阅读说明：本技术 玻璃薄膜的制造方法 (Method for producing glass film ) 是由 猪饲直弘 村田宪一 于 2018-08-20 设计创作，主要内容包括：本发明的玻璃薄膜的制造方法,具备对于沿着规定的搬送方向(X)搬送的带状的玻璃薄膜(G1)照射激光(L)从而割断玻璃薄膜(G1)的割断工序(S5)。在割断工序(S5)中,具备：通过具有开口部(25a)的平台(22)支承玻璃薄膜(G1)的下表面,并且由开口部(25a)吸引玻璃薄膜(G1)的工序；对于被开口部(25a)吸引的玻璃薄膜(G1)照射激光(L)的工序。(The method for producing a glass thin film comprises a step (S5) of irradiating a laser beam (L) to a strip-shaped glass thin film (G1) conveyed in a predetermined conveyance direction (X) to cut the glass thin film (G1). The cleaving step (S5) includes: supporting the lower surface of the glass film (G1) by a stage (22) having an opening (25a), and sucking the glass film (G1) through the opening (25 a); and a step of irradiating the glass film (G1) sucked into the opening (25a) with a laser beam (L).)

A method for producing a glass thin film comprising a step of irradiating a strip-shaped glass thin film conveyed in a predetermined conveyance direction with a laser beam to thereby cleave the glass thin film, characterized in that,

the cleaving step includes: supporting a lower surface of the glass film by a stage having an opening, and sucking the glass film through the opening; and irradiating the glass thin film sucked by the opening with the laser beam.

2. The method for producing a glass thin film according to claim 1,

the cutting step includes a step of conveying the glass thin film by a conveying device having a predetermined pass line,

the stage is provided with a support part for supporting the glass film,

the upper surface of the support portion is located above the pass line.

3. The method for producing a glass thin film according to claim 2,

the support portion is configured to support the glass thin film on a downstream side in the conveyance direction from the opening portion,

the cleaving step includes a cooling step of discharging a coolant toward the glass thin film supported by the support portion on a downstream side of the opening portion.

4. The method of manufacturing a glass thin film according to , wherein the step of cutting includes a step of adjusting a suction force of the glass thin film at the opening.

5. The method of manufacturing a glass thin film according to , wherein an amplitude of vertical movement of the glass thin film when the glass thin film passes through the opening in the cleaving step is 50 μm or less.

6. The method of manufacturing a glass film according to , wherein an amount of deformation of the glass film due to suction of the opening is 0.3mm or less.

7. The method of manufacturing a glass film according to , wherein the opening of the stage has a width of mm,

the width of the opening is 3mm to 30 mm.

Technical Field

The present invention relates to a method for manufacturing a ribbon-shaped glass film, for example.

Background

As is well known, a thin-walled glass plate is actually used for Flat Panel Displays (FPDs) such as liquid crystal displays and organic EL displays, a flat glass plate used for organic EL illumination, a glass plate used for manufacturing a tempered glass or the like which is a component of a touch panel, and a glass plate used for a panel of a solar cell or the like.

For example, patent document 1 discloses kinds of glass films (thin plate glass) having a thickness of several hundred μm or less, and such glass films are continuously formed by a forming apparatus using a so-called overflow down-draw method, as also described in the document .

In the method for producing a glass film disclosed in patent document 1, a long glass film continuously formed by the overflow downdraw method is conveyed to the downstream side by a horizontal conveying unit (horizontal conveying unit) of a conveying apparatus after the conveying direction is changed from the vertical direction to the horizontal direction. During this conveyance, both ends (ear portions) of the glass film in the width direction are cut and removed. Thereafter, the glass film is wound in a roll shape by a winding roll to form a glass roll.

In this laser cutting method, conveys the glass thin film, forms an initial crack in the glass thin film by a crack forming means such as a diamond cutter, and then the portion is heated by laser irradiation, and thereafter the heated portion is cooled by a cooling means.

[ Prior Art document ]

[ patent document ]

[ patent document 1 ] Japanese patent laid-open No. 2012 and 240883

, when a very thin glass film having a thickness of 200 μm or less is conveyed and is cut by the above-described laser cutting method, numerous wrinkles are formed on the glass film during the conveyance of the glass film.

Disclosure of Invention

The present invention has been made in view of the above circumstances, and an object of the present invention is to prevent the occurrence of a defective end face after cutting a glass thin film by laser cutting.

The present invention is directed to a method for manufacturing kinds of glass films, including a step of irradiating a laser beam onto a belt-shaped glass film conveyed in a predetermined conveyance direction to cut the glass film, wherein the step of cutting includes a step of supporting a lower surface of the glass film by a stage having an opening and sucking the glass film through the opening, and a step of irradiating the laser beam onto the glass film sucked through the opening.

According to the configuration, in the cutting step, parts of the ribbon-shaped glass film conveyed in the conveying direction are sucked through the opening of the platform, whereby the sucked parts of the glass film can be prevented from being wrinkled or wrinkles already formed on the glass film can be eliminated.

Preferably, the cutting step includes a step of conveying the glass thin film by a conveying device having a predetermined pass line, and the stage includes a support portion for supporting the glass thin film, and an upper surface of the support portion is located above the pass line. In this way, by disposing the upper surface of the support portion of the stage above the pass line, the glass film conveyed by the conveying device is pushed up by the support portion when passing through the stage. This can effectively prevent the glass film from being wrinkled when passing through the platen.

In the above method, the support portion is configured to support the glass thin film on a downstream side in the conveyance direction with respect to the opening portion, and the cleaving step includes a cooling step of discharging the coolant toward the glass thin film supported by the support portion on the downstream side with respect to the opening portion.

The glass film sucked into the opening is locally heated by irradiation of the laser beam, and then cooled by the refrigerant at a downstream position thereof. Thermal stress occurs in the glass film due to expansion by heating with the laser and contraction by cooling with the refrigerant. The thermal stress causes the progress of cracks, whereby the glass film is cut with high precision. In this case, the refrigerant contacts the glass film on the downstream side of the opening. At this position, the support portion supports the glass film so as not to be deformed by the pressure of the refrigerant. This prevents the occurrence of a defective end face due to deformation of the glass thin film.

Preferably, the cutting step includes a step of adjusting the suction force of the glass thin film in the opening. When the glass film is sucked through the opening, if the suction force is too strong, conveyance of the glass film may be inhibited. In the cutting step, the glass thin film can be appropriately conveyed and cut by adjusting the suction force of the opening.

In the cleaving step, the amplitude of the vertical movement of the glass thin film when the glass thin film passes through the opening is preferably 50 μm or less. In this way, by reducing the amplitude of the vertical movement of the glass thin film as much as possible, it is possible to suppress the occurrence of the end surface defect of the cut surface of the glass thin film.

If the suction at the opening is excessive, the amount of deformation of the glass film becomes too large, which causes a failure in the end face of the glass film after cutting. In order to prevent such an end surface defect, it is preferable that the amount of deformation of the glass thin film due to the suction of the opening is 0.3mm or less.

In the above manufacturing method, the opening of the stage has a width of mm, and preferably the width of the opening is 3mm or more and 30mm or less.

According to the present invention, occurrence of end surface defects after cutting the glass thin film by laser cutting can be prevented.

Drawings

FIG. 1 is a side view showing an apparatus for producing a glass thin film.

FIG. 2 is a plan view of a portion showing an apparatus for producing a glass thin film.

Fig. 3 is a sectional view taken along the line iii-iii of fig. 2.

Fig. 4 is a top view of the platform.

Fig. 5 is a cross-sectional view taken along line v-v of fig. 2.

FIG. 6 is a flowchart showing a method for producing a glass thin film.

FIG. 7 is a cross-sectional view showing the form of the glass thin film in the cleaving step.

FIG. 8 is a cross-sectional view showing the form of the glass thin film in the cleaving step.

Fig. 9 is a cross-sectional view showing the behavior of the glass film in the cleaving step.

Fig. 10 is a plan view showing another example of the suction device.

FIG. 11 is a line sectional view of the XI-XI of FIG. 10.

Detailed Description

The mode for carrying out the present invention will be described below with reference to the drawings, and embodiments of the method and the apparatus for producing a glass film according to the present invention are shown in fig. 1 to 9.

As shown in FIG. 1, the manufacturing apparatus 1 includes a forming section 2 for forming a strip-shaped base glass film G, a direction changing section 3 for changing the running direction of the base glass film G from a vertical direction to a horizontal direction, a -th conveying section 4 for conveying the base glass film G in the horizontal direction after the direction change, a -th cutting section 5 for cutting the widthwise end (ear) of the base glass film G, and a winding section 6 for winding the glass film G1 from which the ear has been removed (hereinafter referred to as " -th glass film") in a roll form to form a -th glass roll GRL 1.

The manufacturing apparatus 1 further includes a take-out section 7 for taking out the th glass film G1 from the th glass roll GRL1, a second conveying section 8 for conveying the th glass film G1 taken out from the take-out section 7 in the transverse direction, a second cutting section 9 for cutting the part of the th glass film G1, and a second winding section 10 for winding the glass film (hereinafter referred to as "second glass film") G2 cut by the second cutting section 9 in a roll form to form a second glass roll GRL 2.

The forming section 2 includes: a forming body 11 having a substantially wedge-shaped cross section and having an overflow groove 11a formed at an upper end portion; edge rollers 12 disposed directly below the forming body 11 and sandwiching the molten glass GM overflowing from the forming body 11 from both front and back sides; an annealing furnace 13 provided immediately below the edge roller 12.

The forming section 2 causes the molten glass GM overflowing from the overflow vessel 11a of the forming body 11 to flow down along both side surfaces, and merges at the lower end portions thereof to form a film. The edge roller 12 restricts the widthwise contraction of the molten glass GM to form a base glass film G having a predetermined width. The annealing furnace 13 is used to perform a stress relieving treatment on the base glass thin film G. The annealing furnace 13 has annealing furnace rolls 14 arranged in a plurality of stages in the vertical direction.

A backup roll 15 for sandwiching the base glass film G from both front and back sides is disposed below the annealing furnace 13, and tension for promoting the thinning of the base glass film G is applied between the backup roll 15 and the edge roller 12, or between the backup roll 15 and any of the annealing furnace rolls 14.

The direction changing unit 3 is provided below the support roller 15. In the direction changing section 3, a plurality of guide rolls 16 for guiding the base glass thin film G are arranged in a curved shape. These guide rollers 16 guide the base glass film G conveyed in the vertical direction in the lateral direction.

The th conveying unit 4 is disposed forward (downstream) in the traveling direction of the direction changer 3. the th conveying unit 4 is constituted by a belt conveyor, but is not limited to , and various other conveying devices such as a roller conveyor may be used, and the th conveying unit 4 continuously conveys the base glass film G passing through the direction changer 3 to the downstream side by driving the endless belt 4 a.

The th cutting unit 5 is disposed above the th conveying unit 4. in this embodiment, the th cutting unit 5 cuts the base glass thin film G by laser cutting, the th cutting unit 5 includes pairs of laser irradiation devices 17a, and pairs of cooling devices 17b and th cutting unit 5 disposed downstream of the laser irradiation devices 17a, and a predetermined portion of the conveyed base glass thin film G is irradiated with the laser L from each laser irradiation device 17a to be heated, and then refrigerant R is discharged from the cooling device 17b to cool the heated portion.

The -th winding unit 6 is disposed downstream of the -th conveyance unit 4 and the -th cutting unit 5. the -th winding unit 6 winds the -th glass film G1 into a roll shape by rotating the winding core 18. the -th glass roll GRL1 thus configured is conveyed to the take-out unit 7. the take-out unit 7 draws the -th glass film G1 from the -th glass roll GRL1 configured by the -th winding unit 6 and supplies it to the second cutting unit 9.

The second conveying section 8 conveys the th glass film G1. taken out of the th glass roll GRL1 in the take-out section 7 in the transverse direction (hereinafter referred to as "conveying direction") X. the second conveying section 8 is constituted by a belt conveyor, but is not limited to this configuration, and various other conveying devices such as a roller conveyor may be used, and the second conveying section 8 conveys the th glass film G1 to the second winding section 10 on the downstream side by driving a plurality of endless belt-shaped belts 8 a.

The plurality of belts 8a are disposed so as to maintain the th glass film G1 in a substantially horizontal posture, that is, the plurality of belts 8a are disposed so that the vertical position (height) of the contact portion 8b with the th glass film G1 is uniform, thereby constituting a pass line PL along the horizontal direction.

The second cutting section 9 is located at a middle portion of the second conveying section 8. the second cutting section 9 includes a suction device 19 for sucking the th glass film G1, a pair laser irradiation device 20 and a pair cooling device 21 arranged above the second conveying section 8.

The suction device 19 includes a pair of stages 22 in contact with the lower surface of the -th glass film G1, a support member 23 of the stage 22, and a suction pump 24 connected to the stage 22.

As shown in fig. 2 and 3, the surface plate 22 is disposed between the belts 8a of the second conveying section 8, the surface plate 22 is formed of a metal plate member, the surface plate 22 is formed in a rectangular shape having a predetermined length LP and width W, but is not limited to , the length LP of the surface plate 22 is 80mm or more and 260mm or less, but is not limited to , and the width W of the surface plate 22 is 30mm or more and 60mm or less, but is not limited to .

The stage 22 has a hole 25 penetrating in the thickness direction and supports 26a to 26c contacting the th glass film G1.

As shown in FIG. 4, the hole 25 is formed as a linear long hole along the conveyance direction X of the th glass film G1, and the stage 22 sucks the lower surface of the th glass film G1 through the opening 25a at the upper part of the hole 25. the opening 25a has a predetermined length LA along the conveyance direction X of the th glass film G1 and a length LA of the opening 25a of a width WA. determined by in the direction orthogonal to the conveyance direction X, and is preferably set to 40mm or more and 80mm or less, and the width WA of the opening 25a is preferably set to 3mm or more and 30mm or less, and more preferably 3mm or more and 20mm or less.

The support portions 26a to 26c are formed of a resin sheet-like member, but are not limited to this material, and as shown in fig. 5, the upper surfaces of the support portions 26a to 26c are located above the pass line PL of the second conveying portion 8, and the difference H in height between the upper surfaces of the support portions 26a to 26c and the pass line PL (the upper portion of the belt 8 a) is preferably 0mm or more and 3.0mm or less, and more preferably 0.5mm or more and 3.0mm or less.

The supporting portions 26a to 26c include th supporting portion 26a, a second supporting portion 26b located on the downstream side of th supporting portion 26a, and a third supporting portion 26c located on the downstream side of second supporting portion 26b, the th supporting portion 26a is provided in the range from the upstream end of the platform 22 to the opening 25a, preferably, the length L1 of the th supporting portion 26a is set to 10mm or more and 50mm or less, and the width W1 of the th supporting portion 26a is equal to the width W of the platform 22.

The second support portion 26b is positioned on the outer side (both sides) in the width direction of the hole 25 of the platform 22, the length L2 of the second support portion 26b is equal to the length LA of the hole 25 (opening 25a), and the width W2 of the second support portion 26b is not less than 1mm but not more than 15mm, but is not limited to the range.

Third supporting portion 26c is located downstream of opening 25a, third supporting portion 26c supports portion of -th glass film G1 cooled by refrigerant R discharged from cooling device 21, length L3 of third supporting portion 26c is 10mm to 160mm, but is not limited to range, and width W3 of third supporting portion 26c is equal to width W of table 22.

The support member 23 supports the lower portion of the platform 22, the support member 23 is formed in a block shape, for example, of metal, an opening portion (gap) 23a for sucking air outside the support member 23 is formed between the support member 23 and the platform 22, the support member 23 has an internal space s communicating with the hole 25 of the platform 22, and the portion of the suction device 19 is connected to the lower portion of the support member 23.

The suction pump 24 is provided in the vicinity of the second conveying unit 8. The suction pump 24 is connected to the support member 23 via a connection pipe 27. Thus, the suction pump 24 sucks air from the opening 23a of the support member 23 and the opening 25a of the platform 22 through the connection pipe 27 and the internal space S of the support member 23.

The laser irradiation device 20 irradiates a predetermined portion of the th glass film G1 moving in the conveyance direction X with the laser light L to locally heat the portion, the laser irradiation device 20 has a plurality of laser irradiation units 20a as shown in FIG. 3. each laser irradiation unit 20a is disposed above the opening 25a of the stage 22. thus, the laser irradiation unit 20a irradiates a plurality of positions of the th glass film G1 passing through the opening 25a with the laser light L, and the irradiation position O of the laser light L from each laser irradiation unit 20a is set so as to be positioned on a straight line substantially parallel to the conveyance direction X of the th glass film G1.

The cooling device 21 is disposed downstream of the laser irradiation device 20 in the conveyance direction X of the th glass film G1. the cooling device 21 discharges the refrigerant R to a portion where the th glass film G1 is locally heated, and cools the portion.

The second winding unit 10 is disposed downstream of the second conveying unit 8 and the second cutting unit 9. The second winding unit 10 winds the second glass film G2 conveyed from the second conveying unit 8 around the winding core 28, thereby forming a second glass roll GRL 2.

The second glass film G2( th glass film G1) produced by the above-described production apparatus 1 may be made of silicate glass or quartz glass, preferably borosilicate glass, soda-lime glass, aluminosilicate glass or chemically strengthened glass, and most preferably alkali-free glass, and here, alkali-free glass is glass containing substantially no alkali component (alkali metal oxide), specifically, glass containing an alkali component in a weight ratio of 3000ppm or less, and in the present invention, the weight ratio of alkali component is preferably 1000ppm or less, more preferably 500ppm or less, and most preferably 300ppm or less.

The thickness of the second glass film G2( th glass film G1) is 10 μm or more and 300 μm or less, preferably 30 μm or more and 200 μm or less, and most preferably 30 μm or more and 100 μm or less.

Hereinafter, a method of manufacturing the second glass film G2 (second glass roll GRL2) using the manufacturing apparatus 1 having the above-described configuration will be described, and as shown in fig. 6, the method includes a forming step S1, an ear removing step S2, a th winding step S3, a taking-out step S4, a cutting step S5, and a second winding step S6.

In the forming step S1, the molten glass GM overflowing from the overflow groove 11a of the formed body 11 in the forming section 2 is made to flow down along both side surfaces of the formed body 11, and is joined at the lower end thereof to be formed into a film shape. At this time, the edge roller 12 restricts the widthwise contraction of the molten glass GM to form a base glass film G having a predetermined width. Thereafter, the base glass thin film G is subjected to a stress relieving treatment by the annealing furnace 13 (slow cooling step). The base glass film G is formed to a predetermined thickness by the tension of the backup roll 15.

In the ear removing step S2, sends the base glass film G to the downstream side by the direction changing section 3 and the th conveying section 4, heats the portion of the base glass film G by irradiating the laser beam L from the laser irradiation device 17a in the th cutting section 5, and then, the refrigerant R is sprayed to the heated portion by the cooling device 17b, thereby generating thermal stress in the base glass film G, and an initial crack is formed in the base glass film G in advance, and the crack is developed by the thermal stress, thereby removing the ear from the base glass film G to form the th glass film G1.

In the next winding step S3, the th glass roll GRL1 is formed by winding the th glass film G1 around the winding core 18, and then the th glass roll GRL1 is transferred to the take-out section 7, and in the take-out step S4, the th glass film G1 is drawn out from the th glass roll GRL1 transferred to the take-out section 7 and conveyed to the second cutting section 9 by the second conveying section 8.

In the cutting step S5, of the th glass film G1 is conveyed by the second conveying unit 8, the suction pump 24 is constantly operated by the suction device 19 on the support portions 26a to 26c of the table 22 (conveying step), and the th glass film G1 on the table 22 is sucked through the opening 25a of the table 22 (suction step). as shown in fig. 7 and 8, the th glass film G1 is supported by the second support portion 26b of the table 22 and sucked through the opening 25a, thereby being deformed into a concave shape within the range of the opening 25 a.

In the cutting step S5, the th glass film G1 is moved at , is sucked through the opening 25a, and the th glass film G1 is deformed within the range of the opening 25a, preferably, the amount of deformation D of the th glass film G1 is 0.1mm or more and 0.3mm or less, the amount of deformation D is an average value of values measured continuously every 0.1 second when the 10m th glass film G1 is conveyed, the amount of deformation D is measured without irradiating the laser light L in order to eliminate the influence of thermal expansion caused by the laser light L, the suction force of the suction device 19 is adjusted in the cutting step S5 in order to reduce the amount of deformation D of the th glass film G1 as much as possible, the suction force of the opening 25a is adjusted by sucking air through the opening 23a formed in the support member 23 in addition to the amount of suction of the suction pump 24, and the suction force of the opening 25a is adjusted (adjustment step S) by using the opening 23a closing member to adjust the area of the opening.

The th glass film G1 is conveyed by the second conveyor 8 while being sucked into the opening 25a at , but slight vertical movement (vibration) occurs by adjusting the suction force (suction force weakening) (see FIG. 9). The vertical movement width (amplitude) A of the th glass film G1 can be reduced as much as possible by adjusting the suction force of the opening 25 a. specifically, the vertical movement width A of the th glass film G1 can be 10 μm or more and 50 μm or less. specifically, when the 10m glass film G1 is conveyed, the minimum value of the vertical movement width A measured every 0.1 second is preferably 10 μm or more and the maximum value is 50 μm or less.

In the adjustment of the suction force, the deformation amount D is increased when the suction amount is increased, but the vertical movement width a tends to be decreased. Conversely, when the suction amount is decreased, the above-mentioned deformation amount D is decreased, but the above-mentioned vertical movement width a tends to be increased. Therefore, the amount of deformation D is preferably reduced as much as possible within the allowable vertical movement width a, and the suction force is preferably in the range of 1m/s to 6m/s in the wind speed of the opening 25 a. The wind speed is measured using a known anemometer.

In the cleaving step S5, the th glass film G1 is conveyed by the second conveying part 8 as described above, and the th glass film G1 is irradiated with a plurality of laser light L from the laser irradiation part 20a of the laser irradiation device 20 (laser irradiation step).

By the irradiation of the laser light L as described above, the th glass film G1 is heated at the irradiation position O, and thereafter, the portion heated in the th glass film G1 is cooled by the cooling device 21 through the opening 25a (cooling step). that is, the refrigerant r is sprayed downward from the cooling device 21 positioned above the third support portion 26c of the stage 22. thermal stress occurs in the th glass film G1 due to expansion by local heating of the laser irradiation device 20 and contraction by cooling of the cooling device 21. an initial crack is formed in the th glass film G1 in advance, and the crack is progressed by the thermal stress, whereby the widthwise end portion of the th glass film G1 is continuously cut, whereby the second glass film G2 of the second glass film G2. can be formed, and then conveyed to the second winding section 10 on the downstream side by the second conveying section 8.

In the second winding step S6, the second glass film G2 is wound around the winding core 28. A second glass film G2 of a predetermined length is wound to form a second glass roll GRL2 (glass article).

According to the method for producing a glass film (second glass film G2) of the present embodiment described above, the th glass film G1 is sucked from the opening 25a of the stage 22 of the suction device 19, whereby the th glass film G1 passing through the opening 25a can be prevented from being wrinkled, and even if the th glass film G1 is wrinkled before passing through the stage 22, the wrinkle can be eliminated by the suction through the opening 25a, and therefore, by irradiating the th glass film G1 passing through the opening 25a with the laser light L and bringing it into contact with the refrigerant R from the cooling device 21 on the downstream side thereof, a failure does not occur at the cut surface of the second glass film G2, and the th glass film G1 can be cut with high precision.

Further, the suction force of the th glass film G1 at the opening 25a of the stage 22 can be adjusted by sucking air from the opening 23a located at a position different from the opening 25a of the stage 22, whereby the occurrence of a conveyance failure of the th glass film G1 due to the strong suction of the th glass film G1 by the opening 25a of the stage 22 can be prevented.

Fig. 10 and 11 show another example of the suction device, as shown in fig. 10 and 11, the stage 22 has a plurality of holes 25, and each hole 25 includes an -th opening 25a1 within which the laser light L is irradiated, and pairs of second openings 25a2 arranged apart from the -th opening 25a1 in the width direction of the stage 22.

The th opening 25a1 has the same function as the opening 25a of the surface plate 22 shown in FIGS. 3 and 4. the th opening 25a1 is disposed between and the second opening 25a 2. when the second opening 25a2 is formed in the surface plate 22, the length LA1 of the th opening 25a1 is preferably 40mm or more and 80mm or less, and the width WA1 of the th opening 25a1 is preferably 3mm or more and 5mm or less.

The downstream end DE of the -th opening 25a1 preferably protrudes downstream of the downstream end DE of the second opening 25a 2. the amount P1 of the downstream end DE of the -th opening 25a1 is preferably 5mm to 20 mm.

is formed in the second opening 25a2 to be longer and wider than the opening 25a1, but the configuration is not limited to , the length LA2 of the second opening 25a2 is preferably 40mm or more and 80mm or less, the width WA2 of the second opening 25a2 is preferably 8mm or more and 10mm or less, the upstream end UE of the second opening 25a2 protrudes upstream of the upstream end UE of the opening 25a1, and the amount P2 of protrusion of the upstream end UE of the second opening 25a2 is preferably 10mm or more and 20mm or less.

The second support portion 26b of the platform 22 preferably has a width W2 of 1mm to 3mm, which is a distance separating the -th opening 25a1 and the second opening 25a2 in the width direction of the platform 22 and a distance separating the -th opening 25a1 and the second opening 25a2 in the width direction of the platform 22.

The platform 22 includes fourth supporting portions 26d in addition to the third supporting portions 26a to 26c of the , the fourth supporting portions 26d are located on the outer sides in the width direction than the second opening portion 25a2, the length L4 of the fourth supporting portions 26d is preferably 40mm or more and 80mm or less, and the width W4 of the fourth supporting portions 26d is preferably 3mm or more and 5mm or less.

As shown in fig. 11, the first opening 25a1 and the second opening 25a1 communicate with the internal space S of the support member 23, so that the first 1 opening 25a1 and the second opening 25a1 attract the lower surface of the first 10 glass film G1 via the same attracting pump 24. if the attracting amount of the attracting pump 24 is small, the amount of deformation D1 of the first 13 glass film G1 of the first 1 opening 25a1 is more than the amount of deformation D1 of the glass film G1 of the second opening 25a1 in a state where the laser L is not irradiated to the first 1 glass film G1. conversely, if the attracting amount of the attracting pump 24 is large, there is a tendency that the amount of deformation D1 of the first 13 glass film G1 is lower than the amount of deformation D1 of the second opening 25a1, as shown in fig. 11, the amount of deformation D1 of the glass film G1 is larger than the amount of deformation D1 a1 of the glass film 1a 1 absorbed by the drawing, and the amount of the glass film 1D 1 is preferably larger than the amount of the glass film D1D of the glass film 1D 1 of the second opening 1a 1 of the glass film 1 absorbed by the drawing of the glass film 1 is larger.

In this example, the glass film G1 is sucked through the th opening 25a1 and the second opening 25a2 of the surface plate 22, so that the generation of wrinkles in the glass film G1 passing through the th opening 25a1 can be prevented, and even if the th glass film G1 is wrinkled before passing through the surface plate 22, the wrinkles can be eliminated by the suction of the th opening 25a1 and the second opening 25a2, and further, the opening area (particularly, the width WA1) of the th opening 25a1 can be reduced as much as possible by providing the second opening 25a2 in the surface plate 22, whereby the deformation amount D and the vertical movement width a of the th glass film G1 passing through the th opening 25a1 can be reduced, and the th glass film G1 can be cut with high precision.

The present invention is not limited to the configuration of the above embodiment, and is not limited to the above operation and effect. The present invention can be variously modified without departing from the scope of the gist of the present invention.

In the above-described embodiment, the example of forming the base glass film G by the overflow downdraw method is shown, but the present invention is not limited thereto, and the base glass film G may be formed by another forming method.

In the second cutting section 9 of the above embodiment, is shown as an example of cutting the glass film G1 while sucking it by the suction device 19, but the present invention is not limited to this, and the base glass film G may be sucked by the suction device in the cutting section 5. the suction device 19 may be provided in the cutting section 5 or the side or both of the second cutting section 9.

[ notation ] to show

22 platform

23 support member

25a opening part

25a1 No. opening

26a th support part

26b second support part

26c third support part

G1 film of th glass

L laser

X conveying direction