阅读说明：本技术 一种微电子工业洁净厂房 (Clean factory building of microelectronics industry ) 是由 何红星 于 2020-04-29 设计创作，主要内容包括：本发明公开了一种微电子工业洁净厂房,包括控制中心、环境监测装置、加热加湿装置、空气净化装置和生产线,所述控制中心分别与环境监测装置、加热加湿装置和空气净化装置电性连接,所述环境监测装置与控制中心双向电性连接,所述环境监测装置包括监测控制处理器、温度传感器、湿度传感器、颗粒物传感器和警报装置,所述监测控制处理器的输入端分别与温度传感器、湿度传感器颗粒物传感器的输出端电性连接,所述警报装置的输入端与控制中心的输出端电性连接。本发明通过控制中心、环境监测装置、加热加湿装置和空气净化装置的配合,实现了对洁净厂房的环境的监测和净化。(The invention discloses a clean factory building in microelectronic industry, which comprises a control center, an environment monitoring device, a heating and humidifying device, an air purifying device and a production line, wherein the control center is respectively and electrically connected with the environment monitoring device, the heating and humidifying device and the air purifying device, the environment monitoring device is bidirectionally and electrically connected with the control center, the environment monitoring device comprises a monitoring and controlling processor, a temperature sensor, a humidity sensor, a particulate matter sensor and an alarm device, the input end of the monitoring and controlling processor is respectively and electrically connected with the output ends of the temperature sensor and the humidity sensor, and the input end of the alarm device is electrically connected with the output end of the control center. The invention realizes the monitoring and purification of the environment of a clean workshop through the matching of the control center, the environment monitoring device, the heating and humidifying device and the air purifying device.)

1. The utility model provides a clean factory building of microelectronics industry, includes control center (1), environmental monitoring device (2), heating humidification device (3), air purification device (4) and production line, its characterized in that: the control center (1) is respectively and electrically connected with the environment monitoring device (2), the heating and humidifying device (3) and the air purifying device (4);

the environment monitoring device (2) is connected with the control center (1) in a bidirectional electric mode, the environment monitoring device (2) comprises a monitoring control processor (21), a temperature sensor (22), a humidity sensor (23), a particulate matter sensor (24) and an alarm device (25), the input end of the monitoring control processor (21) is respectively connected with the output end of the temperature sensor (22) and the output end of the humidity sensor (23) and the particulate matter sensor (24), and the input end of the alarm device (25) is connected with the output end of the control center (1) in an electric mode.

2. The clean factory building for microelectronics industry of claim 1, wherein: the heating and humidifying device (3) comprises a heating device (31) and a humidifying device (32), and the input ends of the heating device (31) and the humidifying device (32) are respectively electrically connected with the output end of the control center (1).

3. The clean factory building for microelectronics industry of claim 1, wherein: the monitoring control processor (21) comprises an HC32F 00332-bit singlechip, a communication chip, an expanded memory, an I/O port and a power interface.

4. The clean factory building for microelectronics industry of claim 1, wherein: the heating devices (31) are electric heaters, and the number of the heating devices (31) is determined by engineers according to the area of a plant.

5. The clean factory building for microelectronics industry of claim 1, wherein: the humidifying devices (32) are electric humidifiers, and the number of the humidifying devices (32) is determined by engineers according to the area of a plant.

6. The clean factory building for microelectronics industry of claim 1, wherein: the air purification device (4) is an industrial fresh air device and can be directly purchased from the market.

7. The clean factory building for microelectronics industry of claim 1, wherein: the number of temperature sensors (22), humidity sensors (23), particle sensors (24) and alarm devices (25) is determined by engineers according to the actual condition of the plant.

Technical Field

The invention relates to the technical field of clean plants, in particular to a clean plant for microelectronic industry.

Background

Clean factory building is also called dust-free workshop, is a factory building that has very high requirements for temperature, humidity and air cleanliness in the factory building, such as microelectronic factory, operating room, etc., because the requirement for the environment is very high, the environment in the factory building needs various devices to be monitored and maintained, and the influence of environmental quality on the production in the factory building and the personal safety of workers is avoided.

Disclosure of Invention

The invention aims to provide a clean factory building in the microelectronic industry so as to solve the problems in the background technology.

In order to achieve the purpose, the invention provides the following technical scheme: a clean factory building in microelectronic industry comprises a control center, an environment monitoring device, a heating and humidifying device, an air purifying device and a production line, wherein the control center is electrically connected with the environment monitoring device, the heating and humidifying device and the air purifying device respectively;

the environment monitoring device is connected with the control center in a bidirectional electric mode, the environment monitoring device comprises a monitoring control processor, a temperature sensor, a humidity sensor, a particulate matter sensor and an alarm device, the input end of the monitoring control processor is respectively connected with the output ends of the temperature sensor and the humidity sensor particulate matter sensor, and the input end of the alarm device is connected with the output end of the control center in an electric mode.

Preferably, the heating and humidifying device comprises a heating device and a humidifying device, and the input ends of the heating device and the humidifying device are respectively and electrically connected with the output end of the control center.

Preferably, the detection control processor comprises an HC32F 00332-bit singlechip, a communication chip, an expansion memory, an I/O port and a power interface.

Preferably, the heating devices are electric heaters, and the number of the heating devices is determined by engineers according to the area of the plant.

Preferably, the humidifying devices are electric humidifiers, and the number of the humidifying devices is determined by engineers according to the area of a plant.

Preferably, the air purification device is an industrial fresh air device which can be directly purchased from the market.

Preferably, the number of the temperature sensor, the humidity sensor, the particulate matter sensor and the alarm device is determined by an engineer according to the actual condition of the plant.

Compared with the prior art, the invention has the beneficial effects that:

1. the environment monitoring and purifying system is provided with the control center, the control center can receive data transmitted by the environment detection device, analyze and process the data, and control the operation and the closing of the air purification device and the heating and humidifying device through the control center, so that the environment can be conveniently monitored and purified;

2. the environment detection device is internally provided with the monitoring control processor, the temperature sensor, the humidity sensor, the particulate matter sensor and the alarm device, the temperature and humidity conditions in the plant are detected through the temperature sensor and the humidity sensor, the concentration of various particulate matters (including harmful particulate matters, combustible particulate matters and the like) in the plant is detected through the particulate matter sensor, the temperature and humidity information is transmitted to the monitoring control processor, the monitoring control processor is used for storing and analyzing, and the information is fed back to the control center in real time, so that workers can know various environmental data in the plant in real time conveniently, and the environment detection device has the advantages of simple structure, convenience in use and good use effect.

Drawings

FIG. 1 is a schematic view of the overall structure of a clean factory building in the microelectronics industry according to the present invention;

FIG. 2 is a schematic diagram of a clean factory building system for microelectronics industry according to the present invention;

FIG. 3 is a schematic connection diagram of a clean factory system for microelectronics industry according to the present invention.

In the figure: 1. a control center; 2. an environmental monitoring device; 21. a monitoring control processor; 22. a temperature sensor; 23. a humidity sensor; 24. a particulate matter sensor; 25. an alarm device; 3. a heating and humidifying device; 31. a heating device; 32. a humidifying device; 4. an air purification device.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-3, the present invention provides a technical solution: the utility model provides a clean factory building of microelectronics industry, includes control center 1, environment monitoring device 2, heating humidification device 3, air purification device 4 and production line, control center 1 respectively with environment monitoring device 2, heating humidification device 3 and air purification device 4 electric connection.

The environment monitoring device 2 is connected with the control center 1 in a bidirectional electric manner, the environment monitoring device 2 comprises a monitoring control processor 21, a temperature sensor 22, a humidity sensor 23, a particulate matter sensor 24 and an alarm device 25, the input end of the monitoring control processor 21 is respectively connected with the output ends of the temperature sensor 22 and the humidity sensor 23, the particulate matter sensor 24 is connected with the output end of the alarm device 25, and the input end of the alarm device 25 is connected with the output end of the control center 1 in an electric manner.

The heating and humidifying device 3 comprises a heating device 31 and a humidifying device 32, and the input ends of the heating device 31 and the humidifying device 32 are respectively and electrically connected with the output end of the control center 1.

The monitoring control processor 21 comprises an HC32F 00332-bit singlechip, a communication chip, an expansion memory, an I/O port and a power interface.

The heating devices 31 are electric heaters, and the number of the heating devices 31 is determined by engineers according to the area of the plant.

The humidifying devices 32 are electric humidifiers, and the number of the humidifying devices 32 is determined by engineers according to the area of the plant.

The air purification device 4 is an industrial fresh air device and can be directly purchased from the market.

The alarm device 25 includes an alarm lamp and a buzzer.

The number of temperature sensors 22, humidity sensors 23, particle sensors 24 and alarm devices 25 is determined by the engineer depending on the actual situation of the plant.

The working principle is as follows: when in use, the control center 1 is arranged, the control center 1 can receive data transmitted by the environment monitoring device 2 for analysis and processing, and controls the operation and the closing of the air purification device 4 and the heating and humidifying device 3 through the control center 1, the environment monitoring device 2 is internally provided with a monitoring and controlling processor 21, a temperature sensor 22, a humidity sensor 23, a particulate matter sensor 24 and an alarm device 25, the temperature and the humidity in the plant are detected through the temperature sensor 22 and the humidity sensor 23, the concentration of various particulate matters including harmful particulate matters, inflammable particulate matters and the like in the plant is detected through the particulate matter sensor 24, the temperature and the humidity information is transmitted to the monitoring and controlling processor 21, the monitoring and controlling processor 21 is used for storage and analysis, and the information is fed back to the control center 1 in real time, so that workers can know various environment data in the plant in real time, when the environmental data is different from the set normal data, the monitoring control processor 21 transmits the abnormal information to the control center 1, the control center 1 starts the alarm device 25, controls the heating device 31, the humidifying device 32 and the air purifying device 4 to start and process, monitors the environment through the set sensor, and when the environmental data meets the requirement, the control center 1 closes the alarm device 25 and the heating device 31, the humidifying device 32 and the air purifying device 4.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.