阅读说明：本技术 玻璃卷筒的制造方法及玻璃卷筒 (The manufacturing method and glass reel of glass reel ) 是由 森弘树 于 2018-03-29 设计创作，主要内容包括：本发明提供玻璃卷筒的制造方法及玻璃卷筒,玻璃卷筒的制造方法包括：玻璃膜供给工序,将带状的第一玻璃膜(2A)向规定的方向送出；成膜工序,在第一玻璃膜(2A)的一个面(2a)上通过加热形成透明导电膜(3),从而形成第二玻璃膜(2B)；保护膜供给工序,将具有粘接面的带状的保护膜(4)重叠于第二玻璃膜(2B)的另一个面(2b)而形成第三玻璃膜(2C)；以及卷绕工序,将第三玻璃膜(2C)卷绕成卷筒状。(The present invention provides the manufacturing method and glass reel of glass reel, and the manufacturing method of glass reel includes: glass-film supply step, and band-like the first glass-film (2A) is sent out to defined direction；Film formation process, by being thermally formed transparent conductive film (3) on a face (2a) of the first glass-film (2A), to form the second glass-film (2B)；Band-like protective film (4) with bonding plane is overlapped in another face (2b) of the second glass-film (2B) and forms third glass-film (2C) by protective film supply step；And rolling step, third glass-film (2C) is wound into a roll tubular.)

1. a kind of manufacturing method of glass reel, which is made of band-like glass-film is wound into a roll tubular, It is characterized in that,

The manufacturing method of the glass reel includes:

Glass-film supply step sends out the first band-like glass-film to defined direction；

Film formation process, by being thermally formed transparent conductive film on a face of first glass-film, to form the second glass Glass film；

Protective film supply step, by the band-like protective film with bonding plane be overlapped in second glass-film another face and Form third glass-film；And

The third glass-film is wound into a roll tubular by rolling step.

2. the manufacturing method of glass reel according to claim 1, which is characterized in that

The manufacturing method of the glass reel includes:

Second glass-film after the film formation process is wound into a roll tubular by interim rolling step；

Second glass-film supply step draws second glass from the temporary glass reel being made up of the interim rolling step Glass film is simultaneously sent out to defined direction；And

The protective film supply step forms the third glass-film after the second glass-film supply step.

3. the manufacturing method of glass reel according to claim 1 or 2, which is characterized in that

In the rolling step, by the third glass-film wound into rolls in a manner of making the protective film become outside Shape.

4. the manufacturing method of glass reel according to any one of claim 1 to 3, which is characterized in that

In the protective film supply step, by utilizing the core and the guidance protective film for winding the third glass-film Guide reel clamps second glass-film and the protective film, to form the third glass-film.

5. the manufacturing method of glass reel according to any one of claim 1 to 4, which is characterized in that

In the film formation process, the transparent conductive film is formed in by first glass by sputtering method in vacuum chamber Film.

6. the manufacturing method of glass reel according to any one of claim 1 to 5, which is characterized in that

The transparent conductive film is single layer, and the sheet resistance of the transparent conductive film is 20 Ω/ or less.

7. a kind of glass reel, be band-like glass-film be wound into it is scroll-like made of, which is characterized in that

The glass reel has:

Transparent conductive film is formed in a face of the glass-film；And

Protective film is overlapped in another face of the glass-film and has bonding plane,

The transparent conductive film is single layer, and the sheet resistance of the transparent conductive film is 20 Ω/ or less.

8. glass reel according to claim 7, which is characterized in that

The glass-film is wound in such a way that the protective film becomes outside.

Technical field

The present invention relates to the glass reels and its manufacturing method that are made of the glass-film for being formed with transparent conductive film on surface.

Background technique

It is well known that the intelligence of the thin type display devices such as liquid crystal display, organic el display and in recent years rapid proliferation The mobile devices such as energy mobile phone, plate PC are required light weight.Therefore, as glass substrate used by these equipment, make With being turned to membranaceous glass-film by thin plate.The glass-film forms substantially rectangular etc. form in the stage of final products, but at it In the stages such as pervious manufacturing process, various treatment process, handled as band-like form is formed.

Since this glass-film has flexibility appropriate, convenience when in view of taking care of, when conveying etc. is usually adopted With the form for the glass reel for being wound into a roll tubular around core etc..If glass-film to be set as to the form of glass reel in advance, It not only takes care of that property etc. is excellent, but also can be easy to cut out multiple substantially rectangular etc. glass-films.

Functional membrane is formed on the surface of glass reel, so as to have the various functions in various equipment.In order to make function Property film become high-performance, there is the case where forming a film while heating glass-film.Such as in patent document 1, it discloses as follows Method: heating the glass-film (sheet glass) supplied from substrate reel using the tank (can) for being heated to 300 DEG C or more, Transparent conductive film (such as indium tin oxide) is formed on the surface of the glass-film by sputtering method.

Citation

Patent document

Patent document 1: Japanese Unexamined Patent Publication 2007-119322 bulletin

Summary of the invention

Subject to be solved by the invention

Glass-film excellent heat resistance compared with resin film is therefore particularly suitable for carrying out the feelings of heating film forming as described above Condition.On the other hand, since the mechanical strength of glass-film is low, the glass-film with film is drawn in glass reel from the above In the case where manufacturing process to carry out various equipment, it is possible to damage.

The present invention be it is completed in view of the above situation, technical task is to prevent by the glass of formation transparent conductive film The damage for the glass reel that glass film is constituted.

Means for solving the problems

Present invention is proposed to solve the above problem, is related to a kind of manufacturing method of glass reel, glass volume Cylinder is that band-like glass-film is wound into a roll made of tubular, which is characterized in that the manufacturing method of the glass reel includes: glass Glass film supply step sends out the first band-like glass-film to defined direction；Film formation process, the one of first glass-film By being thermally formed transparent conductive film on a face, to form the second glass-film；Protective film supply step, will be with bonding plane Band-like protective film is overlapped in another face of second glass-film and forms third glass-film；And rolling step, by institute It states third glass-film and is wound into a roll tubular.

As described above, by another face in the second glass-film overlapping protection film and become third glass-film, thus Glass-film can be protected by protective film.The glass reel being made of the third glass-film can protect glass by protective film Implement the manufacture relevant treatment of various equipment in the state of glass film.Thereby, it is possible to prevent the damage of the glass-film in processing.

In the manufacturing method of glass reel of the invention, the manufacturing method for being also possible to the glass reel includes: to face When rolling step, second glass-film after the film formation process is wound into a roll tubular；Second glass-film supply step, from Second glass-film is drawn by the temporary glass reel that the interim rolling step is constituted and is sent out to defined direction；With And the protective film supply step forms the third glass-film after the second glass-film supply step.

It is further preferred, that in the rolling step, by the third in a manner of making the protective film become outside Glass-film is wound into a roll tubular.Thereby, it is possible to suitably prevent the glass-film of glass reel state to be broken.

It is further preferred, that in the protective film supply step, by utilizing the core for winding the third glass-film Second glass-film and the protective film are clamped with the guide reel of the guidance protective film, to form the third glass Film.In this way, the second glass-film and the protective film are clamped by the core and guide reel for utilizing third glass-film, so as to incite somebody to action Protective film is reliably and accurately overlapped in the second glass-film.In addition, by utilizing core in the formation of third glass-film, thus The structure of guide reel can be simplified.

In the manufacturing method of glass reel of the invention, it is preferred that in the film formation process, lead in vacuum chamber It crosses sputtering method and the transparent conductive film is formed in first glass-film.By sputtering method, by adding on the first glass-film Thermosetting transparent conductive film, so as to form the firm transparent conductive film being not easy from the first glass film stripping, and can Realize the low resistance of the transparent conductive film.That is, the transparent conductive film can be by thin-layer electric in the case where being made of single layer Resistance is set as 20 Ω/ low resistance below.

Present invention is proposed to solve the above problem, is related to a kind of glass reel, is band-like glass-film quilt Be wound into a roll made of tubular, which is characterized in that the glass reel has: transparent conductive film is formed in the glass-film A face；And protective film, it is overlapped in another face of the glass-film and there is bonding plane, the transparent conductive film is Single layer, and the sheet resistance of the transparent conductive film is 20 Ω/ or less.

According to above-mentioned structure, by the way that protective film to be overlapped in another face of glass-film, so as to protect the glass Film.Therefore, glass reel of the invention can carry out the transparent conductive film of glass-film while the damage for preventing glass-film Defined manufacture relevant treatment.In addition, due to sheet resistance when transparent conductive film is made of single layer be 20 Ω/ hereinafter, because This can be suitable for the electrode etc. of various equipment.

In the glass reel of above structure, it is preferred that the glass-film is in such a way that the protective film becomes outside Winding.Thereby, it is possible to prevent the glass-film of glass reel state to be broken.

Invention effect

In accordance with the invention it is possible to prevent the damage for the glass reel being made of the glass-film for being formed with transparent conductive film.

Detailed description of the invention

Fig. 1 is the side view of glass reel.

Fig. 2 is the side sectional view for showing the manufacturing device of glass reel.

Fig. 3 is the flow chart for showing the manufacturing method of glass reel.

Fig. 4 is the side sectional view for showing a part of the manufacturing device of glass reel of other modes.

Fig. 5 is the side view for showing a part of manufacturing device of glass reel.

Fig. 6 is the flow chart for showing the manufacturing method of glass reel.

Specific embodiment

Hereinafter, being illustrated referring to attached drawing to specific embodiment.Fig. 1 to Fig. 3 show glass reel of the invention and its The first embodiment of manufacturing method.

As shown in Figure 1, glass reel 1 be transparent conductive film 3 is formed in band-like glass-film 2 a face (hereinafter, Referred to as " the first face ") 2a and protective film 4 is overlapped in the state of the 2b of another face (hereinafter referred to as " second face ") in core 5 Around be wound into a roll the reel of tubular.In the glass reel 1 of present embodiment, it is configured to, the first face 2a of glass-film 2 is Inner peripheral surface, the second face 2b are outer peripheral surface.That is, the inside (the first face 2a) in glass-film 2 is formed with transparent conductive film 3, on the outside (the second face 2b) overlaps with protective film 4.

Glass-film 2 with a thickness of 500 μm hereinafter, preferably 10 μm or more and 300 μm hereinafter, most preferably 30 μm or more and 200 μm or less.

As the material of glass-film 2, using silicate glass, silica glass, it is preferable to use pyrex, sodium calcium Glass, alumina silicate glass, chemically reinforced glass, most preferably with alkali-free glass.By using alkali-free glass as glass-film 2, so as to form chemically stable glass.Here, alkali-free glass, which refers to, contains substantially no alkali composition (alkali metal oxidation Object) glass, specifically, be alkali composition weight ratio be 3000ppm glass below.The weight of alkali composition in the present invention Than being preferably 1000ppm hereinafter, more preferably 500ppm is hereinafter, most preferably 300ppm or less.

Glass-film 2 can by well known float glass process, offset (roll out) method, slot draw method, again daraf(reciprocal of farad) etc. shape, it is excellent Gated overflow downdraw forming.In overflow downdraw, melten glass inflow is made to be set to section forming rough wedge-shaped The overflow launder on body top makes the melten glass overflowed from the overflow launder to two sides along the sidewall portion stream of the two sides of formed body on one side Under, fusion integration is carried out in the lower end of formed body on one side, glass-film 2 is opened in progressive forming one.

It, being capable of a large amount of and qurer 300 μm of thickness glass-films 2 below of production by overflow downdraw.It produces as a result, Glass-film 2 do not need by grinding, grinding, chemical etching etc. adjust glass-film 2 thickness.In addition, overflow downdraw is into The two sides (transparent surface) of the forming process that the two sides of glass-film 2 is not contacted with formed body when shape, obtained glass-film 2 becomes forging Face can obtain higher surface quality not grinding.

The thickness of transparent conductive film 3 be preferably 10nm or more and 1000nm hereinafter, more preferably 50nm or more and 500nm with Under, most preferably 100nm or more and 300nm or less.In addition, the sheet resistance in the transparent conductive film 3 of the formation of glass-film 2 is preferred For 20 Ω/ hereinafter, more preferably 15 Ω/ or less.

As the material of transparent conductive film 3, as long as the material with translucency and electric conductivity, does not just limit especially It is fixed.Transparent conductive film 3 is for example mixed by indium tin oxide (ITO), Fluorin doped tin-oxide (FTO), indium-zinc oxide (IZO), aluminium Miscellaneous zinc oxide (AZO) etc. is constituted.

One face 4a of protective film 4 is bonding plane.Bonding plane is contacted with the second face 2b of glass-film 2.The bonding of bonding plane Power is preferably set at after the manufacture relevant treatment for carrying out various equipment to glass reel 1, the journey that can be removed from glass-film 2 Degree.The bonding force is preferably 0.001N/25mm or more and 1.5N/25mm hereinafter, but being not limited to the range.In addition, protection The thickness of film 4 is preferably 10 μm or more and 1000 μm hereinafter, more preferably 20 μm or more and 500 μm or less.

As the material of protective film 4, for example, be able to use ionomeric membrane, polyethylene film, polypropylene screen, polychloroethylene film, Polyvinylidene chloride film, polyvinyl alcohol film, polyester film, polycarbonate membrane, polystyrene film, polyacrylonitrile film, ethyl vinyl acetate second Enoate copolymer film, ethylene vinyl alcohol copolymer film, ethylene-methacrylic acid copolymer film, nylon (registered trademark) film are (poly- Amide film), polyimide film, organic resin films (synthetic resin film) such as glassine paper etc. are, it is preferable to use poly terephthalic acid second two Alcohol ester film (PET film).

In this embodiment, core 5 is in hollow cylindrical shape, but may be solid cylindric.The material of core 5 It is not particularly limited, but for example, is able to use the metals such as aluminium alloy, stainless steel, manganese steel, carbon steel, phenolic resin, urea tree The thermosetting properties such as rouge, melamine resin, unsaturated polyester resin, epoxy resin, polyurethane, diallyl p phthalate resin The thermoplastic resins such as resin, polyethylene, polypropylene, polystyrene, AS resin, ABS resin, methacrylic resin, vinyl chloride, Or be mixed in these thermosetting resins or thermoplastic resin the reinforcing fibers such as glass fibre, carbon fiber reinforced plastics, Paper tube etc..

It should be noted that in the following description, the glass-film as base material is known as the first glass-film 2A, it will be The glass-film that one glass-film 2A is formed with transparent conductive film 3 is known as the second glass-film 2B.In addition, being overlapped in the second glass-film 2B The laminated body (constituting laminated body by glass-film 2, transparent conductive film 3 and protective film 4) of protective film 4 is known as third glass-film 2C.

Fig. 2 is the manufacturing device 6 for showing the glass reel 1 in present embodiment.Manufacturing device 6 have film formation device 7 with And protective film feedway 8.Film formation device 7 has vacuum chamber 9.Vacuum chamber 9 have glass-film supply chamber 9a, film forming room 9b and Glass-film recovery room 9c.

In glass-film supply chamber 9a configured with the base material glass that the first glass-film 2A is wound into a roll to tubular by core 5A Reel 1A.By the rotation of core 5A, from the first glass-film 2A that base material glass reel 1A is drawn from glass-film supply chamber 9a to Film forming room 9b supply.

In film forming portion 10 of the film forming room 9b configured with the first face 2a that transparent conductive film 3 is formed in the first glass-film 2A. Transparent conductive film 3 can be formed in the first glass-film by the various membrane formation process such as sputtering method, vapour deposition method, CVD method by film forming portion 10 2A.In the present embodiment, it is illustrated to the case where forming the ito film as transparent conductive film 3 by sputtering method.

Film forming portion 10 is made of ion beam sputtering device, magnetic control sputtering device etc..Film forming portion 10 as sputtering equipment is main Have the sputtering source 11 comprising target and supports the heating roller 12 of the first glass-film 2A.

Sputtering source 11 is so that the sputtering particle (ITO particle) to disperse from target is attached to the first face 2a's of the first glass-film 2A Mode separates constant interval from heating roller 12 and configures.

Heating roller 12 has: cylindric roller main body 13, supports the first glass-film 2A；And heater 14, heating The roller main body 13.Roller main body 13 is made of glass or ceramics.Roller main body 13 is rotatably supported by axle portion 15.

Heater 14 is configured at the inside of the roller main body 13 in order to heat roller main body 13.Heater 14 is for example by infrared ray Heater or near infrared ray heater are constituted, and however, it is not limited to this.

By making transparent conductive film 3 be formed in the first glass-film 2A using film forming portion 10, to constitute the second glass-film 2B. Second glass-film 2B is moved to glass-film recovery room 9c, then, overlapping protection film 4 and becomes third glass-film 2C.

It is supplied in the glass-film recovery room 9c of vacuum chamber 9 configured with the core 5 of winding third glass-film 2C and protective film Device 8.Core 5 winds third glass-film 2C, to be formed into the glass reel 1 of final form.Base material glass reel 1A with And glass reel 1 is configured to, and by reel to reel (Roll to Roll) mode, each glass-film 2A~2C is continuously removed Fortune.

Protective film feedway 8 has the supporting device 18 of protection film roll cylinder 16, guide reel 17 and guide reel 17.

Protection film roll cylinder 16 is configured at the top of glass reel 1, but does not limit to the structure.Protect film roll cylinder 16 can also be with It is set to position or the lower position in the downstream side of glass reel 1.

Guide reel 17 is made of a roller.Guide reel 17 clamps third glass-film 2C with the core 5 with glass reel 1 together It is constituted with the mode of protective film 4.Guide reel 17 is configured at the position more against the top than the core 5 of glass reel 1, but is not limited to The position.The roll surface 17a of guide reel 17 is made of padded coaming.Padded coaming is preferably made of elastomers such as rubber.

Supporting device 18 has: supporting member 19 rotatably supports guide reel 17；And support shaft 20, It is to rotate freely by the supporting member 19 bearing.Guide reel 17 acts on around support shaft 20 and via supporting member 19 Torque is contacted with the pressing force of appropriateness with a part of glass reel 1.In addition, guide reel 17 is propped up by the supporting device 18 It holds to follow the expansion of the outer diameter of the glass reel 1 in manufacturing process and moves.

Hereinafter, being illustrated to the manufacturing method of the glass reel 1 in present embodiment.As shown in figure 3, this method includes Glass-film supply step, film formation process, protective film supply step and rolling step.

In glass-film supply step, the first glass is drawn from the base material glass reel 1A for being configured at glass-film supply chamber 9a Film forming portion 10 in film 2A, film forming room 9b downstream conveys.

In film formation process, transparent conductive film 3 is formed in supply from glass-film supply chamber 9a the by film forming portion 10 The first face 2a of one glass-film 2A.In film forming room 9b, defined vacuum degree is set as by vacuum pump (not shown), and supply To non-active gas such as argon gas.Film forming portion 10 makes sputtering particle (such as ITO particle) disperse from sputtering source 11, and is sequentially attached to The first face 2a of first glass-film 2A.

The roller main body 13 of heating roller 12 is by driving axle portion 15 using driving source (not shown), thus with along the first glass The mode of the carry direction of glass film 2A is rotated to defined direction (direction of the arrow R in Fig. 2).A part of roller main body 13 with The second face 2b of first glass-film 2A is contacted.Roller main body 13 is rotated by it, and by the first glass-film 2A, downstream (glass-film is returned Receive the side room 9c) guidance.

Roller main body 13 is heated to defined temperature by heater 14.The temperature of roller main body 13 is for example set as 200 DEG C Above and 500 DEG C hereinafter, but be not limited to the range.Roller main body 13 carries out heating one to the first glass-film 2A on one side as a result, While the first glass-film 2A is downstream guided.First glass-film 2A is heated to be 150 DEG C or more by roller main body 13.It is sputtering In the case that particle is ITO, it is 200 DEG C or more that the first glass-film 2A, which is preferably heated, is more preferably heated to be 250 DEG C, optimal Choosing is heated to be 300 DEG C or more.It is heated by the first glass-film 2A, to make the ITO grain for being attached to first glass-film 2A Son crystallization, forms the transparent conductive film 3 of low resistance (20 Ω/ or less).The second glass-film 2B is formed as a result,.

In protective film supply step, with the rotation of the core 21 of the protection film roll cylinder 16 in protective film feedway 8, Draw protective film 4.Protective film 4 and the second glass-film 2B are guided roller 17 and the core 5 of glass reel 1 clamps.It protects as a result, One face 4a (bonding plane) of film 4 is adhered to the second face 2b as outer peripheral surface of the second glass-film 2B.It initially forms as a result, Third glass-film 2C.

In rolling step, the third glass that protective film supply step is formed is wrapped over by the rotation of core 5 immediately Glass film 2C.Glass reel 1 is formed around core 5 as a result,.Glass reel 1 expands its outer diameter according to the rotation of core 5.

At this point, the guide reel 17 of protective film feedway 8 is followed the expansion of the outer diameter of glass reel 1 and is moved outward. The supporting member 19 of supporting device 18 rotates to keep guide reel 17 mobile around support shaft 20 (rotating clockwise).That is, guide reel 17 according to the expansion of the outer diameter of glass reel 1, moves from Fig. 2 from the position shown in solid line to by the position shown in double dot dash line It is dynamic.Guide reel 17 makes protective film 4 and the second glass-film in the case where not applying excessive pressing force to glass reel 1 as a result, 2B is reliably contacted.

Present embodiment is completed so that rolling step terminates by the third glass-film 2C that core 5 winds specific length Glass reel 1.

It should be noted that drawing third glass-film 2C in subsequent process from glass reel 1, passing through the hands such as photoetching Section forms defined circuit pattern (such as electrode pattern) in transparent conductive film 3.If manufacturing relevant treatment as defined in executing, Protective film 4 is removed (removing) from glass-film 2.

The manufacturing method of the glass reel 1 of present embodiment from the description above, by the way that protective film 4 is overlapped in glass Film 2, so as to protect the glass-film 2.Thereby, it is possible to prevent the damage of the glass-film 2 in the manufacture concerned process steps of various equipment Wound.In addition, in rolling step, when being constituted glass winding third glass-film in a manner of making protective film 4 become outside When reel 1, tensile stress acts on the second face 2b of glass-film 2, but can suitably protect glass-film 2 by protective film 4 Second face 2b.Thereby, it is possible to be effectively prevented the glass-film 2 of 1 state of glass reel to be broken.Further, since in glass-film 2 The transparent conductive film 3 that is formed of the first face 2a by being thermally formed, therefore, can be realized the such low resistance of 20 Ω/ or less, It can be suitably used for the electrode etc. of various equipment.

In addition, by carrying out protective film supply step in vacuum chamber 9, so as to improve the manufacture effect of glass reel 1 Rate.In addition, by protective film feedway 8 being configured in the vacuum chamber 9 of film formation device 7, so as to keep manufacturing device 6 small Type.

Fig. 4 to fig. 6 shows the second embodiment of glass reel and its manufacturing method.

The manufacturing device 6 of glass reel 1 individually has film formation device 7 and protective film feedway 8.As shown in figure 4, The vacuum chamber 9 of film formation device 7 has glass-film supply chamber 9a, film forming room 9b and glass-film in the same manner as first embodiment Recovery room 9c.In the same manner as first embodiment, it is configured with base material glass reel 1A in glass-film supply chamber 9a, in film forming room 9b It is provided with film forming portion 10.

Protective film feedway 8 is not provided in glass-film recovery room 9c.In glass-film recovery room 9c configured with winding the The core 5B of two glass-film 2B.The second glass-film 2B is wound by core 5B, to form temporary glass reel 1B around it. Other structures in film formation device 7 are identical with first embodiment.

Protective film feedway 8 is configured at the outside of the vacuum chamber 9 in film formation device 7, and near the film formation device 7 Position.As shown in figure 5, protective film feedway 8 has protection film roll cylinder 16 and guides the guide reel 17 of protective film 4.Protection Film roll cylinder 16 winds protective film 4 by core 21 and constitutes.Guide reel 17 is made of niproll, but is not limited to the structure.

As shown in figure 5, temporary glass reel 1B and glass reel 1 link roll fashion by reel, film roll is protected Cylinder 16 is configured between temporary glass reel 1B and glass reel 1.Protective film feedway 8 makes via guide reel 17 from protective film The protective film 4 that reel 16 is drawn contacts the second glass-film 2B drawn with the rotation of core 5B from temporary glass reel 1B. Third glass-film 2C is continuously formed in the downstream side of guide reel 17 as a result,.Core 5 passes through winding third glass-film 2C, from And glass reel 1 is constituted around it.

Hereinafter, the method for manufacturing glass reel 1 to the manufacturing device 6 by above structure is illustrated.

As shown in fig. 6, this method includes: the first glass-film supply step, the first glass-film 2A is supplied；Film formation process, In First glass-film 2A forms transparent conductive film 3；First rolling step, after film formation process, using the second glass-film 2B as interim Glass reel 1B is recycled；Second glass-film supply step is drawn the second glass-film 2B from temporary glass reel 1B and is supplied； Protective film 4 is overlapped in the second glass-film 2B and constitutes third glass-film 2C by protective film supply step；And volume Two is around work Sequence is recycled third glass-film 2C as glass reel 1.

The glass-film supply step and film forming of first glass-film supply step and film formation process and first embodiment Similarly, the base material glass reel 1A of the glass-film supply chamber 9a of the vacuum chamber 9 from film formation device 7 configuration draws the to process One glass-film 2A and to film forming room 9b supply, and by film forming portion 10 the first glass-film 2A the first face 2a formed electrically conducting transparent Film 3.It is formed as a result,

Second glass-film 2B.

First rolling step be by core 5 wind third glass-film 2C before, using other core 5B temporal volume around The process (interim rolling step) of second glass-film 2B.In the first rolling step, the second glass for passing through in film forming room 9b Film 2B is directed to glass-film recovery room 9c, is wound by core 5B.Core 5B is not schemed in a manner of winding the second glass-film 2B The driving source shown drives and rotates.Temporary glass reel 1B is formed around core 5B as a result,.Temporary glass reel 1B with The rotation of core 5B and outer diameter is gradually expanded.If core 5B winds the second glass-film 2B of specific length, the first rolling step Terminate.Hereafter, temporary glass reel 1B is removed from glass-film recovery room 9c.

In the second glass-film supply step, second is drawn from the temporary glass reel 1B taken out from glass-film recovery room 9c Glass-film 2B, and protective film feedway 8 downstream supplies.

In protective film supply step, protective film 4 is drawn from protection film roll cylinder 16.Protective film 4 and the second glass-film 2B mono- It rises and is guided roller 17 (niproll) clamping.A face 4a (bonding plane) of protective film 4 is adhered to the of the second glass-film 2B as a result, Two face 2b.Third glass-film 2C is formed as a result,.

In the second rolling step, third glass-film 2C is wound by core 5.Core 5 is driven by driving source (not shown) And it rotates.Glass reel 1 is formed around core 5 as a result,.Glass reel 1 is gradually expanded outer with the rotation of core 5 Diameter.If core 5 winds the third glass-film 2C of specific length, the second rolling step terminates, and completes glass reel 1.

It should be noted that the invention is not limited to the structures of above embodiment, it is not limited to above-mentioned effect effect Fruit.The present invention can make various changes without departing from the spirit and scope of the invention.

In the above-described embodiment, although the configuration base material glass reel 1A in vacuum chamber 9 is shown, by reel to volume Cylinder mode forms the example of transparent conductive film 3 in the first glass-film 2A, but is not limited to the structure.For example, it is also possible to will lead to It crosses the glass-film 2 (the first glass-film 2A) that overflow downdraw continuously shapes to imported into vacuum chamber 9, in the glass-film 2 formation Transparent conductive film 3.In this case, the second glass-film 2B is formed without using base material glass reel 1A.

In the above-described embodiment, although showing the roller main body 13 by heating using heater 14 to heat the first glass The example of glass film 2A, but it is not limited to the structure.For example, it is also possible in the film forming room 9b of vacuum chamber 9, in the first glass-film Heater 14 is configured near 2A, and the first glass-film 2A is heated by the heater 14.

In the above-described embodiment, the glass of transparent conductive film 3 only is formed in the first face 2a of glass-film 2 although exemplifying Glass reel 1, however, it is not limited to this, can also form transparent conductive film 3 in two faces 2a, 2b of glass-film 2.

In the above-described embodiment, although showing using a face 4a of protective film 4 as bonding plane, and it is adhered to first The example of the second face 2b of glass-film 2A, but it is not limited to the structure.It can also be using two faces of protective film 4 as bonding Face adheres to another face of protective film 4 and transparent conductive film 3 in glass reel 1.In such a situation it is preferred that by protective film 4 A face 4a bonding force be set to it is bigger than the bonding force in another face.

In the above-described embodiment, electrically conducting transparent is formed in the inside (the first face 2a) of glass-film 2 although exemplifying Film 3 and on the outside (the second face 2b) overlap with the glass reel 1 of protective film 4, but are not limited to the structure.It is also possible in glass The inside of glass film 2 overlaps with protective film 4 and is formed with the glass reel 1 of transparent conductive film 3 in the outside of glass-film 2.

In the above-described embodiment, although exemplifying the base material glass being only made of the first glass-film 2A (glass-film 2) Reel 1A, but it is not limited to the structure.Base material glass reel 1A can also will become base material glass-film 2 on overlap with by The glass-film for the band-like buffer film that the resins such as PET are constituted is configured to scroll-like.In such a situation it is preferred that supplying work in glass-film In sequence, the first glass-film 2A and buffer film drawn from base material glass reel 1A is made in the glass-film supply chamber 9a of vacuum chamber 9 Separation, and buffer film is wound by core etc. in glass-film supply chamber 9a.Alternatively, it is also possible in production temporary glass reel 1B When, suitably it is overlapped the band-like buffer film being made of resins such as PET.

Alternatively, it is also possible to the top portion of band-like glass-film 2 and terminal part be equipped with for by core 5,5A, 5B and The guide part (such as band-like resin film) of glass-film 2 (2A~2C) connection.

Description of symbols:

1 glass reel

2 glass-films

One face of 2a glass-film

Another face of 2b glass-film

The first glass-film of 2A

The second glass-film of 2B

2C third glass-film

3 transparent conductive films

4 protective films

4a bonding plane

The core of 5 third glass-films

9 vacuum chambers.