阅读说明：本技术 一种晶体生长炉的观察窗装置 (Observation window device of crystal growth furnace ) 是由 王宇 顾鹏 李敏 梁振兴 于 2021-08-17 设计创作，主要内容包括：本说明书实施例提供一种晶体生长炉的观察窗装置,该观察窗装置包括观察窗和框体,其中,观察窗设置于框体上；框体设置于晶体生长炉的侧壁并与晶体生长炉连通,其中,框体的外侧设置至少一个进气口,框体的内侧设置至少两个出气口,至少两个出气口形成的至少两个气流方向间形成预设夹角,以使经由至少两个气流方向形成的至少两股气体在观察窗附近交汇形成气体屏障。(The embodiment of the specification provides an observation window device of a crystal growth furnace, which comprises an observation window and a frame body, wherein the observation window is arranged on the frame body; the frame body is arranged on the side wall of the crystal growth furnace and communicated with the crystal growth furnace, wherein at least one air inlet is arranged on the outer side of the frame body, at least two air outlets are arranged on the inner side of the frame body, and a preset included angle is formed between at least two air flow directions formed by the at least two air outlets so that at least two air flows formed by the at least two air flow directions are intersected near the observation window to form an air barrier.)

1. An observation window device of a crystal growing furnace is characterized by comprising an observation window and a frame body, wherein,

the observation window is arranged on the frame body;

the frame body is arranged on the side wall of the crystal growth furnace and communicated with the crystal growth furnace, wherein,

at least one air inlet is arranged at the outer side of the frame body,

at least two air outlets are arranged on the inner side of the frame body,

and a preset included angle is formed between at least two air flow directions formed by the at least two air outlets, so that at least two air flows formed by the at least two air flow directions are converged near the observation window to form an air barrier.

2. The viewing window arrangement of claim 1, wherein said at least two air outlets are elongated air outlets.

3. The viewing window arrangement of claim 1, wherein said at least two air outlets comprise at least two air outlets disposed on opposite sides of said viewing window.

4. The viewing window arrangement of claim 1, further comprising:

at least two wind direction adjusting plates, at least two wind direction adjusting plates set up respectively in the outside of at least two gas outlets.

5. The viewing window arrangement of claim 4, wherein said wind direction adjustment plate comprises two sub-plates and the angle between said two sub-plates is adjustable.

6. The viewing window arrangement of claim 1, further comprising:

at least two baffles, at least two baffles set up respectively in the outside of at least two gas outlets.

7. The viewing window arrangement of claim 6, wherein said baffle is curved.

8. The viewing window arrangement of claim 6, further comprising:

the powder collecting frame is arranged below the baffle.

9. The observation window arrangement of claim 8, wherein at least two tilted plates are disposed inside the powder collection frame and are staggered with respect to each other.

10. The viewing window arrangement of claim 1, wherein an inlet and an outlet are provided on an exterior side of the frame body, a cooling channel being formed through the viewing window arrangement via the inlet and the outlet.

Technical Field

The specification relates to the technical field of crystal preparation, in particular to an observation window device of a crystal growth furnace.

Background

In the crystal preparation process, an observation window is generally arranged on the side surface of a cavity of the crystal growth furnace, so that an operator can monitor the condition in the furnace in real time and perform corresponding operation conveniently, and the crystal growth quality is improved. During the crystal preparation process, part of the molten raw material may volatilize and adhere to the inner side of the observation window, thereby affecting the observation effect of the observation window. Therefore, it is desirable to provide an observation window device of a crystal growth furnace, which is convenient for clearly observing the growth condition in the furnace.

Disclosure of Invention

One of the embodiments of the present specification provides an observation window device of a crystal growth furnace, the observation window device includes an observation window and a frame, wherein the observation window is disposed on the frame; the frame body set up in the lateral wall of crystal growth stove and with crystal growth stove intercommunication, wherein, the outside of frame body sets up at least one air inlet, the inboard of frame body sets up two at least gas outlets, form between two at least air current directions that two at least gas outlets formed and predetermine the contained angle to make the via two at least gas flows that two at least air current directions formed are in near the intersection forms the gas barrier.

In some embodiments, the at least two air outlets are elongated air outlets.

In some embodiments, the at least two air outlets include at least two air outlets oppositely disposed on two sides of the observation window.

In some embodiments, the observation window device further comprises at least two wind direction adjusting plates respectively disposed outside the at least two air outlets.

In some embodiments, the wind direction adjustment plate comprises two sub-plates and the included angle between the two sub-plates is adjustable.

In some embodiments, the observation window device further comprises at least two baffles, and the at least two baffles are respectively arranged at the outer sides of the at least two air outlets.

In some embodiments, the baffle is curved.

In some embodiments, the observation window device further comprises a powder collecting frame disposed below the baffle.

In some embodiments, at least two inclined plates are arranged inside the powder collecting frame and staggered with each other.

In some embodiments, the frame body is provided with a water inlet and a water outlet on the outer side, and a cooling channel flowing through the observation window device is formed through the water inlet and the water outlet.

Drawings

The present description will be further explained by way of exemplary embodiments, which will be described in detail by way of the accompanying drawings. These embodiments are not intended to be limiting, and in these embodiments like numerals are used to indicate like structures, wherein:

FIG. 1 is a schematic structural view of a crystal growth furnace including a viewing window arrangement according to some embodiments herein;

FIG. 2 is a schematic view of the exterior side of a viewing window arrangement according to some embodiments herein;

FIG. 3 is a schematic view of the configuration of the inside of a viewing window arrangement according to some embodiments herein;

FIG. 4 is a schematic diagram of a configuration of a wind-direction plate according to some embodiments of the present disclosure;

FIG. 5 is a top view of a viewing window arrangement according to some embodiments herein;

FIG. 6 is a schematic view of a viewing window arrangement shown in accordance with some embodiments of the present description blocking volatiles;

fig. 7 is a schematic structural view of a powder collection box according to some embodiments of the present disclosure.

In the figure, 10 is a crystal growth furnace, 11 is a furnace wall, 100 is an observation window device, 110 is an observation window, 120 is a frame body, 130 is an air inlet, 140 is a water inlet, 150 is a water outlet, 160 is an air outlet, 170 is an air direction adjusting plate, 171 is a daughter board, 172 is a daughter board, 180 is a baffle, 190 is a powder collecting frame, 191 is an inclined plate, 192 is an inclined plate, 193 is an inclined plate, 194 is an inclined plate, and 195 is an inclined plate.

Detailed Description

In order to more clearly illustrate the technical solutions of the embodiments of the present disclosure, the drawings used in the description of the embodiments will be briefly described below. It is obvious that the drawings in the following description are only examples or embodiments of the present description, and that for a person skilled in the art, the present description can also be applied to other similar scenarios on the basis of these drawings without inventive effort. Unless otherwise apparent from the context, or otherwise indicated, like reference numbers in the figures refer to the same structure or operation.

It should be understood that "system", "apparatus", "unit" and/or "module" as used herein is a method for distinguishing different components, elements, parts, portions or assemblies at different levels. However, other words may be substituted by other expressions if they accomplish the same purpose.

As used in this specification and the appended claims, the terms "a," "an," "the," and/or "the" are not intended to be inclusive in the singular, but rather are intended to be inclusive in the plural, unless the context clearly dictates otherwise. In general, the terms "comprises" and "comprising" merely indicate that steps and elements are included which are explicitly identified, that the steps and elements do not form an exclusive list, and that a method or apparatus may include other steps or elements.

Flow charts are used in this description to illustrate operations performed by a system according to embodiments of the present description. It should be understood that the preceding or following operations are not necessarily performed in the exact order in which they are performed. Rather, the various steps may be processed in reverse order or simultaneously. Meanwhile, other operations may be added to the processes, or a certain step or several steps of operations may be removed from the processes.

FIG. 1 is a schematic diagram of a crystal growth furnace including a viewing window arrangement according to some embodiments of the present disclosure.

In some embodiments, crystal growth furnace 10 can be used to grow crystals of sapphire, ruby, yttrium aluminum garnet, gadolinium gallium garnet, spinel, and the like. As shown in FIG. 1, the hearth of the crystal growth furnace 10 is composed of a hearth wall 11 and a hearth bottom, and the hearth of the crystal growth furnace 10 can provide a place for crystal growth. By controlling the furnace chamber of the crystal growth furnace 10 to be in the appropriate temperature, pressure and atmosphere conditions, crystals with good quality and quality can be grown.

In some embodiments, the viewing window arrangement 100 may be disposed on the furnace wall 11 of the crystal growth furnace 10. By arranging the observation window device 100 on the hearth wall 11 of the crystal growth furnace 10, an operator can conveniently monitor the conditions in the furnace in real time and perform corresponding operations, for example, adjusting the crystal growth temperature according to the shape and height of the crystal growth so as to improve the quality of the crystal growth.

In some embodiments, the viewing window arrangement 100 may be attached to the furnace wall 11 by one or more of bolting, welding, hinging, or clamping. In some embodiments, the frame of the viewing window arrangement 100 can be connected to the furnace wall 11 to enable the connection of the viewing window arrangement 100 to the furnace wall 11. In some embodiments, the frame of the viewing window arrangement 100 can be connected to the furnace wall 11 by one or more of bolting, welding, hinging, and clamping.

In some embodiments, raw materials required for crystal growth can be loaded into the crucible, the crucible with the raw materials can be placed in the hearth of the crystal growth furnace 10, and the crystal can be grown in the hearth of the crystal growth furnace 10 by controlling the hearth of the crystal growth furnace 10 to be in a suitable temperature, pressure, atmosphere and the like, during which process, an operator can observe the growth of the crystal inside the hearth through the observation window device 100.

FIG. 2 is a schematic view of the exterior side of a viewing window arrangement according to some embodiments herein; FIG. 3 is a schematic view of the configuration of the inside of a viewing window arrangement according to some embodiments herein. The observation window device 100 according to the embodiment of the present specification will be described in detail below with reference to fig. 2 and 3. It should be noted that the following examples are only for explaining the present invention, and do not limit the present invention.

In some embodiments, the viewing window arrangement 100 can include a viewing window 110 and a frame 120, as described in fig. 2. In some embodiments, the viewing window 110 may be disposed on the frame 120. In some embodiments, the viewing window 110 and the frame 120 may be connected by one or more of bolting, welding, hinging, and clamping. In some embodiments, the frame 120 may be disposed on a sidewall of the crystal growth furnace 10 and communicate with the crystal growth furnace 10, such that one side of the frame 120 (or referred to as an outer side of the frame 120) is located outside the crystal growth furnace and in an external environment; the other side of the frame 120 (or referred to as the inner side of the frame 120) is located in the crystal growth furnace and is in the crystal growth environment in the furnace chamber.

In some embodiments, the planar shape of the viewing window 110 can be one or more of a regular or irregular shape such as a rectangle, circle, triangle, polygon, and the like. In some embodiments, the viewing window 110 is transparent. In some embodiments, the viewing window 110 can comprise glass, transparent ceramic, a wafer (e.g., a sapphire wafer, a titanium sapphire wafer, a YAG wafer), and the like.

In some embodiments, the shape of the interior of the frame 120 may match the planar shape of the viewing window 110. For example, the inside of the frame 120 is rectangular, and the planar shape of the observation window 110 is also rectangular, and the planar dimensions are such that the frame 120 is fitted inside.

In some embodiments, at least one air inlet 130 may be disposed at an outer side of the frame 120. In some embodiments, gas may be introduced into the crystal growth furnace through at least one gas inlet 130. In some embodiments, the gas may be referred to as a shielding gas. In some embodiments, the shielding gas may be a gas (e.g., oxygen, hydrogen, or a feedstock gas) required to grow a crystal in a crystal growth furnace. In some embodiments, the shielding gas may also be another gas (e.g., an inert gas). In some specific embodiments, for high melting point crystals (>1800 ℃), such as Lutetium Yttrium Silicate (LYSO) scintillation crystals, Yttrium Aluminum Garnet (YAG) crystals, or Gadolinium Aluminum Gallium Garnet (GAGG) crystals, since iridium crucibles are commonly used in such crystal growth processes, in order to avoid the iridium crucibles from being oxidized in a high temperature environment, one or more gases such as argon, nitrogen, carbon monoxide gas, hydrogen, carbon dioxide, etc. may be introduced into the crystal growth furnace 10 through the at least one gas inlet 130, and the shielding gas may be one or more gases such as argon, nitrogen, carbon monoxide gas, hydrogen, carbon dioxide, etc. In still other embodiments, for low melting point crystals, air or an oxygen-containing gas may be introduced into crystal growth furnace 10 through at least one gas inlet 130, and the shielding gas may be air or an oxygen-containing gas. In some embodiments, the gas composition, gas pressure, gas flow rate, etc. of the gas fed may be controlled according to the crystal growth needs in the crystal growth furnace 10.

In some embodiments, as shown in fig. 3, at least two air outlets 160 may be provided on the inner side of the frame 120. In some embodiments, gas introduced from the at least one gas inlet 130 may flow out of the at least two gas outlets 160.

In some embodiments, the at least two air outlets 160 include at least two air outlets oppositely disposed on two sides (e.g., left and right sides, upper and lower sides) of the observation window 110.

In some embodiments, the at least two air outlets 160 may be elongated air outlets. In some embodiments, taking the air outlet 160 disposed at one side of the observation window 110 as an example, the air outlet 160 may be a single elongated air outlet, or may be a plurality of elongated air outlets disposed in parallel. By providing an elongated gas outlet, the gas exiting through the gas outlet 160 may exit in the form of a gas flow surface.

In some embodiments, the at least two gases flowing from the at least two gas outlets 160 correspond to at least two gas flow directions, and the at least two gas flow directions form a predetermined included angle therebetween, so that the at least two gases meet to form a gas barrier with intersecting gas flow surfaces near the observation window 110. The gas barrier may be used to prevent other gases or volatiles (e.g., Ga in the molten raw material) within the crystal growth furnace 10₂O₃Or SiO₂) Is adhered to the surface of the observation window 110 so that the operator can clearly see the crystal growth inside the crystal growth furnace 10.

In some embodiments, in order to form a predetermined included angle between at least two gas flow directions of at least two gases flowing out of at least two gas outlets 160, a corner having a curvature facing the observation window 110 (not shown in the drawings) may be disposed at an outer side of at least two gas outlets 160, i.e., the included angle between the corner and the observation window 110 is less than 90 °.

In some embodiments, as shown in fig. 3, in order to form a predetermined included angle between at least two gas flow directions corresponding to at least two gases flowing out of at least two gas outlets 160, at least two wind direction adjusting plates 170 may be disposed, and the at least two wind direction adjusting plates 170 may be disposed outside the at least two gas outlets 160, respectively. For more details on the wind direction adjusting plate 170, reference may be made to the related description of fig. 4, which is not described herein again.

In some embodiments, the size of at least two air outlets 160 may match the size of the viewing window 110 such that the airflow surface exiting the air outlets 160 better protects the viewing window 110. In some embodiments, the length of the at least two air outlets 160 may be greater than or equal to the length of the viewing window 110, such that the length of the airflow surface flowing out of the at least two air outlets 160 is greater than or equal to the length of the viewing window 110, thereby better protecting the viewing window 110.

In some embodiments, the at least two air outlets 160 may include four air outlets disposed at the upper, lower, left, right, and four sides of the observation window 110. Correspondingly, the four gas flows from the four gas outlets 160 correspond to four gas flow directions, and a preset included angle is formed between the four gas flow directions, so that the four gas flows are converged near the observation window 110 to form a gas barrier with crossed gas flow surfaces.

In some embodiments, the number of the at least two air outlets 160 may be other numbers, for example, for a triangular observation window, three air outlets may be provided, and it is only necessary that the air flowing out from the air outlets meet to form an air barrier near the observation window 110.

In some embodiments, returning to fig. 2, the outside of the frame 120 may also be provided with a water inlet 140 and a water outlet 150. In some embodiments, the interior of the frame 120 may be hollow, and the circulating cooling water flows into the frame 120 through the water inlet 140 and flows out of the frame 120 through the water outlet 150, so as to form a cooling channel passing through the viewing window device 100. In some embodiments, a plurality of cooling channels may be disposed in the hollow structure inside the frame 120, so as to facilitate circulation of the circulating cooling water in a predetermined circulation direction. In some embodiments, a plurality of baffles may be disposed on the plurality of cooling channels inside the frame 120 to increase the turbulence of the circulating cooling water and improve the heat exchange efficiency.

In some embodiments, as shown in fig. 3, the viewing window arrangement 100 may further comprise at least two baffles 180.

In some embodiments, at least two baffles 180 may be disposed outside of the at least two air outlets 160, respectively. In some embodiments, the baffle 180 may be hollow and in communication with the interior of the frame 120. In some embodiments, a plurality of cooling channels (not shown) may be provided in the hollow structure inside the baffle 180, so that circulating cooling water may also flow through the inside of the baffle 180, thereby making the temperature of the surface of the baffle 180 lower than the temperature inside the furnace. For more on the baffle 180, reference can be made to the description of fig. 5 and 6, which are not repeated herein.

In some embodiments, as shown in fig. 3, the viewing window arrangement 100 may further include a powder collection frame 190. In some embodiments, a powder collection frame 190 may be disposed below the baffle 180 for collecting powder or other particulate matter that falls from above. In some embodiments, the number of powder collection boxes 190 may be one or more. For example, only one powder collection frame 190 may be provided, below the two baffles 180. For another example, as shown in fig. 3, two powder collecting frames 190 may be disposed below the two side baffles 180. For more details about the powder collecting box 190, reference may be made to the related description of fig. 7, which is not described herein again.

FIG. 4 is a schematic diagram of a configuration of a wind-direction plate according to some embodiments of the present disclosure.

In some embodiments, the wind direction plate 170 may include one or more sub-plates. The flowing direction of the gas is changed due to the blocking of the sub-plate, and accordingly, the flowing direction (or called as the gas flow direction) of the gas can be controlled by adjusting the direction of the sub-plate.

In some embodiments, when the wind direction adjustment plate 170 is a daughter board (i.e., the wind direction adjustment plate 170 is a separate board), the wind direction adjustment plate 170 may be mounted at an angle to the viewing window 110. In some embodiments, the mounting of the wind direction adjustment plate 170 to the viewing window 110 may be articulating (e.g., hinged). In some embodiments, the angle θ between the wind direction adjustment plate 170 and the viewing window 110 is adjustable.

In some embodiments, in order to ensure the air outlet efficiency and the stability of the gas barrier, and prevent the flowing gas from directly entering the crystal growth region to cause the temperature field fluctuation near the crystal growth interface, the included angle between the wind direction adjusting plate 170 and the observation window 110 needs to be controlled within a certain range.

In some embodiments, the angle θ between the wind direction adjustment plate 170 and the observation window 110 may be 10 ° to 65 °. In some embodiments, the angle θ between the wind direction adjustment plate 170 and the observation window 110 may be 15 ° to 60 °. In some embodiments, the angle θ between the wind direction adjustment plate 170 and the observation window 110 may be 20 ° to 55 °. In some embodiments, the angle θ between the wind direction adjustment plate 170 and the observation window 110 may be 25 ° to 50 °. In some embodiments, the angle θ between the wind direction adjustment plate 170 and the observation window 110 may be 30 ° to 45 °. In some embodiments, the angle θ between the wind direction adjustment plate 170 and the observation window 110 may be 35 ° to 40 °. In some embodiments, the angle θ between the wind direction adjustment plate 170 and the observation window 110 may be 38 ° to 40 °.

In some embodiments, as shown in FIG. 4, wind direction adjustment plate 170 may include two sub-plates, sub-plate 171 and sub-plate 172. In some embodiments, the daughter board 171 may be provided with one or more air vents (not shown in fig. 4).

In order to adapt the air outlet to different required scenes, for example, scenes with different flow rates of shielding gas, scenes with different airflow shapes of shielding gas, scenes with different airflow directions of shielding gas, etc., the wind direction adjusting plate 170 including the two sub-plates is arranged outside the air outlet 160, and the size and shape of the air outlet on the sub-plate 171 can be adjusted according to requirements.

In some embodiments, the gas outlets on the sub-plate 171 may be matched to the gas outlets 160, such that after passing through the gas outlets 160, gas may exit through the gas outlets on the sub-plate 171. In some embodiments, the matching of the air outlets on the sub-panel 171 and the air outlets 160 may be the same or similar in shape and within a certain threshold range (e.g., 3 mm).

In some embodiments, the air outlet of the sub-plate 171 may be a long strip-shaped air outlet, or may be adjusted to be a square, round hole-shaped or any shape according to actual requirements, so as to adjust the flow rate of the air at the air outlet.

In some embodiments, the daughter board 171 and the daughter board 172 may be mounted at an angle. In some embodiments, the daughter board 171 and the daughter board 172 may be mounted in a manner that allows for articulation (e.g., hinging). In some embodiments, the included angle θ between the sub-plate 171 and the sub-plate 172₁Is adjustable.

In some embodiments, in order to ensure the air outlet efficiency and the stability of the gas barrier, and prevent the outflow gas from directly entering the crystal growth region to cause temperature field fluctuation near the crystal growth interface, the included angle between the sub-plate 171 and the sub-plate 172 needs to be controlled within a certain range.

In some embodiments, the included angle θ between the sub-plate 171 and the sub-plate 172₁Can be 10-65 degrees. In some embodiments, the included angle θ between the sub-plate 171 and the sub-plate 172₁Can be 15-60 degrees. In some embodiments, the included angle θ between the sub-plate 171 and the sub-plate 172₁Can be 20-55 degrees. In some embodiments, the included angle θ between the sub-plate 171 and the sub-plate 172₁Can be 25-50 degrees. In some embodiments, the included angle θ between the sub-plate 171 and the sub-plate 172₁Can be 30-45 degrees. In some embodiments, the included angle θ between the sub-plate 171 and the sub-plate 172₁Can be 35-40 degrees. In some embodiments, the included angle θ between the sub-plate 171 and the sub-plate 172₁Can be 38 degrees to 40 degrees.

In some embodiments, after the wind direction adjustment plate 170 is installed outside the air outlet 160, the air flows out from the air outlet 160 and flows out through the air outlet of the sub-plate 171 of the wind direction adjustment plate 170. As shown in fig. 4, the flow trajectory of the gas on the wind direction adjustment plate 170 may be: the direction of the gas flowing out of the gas outlet on the sub-plate 171 is the gas flow direction a, the gas flow direction is changed into the gas flow direction B under the blocking effect of the sub-plate 172, and the included angle between the gas flow direction B and the glass window 110 is smaller than 90 °. Accordingly, at least two gas flows from the at least two gas outlets 160 are converged to form a gas barrier near the observation window 110 (i.e., a side of the observation window 110 facing the furnace) by the wind direction adjustment of the at least two wind direction adjusting plates 170 respectively disposed outside the at least two gas outlets 160.

Through setting up wind direction adjusting plate 170 to it is adjustable to set up the contained angle between wind direction adjusting plate 170 (or the daughter board of wind direction adjusting plate 170) and the observation window 110, can effectively adjust the near air current direction of observation window 110, makes the gas barrier that two at least gases intersect and form can prevent the volatile substance bonding on observation window 110 better, guarantees the observation effect of observation window 110.

FIG. 5 is a top view of a viewing window arrangement according to some embodiments of the present description.

In some embodiments, as shown in FIG. 5, the cross-sectional shape of the baffle 180 may be a curved arc. In some embodiments, the baffle 180 may also have a fan-shaped or other cross-sectional shape. In some embodiments, the cross-sectional length of the baffle 180 may be adjusted such that the baffle 180 has a telescopic function in the horizontal direction. By arranging the arc-shaped or fan-shaped baffle, the gas flowing out of the gas outlet 160 can smoothly enter the growth cavity, and a stable crystal growth environment is maintained.

In some embodiments, as shown in FIG. 5, the baffle 180 is angled at an angle θ relative to the viewing window 110₂. In some embodiments, the baffle 180 is angled from the viewing window 110 by an angle θ₂Is adjustable.

In some embodiments, in order to prevent the volatiles blocked by the gas barrier from re-entering the crystal growth region and depositing on the crystal surface, the angle between the baffle 180 and the observation window 110 needs to be controlled within a certain range, so that the volatiles are blocked by the baffle 180 and then collected in the powder collection box 190.

In some embodiments, the baffle 180 is at an angle θ to the viewing window 110₂Is 30-90 degrees. In some embodiments, the baffle 180 is at an angle θ to the viewing window 110₂Is 35-85 degrees. In some embodiments, the baffle 180 is at an angle θ to the viewing window 110₂Is 40-80 degrees. In some embodiments, the baffle 180 is at an angle θ to the viewing window 110₂Is 45-75 degrees. In some embodiments, the baffle 180 is at an angle θ to the viewing window 110₂Is 50-70 degrees. In some embodiments, the baffle 180 is at an angle θ to the viewing window 110₂Is 55 DEG E65 deg. In some embodiments, the baffle 180 is at an angle θ to the viewing window 110₂Is 58 to 63 degrees. In some embodiments, the baffle 180 is at an angle θ to the viewing window 110₂Is 60 to 63 degrees.

As described above, in order to ensure the air-out efficiency and the stability of the gas barrier, and prevent the flowing gas from directly entering the crystal growth region and causing the temperature field fluctuation near the crystal growth interface, and meanwhile, in order to prevent the volatile substances blocked by the gas barrier from reentering the crystal growth region and depositing on the crystal surface, the included angle θ between the baffle 180 and the observation window 110₂And the included angle theta between the wind direction adjusting plate 170 and the observation window 110 (or the included angle theta between the sub-plate 171 and the sub-plate 172)₁) Certain matching relationships need to be satisfied. In some embodiments, the baffle 180 is at an angle θ to the viewing window 110₂The included angle theta between the wind direction adjusting plate 170 and the observation window 110 (or the included angle theta between the sub-plate 171 and the sub-plate 172)₁) The difference of (a) is less than or equal to a preset threshold (e.g., 40 °), so that the air-out efficiency and the gas barrier of the gas flowing out from the wind direction adjusting plate 170 are relatively stable, the baffle 180 can prevent the flowing-out gas from directly entering the crystal growth region to cause temperature field fluctuation near the crystal growth interface, and the volatile matter blocked by the gas barrier can be prevented from reentering the crystal growth region and depositing on the crystal surface. For example, when the angle θ between the wind direction adjusting plate 170 and the observation window 110 (or the included angle θ between the sub-plate 171 and the sub-plate 172)₁) When the angle is 10 degrees to 65 degrees, the included angle theta between the baffle 180 and the observation window 110₂Can be 30-90 degrees. For another example, when the angle θ between the wind direction adjusting plate 170 and the observation window 110 (or the included angle θ between the sub-plate 171 and the sub-plate 172)₁) When the angle is 20 degrees to 40 degrees, the included angle theta between the baffle 180 and the observation window 110₂Is 60 to 80 degrees.

FIG. 6 is a schematic view of a viewing window arrangement shown in accordance with some embodiments of the present description blocking volatiles.

As shown in fig. 6, the air flowing out from the air outlet 160 is adjusted by the airflow direction adjusting plate 170, an airflow having a certain angle with the observation window 110 is formed near the observation window 110, and the airflows on both sides of the observation window 110 meet to form an air barrier M, so that the volatile is blocked outside the air barrier M. When the volatile X moves toward the viewing window 110, the volatile X moves away from the viewing window 110 and toward the baffle 180 due to the blocking effect of the gas barrier M on the volatile X. Further, the kinetic energy of the volatile X decreases rapidly (close to 0) due to the blocking by the baffle 180. Meanwhile, as the circulating cooling water is introduced into the baffle 180, the volatile matter X can be rapidly cooled. The volatile matter X after kinetic energy reduction and cooling falls into the powder collection frame 190 downwards under the action of gravity, or the volatile matter X after kinetic energy reduction and cooling deposits on the side wall of the baffle 180, and falls into the powder collection frame 190 downwards under the action of gravity when the deposit weight reaches a certain value.

Fig. 7 is a schematic structural view of a powder collection box according to some embodiments of the present disclosure.

In order to further prevent the volatile matter or other gases from floating out of the powder collection frame 190 into the cavity of the crystal growth furnace again, in some embodiments, as shown in fig. 7, at least two inclined plates may be disposed inside the powder collection frame 190. In some embodiments, the number of the at least two sloping plates can be set according to actual needs. In some embodiments, at least two interleaved swash plates may be inclined downward. In some embodiments, the downward inclination angle of at least two mutually staggered inclined plates can be adjusted according to actual conditions. For example, the inclined plate may be inclined downward at an angle of 10 ° to 60 °. In some embodiments, there is a gap between at least two staggered sloping plates, so that the falling volatile matter or other gas powder can fall to the bottom of the powder collection frame 190, and the volatile matter or other gas powder is prevented from being stuck on the middle or upper sloping plate.

As shown in fig. 7, the volatile matter or other gaseous powder falls into the powder collection box 190, then falls onto the left sloping plate 191, slides down from the sloping plate 191 to the right sloping plate 192 due to gravity, then slides down to the sloping plate 193, 194, 195 in order due to gravity, and finally falls into the bottom of the powder collection box 190. If the environment fluctuates or the powder floats again due to heat, the powder floating upward is blocked by the lower surfaces of the inclined plate 195, the inclined plate 194, the inclined plate 193, the inclined plate 192 and the inclined plate 191 in sequence, and is difficult to float upward out of the powder collecting frame 190.

Through setting up a plurality of swash plates of staggered arrangement, can avoid volatile substance or other gaseous powder card on the swash plate on middle part or upper portion for the volatile substance that drops or other gaseous powder can fall into the bottom that the frame 190 was collected to the powder, can also prevent simultaneously to a certain extent that the powder from floating once more out the powder and collect frame 190, get into the furnace of crystal growth stove, and then float and lead to the fact the corruption to the crystal surface.

The following describes the use of the observation window device 100 in the crystal growth furnace with reference to fig. 2 to 7, and it should be noted that the present embodiment is only used for illustrating the technical solution and not for limiting the technical solution. As shown in fig. 2, the gas required for crystal growth is introduced through the gas inlet 130, and the circulating cooling water is introduced through the water inlet 140, flows through the hollow structure (not shown in fig. 2) of the frame body 120 of the entire observation window device 100, and flows out of the water outlet 150. During the crystal growth process, part of the raw material (for example, Ga) on the surface of the raw material is melted₂O₃Or SiO₂) Volatile, volatile matter will float randomly throughout the firebox, with some of the volatile matter flowing near the viewing window 110. As shown in fig. 3-6, the gas needed for crystal growth introduced from the gas inlet 130 flows into the furnace through the gas outlet 160, and under the action of the wind direction adjusting plate 170, the flowing gas is converged near the observation window 110 to form a gas barrier with two-sided cross or four-sided cone shape. As shown in fig. 6, when the volatile matter approaches the gas barrier, the volatile matter drifts to the baffle 180 and is blocked by the baffle 180 under the blocking action of the gas barrier; because the surface temperature of the baffle 180 is low due to the circulating cooling water, the volatile matter can fall down into the powder collection frame 190 under the action of gravity after being cooled. Along with the progress of the crystal growth process, as shown in fig. 7, a large amount of volatile powder falls into the powder collection frame 190, and sequentially falls to the bottom of the powder collection frame 190 from the plurality of inclined plates which are staggered with each other due to the action of gravity, and due to the blocking action of the plurality of inclined plates which are staggered with each other, the powder can be prevented from floating out of the powder collection frame 190 again and entering the hearth of the crystal growth furnace, and then floating to the crystal surface to crystalThe body causes corrosion.

Some possible benefits of embodiments of the present disclosure include, but are not limited to:

(1) by utilizing the characteristic that required gas needs to be introduced in the crystal growth process, the introduced gas forms a gas barrier near the observation window by adjusting the gas flow direction (for example, by setting the corner angle of a gas outlet or adjusting through a wind direction adjusting plate), so that volatile matters are prevented from being adhered to the inner side of the observation window, the surface of the observation window is kept clean, and the condition in the crystal growth furnace can be observed better;

(2) the baffle plate with cooling effect, adjustable cross section length and arc bending is arranged, and the included angle theta between the baffle plate and the observation window is arranged₂And the included angle theta between the wind direction adjusting plate and the observation window (or the included angle theta between the baffle plate and the observation window)₂And the angle theta between the two sub-boards₁) The matching relation can better realize the blocking effect on volatile matters or other gases, and prevent flowing gas at the gas outlet from directly flowing into a crystal growth heating area to disturb the stability of a temperature field;

(3) the powder collecting frame is arranged below the baffle, and the baffle and the powder collecting frame are combined for use, so that volatile powder can be collected in the powder collecting frame, and the deposited volatile powder is prevented from floating in the cavity of the crystal growth furnace again to corrode the surface of the crystal;

(4) through collecting inside a plurality of swash plates that set up downward sloping, crisscross at the powder, can avoid volatile substance or other gaseous powder card on the swash plate on middle part or upper portion for volatile substance or other gaseous powder fall into the bottom that the frame was collected to the powder, can also prevent simultaneously that the powder from floating out the powder once more and collecting the frame, get into the furnace of crystal growth stove, cause the corruption to the crystal surface.

It is to be noted that different embodiments may produce different advantages, and in different embodiments, any one or combination of the above advantages may be produced, or any other advantages may be obtained.

It should be noted that the above embodiments are only for illustrating the technical solutions of the present invention and not for limiting the technical solutions, and those skilled in the art should understand that modifications or equivalent substitutions can be made on the technical solutions of the present invention without departing from the spirit and scope of the technical solutions, and all should be covered in the claims of the present invention.