阅读说明：本技术 一种用于光学元件的定位及姿态调整装置 (Positioning and attitude adjusting device for optical element ) 是由 郭海林 聂凤明 王大森 裴宁 李晓静 张广平 张旭 李维杰 于 2019-09-02 设计创作，主要内容包括：一种用于光学元件的定位及姿态调整装置,包括基板、初步定位机构、终定位机构和姿态调整结构,基板为左右平行设置二条,基板上设有导轨,基板上从下往上依次设有移动顶板、夹具顶板和顶板,移动顶板通过导轮可沿导轨自由移动；初步定位机构包括元件吊钩、套筒和螺母,夹具顶板通过定位销定位于移动顶板的上方,元件通过元件吊钩挂置在移动顶板的下方,通过套筒和螺母与移动顶板夹紧定位；终定位机构包括左侧顶轴和右侧顶轴；姿态调整结构包括调整丝套和锁紧螺母,调整丝套拧入顶板中,顶板通过螺钉固定于架体顶板上,通过微调调整丝套实现元件与X-Y平面的平行度。本发明不仅结构简单、成本低、操作方便,而且定位精度高、成本低、易于加工制造。(A positioning and posture adjusting device for an optical element comprises a base plate, a primary positioning mechanism, a final positioning mechanism and a posture adjusting structure, wherein the base plate is provided with two left and right parallel plates, a guide rail is arranged on the base plate, a moving top plate, a clamp top plate and a top plate are sequentially arranged on the base plate from bottom to top, and the moving top plate can freely move along the guide rail through a guide wheel; the preliminary positioning mechanism comprises an element lifting hook, a sleeve and a nut, the clamp top plate is positioned above the movable top plate through a positioning pin, the element is hung below the movable top plate through the element lifting hook and clamped and positioned with the movable top plate through the sleeve and the nut; the final positioning mechanism comprises a left top shaft and a right top shaft; the posture adjusting structure comprises an adjusting screw sleeve and a locking nut, the adjusting screw sleeve is screwed into the top plate, the top plate is fixed on the top plate of the frame body through screws, and the parallelism between the element and the X-Y plane is realized through fine adjustment of the adjusting screw sleeve. The invention has the advantages of simple structure, low cost, convenient operation, high positioning precision, low cost and easy processing and manufacturing.)

1. A positioning and attitude adjusting apparatus for an optical element, characterized in that: the device comprises a base plate, a preliminary positioning mechanism, a final positioning mechanism and an attitude adjusting structure of elements, wherein the base plate is provided with two strips which are arranged in parallel from left to right, a guide rail is arranged on the base plate along the length direction, a movable top plate, a clamp top plate and a top plate are sequentially arranged on the base plate from bottom to top, a guide wheel is arranged at the bottom of the movable top plate, and the movable top plate can freely move along the guide rail through the guide wheel;

the preliminary positioning mechanism comprises an element lifting hook, a sleeve and a nut, the clamp top plate is initially positioned above the movable top plate through a positioning pin, the element lifting hook vertically penetrates through the clamp top plate and the movable top plate, the element is hung below the movable top plate through the element lifting hook and is clamped and positioned with the bottom of the movable top plate through the sleeve and the nut;

the final positioning mechanism comprises a baffle plate arranged in the vacuum chamber and used for limiting the movable top plate, and a left side top shaft and a right side top shaft which are arranged on the left side and the right side of the clamp top plate, the device stops after moving to a stop block position, and the lifting and positioning of the clamp top plate are realized through the left-right movement of the left side top shaft and the right side top shaft;

the posture adjusting structure comprises an adjusting screw sleeve and a locking nut, the adjusting screw sleeve is screwed into the top plate, the top plate is fixed on the top plate of the frame body through screws, and the parallelism between the element and the X-Y plane is realized through fine adjustment of the adjusting screw sleeve.

2. The positioning and attitude adjustment apparatus according to claim 1, characterized in that: the guide rail is two about, and one of them is flat guide rail, and another is V type guide rail, and the guide rail passes through hexagon socket head cap screw and fixes on the base plate.

3. The positioning and attitude adjustment apparatus according to claim 2, characterized in that: the bottom four corners position of removing the roof is equipped with the bearing frame that is used for installing the guide pulley, and the upper end of bearing frame is fixed in the four corners position of removing the roof, is located the outside of guide rail, installs the bearing in the bearing frame, and it has the keyway to open on the guide pulley, and the guide pulley is connected with the guide pulley axle through the key, and the other end of guide pulley axle passes the bearing and rotationally installs on the bearing frame to compress tightly the location through the gland.

4. The positioning and attitude adjustment apparatus according to claim 3, characterized in that: the component lifting hooks are a plurality of and are uniformly distributed at the circumferential positions of the components, the lower ends of the component lifting hooks are turned and folded to form a platform for placing the bottom edges of the components, the upper ends of the component lifting hooks penetrate through the movable top plate and the clamp top plate and are locked through nuts, the sleeves are sleeved on the component lifting hooks, the lower ends of the sleeves abut against the upper end faces of the components, the upper ends of the sleeves abut against the bottoms of the movable top plate, and the pressing and positioning of the components and the movable top plate are achieved through the nuts.

5. The positioning and attitude adjustment apparatus according to claim 4, characterized in that: the locating pin is a cylindrical pin and a diamond-shaped pin, matched through holes are formed in the left side and the right side of the movable top plate, corresponding locating holes are formed in the clamp top plate, the clamp top plate is arranged on the movable top plate, and preliminary locating is achieved through the cylindrical pin and the diamond-shaped pin.

6. The positioning and attitude adjustment apparatus according to claim 1, characterized in that: the final positioning mechanism further comprises a left steel sleeve and a right steel sleeve, the left steel sleeve and the right steel sleeve are respectively arranged on the left side and the right side of the clamp roof and fixed with the base plate through screws, a through hole for the right top shaft to penetrate is formed in the right steel sleeve, the left end of the right top shaft is conical, a conical end inserted concave hole for the right top shaft is formed in the right side of the clamp roof, and lifting and positioning on the right side of the clamp roof are achieved through the cooperation of the conical end and the concave hole and the movement of the right top shaft.

7. The positioning and attitude adjustment apparatus according to claim 6, characterized in that: the right steel bushing and the right top shaft are 2 sets arranged in the front-back direction, the right end of a through hole of the right steel bushing is an expanded internal threaded hole, the left end of the right top shaft is conical, the middle of the right top shaft is cylindrical, the right end of the right top shaft is an expanded external threaded section, a through hole for a tool to be inserted into and convenient to rotate is formed in the tail end of the external threaded section hole, and the right top shaft is rotated to move left and right in the through hole.

8. The position and orientation adjustment apparatus according to claim 7, wherein: be equipped with a taper pin in the steel bushing of left side, the concave bell mouth that corresponds with the taper pin that is equipped with in left side of anchor clamps roof, the front end of taper pin stretches out the left side steel bushing and offsets with the left side bell mouth of anchor clamps roof, the left side apical axis is worn to put and is offset with the rear end hole of taper pin in the steel bushing of left side, the rear end of left side apical axis is equipped with portable location's elbow and presss from both sides, the cover is equipped with a spring on the apical axis of left side, spring support is between taper pin and left side apical axis, make the taper pin have the trend of tightly supporting with the left side bell mouth of anchor clamps roof all the time.

9. The positioning and attitude adjustment apparatus according to claim 8, characterized in that: a screw hole has been seted up to the rear end of taper pin, there is a keyway on the left side apical axis, screw hole department have with keyway complex holding screw, after the right side apical axis removes to target in place, pull the elbow and press from both sides, make the elbow press from both sides and be in the auto-lock position, the displacement that the elbow pressed from both sides passes through left side apical axis compression spring, the spring will exert oneself and transmit the taper pin, the taper hole that the taper pin inserted on the anchor clamps roof realizes the lifting, the location is pressed from both sides with pressing from both sides tightly, it presss from both sides to loosen the elbow, the displacement that the elbow pressed from both sides is transmitted for holding screw through the left side apical axis, holding screw transmits for.

10. The positioning and attitude adjustment apparatus according to any one of claims 1 to 9, characterized in that: adjustment silk braid, lock nut are four sets, and the adjustment silk braid has hollow external screw thread structure, and the afterbody of adjustment silk braid is square structure, and the internal thread hole that supplies adjustment silk braid to put into is seted up in the four corners of roof, and during the internal thread hole of roof was twisted to the adjustment silk braid, on interior hexagonal screw passed the hole of adjustment silk braid and is fixed in the support body roof with the roof, through 4 adjustment silk braids of fine setting, after reaching the depth of parallelism of requirement, it is fixed to screw up lock nut.

Technical Field

The invention relates to a positioning and posture adjusting device for an optical element, which is applied to ion beam polishing processing of a plane optical element in a vacuum environment.

Background

The principle of ion beam polishing removal is that accelerated gas ions collide with the surface of a material, atoms or molecules on the surface of the material are removed through momentum transfer, the surface of an element is removed, and the method has the characteristics of high precision, non-contact, no damage and the like, and is particularly suitable for manufacturing the surface of an ultra-smooth optical element. The ion beam polishing process requires that an optical element is firstly precisely positioned and adjusted in posture relative to an ion source, so that the precise control of technical parameters such as an ion beam polishing track, an incident angle and the like is ensured.

The clamping and positioning device adopted at present needs a motor to drive a worm, the worm drives a turbine to rotate, the lifting of elements is realized by combining a screw rod and a rotating nut, the defects of complex structure and higher cost exist, and the manufacturing and installation are troublesome.

Disclosure of Invention

The invention aims to provide a positioning and posture adjusting device for an optical element, which has the advantages of simple structure, high positioning precision, low cost and convenient operation.

The technical scheme adopted by the invention for solving the technical problems is as follows: a positioning and attitude adjusting apparatus for an optical element, characterized in that: the device comprises a base plate, a preliminary positioning mechanism, a final positioning mechanism and an attitude adjusting structure of elements, wherein the base plate is provided with two strips which are arranged in parallel from left to right, a guide rail is arranged on the base plate along the length direction, a movable top plate, a clamp top plate and a top plate are sequentially arranged above the guide rail from bottom to top, a guide wheel is arranged at the bottom of the movable top plate, and the movable top plate can freely move along the guide rail through the guide wheel;

the preliminary positioning mechanism comprises an element lifting hook, a sleeve and a nut, the clamp top plate is initially positioned above the movable top plate through a positioning pin, the element lifting hook vertically penetrates through the clamp top plate and the movable top plate, the element is hung below the movable top plate through the element lifting hook and is clamped and positioned with the bottom of the movable top plate through the sleeve and the nut;

the final positioning mechanism comprises a baffle plate arranged in the vacuum chamber and used for limiting the movable top plate, and a left side top shaft and a right side top shaft which are arranged on the left side and the right side of the clamp top plate, the device stops after moving to a stop block position, and the lifting and positioning of the clamp top plate are realized through the left-right movement of the left side top shaft and the right side top shaft;

the posture adjusting structure comprises an adjusting screw sleeve and a locking nut, the adjusting screw sleeve is screwed into the top plate, the top plate is fixed on the top plate of the frame body through screws, and the parallelism between the element and the X-Y plane is realized through fine adjustment of the adjusting screw sleeve.

As an improvement, the guide rails are arranged on the left and right, one of the guide rails is a flat guide rail, the other guide rail is a V-shaped guide rail, and the guide rails are fixed on the base plate through hexagon socket head cap screws.

As an improvement, the four corners of the bottom of the movable top plate are provided with bearing seats for mounting guide wheels, the upper ends of the bearing seats are fixed at the four corners of the movable top plate and positioned outside the guide rails, bearings are mounted in the bearing seats, key grooves are formed in the guide wheels, the guide wheels are connected with guide wheel shafts through keys, and the other ends of the guide wheel shafts penetrate through the bearings and are rotatably mounted on the bearing seats and are pressed and positioned through pressing covers.

And then, the improvement is that the element lifting hooks are a plurality of, the element lifting hooks are uniformly distributed at the circumferential positions of the elements, the lower ends of the element lifting hooks are folded to form a platform for placing the bottom edge of the elements, the upper ends of the element lifting hooks penetrate through the movable top plate and the clamp top plate and are locked through nuts, the sleeves are sleeved on the element lifting hooks, the lower ends of the sleeves abut against the upper end surfaces of the elements, the upper ends of the sleeves abut against the bottoms of the movable top plate, and the pressing and positioning of the elements and the movable top plate are realized through the nuts.

And the fixture is characterized in that the fixture comprises a fixture top plate, a fixture top plate and a positioning pin, wherein the fixture top plate is arranged on the fixture top plate, and the fixture top plate is arranged on the fixture top plate and is preliminarily positioned through the cylindrical pin and the diamond pin.

Further, final positioning mechanism still includes left side steel bushing and right side steel bushing, and left side steel bushing and right side steel bushing set up respectively in the left and right sides of anchor clamps roof, fixed through screw and base plate, have seted up the through-hole that supplies the right side apical axis to wear to put in the right side steel bushing, and the left end of right side apical axis is the toper, and the right side shaping of anchor clamps roof has the toper end male shrinkage pool that supplies the right side apical axis, through the removal of right side apical axis, the lifting and the location on anchor clamps roof right side are realized in toper end and shrinkage pool cooperation.

Furthermore, the right steel sleeve and the right top shaft are 2 sets arranged in the front and back, the right end of the through hole of the right steel sleeve is an expanded internal threaded hole, the left end of the right top shaft is conical, the middle of the right top shaft is cylindrical, the right end of the right top shaft is an expanded external threaded section, a through hole for a tool to be inserted into is formed in the tail end of the external threaded section hole, and the right top shaft can move left and right in the through hole through rotation.

Still further, be equipped with a taper pin in the steel bushing of left side, the left side of anchor clamps roof is concave to be equipped with the bell mouth that corresponds with the taper pin, the front end of taper pin stretches out the left side steel bushing and offsets with the left side bell mouth of anchor clamps roof, the left side apical axis is worn to put and is offset with the rear end hole of taper pin in the steel bushing of left side, the rear end of left side apical axis is equipped with movably positioned's elbow and presss from both sides, the cover is equipped with a spring on the apical axis of left side, spring support is between taper pin and left side apical axis for the taper pin has the trend of tightly supporting with the left side bell mouth of anchor clamps roof all the time.

Still further, a screw hole has been seted up to the rear end of taper pin, there is a keyway on the left side apical axis, screw hole department have with keyway complex holding screw, after the right side apical axis removes to target in place, pull the elbow clamp, make the elbow clamp be in the auto-lock position, the displacement that the elbow pressed from both sides passes through left side apical axis compression spring, the spring will exert oneself and transmit the taper pin, the taper hole that the taper pin inserted on the anchor clamps roof realizes the lifting, fix a position and press from both sides tightly, it presss from both sides to loosen the elbow, the displacement that the elbow pressed from both sides transmits for holding screw through left side apical axis, holding screw transmits for the taper pin, deviate from the taper hole on the anchor clamps roof.

Finally, adjustment silk braid, lock nut are four sets, and the adjustment silk braid has hollow external screw thread structure, and the afterbody of adjustment silk braid is square structure, and the internal thread hole that supplies adjustment silk braid to put into is seted up in the four corners of roof, and during the internal thread hole of roof was twisted to the adjustment silk braid, on the interior hexagonal screw passed the hole of adjustment silk braid and is fixed in the support body roof with the roof, through 4 adjustment silk braids of fine setting, after reaching the depth of parallelism of requirement, it is fixed to screw up lock nut.

Compared with the prior art, the invention has the advantages that:

(1) the conveying device is moved on the guide rail through the guide wheel, so that the operation is convenient;

(2) the posture of the element is adjusted by adjusting the adjusting screw sleeve, and the parallelism of the element and an X-Y plane is ensured;

(3) the conical pin is adopted to realize the positioning and lifting of the element, and the precision is high;

the invention has the advantages of simple structure, low cost, convenient operation, high positioning precision, low cost and easy processing and manufacturing, and is applied to the ion beam polishing processing of the plane optical element in a vacuum environment.

Drawings

FIG. 1 is a front view of the present invention;

FIG. 2 is a top view of the present invention;

FIG. 3 is a cross-sectional view taken along A-A of FIG. 1;

FIG. 4 is an enlarged view of a portion of region C of FIG. 2;

FIG. 5 is an enlarged view of a portion of the area D in FIG. 2;

fig. 6 is a partially enlarged view of the region B in fig. 1.

Detailed Description

The invention is described in further detail below with reference to the accompanying examples.

As shown in fig. 1 to 6, a positioning and posture adjusting device for an optical element includes a substrate 1, and a preliminary positioning mechanism, a final positioning mechanism and a posture adjusting structure of an element 40, the substrate 1 is two parallel left and right, a longitudinal section of the substrate 1 is L-shaped, a guide rail 1.1 is arranged on each substrate 1 along a length direction, one of the guide rails is a flat guide rail, the other is a V-shaped guide rail, and the guide rail 1.1 is fixed on the substrate 1 by a hexagon socket head cap screw. The top of guide rail 1.1 is equipped with removal roof 5, anchor clamps roof 6 and roof 11 from up in proper order down, and the bottom of removing roof 5 is equipped with guide pulley 2, and removal roof 5 can follow guide rail 1.1 free movement through guide pulley 2. Guide pulley 2 is four, and the bottom four corners position of removing roof 5 is equipped with the bearing frame 3 that is used for installing guide pulley 2, and the upper end of bearing frame 3 is fixed in the four corners position of removing roof 5, is located the outside of guide rail 1.1, installs the bearing in the bearing frame 3, and it has the keyway to open on the guide pulley 2, and guide pulley 2 is connected with guide pulley shaft 2.1 through the key, and the other end of guide pulley shaft 2.1 passes the bearing and rotationally installs on bearing frame 3 to compress tightly the location through gland 4.

Preliminary positioning mechanism includes component lifting hook 7, sleeve 8 and nut 9, anchor clamps roof 6 is just positioned in the top of removal roof 5 through locating pin 10, component lifting hook 7 is the several of equipartition in the circumferential position of component 40, component lifting hook 7 vertically runs through anchor clamps roof 6 and removal roof 5, the lower extreme of component lifting hook 7 is turned over and is formed with the platform 71 that supplies the bottom edge of component 40 to shelve, the upper end of component lifting hook 7 passes removal roof 5, anchor clamps roof 6 is through the locking of nut 9, sleeve 8 cover is established outside component lifting hook 7, the lower extreme of sleeve 8 offsets with the up end of component 40, the upper end offsets with the bottom of removal roof 5, component 40 hangs through component lifting hook 7 and puts in the below of removal roof 5, realize compressing tightly the location with removal roof 5 through sleeve 8 and nut 9. The locating pin 10 is a cylindric lock and a rhombus round pin, and supporting through-hole has been seted up to the left and right sides of removing roof 5, has seted up corresponding locating hole on the anchor clamps roof 6, and anchor clamps roof 6 sets up on removing roof 5, through cylindric lock and rhombus round pin preliminary location.

The final positioning mechanism comprises a baffle 30 arranged in a vacuum chamber and used for limiting the moving top plate 5, a left top shaft 17 and a right top shaft 21 which are arranged on the left side and the right side of the fixture top plate 6, the device stops after moving to the position of a stop block 30, and the fixture top plate 6 is lifted and positioned by moving left and right of the left top shaft 17 and the right top shaft 21. The final positioning mechanism further comprises a left steel sleeve 15 and a right steel sleeve 20, the left steel sleeve 15 and the right steel sleeve 20 are respectively arranged on the left side and the right side of the clamp top plate 6 and are fixed with the base plate 1 through screws, the right steel sleeve 20 and the right top shaft 21 are 2 sets arranged in the front and the back, a through hole for the right top shaft 21 to penetrate is formed in the right steel sleeve 20, the right end of the through hole is an expanded internal thread hole, a through hole 211 for inserting a tool into the through hole to facilitate rotation is formed in the tail end of the external thread hole, the right top shaft 21 rotates to move left and right, and the conical end is matched with the concave hole to lift and position the right side of the clamp top. A taper pin 16 is arranged in the left steel sleeve 15, a taper hole corresponding to the taper pin 16 is concavely arranged on the left side of the clamp top plate 6, the front end of the taper pin 16 extends out of the left steel sleeve 15 and is abutted against the left taper hole of the clamp top plate 6, a left top shaft 17 penetrates through the left steel sleeve 15 and is abutted against an inner hole at the rear end of the taper pin 16, a movably positioned elbow clamp 18 is arranged at the rear end of the left top shaft 17, a spring 19 is sleeved on the left top shaft 17 and supported between the taper pin 16 and the left top shaft 17, so that the taper pin 16 has the tendency of always abutting against the left taper hole of the clamp top plate 6, a threaded hole is arranged at the rear end of the taper pin 16, a key groove is arranged on the left top shaft 17, a set screw 161 matched with the key groove is arranged at the threaded hole, when the right top shaft 17 moves to the right top shaft 17, the elbow clamp 18 is pulled to be in a self-locking position, the displacement of the elbow clamp 18 compresses the spring 19 through, the spring 19 transmits force to the taper pin 16, the taper pin 16 is inserted into a taper hole on the clamp top plate 6 to realize lifting, positioning and clamping, the elbow clamp 18 is released, the displacement of the elbow clamp 18 is transmitted to the set screw 161 through the left top shaft 17, the set screw 161 is transmitted to the taper pin 16, the taper hole on the clamp top plate 6 is removed, and the clamp top plate 6 is released.

The posture adjusting structure comprises an adjusting screw sleeve 12, a locking nut 13 and an inner hexagonal screw 14, the adjusting screw sleeve 12, the locking nut 13 and the inner hexagonal screw 14 are four sets, the adjusting screw sleeve 12 is provided with a hollow external thread structure, the tail part of the adjusting screw sleeve 12 is of a square structure, internal thread holes for the adjusting screw sleeve 12 to be placed in are formed in four corners of the top plate 11, the adjusting screw sleeve 12 is screwed into the internal thread holes of the top plate, the inner hexagonal screw 14 penetrates through an inner hole of the adjusting screw sleeve 12 to fix the top plate 11 on a top plate of a frame body, the locking nut 13 is screwed to be fixed after the required parallelism is achieved by finely adjusting 4 adjusting screw sleeves 12, and therefore the parallelism between the element 40 and an X-Y plane is achieved by finely adjusting the adjusting screw sleeve 12, namely the relative posture between the element and an ion source.

The specific operation is as follows:

when loading, firstly, the movable top plate 5 is moved out of the vacuum chamber through the guide wheel 2, then the element hook 7 is unscrewed, the optical element 40 is placed on the platform 71 of the element hook 7, the sleeve 8 is used for pressing the upper surface of the element 40, and the nut 9 is screwed down, so that the element 40 is fixed on the clamp top plate 6; then, placing the clamp top plate 6 on the movable top plate 5, and realizing initial positioning through two positioning pins 10 (cylindrical pins and diamond-shaped pins); pushing the clamp top plate 6 and the movable top plate 5 into the vacuum chamber until the clamp top plate and the movable top plate meet the stop block 30 and then stopping; screwing the right top shaft 21 until the front end face of the right top shaft 21 is aligned with the end face of the side of the clamp top plate 6, and turning the toggle clamp 18 to enable the conical pin 16 to be inserted into the conical hole of the clamp top plate 6, so that the element 40 is positioned, lifted and clamped; the unloading process is opposite to the loading process.