focus of an electron gun, as shown in FIG. 8, the method specifically includes the following steps:
and 210, connecting the cathode assembly and the lower frame assembly through laser welding, placing the cathode assembly and the lower frame assembly on a base, and buckling the focusing electrode assembly and the focusing extreme pressure block.
In the embodiment of the present invention, the
The joined
And 220, locking the differential head on the differential head positioning piece through a screw, installing the differential head positioning piece on the base, and rotating the differential head positioning piece until the distance between the differential head and the focusing pole pressing block is smaller than or equal to a distance threshold value.
In an embodiment of the present invention, the
In the embodiment of the invention, the
The technical scheme of this embodiment has realized that axiality adjusting device simple structure, easily manufacturing, and need not to require to be assembled the subassembly and have higher axiality, and then has also improved the manufacturing accuracy of electron gun.
Optionally, on the basis of the technical scheme, the method includes that the focusing extreme pressure block drives the focusing pole assembly to slide in the horizontal direction by rotating the differential head arranged on the th through hole until the coaxiality of the cathode cake of the cathode assembly and the focusing pole hole of the focusing pole assembly is greater than or equal to a second coaxiality threshold and less than or equal to a coaxiality threshold, and specifically includes that a cathode and focusing pole coaxiality adjusting system of the electron gun is placed on a measuring instrument, the coaxiality and the eccentric direction of the cathode cake and the focusing pole hole are obtained through the measuring instrument, and the coaxiality of the cathode cake and the focusing pole hole is continuously adjusted by adjusting the tightness of the differential head arranged on the th through hole until the coaxiality of the cathode cake and the focusing pole hole is less than the second coaxiality threshold.
In an embodiment of the present invention, in order to increase the accuracy of the coaxiality, the coaxiality can be adjusted by using a measuring instrument, the coaxiality adjusting system of the cathode and the focusing electrode of the electron gun can be placed on the measuring instrument, the coaxiality and the eccentricity direction of the cathode cake of the
The measuring instrument used by the assembling mould can quickly measure the dimensional accuracy of the cathode component and the focusing pole component, so that the problems can be found in time and the differential head is adopted to carry out directional and quantitative adjustment.
Optionally, on the basis of the above technical scheme, the method includes placing a cathode and focus electrode coaxiality adjusting system of the electron gun on a measuring instrument, obtaining coaxiality and an eccentric direction of a cathode cake and a focus electrode hole through the measuring instrument, and continuously adjusting the coaxiality of the cathode cake and the focus electrode hole by adjusting the tightness of a differential head arranged on an th through hole until the coaxiality of the cathode cake and the focus electrode hole is smaller than a second coaxiality threshold, and specifically, the method further includes the steps of pre-fixedly connecting the focus electrode assembly and the lower frame assembly through laser welding, removing a differential head positioning piece, and completely welding the focus electrode assembly and the lower frame assembly.
In an embodiment of the present invention, the focusing
Above-mentioned realized adopting laser welding to be connected cathode assembly and lower frame subassembly laser welding to, be connected lower frame subassembly and focus utmost point subassembly.
The above-mentioned embodiments, object, technical solutions and advantages of the present invention have been described in , it should be understood that the above-mentioned embodiments are only examples of the present invention and should not be construed as limiting the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
- 上一篇:一种医用注射器针头装配设备
- 下一篇:一种可批量生产的透射电镜载网及其制备方法