阅读说明：本技术 一种基于叉指电极的谐振子动力学参数检测装置 (Harmonic oscillator kinetic parameter detection device based on interdigital electrode ) 是由 杨浩 李绍良 慕蓉欣 荣义杰 蒋辉 应俊 于 2021-06-04 设计创作，主要内容包括：本发明公开了一种基于叉指电极的谐振子动力学参数检测装置,该检测装置包括：基准平台,其中,垂直于所述基准平台的方向为第一方向；电极基座,安装在所述基准平台上,该电极基板具有孔；叉指电极,覆盖于所述电极基座上；电路板,覆盖于所述电极基座上；引线,用于连接所述叉指电极和所述电路板；位移及转动装置,其可在所述第一方向上伸缩和转动以及在所述基准平台上平移。本发明提出一种基于叉指电极的熔融石英谐振子动力学参数检测装置,利用叉指电极实现对镀膜前熔融石英谐振子的驱动和振动检测,进而测量出谐振子的动力学参数。(The invention discloses a harmonic oscillator kinetic parameter detection device based on an interdigital electrode, which comprises: a reference platform, wherein a direction perpendicular to the reference platform is a first direction; an electrode base mounted on the reference platform, the electrode base having an aperture; the interdigital electrode is covered on the electrode base; the circuit board is covered on the electrode base; the lead is used for connecting the interdigital electrode and the circuit board; a translation and rotation device that is retractable and rotatable in the first direction and translatable on the reference platform. The invention provides a fused quartz harmonic oscillator kinetic parameter detection device based on interdigital electrodes, which utilizes the interdigital electrodes to realize the driving and vibration detection of a fused quartz harmonic oscillator before film coating, and further measures the kinetic parameters of the harmonic oscillator.)

1. A harmonic oscillator kinetic parameter detection device based on interdigital electrodes is characterized by comprising:

a reference platform, wherein a direction perpendicular to the reference platform is a first direction;

an electrode base mounted on the reference platform, the electrode base having an aperture;

the interdigital electrode is covered on the electrode base;

the circuit board is covered on the electrode base;

the lead is used for connecting the interdigital electrode and the circuit board;

a displacement and rotation device that is retractable and rotatable in the first direction and translatable on the reference platform; when the detection device is used for detecting the dynamic parameters of the harmonic oscillator to be detected, the harmonic oscillator to be detected is arranged on the displacement and rotation device, and the relative position between the harmonic oscillator to be detected and the interdigital electrode is adjusted through the displacement and rotation device.

2. The interdigital electrode-based harmonic oscillator kinetic parameter detection device according to claim 1, wherein the harmonic oscillator to be detected is a hemispherical harmonic oscillator, and the harmonic oscillator to be detected comprises:

a vibrating spherical shell having a lip;

the supporting column is connected with the vibrating spherical shell;

when the harmonic oscillator to be detected is arranged on the displacement and rotation device, the direction of the supporting column is parallel or vertical to the first direction, and the lip edge can be completely attached to the electrode base.

3. The interdigital electrode-based harmonic oscillator kinetic parameter detection apparatus of claim 1, wherein the displacement and rotation apparatus comprises:

an XYZ translation stage that is retractable in the first direction and translatable on the reference stage;

a turntable mounted on the XYZ displacement stage, the turntable being extendable and retractable along the first direction.

4. The interdigital electrode-based harmonic oscillator kinetic parameter detection apparatus of claim 3, further comprising:

and the clamp is arranged on the rotary table and used for fixing the harmonic oscillator to be detected.

5. The interdigital electrode-based harmonic oscillator kinetic parameter detection device of claim 1, wherein the number of the interdigital electrodes is at least four.

6. The harmonic oscillator kinetic parameter detection device based on the interdigital electrodes as claimed in claim 5, wherein the number of the interdigital electrodes is four, one is located at 0 ° azimuth, and the other three are located at 45 °, 180 ° and 225 °.

7. The harmonic oscillator kinetic parameter detection device based on the interdigital electrode as recited in claim 1, wherein the circuit board comprises at least two buffer amplification circuits, at least two driving circuits and at least one direct current high voltage circuit.

8. The interdigital electrode-based harmonic oscillator kinetic parameter detection apparatus of claim 1, further comprising:

and the electrode base is arranged on the reference platform through the connecting rod.

9. The interdigital electrode-based harmonic oscillator kinetic parameter detection device of claim 9, wherein the electrode base and the circuit board are fixed by the connecting rod.

10. An interdigital electrode-based harmonic oscillator kinetic parameter detection method, which is characterized in that the detection method applies the interdigital electrode-based harmonic oscillator kinetic parameter detection device of any one of claims 1 to 9; the detection method specifically comprises the following steps:

clamping the harmonic oscillator on a clamp, and completely attaching the lip edge to the electrode substrate;

adjusting the Z displacement table to form a gap between the lip edge of the harmonic oscillator and the interdigital electrode;

adjusting the XY displacement table to enable the center of the harmonic oscillator to coincide with the center of the interdigital electrode;

electrifying the circuit board, and starting a driving and detecting loop;

exciting the harmonic oscillator to a fixed amplitude, disconnecting the amplitude driving loop after the standing wave azimuth points to the 0-degree azimuth, and reserving the orthogonal control loop; obtaining an attenuation curve of the harmonic oscillator; obtaining the Q value of the harmonic oscillator in the direction through the attenuation curve;

and rotating the harmonic oscillator, repeating the steps to obtain the Q values of the harmonic oscillator in different directions, and measuring the nonuniformity of the Q values of the harmonic oscillator after rotating 360 degrees.

Technical Field

The invention relates to the technical field of instruments and meters, in particular to a harmonic oscillator kinetic parameter detection device based on an interdigital electrode.

Background

Harmonic oscillators are widely used in vibratory gyroscopes due to their ultra-high Q-values. The surface of a harmonic oscillator in a vibrating gyroscope is usually covered with a metal film layer, and the harmonic oscillator and an electrode form a capacitor, and the harmonic oscillator can be driven and detected by the capacitor.

Before coating, however, the dynamic parameters of the harmonic oscillator, such as Q value, frequency difference and the like, still need to be detected. At the moment, because the surface of the harmonic oscillator is free of a metal film layer, the capacitance configuration in the gyroscope is not applicable any more, and the harmonic oscillator before film coating cannot be driven and detected. At the moment, the interdigital electrode configuration is adopted, so that the harmonic oscillator can be driven and vibrated for detection before film coating, and further, the detection of the dynamic parameters of the harmonic oscillator is realized.

Disclosure of Invention

The invention aims to provide a harmonic oscillator kinetic parameter detection device based on interdigital electrodes, which utilizes the interdigital electrodes to realize the driving and vibration detection of a harmonic oscillator before film coating, and further measures the kinetic parameters of the harmonic oscillator.

In order to achieve the purpose, the invention is realized by the following technical scheme:

a harmonic oscillator kinetic parameter detection device based on interdigital electrodes is characterized by comprising:

a reference platform, wherein a direction perpendicular to the reference platform is a first direction;

an electrode base mounted on the reference platform, the electrode base having an aperture;

the interdigital electrode is covered on the electrode base;

the circuit board is covered on the electrode base;

the lead is used for connecting the interdigital electrode and the circuit board;

a displacement and rotation device that is retractable and rotatable in the first direction and translatable on the reference platform; when the detection device is used for detecting the dynamic parameters of the harmonic oscillator to be detected, the harmonic oscillator to be detected is arranged on the displacement and rotation device, and the relative position between the harmonic oscillator to be detected and the interdigital electrode is adjusted through the displacement and rotation device.

Optionally, the harmonic oscillator to be detected is a hemispherical harmonic oscillator, and the harmonic oscillator to be detected includes:

a vibrating spherical shell having a lip;

the supporting column is connected with the vibrating spherical shell;

when the harmonic oscillator to be detected is arranged on the displacement and rotation device, the direction of the supporting column is parallel or vertical to the first direction, and the lip edge can be completely attached to the electrode base.

Optionally, the displacement and rotation device comprises:

an XYZ translation stage that is retractable in the first direction and translatable on the reference stage;

a turntable mounted on the XYZ displacement stage, the turntable being extendable and retractable along the first direction.

Optionally, the detection apparatus further comprises:

and the clamp is arranged on the rotary table and used for fixing the harmonic oscillator to be detected.

Optionally, the number of interdigitated electrodes is at least four.

Optionally, the number of the interdigital electrodes is four, one is located at 0 ° azimuth, and the other three are located at 45 °, 180 ° and 225 ° azimuth.

Optionally, the circuit board includes at least two buffer amplifying circuits, at least two driving circuits, and at least one dc high-voltage circuit.

Optionally, the detection apparatus further comprises:

and the electrode base is arranged on the reference platform through the connecting rod.

Optionally, the electrode base and the circuit board are fixed by the connecting rod.

On the other hand, the invention also discloses a harmonic oscillator kinetic parameter detection method based on the interdigital electrode, which is characterized in that the detection method applies the harmonic oscillator kinetic parameter detection device based on the interdigital electrode; the detection method specifically comprises the following steps:

clamping the harmonic oscillator on a clamp, and completely attaching the lip edge to the electrode substrate;

adjusting the Z displacement table to form a gap between the lip edge of the harmonic oscillator and the interdigital electrode;

adjusting the XY displacement table to enable the center of the harmonic oscillator to coincide with the center of the interdigital electrode;

electrifying the circuit board, and starting a driving and detecting loop;

exciting the harmonic oscillator to a fixed amplitude, disconnecting the amplitude driving loop after the standing wave azimuth points to the 0-degree azimuth, and reserving the orthogonal control loop; obtaining an attenuation curve of the harmonic oscillator; obtaining the Q value of the harmonic oscillator in the direction through the attenuation curve;

and rotating the harmonic oscillator, repeating the steps to obtain the Q values of the harmonic oscillator in different directions, and measuring the nonuniformity of the Q values of the harmonic oscillator after rotating 360 degrees.

Compared with the prior art, the invention has the following advantages:

the invention provides a fused quartz harmonic oscillator kinetic parameter detection device based on interdigital electrodes, which utilizes the interdigital electrodes to realize the driving and vibration detection of a fused quartz harmonic oscillator before film coating, and further measures the kinetic parameters of the harmonic oscillator.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention patent, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic structural diagram of a fused silica hemispherical resonator according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of a planar interdigital electrode pad 4 in accordance with an embodiment of the present invention;

fig. 3 is a schematic structural diagram of a dynamic parameter detection device according to an embodiment of the present invention.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. It is to be noted that the drawings are in a very simplified form and are all used in a non-precise scale for the purpose of facilitating and distinctly aiding in the description of the embodiments of the present invention. To make the objects, features and advantages of the present invention comprehensible, reference is made to the accompanying drawings. It should be understood that the structures, ratios, sizes, and the like shown in the drawings and described in the specification are only used for matching with the disclosure of the specification, so as to be understood and read by those skilled in the art, and are not used to limit the implementation conditions of the present invention, so that the present invention has no technical significance, and any structural modification, ratio relationship change or size adjustment should still fall within the scope of the present invention without affecting the efficacy and the achievable purpose of the present invention.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions.

Referring to fig. 1, fig. 2 and fig. 3, the present embodiment provides a harmonic oscillator kinetic parameter detection apparatus based on an interdigital electrode, where the resonance kinetic parameter detection apparatus includes:

a reference platform 11, wherein a direction perpendicular to the reference platform 11 is a first direction;

an electrode base 4 mounted on said reference platform 11, having an aperture 7, the electrode base 4 being typically made of quartz glass;

the interdigital electrode is covered on the electrode base 4;

the circuit board 8 covers the electrode base 4;

a lead 9 for connecting the interdigital electrode and the circuit board 8;

a displacement and rotation device which is retractable and rotatable in the first direction and translatable on the reference platform 11; when the detection device is used for detecting the dynamic parameters of the harmonic oscillator to be detected, the harmonic oscillator to be detected is arranged on the displacement and rotation device, and the relative position between the harmonic oscillator to be detected and the interdigital electrode is adjusted through the displacement and rotation device.

It should be noted that the first direction is not only determined, and the first direction is changed when the displacement and rotation device is moved, but it may be determined that the first direction is always perpendicular to the electrode base 4.

In the present embodiment, the vibration parameters of the resonator include frequency difference, Q value, and Q value nonuniformity of the resonator. And detecting the frequency difference in different directions of the harmonic oscillator to obtain different resonant frequencies, wherein when the detection angle covers 360 degrees, the frequency of the harmonic oscillator generates periodic deformation, wherein the maximum value direction is a large frequency axis, the corresponding frequency is f1, the minimum value direction is a small frequency axis, the corresponding frequency is f2, and then f1-f2 become the frequency difference. The Q value of the resonator is characterized in that when the resonator vibrates and attenuates, if the resonator freely attenuates to a0/e from an initial vibration amplitude a0, e is a natural base number, and if the using time is tau, the Q value of the resonator is Q-pi f tau, wherein f-pi (f1+ f 2)/2. When the Q values are measured from different directions, the nonuniformity of the Q values of the harmonic oscillators can be obtained.

In this embodiment, the shape of the harmonic oscillator to be detected includes, but is not limited to, a quartz hemispherical harmonic oscillator, a cylindrical shell harmonic oscillator, and other types of harmonic oscillators, and this embodiment takes a hemispherical harmonic oscillator as an example for description.

In this embodiment, the harmonic oscillator to be detected is a hemispherical harmonic oscillator, and the harmonic oscillator to be detected includes:

a vibrating spherical shell 1 with a lip 3; when the harmonic oscillator to be detected vibrates, the spherical shell 1 is firstly changed into an ellipsoid from the sphere to the sphere;

the supporting column 2 is connected with the vibrating spherical shell 1;

when the harmonic oscillator to be detected is installed on the displacement and rotation device, the direction of the supporting column 2 is parallel to or perpendicular to the first direction, and the lip edge 3 can be completely attached to the electrode base 4.

In this embodiment, the vibration spherical shell 1, the supporting column 2 and the lip 3 are all made of fused silica.

In the present embodiment, the interdigital electrodes include, but are not limited to, planar interdigital electrodes, spherical interdigital electrodes, and the like, and only the planar interdigital electrodes are discussed in the present embodiment.

In this embodiment, the displacement and rotation device includes:

an XYZ stage 121 that is extendable and retractable in the first direction and translatable on the reference stage 11;

and a turntable 122 mounted on the XYZ stage 121, the turntable 122 being extendable and retractable in the first direction.

In this embodiment, the detection apparatus further includes:

and the clamp is arranged on the rotary table 122 and used for fixing the harmonic oscillator to be detected.

In this embodiment, the number of the interdigital electrodes is at least four.

In this embodiment, the number of the interdigital electrodes is four, one is located at 0 ° azimuth, and the other three are located at 45 °, 180 ° azimuth, and 225 ° azimuth. Of course, other number and orientation of the layout may be adopted, and this embodiment is not limited in this respect.

In this embodiment, the circuit board 8 includes at least two buffer amplifying circuits, at least two driving circuits, and at least one dc high voltage circuit.

In this embodiment, the detection apparatus further includes:

and the electrode base 4 is arranged on the reference platform 11 through the connecting rod 10.

In this embodiment, the electrode base 4 and the circuit board 8 are fixed by the connecting rod 10.

Based on the same inventive concept, the embodiment also discloses a harmonic oscillator kinetic parameter detection method based on the interdigital electrode (taking the nonuniformity of the measured Q value as an example), and the detection method applies the harmonic oscillator kinetic parameter detection device based on the interdigital electrode; the detection method specifically comprises the following steps:

clamping the harmonic oscillator on a clamp, and completely attaching the lip edge 3 to the electrode substrate;

adjusting a Z displacement table to form a gap between the lip edge 3 of the harmonic oscillator and the interdigital electrode, wherein the gap is 5-45 um by taking the platform interdigital electrode as an example;

adjusting the XY displacement table to enable the center of the harmonic oscillator to coincide with the center of the interdigital electrode;

the circuit board 8 is electrified, and the driving and detecting circuit is started;

exciting the harmonic oscillator to a fixed amplitude, disconnecting the amplitude driving loop after the standing wave azimuth points to the 0-degree azimuth, and reserving the orthogonal control loop; obtaining an attenuation curve of the harmonic oscillator; obtaining the Q value of the harmonic oscillator in the direction through the attenuation curve;

and rotating the harmonic oscillator, repeating the steps to obtain the Q values of the harmonic oscillator in different directions, and measuring the nonuniformity of the Q values of the harmonic oscillator after rotating 360 degrees.

While the present invention has been described in detail with reference to the preferred embodiments, it should be understood that the above description should not be taken as limiting the invention. Various modifications and alterations to this invention will become apparent to those skilled in the art upon reading the foregoing description. Accordingly, the scope of the invention should be determined from the following claims.