阅读说明：本技术 一种碱洗硅处理碱性污水处理装置及其使用方法 (Alkaline silicon washing alkaline sewage treatment device and use method thereof ) 是由 石坚 李�杰 于友 朱棣 于 2019-09-07 设计创作，主要内容包括：一种碱洗硅处理碱性污水处理装置及其使用方法,属于碱洗硅处理技术领域,包括控制箱、底架和固定安装在底架上的反应罐,所述反应罐侧壁底部通过二氧化碳进管安装有二氧化碳液罐,反应罐侧壁上部安装有二氧化碳出管,反应罐的底面左右两侧分别安装有进液管和排液管,所述排液管出口端连接有压滤装置。控制箱接收各个传感器、检测计的信号,实现对各个阀门和循环泵的自动控制,通过二氧化碳进管向反应罐内输送二氧化碳,进液管向反应罐输送碱性污水,在反应罐内二氧化碳与碱性污水反应,生成PH接近中性,无污染、无毒的物质,环保性高,且二氧化碳成本低廉,安全性好。(The alkaline silicon washing treatment alkaline sewage treatment device comprises a control box, a bottom frame and a reaction tank fixedly mounted on the bottom frame, wherein a carbon dioxide liquid tank is mounted at the bottom of the side wall of the reaction tank through a carbon dioxide inlet pipe, a carbon dioxide outlet pipe is mounted at the upper part of the side wall of the reaction tank, a liquid inlet pipe and a liquid outlet pipe are respectively mounted at the left side and the right side of the bottom surface of the reaction tank, and the outlet end of the liquid outlet pipe is connected with a filter pressing device. The control box receives signals of each sensor and the detector, realizes automatic control of each valve and the circulating pump, and carbon dioxide is conveyed into the reaction tank through the carbon dioxide inlet pipe, alkaline sewage is conveyed into the reaction tank through the liquid inlet pipe, and the carbon dioxide reacts with the alkaline sewage in the reaction tank to generate a substance with pH close to neutrality, no pollution and no toxicity, and the control box is high in environmental protection, low in cost and good in safety.)

1. The utility model provides an alkali wash silicon treatment alkaline sewage treatment plant, characterized by, including control box, chassis (2) and retort (1) of fixed mounting on chassis (2), retort (1) lateral wall bottom advances pipe (3) through carbon dioxide and installs carbon dioxide fluid reservoir (8), and carbon dioxide exit tube (4) are installed on retort (1) lateral wall upper portion, and feed liquor pipe (6) and fluid-discharge tube (5) are installed respectively to the bottom surface left and right sides of retort (1), fluid-discharge tube (5) exit end is connected with filter pressing device.

2. The alkaline silicon washing treatment alkaline sewage treatment device according to claim 1, wherein the carbon dioxide outlet pipe (4), the liquid inlet pipe (6) and the liquid outlet pipe (5) are respectively provided with a gas outlet valve (14), a liquid inlet valve (17) and a liquid outlet valve (16), and the front end and the rear end of the carbon dioxide inlet pipe (3) are respectively provided with a gas inlet valve (12) and a stop valve (13).

3. The alkaline silicon washing treatment alkaline sewage treatment device according to claim 2, wherein the carbon dioxide outlet pipe (4) is communicated with the carbon dioxide inlet pipe (3) between the air inlet valve (12) and the stop valve (13) through a circulating pump (11).

4. The alkaline silicon washing treatment alkaline sewage treatment device according to claim 1, wherein an exhaust pipe (7) is installed on the top surface of the reaction tank (1), and an oxygen sensor (10) and an exhaust valve (15) are installed on the exhaust pipe (7).

5. The alkaline silicon washing treatment alkaline sewage treatment device according to claim 1, wherein the side wall and the bottom surface of the reaction tank (1) are respectively provided with a liquid level meter (19) and a PH meter (18).

6. The alkaline silicon washing treatment alkaline sewage treatment device according to claim 1, wherein an aeration pipe (20) communicated with the carbon dioxide inlet pipe (3) is installed inside the reaction tank (1).

7. The alkaline silicon washing treatment alkaline sewage treatment device according to claim 1, wherein a pressure detection device is installed on the top of the reaction tank (1).

8. The alkaline silicon washing treatment alkaline sewage treatment device according to claim 7, wherein the pressure detection device comprises an expansion balloon (9) which is arranged above the top surface of the reaction tank (1) through a communicating pipe (21), and the left side and the right side of the expansion balloon (9) are respectively provided with a transmitting grating (22) and a receiving grating (23).

9. The alkaline silicon washing treatment alkaline sewage treatment device according to claim 1, wherein the carbon dioxide outlet pipe (4) is positioned lower than the exhaust pipe (7).

10. A use method of an alkaline silicon washing treatment alkaline sewage treatment device is characterized by comprising the following steps:

s1: exhausting; the liquid inlet pipe is connected with an alkaline silicon washing treatment alkaline sewage discharge pipeline, the control box controls the liquid inlet valve and the exhaust valve to be opened, the liquid inlet pipe conveys alkaline silicon washing treatment alkaline sewage into the reaction tank, the liquid level is monitored by the liquid level meter in real time, when the alkaline silicon washing treatment alkaline sewage reaches a set liquid level, the control box controls the liquid inlet valve to be closed, the control box controls the stop valve and the air inlet valve to be opened, carbon dioxide is filled into the reaction tank through the carbon dioxide liquid tank, original air in the reaction tank is discharged from the top exhaust pipe, the oxygen sensor detects the oxygen content of the discharged gas, and when the oxygen sensor detects that the oxygen content is lower than a preset value, the control box;

s2: carrying out reaction; the carbon dioxide liquid tank continuously fills carbon dioxide into the reaction tank, the expansion balloon swells, when the receiving grating cannot receive the signal of the emission grating, the control box controls the stop valve to be closed, the control box controls the gas outlet valve to be opened and controls the circulating pump to operate, the circulating pump extracts the carbon dioxide in the reaction tank and circulates into the reaction tank from the carbon dioxide inlet pipe, and the carbon dioxide is in contact reaction with alkaline silicon washing treatment alkaline sewage in the reaction tank through the aeration pipe; the carbon dioxide in the reaction tank is continuously consumed, the expansion balloon becomes small, and when the signal of the receiving grating received by the transmitting grating is less than two thirds, the control box controls the stop valve to be opened, and the carbon dioxide is repeatedly filled into the reaction tank; when the PH value of the internal solution detected by the PH meter is lower than 9, the control box controls the air inlet valve and the air outlet valve to be closed, and controls the circulating pump to stop running;

s3: discharging; the control box controls the drain valve and the exhaust valve to be opened, the reaction solution in the reaction tank enters the filter pressing device through the drain pipe, the filter pressing device carries out filter pressing and separation on substances which can be subjected to filter pressing in the reaction solution, and the control box controls the drain valve to be closed;

s4: cleaning; feed liquor pipe switch-on clear water pipe, control box control feed liquor valve and discharge valve are opened, the clear water pipe is to the inside clear water that injects into of retort, control box control air outlet valve and admission valve are opened, control box control circulating pump operation, rinse the crystallization of aeration pipe position repeatedly, after the time of predetermineeing, control box control circulating pump stop motion, control box control air outlet valve and admission valve are closed, control box control flowing back valve is opened, the inside flush fluid of retort passes through the fluid-discharge tube and discharges.

Technical Field

The invention belongs to the technical field of alkali silicon washing treatment, and particularly relates to an alkali silicon washing treatment alkaline sewage treatment device and a using method thereof.

Background

In the production of semiconductor devices, silicon wafers are indispensable materials, and the silicon wafers must be strictly clean, so that even trace contamination can cause the failure of the semiconductor devices. After long-time use, the surface of the silicon wafer is easy to be polluted, and the silicon wafer is cleaned to remove the polluted impurities on the surface of the silicon wafer, including organic matters and inorganic matters, so that the silicon material is recycled and reused, and the resource utilization efficiency is ensured. Some of these impurities are deposited on the surface of the silicon wafer in an atomic state or an ionic state, or in a thin film form or a particle form, and cause various defects in normal use.

In the silicon treatment cleaning technology, alkaline solution is usually used for reacting and repeatedly washing impurities on the surface of a silicon wafer to achieve the purpose of taking out the impurities, in the process, the alkaline solution is large in demand, the washed sewage contains a large amount of alkaline solution and metasilicate ion mixed strong base solution, the output is large, in the prior treatment technology, the aim of treating the alkaline sewage is fulfilled by performing neutralization reaction through hydrochloric acid, however, in the neutralization process, a strong acid substance is adopted, the environment friendliness is low, the risk is high, the raw materials are expensive, the reaction process is strict, a large amount of chloride ion reactant is generated, the direct discharge can seriously affect the environment, other treatment processes are required to be added, and the treatment cost is increased.

Disclosure of Invention

The invention provides an alkaline silicon washing treatment alkaline sewage treatment device and a using method thereof, aiming at solving the problems that hydrochloric acid is used for neutralization in the treatment of alkaline sewage after silicon treatment and cleaning, the environment friendliness is low, the danger is high, raw materials are expensive, the reaction process is strict, a large amount of chloride ion reactants are generated, the direct discharge can cause serious adverse effects on the environment, other treatment processes are required to be additionally added, and the treatment cost is increased.

The invention is realized by the following technical scheme.

The utility model provides an alkali wash silicon treatment alkaline sewage treatment plant, includes control box, chassis and the retort of fixed mounting on the chassis, retort lateral wall bottom advances the pipe through carbon dioxide and installs the carbon dioxide fluid reservoir, and carbon dioxide exit tube is installed on retort lateral wall upper portion, and feed liquor pipe and fluid-discharge tube are installed respectively to the bottom surface left and right sides of retort, the fluid-discharge tube exit end is connected with filter pressing device. The control box receives signals of each sensor and each detector, automatic control of each valve is achieved, carbon dioxide is conveyed into the reaction tank through the carbon dioxide inlet pipe, alkaline sewage is conveyed into the reaction tank through the liquid inlet pipe, the carbon dioxide reacts with alkaline substances and metasilicic acid ion substances in the alkaline sewage in the reaction tank, pollution-free and non-toxic bicarbonate and metasilicic acid hydrogen ion salts which can be separated through the filter pressing device are generated, and the automatic control system is high in environmental friendliness, low in carbon dioxide cost and good in safety.

The invention is further improved in that the carbon dioxide outlet pipe, the liquid inlet pipe and the liquid discharge pipe are respectively provided with an air outlet valve, a liquid inlet valve and a liquid discharge valve, and the front end and the rear end of the carbon dioxide inlet pipe are respectively provided with an air inlet valve and a stop valve. The automatic opening and closing of each valve is controlled by the control box to realize the automatic control process flow.

The invention further improves that the carbon dioxide outlet pipe is communicated with the carbon dioxide inlet pipe between the air inlet valve and the stop valve through the circulating pump. The carbon dioxide circularly filled into the reaction tank through the circulating pump ensures that the carbon dioxide and the internal solution react more fully and thoroughly, the consumption of carbon dioxide raw materials is saved, carbon dioxide gas is not wasted, and the cost is saved.

The invention further improves that the top surface of the reaction tank is provided with an exhaust pipe, and the exhaust pipe is provided with an oxygen sensor and an exhaust valve. The excess air in the reaction tank can be discharged through the exhaust pipe, the degree of the discharged air is detected through the oxygen sensor, and the reaction tank is closed through the exhaust valve.

In a further improvement of the invention, the side wall and the bottom surface of the reaction tank are respectively provided with a liquid level meter and a pH meter. The level gauge detects inside solution liquid level, the control feed liquor volume of being convenient for, and the PH meter detects reaction liquid pH value, detects whether to react fully completely, and degree of automation is high.

The invention is further improved in that an aeration pipe communicated with the carbon dioxide inlet pipe is arranged in the reaction tank. Through aeration, the contact reaction degree of carbon dioxide and sewage is increased, so that the reaction is more sufficient and thorough.

The invention further improves that the top of the reaction tank is provided with a pressure detection device. The pressure detection device is used for detecting the inflation pressure in the reaction tank, so that the controller can control the automatic carbon dioxide supplement conveniently, and the pressure self-adaption function is realized.

The invention further improves the pressure detection device and comprises an expansion balloon which is arranged above the top surface of the reaction tank through a communicating pipe, and the left side and the right side of the expansion balloon are respectively provided with a transmitting grating and a receiving grating. The signal quantity of the receiving grating for receiving the transmitting grating is shielded through the expansion and the reduction of the expansion balloon, so that whether carbon dioxide needs to be supplemented in the reaction tank or not is detected, the control box can conveniently control the automatic carbon dioxide supplementation, and the reaction is sufficient and efficient.

In a further improvement of the present invention, the carbon dioxide outlet pipe is positioned lower than the exhaust pipe. Even if the air is not thoroughly discharged, the carbon dioxide circulation is not influenced, and the reaction effect is not influenced.

The invention is realized by the following technical scheme.

A use method of an alkaline silicon washing treatment alkaline sewage treatment device comprises the following steps:

s1: exhausting; the liquid inlet pipe is connected with an alkaline silicon washing treatment alkaline sewage discharge pipeline, the control box controls the liquid inlet valve and the exhaust valve to be opened, the liquid inlet pipe conveys alkaline silicon washing treatment alkaline sewage into the reaction tank, the liquid level is monitored by the liquid level meter in real time, when the alkaline silicon washing treatment alkaline sewage reaches a set liquid level, the control box controls the liquid inlet valve to be closed, the control box controls the stop valve and the air inlet valve to be opened, carbon dioxide is filled into the reaction tank through the carbon dioxide liquid tank, original air in the reaction tank is discharged from the top exhaust pipe, the oxygen sensor detects the oxygen content of the discharged gas, and when the oxygen sensor detects that the oxygen content is lower than a preset value, the control box;

s2: carrying out reaction; the carbon dioxide liquid tank continuously fills carbon dioxide into the reaction tank, the expansion balloon swells, when the receiving grating cannot receive the signal of the emission grating, the control box controls the stop valve to be closed, the control box controls the gas outlet valve to be opened and controls the circulating pump to operate, the circulating pump extracts the carbon dioxide in the reaction tank and circulates into the reaction tank from the carbon dioxide inlet pipe, and the carbon dioxide is in contact reaction with alkaline silicon washing treatment alkaline sewage in the reaction tank through the aeration pipe; the carbon dioxide in the reaction tank is continuously consumed, the expansion balloon becomes small, and when the signal of the receiving grating received by the transmitting grating is less than two thirds, the control box controls the stop valve to be opened, and the carbon dioxide is repeatedly filled into the reaction tank; when the PH value of the internal solution detected by the PH meter is lower than 9, the control box controls the air inlet valve and the air outlet valve to be closed, and controls the circulating pump to stop running;

s3: discharging; the control box controls the drain valve and the exhaust valve to be opened, the reaction solution in the reaction tank enters the filter pressing device through the drain pipe, the filter pressing device carries out filter pressing and separation on substances which can be subjected to filter pressing in the reaction solution, and the control box controls the drain valve to be closed;

s4: cleaning; feed liquor pipe switch-on clear water pipe, control box control feed liquor valve and discharge valve are opened, the clear water pipe is to the inside clear water that injects into of retort, control box control air outlet valve and admission valve are opened, control box control circulating pump operation, rinse the crystallization of aeration pipe position repeatedly, after the time of predetermineeing, control box control circulating pump stop motion, control box control air outlet valve and admission valve are closed, control box control flowing back valve is opened, the inside flush fluid of retort passes through the fluid-discharge tube and discharges.

The invention has the beneficial effects that: 1. the carbon dioxide and the alkaline silicon washing treated alkaline sewage are fully reacted, so that the reaction product is non-toxic and pollution-free bicarbonate and metasilicic acid hydrogen ion salt which can be separated by a filter pressing device, the environmental protection property is high, and the alkaline sewage is well treated; 2. the cost of the used raw material carbon dioxide is saved more than that of the original raw material hydrochloric acid, the process is simple, and the used carbon dioxide is safer and more reliable than that of the strong acid hydrochloric acid; 3. the structure is simple, the control box receives the detection signals of all detection ends, so that the opening and closing of all valves are controlled, and the automation degree is high; 4. the internal circulation mode saves the consumption of carbon dioxide raw materials, does not waste carbon dioxide gas, has sufficient reaction and stable and reliable operation, and greatly saves the cost for treating alkaline sewage by alkali silicon washing.

Drawings

Fig. 1 is a schematic structural diagram of an embodiment of the present invention.

Fig. 2 is an enlarged structural schematic diagram of an expansion balloon according to an embodiment of the invention.

In the drawings: 1. the reaction tank comprises a reaction tank body, 2, a bottom frame, 3, a carbon dioxide inlet pipe, 4, a carbon dioxide outlet pipe, 5, a liquid discharge pipe, 6, a liquid inlet pipe, 7, an exhaust pipe, 8, a carbon dioxide liquid tank, 9, an expansion balloon, 10, an oxygen sensor, 11, a circulating pump, 12, an air inlet valve, 13, a stop valve, 14, an air outlet valve, 15, an exhaust valve, 16, a liquid discharge valve, 17, a liquid inlet valve, 18, a PH meter, 19, a liquid level meter, 20, an aeration pipe, 21, a communicating pipe, 22, a transmitting grating, 23 and a receiving grating.

Detailed Description

The following further describes embodiments of the present invention with reference to the drawings.

As shown in the attached drawing, the alkaline silicon washing treatment alkaline sewage treatment device comprises a control box, a bottom frame 2 and a reaction tank 1 fixedly installed on the bottom frame 2, a carbon dioxide liquid tank 8 is installed at the bottom of the side wall of the reaction tank 1 through a carbon dioxide inlet pipe 3, an air inlet valve 12 and a stop valve 13 are installed at the front end and the rear end (the inlet end and the outlet end of the carbon dioxide liquid tank) of the carbon dioxide inlet pipe 3 respectively, a carbon dioxide outlet pipe 4 is installed on the upper portion of the side wall of the reaction tank 1, an air outlet valve 14 is installed on the carbon dioxide outlet pipe 4, a liquid inlet pipe 6 and a liquid outlet pipe 5 are installed on the left side and the right side of the bottom surface of the reaction tank 1 respectively, a liquid inlet valve 17 and a.

Exhaust pipe 7 is installed to 1 top surface of retort, and 1 inside carbon dioxide exit tube 4 mounted position of retort is less than 7 mounted position of exhaust pipe, even inside has few air to remain, also can avoid the air to pass through the circulating pump circulation, avoids reducing the reaction effect. An oxygen sensor 10 and an exhaust valve 15 for detecting air content are installed on the exhaust pipe 7, and a liquid level meter 19 for detecting the liquid level of the internal solution and a PH meter 18 for detecting full reaction are respectively installed on the side wall and the bottom surface of the reaction tank 1. The top of the reaction tank 1 is provided with a pressure detection device.

The pressure detection device may be implemented in the following two ways.

1. The expansion balloon 9 is installed through communicating pipe 21 intercommunication in the top surface top of retort 1, launching grating 22 and receiving grating 23 are installed respectively to the expansion balloon 9 left and right sides, influence the received signal of grating through expansion balloon 9 size to be used for detecting the size of retort 1 internal pressure, the automatic carbon dioxide volume that supplyes of control box control of being convenient for, make the reaction abundant, high-efficient.

2. The pressure detection device is set as a pressure sensor, detects the internal pressure of the reaction tank 1 in real time, stops filling carbon dioxide when the detected pressure value exceeds a certain larger set value, and opens the valve to continue filling carbon dioxide inwards when the internal pressure becomes smaller along with the consumption of the carbon dioxide in the reaction and the detected pressure value is smaller than a certain smaller set value.

The carbon dioxide outlet pipe 4 is connected to the carbon dioxide inlet pipe 3 between the air inlet valve 12 and the shutoff valve 13 via the circulation pump 11. An aeration pipe 20 communicated with the carbon dioxide inlet pipe 3 is arranged in the reaction tank 1, so that the aeration degree is greatly increased, the carbon dioxide is fully contacted with the solution, and the reaction is more full and thorough.

The detection port of the control box is respectively connected with the oxygen sensor 10, the PH meter 18, the liquid level meter 19 and the receiving grating 23, and the control port of the control box is respectively connected with the circulating pump 11, the air inlet valve 12, the stop valve 13, the air outlet valve 14, the exhaust valve 15, the liquid discharge valve 16 and the liquid inlet valve 17. The control box collects each signal of the detection port, compares the signal with a set value, and then controls each valve of the control end and the action of the circulating pump 11.

The use method of the alkaline silicon washing treatment alkaline sewage treatment device comprises four processes: venting, reacting, venting, and purging.