阅读说明：本技术 一种光电探测器光敏面中心精确测量装置及方法 (Device and method for accurately measuring center of photosensitive surface of photoelectric detector ) 是由 张勇 王斌 马军伟 李群 王文仲 赵宗哲 韩文进 于 2019-09-09 设计创作，主要内容包括：本发明提供了一种光电探测器光敏面中心精确测量装置及方法,包括显微镜,还包括与显微镜配合使用的双竖轴组合检测装置,所述双竖轴组合检测装置包括从上至下依次连接的上竖轴盖、竖轴套和下竖轴座,所述上竖轴盖、竖轴套和下竖轴座均同轴。本发明主要针对双四象限光电探测器光敏面中心相对装配基准轴偏离量大和同轴度测量难题,可实现自动确定中心和准确定位。本发明提供的光电探测器光敏中心精确检测方法,通过修切消除带环光电探测器部件原方案装配过程产生的基准转换误差,剔除了器件制造基准与光敏面中心测量的基准轴之间偏离误差,既能满足超差器件的装配要求,又能消除原装配过程的基准转换误差。(The invention provides a device and a method for accurately measuring the center of a photosensitive surface of a photoelectric detector, which comprises a microscope and a double-vertical-shaft combined detection device matched with the microscope, wherein the double-vertical-shaft combined detection device comprises an upper vertical shaft cover, a vertical shaft sleeve and a lower vertical shaft seat which are sequentially connected from top to bottom, and the upper vertical shaft cover, the vertical shaft sleeve and the lower vertical shaft seat are coaxial. The invention mainly aims at the problems of large deviation of the center of the photosensitive surface of the double four-quadrant photoelectric detector relative to the assembly reference axis and coaxiality measurement, and can realize automatic center determination and accurate positioning. According to the method for accurately detecting the photosensitive center of the photoelectric detector, provided by the invention, the reference conversion error generated in the original scheme assembly process of the part with the photoelectric detector is eliminated by trimming, and the deviation error between the manufacturing reference of the device and the reference axis measured by the center of the photosensitive surface is eliminated, so that the assembly requirement of an out-of-tolerance device can be met, and the reference conversion error in the original assembly process can be eliminated.)

1. The utility model provides a photosensitive center accurate detection device of photoelectric detector, includes the microscope, its characterized in that: the microscope is characterized by further comprising a double-vertical-shaft combined detection device matched with the microscope, wherein the double-vertical-shaft combined detection device comprises an upper vertical shaft cover (22), a vertical shaft sleeve (21) and a lower vertical shaft seat (20) which are sequentially connected from top to bottom, and the upper vertical shaft cover (22), the vertical shaft sleeve (21) and the lower vertical shaft seat (20) are all coaxial.

2. The device for accurately measuring the center of the light-sensitive surface of the photoelectric detector according to claim 1, wherein: the upper vertical shaft cover (22) is of a round structure, two ends of the upper vertical shaft cover are both open, and the center of the upper vertical shaft cover is provided with a self-aligning bearing end face (12) and an upper vertical shaft hole (24) from top to bottom in sequence.

3. The device for accurately measuring the center of the light-sensitive surface of the photoelectric detector according to claim 1, wherein: the center of the vertical shaft sleeve (21) is sequentially provided with an upper vertical shaft excircle (26), a self-centering conical surface (30), a containing cavity, a lower vertical shaft hole (29) and a lower vertical shaft force bearing end face I (28) from top to bottom.

4. The device for accurately measuring the center of the light-sensitive surface of the photoelectric detector according to claim 1, wherein: the lower vertical shaft seat (20) comprises a cylinder, a second lower vertical shaft bearing end face (32) and an aligning part end face (12) which are sequentially arranged from top to bottom, and the cross section of the cylinder is a lower vertical shaft excircle (31).

5. The device for accurately measuring the center of the light-sensitive surface of the photoelectric detector according to claim 2, wherein: the perpendicularity of the upper vertical shaft hole (24) and the self-aligning bearing end face II (25) is not more than 0.002mm, the cylindricity of the upper vertical shaft hole (24) is not more than 0.003mm, and the surface roughness Ra0.1 is achieved.

6. The device for accurately measuring the center of the light-sensitive surface of the photoelectric detector according to claim 3, wherein: the straightness that hangs down of vertical axis hole (29) and lower vertical axis load terminal surface (28) is less than 0.002mm, vertical axis hole (29) cylindricity is less than 0.003mm down, go up vertical axis excircle (26) and all following vertical axis hole (29) and lower vertical axis load terminal surface (28) as the benchmark from centering conical surface (30), and the axiality of relative benchmark is less than 0.001mm, go up vertical axis excircle (26) cylindricity and be less than 0.003mm, clearance control is within 0.002mm, each surface roughness Ra0.1.

7. The device for accurately measuring the center of the light-sensitive surface of the photoelectric detector according to claim 4, wherein: the flatness of the second collimation part end face (33) is less than 0.002mm, the lower vertical shaft outer circle (31) and the second lower vertical shaft bearing end face (32) are machined by taking the collimation part end face (12) as a reference, the parallelism of the second lower vertical shaft bearing end face (32) and the second collimation part end face (33) is less than 0.001mm, the verticality of the outer lower vertical shaft circle (31) and the second collimation part end face (33) is less than 0.001mm, and the surface roughness of each surface is Ra0.1.

8. A method for accurately measuring the center of a photosensitive surface of a photodetector, using the apparatus for accurately measuring the center of a photosensitive surface of a photodetector according to claim 1, characterized in that: the method comprises the following steps:

step 1) trimming a to-be-detected band-ring photoelectric detector part (23), and performing iterative conversion on a photosensitive center to form a new reference for assembling and adjusting an optical system;

step 2) a lower vertical shaft seat (20) in the double-vertical shaft combined detection device is placed on a disc of a microscope to be directly compressed and fixed, an eyepiece system of the microscope is adjusted, an eyepiece cross division line is adjusted on the center of the cross section of the lower vertical shaft seat (20), after the adjustment is finished, a trimmed photoelectric detector part (23) with a ring to be detected is installed on a vertical shaft sleeve (21), a vertical shaft cover (22) is spun, automatic center determination and accurate positioning are achieved, and a fixed stable vertical shaft is formed;

and 3) mounting the vertical shaft sleeve (21) on the lower vertical shaft seat (20) to form a rotatable standard cylindrical vertical shaft, rotating the vertical shaft sleeve (21) during measurement, and finding the center of the photosensitive surface with the photoelectric detector component (23) through the microscope ocular.

9. The method for accurately measuring the center of the light-sensitive surface of the photoelectric detector according to claim 8, wherein the specific process of the step 1) is as follows:

coating polysulfide sealant in a bonding sealant accommodating hole (6) of the part ring, assembling the part ring on a detection reference (2) of a photoelectric detector part, and obtaining a photoelectric detector part (23) with a ring after the polysulfide sealant is cured;

the manufacturing standard (1) of a part (23) with the photoelectric detector is used as a standard, the photoelectric detector with the ring is arranged on a precision lathe by a clamp for trimming, the excircle size (9), the standard conical surface (10), the conical surface angle (11) and the end surface (12) are processed at corresponding positions, the detection standard (2) measured by the center of the photosensitive surface is iteratively converted on the standard conical surface (10), and a new standard for assembling and adjusting the optical system is formed.

10. The method for accurately measuring the center of the light-sensitive surface of the photoelectric detector according to claim 8, wherein: when in trimming, the clamp is arranged on a main shaft of the equipment, the manufacturing reference (1) of the ring belt photoelectric detector component (23) is taken as a clamping part, the reference end surface (12) of the ring belt photoelectric detector component (23) is taken as a trimming auxiliary reference, and then the correcting excircle (34) of the clamp is adjusted to the rotation center of the main shaft of the equipment, so that the runout is less than 0.003mm for trimming.

Technical Field

The invention particularly relates to a device and a method for accurately measuring the center of a photosensitive surface of a photoelectric detector, which are used for detecting devices and similar structural parts which cannot be directly contacted for measurement.

Background

The double four-quadrant photoelectric detector is a core device for capturing a target by a laser seeker, 8 areas are arranged in an outer four quadrant and an inner four quadrant, and the center of a cross division line (also called as the center of a photosurface) of the inner four quadrant, namely the crossing point of an F axis and a G axis on the photosurface, is required to deviate by no more than 0.1mm relative to the detection reference of the device, so that the double four-quadrant photoelectric detector plays a role in adjusting the superposition of the optical zero position and the electric zero position of the seeker. If the coaxiality of the center of the photosensitive surface relative to the detection reference of the device is out of tolerance or the deviation is too large, the adjustment of the dispersion circle curve of the objective lens component of the seeker is influenced, the optical zero position and the electric zero position of the seeker are not coincident, a gyro correction signal output by the seeker cannot truly reflect the tracking angular speed, the aiming and target capturing precision of the seeker is directly influenced, and the miss is easily caused, so that the double four-quadrant photoelectric detector is also called as an eye of a laser seeker.

When the double four-quadrant photoelectric detector is used for manufacturing devices and assembling and adjusting a photoelectric detection part with a ring and a laser seeker optical system, the measurement reference of the center of the photosensitive surface needs to be converted and iterated, iterative errors are generated, and the double four-quadrant photoelectric detector cannot be directly contacted with measurement. After the center measuring reference of the photosensitive surface is converted and trimmed to the short conical surface part of the photoelectric detection part with the ring, the device manufacturing reference in the double four-quadrant photoelectric detector is still used as the measuring reference, and the reference non-coincident error is generated to cause misjudgment. If the device manufacturing standard is not coaxial with the detection standard of the center of the photosensitive surface of the device or the deviation amount is large, the device manufacturing standard cannot be used for detecting the deviation of the center of the photosensitive surface and cannot be used as the standard for trimming the reference conical surface of the part with the photoelectric detector, and the problem needs to be solved urgently.

Disclosure of Invention

The invention aims to provide a device for accurately measuring the center of a photosensitive surface of a photoelectric detector, which mainly aims at the problems of large deviation of the center of the photosensitive surface of a double-four-quadrant photoelectric detector relative to an assembly reference axis and coaxiality measurement and can realize automatic center determination and accurate positioning.

The invention also aims to provide a method for accurately measuring the center of the photosensitive surface of the photoelectric detector, so that batch measurement is realized.

Therefore, the technical scheme provided by the invention is as follows:

the utility model provides an accurate detection device of photosensitive center of photoelectric detector, includes the microscope, still includes the two vertical axis combination detection device that use with the microscope cooperation, two vertical axis combination detection device include from last vertical axis lid, vertical axis cover and the lower vertical axis seat that connects gradually extremely down, it is all coaxial to go up vertical axis lid, vertical axis cover and lower vertical axis seat.

The upper vertical shaft cover is of a round structure, two ends of the upper vertical shaft cover are both open, and the center of the upper vertical shaft cover is provided with a self-aligning bearing end face and an upper vertical shaft hole from top to bottom in sequence.

The center of the vertical shaft sleeve is sequentially provided with an upper vertical shaft excircle, a self-centering conical surface, a containing cavity, a lower vertical shaft hole and a lower vertical shaft bearing end face I from top to bottom.

The lower vertical shaft base comprises a cylinder, a second lower vertical shaft bearing end face and an aligning part end face which are sequentially arranged from top to bottom, and the cross section of the cylinder is a lower vertical shaft excircle.

The perpendicularity between the upper vertical shaft hole and the self-aligning bearing end face II is not more than 0.002mm, the cylindricity of the upper vertical shaft hole is not more than 0.003mm, and the surface roughness Ra0.1 is achieved.

The straightness that hangs down of lower vertical axis hole and lower vertical axis bearing terminal surface one is less than 0.002mm, vertical axis hole cylindricity is less than 0.003mm down, go up the vertical axis excircle and all following vertical axis hole and lower vertical axis bearing terminal surface one as the benchmark from the centering conical surface, and the axiality of relative benchmark is less than 0.001mm, go up vertical axis excircle cylindricity and be less than 0.003mm, clearance control within 0.002mm, each functional surface roughness Ra0.1.

The flatness of the second end face of the collimation part is less than 0.002mm, the excircle of the lower vertical shaft and the second force-bearing end face of the lower vertical shaft are processed by taking the end face of the collimation part as a reference, the parallelism of the second force-bearing end face of the lower vertical shaft and the second end face of the collimation part is less than 0.001mm, the verticality of the excircle of the lower vertical shaft and the second end face of the collimation part is less than 0.001mm, and the surface roughness of each functional surface is Ra0.1.

A method for accurately measuring the center of a photosensitive surface of a photoelectric detector by using a device for accurately measuring the photosensitive center of the photoelectric detector comprises the following steps:

step 1) trimming a part with a ring photoelectric detector to be detected, and performing iterative conversion on a photosensitive center to form a new reference for assembling and adjusting an optical system;

step 2) placing a lower vertical shaft seat in the double-vertical-shaft combined detection device on a disc of a microscope to be directly pressed and fixed, adjusting an ocular lens system of the microscope, adjusting an ocular cross division line to the center of the cross section of the lower vertical shaft seat, after the adjustment is finished, installing a trimmed ring-shaped photoelectric detector part to be detected on a vertical shaft sleeve, spinning a vertical shaft cover, realizing automatic center determination and accurate positioning, and forming a fixed stable vertical shaft;

and 3) sleeving the vertical shaft on the lower vertical shaft seat to form a rotatable standard cylindrical vertical shaft, rotating the vertical shaft sleeve during measurement, and finding the center of the photosensitive surface of the part with the photoelectric detector through the eyepiece of the microscope.

The specific process of step 1) is as follows:

coating polysulfide sealant in a bonding glue containing hole of the part ring, assembling the part ring on a detection reference of a photoelectric detector part, and obtaining a photoelectric detector part with a ring after the polysulfide sealant is cured;

the manufacturing reference of the photoelectric detector part with the ring is taken as a reference, the photoelectric detector with the ring is arranged on a precision lathe by a clamp for trimming, the excircle size, the reference conical surface, the conical surface angle and the end surface are processed at the corresponding part, the detection reference measured by the center of the photosensitive surface is iteratively converted onto the reference conical surface, and a new reference for installing and adjusting the optical system is formed.

When in trimming, the clamp is arranged on the main shaft of the equipment, the manufacturing reference of the photoelectric detector part with the ring is taken as a clamping part, the reference end face of the photoelectric detector part with the ring is taken as a trimming auxiliary reference, and then the correcting excircle of the clamp is adjusted to the rotation center of the main shaft of the equipment, so that the jumping is less than 0.003mm for trimming.

The invention has the beneficial effects that:

the device for accurately detecting the photosensitive center of the photoelectric detector provided by the invention adopts a semi-moving cylindrical vertical shaft structure to automatically determine the center of the photosensitive surface of the device, and the cylindrical vertical shaft structure realizes quick calibration, so that a special detection device for double vertical shaft combination is formed, the device is directly measured, secondary calibration is not needed, and batch measurement is realized.

According to the method for accurately detecting the photosensitive center of the photoelectric detector, provided by the invention, the reference conversion error generated in the original scheme assembly process of the part with the photoelectric detector is eliminated by trimming, and the deviation error between the manufacturing reference of the device and the reference axis measured by the center of the photosensitive surface is eliminated, so that the assembly requirement of an out-of-tolerance device can be met, and the reference conversion error in the original assembly process can be eliminated.

In order to make the aforementioned and other objects of the present invention comprehensible, preferred embodiments accompanied with figures are described in detail below.

Drawings

FIG. 1 is a schematic diagram of a photodetector according to an embodiment of the present invention;

FIG. 2 is a schematic view of the center of the photosurface;

FIG. 3 is a schematic view of the construction of the part ring;

FIG. 4 is a schematic structural diagram of a component with a ring photodetector;

FIG. 5 is a schematic diagram of a vertical axis structure commonly used in precision instruments, in which (a) is a standard cylindrical vertical axis and (b) is a semi-moving cylindrical vertical axis;

FIG. 6 is a schematic structural diagram of an embodiment of the dual vertical axis combined detection device of the present invention;

FIG. 7 is a diagrammatic view of an upper vertical shaft cover in an embodiment;

FIG. 8 is a diagrammatic view of an embodiment of a vertical shaft sleeve;

FIG. 9 is a diagrammatic view of the lower vertical shaft base of the embodiment;

FIG. 10 shows a taper trimming jig for a band photodetector unit in an embodiment.

Description of reference numerals:

1. manufacturing a benchmark; 2. detecting a benchmark; 3. a first reference end face; 4. a conical surface trimming part; 5. a reference hole; 6. bonding glue containing holes; 7. a second reference end surface; 8. trimming a conical surface to obtain a reference; 9. the size of the excircle; 10. a reference conical surface; 11. a conical surface angle; 12. an end face; 13. fitting size; 14. fitting gaps; 15. the first force bearing end face of the collimation part; 16. the collimation part end face I; 17. self-aligning the first force bearing end face; 18. a ball bearing; 19. a conical surface; 20. a lower vertical shaft seat; 21. a vertical shaft sleeve; 22. an upper vertical shaft cover; 23. a band photodetector section; 24. an upper vertical shaft hole; 25. self-aligning a force bearing end face II; 26. an upper vertical axis excircle; 27. self-centering conical surface angle; 28. a first force bearing end face of the lower vertical shaft; 29. a lower vertical shaft hole; 30. a self-centering conical surface; 31. the outer circle of the lower vertical shaft; 32. a second force bearing end surface of the lower vertical shaft; 33. the collimation part end face II; 34. correcting the excircle; 35. and connecting the machine tool spindle.

Detailed Description

The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will become apparent to those skilled in the art from the present disclosure.

It should be noted that, in the present invention, the upper, lower, left and right in the drawings are regarded as the upper, lower, left and right of the photo-sensitive center accurate detection device of the photo-detector described in this specification.

The exemplary embodiments of the present invention will now be described with reference to the accompanying drawings, however, the present invention may be embodied in many different forms and is not limited to the embodiments described herein, which are provided for complete and complete disclosure of the present invention and to fully convey the scope of the present invention to those skilled in the art. The terminology used in the exemplary embodiments illustrated in the accompanying drawings is not intended to be limiting of the invention. In the drawings, the same units/elements are denoted by the same reference numerals.

Unless otherwise defined, terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Further, it will be understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense.