阅读说明：本技术 一种压力控制装置及系统 (Pressure control device and system ) 是由 王嘉琪 张为强 于 2021-07-28 设计创作，主要内容包括：本发明公开了一种压力控制装置及系统,包括：汇流板和至少一组阀体模组,其中,所述阀体模组中的每一个电子元器件与所述汇流板连接,所述汇流板上设置有信号接口,用于与外部I/O采集模块连接。通过实施本发明,解决了压力控制装置在进行输入输出信号时,接线繁多,不易维护以及在更换I/O采集模块后需要重新布线,兼容性差的问题。(The invention discloses a pressure control device and a system, comprising: the electronic device comprises a bus bar and at least one group of valve body modules, wherein each electronic component in the valve body modules is connected with the bus bar, and the bus bar is provided with a signal interface for being connected with an external I/O acquisition module. By implementing the invention, the problems that the pressure control device has various wiring and is difficult to maintain when inputting and outputting signals, and the compatibility is poor because the wiring needs to be re-arranged after the I/O acquisition module is replaced are solved.)

1. A pressure control device, comprising: the electronic device comprises a bus bar and at least one group of valve body modules, wherein each electronic component in the valve body modules is connected with the bus bar, and the bus bar is provided with a signal interface for being connected with an external I/O acquisition module.

2. The device of claim 1, wherein the bus board is further provided with a power interface for driving the bus board and the electronic components in the valve body module through the connected power.

3. The device according to claim 1 or 2, wherein the pressure control device further comprises a display module for displaying the operation state information of the channel in which each group of valve body modules is located.

4. The apparatus according to claim 3, wherein the operation state information of the channel in which each set of valve body modules is located comprises an operation mode of the channel, and the operation mode comprises any one of a pressure control mode, a vacuum control mode, an atmosphere control mode and a pressure maintaining control module.

5. The apparatus of claim 3, wherein the display module is an LED display module.

6. The apparatus of claim 1, wherein the pressure control device comprises 4 sets of valve body modules.

7. The apparatus of claim 6, wherein each set of valve modules comprises 4 solenoid valves, 1 electrical proportional valve, and 1 barometric pressure sensor.

8. The device of claim 1, wherein the bus plate is disposed elevationally above the valve body module.

9. A pressure control system, comprising:

the pressure control device of any one of claims 1-8;

and the I/O acquisition module is connected with the pressure control device and is used for transmitting the current working state information of the pressure control device to external equipment and receiving the working instruction information transmitted by the external equipment.

10. The system of claim 9, further comprising: and the controller and the I/O acquisition module are used for issuing work instruction information to the pressure control device.

Technical Field

The invention relates to the technical field of pressure control, in particular to a pressure control device and system.

Background

In the process of polishing the wafer, pressure is required to be applied to the back surface of the wafer, so that the front surface of the wafer is in full contact with the polishing pad for polishing, or the positive pressure is switched into negative pressure after the process is finished, so that the wafer is adsorbed on the bearing table for transmission. The pressure control device for completing the above process generally comprises a plurality of electronic components such as electromagnetic valves, electric proportional valves and pneumatic pressure sensors, and the pressure control device shown in fig. 1 comprises valve body modules with 4 channels, and each valve body module with each channel comprises 4 electromagnetic valves, 1 electric proportional valve and 1 pneumatic pressure sensor.

Because the electronic components of each channel need to be connected to the external I/O acquisition module by the conventional pressure control device, the connection mode has the defects of various wiring and difficult maintenance, and the compatibility is poor because the wiring needs to be re-arranged after the I/O acquisition module is replaced.

Disclosure of Invention

Therefore, the technical problem to be solved by the present invention is to overcome the defects of the prior art that the wiring is complicated and the maintenance is not easy, so as to provide a pressure control device and a pressure control system.

According to a first aspect, an embodiment of the present invention discloses a pressure control apparatus, the system including: the electronic device comprises a bus bar and at least one group of valve body modules, wherein each electronic component in the valve body modules is connected with the bus bar, and the bus bar is provided with a signal interface for being connected with an external I/O acquisition module.

Optionally, the bus bar is further provided with a power interface for driving the bus bar and the electronic component in the valve module through the accessed power.

Optionally, the pressure control device further includes a display module for displaying the operation state information of the channel in which each group of valve body modules is located.

Optionally, the operation state information of the channel in which each group of valve body modules is located includes an operation mode of the channel, where the operation mode includes any one of a pressure control mode, a vacuum control mode, an atmosphere control mode, and a pressure maintaining control module.

Optionally, the display module is an LED display module.

Optionally, the pressure control device comprises 4 sets of valve body modules.

Optionally, each set of valve modules includes 4 solenoid valves, 1 electrical proportional valve, and 1 barometric pressure sensor.

Optionally, the cylinder manifold is arranged above the valve body module along the height direction.

According to a second aspect, an embodiment of the present invention further discloses a pressure control system, including: the pressure control device of the first aspect as well as any one of the alternative embodiments of the first aspect; and the I/O acquisition module is connected with the pressure control device and is used for transmitting the current working state information of the pressure control device to external equipment and receiving the working instruction information transmitted by the external equipment.

Optionally, the system further comprises: and the controller and the I/O acquisition module are used for issuing work instruction information to the pressure control device.

The technical scheme of the invention has the following advantages:

the pressure control device and system provided by the invention comprise: the electronic device comprises a bus bar and at least one group of valve body modules, wherein each electronic component in the valve body modules is connected with the bus bar, and the bus bar is provided with a signal interface for being connected with an external I/O acquisition module. According to the invention, the electronic components of the valve body module are connected with the bus board, and the bus board is directly connected with the external I/O acquisition module to realize signal transmission.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.

FIG. 1 is a connection block diagram of one embodiment of the present invention;

FIG. 2 is a schematic block diagram of a specific example of a pressure control device in an embodiment of the present invention;

fig. 3 is a schematic block diagram of a specific example of a pressure control system in an embodiment of the present invention.

Detailed Description

The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; the two elements may be directly connected or indirectly connected through an intermediate medium, or may be communicated with each other inside the two elements, or may be wirelessly connected or wired connected. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.

The embodiment of the invention discloses a pressure control device, as shown in fig. 2, the device comprises: the valve comprises a bus board 201 and at least one group of valve body modules 202, wherein each electronic component in the valve body modules 202 is connected with the bus board 201, and a signal interface 2021 is arranged on the bus board and used for being connected with an external I/O acquisition module.

Illustratively, the valve body module 202 is a unit for specifically implementing corresponding pressure control in a pressure control device, and specifically may include a pressure control unit formed by, for example, an electromagnetic valve, an electric proportional valve, and an air pressure sensor, and each pressure control unit may implement functions such as pressure control, vacuum control, atmosphere control, and pressure maintaining control, and the functions that can be implemented by the pressure control unit in the embodiment of the present application are not limited, and may be determined by those skilled in the art according to actual needs; the signal interface 2011 located on the bus board 201 is used for inputting and outputting a working signal of the valve body module, including outputting the working signal of the valve body module and inputting a signal that needs to control the valve body module to perform corresponding work, and the corresponding signal may be a digital signal or an analog signal.

As an optional embodiment of the present invention, the bus board 201 is further provided with a power interface 2012, which is used for driving the bus board and the electronic components in the valve module by an accessed power. Illustratively, a power interface 2012 is arranged outside the bus bar 201, and an external power source is connected through the power interface 2012 to provide electric energy for the work of the bus bar 201, and simultaneously provide electric energy for the work of the valve body module 202 connected with the bus bar 201, so as to drive the work of electronic components in the bus bar and the valve body module. The power type is not limited in the embodiments of the present application, and those skilled in the art can determine the power type according to actual needs.

As an optional embodiment of the present invention, the pressure control apparatus further includes a display module 2013, configured to display the operation state information of the channel where each group of valve body modules is located. For example, the bus bar is internally provided with a display module 2013, the display module 2013 can display the working state of the valve body module 202, for example, the display module 2013 can be in a normal working state when the color of the display lamp is green, the red lamp flickers to cause a fault, the yellow lamp is lighted and displayed to be in a power-on state, and the like.

As an optional embodiment of the present invention, the operation state information of the channel in which each set of valve body modules 202 is located includes an operation mode of the channel, and the operation mode includes any one of a pressure control mode, a vacuum control mode, an atmosphere control mode, and a pressure maintaining control module.

For example, the operation mode of the valve body module 202 may be selected according to specific working operation requirements, for example, an operation pressure control mode is selected when pressure reduction or pressure increase is required, a vacuum control mode is used when negative pressure is required, an atmosphere control mode is selected when a zero pressure state is required, a pressure maintaining control mode is selected when corresponding operation is required under a certain constant pressure condition, and multiple operation modes are matched with each other to achieve pressure control more accurately.

As an optional embodiment of the present invention, the display module 2013 is an LED display module. For example, the display module 2013 may set a group of LEDs for each valve body module to display the working state of the corresponding valve body module, and each valve body module sets corresponding display lamps in four working modes for displaying which mode the valve body module is currently running.

As an optional embodiment of the invention, the pressure control device comprises 4 groups of valve body modules. Illustratively, the pressure control device comprises 4 valve body modules, and the 4 valve body modules are matched with each other to accurately apply pressure and release pressure.

As an optional embodiment of the present invention, the bus plate is disposed above the valve body module in a height direction. Illustratively, the direction along the height of the bus bar 201 is connected with the valve body module 202, and the bus bar 201 and the valve body module 202 are integrally connected tightly, so that the space can be saved better and the valve body module is easy to maintain.

The embodiment of the present invention further discloses a pressure control system, as shown in fig. 3, including:

the pressure control device 301 according to any of the embodiments described above; for example, please refer to the description of the pressure control device in the above embodiments, and the details are not repeated herein.

And the I/O acquisition module 302 is connected to the pressure control device, and is configured to transmit current working state information of the pressure control device to an external device and receive working instruction information transmitted by the external device. Illustratively, the I/O acquisition module 302 is connected corresponding to the signal port 2011, acquires the working signal in the pressure control device 401 and outputs the control signal to the pressure control device 401, and the pressure control device 301 and the I/O acquisition module 302 can be installed in a distributed manner, so as to be suitable for equipment with a tight space.

As an optional embodiment of the present invention, the system further comprises: and the controller and the I/O acquisition module are used for issuing work instruction information to the pressure control device 301. Illustratively, the controller is connected to the I/O collection module 302 for receiving operating commands from the pressure control device 301, and the operating commands are sent to the pressure control device 301 via the I/O collection module 302.

Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the invention, and such modifications and variations fall within the scope defined by the appended claims.