阅读说明：本技术 真空吸附装置 (Vacuum adsorption device ) 是由 王建新 于 2019-09-27 设计创作，主要内容包括：本发明涉及一种真空吸附装置,包括水环真空泵,所述水环真空泵包括入气口,所述水环真空泵的入气口侧设置有通过第一管道连接于所述入气口的气液分离结构。通过设置在水环真空泵入气口侧的气液分离结构,将随着气体吸入的液体被分离出来,从而避免被污染的液体进入到水环真空泵中,这样水环真空泵中的水封用水不必直接排出、可循环使用,避免水资源的浪费,且降低成本。(The invention relates to a vacuum adsorption device which comprises a water ring vacuum pump, wherein the water ring vacuum pump comprises an air inlet, and a gas-liquid separation structure connected with the air inlet through a first pipeline is arranged on the air inlet side of the water ring vacuum pump. Through setting up the gas-liquid separation structure of going into the gas port side at water ring vacuum pump, will be followed gas suction's liquid and be separated out to avoid contaminated liquid to enter into water ring vacuum pump, water seal water in the water ring vacuum pump needn't directly discharge like this, circulated use avoids the waste of water resource, and reduce cost.)

1. The utility model provides a vacuum adsorption device, includes water ring vacuum pump, its characterized in that, water ring vacuum pump includes the income gas port, water ring vacuum pump's income gas port side be provided with through first pipe connection in the gas-liquid separation structure of income gas port.

2. The vacuum adsorption device according to claim 1, wherein the gas-liquid separation structure comprises a body having a receiving cavity, an inlet and an outlet are provided on a sidewall of an upper half of the body, the inlet is connected to the structure to be adsorbed via a second pipeline, and the outlet is communicated with the first pipeline.

3. The vacuum adsorption device of claim 2, further comprising a liquid storage tank, wherein a liquid outlet is arranged at the bottom of the body, and the liquid outlet is communicated with the liquid storage tank through a third pipeline.

4. The vacuum adsorption device of claim 3, wherein the first conduit is provided with a first valve and the third conduit is provided with a second valve.

5. The vacuum adsorption device of claim 4, wherein the first valve and/or the second valve is a solenoid valve.

6. The vacuum chucking device of claim 3, wherein said water ring vacuum pump includes a first water inlet and a water discharge outlet, said vacuum chucking device further comprising a water supply tank including a second water inlet communicating with said water discharge outlet.

7. Vacuum adsorption unit according to claim 2, characterized in that the outlet of the body is provided with a filter structure for filtering impurities.

8. The vacuum chucking device of claim 7, wherein the filter structure includes a filter screen.

Technical Field

The invention relates to the technical field of vacuum adsorption, in particular to a vacuum adsorption device.

Background

In the edge polishing and final polishing of a silicon wafer or in an equipment process for adsorbing a wafer (silicon wafer) by using vacuum, a water ring vacuum pump is generally adopted as a vacuum generating device for adsorbing the silicon wafer, slurry/UPW/DIW/chemical (slurry/ultrapure water/deionized water/chemical product) and the like are inevitably sucked into the water ring vacuum pump at the same time, the sucked liquid is mixed into tap water for water sealing, so that the tap water for water sealing cannot be recycled, drain is generally directly performed, the water consumption of the common water sealing is 5-10 LPM, the supply and drain costs are increased, and the waste of water resources is caused.

Disclosure of Invention

In order to solve the technical problem, the invention provides a vacuum adsorption device, which solves the problem that polluted liquid sucked along with gas pollutes water for water sealing when a water sealing vacuum pump performs vacuum adsorption.

In order to achieve the purpose, the invention adopts the technical scheme that: the utility model provides a vacuum adsorption device, includes water ring vacuum pump, water ring vacuum pump includes into the gas port, water ring vacuum pump's income gas port side be provided with through first pipe connection in go into the gas-liquid separation structure of gas port.

Optionally, the gas-liquid separation structure includes a body having a receiving cavity, an inlet and an outlet are provided on a sidewall of the upper half of the body, the inlet is connected to the structure to be adsorbed through a second pipeline, and the outlet is communicated to the first pipeline.

Optionally, still include the liquid reserve tank, the bottom of body is provided with the liquid outlet, the liquid outlet pass through the third pipeline with the liquid reserve tank intercommunication.

Optionally, a first valve is arranged on the first pipeline, and a second valve is arranged on the third pipeline.

Optionally, the first valve and/or the second valve is a solenoid valve.

Optionally, the water ring vacuum pump includes a first water inlet and a water outlet, and the vacuum adsorption device further includes a water supply tank including a second water inlet communicated with the water outlet.

Optionally, a filtering structure for filtering impurities is arranged at the outlet of the body.

Optionally, the filter structure comprises a filter screen.

The invention has the beneficial effects that: through setting up the gas-liquid separation structure of going into the gas port side at water ring vacuum pump, will be followed gas suction's liquid and be separated out to avoid contaminated liquid to enter into water ring vacuum pump, water seal water in the water ring vacuum pump needn't directly discharge like this, circulated use avoids the waste of water resource, and reduce cost.

Drawings

Fig. 1 is a schematic view showing a structure of a vacuum adsorption apparatus in the related art;

FIG. 2 is a first schematic structural diagram of a vacuum adsorption apparatus according to an embodiment of the present invention;

fig. 3 is a schematic structural diagram of a vacuum adsorption device in an embodiment of the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings of the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the invention, are within the scope of the invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

As shown in fig. 1, the water ring vacuum pump 1 is adopted for vacuum adsorption, liquid which can be inevitably sucked into the water ring vacuum pump 1 along with gas, when silicon wafers and the like are adsorbed, the liquid which enters the water ring vacuum pump 1 along with the gas is polluted, the liquid generally comprises chemicals, slurry and the like, the polluted liquid is mixed into the water for water sealing of the water ring vacuum pump 1, so that the water for water sealing can not be continuously used, the water can only be completely discharged to the drainage box 2 through the drainage outlet, and the water is supplied to the water ring vacuum pump 1 again, the cost of water supply and drainage is increased, and the waste of water resources is caused.

To above-mentioned technical problem, this embodiment provides a vacuum adsorption device, sets up the gas-liquid separation structure in the income gas port side of water ring vacuum pump, prevents that liquid from the income gas port of water ring vacuum pump getting into inside the water ring vacuum pump to avoided the emergence of the contaminated phenomenon of water seal water consumption of water ring vacuum pump, water seal water consumption of water ring vacuum pump can continue to use, saves the water resource, reduces frequently to supply water, the cost of drainage for the water seal vacuum pump, has improved vacuum adsorption efficiency.

Specifically, as shown in fig. 2, the vacuum adsorption device provided in this embodiment includes a water ring vacuum pump 1, the water ring vacuum pump 1 includes an air inlet, and an air inlet side of the water ring vacuum pump 1 is provided with a gas-liquid separation structure 2 connected to the air inlet through a first pipeline 4.

The specific structural style of the gas-liquid separation structure 2 can be various, in this embodiment, the gas-liquid separation structure 2 includes a body having a containing cavity, an inlet and an outlet which are communicated with the containing cavity are arranged on the side wall of the upper half portion of the body, the inlet is connected with the structure to be adsorbed through a second pipeline, and the outlet is connected with the first pipeline 4.

The liquid is made of weight, the inlet and the outlet are arranged on the upper half part of the body, and when the liquid enters the body along with the gas, the liquid descends due to the gravity of the liquid, so that the liquid is gathered at the bottom of the accommodating cavity, and the gas-liquid separation is realized.

In one embodiment, the inlet and the outlet are both disposed at the top of the body for effective gas-liquid separation.

In this embodiment, the vacuum adsorption device still includes liquid reserve tank 3, the bottom of body is provided with the liquid outlet, the liquid outlet through third pipeline 5 with liquid reserve tank 3 intercommunication.

Collect the liquid that separates through liquid reserve tank 3, avoid the polluted environment, just the liquid outlet sets up the bottom of body does benefit to gather in the discharge of the liquid that holds the cavity bottom.

The material of the liquid storage tank 3 may be stainless steel, so as to prolong the service life of the liquid storage tank 3, but not limited thereto.

In this embodiment, the first pipeline 4 is provided with a first valve 6, and the third pipeline 5 is provided with a second valve 7.

When the first valve 6 is opened, vacuum adsorption is carried out, liquid sucked by gas reaches the gas-liquid separation structure 2, descends due to self gravity and is gathered at the bottom of the accommodating cavity, after the vacuum adsorption is finished, the first valve 6 is closed, at the moment, the second valve 7 is opened, the liquid in the body can be discharged, and when the first valve 6 is opened again, the second valve 7 is closed, and the liquid is continuously collected.

The second valve 7 is arranged to facilitate cleaning of the liquid in the liquid storage tank 3 so as to prevent the liquid in the liquid storage tank 3 from overflowing.

The specific structural form of the first valve 6 and the second valve 7 may be various, as long as the first valve 6 can achieve the on/off of the first pipeline 4, and the second valve 7 can achieve the on/off of the third pipeline 5, in this embodiment, the first valve 6 and/or the second valve 7 are electromagnetic valves, but is not limited thereto.

The first valve 6 and the second valve 7 both adopt electromagnetic valves, so that the automatic on/off operation of the first pipeline 4 and the third pipeline 5 is realized, and the efficiency is improved.

In this embodiment, as shown in fig. 3, the water ring vacuum pump 1 includes a first water inlet and a water outlet, the vacuum adsorption apparatus further includes a water supply tank 8, and the water supply tank 8 includes a second water inlet connected to the water outlet.

The water supply tank 8 further comprises a water supply port communicated with the first water inlet, and the height of the water supply port is lower than that of the second water inlet, so that water for water sealing of the water ring vacuum pump 1 can be recycled, and water resources are saved.

After water ring vacuum pump 1 operated a period, the temperature can rise, influences water ring vacuum pump's vacuum, and reduces water ring vacuum pump's life, to this technical problem, in this embodiment, supply tank 8 with set up cooling structure between the water ring vacuum pump 1 for reduce water ring vacuum pump cycling water's temperature, extension water ring vacuum pump's life.

The specific structure of the cooling structure may be various, for example, the cooling structure may employ a heat exchanger, but is not limited thereto.

In this embodiment, the exit of body is provided with the filtration that is used for filtering impurity.

The setting of filtration can prevent that particulate matter impurity from entering into water ring vacuum pump 1, it is right water ring vacuum pump 1 plays the guard action, extension water ring vacuum pump 1's life.

The specific structural form of the filtering structure may be various, and in this embodiment, the filtering structure includes a filtering net, but is not limited thereto.

In this embodiment, as shown in fig. 3, for further water conservation resource, the liquid reserve tank 3 with can set up filtration 9 between the storage water tank of water ring vacuum pump 1 to filter the waste liquid of the liquid in the liquid reserve tank 3, with the water that satisfies the requirement of the water seal water of water ring vacuum pump 1 is separated out in the liquid from liquid reserve tank 3, realize the waste liquid and recycle.

While the foregoing is directed to the preferred embodiment of the present invention, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined by the appended claims.