Triaxial high-range acceleration sensor lateral sensitivity ratio testing device
阅读说明：本技术 一种三轴高量程加速度传感器横向灵敏度比测试装置 (Triaxial high-range acceleration sensor lateral sensitivity ratio testing device ) 是由 郑宇� 方岚 李苏苏 明源 于 2019-10-10 设计创作，主要内容包括：本发明公开一种三轴高量程加速度传感器横向灵敏度比测试装置,包括沿X轴向设置的撞击体与霍普金森杆,霍普金森杆的尾部设置待测的传感器,传感器的X轴、Y轴与Z轴分别对应设置有X轴激光多普勒分析仪、Y轴激光多普勒分析仪与Z轴激光多普勒分析仪；所述测试装置还包括通讯连接的数据采集卡与工控机,三个激光多普勒分析仪的输出端分别连接数据采集卡；通过在三个方向上安装激光多普勒分析仪实现三个方向上同步的加速度测量,实现传感器的横向灵敏度比测试。(The invention discloses a device for testing the transverse sensitivity ratio of a three-axis high-range acceleration sensor, which comprises an impact body and a Hopkinson bar which are arranged along the X axis direction, wherein a sensor to be tested is arranged at the tail part of the Hopkinson bar, and an X-axis laser Doppler analyzer, a Y-axis laser Doppler analyzer and a Z-axis laser Doppler analyzer are respectively and correspondingly arranged on the X axis, the Y axis and the Z axis of the sensor; the testing device also comprises a data acquisition card and an industrial personal computer which are in communication connection, and the output ends of the three laser Doppler analyzers are respectively connected with the data acquisition card; the laser Doppler analyzers are arranged in the three directions to realize synchronous acceleration measurement in the three directions, so that the transverse sensitivity ratio test of the sensor is realized.)
1. A device for testing the transverse sensitivity ratio of a three-axis high-range acceleration sensor is characterized by comprising an impact body and a Hopkinson bar which are arranged along the X-axis direction, wherein a sensor to be tested is arranged at the tail part of the Hopkinson bar, and an X-axis laser Doppler analyzer, a Y-axis laser Doppler analyzer and a Z-axis laser Doppler analyzer are respectively and correspondingly arranged on the X-axis, the Y-axis and the Z-axis of the sensor; the testing device also comprises a data acquisition card and an industrial personal computer which are in communication connection, and the output ends of the three laser Doppler analyzers are respectively connected with the data acquisition card; the synchronous acceleration measurement in three directions is realized by installing laser Doppler analyzers in the three directions;
the industrial personal computer controls the impact body to impact the Hopkinson bar along the X axis, acceleration stress waves generated in the Hopkinson bar are transmitted to the sensor to be tested, three laser Doppler analyzers respectively measure acceleration signals of the sensor in three axial directions synchronously, data are sent to the industrial personal computer through the data acquisition card, and the industrial personal computer compares the signals in the X axis direction with the signals in the Y axis direction and the Z axis direction to realize the test of the transverse sensitivity ratio of the sensor.
Technical Field
The invention relates to the technical field of accelerometer testing, in particular to a device for testing the transverse sensitivity ratio of a three-axis high-range acceleration sensor.
Background
The triaxial high-range MEMS acceleration sensor is a high-precision sensor, each sensor needs to be tested and calibrated in a laboratory before actual use, and as the three axial directions of the sensor have the measurement function and the cross coupling among the axial directions needs to be as small as possible, the transverse sensitivity between the sensor shafts is more important than the bottom touch test in the laboratory stage.
At present, the test of the transverse sensitivity ratio between the axes can only be completed by a method for respectively testing three axial sensitivities in a laboratory, and the method has certain disadvantages: firstly, the sensitivity of a non-sensitive direction is generally very small, the output voltage responded when the impact in the sensitive direction is sensed is very low, and a useful signal is difficult to test without being followed by a synchronous signal; the transverse sensitivity ratios of the second and the third axial directions need to be tested independently, and the axial angle of each installation is difficult to control accurately; and thirdly, the efficiency of the single test is lower.
Disclosure of Invention
The invention aims to provide a device for testing the transverse sensitivity ratio of a three-axis high-range acceleration sensor, which can test the transverse sensitivity ratio of three axial directions at one time, and has high efficiency and easy control.
The technical scheme adopted by the invention for solving the technical problems is as follows:
a device for testing the transverse sensitivity ratio of a three-axis high-range acceleration sensor comprises an impact body and a Hopkinson bar which are arranged along the X-axis direction, wherein a sensor to be tested is arranged at the tail part of the Hopkinson bar, and an X-axis laser Doppler analyzer, a Y-axis laser Doppler analyzer and a Z-axis laser Doppler analyzer are respectively and correspondingly arranged on the X-axis, the Y-axis and the Z-axis of the sensor; the testing device also comprises a data acquisition card and an industrial personal computer which are in communication connection, and the output ends of the three laser Doppler analyzers are respectively connected with the data acquisition card;
the industrial personal computer controls the impact body to impact the Hopkinson bar along the X axis, acceleration stress waves generated in the Hopkinson bar are transmitted to the sensor to be tested, three laser Doppler analyzers respectively measure acceleration signals of the sensor in three axial directions synchronously, data are sent to the industrial personal computer through the data acquisition card, and the industrial personal computer compares the signals in the X axis direction with the signals in the Y axis direction and the Z axis direction to realize the test of the transverse sensitivity ratio of the sensor.
The laser Doppler acceleration measuring device has the advantages that the Hopkinson bar is used as a carrier, and the laser Doppler analyzers are mounted in three directions to realize synchronous acceleration measurement in the three directions; during sensitive axial measurement, acceleration signals of the sensitive axial direction can be used as trigger signals, after the sensitive axial direction is triggered, the other two non-sensitive axial directions simultaneously acquire signal outputs of the acceleration sensors in the non-sensitive direction, and the acquired signal outputs in the non-sensitive direction are compared with the signal outputs in the sensitive direction, so that the transverse sensitivity ratio of the sensors is obtained.
Drawings
The invention is further illustrated with reference to the following figures and examples:
FIG. 1 is a schematic of the present invention.
Detailed Description
As shown in fig. 1, the invention provides a device for testing the lateral sensitivity ratio of a three-axis high-range acceleration sensor, which comprises an impactor 1 and a hopkinson rod 2 which are arranged along the X axis direction, wherein a
The industrial
The Hopkinson bar 2 can be made of a superhard titanium alloy bar with the diameter of 18mm and the length of 2000mm, and the pulse width range of the acceleration waveform can be widened by enough length. When the impact body 1 impacts the Hopkinson bar 2, an acceleration stress wave is generated in the Hopkinson bar 2, and when the stress wave is transmitted to the acceleration sensor to be detected, the three laser Doppler analyzers rapidly respond and output corresponding voltage values, and the voltage values are collected and input into the industrial
The measurement principle of the laser Doppler analyzer is as follows: the light beam emitted by He-Ne laser is passed through conversion lens, then divided into two parallel light beams by beam splitter prism, and passed through convergence lens, and converged on the grating plane stuck on the surface of mounting seat. The diffraction beam emitted by the excitation grating reaches the surface of the photoelectric converter through the reflector system, and a Doppler frequency shift signal generated by the movement of the grating is detected.
According to the Doppler principle, the acceleration sensor is calibrated to have a time function of the velocity when subjected to an impulsive motion
in formula (1):
The acceleration of the impact motion can be obtained by differentiating the formula (1)
According to the peak value of the voltage of the acceleration sensor, the sensitivity of the detected acceleration sensor can be accurately obtained:
in formula (2):
The three axial acceleration measurements are that a single axial acceleration measurement device is simultaneously arranged in the direction of the other two non-sensitive axes, so that during the sensitive axial measurement, the acceleration signal of the sensitive axial direction can be used as a trigger signal, after the sensitive axial direction is triggered, the other two non-sensitive axes simultaneously acquire the signal output of the acceleration sensor in the non-sensitive direction, and the acquired signal output in the non-sensitive direction is compared with the signal output in the sensitive direction, so that the test of the inter-axis transverse sensitivity ratio can be realized.
The high-range laser Doppler analyzer is used for measuring the speed and the acceleration of a high-speed linear moving target in a high-precision manner based on the laser Doppler principle, can be matched with an impact body and a Hopkinson bar, and realizes one-time impact calibration of a reference standard accelerometer, a transmission standard accelerometer, a working accelerometer and an impact measurement system, and is also commonly used for field calibration of the high accelerometer and strong impact test of various test fields.
The testing device of the invention adopts a laser Doppler measurement method, takes a diffraction grating as a cooperative target, fundamentally avoids the problem of Doppler signal random phase deviation caused by scattering particles inherent in a common differential laser interferometer, and obtains the impact sensitivity of the accelerometer to be calibrated by comparing the basic quantity-length (wavelength of laser) and time (clock of a digital acquisition device) -absolute recurrence of the impact acceleration measurement value of the metrology as an acceleration standard value, thereby completing the calibration of the acceleration measurement value.
The foregoing is merely a preferred embodiment of the invention and is not intended to limit the invention in any manner; those skilled in the art can make numerous possible variations and modifications to the present teachings, or modify equivalent embodiments to equivalent variations, without departing from the scope of the present teachings, using the methods and techniques disclosed above. Therefore, any simple modification, equivalent replacement, equivalent change and modification made to the above embodiments according to the technical essence of the present invention are still within the scope of the protection of the technical solution of the present invention.
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