阅读说明：本技术 一体化太赫兹产生与聚焦装置及近场太赫兹扫描系统 (Integrated terahertz generation and focusing device and near-field terahertz scanning system ) 是由 向奎 王纪浩 黄秋萍 侯玉斌 马天 陆轻铀 陆亚林 于 2019-11-05 设计创作，主要内容包括：本发明公开了一种一体化太赫兹产生与聚焦装置及近场太赫兹扫描系统,包括：太赫兹产生单元、转换单元、聚焦单元和光路管道；所述太赫兹产生单元用于产生太赫兹波；所述转换单元设置于所述太赫兹产生单元的出光光路上,所述转换单元用于将所述太赫兹波转换为平行光束后,将所述平行光束引导出射至所述聚焦单元；所述聚焦单元用于将所述平行光束聚焦至预设位置,且太赫兹产生单元、转换单元和聚焦单元均相应固定在光路管道内外。本发明提供的技术方案,通过光路管道将太赫兹产生单元、转换单元和聚焦单元集成固定而实现一体化,实现减小装置体积的目的,使得装置便于在强磁场、极低温等窄空间中使用,在受限空间的测量应用中具有重要意义。(The invention discloses an integrated terahertz generation and focusing device and a near-field terahertz scanning system, which comprise: the terahertz generation unit, the conversion unit, the focusing unit and the optical path pipeline; the terahertz generation unit is used for generating terahertz waves; the conversion unit is arranged on a light emitting path of the terahertz generation unit and is used for guiding and emitting the parallel light beams to the focusing unit after the terahertz waves are converted into the parallel light beams; the focusing unit is used for focusing the parallel light beams to a preset position, and the terahertz generating unit, the converting unit and the focusing unit are correspondingly fixed inside and outside the light path pipeline. According to the technical scheme provided by the invention, the terahertz generation unit, the conversion unit and the focusing unit are integrated and fixed through the optical path pipeline to realize integration, so that the purpose of reducing the volume of the device is realized, the device is convenient to use in narrow spaces such as a strong magnetic field, an extremely low temperature and the like, and the device has important significance in the measurement application of a limited space.)

1. An integrated terahertz generation and focusing device, comprising: the terahertz generation unit, the conversion unit, the focusing unit and the optical path pipeline; the optical path pipe includes: the pipeline comprises a middle pipeline which is horizontally arranged, and an input pipeline and an output pipeline which are respectively and vertically arranged at two ends of the middle pipeline;

the terahertz generation unit is used for generating terahertz waves and is fixed in the input port of the input pipeline;

the conversion unit is arranged on a light emitting path of the terahertz generation unit, and is used for splitting the parallel light beam into a first sub-parallel light beam and a second sub-parallel light beam with phase difference after the terahertz wave is converted into the parallel light beam, and guiding and emitting the first sub-parallel light beam and the second sub-parallel light beam to the focusing unit; wherein the conversion unit includes: the terahertz generation unit is arranged on a light emitting path of the terahertz generation unit and is fixed on the convex lens in the input pipeline; the third reflector is arranged on the light emitting path of the convex lens and fixed at the corner of the input pipeline and the middle pipeline; the beam splitter is arranged on the light emitting path of the third reflector and is fixed in the middle pipeline; the fourth reflector is arranged on a first beam splitting optical path of the beam splitter and fixed in the middle pipeline, and the phase adjusting subunit is arranged on a second beam splitting optical path of the beam splitter and fixed outside the middle pipeline, wherein the second beam splitting optical path corresponds to an optical path hole of the middle pipeline; the fourth reflector is used for guiding and emitting the first sub-parallel light beam to the focusing unit after reflecting the first sub-parallel light beam; and the phase adjustment subunit include: the displacement device drives the fifth reflector to displace so as to adjust the phase of the second sub-parallel light beams incident to the fifth reflector, and the fifth reflector reflects the second sub-parallel light beams to the focusing unit; the focusing unit is fixed outside the output port of the output pipeline;

the focusing unit is used for focusing the first sub-parallel light beam and the second sub-parallel light beam to a preset position.

2. The integrated terahertz generation and focusing apparatus of claim 1, further comprising: the beam splitter is arranged on the light emitting path of the filter lens, and the filter lens is fixed in the intermediate pipeline;

or, the integrated terahertz generation and focusing apparatus further comprises: set up in the last filter lens of convex lens's light-emitting optical path, the third speculum set up in the light-emitting optical path of filter lens, just the filter lens is fixed in the input pipeline.

3. The integrated terahertz generation and focusing device according to claim 2, wherein the optical path pipe is provided with a slit for fixing the component, wherein the terahertz generation unit, the convex lens, the third reflector, the beam splitter, the fourth reflector and the filter are inserted into the corresponding slits for fixing.

4. An integrated terahertz generation and focusing device, comprising: the terahertz generation unit, the conversion unit, the focusing unit and the optical path pipeline; the optical path pipe includes: the pipeline comprises a middle pipeline which is horizontally arranged, and an input pipeline and an output pipeline which are respectively and vertically arranged at two ends of the middle pipeline;

the terahertz generation unit is used for generating terahertz waves and is fixed in the input port of the input pipeline;

the conversion unit is arranged on a light emitting path of the terahertz generation unit and is used for guiding and emitting the parallel light beams to the focusing unit after the terahertz waves are converted into the parallel light beams; the terahertz generation unit is arranged on a light-emitting path of the terahertz generation unit and is fixed on a convex lens in the input pipeline, and the terahertz generation unit is positioned at the focus of the convex lens; the first reflector is arranged on a light emitting path of the convex lens and fixed at the corner of the input pipeline and the middle pipeline; the second reflecting mirror is arranged on the light emitting path of the first reflecting mirror and is fixed at the corner of the output pipeline and the middle pipeline; the focusing unit is arranged on the light-emitting path of the second reflecting mirror and fixed outside the output port of the output pipeline;

the focusing unit is used for focusing the parallel light beams to a preset position.

5. The integrated terahertz generation and focusing apparatus of claim 4, further comprising: the second reflecting mirror is arranged on the light-emitting path of the optical filter, and the optical filter is fixed in the intermediate pipeline;

or, the integrated terahertz generation and focusing apparatus further comprises: set up in the last filter of convex lens's light-emitting optical path, first speculum set up in the light-emitting optical path of filter, just the filter is fixed in the input pipeline.

6. The integrated terahertz generation and focusing device according to claim 5, wherein the optical path pipe is provided with a slit for fixing the component, wherein the terahertz generation unit, the convex lens, the first reflecting mirror, the second reflecting mirror and the optical filter are inserted into the corresponding slits and fixed.

7. An integrated terahertz generation and focusing device, comprising: the terahertz generation unit, the conversion unit, the focusing unit and the optical path pipeline; the optical path pipe includes: a vertical pipe;

the terahertz generation unit is used for generating terahertz waves and is fixed in the input port of the vertical pipeline;

the conversion unit is arranged on a light emitting path of the terahertz generation unit and is used for guiding and emitting the parallel light beams to the focusing unit after the terahertz waves are converted into the parallel light beams; wherein the conversion unit includes: the convex lens is arranged on a light emitting path of the terahertz generation unit and fixed in the vertical pipeline, and the terahertz generation unit is positioned at the focus of the convex lens; the focusing unit is arranged on a light emitting path of the convex lens and fixed outside the output port of the vertical pipeline;

the focusing unit is used for focusing the parallel light beams to a preset position.

8. The integrated terahertz generation and focusing apparatus of claim 7, further comprising: set up in filter on convex lens's the light-emitting optical path, the focus unit set up in filter's light-emitting optical path, just filter is fixed in the vertical pipeline.

9. The integrated terahertz generation and focusing device according to claim 8, wherein the optical path pipe is provided with a slit for fixing the component, wherein the terahertz generation unit, the convex lens and the filter are inserted into the corresponding slits for fixing.

10. A near-field terahertz scanning system, comprising:

the integrated terahertz generation and focusing device of any one of claims 1 to 9;

a sample stage;

the scanning probe microscope is used for focusing the parallel light beams to a probe tip of the scanning probe microscope in a scanning process;

and the integrated terahertz generation and focusing device, the sample stage and the scanning probe microscope are all fixed on the integral support.

Technical Field

The invention relates to the technical field of microscopic systems, in particular to an integrated terahertz generation and focusing device and a near-field terahertz scanning system.

Background

The existing terahertz wave imaging is influenced by the diffraction limit corresponding to the long wavelength, the resolution is lower than that of visible light, only has the magnitude order of several microns, and is far larger than the dimensions of micro-nano structure materials or biological tissues and cells, the requirement of high-precision observation cannot be met, along with the development of experimental physics, a near-field imaging method is developed, terahertz light is creatively combined with a scanning probe microscope, the diffraction limit can be broken through, and a sub-wavelength resolution image can be obtained.

Researchers hope to apply terahertz light in combination with scanning probe microscopy in narrow spaces: such as a magnet with small aperture or an environment with extremely low temperature and ultra-high vacuum, so as to achieve the purpose of testing the physical properties under extreme conditions. However, when the terahertz light and the scanning probe microscope are combined together, the existing terahertz generation optical path and the existing focusing optical path are both complex and large in occupied volume, and the combination mode is not suitable for being applied to a narrow space.

Disclosure of Invention

In view of this, the present invention provides an integrated terahertz generation and focusing device and a near-field terahertz scanning system, wherein a terahertz generation unit and a focusing unit are integrated by a conversion unit, so as to simplify the structure of the terahertz generation and focusing device, further reduce the volume thereof, and expand the application range thereof.

In order to achieve the purpose, the technical scheme provided by the invention is as follows:

an integrated terahertz generation and focusing device, comprising: the terahertz generation unit, the conversion unit, the focusing unit and the optical path pipeline; the optical path pipe includes: the pipeline comprises a middle pipeline which is horizontally arranged, and an input pipeline and an output pipeline which are respectively and vertically arranged at two ends of the middle pipeline;

the terahertz generation unit is used for generating terahertz waves and is fixed in the input port of the input pipeline;

the conversion unit is arranged on a light emitting path of the terahertz generation unit, and is used for splitting the parallel light beam into a first sub-parallel light beam and a second sub-parallel light beam with phase difference after the terahertz wave is converted into the parallel light beam, and guiding and emitting the first sub-parallel light beam and the second sub-parallel light beam to the focusing unit; wherein the conversion unit includes: the terahertz generation unit is arranged on a light emitting path of the terahertz generation unit and is fixed on the convex lens in the input pipeline; the third reflector is arranged on the light emitting path of the convex lens and fixed at the corner of the input pipeline and the middle pipeline; the beam splitter is arranged on the light emitting path of the third reflector and is fixed in the middle pipeline; the fourth reflector is arranged on a first beam splitting optical path of the beam splitter and fixed in the middle pipeline, and the phase adjusting subunit is arranged on a second beam splitting optical path of the beam splitter and fixed outside the middle pipeline, wherein the second beam splitting optical path corresponds to an optical path hole of the middle pipeline; the fourth reflector is used for guiding and emitting the first sub-parallel light beam to the focusing unit after reflecting the first sub-parallel light beam; and the phase adjustment subunit include: the displacement device drives the fifth reflector to displace so as to adjust the phase of the second sub-parallel light beams incident to the fifth reflector, and the fifth reflector reflects the second sub-parallel light beams to the focusing unit; the focusing unit is fixed outside the output port of the output pipeline;

the focusing unit is used for focusing the first sub-parallel light beam and the second sub-parallel light beam to a preset position.

Optionally, the integrated terahertz generation and focusing apparatus further includes: the beam splitter is arranged on the light emitting path of the filter lens, and the filter lens is fixed in the intermediate pipeline;

or, the integrated terahertz generation and focusing apparatus further comprises: set up in the last filter lens of convex lens's light-emitting optical path, the third speculum set up in the light-emitting optical path of filter lens, just the filter lens is fixed in the input pipeline.

Optionally, the optical path pipeline is provided with a slit for fixing the component, wherein the terahertz generating unit, the convex lens, the third reflector, the beam splitter, the fourth reflector and the filter lens are all inserted into the corresponding slit for fixing.

Correspondingly, the invention also provides an integrated terahertz generation and focusing device, which comprises: the terahertz generation unit, the conversion unit, the focusing unit and the optical path pipeline; the optical path pipe includes: the pipeline comprises a middle pipeline which is horizontally arranged, and an input pipeline and an output pipeline which are respectively and vertically arranged at two ends of the middle pipeline;

the terahertz generation unit is used for generating terahertz waves and is fixed in the input port of the input pipeline;

the conversion unit is arranged on a light emitting path of the terahertz generation unit and is used for guiding and emitting the parallel light beams to the focusing unit after the terahertz waves are converted into the parallel light beams; the terahertz generation unit is arranged on a light-emitting path of the terahertz generation unit and is fixed on a convex lens in the input pipeline, and the terahertz generation unit is positioned at the focus of the convex lens; the first reflector is arranged on a light emitting path of the convex lens and fixed at the corner of the input pipeline and the middle pipeline; the second reflecting mirror is arranged on the light emitting path of the first reflecting mirror and is fixed at the corner of the output pipeline and the middle pipeline; the focusing unit is arranged on the light-emitting path of the second reflecting mirror and fixed outside the output port of the output pipeline;

the focusing unit is used for focusing the parallel light beams to a preset position.

Optionally, the integrated terahertz generation and focusing apparatus further includes: the second reflecting mirror is arranged on the light-emitting path of the optical filter, and the optical filter is fixed in the intermediate pipeline;

or, the integrated terahertz generation and focusing apparatus further comprises: set up in the last filter of convex lens's light-emitting optical path, first speculum set up in the light-emitting optical path of filter, just the filter is fixed in the input pipeline.

Optionally, the optical path pipeline is provided with a slit for fixing the component, wherein the terahertz generating unit, the convex lens, the first reflecting mirror, the second reflecting mirror and the filter lens are all inserted into the corresponding slit for fixing.

Correspondingly, the invention also provides an integrated terahertz generation and focusing device, which is characterized by comprising: the terahertz generation unit, the conversion unit, the focusing unit and the optical path pipeline; the optical path pipe includes: a vertical pipe;

the terahertz generation unit is used for generating terahertz waves and is fixed in the input port of the vertical pipeline;

the conversion unit is arranged on a light emitting path of the terahertz generation unit and is used for guiding and emitting the parallel light beams to the focusing unit after the terahertz waves are converted into the parallel light beams; wherein the conversion unit includes: the convex lens is arranged on a light emitting path of the terahertz generation unit and fixed in the vertical pipeline, and the terahertz generation unit is positioned at the focus of the convex lens; the focusing unit is arranged on a light emitting path of the convex lens and fixed outside the output port of the vertical pipeline;

the focusing unit is used for focusing the parallel light beams to a preset position.

Optionally, the integrated terahertz generation and focusing apparatus further includes: set up in filter on convex lens's the light-emitting optical path, the focus unit set up in filter's light-emitting optical path, just filter is fixed in the vertical pipeline.

Optionally, the optical conduit is provided with a slit for fixing the component, wherein the terahertz generating unit, the convex lens and the filter lens are all inserted into the corresponding slit for fixing.

Correspondingly, the invention also provides a near-field terahertz scanning system, which comprises:

the integrated terahertz generation and focusing device is described above;

a sample stage;

the scanning probe microscope is used for focusing the parallel light beams to a probe tip of the scanning probe microscope in a scanning process;

and the integrated terahertz generation and focusing device, the sample stage and the scanning probe microscope are all fixed on the integral support.

Compared with the prior art, the technical scheme provided by the invention at least has the following advantages:

the invention provides an integrated terahertz generation and focusing device and a near-field terahertz scanning system, which comprise: the terahertz generation unit, the conversion unit, the focusing unit and the optical path pipeline; the terahertz generation unit is used for generating terahertz waves; the conversion unit is arranged on a light emitting path of the terahertz generation unit and is used for guiding and emitting the parallel light beams to the focusing unit after the terahertz waves are converted into the parallel light beams; the focusing unit is used for focusing the parallel light beams to a preset position, and the terahertz generating unit, the converting unit and the focusing unit are correspondingly fixed inside and outside the light path pipeline. According to the technical scheme provided by the invention, the components of the terahertz generating and focusing device are simplified, and the terahertz generating unit, the converting unit and the focusing unit are integrated and fixed through the optical path pipeline to realize integration, so that the purpose of reducing the volume of the device is finally realized, the device is convenient to use in narrow spaces such as a strong magnetic field, an extremely low temperature and the like, and the terahertz generating and focusing device has important significance in the measurement application of a limited space. Meanwhile, the integration of the device is realized through the optical path pipeline, the integrated terahertz generation is integrally fixed with the focusing device, the sample stage and the scanning probe microscope through the integral support, and on the basis of ensuring the firm integral structure of the device, the optical path deviation phenomenon caused by vibration and the like can be reduced, and the adverse effect during test measurement is reduced. The conversion unit provided by the invention can realize two modes of splitting and not splitting parallel beams; the mode without beam splitting can be suitable for test measurement without optical path delay; and for the mode of splitting the parallel light beams, the delay time of the light path is adjusted through the phase adjusting subunit, so as to meet the requirements of different test measurements.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.

Fig. 1 is a schematic structural diagram of an integrated terahertz generation and focusing apparatus according to an embodiment of the present disclosure;

fig. 2 is a schematic structural diagram of an integrated terahertz generation and focusing apparatus according to a second embodiment of the present application;

fig. 3 is a schematic structural diagram of an integrated terahertz generation and focusing apparatus according to a third embodiment of the present application;

fig. 4 is a schematic structural diagram of a near-field terahertz scanning system according to a fourth embodiment of the present application.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

As described in the background, researchers hope to apply terahertz light in conjunction with scanning probe microscopy in narrow spaces: such as a magnet with small aperture or an environment with extremely low temperature and ultra-high vacuum, so as to achieve the purpose of testing the physical properties under extreme conditions. However, when the terahertz light and the scanning probe microscope are combined together, the existing terahertz generation optical path and the existing focusing optical path are both complex and large in occupied volume, and the combination mode is not suitable for being applied to a narrow space.

Based on this, the embodiment of the application provides an integrated terahertz generation and focusing device and a near-field terahertz scanning system, wherein the terahertz generation unit and the focusing unit are integrated through the conversion unit, so that the structure of the terahertz generation and focusing device is simplified, the size of the terahertz generation and focusing device is further reduced, and the application range of the terahertz generation and focusing device is expanded. In order to achieve the above object, the technical solutions provided by the embodiments of the present application are described in detail below, specifically with reference to fig. 1 to 4.