阅读说明：本技术 一种靶材垂直度检测装置 (Target perpendicularity detection device ) 是由 何建进 陈江伟 何凌男 于 2019-10-21 设计创作，主要内容包括：本发明公开了一种靶材垂直度检测装置,包括底座和透光台,底座和透光台的两侧间安装升降机构,底座上安装多个照明灯,透光台顶部两个邻边间安装固定定位块,透光台顶部另两个邻边处均安装固定板,固定板两端开有导向孔,导向孔内套接导向杆,导向杆一端连接活动定位块,固定板外壁上安装推动气缸,推动气缸的推杆连接活动定位块的外壁。靶材的两个邻边紧贴固定定位块的两个内壁,推动气缸推动活动定位块,活动定位块将靶材的另两个邻边定位压紧,便于对不同大小的靶材固定,照明灯的光线从透光台底部照射到靶材四边,便于人眼观察,通过升降机构带动透光台升降,调节透光台高度,便于控制靶材与照明灯间距,便于对不同高度的靶材进行检测观察。(The invention discloses a target perpendicularity detection device which comprises a base and a light transmission table, wherein a lifting mechanism is arranged between two sides of the base and the light transmission table, a plurality of illuminating lamps are arranged on the base, a fixed positioning block is arranged between two adjacent edges of the top of the light transmission table, a fixing plate is arranged at the other two adjacent edges of the top of the light transmission table, guide holes are formed in two ends of the fixing plate, guide rods are sleeved in the guide holes, one ends of the guide rods are connected with a movable positioning block, a pushing cylinder is arranged on the outer wall of the fixing plate, and a pushing rod of the pushing cylinder. Two adjacent sides of target are hugged closely two inner walls of fixed positioning piece, promote the cylinder and promote movable positioning piece, movable positioning piece compresses tightly two other adjacent side location of target, be convenient for to not the target of equidimension fixed, the light of light shines the target four sides from printing opacity platform bottom, the human eye of being convenient for observes, drives printing opacity platform through elevating system and goes up and down, adjusts printing opacity platform height, be convenient for control target and light interval, be convenient for detect the observation to the target of co-altitude.)

1. The utility model provides a target straightness detection device that hangs down, includes base (1) and printing opacity platform (2), its characterized in that: the LED illuminating lamp is characterized in that a fixing seat (3) is fixedly arranged at four corners on a base (1), guide columns (4) are fixedly arranged at four corners of the bottom of a light-transmitting table (2), the guide columns (4) are slidably clamped in an inner cavity of the fixing seat (3), a lifting mechanism (5) is arranged between two sides of the base (1) and the light-transmitting table (2), a plurality of illuminating lamps (12) are fixedly arranged on the base (1), a fixed positioning block (6) is fixedly arranged between two adjacent sides at the top of the light-transmitting table (2), a fixed plate (7) is fixedly arranged at another two adjacent sides at the top of the light-transmitting table (2), guide holes (9) are formed in two ends of the fixed plate (7), guide rods (10) are slidably sleeved in the guide holes (9), one ends, close to the fixed positioning blocks (6), of the guide rods (10) penetrate through the guide holes (9) and are fixedly, and a pushing cylinder (11) is fixedly installed on the outer wall of the fixing plate (7) between the guide holes (9), and a push rod of the pushing cylinder (11) penetrates through the fixing plate (7) and is fixedly connected with the outer wall of the movable positioning block (8).

2. The device for detecting the perpendicularity of a target according to claim 1, wherein: printing opacity platform (2) are transparent ya keli board, light (12) are a plurality of LEDs etc. and a plurality of LEDs etc. along base (1) top surface evenly distributed, the vertical upwards of light (12).

3. The device for detecting the perpendicularity of a target according to claim 1, wherein: the L-shaped structure of the fixed positioning block (6) is characterized in that inner walls on two sides of the fixed positioning block (6) are perpendicular to each other, the two fixing plates (7) are parallel to the two inner walls of the fixed positioning block (6) of the L-shaped structure respectively, the diameters of the guide holes (9) and the guide rods (10) are the same, and the axes of the guide holes (9) and the guide rods (10) are perpendicular to the fixing plates (7).

4. The device for detecting the perpendicularity of a target according to claim 1, wherein: elevating system (5) are including fixed cover (51) and sliding sleeve (52), the fixed cover of the equal fixed mounting in both sides top (51) of base (1), the equal fixed mounting sliding sleeve (52) in both sides bottom of printing opacity platform (2), sliding sleeve (52) slide and cup joint in fixed cover (51), lifting screw (53) are cup jointed through the helicitic texture to the inner chamber of sliding sleeve (52), lifting screw (53)'s bottom is rotated and is run through top and fixed connection worm wheel (55) of base (1), mounting groove (56) have been seted up in base (1) of fixed cover (51) bottom, worm (55) are cup jointed in mounting groove (56) internal rotation, the both ends of worm (55) mesh worm wheel (54) of base (1) both sides respectively.

5. The apparatus according to claim 4, wherein: sliding sleeve (52) are located printing opacity platform (2) lateral wall midpoint department, the inner wall of fixed cover (51) is opened there is spacing groove (13), outer wall bottom fixed mounting stopper (14) of sliding sleeve (52), stopper (14) slip joint is in spacing groove (13), the one end of worm (55) is rotated and is run through the lateral wall and the fixed mounting hand wheel (15) of base (1).

Technical Field

The invention relates to the technical field of targets, in particular to a target perpendicularity detection device.

Background

The target is a sputtering source which forms various functional films on a substrate by sputtering through a magnetron sputtering system, multi-arc ion plating system or other types of film coating systems under proper process conditions, common targets have cylindrical and rectangular structures, for rectangular targets, the perpendicularity of the outer wall of the target needs to be detected after the target is manufactured, the target is directly placed on a detection table by adopting a measuring tool in the conventional detection mode, the target is easy to move during detection, the target is often observed by means of light rays such as a table lamp above the detection table, the head is easy to shield the light rays during observation, the sight line of an observation point is dark, the peripheral outer wall of the target cannot be illuminated by the illumination of the table lamp above, the observation by human eyes is not facilitated, and the target perpendicularity detection device is provided for solving the problems.

Disclosure of Invention

The invention aims to provide a target perpendicularity detection device to solve the problems in the background technology.

In order to achieve the purpose, the invention provides the following technical scheme: a target perpendicularity detection device comprises a base and a light transmission table, wherein fixed seats are fixedly arranged at four corners of the base, four corners of the bottom of the light-transmitting table are fixedly provided with guide columns, the guide columns are clamped in the inner cavity of the fixed seat in a sliding manner, a lifting mechanism is arranged between the two sides of the base and the light-transmitting table, a plurality of illuminating lamps are fixedly arranged on the base, a fixed positioning block is fixedly arranged between two adjacent edges of the top of the light-transmitting table, fixed plates are fixedly arranged at the other two adjacent edges of the top of the light-transmitting table, guide holes are formed at two ends of the fixed plate, guide rods are sleeved in the guide holes in a sliding manner, one end of each guide rod, which is close to the fixed positioning block, penetrates through the guide holes and is fixedly connected with the movable positioning block, and a push cylinder is fixedly installed on the outer wall of the fixed plate between the guide holes, and a push rod of the push cylinder penetrates through the fixed plate and is fixedly connected with the outer wall of the movable positioning block.

Preferably, the printing opacity platform is transparent ya keli board, the light is a plurality of LEDs etc. and a plurality of LEDs etc. are along base top surface evenly distributed, the light of light is vertical upwards.

Preferably, the fixing positioning block is of an L-shaped structure, inner walls of two sides of the fixing positioning block are perpendicular to each other, the two fixing plates are parallel to the two inner walls of the fixing positioning block of the L-shaped structure respectively, the diameters of the guide hole and the guide rod are the same, and the axes of the guide hole and the guide rod are perpendicular to the fixing plates.

Preferably, elevating system is including fixed cover and slip cap, the fixed cover of the equal fixed mounting in both sides top of base, the equal fixed mounting slip cap in both sides bottom of printing opacity platform, the slip cap slides and cup joints in the fixed cover, the inner chamber of slip cap cup joints the lifting screw through the helicitic texture, the bottom of lifting screw rotates top and the fixed connection worm wheel that runs through the base, set up the mounting groove in the base of fixed cover bottom, the worm is cup jointed to the mounting groove internal rotation, the worm wheel of base both sides is meshed respectively at the both ends of worm.

Preferably, the sliding sleeve is located printing opacity platform lateral wall midpoint department, the inner wall of fixed cover is opened there is the spacing groove, the outer wall bottom fixed mounting stopper that the slip cup jointed, the stopper slip joint is at the spacing inslot, the one end of worm is rotated and is run through the lateral wall and the fixed mounting hand wheel of base.

Compared with the prior art, the invention has the beneficial effects that: the two adjacent edges and one corner of the target are preliminarily positioned through the inner walls of the two sides of the fixed positioning block, the air cylinder is pushed to push the movable positioning block, and the movable positioning block is guided by the guide rod and the guide hole to move parallel to the two side walls of the fixed positioning block, so that the other two adjacent edges of the target are positioned and pressed, the target with different sizes can be positioned and fixed conveniently, and the detection and observation are facilitated; the light of the illuminating lamp is irradiated from the bottom of the light-transmitting table, and the distribution area of the illuminating lamp is larger than the area between the fixed positioning block and the fixed plate, so that the target is completely irradiated, the head is prevented from shielding the light during observation, and the observation by human eyes is facilitated; the worm gears on the two sides of the base are driven to rotate simultaneously through the worm, so that the lifting studs on the two sides of the base rotate simultaneously, the sliding sleeves slide along the fixed sleeves simultaneously, the light transmission table is driven to lift rapidly, the distance between the target and the illuminating lamp is convenient to adjust, and the targets with different heights can be detected and observed conveniently; the sliding sleeve is located printing opacity platform lateral wall midpoint department to both sides atress is more balanced when making the printing opacity platform go up and down, goes up and down more steadily, and carries on spacingly to the sliding sleeve through stopper and spacing groove, ensures that sliding sleeve and fixed cover keep being connected.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic sectional view of the lifting mechanism of the present invention;

FIG. 3 is a schematic top view of the base of the present invention.

In the figure: the light guide plate comprises a base 1, a light transmission table 2, a fixing seat 3, a guide post 4, a lifting mechanism 5, a fixed sleeve 51, a sliding sleeve 52, a lifting stud 53, a worm gear 54, a worm 55, a mounting groove 56, a fixed positioning block 6, a fixed plate 7, a movable positioning block 8, a guide hole 9, a guide rod 10, a pushing cylinder 11, a lighting lamp 12, a limiting groove 13, a limiting block 14 and a hand wheel 15.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-3, the present invention provides a technical solution: a target perpendicularity detection device comprises a base 1 and a light transmission platform 2, wherein fixed seats 3 are fixedly arranged at four corners of the upper part of the base 1, guide posts 4 are fixedly arranged at four corners of the bottom of the light transmission platform 2, the guide posts 4 are slidably clamped in an inner cavity of the fixed seats 3, install elevating system 5 between base 1 and the both sides of printing opacity platform 2, a plurality of light of fixed mounting 12 on base 1, fixed mounting fixed positioning piece 6 between two adjacent limits at 2 tops of printing opacity platform, the equal fixed mounting fixed plate 7 of two other adjacent limits departments at 2 tops of printing opacity platform, open at 7 both ends of fixed plate has guide hole 9, sliding sleeve connects guide bar 10 in guide hole 9, guide bar 10 runs through guide hole 9 and fixed connection movable positioning piece 8 near the one end of fixed positioning piece 6, fixed mounting promotes cylinder 11 on 7 outer walls of fixed plate between guide hole 9, the push rod of promoting cylinder 11 runs through the outer wall of fixed plate 7 and fixed connection movable positioning piece 8. Hug closely two inner walls of fixed position piece 6 with two adjacent sides of target, and the coincidence of target one corner and 6 corners of fixed position piece, promotion cylinder 11 promotes movable positioning piece 8, movable positioning piece 8 passes through guide bar 10 and 9 direction parallels of guiding hole and the both sides wall of fixed position piece 6 and removes, thereby two adjacent side location compress tightly in addition to the target, be convenient for fixed to the target of equidimension not, the light of light 12 shines the target four sides from printing opacity platform 2 bottom, the people's eye of being convenient for observe, and drive printing opacity platform 2 through elevating system 5 and go up and down, thereby adjust printing opacity platform 2 height, be convenient for detect the observation to the target of co-altitude.

Printing opacity platform 2 is transparent ya keli board, and light 12 is a plurality of LEDs etc. and a plurality of LEDs etc. are along 1 top surface evenly distributed of base, and the light of light 12 is vertical upwards, and 2 bottoms of the perpendicular printing opacity platforms of light such as a plurality of LEDs shine to illuminate the target bottom completely.

The L-shaped structure of the fixed positioning block 6, the inner walls of two sides of the fixed positioning block 6 are perpendicular to each other, the two fixing plates 7 are parallel to the two inner walls of the fixed positioning block 6 of the L-shaped structure respectively, the diameters of the guide holes 9 and the guide rods 10 are the same, the axes of the guide holes 9 and the guide rods 10 are perpendicular to the fixing plates 7, it is ensured that the movable positioning block 8 is parallel to the inner walls of the fixed positioning block 6 after being guided by the guide rods 10 and the guide holes 9, and therefore the rectangular target is positioned and fixed.

Elevating system 5 is including fixed cover 51 and slip cap 52, the fixed cover 51 of the equal fixed mounting in both sides top of base 1, the equal fixed mounting slip cap 52 in both sides bottom of printing opacity platform 2, slip cap 52 slides and cup joints in fixed cover 51, the inner chamber of slip cap 52 cup joints lifting screw 53 through the helicitic texture, lifting screw 53's bottom is rotated and is run through base 1's top and fixed connection worm wheel 55, seted up mounting groove 56 in the base 1 of fixed cover 51 bottom, the interior rotation of mounting groove 56 cup joints worm 55, the both ends of worm 55 mesh the worm wheel 54 of base 1 both sides respectively, rotate worm 55, make the worm wheel 54 of base both sides rotate simultaneously, worm wheel 54 drives lift double-screw 53 and rotates, lift double-screw 53 passes through the helicitic texture and drives slip cap 52 and slide along fixed cover 51, thereby drive printing opacity platform.

Sliding sleeve 52 is located 2 lateral wall midpoints of printing opacity platforms, thereby it is more balanced to make the both sides atress when printing opacity platform 2 goes up and down, it is more steady to go up and down, the inner wall of fixed cover 51 is opened there is spacing groove 13, the outer wall bottom fixed mounting stopper 14 of 52 is cup jointed in the slip, stopper 14 slip joint is in spacing groove 13, it is spacing to carry out sliding sleeve 52 through stopper 14 and spacing groove 13, avoid the fixed cover 51 of sliding sleeve 52 roll-off, the one end of worm 55 is rotated and is run through base 1's lateral wall and fixed mounting hand wheel 15, be convenient for rotate worm 55.

The working principle is as follows: when the invention is used, two adjacent edges of a target are tightly attached to two inner walls of a fixed positioning block 6, one corner of the target is coincided with the corner of the fixed positioning block 6, a pushing cylinder 11 pushes a movable positioning block 8, the movable positioning block 8 is guided by a guide rod 10 and a guide hole 9 to move parallel to two side walls of the fixed positioning block 6, so that the other two adjacent edges of the target are positioned and pressed tightly, the targets with different sizes are fixed conveniently, light rays of an illuminating lamp 12 are irradiated to four sides of the target from the bottom of a light transmission table 2, the light rays are convenient to observe by human eyes, a hand wheel 15 is manually rotated, the hand wheel 15 drives a worm 55 to rotate, the worm 55 simultaneously drives worm gears 54 on two sides of a base 1 to rotate, the worm gears 54 drive a lifting stud 53 to rotate, the lifting stud 53 drives a sliding sleeve 52 to slide along a, the target materials with different heights can be detected and observed conveniently.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.