A kind of beam direction automatic calibration method based on section check
阅读说明：本技术 一种基于截面线法的光束方向自动标定方法 (A kind of beam direction automatic calibration method based on section check ) 是由 刘海波 孟祥振 袭萌萌 李旭 刘阔 薄其乐 丁植 王永青 贾振元 于 2019-10-08 设计创作，主要内容包括：本发明一种基于截面线法的光束方向自动标定方法属于检测技术领域,涉及一种基于截面线法的光束方向自动标定方法。该方法先将光谱共焦位移传感器夹持固定在带T形槽的回转工作台上,再将用于校准的标准球装夹在机床主轴上。通过横向与纵向扫描标准球,调整光谱共焦位移传感器相对机床主轴的位置,完成传感器的对中。根据测量时采集的机床坐标和传感器读数值差值建立关于传感器光束矢量方向的方程,利用最小二乘法拟合得到两辅助球心坐标,两球心坐标的空间连线矢量方向即为测量光束矢量方向,完成光谱共焦位移传感器测量光束方向的标定。该方法中,传感器可在一次装夹下完成光束方向标定,标定快速高效,操作方便且标定精确度高。(A kind of beam direction automatic calibration method based on section check of the present invention belongs to detection technique field, is related to a kind of beam direction automatic calibration method based on section check.Spectral Confocal displacement sensor is first clamped on the rotary table with T-slot by this method, then by the standard ball clamping for being used to calibrate in machine tool chief axis.By laterally and longitudinally scanning standard ball, Spectral Confocal displacement sensor is adjusted with respect to the position of machine tool chief axis, completes the centering of sensor.The machine coordinates and sensor readings difference that acquire when according to measurement establish the equation about sensor light beam vector direction, it is fitted to obtain two auxiliary sphere centre coordinates using least square method, the space line direction vector of two sphere centre coordinates is measuring beam direction vector, completes the calibration of Spectral Confocal displacement sensor beam direction.In this method, sensor can complete beam direction calibration under clamped one time, and rapidly and efficiently, easy to operate and calibration accuracy is high for calibration.)
1. a kind of beam direction automatic calibration method based on section check, characterized in that in scaling method, first by Spectral Confocal Displacement sensor is clamped on the rotary table with T-slot, then by the standard ball clamping for being used to calibrate in machine tool chief axis On, and guarantee that the axis of standard ball is overlapped with main-shaft axis；Secondly, adjustment spectrum is total by laterally and longitudinally scanning standard ball Burnt displacement sensor completes the centering of sensor with respect to the position of machine tool chief axis；Then, platen drives Spectral Confocal position Displacement sensor is scanned measurement to two groups of section lines of standard ball, and acquires sensor readings simultaneously and sit with corresponding lathe Scale value；Then, the equation about beam direction is established using sensor readings and machine coordinate values；Finally, utilizing minimum two Multiplication is fitted to obtain two auxiliary sphere centre coordinates, and the space line direction vector of two sphere centre coordinates is measuring beam direction vector, Complete the calibration of Spectral Confocal displacement sensor beam direction；
Specific step is as follows for method:
First step sensor and standard ball are installed
By Spectral Confocal displacement sensor probe (8) clamping in sensor installation module (9), module (9) company of being fixed on is installed Fishplate bar (12) is intermediate, and connecting plate (12) is connect by hold-down bolt (10) and positioning pin (11) with fixed plate (13), fixed plate (13) it is mounted on the work top of four axis precise manual displacement platforms (14), it is then that four axis precise manual displacement platforms (14) are fixed On support base (16), finally support base (16) is fixed on platen (4) by the direct clamping of T-nut, is completed The installation of displacement sensor；
Standard ball (7) is tightened using screw thread and is fixed on standard ball fixture (6), then by its clamping on machine tool chief axis (5) simultaneously Centering processing is completed, guarantees that standard ball (7) link centerline crosses main shaft gyration axis, completes clamping and the centering of standard ball；
Second step sensor centering processing
During centering, manual operation lathe workbench (4) drives Spectral Confocal displacement sensor probe (8) to be near the mark ball (7), it is in standard ball (7) within the scope of transducer range, and sensor axis and standard ball (7) axis of rotation is made by range estimation Coaxially；Then, control lathe is along the forward and reverse reciprocating motion of X-axis, while sensor readings of the acquisition and recording during this and right The machine coordinate values answered；After lathe stops, finding corresponding X-coordinate at sensor least count value and be denoted as x0, mobile machine tool fortune Moving axis drives Spectral Confocal displacement sensor probe (8) to move to x0The centering processing of X-direction is completed in position；
When carrying out in Y-direction pair, the Y-axis knob by adjusting four axis precise manual displacement platforms (14) drives Spectral Confocal displacement Sensor probe (8) is scanned measurement along Y-direction, observes sensor reading and obtains Y-direction sensor displacement reading value most Small place locks four axis precise manual displacement platforms (14) at least count value corresponding lathe Y-direction position, completes pair of Y-direction Middle processing；
The measurement of third step section line
The position of mobile machine tool X-axis, Z axis adjustment sensor and standard ball, makes standard ball be in the spy of Spectral Confocal displacement sensor In the range ability of head (8) and sensor readings are d1, d1Value is in range ability and small as far as possible；Then, sensor is kept Reading value d1Constant, lathe C axis carries out rotary motion with speed n, and sensor hot spot is in the track that standard ball surface is formed at this time It is denoted as the 1st section line I；Measurement is scanned to the 1st section line I, sensor is with sample frequency f0Acquire sensor readings with Corresponding machine coordinate values, obtain whole measuring point { I of the 1st section line I1, I2, I3…Ia}；Finally, adjusting lathe and sensing again The relative position of device simultaneously makes sensor readings still be d1, keep sensor readings d1It is constant, when lathe C axis rotary motion Sensor hot spot is denoted as the 2nd section line II in the track that standard ball surface is formed；The method of sampling shown obtains the 2nd section by above-mentioned Corresponding measuring point { the I of line IIa+1, Ia+2, Ia+3…Ib, sample frequency f0It calculates according to the following formula,
Wherein, n is lathe revolving speed, rmBy the m articles section line of survey circle radius, r0For the standard radius of a ball；
The relative position of mobile machine tool X-axis, Z axis adjustment sensor and standard ball, carries out another set section line in standard ball Calibration measures, and sensor readings d is adjusted in measurement process2, d2Value is in range ability and big as far as possible, and keeps constant not Become；The track that sensor hot spot is formed in measurement process is denoted as the 3rd section line III, obtains the 3rd section according to the above-mentioned method of sampling Corresponding measuring point { the I of line IIIb+1, Ib+2, Ib+3…Ic}；
4th step solves beam direction vector
Measurement data points (x based on the standard ball different location obtained in calibration measurement processn,zn,cn), n=1,2 ..., a, a + 1, a+2 ... b, b+1, b+2 ... cylindrical coordinate (x, z, c) is transformed under cartesian coordinate system (u, v, z) by c, and transformation is public Formula is as follows:
Wherein, un,vnCartesian coordinate after being converted for n-th of measuring point, cnFor n-th of measuring point under cylindrical coordinate corresponding C axis Corner；
The equation of auxiliary spherical surface 1, auxiliary spherical surface 2 is established, the two radius is identical, and sphere centre coordinate is different；Solve its corresponding centre of sphere Coordinate and radius；
Utilize whole measuring point { I of the 1st section line I, the 2nd section line II in first group of section line1, I2, I3…Ia}、{Ia+1, Ia+2, Ia+3…IbEstablish 1 equation of auxiliary spherical surface are as follows:
(ui-u0)2+(vi-v0)2+(zi-z0)2=R2, i=1,2 ... a, a+1, a+2 ... b (3)
Wherein, O (u0,v0,z0) be auxiliary spherical surface 1 sphere centre coordinate, R be 1 radius of auxiliary spherical surface；
The error function equation of auxiliary spherical surface 1 is established using least square method,
Enable 1 error F of auxiliary spherical surface1Minimum, then u0,v0,z0, R should meet,
Sphere centre coordinate O (the u of auxiliary spherical surface 1 is solved by equation group (5)0,v0,z0), the value of 1 radius R of auxiliary spherical surface substitutes into formula (3) 1 mathematic(al) representation of auxiliary spherical surface being fitted；
Measuring point { the I of obtained 1 radius R value of auxiliary spherical surface and the 3rd section line III is solved using above-mentioned equation (5)b+1, Ib+2, Ib+3…IcBuilding auxiliary spherical surface 2 equation are as follows:
Wherein, L- measuring beam line, α, beta, gamma-are respectively the angle of measuring beam line L and space X axis, Y-axis, Z axis, d- sensing Device reading value difference；
The error function equation of auxiliary spherical surface 2 is established using least square method:
Enable 2 error F of auxiliary spherical surface2Minimum, then α, beta, gamma should meet:
α, the value of beta, gamma, i.e. beam direction vector are solved by equation group (8).
Technical field
The invention belongs to detection technique fields, are related to a kind of beam direction automatic calibration method based on section check.
Background technique
Spectral Confocal displacement measurement is the non-contact measurement method of a kind of high-precision and high stability, has higher resolution Power, and it is adaptable to measured target.Due to the manufacture of mechanical device, installation error and sensor body error in measurement process Etc. influence factors so that the space angle of measuring beam is difficult to judge, and then influence measurement accuracy.In practical application, technology people Member often only carries out the simple adjustment of installation pose or guarantees by mechanical structure, and reliability is poor with precision.
Traditional mechanical adjustment mode, which is difficult to, accurately adjusts measuring beam direction and measurement surface so that sensor Absolute upright, i.e., the measurement result of sensor cannot represent the distance between datum mark and measurement surface at this time, deposit In measurement error of tilt, and due to characteristics such as the invisibility of measuring beam, the extremely low, ultrahigh resolutions of power, lack effective Means demarcate its space vector direction, measurement accuracy and measurement trajectory planning are seriously affected, especially complex-curved Measurement request is unable to satisfy in accurate measurement.Therefore, the staking-out work of measuring beam space vector is particularly important.
2006, paper " the Non-contact Laser Probe measurement that good prestige in University Of Tianjin room etc. is delivered at " electronic measurement technique " Axis calibration system " in propose utilize Position-Sensitive Detector and specially designed clamp mechanism, manually adjust laser feeler light Beam axis makes axis by the method for the centre of gyration of gauge head revolving body, but stated accuracy is lower.2010, Zhejiang University Lu Ke Blueness etc. describes in the paper " calibration of point laser feeler beam direction " that " optical precision engineering " is delivered can with in-plane The calibrating block of tune carries out the calibration of gauge head posture, reuses the scaling method that standard ball carries out the calibration of gauge head installation site, calibration Process is cumbersome and overall precision is not high.2014, Air China industry Beijing Aviation precision machinery research institute Liu Yong etc. was in " observing and controlling skill Art " several calibration algorithms are compared in the paper " research of optical measuring head beam direction various calibration method is compared with " delivered, It is mentioned that seven point equivalence standardization of ball establish equation using seven measuring point datas in standard ball and collected standard ball The direction vector of optical measuring head light beam is solved, however this method operating process is complicated, it is difficult to obtain preferable measuring point data value, mark Determine low efficiency and precision is poor.
Summary of the invention
The present invention solves the technical problem of the above method is overcome the shortcomings of, for utilization Spectral Confocal displacement sensing Beam direction is difficult to the problem accurately judged when device measures part surface type contour feature, has invented a kind of light based on section check Shu Fangxiang automatic calibration method.In this method, using Spectral Confocal displacement sensor, two groups of section lines of standard ball are adopted respectively Be scanned measurement with two constant readings, according to the machine coordinates that acquire when measurement and the foundation of sensor readings difference about The equation in sensor light beam vector direction completes the calibration of measuring beam space angle by solving equation.Based on least square Method, which is fitted collected machine coordinate values, is calculated auxiliary sphere centre coordinate and radius, when realizing measurement arbitrary section line The error compensation of coordinate value.Sensor can complete beam direction calibration experiment under clamped one time, calibration process rapidly and efficiently, Practical value is high, facilitates easy to operate.It can be achieved to examine the automatic Calibration in the measuring beam direction under any Installation posture of sensor It surveys, effectively improves measurement efficiency under the premise of guaranteeing measurement accuracy.
The technical scheme adopted by the invention is that a kind of beam direction automatic calibration method based on section check, feature It is that Spectral Confocal displacement sensor is first clamped on the rotary table with T-slot by the scaling method, then will be used for school Quasi- standard ball clamping guarantees that the axis of standard ball is overlapped with main-shaft axis on machine tool chief axis；Secondly, by laterally with it is vertical To scanning standard ball, Spectral Confocal displacement sensor is adjusted with respect to the position of machine tool chief axis, completes the centering of sensor；Then, Platen drives Spectral Confocal displacement sensor to be scanned measurement to two groups of section lines of standard ball, and acquires biography simultaneously Sensor reading value and corresponding machine coordinate values；Then, it is established using sensor readings and machine coordinate values about light beam side To equation；Finally, being fitted to obtain two auxiliary sphere centre coordinates, the space line vector side of two sphere centre coordinates using least square method To as measuring beam direction vector, the calibration of Spectral Confocal displacement sensor beam direction is completed.The specific step of method It is rapid as follows:
First step sensor and standard ball are installed
By 8 clamping of Spectral Confocal displacement sensor probe in sensor installation module 9, installation module 9 is fixed on connection Among plate 12, connecting plate 12 is connect by hold-down bolt 10 and positioning pin 11 with fixed plate 13, and fixed plate 13 is mounted on four axis essence On the work top of close manual displacement platform 14, then four axis precise manual displacement platforms 14 are fixed on support base 16, finally will Support base 16 is fixed on platen 4 by the direct clamping of T-nut, completes the installation of displacement sensor.
Standard ball 7 is tightened using screw thread and is fixed on standard ball fixture 6, it is then that its clamping is on machine tool chief axis 5 and complete Processing in pairs guarantees that 7 link centerline of standard ball crosses main shaft gyration axis, completes clamping and the centering of standard ball.
Second step sensor centering processing
During centering, manual operation lathe workbench 4 drives Spectral Confocal displacement sensor probe 8 to be near the mark ball 7, It is in standard ball 7 within the scope of transducer range, and keeps sensor axis and 7 axis of rotation of standard ball coaxial by range estimation；So Afterwards, control lathe is along the forward and reverse reciprocating motion of X-axis, while sensor readings and corresponding lathe of the acquisition and recording during this Coordinate value；After lathe stops, finding corresponding X-coordinate at sensor least count value and be denoted as x0, the drive of mobile machine tool kinematic axis Spectral Confocal displacement sensor probe 8 moves to x0The centering processing of X-direction is completed in position.
When carrying out in Y-direction pair, the Y-axis knob by adjusting four axis precise manual displacement platforms 14 drives Spectral Confocal position Displacement sensor probe 8 is scanned measurement along Y-direction, observes sensor reading and obtains Y-direction sensor displacement reading value most Small place locks four axis precise manual displacement platforms 14 at least count value corresponding lathe Y-direction position, completes the centering of Y-direction Processing.
The measurement of third step section line
The position of mobile machine tool X-axis, Z axis adjustment sensor and standard ball, makes standard ball be in Spectral Confocal displacement sensing In the range ability of device probe 8, and sensor readings are d1(d1Value is in range ability and small as far as possible)；Then, it keeps passing Sensor reading value d1Constant, lathe C axis carries out rotary motion with speed n, and sensor hot spot is formed in standard ball surface at this time Track is denoted as the 1st section line I；Measurement is scanned to the 1st section line I, sensor is with sample frequency f0Acquire sensor reading Value with corresponding machine coordinate values, obtain whole measuring point { I of the 1st section line I1, I2, I3…Ia}；Finally, again adjustment lathe with The relative position of sensor, and sensor readings is made still to be d1, keep sensor readings d1It is constant；Lathe C axis revolution fortune When dynamic, sensor hot spot is denoted as the 2nd section line II in the track that standard ball surface is formed；The method of sampling shown obtains by above-mentioned Corresponding measuring point { the I of 2 section line IIa+1, Ia+2, Ia+3…Ib, sample frequency f0It calculates according to the following formula,
Wherein, n is lathe revolving speed, rmBy the m articles section line of survey circle radius, r0For the standard radius of a ball.
The relative position of mobile machine tool X-axis, Z axis adjustment sensor and standard ball, to another set section line in standard ball Calibration measurement is carried out, adjusts sensor readings d in measurement process2(d2Value is in range ability and big as far as possible) and keep permanent Fixed constant, the track that sensor hot spot is formed in measurement process is denoted as the 3rd section line III, obtains the 3rd according to the above-mentioned method of sampling Corresponding measuring point { the I of section line IIIb+1, Ib+2, Ib+3…Ic}。
4th step solves beam direction vector
Measurement data points (x based on the standard ball different location obtained in calibration measurement processn,zn,cn), n=1, 2 ..., a, a+1, a+2 ... b, b+1, b+2 ... cylindrical coordinate (x, z, c) is transformed to cartesian coordinate system (u, v, z) by c Under, transformation for mula is as follows,
Wherein, un,vnCartesian coordinate after being converted for n-th of measuring point, cnIt is corresponding under cylindrical coordinate for n-th of measuring point C Shaft angle.
The equation of auxiliary spherical surface 1, auxiliary spherical surface 2 is established, the two radius is identical, and sphere centre coordinate is different；It is corresponding to solve its Sphere centre coordinate and radius.
Utilize whole measuring point { I of the 1st section line I, the 2nd section line II in first group of section line1, I2, I3…Ia}、{Ia+1, I a+2, Ia+3…IbEstablish 1 equation of auxiliary spherical surface are as follows:
(ui-u0)2+(vi-v0)2+(zi-z0)2=R2, i=1,2 ... a, a+1, a+2 ... b (3)
Wherein, O (u0,v0,z0) be auxiliary spherical surface 1 sphere centre coordinate, R be 1 radius of auxiliary spherical surface.
The error function equation of auxiliary spherical surface 1 is established using least square method,
Enable 1 error F of auxiliary spherical surface1Minimum, then u0,v0,z0, R should meet,
Sphere centre coordinate O (the u of auxiliary spherical surface 1 can be solved by equation group (5)0,v0,z0), the value of 1 radius R of auxiliary spherical surface, generation Enter 1 mathematic(al) representation of auxiliary spherical surface that formula (3) can must be fitted.
Measuring point { the I of obtained 1 radius R value of auxiliary spherical surface and the 3rd section line III is solved using above-mentioned equation (5)b+1, Ib+2, Ib+3…IcBuilding auxiliary spherical surface 2 equation be,
Wherein, L- measuring beam line, α, beta, gamma are respectively the angle of measuring beam line L and space X axis, Y-axis, Z axis, and d is Sensor readings difference.
The error function equation of auxiliary spherical surface 2 is established using least square method,
Enable 2 error F of auxiliary spherical surface2Minimum, then α, beta, gamma should meet,
α, the value of beta, gamma, i.e. beam direction vector are solved by equation group (8).
The beneficial effects of the present invention are: using the scaling method of Spectral Confocal displacement sensor beam direction, it can be real Now the automatic Calibration in the measuring beam direction under any Installation posture of sensor is detected.Sensor can be completed under clamped one time Beam direction calibration experiment, rapidly and efficiently, practical value is high for calibration process, and easy to operate and calibration accuracy is high.It can be achieved Automatic Calibration detection to the measuring beam direction under any Installation posture of sensor, improves measurement accuracy and measurement efficiency, Realize the high-acruracy survey to Surfaces of Unusual Shape contour feature.
Detailed description of the invention
The standardization experimental apparatus scheme of installation that attached drawing 1- scaling method uses, in which: 1- machine body, 2- lathe X-axis Slide unit, 3- machine Z-axis slide unit, 4- rotation workbench of machine tool, 5- machine tool chief axis, 6- standard ball fixture, 7- standard ball, 8- spectrum are total Burnt displacement sensor probe, 9- sensor installation module, 10- hold-down bolt, 11- positioning pin, 12- connecting plate, 13- fixed plate, Tetra- axis precise manual displacement platform of 14-, 15- attachment screw, 16- support base.
Attached drawing 2- standard ball calibration measurement measuring point, measurement section line distribution schematic diagram, wherein L- measuring beam line, α, β, γ-is respectively the angle of measuring beam line L and space X axis, Y-axis, Z axis, and I, II, III- are respectively the 1st, 2,3 section lines.
The flow chart of attached drawing 3- measurement scaling method.
Specific embodiment
In conjunction with attached drawing and the technical solution embodiment that the present invention will be described in detail, illustrate the light of Spectral Confocal displacement sensor Shu Fangxiang calibration process.
Standard bulb diameter is determined according to measurement request and transducer range, selects the standard ball 7 of SR30, and actual diameter is 29.97038mm circularity is 0.084 μm；The range ability of Spectral Confocal displacement sensor 8 is 0~1mm, and range starting point is about 10mm, 0.25 μm of displacement measurement accuracy；The displacement of four axis precise manual displacement platforms, 14 horizontal direction is respectively 13mm/6mm, displacement 0.5 μm of resolution ratio, the adjusting angle of pitching and beat is ± 5 °, angular resolution 1arc sec.
Attached drawing 3 is the flow chart for measuring scaling method, and specific step is as follows for scaling method:
Spectral Confocal displacement sensor is fixed on the centering on platen and completing standard ball by the first step. Spectral Confocal displacement sensor probe 8 and sensor are installed into module 9 by screw and complete installation fixation, is then installed solid It is scheduled on connecting plate 12 and is connect by hold-down bolt 10 and positioning pin 11 with fixed plate 13, integral installation is four after the assembly is completed On the work top of axis precise manual displacement platform 14 and it is fixed on support base 16, it is finally that support base 16 is direct by T-nut Clamping is fixed on platen 4, completes the installation of displacement sensor, as shown in Figure 1.Finally, completing the clamping of standard ball It is handled with centering.Standard ball 7 is fixed on standard ball fixture 6 and clamping is on machine tool chief axis 5 and completion is to middle processing, is protected Card 7 link centerline of standard ball crosses main shaft gyration axis, completes clamping and the centering of standard ball.
Second step carries out centering processing to Spectral Confocal displacement sensor.Handwheel adjustment lathe X, Z axis are closely located to standard The central point of 7 spherical surface of ball, and standard ball is within the scope of transducer range, it is forward and reverse with speed along X then to control lathe X-axis Spend v0=0.5mm/s is scanned measurement, and simultaneous displacement sensor is with a certain section of sample frequency f=500Hz measurement standard ball Line simultaneously acquires the sensor readings during this and corresponding machine coordinate values, obtains the corresponding X-coordinate note of least count value For x0, x is obtained in experiment0=0.054mm, mobile machine tool X-axis to x0X-direction centering is completed at=0.054mm；Adjust four axis essence The Y-axis knob of close manual displacement platform 14 drives displacement sensor to carry out Y-direction measurement, obtains the position that displacement readings are worth the smallest Y It sets and locks manual displacement platform in this position, complete Y-direction centering.
Third step carries out calibration measurement to standard ball section line.After being completed in displacement sensor pair, main shaft is set as Axis servomotor mode, that is, C axis simultaneously carries out returning to zero operation, and the position of mobile machine tool X-axis, Z axis adjustment displacement sensor and standard ball makes Standard ball section line is in Spectral Confocal displacement sensor measurement range range, and sensor readings are d at this time1, take d1Value is 0.1mm, the track that sensor hot spot is formed when main shaft gyration are positioned as the 1st section line I；Then the calibration of the 1st section line I is carried out Measurement experiment keeps sensor readings d1=0.1mm is constant, and lathe C axis carries out rotary motion with speed n=2r/min, passes Sensor is with sample frequency f0The reading value of measuring point and corresponding machine coordinate values are collected, according to equation (1) setting sampling frequency Rate f0=500Hz obtains measuring point { I1, I at the 1st section line I2, I3…Ia}；The relative position of lathe and sensor is adjusted again And sensor readings is made still to be d1=0.1mm, the track definition that hot spot is formed when revolution are the 2nd section line II, and position is such as Shown in attached drawing 2, calibration measurement is carried out to the 2nd section line II according to the method described above, obtains the corresponding measuring point of the 2nd section line II {Ia+1, Ia+2, Ia+3…Ib}；The relative position of lathe and sensor is finally adjusted, so that sensor readings are d2=0.8mm, Spot tracks are defined as the 3rd section line III；Holding sensor readings are d2=0.8mm is constant, acquires according to same measuring point Method obtains the corresponding measuring point { I of the 3rd section line IIIb+1, Ib+2, Ib+3…Ic}。
4th step establishes auxiliary spherical surface and solves light beam direction vector.
Coordinate value (the x obtained during based on measurement standard ball different locationn,zn,cn), n=1,2 ..., a, a+1, a + 2 ... b, b+1, b+2 ... the total c group of c brings equation (5) into, (8) establish auxiliary spherical surface 1, auxiliary spherical surface 2, two auxiliary balls of solution Face sphere centre coordinate, radius, sphere centre coordinate line are measuring beam direction vector.By experiment can acquire measuring beam line L with Space X axis, Y-axis, Z axis angle α=88.51 °, β=89.24 °, γ=0.81 ° realizes the mark of measuring beam direction vector It is fixed.
The present invention realizes the calibration of Spectral Confocal displacement sensor beam direction, can satisfy sensor any The output of Installation posture measuring beam direction vector is demarcated, and analysis is obtained since the variation of sensor measurement light beam direction vector causes Error variation, improve the measurement accuracy with Surfaces of Unusual Shape contour feature part, calibration process accuracy is high, practical Property is strong.
- 上一篇：一种医用注射器针头装配设备
- 下一篇：一种防偏移的隧道限高监测装置