阅读说明：本技术 高真空方法兰金属密封结构 (High-vacuum square flange metal sealing structure ) 是由 许忠政 张志平 张黎源 姜正鹤 于 2019-09-29 设计创作，主要内容包括：本发明公开了一种高真空方法兰金属密封结构,包括第一法兰、第二法兰、定位组件、金属密封圈和连接件；所述第一法兰密封侧四个角设均有安装孔,安装孔底部形成螺纹孔；所述定位组件包括螺栓、弹簧和定位销；定位销通过螺栓安装在第一法兰安装孔底部的螺纹孔内；所述定位销与第一法兰安装孔孔壁之间设有弹簧；所述金属密封圈弯曲为方形,套在第一法兰四角安装的定位组件中的定位销上；所述第一法兰和第二法兰通过连接件紧固。本发明采用铝金属密封圈,能够烘烤加热至约350℃,达到高真空要求；本发明的法兰均为平法兰,无凸台等定位结构,方便加工；本发明的定位组件具有伸缩功能,安装时能提供定位功能,密封时缩回,不影响真空密封。(The invention discloses a high-vacuum square flange metal sealing structure which comprises a first flange, a second flange, a positioning assembly, a metal sealing ring and a connecting piece, wherein the first flange is fixedly connected with the second flange; four corners of the sealing side of the first flange are respectively provided with a mounting hole, and threaded holes are formed at the bottoms of the mounting holes; the positioning assembly comprises a bolt, a spring and a positioning pin; the positioning pin is arranged in a threaded hole at the bottom of the first flange mounting hole through a bolt; a spring is arranged between the positioning pin and the wall of the first flange mounting hole; the metal sealing ring is bent to be square and sleeved on positioning pins in positioning assemblies arranged at four corners of the first flange; the first flange and the second flange are fastened through a connecting piece. The aluminum metal sealing ring is adopted, so that the baking and heating can be carried out to about 350 ℃, and the high vacuum requirement is met; the flanges are flat flanges, and positioning structures such as bosses are omitted, so that the flange is convenient to process; the positioning assembly has a telescopic function, can provide a positioning function during installation, retracts during sealing, and does not affect vacuum sealing.)

1. A high-vacuum square flange metal sealing structure is characterized by comprising a first flange (1), a second flange (2), a positioning assembly (3), a metal sealing ring (4) and a connecting piece (5);

Four corners of the sealing side of the first flange (1) are provided with mounting holes, and threaded holes are formed at the bottoms of the mounting holes;

The positioning assembly (3) comprises a bolt (3-1), a spring (3-2) and a positioning pin (3-3); the positioning pin (3-3) is arranged in a threaded hole at the bottom of the first flange mounting hole through a bolt (3-1); a spring (3-2) is arranged between the positioning pin (3-3) and the wall of the first flange mounting hole;

The metal sealing ring (4) is bent to be square and is sleeved on positioning pins (3-3) in the positioning assemblies (3) arranged at four corners of the first flange (1);

the first flange (1) and the second flange (2) are fastened through a connecting piece (5).

2. a high vacuum square flange metal seal configuration according to claim 1, characterized in that said first flange (1) and said second flange (2) are flat flanges.

3. the high-vacuum square flange metal sealing structure is characterized in that the positioning pin (3-3) is of an internal hollow structure, the bolt (3-1) is located in the positioning pin (3-3), the inner diameter of one end of the positioning pin (3-3) is reduced, and the nut of the bolt (3-1) is clamped at the reduced inner diameter of the positioning pin (3-3).

4. A high vacuum square flange metal seal structure according to claim 3, characterized in that the positioning pin (3-3) and the outer diameter of the end with the same reduced inner diameter form a reduced diameter, and the spring (3-2) is sleeved on the reduced outer diameter part of the positioning pin (3-3).

5. a high vacuum square flange metal seal structure according to claim 1 or 3, characterized in that said positioning pin (3-3) is clearance fitted with the bolt (3-1).

6. A high vacuum square flange metal seal according to claim 1, 3 or 4, characterized in that said positioning pin (3-3) is clearance fitted to the first flange mounting hole.

7. The high-vacuum square flange metal sealing structure as claimed in claim 1, wherein the metal sealing ring (4) is made of soft metal material such as silver and aluminum, and is annealed after welding.

8. A high vacuum square flange metal seal according to claim 1 or 7, characterized in that said metal seal ring (4) is an aluminium metal seal ring.

9. A high vacuum square flange metal seal configuration according to claim 1, characterized in that said metal seal ring (4) has a cross-sectional diameter of about 1mm ~ 4 mm.

10. a high vacuum square flange metal seal structure according to claim 1, characterized in that said connecting member (5) is a bolt and the nut is a self-tightening nut.

Technical Field

The invention relates to the field of vacuum metal sealing, in particular to a high-vacuum square flange metal sealing structure.

background

the existing vacuum seal generally comprises a rubber seal and a metal seal, and the metal seal has a limited service life, is aged after a certain service life and needs to be replaced. The metal seal is usually a circular flange seal, and conventionally has a sealing structure form such as a metal gasket seal and a metal wire seal. The utility model discloses a patent No. 201720981219.3, invention name is a high vacuum metal seal structure discloses a vacuum seal structure, but all has the location platform on its flange, and is not convenient to process, can not satisfy the sealed of square flange.

Disclosure of Invention

The invention provides a high-vacuum square flange metal sealing structure for solving the defects in the prior art.

the invention is realized according to the following technical scheme.

A high-vacuum square flange metal sealing structure comprises a first flange, a second flange, a positioning assembly, a metal sealing ring and a connecting piece;

Four corners of the sealing side of the first flange are respectively provided with a mounting hole, and threaded holes are formed at the bottoms of the mounting holes;

The positioning assembly comprises a bolt, a spring and a positioning pin; the positioning pin is arranged in a threaded hole at the bottom of the first flange mounting hole through a bolt; a spring is arranged between the positioning pin and the wall of the first flange mounting hole;

The metal sealing ring is bent to be square and sleeved on positioning pins in positioning assemblies arranged at four corners of the first flange;

The first flange and the second flange are fastened through a connecting piece.

Further, the first flange and the second flange are both flat flanges.

Furthermore, the locating pin is an internal hollow structure, the bolt is located in the locating pin, the inner diameter of one end of the locating pin forms a reducing, and the nut of the bolt is clamped at the inner diameter reducing position of the locating pin.

Furthermore, the positioning pin and the outer diameter at the same end with the reduced inner diameter form a reduced diameter, and the spring is sleeved on the reduced outer diameter part of the positioning pin.

furthermore, the positioning pin is in clearance fit with the bolt.

further, the positioning pin is in clearance fit with the first flange mounting hole.

furthermore, the metal sealing ring is made of soft metal materials such as silver and aluminum, and is required to be annealed after welding.

Preferably, the metal sealing ring is an aluminum metal sealing ring.

Further, the diameter of the section of the metal sealing ring is about 1mm ~ 4 mm.

furthermore, the connecting piece is a bolt, and the nut is a self-tightening nut.

The invention has the advantages and beneficial effects that:

The invention effectively solves the problem of metal sealing of the high-vacuum square flange. The aluminum metal sealing ring is adopted, the baking and heating can be carried out to about 350 ℃, the high vacuum requirement is met, and the materials such as aluminum, silver and the like are softer and can be conveniently bent into a square sealing ring; the first flange and the second flange are flat flanges and have no positioning structures such as bosses, so that the square flange is convenient to process; in addition, the positioning assembly has a telescopic function, can provide a positioning function during installation, retracts during sealing, and does not affect vacuum sealing. The invention has simple structure and good sealing effect, fully meets the requirements of the industry and has wide application prospect.

Drawings

FIG. 1 is a schematic view of a metal seal structure of the seal ring of the present invention after compression;

Fig. 2 is a schematic (partial) view of a metal seal structure of the seal ring of the present invention prior to compression.

wherein, 1, a first flange; a second flange;

3. a positioning assembly; 3-1, bolts;

3-2. a spring; 3-3, positioning pins;

4. A metal seal ring; and 5, connecting pieces.

Detailed Description

The present invention will be described in detail below with reference to the accompanying drawings and examples.

As shown in fig. 1-2, a high vacuum square flange metal sealing structure comprises a first flange 1, a second flange 2, a positioning component 3, a metal sealing ring 4 and a connecting piece 5;

Four corners of the sealing side of the first flange 1 are respectively provided with a mounting hole, and threaded holes are formed at the bottom of the mounting holes and used for mounting the positioning assembly 3;

The positioning component 3 comprises a bolt 3-1, a spring 3-2 and a positioning pin 3-3; the positioning pin 3-3 is arranged in a threaded hole at the bottom of the first flange mounting hole through a bolt 3-1; a spring 3-2 is arranged between the positioning pin 3-3 and the wall of the first flange mounting hole;

The metal sealing ring 4 is bent to be square when working, and is sleeved on positioning pins 3-3 in the positioning assemblies 3 arranged at four corners of the first flange 1 to realize positioning;

The first flange 1 and the second flange 2 are fastened by a connecting piece 5.

The first flange 1 and the second flange 2 are both flat flanges and have no positioning structures such as bosses, and the square flange is convenient to process.

The locating pin 3-3 is of an internal hollow structure, the bolt 3-1 is located in the locating pin 3-3, the inner diameter of one end of the locating pin 3-3 is reduced, the nut of the bolt 3-1 is clamped at the reduced inner diameter position of the locating pin 3-3, the nut of the bolt 3-1 limits the locating pin 3-3, and the locating pin 3-3 is prevented from being separated from the first flange 1 under the action of the elastic force of the spring 3-2.

The positioning pin 3-3 and the outer diameter of the same end with the reduced inner diameter form a reduced diameter, and the spring 3-2 is sleeved on the outer diameter reduced part of the positioning pin 3-3.

The positioning pin 3-3 is in clearance fit with the bolt 3-1.

the positioning pins 3-3 are in clearance fit with the first flange mounting holes and can slide smoothly.

The metal sealing ring 4 is made of soft metal materials such as silver and aluminum, is made of soft materials, and is conveniently bent into a square sealing ring. Preferably, the metal sealing ring 4 is an aluminum metal sealing ring, and can be baked and heated to about 350 ℃ to meet the requirement of high vacuum.

The diameter of the section of the metal sealing ring 4 is about 1mm ~ 4 mm.

The connecting piece 5 is a bolt; the nut is a self-tightening nut and has a locking structure.

when the flange is installed, the metal sealing ring 4 is hooped on the positioning pins 3-3 arranged at four corners of the first flange 1, so that the metal sealing ring 4 is prevented from sliding; when screwing up, the second flange 2 compresses the positioning pins 3-3 into the first flange mounting hole, and the second flange 2 and the first flange 1 are in contact with the metal sealing ring 4, so that the metal sealing ring 4 generates plastic deformation, and sealing is realized. The positioning assembly has a telescopic function, can provide a positioning function during installation, retracts during sealing, and does not affect vacuum sealing.

It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.