阅读说明：本技术 热处理装置和金属部件的制造方法 (The manufacturing method of annealing device and metal parts ) 是由 山本亮介 于 2019-05-17 设计创作，主要内容包括：本发明提供一种热处理装置和金属部件的制造方法,能够更准确地测定被处理物的冷却时的该被处理物的温度。热处理装置(1)具有热处理室(2)和放射温度计(71)。热处理室(2)收纳作为抑制部的冷却喷嘴(65)的喷射口(65a)并冷却被处理物(100),该抑制部用于抑制为进行热处理而被加热的金属制的被处理物(100)的表面(100a)的光反射率的变化。放射温度计(71)测定热处理室(2)内的被处理物(100)自身的温度。(The present invention provides the manufacturing method of a kind of annealing device and metal parts, can more accurately measure the temperature of the treated object when cooling of treated object.Annealing device (1) has thermal chamber (2) and radiation thermometer (71).Thermal chamber (2) storage is as the jet port (65a) of the cooling nozzles (65) of suppressing portion and cooling treated object (100), and the suppressing portion is for being suppressed to the variation of the light reflectivity on the surface (100a) of metal treated object (100) for being heat-treated and being heated.Radiate the temperature of the treated object (100) itself in thermometer (71) measurement thermal chamber (2).)

1. a kind of annealing device comprising:

Cooling chamber is stored for being suppressed to the light reflection on the surface of metal treated object for being heat-treated and being heated The suppressing portion of the variation of rate, and the cooling treated object；And

Radiometer is used to measure the temperature of the indoor treated object of the cooling itself.

2. annealing device according to claim 1, which is characterized in that

The suppressing portion includes the jet port of gas nozzle,

The gas nozzle is using inert gas or reducibility gas as oxidation inhibiting atmosphere for being given in the treated object The measured portion measured by the radiometer.

3. annealing device according to claim 2, which is characterized in that

The gas nozzle supplies cooling gas of the oxidation inhibiting atmosphere as the cooling treated object.

4. a kind of manufacturing method of metal parts, which is characterized in that

It is suppressed to and is heat-treated and the variation of the light reflectivity on the surface of metal treated object that is heated and measures institute The temperature of treated object itself is stated, and cools down the treated object at the same time.

5. the manufacturing method of metal parts according to claim 4, which is characterized in that

The measured temperature being given in the treated object is supplied using inert gas or reducibility gas as oxidation inhibiting atmosphere Measured portion, to inhibit the variation of the light reflectivity.

6. the manufacturing method of metal parts according to claim 5, which is characterized in that

It is supplied the oxidation inhibiting atmosphere as the cooling gas of the cooling treated object.

Technical field

The present invention relates to the manufacturing methods of annealing device and metal parts.

Background technique

Become known for implementing the annealing device of heat treatment (for example, referring to special to the metal parts such as gear (treated object) Sharp document 1,2).Annealing device documented by patent document 1,2 is used in order to be quenched etc. to treated object.It should Annealing device has heating room and cooling chamber.Treated object is heated in heating room.In cooling chamber, treated object is by water Equal liquid refrigerants are cooling.

Citation

Patent document

Patent document 1: International Publication WO2017/043137

Patent document 2: International Publication WO2017/043138

Summary of the invention

Problems to be solved by the invention

In the annealing device being quenched to metal parts, if the cooling degree of each section of treated object is sent out Raw deviation, then the metal parts can deformation occurs (that is, unexpected deformation).It is therefore preferable that make each section of treated object Cooling degree is more equal.In order to keep the cooling degree of each section of treated object more impartial, preferably more correctly controls and located Manage the type of cooling of object.In order to more accurately control the type of cooling of treated object, need accurately to measure the cold of treated object The temperature of treated object when but.But in the structure recorded in patent document 1,2, treated object is cold by liquid refrigerant But.Therefore, the state of cooling of treated object is only managed by the temperature management of liquid refrigerant.That is, in patent text In structure documented by offering 1,2, there is no the designs for the temperature that treated object itself is measured when cooling down to treated object, no It can say and the temperature of treated object is determined.

In view of the foregoing, when can more accurately measure the cooling of treated object the purpose of the present invention is to provide one kind The treated object temperature annealing device and metal parts manufacturing method.

Means for solving the problems

(1) in order to solve the above problems, the annealing device of one aspect of the present invention includes cooling chamber, and storage is used In being suppressed to the suppressing portion of the variation of the light reflectivity on the surface of metal treated object for being heat-treated and being heated, and The cooling treated object；And radiometer, it is used to measure the temperature of the indoor treated object of the cooling itself.

According to this structure, in cooling chamber, inhibit the variation of the light reflectivity on the surface of treated object on one side, cool down on one side The treated object.Moreover, the variation of the light reflectivity on the surface of treated object is suppressed, as a result, can inhibit radiometer The case where temperature measuring result is changed because of the variation of the surface state of treated object.That is, radiometer can be further reduced The error that temperature measuring result is generated relative to the true temperature of treated object.Located as a result, can more accurately measure Manage the temperature of the treated object when cooling of object.

(2) it may be also constructed to, the suppressing portion includes the jet port of gas nozzle, and the gas nozzle is by inert gas Or reducibility gas supplies the measured portion measured by the radiometer being given in the treated object as oxidation inhibiting atmosphere.

According to this structure, the oxidation of the treated object at measured portion can be reliably suppressed.Thereby, it is possible to inhibit to be located Manage the variation (variation of brightness) of the light reflectivity at the measured portion of object.That is, being able to suppress in the cooling of treated object The light reflectivity (brightness) of treated object changes.As a result, being become using temperature measuring result according to brightness In the temperature measuring of the radiometer of change, it can more reliably inhibit to generate the temperature measuring error as caused by brightness.

(3) it may be also constructed to, the gas nozzle supplies the oxidation inhibiting atmosphere as the cooling treated object Cooling gas.

According to this structure, treated object is not cooled down by liquid, by gas cooling.Therefore, using radiometer into When the temperature measuring of row treated object, liquid will not become the obstacle of temperature measuring.Therefore, radiometer can be measured more accurately The temperature of treated object.Furthermore, it is also possible to which the gas that the light reflectivity in the measured portion for being used to inhibit treated object is changed is used Make cooling gas.It therefore, there is no need to prepare the gas and cooling gas for inhibiting the variation of light reflectivity respectively, it can be more Simplify the utilization of annealing device.Also, due to using gaseous gas in cooling treated object, treated object is cold But it after handling, does not need to carry out large-scale cleaning treatment.Moreover, with the cooling treated object of the refrigerants such as water or oil is used Situation is different, can prevent from being polluted in cooling chamber by refrigerant.Moreover, with the cooling treated object of the refrigerants such as water or oil is used Situation is different, can reduce refrigerant significantly and make cumbrous degree to earth environment, and after not needing cooling process The cleaning device of cleaning process (scale removal step), can more reduce annealing device manufacturing cost and at This.

(4) in order to solve the above problems, in the manufacturing method of metal parts in one aspect of the invention, be suppressed into The variation of the light reflectivity on the surface of the capable metal treated object for being heat-treated and being heated simultaneously measures the treated object certainly The temperature of body, and the treated object is cooled down at the same time.

According to this structure, the variation for inhibiting the light reflectivity on the surface of treated object on one side, cools down the treated object on one side. Moreover, the variation of the light reflectivity on the surface of treated object is suppressed, as a result, for example can inhibit the temperature measuring of radiometer As a result the case where being changed because of the variation of the surface state of treated object.That is, the temperature measuring of radiometer can be further reduced As a result the error generated relative to the true temperature of treated object.As a result, the cold of treated object can be measured more accurately The temperature of treated object when but.The temperature when cooling of treated object can be more accurately measured, as a result, can make The type of cooling of treated object is more accurately controlled with the temperature measuring result.Thereby, it is possible to inhibit each section of treated object Cooling degree deviation, therefore can more reliably inhibit metal treated object to be deformed.

(5) it may be also constructed to, using inert gas or reducibility gas as oxidation inhibiting atmosphere for being given to described located The measured portion for managing the measured temperature in object, to inhibit the variation of the light reflectivity.

According to this structure, the oxidation of the treated object at measured portion can be reliably suppressed.Thereby, it is possible to inhibit to be located Manage the variation (variation of brightness) of the light reflectivity at the measured portion of object.That is, being able to suppress in the cooling of treated object The light reflectivity (brightness) of treated object changes.As a result, being become using temperature measuring result according to brightness In the temperature measuring of the radiometer of change, it can more reliably inhibit to generate the temperature measuring error as caused by brightness.

(6) it may be also constructed to, carried out the oxidation inhibiting atmosphere as the cooling gas of the cooling treated object Supply.

According to this structure, treated object is not cooled down by liquid, by gas cooling.Thus, for example utilizing radiation When meter carries out the temperature measuring of treated object, liquid will not become the obstacle of temperature measuring.Therefore, radiometer can be more accurately Measure the temperature of treated object.Furthermore, it is also possible to the gas that the light reflectivity in the measured portion for being used to inhibit treated object is changed Body is used as cooling gas.It therefore, there is no need to prepare the gas and cooling gas for inhibiting the variation of light reflectivity respectively, it can More simplify utilization when heat treatment.Also, due to using gaseous gas in cooling treated object, treated object exists After cooling treatment, do not need to carry out large-scale cleaning treatment.Moreover, with the cooling treated object of the refrigerants such as water or oil is used The case where it is different, can prevent from being polluted in cooling chamber by refrigerant.Moreover, with the cooling treated object of the refrigerants such as water or oil is used The case where it is different, refrigerant can be reduced significantly, cumbrous degree is made to earth environment, and after not needing cooling process Cleaning process (scale removal step) cleaning device, can more reduce the manufacturing cost for heat-treating apparatus with And use cost.

Invention effect

In accordance with the invention it is possible to more accurately measure the temperature of the treated object when cooling of treated object.

Detailed description of the invention

Fig. 1 is the schematical side view of annealing device, shows treated object and is configured at heating/cooling position shape State, cutting show a part of annealing device.

Fig. 2 is the flow chart being illustrated for an example of the quenching treatment to annealing device.

Fig. 3 is the curve graph of the temperature history of the treated object in an example for indicate quenching treatment.

Label declaration

1: annealing device；2: thermal chamber (cooling chamber)；65: cooling nozzles (gas nozzle)；65a: jet port (inhibits Portion)；71: radiation thermometer (radiometer)；100: treated object；100a: surface；100b: measured portion.

Specific embodiment

Hereinafter, modes for carrying out the present invention will be described with reference to the drawings.

Fig. 1 is the schematical side view of annealing device 1, shows treated object 100 and is configured at heating/cooling position The state of P2, cutting show a part of annealing device 1.

In addition, hereinafter, providing out left and right directions X1 on the basis of the state for being observed from the front annealing device 1 and (being located Manage the carry direction A1 of object 100), front-rear direction Y1 and up and down direction Z1.

Referring to Fig.1, annealing device 1 is to implement treated object 100 comprising heat treatment and cooling treatment Heat treatment and be arranged.As the heat treatment, illustrated can be quenched, Carburization Treatment and homogeneous heat treatment etc..In addition, As long as the heat treatment carried out in annealing device 1 includes heat treatment and cooling treatment, specific example is had no especially It limits.Also, in the present embodiment, treated object 100 is metal parts, the outer ring or inner ring for example as bearing Ring.In addition, treated object 100 can be the cartridges such as gear, it is also possible to the solid parts such as axis.

It, being capable of illustrated SCM material (chrome-molybdenum steel), SCr material (chromium as the metal material for constituting treated object 100 Steel steel), the steel such as SNCM material (nickel chromium molybdenum steel steel) and SUJ (high-carbon-chromium bearing steel steel).

Also, as treated object 100, particularly preferred quality is the several grams of small parts to tens of kg or so, this reality Apply heat treatment of the annealing device 1 more suitable for small parts of mode.

Annealing device 1 has thermal chamber 2, carrying mechanism 3, heating element 4, holding unit 5, cooling end 6, determination part 7 and control unit 8.

Thermal chamber 2 is the housing parts of annealing device 1, formed to treated object 100 carry out heat treatment and it is cold But the space handled.Thermal chamber 2 is the heating room for heating treated object 100, and is also for cooling down treated object 100 cooling chamber.That is, in the present embodiment, treated object 100 is heated processing and cooling treatment in the same space The two.Thermal chamber 2 is shaped generally as the box-like of rectangular-shape.In the present embodiment, the gas in the space in thermal chamber 2 Pressure is atmospheric pressure, neither pressurized state, nor vacuum state.In addition, thermal chamber 2 is also configured to by not shown Vacuum pump be formed as vacuum in the state of, to treated object 100 implement heat.

Thermal chamber 2 is formed using metal plate, includes 4 side walls 21 extended on Z1 in above-below direction (in the accompanying drawings Omit the diagram of the side wall of the nearby side of paper)；It is configured at the roof 22 on the top of side wall 21；And it is configured under side wall 21 The bottom wall 23 in portion.

4 side walls 21 are formed as hollow quadrangular shape on the whole.Entering as opening portion is formed in right side wall 21 Mouth 24.Treated object 100 is moved in thermal chamber 2 from the entrance 24.The outlet as opening portion is formed in left side wall 21 25.Treated object 100 is moved out from the outlet 25 to outside thermal chamber 2.

Entrance 24 is provided with entrance fan 26, and outlet 25 is provided with outlet fan 27.

Entrance fan 26 closes entrance 24 by being configured at closed position.Also, entrance fan 26 is by being configured at open position It sets to open entrance 24.Movement is opened and closed by switching mechanism (not shown) in entrance fan 26.

Outlet fan 27 closes outlet 25 by being configured at closed position.Also, outlet fan 27 is by being configured at open position It sets to open outlet 25.Movement is opened and closed by switching mechanism (not shown) in outlet fan 27.

Carrying mechanism 3 is provided in the thermal chamber 2 with above structure.

Treated object 100 is successively transported to entrance 24, raised position P1 and outlet 25 by carrying mechanism 3.In this implementation In mode, carrying mechanism 3 is conveyor type carrying mechanism, carries treated object on the carry direction A1 of X1 in left-right direction 100。

Carrying mechanism 3 has the transportation tray 31 of mounting treated object 100 and makes transportation tray 31 on carry direction A1 Mobile mobile mechanism 32.

Transportation tray 31 is the carrying bearing part for supporting treated object 100, is formed as tabular.In transportation tray 31 central portion is formed with the hole portion 31a for penetrating through the transportation tray 31.Extend multiple single backbars from the peripheral part of hole portion 31a The stay 31b of shape.

Treated object 100 is supported by stay 31b, and the lower surface of treated object 100 is exposed from the hole portion 31a of transportation tray 31 To the downside of transportation tray 31.The both ends of transportation tray 31 on front-rear direction Y1 are supported by mobile mechanism 32.

Mobile mechanism 32 is configured to carry transportation tray 31 along carry direction A1.The specific structure of mobile mechanism 32 It is not particularly limited.It is set with raised position P1 in such as center of the left and right directions X1 of thermal chamber 2, transportation tray 31 passes through It is handled upside down and is configured at from raised position P1 from entrance 24.Heating element 4 is configured in the top of raised position P1.

Heating element 4 is along up and down direction Z1 and 3 configured separate of carrying mechanism in thermal chamber 2, in order to carry out heat The component for handling and treated object 100 being heated.In the present embodiment, heating element 4 is load coil, is constituted To carry out the heating based on induction heating to treated object 100.The conduct of heating element 4 and the outside for being configured at thermal chamber 2 The induction heating oscillator 9 of power supply connects, and is carried out by the electric power from the induction heating oscillator 9 to treated object 100 Induction heating.

Heating element 4 is constituted and the conductive components such as copper are formed as helical form.Spiral helicine portion in heating element 4 Divide the size for being formed to surround treated object 100.In the present embodiment, the spiral-form portion of heated member 4 surrounds Space be defined as heating/cooling space, heating/cooling position is set in the space surrounded by the spiral-form portion P2.The one end of heating element 4 and the other end linearly extend towards the rear, are heat-treated the side of the rear portion side of device 1 Wall 21 supports.The one end of heating element 4 and the other end are electrically connected with induction heating oscillator 9, are shaken by the induction heating Swing 9 supply high frequency electric power of device.

In addition, in the present embodiment, in such a way that heating element 4 is load coil for be illustrated, still It can also be really not so.As heating element, gas burner, ceramic heater, electric heating lamp, microwave heating dress also can be used It sets and other well known heating elements.

The treated object 100 being placed on the transportation tray 31 for reaching raised position P1 be kept unit 5 keep and to adding But position P2 is promoted hot/cold, is carried out heat treatment and cooling treatment in heating/cooling position P2.

Holding unit 5 includes as the mounting tool 41 and pressing work for keeping the holding member of treated object 100 Tool 42, these mounting tools 41 and the synergistic effect of press tool 42 keep the treated object 100 and cold in heat treatment But the treated object 100 in processing.

Mounting tool 41 is that the component of mounting treated object 100 extends on Z1 in above-below direction in the present embodiment. Mounting tool 41 by the nonmagnetic material such as carbon in order to inhibit the phenomenon that 4 induction heating of heated member and it is preferred that formed.Pass through Mounting tool 41 is driven using the mounting tool displacement mechanism 51 for being set to position adjustment section 10, is promoting treated object 100 It is moved back and forth on Z1 in above-below direction between position P1 and heating/cooling position P2.Also, tool 41 is loaded by mounting tool position Telephone-moving structure 51 drives, and rotates to load the axis S1 that tool 41 and treated object 100 extend on Z1 in above-below direction together.

Mounting tool 41 is all configured at the standby position of the lower section of raised position P1 other than when loading treated object 100 Set P3.Also, when treated object 100 reaches raised position P1 using carrying mechanism 3, mounting tool 41 utilizes mounting tool position Telephone-moving structure 51 rises from position of readiness P3 to be displaced.Mounting tool 41 avoids stay 31b on one side as a result, passes through transportation tray on one side 31 hole portion 31a and advance to the top of hole portion 31a, and promote the treated object 100 on transportation tray 31, this is processed Object 100 is promoted to heating/cooling position P2.When being heat-treated to treated object 100, mounting tool 41 can heating/ Cooling position P2 is rotated around axis S1 together using the driving of mounting tool displacement mechanism 51 and treated object 100.In this way Spinning movement, heat/cool down each section of treated object 100 more equally.In addition, mounting tool 41 can not also be around axis Line S1 rotation.

Mounting tool 41 has axle portion 43 and is set to the pedestal portion 44 of the upper end of axle portion 43.

Axle portion 43 is the shaft portion extended up and down, is provided to from the power for loading tool displacement mechanism 51.Axle portion 43 Central axis is axis S1.Pedestal portion 44 is radial when having to avoid the contact between stay 31b and overlook view The shape of extension.Treated object 100 is placed in the upper surface of pedestal portion 44.Pedestal portion 44 is added in heating/cooling position P2 Thermal part 4 surrounds, and separates with heating element 4.It is preferred that the diameter of pedestal portion 44 is bigger than the outer diameter of treated object 100, still Or below the outer diameter of treated object 100.Press tool 42 on Z1 in above-below direction with above structure mounting The opposite mode of tool 41 configures.

Press tool 42 is set to inhibit the displacement of treated object 100 when being heat-treated to treated object 100 It sets.More specifically, press tool 42 inhibits because of the generation when heating element 4 carries out induction heating to treated object 100 The effect in magnetic field and treated object 100 floats from mounting tool 41.Also, the inhibition of press tool 42 is located at 65 Duis of cooling nozzles Managing object 100, to carry out treated object 100 when gas cooling mobile relative to mounting tool 41 due to the injection of cooling gas.

It is preferred that press tool 42 is formed to inhibit 4 induction heating of heated member by the nonmagnetic material such as carbon.Benefit Press tool 42 is driven with the press tool/cooling nozzles displacement mechanism 52 for being set to position adjustment section 10, to set pressing Position of the tool 42 relative to the up and down direction Z1 of mounting tool 41 (treated object 100).It is heated to treated object 100 When and the when of being cooled down, press tool 42 heating/cooling position P2 with mounting tool 41 and treated object 100 it is adjacent.

Press tool 42 has axle portion 45 and is set to the press section 46 of the lower end of axle portion 45.

Axle portion 45 is the shaft portion extended up and down, is provided to self-pressing tool/cooling nozzles displacement mechanism 52 power. In the present embodiment, the roof 22 of the upper end perforation thermal chamber 2 of axle portion 45, but 45 configured in one piece of axle portion can also be made In in thermal chamber 2.For example formed as disk-shaped, the lower surface of press section 46 can be upper with treated object 100 for press section 46 Surface contact.In the present embodiment, the outer diameter of press section 46 is set to that roughly same outer diameter with pedestal portion 44.Also, Press section 46 is surrounded in heating/cooling position P2 heated member 4, and is separated with heating element 4.

Treated object 100 on heating/cooling position P2 is configured by the holding unit 5 with above structure to be cooled portion 6 is cooling.Cooling end 6 is to 100 spray cooling gas of treated object, thus cooling treated object 100.

Cooling end 6 have cooling gas source 61, cooling gas feed path 62, flow adjustment portion 63, the 1st open and close valve 64, Cooling nozzles 65 and radiating part 66.

Cooling gas source 61 is the tank etc. for accumulating cooling gas, is supplied from the cooling gas source 61 for being given to treated object 100 The cooling gas given.Cooling gas source 61 is configured at the outside of thermal chamber 2.

It, being capable of illustrated inert gas and reducibility gas as cooling gas.As inert gas, can illustrate Nitrogen, helium and argon gas are shown.It, being capable of illustrated hydrocarbon, carbon monoxide and hydrogen as reducibility gas.As cooling air Body is, it is preferable to use one or more of above-mentioned gas.Alternatively, it is also possible to be mixed in shape in above-mentioned gas by water mist At cooling gas.

Cooling gas from cooling gas source 61 by using piping etc. formation cooling gas feed path 62 and by It conveys to cooling nozzles 65.Cooling gas feed path 62 and cooling nozzles 65 are by the inclusion of the flexible piping being piped (not shown) And it connects.As a result, between cooling nozzles 65 and cooling gas feed path 62 can with the upper and lower displacement of cooling nozzles 65 and Relative displacement.Flow adjustment portion 63 and the 1st open and close valve 64 are provided on cooling gas feed path 62.

Flow adjustment portion 63 is made of mass flow controller etc..Flow adjustment portion 63 includes flow rate regulating valve, and adjustment comes from The flow of the cooling gas in cooling gas source 61.As the flow rate regulating valve being arranged in flow adjustment portion 63, it can illustrate and show The structure of electric driving part is installed on the valves such as diaphragm valve, needle-valve, globe valve, ball valve out.According to this structure, flow tune Whole 63 provide command signal by control unit 8, so that electric driving part is acted to become and be opened by the valve that command signal indicates Degree.In cooling gas feed path 62, the cooling gas for having passed through flow adjustment portion 63 passes through the 1st open and close valve 64.

1st open and close valve 64 is formed using solenoid valve etc., is switched opening state by being provided command signal and is closed shape State.The cooling gas for having passed through the 1st open and close valve 64 is advanced to cooling nozzles 65.

In the present embodiment, cooling nozzles 65 are provided on press tool 42.Cooling nozzles 65 are throughout press section 46 and axle portion 45 and formed barrel.

Cooling nozzles 65 have jet port 65a.Jet port 65a is configured in the thermal chamber 2 configured with heating element 4. Jet port 65a is an example of " suppressing portion " of the invention, is the treated object for inhibiting to be heated to be heat-treated The variation of the light reflectivity of 100 surface 100a and be arranged.Jet port 65a is in order to be heat-treated and towards treated object 100 spray cooling gases.In the present embodiment, the major part of cooling nozzles 65 is configured in thermal chamber 2.Cooling nozzles 65 100 spray cooling gas of treated object after being heated towards heated member 4, thus rapid cooling treated object 100.It is cooling Top spray cooling gas of the nozzle 65 from treated object 100.Also, in the present embodiment, cooling nozzles 65 are as adjacent Cooling nozzles and be arranged.

More specifically, in cooling treated object 100, the jet port 65a of cooling nozzles 65 is configured at heating/cooling position Set P2.As a result, when being heat-treated to treated object 100 (when cooling), cooling nozzles 65 are configured to cooling nozzles 65 The distance between jet port 65a and treated object 100 D1 are than the distance between heating element 4 and treated object 100 D2 (most short distance From) short (D1 < D2).It is illustrated in a manner of distance D1 ratio distance D2 short (D1 < D2) in addition, in the present embodiment The mode of cooling nozzles 65 is configured, but also necessarily not such.Also can be implemented so that distance D1 be distance D2 or more (D1 >= D2 mode) configures the mode of cooling nozzles 65.The jet port 65a of cooling nozzles 65 is promptly sprayed towards treated object 100 Thus cooling gas blows a large amount of cooling gas to the surface of treated object 100.According to this structure, cooling nozzles 65 will be cold But the measured portion that by aftermentioned radiation thermometer 71 is measured of the gas as oxidation inhibiting atmosphere and into treated object 100 100b supply.In the present embodiment, be measured portion 100b be on the outer peripheral surface of treated object 100 with aftermentioned 28 phase of window portion Pair part.

In the present embodiment, the jet port 65a of cooling nozzles 65 is formed in the following table of the press section 46 of press tool 42 Face, such as it is configured at the center of press section 46.The internal diameter of the jet port 65a of cooling nozzles 65 is fitted according to the flow of cooling gas Locality setting.The jet port 65a of cooling nozzles 65 and be configured at about 44 pedestal portion of heating/cooling position P2 relatively.At this In embodiment, treated object 100 is cylindrical, thus the hole portion of cooling nozzles 65 and the center for being formed in treated object 100 100c is opposite.

In addition, in the present embodiment, in the way of being formed with a jet port 65a on press tool 42 for carry out Illustrate, but can also be really not so.For example, it is also possible to be formed with multiple jet port 65a in the press section of press tool 42 46. In the case where the lower surface of press section 46 is provided with the jet port 65a of multiple cooling nozzles 65, jet port 65a is along processed The circumferencial direction (around the circumferential direction of axis S1) of object 100 equally spaced configures.Alternatively, it is also possible to the component other than press tool 42 On be provided with cooling nozzles 65.

Gas comprising the cooling gas in thermal chamber 2 is radiated by radiating part 66.Radiating part 66 is configured at hot place Manage the outside of room 2.

Radiating part 66 has circulation canal 67, heat exchanger 68, circulating pump 69 and the 2nd open and close valve 70.

Circulation canal 67 is the channel that the cooling gas in thermal chamber 2 is recycled, and is formed using piping.Circulation is logical The both ends in road 67 are connect with thermal chamber 2.More specifically, the example of the inlet portion 67a in circulation canal 67 and thermal chamber 2 If right side wall 21 connects, outlet portion 67b is connect with cooling nozzles 65.Outlet portion 67b is with cooling nozzles 65 by the inclusion of not shown Flexible piping piping and connect.Above and below as a result, can be with cooling nozzles 65 between cooling nozzles 65 and outlet portion 67b It is displaced and relative displacement.

In circulation canal 67, towards the direction of outlet portion 67b, heat exchanger is disposed with along from inlet portion 67a 68 and circulating pump 69.In addition, the configuration of heat exchanger 68 and the configuration of circulating pump 69 also can be interchanged.

Heat exchanger 68 is, for example, radiator, including gas passage and cooling fin.Pass through the heat of the gas of heat exchanger 68 External discharge by from cooling fin to circulation canal 67.In addition, as long as heat exchanger 68, which can release, passes through heat exchanger The structure of the heat of 68 gas, specific structure do not limit.

Circulating pump 69 is to make the gas in thermal chamber 2 in the space and circulation canal 67 in thermal chamber 2 Circulation in space (heat exchanger 68) and be arranged.Circulating pump 69 include electric motor, by the revolving speed to the electric motor into Row PWM (pulse width modulation, Pulse Width Modulation) control etc. sets the stream of the gas in circulation canal 67 Amount.

2nd open and close valve 70 is formed using solenoid valve etc., is switched opening state by being provided command signal and is closed shape State.The cooling gas for having passed through the 2nd open and close valve 70 is advanced to cooling nozzles 65.

When heating treated object 100 and when cooling treated object 100, the temperature of treated object 100 is surveyed by determination part 7 It is fixed.Determination part 7 is to be measured and be arranged for the temperature to the treated object 100 being heated to be heat-treated itself 's.In the present embodiment, determination part 7 measures the surface temperature of treated object 100.

Determination part 7 has the radiation thermometer 71 as the radiometer being measured to the radiation from treated object 100.

Radiation thermometer 71 detects such as infrared ray issued from treated object 100, according to the measurement result of the infrared ray Calculate the temperature of treated object 100.It radiates thermometer 71 and temperature measuring is carried out to treated object 100 in a non-contact manner.It puts Penetrating thermometer 71 includes the incident detecting element 71a of infrared ray.The outside that detecting element 71a for example configured in thermal chamber 2. Then, by the window portion 28 being formed on side wall 21, by the infrared emission of detecting element 71a detection treated object 100.Window portion 28 form such as the material as sapphire glass with infrared transparency, and are embedded in the frame portion being formed on side wall 21 In.The side of window portion 28 and detecting element 71a to be arranged in the horizontal direction with the treated object 100 at heating/cooling position P2 Formula configuration.

In order to make the infrared ray from treated object 100 not become excessive (the broken of thermometer 71 is radiated in order to prevent Damage), a part that the size of window portion 28 is preferably set as to the shell in treated object 100 is hidden by side wall 21.In addition, In In present embodiment, a part of the treated object 100 at heating/cooling position P2 is configured to the side from heating element 4 Heated member 4 is blocked when observation, also, can recognize treated object 100 from window portion 28 by the gap E1 of heating element 4 Remainder.In this way, heating element 4 is also first as preventing the infrared ray from treated object 100 to be exceedingly input to detection The curtain-shaped cover member of part 71a plays a role.

In addition, in the above-described embodiment, illustrating the inspection point-blank with treated object 100 and the configuration of window portion 28 The structure of element 71a detection infrared ray is surveyed, however, you can also not be in this way.For example, it is also possible to from heating/cooling position P2 quilt The position that processed material 100 is advanced straight to window portion 28 configures reflecting mirror, is reflected on the reflecting mirror with detecting element 71a detection Infrared ray.In addition, in said structure, in such a way that detecting element 71a is from the external observation infrared ray of thermal chamber 2 for into Explanation is gone.However, it is also possible to really not so.For example, it is also possible in the detecting element 71a for being configured at the outside of thermal chamber 2 Upper connection optical fiber (not shown) configures the front end of the optical fiber near heating element 4 in thermal chamber 2.It indicates by surveying The data for determining the measuring temperature Tx for the treated object 100 that portion 7 detects are output to control unit 8.

It is preferred that the relative position between mounting tool 41 and press tool 42 is set to the quilt when heating treated object 100 Processed material 100 will not float because of magnetic force.Also, it is preferred that being configured at the jet port 65a of cooling nozzles 65 closer to being located At the position for managing object 100, so as in cooling treated object 100, towards the cooling gas of the comparison low temperature of treated object 100 Flow becomes more.Therefore, in the present embodiment, it is provided with position adjustment section 10.

Position adjustment section 10 is configured to adjust between the heating element 4 when heating treated object 100 and treated object 100 Relative position and press tool 42 and treated object 100 between relative position.Also, position adjustment section 10 is configured to adjust Relative position between the jet port 65a and treated object 100 of the whole cooling nozzles 65 in cooling treated object 100.

Position adjustment section 10 has control unit 8, mounting tool displacement mechanism 51, press tool/cooling nozzles displacement mechanism 52。

Loading tool displacement mechanism 51 is the injection for making the mounting tool 41 as holding member relative to cooling nozzles 65 The holding member displacement mechanism of mouth 65a displacement.Mounting tool displacement mechanism 51, which includes, makes mounting tool 41 in above-below direction on Z1 Mobile function；And the function of rotating mounting tool 41 around axis S1.Mounting tool displacement mechanism 51, which is for example configured at, to remove The lower section for transporting mechanism 3, is configured adjacently with the axle portion 43 of mounting tool 41.

Loading tool displacement mechanism 51 has straight-line displacement mechanism 56 and rotating mechanism 57.

Straight-line displacement mechanism 56 is arranged to make mounting tool 41 move linearly on Z1 in above-below direction.Straight line position Telephone-moving structure 56 is formed such as using rack and pinion mechanism, ball screw framework, will be set to the electricity of straight-line displacement mechanism 56 The rotary force of dynamic motor is converted into the up and down motion of mounting tool 41.With this configuration, straight-line displacement mechanism 56 makes mounting tool 41 move back and forth between position of readiness P1 and heating/cooling position P2.

Rotating mechanism 57 makes to be located at heating/cooling position P2 mounting tool 41 around axis S1 rotation, thus carrying out heat Rotate treated object 100 when processing.Rotating mechanism 57 for example be placed with straight-line displacement mechanism 56 and mounting tool 41 Workbench, make the workbench around the axis S1 rotating part rotated and to rotating part provide driving force electric motor, by this The rotary force of electric motor is converted into the rotary force of workbench.In addition, as long as rotating mechanism 57 can make to be located at heating/cooling position The mounting tool 41 for setting P2 is rotated around axis S1, is not limited to specific structure.

Press tool/cooling nozzles displacement mechanism 52 is the guarantor for being displaced press tool 42 relative to mounting tool 41 Hold part displacements mechanism.Also, press tool/cooling nozzles displacement mechanism 52 is to keep the jet port 65a of cooling nozzles 65 opposite In the cooling nozzles displacement mechanism that treated object 100 is displaced.Press tool/cooling nozzles displacement mechanism 52 is by making press tool 42 and cooling nozzles 65 displacement to adjust the relative position between the jet port 65a of cooling nozzles 65 and treated object 100.

More specifically, press tool/cooling nozzles displacement mechanism 52 makes press tool 42 and cooling nozzles 65 upper It is moved on lower direction Z1.Press tool/cooling nozzles displacement mechanism 52 is for example configured at the top of heating element 4, with pressing work The axle portion 45 of tool 42 is configured adjacently.

Press tool/cooling nozzles displacement mechanism 52 is formed such as using rack and pinion mechanism, ball screw framework, The rotary force for being set to the press tool/cooling nozzles displacement mechanism 52 electric motor is converted into the upper and lower of press tool 42 Movement.With this configuration, press tool/cooling nozzles displacement mechanism 52 makes press tool 42 and cooling nozzles 65 in standby position It sets and is moved back and forth between P4 and heating/cooling position P2.

By above structure, raised position P1, heating/cooling position P2 and position of readiness P3, P4 Z1 in above-below direction Upper arrangement.

Mounting tool displacement mechanism 51 and press tool/cooling nozzles displacement mechanism 52 are controlled by control unit 8.

Control unit 8 has the structure that defined output signal is exported according to the input signal of regulation, such as is able to use peace Full programmable controller (PLC) etc. and formed.Safe programmable controller refers to JIS (Japanese Industrial Standards) C 0508-1 SIL2 or SIL3 security function official certification programmable controller.In addition, control unit 8 also can be used comprising CPU (central processing unit, Central Processing Unit), RAM (random access memory, Random Access Memory) and the computer of ROM (read-only memory, Read Only Memory) etc. and formed.

Control unit 8 is configured to control the flow and temperature of the cooling gas sprayed from cooling nozzles 65.In addition, control Portion 8 processed be configured to control heating treated object 100 when heating element 4 and treated object 100 between relative position and by Relative position between pressure tool 42 and treated object 100.Also, when control unit 8 is configured to control cooling treated object 100 Relative position between the jet port 65a and treated object 100 of cooling nozzles 65.Control unit 8 is configured in the outer of thermal chamber 2 Portion.

Control unit 8 respectively with the electric motor of induction heating oscillator 8, carrying mechanism 3 as equipment, mounting tool position The electric motor of the straight-line displacement mechanism 56 of telephone-moving structure 51, the electric motor of rotating mechanism 57, press tool/cooling nozzles displacement The electric motor of mechanism 52, the flow adjustment portion 63 of cooling end 6, the open and close valve 64,70 of cooling end 6 and the circulation of cooling end 6 The electric motor electrical connection of pump 69, and control these equipment.In addition, control unit 8 with radiation thermometer 71 connect, on one side reference by The measuring temperature Tx that thermometer 71 measures is radiated, carries out control action on one side.That is, control unit 8 is referring to the survey measured by determination part 7 Temperature Tx, control cooling end 6 etc. are determined, so that treated object 100 is cooled with defined cooling velocity (aftermentioned temperature history).

Next, being illustrated to an example of the heat treatment movement in annealing device 1.Fig. 2 is for filling to heat treatment Set the flow chart that an example of 1 quenching treatment is illustrated.Fig. 3 is the treated object 100 in an example for indicate quenching treatment The curve graph of temperature history.In addition, temperature history refers to the relationship of temperature and time.In Fig. 3, horizontal axis is the time, and the longitudinal axis is Temperature.Figure, which is passed the imperial examinations at the provincial level, is illustrated following temperature history: after treated object 100 is heated to soaking temperature T0, with the certain the 1st Cooling velocity is cooled to the 1st cooling temperature T1 from soaking temperature T0, then, it is cooling to be cooled to the 2nd with the 2nd certain cooling velocity Temperature T2.That is, the temperature history of Fig. 3 is controlled cooling end 6 etc. as target temperature resume by control unit 8, so that treated object 100 temperature history becomes temperature history shown in Fig. 3.

Referring to Fig.1~Fig. 3, under the standby mode before carrying out the heat treatment movement of annealing device 1, in advance from cooling Gas supply part 6 supplies the cooling gas of specified amount to cooling nozzles 65, and the atmosphere in thermal chamber 2 becomes and cooling as a result, The atmosphere of the identical gas of gas.That is, cooling gas supply unit 6 or the gas for adjusting the atmosphere in thermal chamber 2 supply To portion.

Then, if starting the heat treatment movement in annealing device 1, control unit 8 is electronic by driving carrying mechanism 3 Transportation tray 31 is carried to raised position P1 (step S1) from entrance 24 by motor.

Next, control unit 8 drives the electric motor of straight-line displacement mechanism 56.Tool 41 is loaded as a result, from position of readiness P1 promotes treated object 100 by the hole portion 31a of transportation tray 31, rises to heating/cooling position together with treated object 100 P2 (step S2).At this point, the electric motor of straight-line displacement mechanism 56 is reached by the process control of control unit 8 at treated object 100 The position of treated object 100 is most effectively heated by heating element 4.For example, mounting tool 41 rises to the configuration of treated object 100 In the center the heating on up and down direction Z1/cooling position P2.

Next, control unit 8 by driving press tool/cooling nozzles displacement mechanism 52 electric motor, makes to press work Tool 42 and cooling nozzles 65 from the position of readiness P4 of the top of heating element 4 drop to heating/cooling position P2 (step S3). At this point, having been set since control unit 8 from the mode that the cooling gas of cooling nozzles 65 is efficiently ejected into the most on treated object 100 Relative position between the jet port 65a and treated object 100 of cooling nozzles 65.For example, with the jet port 65a of cooling nozzles 65 The mode that interval between treated object 100 becomes number mm or so configures press tool 42 and cooling nozzles 65.

Alternatively, it is also possible to simultaneously make treated object 100 to heating/cooling position P2 rising movement (step S2) and The movement (step S3) for declining press tool 42 and cooling nozzles 65 to heating/cooling position P2.Also, it can also pass through Press tool 42 and cooling nozzles 65 are configured at always at heating/cooling position P2, thus without making press tool 42 And cooling nozzles 65 drop to heating/cooling position P2 movement (step S3) from position of readiness P4.

Next, control unit 8 to induction heating oscillator 9 by issuing to the supply of heating element 4 for induction heating The instruction of electric power carries out heat treatment (step S4) of the heating element 4 to treated object 100.Located for 4 pairs of heating element as a result, It manages object 100 and carries out induction heating, treated object 100 is heated to defined heating temperature.

At this point, control unit 8 is become with the relationship of the measuring temperature Tx and time that are detected by radiation thermometer 71 by temperature The mode of the relationship of " heating " sections of resume and " soaking " section (" heating " section) expression controls induction heating oscillator 9.At this point, control unit 8 can also be by driving the electric motor of rotating mechanism 57 to rotate treated object 100, thus more Equably heat each section of treated object 100.Also, after it have passed through the stipulated time, control unit 8 is vibrated to induction heating Device 9 issues the instruction stopped to the power supply of heating element 4, completes at the heating that heating element 4 carries out treated object 100 Reason.In the case where the rotation of the electric motor (treated object 100) of rotating mechanism 57, the rotation is maintained.

Next, carrying out the cooling treatment (step S5) of treated object 100.At this point, control unit 8 controls cooling end 6, so that The measuring temperature Tx detected by radiation thermometer 71 meets temperature history shown in Fig. 3.Specifically, passing through cooling nozzles 65 Jet port 65a to 100 spray cooling gas of treated object.As a result, as indicated by arrows f1, cooling gas is sprayed from jet port 65a It is mapped to treated object 100, rapid cooling treated object 100.

In cooling treatment, control unit 8 carry out it is below control (a), control (b) at least one party.

Controlling (a) is following control: by controlling flow adjustment portion 63 in the state of opening the 1st open and close valve 64, from And set the flow of the cooling gas supplied from cooling gas source 61 to cooling nozzles 65 (thermal chamber 2).

Controlling (b) is following control: passing through the revolving speed of the control loop pump 69 in the case where opening 70 state of the 2nd open and close valve, In After so that the gas (cooling gas) in thermal chamber 2 is cooled down in the heat exchanger 68 of circulation canal 67, the gas is made in setting The flow supplied for cooling gas to cooling nozzles 65.

In the cooling treatment (step S5) of treated object 100, control unit 8 can only be carried out by control (a) processed The cooling treatment of object 100 can also only carry out the cooling treatment of treated object 100 by control (b).In this case, it is opened and closed The valve of the side for being not supplied with gas in valve 64,70 is closed.

In addition, control unit 8 can carry out the stipulated time in the cooling treatment (step S5) of treated object 100 (b) is controlled after control (a), (a) can also be controlled after the control (b) for carrying out the stipulated time.In this case, The valve of the side for being not supplied with gas in open and close valve 64,70 is also turned off.Do not supplying the cooling from cooling gas source 61 In the case where gas, the consumption of the cooling gas from cooling gas source 61 can be further reduced.

In addition, can also be controlled (a) simultaneously in the cooling treatment (step S5) of treated object 100 and be controlled (b).In addition, control unit 8 can make to press according to measuring temperature Tx in the cooling treatment (step S5) of treated object 100 At least one party's driving in tool/cooling nozzles displacement mechanism 52 electric motor and the electric motor of straight-line displacement mechanism 56. Control unit 8 can make treated object 100 associated with measuring temperature Tx with the relative position of cooling nozzles 65 as a result,.Its result It is the cooling gas injection that can be realized more efficiently.

Control unit 8 is by carrying out foregoing illustrative movement to above-mentioned control (a) and control (b), thus controlled, so that The relationship of the measuring temperature Tx and time that are detected by radiation thermometer 71 become " cooling 1 " section and the " cooling of temperature history Relationship shown in 2 " sections.In addition, even if the material of treated object 100 and at least one party of shape are changed, also at For the mode of temperature history shown in Fig. 3, the control action of control unit 8 is carried out.That is, control unit 8 is by using radiation temperature The feedback control of meter 71 also can be in the case where change has occurred in at least one party of the material of treated object 100 and shape The cooling treated object 100 of mode as temperature history shown in Fig. 3.

In addition, in the present embodiment, having been illustrated in 100 cooling treatment of treated object, treated object 100 is with 2 The cooling velocity in a stage is periodically cooled to the mode of the 1st cooling temperature T1 and the 2nd cooling temperature T2.However, can also With really not so.Treated object 100 can also be cooled by 1 stage or 3 cooling velocities more than stage.In addition, In In above description, control unit 8 is illustrated referring to the measuring temperature Tx measured by radiation thermometer 71, control is sprayed from cooling nozzles 65 The flow for the gas penetrated and the mode of temperature.However, it is also possible to really not so.Control unit 8 can also control as follows cooling end 6, So that terminating since the cooling of treated object 100 to cooling, cooling end 6 all maintains the original state (cooling of treated object 100 Action state when beginning).

In this way, from 65 spray cooling gas of cooling nozzles in such a way that treated object 100 is cooled gas covering, while benefit Temperature measuring is carried out with radiation thermometer 71, inhibits the variation of the light reflectivity of the surface 100a of treated object 100 on one side as a result, And the temperature of treated object 100 itself is measured, treated object 100 is cooled down on one side.

In the cooling of treated object 100 (step S5), control unit 8 drives the electric motor of rotating mechanism 57 and makes to be located It manages object 100 to rotate, thus, it is possible to each sections of cooling treated object 100 more equally.Also, when measuring temperature Tx reaches the When 2 cooling temperature T2, control unit 8 controls open and close valve 64,70 to close open and close valve 64,70.Treated object 100 is completed as a result, Cooling treatment.That is, completing the heat treatment of treated object 100.It is rotated in the electric motor (treated object 100) of rotating mechanism 57 In the case of, which is also stopped.

Next, control unit 8 drives press tool/cooling nozzles displacement mechanism 52 electric motor, to make to press work Tool 42 and cooling nozzles 65 rise to position of readiness P4 (step S6).

Next, control unit 8 drives the electric motor of straight-line displacement mechanism 56, mentioned so that treated object 100 be made to drop to P1 (step S7) is set in raise-position.Treated object 100 is placed in the peripheral part of the stay 31b of transportation tray 31 again as a result,.At this point, Mounting tool 41 drops to position of readiness P3.

Alternatively, it is also possible to carry out the movement for increase to position of readiness P4 press tool 42 and cooling nozzles 65 simultaneously (step S6) and treated object 100 is made to drop to the movement (step S7) of raised position P1.Also, it can also be by press tool 42 And cooling nozzles 65 are configured at always at heating/cooling position P2, thus without making press tool 42 and cooling nozzles 65 movements (step S6) risen to position of readiness P4.

Next, control unit 8 drives the electric motor of carrying mechanism 3, so that transportation tray 31 be removed from raised position P1 It is transported to outlet 25 (step S8).Later, outlet fan 27 is opened, and treated object 100 is moved out from thermal chamber 2.

As discussed above, according to the present embodiment, control unit 8 is according to the temperature to treated object 100 itself Measuring temperature Tx obtained from being measured can set the cooling velocity of treated object 100.Control unit 8 can be more quasi- as a result, Really hold the temperature history (relationship of time and temperature) when the cooling of treated object 100.As a result, control unit 8 can Cooling end 6 is more correctly controlled, so that treated object 100 becomes desired temperature history.Thereby, it is possible to more accurately control by The type of cooling of processed material 100, as a result, can be more accurately with the cooling treated object 100 of desired state.

In addition, according to the present embodiment, cooling end 6 sprays inert gas or reducibility gas conduct to treated object 100 Cooling gas.According to this structure, treated object 100 is not cooled down by liquid, cooling by inert gas or reducibility gas. Therefore, the surface 100a for being able to suppress treated object 100 is aoxidized.That is, being able to suppress the quilt in the cooling of treated object 100 The brightness of processed material 100 changes.

In addition, according to the present embodiment, determination part 7 includes the radiation thermometer of radiation of the measurement from treated object 100 71.Also, since cooling gas is inert gas or reducibility gas, thus treated object 100 is inhibiting treated object 100 Brightness variation in the state of be cooled.Therefore, according to this structure, it is suppressed that the variation of the brightness of treated object, The temperature measuring of the treated object 100 using radiation thermometer 71 can more correctly be carried out.As a result, determination part 7 can More accurately measure the surface temperature of treated object 100.

In addition, according to the present embodiment, control unit 8 controls cooling gas from cooling gas source 61 to configured with treated object The flow of 100 thermal chamber 2.According to this structure, 8 pairs of control unit as the changed shadow of temperature for making treated object 100 The flow for ringing the cooling gas of biggish element is controlled, so as to more reliably make the cooling velocity of treated object 100 As desired state.

In addition, according to the present embodiment, cooling end 6 includes heat exchanger 68 and circulating pump 69.According to this structure, Neng Gouli The gas in thermal chamber 2 is cooled down with heat exchanger 68.Also, control unit 8 is controlled by the control of circulating pump 69 By the flow of the gas of heat exchanger 68, so as to which the temperature of the cooling gas in thermal chamber 2 is more accurately set For desired temperature.

In addition, according to the present embodiment, in thermal chamber 2, by using cooling gas, to inhibit on one side processed The variation of the light reflectivity of the surface 100a of object 100 cools down the treated object 100 on one side.Moreover, the surface of treated object 100 The variation of the light reflectivity of 100a is suppressed, as a result, can inhibit the temperature measuring result of radiation thermometer 71 because processed The variation of the surface state of object 100 and the case where change.That is, the temperature measuring result of radiation thermometer 71 can be further reduced The error that true temperature relative to treated object 100 generates.As a result, it is possible to more accurately measure the cold of treated object 100 The temperature of the treated object 100 when but.The temperature when cooling of treated object 100 can be more accurately measured, as a result, It is able to use the type of cooling that the temperature measuring result more accurately controls treated object 100.Thereby, it is possible to inhibit treated object The deviation of the cooling degree of 100 each section, therefore metal treated object 100 can more reliably be inhibited to be deformed.

In addition, according to the present embodiment, the jet port 65a of cooling nozzles 65 is using inert gas or reducibility gas as oxygen Change and inhibits gas and the measured portion 100b measured by radiation thermometer 71 into treated object 100 is supplied.According to this structure, The oxidation of the treated object 100 at measured portion 100b can be reliably suppressed.Thereby, it is possible to inhibit the quilt of treated object 100 The variation (variation of brightness) of light reflectivity at determination part 100b.That is, being able to suppress the quilt in the cooling of treated object 100 The light reflectivity (brightness) of processed material 100 changes.As a result, being become using temperature measuring result according to brightness In the temperature measuring of the radiation thermometer 71 of change, it can more reliably inhibit to generate the temperature measuring error as caused by brightness.

In addition, according to the present embodiment, cooling nozzles 65 are using oxidation inhibiting atmosphere as the cooling of cooling treated object 100 Gas is supplied.According to this structure, treated object 100 is not cooled down by liquid, by gas cooling.Therefore, it is utilizing When radiating the temperature measuring of the progress treated object 100 of thermometer 71, liquid will not become the obstacle of temperature measuring.Therefore, it measures Portion 7 can more accurately measure the temperature of treated object 100.Furthermore, it is also possible to which the measured of treated object 100 will be used to inhibit The gas of the variation of the light reflectivity of portion 100b is used as cooling gas.It therefore, there is no need to prepare respectively for inhibiting light reflectivity Variation gas and cooling gas, can more simplify the utilization of annealing device 1.Also, due in cooling treated object Gaseous gas is used when 100, therefore treated object 100 does not need to carry out large-scale cleaning treatment after cooling treatment. Moreover, it is different from the case where using the refrigerants such as water or oil cooling treated object 100, it can prevent from being freezed in thermal chamber 2 Agent pollution.Moreover, it is different from the case where using the refrigerants such as water or oil cooling treated object 100, refrigeration can be reduced significantly Agent makes cumbrous degree to earth environment, and does not need the clear of the cleaning process after cooling process (scale removal step) Cleaning device can more reduce the manufacturing cost of annealing device 1 and with cost.

In addition, according to the present embodiment, can directly be measured in a non-contact manner using radiation thermometer 71 processed The temperature when cooling of object 100, as a result, without the aperture on treated object 100 and being inserted into destruction as thermocouple Property inspection, it will be able to realize correct temperature measuring.

In addition, according to the present embodiment, from treated object 100, in a period of being heated to cooling terminate, control unit 8 is controlled Cooling end 6 (i.e. the flow of cooling gas) processed, so that the measuring temperature Tx of treated object 100 and the relationship of time become quenching institute The temperature history (temperature curve) needed.As a result, feedback control of the control unit 8 by using measuring temperature Tx, Neng Goushi Now heating corresponding with each treated object 100/cooling control.Thereby, it is possible to make of the heat treatment quality of treated object 100 Body difference is minimum.In addition, control unit 8 sets cooling gas while referring to measuring temperature Tx in cooling treated object 100 Flow, therefore the consumption of cooling gas will not become excessive.Even if as a result, the shape and size of treated object 100 because Design alteration etc. and when change has occurred, also can in a manner of becoming identical temperature history cooling treated object 100.

More than, embodiments of the present invention are illustrated, but the present invention is not limited to above-mentioned embodiments.This Invention is able to carry out various changes in the range of recording in detail in the claims.

(1) in the above-described embodiment, by use radiation thermometer 71 as radiometer in the way of for be illustrated. However, it is also possible to really not so.As radiometer, as long as be able to detect the power radiation from treated object 100 and from this Power radiation obtains the structure of measuring temperature Tx, and the radiometer other than radiation thermometer 71 also can be used.

(2) in addition, in the above-described embodiment, with carry out treated object 100 in a thermal chamber 2 plus hot and cold But it is illustrated for mode.However, it is also possible to really not so.Adding for heating treated object 100 can also be respectively set The cooling chamber in hot cell and cooling treated object 100.

(3) in addition, in the above-described embodiment, cooling down 100 cooling gas of treated object and for inhibiting treated object 100 The oxidation inhibiting atmosphere of variation of light reflectivity in measured portion 7 be also possible to other kinds of gas.

(4) in addition, in the above-described embodiment, in such a way that a cooling nozzles 65 are set as cooling nozzles for into Explanation is gone.However, it is also possible to really not so.For example, as horizontally arranged with heating element 4 and towards heating/cooling position The cooling nozzles for setting the 100 spray cooling gas of treated object of P2, also can be set side cooling nozzles.Alternatively, it is also possible to It is provided as the lower section cooling nozzles of cooling nozzles in mounting tool 41, is sprayed from the lower section cooling nozzles to treated object 100 Cooling gas.

Industrial availability

The present invention can be widely applied as the manufacturing method of annealing device and metal parts.