阅读说明：本技术 一种机台压力监控系统 (Machine pressure monitoring system ) 是由 潘玉妹 詹冬武 潘国卫 姚融 于 2019-08-28 设计创作，主要内容包括：本发明实施例公开了一种机台压力监控系统,所述系统包括：具有第一数量的机台,所述机台为常压机台,所述第一数量大于3；具有第二数量的压力感应器,所述第二数量大于等于3且小于所述第一数量；在所述机台中具有被选择的第二数量的机台,所述第二数量的压力感应器分别设置在所述被选择的第二数量的机台上；数据采集装置,用于按照预设规则对所述压力感应器上的压力数据进行采集,得到第一数据；数据显示装置,用于显示第二数据；所述第二数据是基于所述第一数据生成的,所述第二数据用于表征所述具有第一数量的机台的压力状况。(The embodiment of the invention discloses a machine pressure monitoring system, which comprises: the equipment comprises a first number of machines, wherein the machines are normal-pressure machines, and the first number is more than 3; a second number of pressure sensors, the second number being greater than or equal to 3 and less than the first number; the machine tables are provided with a second selected number of machine tables, and the pressure sensors of the second number are respectively arranged on the machine tables of the second selected number; the data acquisition device is used for acquiring pressure data on the pressure sensor according to a preset rule to obtain first data; data display means for displaying the second data; the second data is generated based on the first data, and the second data is used for representing the pressure condition of the machine with the first number.)

1. A machine pressure monitoring system, the system comprising:

the equipment comprises a first number of machines, wherein the machines are normal-pressure machines, and the first number is more than 3;

a second number of pressure sensors, the second number being greater than or equal to 3 and less than the first number;

the machine tables are provided with a second selected number of machine tables, and the pressure sensors of the second number are respectively arranged on the machine tables of the second selected number;

the data acquisition device is used for acquiring pressure data on the pressure sensor according to a preset rule to obtain first data;

data display means for displaying the second data; the second data is generated based on the first data, and the second data is used for representing the pressure condition of the machine with the first number.

2. The machine pressure monitoring system of claim 1, wherein the pressure sensor is a vacuum gauge.

3. The machine pressure monitoring system of claim 1, wherein the second number is equal to 3.

4. The machine pressure monitoring system according to claim 1, wherein the data collecting device collects the pressure data on the pressure sensor according to a preset rule, and comprises: and in the time period of closing the machine table provided with the pressure sensor, the data acquisition device acquires pressure data on the pressure sensor according to a preset rule.

5. The machine pressure monitoring system according to claim 1, wherein the data acquisition device has a timing module thereon, and the timing module is configured to trigger the data acquisition device to acquire the pressure data on the pressure sensor according to the preset rule.

6. The machine pressure monitoring system of claim 1, wherein the data collection device has a data management module thereon, the data management module configured to generate the second data based on the first data.

7. The machine pressure monitoring system of claim 6, wherein the generating the second data based on the first data comprises: screening each data in the first data, and removing the data which do not meet a first preset threshold range; and solving a median value of the screened residual data, and taking the median value as the second data.

8. The machine pressure monitoring system of claim 1, further comprising:

and the machine control device is used for controlling the machines with the first quantity in a clamping mode when the second data does not meet a second preset threshold range.

Technical Field

The invention relates to the technical field of semiconductor manufacturing, in particular to a machine pressure monitoring system.

Background

Atmospheric pressure tools are commonly used in semiconductor manufacturing, for example, in forming gate oxide layers of devices, an atmospheric pressure furnace tube is required. The pressure of the existing normal pressure machine is communicated with the atmospheric pressure, but the atmospheric pressure has great difference all the year round, so that the pressure in the normal pressure machine is changed, the manufacturing process is influenced, and therefore, a pressure sensor is required to detect the pressure of the normal pressure machine.

In a furnace area of a Fabrication plant (FAB), a plurality of atmospheric pressure tools are usually provided, and some of the tools are equipped with pressure sensors for directly detecting the pressure inside the tools. Whether the machine stations are provided with the pressure sensors is often related to the types of purchased machine stations, the time for delivery of the pressure sensors which are arranged on some machine stations as military supplies is long, the price is high, and a large amount of pressure sensors are mounted and used on normal-pressure machine stations to cause waste; the pressure sensor needs to be controlled by the machine, and can record and store the pressure in the machine only when the machine works, so that inconvenience is brought to analysis work of engineers; the readings of the pressure sensor after calibration are easy to drift, so that recorded data are disordered, and process judgment is influenced.

Disclosure of Invention

In view of the above, the main objective of the present invention is to provide a machine pressure monitoring system.

In order to achieve the purpose, the technical scheme of the invention is realized as follows:

the embodiment of the invention provides a machine pressure monitoring system, which comprises:

the equipment comprises a first number of machines, wherein the machines are normal-pressure machines, and the first number is more than 3;

a second number of pressure sensors, the second number being greater than or equal to 3 and less than the first number;

the machine tables are provided with a second selected number of machine tables, and the pressure sensors of the second number are respectively arranged on the machine tables of the second selected number;

the data acquisition device is used for acquiring pressure data on the pressure sensor according to a preset rule to obtain first data;

data display means for displaying the second data; the second data is generated based on the first data, and the second data is used for representing the pressure condition of the machine with the first number.

In the above scheme, the pressure sensor is a vacuum gauge tube.

In the above solution, the second number is equal to 3.

In the above-mentioned scheme, data acquisition device is according to preset rule to pressure data on the pressure sensor gathers, includes: and in the time period of closing the machine table provided with the pressure sensor, the data acquisition device acquires pressure data on the pressure sensor according to a preset rule.

In the above scheme, the data acquisition device is provided with a timing module, and the timing module is used for triggering the data acquisition device to acquire the pressure data on the pressure sensor according to the preset rule.

In the above scheme, the data acquisition device is provided with a data management module, and the data management module is configured to generate the second data based on the first data.

In the foregoing solution, the generating the second data based on the first data includes: screening each data in the first data, and removing the data which do not meet a first preset threshold range; and solving a median value of the screened residual data, and taking the median value as the second data.

In the above solution, the system further includes:

and the machine control device is used for controlling the machines with the first quantity in a clamping mode when the second data does not meet a second preset threshold range.

The system for monitoring the pressure of the machine platform provided by the embodiment of the invention comprises: the equipment comprises a first number of machines, wherein the machines are normal-pressure machines, and the first number is more than 3; a second number of pressure sensors, the second number being greater than or equal to 3 and less than the first number; the machine tables are provided with a second selected number of machine tables, and the pressure sensors of the second number are respectively arranged on the machine tables of the second selected number; the data acquisition device is used for acquiring pressure data on the pressure sensor according to a preset rule to obtain first data; data display means for displaying the second data; the second data is generated based on the first data, and the second data is used for representing the pressure condition of the machine with the first number. Therefore, part of all the machines are selected as detection points, and only the selected machine is provided with the pressure sensor, so that the waste of the installation of the pressure sensor is avoided; by arranging the data acquisition device, the pressure sensor can be free from the limitation of the opening of the machine, and pressure data can be acquired according to the requirement of an engineer by a preset rule, so that the pressure sensor can be fully used; after the pressure sensors are not limited by the opening of the machine, the pressure sensors can respectively monitor the pressure of the working environment where the machine is located, so that the pressure sensors are mutually used as standby monitoring equipment of the other side, faults caused by faults of a single pressure sensor to judgment of engineers are prevented, the first data collected on each pressure sensor are further processed, the second data are generated, the finally obtained data are more accurate, and the problem of indicating drift after the pressure sensors are calibrated is avoided; the first data acquired by the pressure sensor arranged on the machine selected as the detection point can be processed to be used as the representation of the pressure conditions of all machines in the system, so that the method is accurate and convenient, and saves the cost.

Drawings

FIG. 1 is a schematic view of the flow of gas in the FAB;

fig. 2 is a schematic structural diagram of a machine pressure monitoring system according to an embodiment of the present invention;

fig. 3 is a schematic structural diagram of a data acquisition device according to an embodiment of the present invention.

Detailed Description

Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the invention are shown in the drawings, it should be understood that the invention may be embodied in various forms and should not be limited to the specific embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.

In the following description, numerous specific details are set forth in order to provide a more thorough understanding of the present invention. It will be apparent, however, to one skilled in the art, that the present invention may be practiced without one or more of these specific details. In other instances, well-known features have not been described in order to avoid obscuring the present invention; that is, not all features of an actual embodiment are described herein, and well-known functions and structures are not described in detail.

In the drawings, the size of layers, regions, elements, and relative sizes may be exaggerated for clarity. Like reference numerals refer to like elements throughout.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. As used herein, the term "and/or" includes any and all combinations of the associated listed items.

In the following description, for the purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The following detailed description of the preferred embodiments of the invention, however, the invention is capable of other embodiments in addition to those detailed.

FIG. 1 is a schematic view of the flow of the FAB gas. As shown, the equipment in the FAB is connected to the atmospheric pressure through the plant exhaust port, and such equipment is located in the furnace of the FABThere are many zones, not shown one by one in the figure. The pressure in the machine varies with the pressure at the exhaust end of the plant, and a certain pressure difference (e.g. 3mmH negative pressure) is maintained between the pressure at the exhaust end of the plant and the atmospheric pressure₂O); when the machine works, the pressure in the machine and the pressure at the factory exhaust end are kept at a fixed pressure difference (for example, the positive pressure is 5 mmH)₂O), whereby the machine is kept at, for example, 2mmH above atmospheric pressure₂O to provide a gas flow towards atmospheric pressure (in semiconductor manufacturing processes, the tool is an atmospheric tool, and the pressure difference between the tool and atmospheric pressure is negligible, but the process is affected by the pressure change in the tool). However, the atmospheric pressure is not constant, and the pressure at the factory exhaust end may also deviate, which may cause the pressure in the normal pressure machine to change, thereby affecting the process, and therefore, a pressure sensor is required to detect the pressure in the normal pressure machine.

The embodiment of the invention provides a machine pressure monitoring system. Fig. 2 is a schematic structural diagram of a machine pressure monitoring system according to an embodiment of the present invention; as shown, the system comprises:

a first number n of machines (e.g., machine 1, machine 2, machine 3, machine 4, machine 5 … … machine n), the machines being atmospheric machines, n > 3;

a second number m of pressure sensors (e.g., VG1, VG2 … … VGm), wherein n > m ≧ 3;

the method comprises the following steps that selected m machine stations are arranged in all n machine stations, and a pressure sensor is arranged on each machine station in the selected m machine stations; in other words, the second number of pressure sensors are respectively arranged on the selected second number of machine stations;

the data acquisition device is used for acquiring pressure data on the pressure sensor according to a preset rule to obtain first data;

data display means for displaying the second data; the second data is generated based on the first data, and the second data is used for representing the pressure condition of the machine with the first number (all n machine tables).

As can be understood, the machine is a normal-pressure machine, so that the pressure in the selected machine can be directly measured only by selecting a part of machines in the system as detection points and installing pressure sensors, and the pressure in other machines which are not selected, the working environment pressure (FAB pressure) of the machines and the pressure of the plant exhaust end can be indirectly measured; therefore, the machine table which is not selected as the detection point does not need to be provided with the pressure sensor, the installation waste of the pressure sensor is avoided, and the equipment cost is saved.

Here, the machines in the machine pressure monitoring system are located in the same FAB or in an area having the same pressure condition.

In one embodiment, the pressure sensor is a vacuum gauge (VG sensor).

As a specific embodiment, said second number m is equal to 3. Namely, three detection points are selected in all the machine tables, and three pressure sensors are respectively installed; at the moment, although the number of the used pressure sensors is small, the single pressure sensor and the corresponding machine table can be prevented from being broken down to influence the judgment of pressure data, and the median value of normal pressure data can be obtained, so that the finally obtained data is more accurate; therefore, the second number m equal to 3 is a better choice considering the data accuracy and the equipment cost.

In an embodiment, the data collecting device collects pressure data on the pressure sensor according to a preset rule, and includes: and in the time period of closing the machine table provided with the pressure sensor, the data acquisition device acquires pressure data on the pressure sensor according to a preset rule.

It can be understood that, through setting up data collection system for pressure sensor can not receive the opening restriction of board, and with the rule collection pressure data of predetermineeing according to engineer's demand, thereby makes pressure sensor obtain make full use of. In the embodiment of the invention, the expected data acquisition device can acquire the pressure data on the pressure sensor in real time, and comprises the time when the machine is started and the time when the machine is closed; the data acquisition device can record the acquired first data, so that historical data can be conveniently searched and current data can be conveniently analyzed.

Please refer to fig. 3; fig. 3 is a schematic structural diagram of a data acquisition device according to an embodiment of the present invention.

As shown in the figure, in an embodiment, the data acquisition device is provided with a timing module, and the timing module is configured to trigger the data acquisition device to acquire pressure data on the pressure sensor according to the preset rule. Specifically, the timing module may trigger the data acquisition device once every first duration to acquire the pressure data; the first time period may be set by a user according to the FAB environment. The first duration is as short as possible, if allowed.

In one embodiment, the data acquisition device is provided with a data acquisition module, and the data acquisition module is a module which mainly realizes a data acquisition function on the data acquisition device. The data acquisition module includes, for example, an Equipment Automation Programming (EAP); pressure data generated on a pressure sensor in the system can be collected by EAP and then transmitted to a storage module for storage.

Further, the data acquisition device may further include a communication module and a storage module (not shown in the figure). The communication module is used for transmitting the pressure data on the sensor to the EAP in real time (at any time); and is also used for transmitting the data collected by the EAP to the storage module. The storage module is used for storing the first data and the second data. As an implementation manner, the storage module may be specifically implemented by a Flash Disk Controller (FDC); further, the storage module may also be configured to store the first Data and the second Data in a Data Board (Data Board) developed by an IT staff.

In an embodiment, the data acquisition device has a data management module thereon, and the data management module is configured to generate the second data based on the first data.

In a specific embodiment, the generating the second data based on the first data includes: screening each data in the first data, and removing the data which do not meet a first preset threshold range; and solving a median value of the screened residual data, and taking the median value as the second data. For example, the Data Board performs sorting analysis on the first Data, excludes outliers (Data which do not meet a first preset threshold range), outputs normal values and archives Data Sheet.

And then, the data display device displays the second data so as to provide the second data for a user to obtain and carry out process judgment.

In addition, the system for monitoring the pressure of the machine provided by the embodiment of the invention further comprises: a machine control device; referring to fig. 2, the apparatus control device is configured to perform card control on the apparatuses with the first number when the second data does not satisfy a second preset threshold range. Therefore, the machine pressure monitoring system realizes the automatic process from pressure data measurement to machine control, and really realizes a monitoring integrated system.

In the several embodiments provided in the present application, it should be understood that the disclosed apparatus and modules may be implemented in other manners. The above-described embodiments of the apparatus and modules are merely illustrative, and for example, the division of the apparatus and modules is only one logical function division, and other division manners may be available in actual implementation, such as: multiple devices and modules may be combined, or may be integrated into another system, or some features may be omitted, or not implemented.

The devices and modules described as separate parts may or may not be physically separate, and parts displayed as the devices and modules may or may not be physical units, that is, may be located in one place, or may be distributed on a plurality of network units; some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.

In addition, all the functional devices and modules in the embodiments of the present invention may be integrated into one processing unit, or each unit may be separately regarded as one unit, or two or more units may be integrated into one unit; the integrated unit can be realized in a form of hardware, or in a form of hardware plus a software functional unit.

The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, and any modifications, equivalents, improvements, etc. that are within the spirit and principle of the present invention should be included in the present invention.