阅读说明：本技术 共焦位移传感器 (Confocal displacement sensor ) 是由 藤本祐考 武井英人 桝口阳平 久我翔马 于 2019-05-24 设计创作，主要内容包括：提供一种共焦位移传感器,其能够容易且准确地调整测量头单元的姿势,使得可以以高精度进行测量对象的测量。将测量头(200A、200B)的透镜单元(220)的光轴调整成彼此平行。透镜单元(220)包括衍射透镜(222)。在调整光轴时,在测量头(200A、200B)以夹持基准构件的方式彼此面对的状态下,从测量头(200A、200B)向基准构件的一个面和另一面分别发射具有多个波长的光。将具有一个波长的一级光的强度作为表示测量头(200A、200B)的光轴相对于基准构件的一个面和另一面的垂直度的信息显示在主显示单元(610)上,该一级光被基准构件的一个面和另一面分别反射并且经由具有其它波长的多级光的路径入射到测量头(200A、200B)上。(A kind of confocal displacement sensor is provided, the posture of measurement head unit can be easily and securely adjusted, allow to measure the measurement of object with high precision.The optical axis of the lens unit (220) of measuring head (200A, 200B) is adjusted to parallel to each other.Lens unit (220) includes diffraction lens (222).When adjusting optical axis, in the state that measuring head (200A, 200B) is facing with each other in a manner of clamping reference feature, a face from measuring head (200A, 200B) to reference feature and another side from emit the light with multiple wavelength respectively.It is shown in the intensity of the level-one light with a wavelength as the optical axis for indicating measuring head (200A, 200B) on main display unit (610) relative to the information in a face of reference feature and the verticality of another side, which is reflected respectively and be incident on measuring head (200A, 200B) via the path of the multi-stage light with other wavelength by a face of reference feature and another side.)

1. a kind of confocal displacement sensor, comprising:

Light projection unit, for emitting the light with multiple wavelength；

First head unit comprising the first confocal optical system, first confocal optical system have the first diffraction lens, In The chromatic aberation along optical axis direction is generated in the light that the light projection unit is emitted, and the light is made to be focused at measurement object On first face；

First optical splitter, for for each wavelength to by first face reflect and have passed through first confocal optical system First light is divided；

First light receiving unit for the first light after being divided for each wavelength reception, and obtains the strong of the light for being directed to each wavelength Degree；And

Control device is configured to adjust first head unit using the reference feature with first face Optical axis,

Wherein, first head unit is configured so that: vertical with first face in the optical axis of first head unit In the case of, emit the first level-one light with a wavelength to first face by described first via first head unit Face reflection, and first confocal optical system is passed through via the path of the first multi-stage light with one wavelength, with And

The control device includes strength information display control unit, and the strength information display control unit is used in adjustment institute When stating optical axis, in the state that the light emitting side of first head unit is disposed with the reference feature, show display unit Judge the related information of the intensity of light as the last the first with first in the intensity of light received by first light receiving unit Information is spent, wherein described first judges that light is reflected from the first level-one light by first face and via first multistage The path of light has passed through accessed by first confocal optical system.

2. confocal displacement sensor according to claim 1, wherein

The confocal displacement sensor has for measuring the measurement pattern of the measurement object and for adjusting described first The optical axis adjustment modes of the optical axis of unit.

3. a kind of confocal displacement sensor, can measure the thickness for the measurement object having the first face and the second face in opposite side Degree, the confocal displacement sensor include:

Light projection unit, for emitting the light with multiple wavelength；

First head unit comprising the first confocal optical system, first confocal optical system have the first diffraction lens, In The chromatic aberation along optical axis direction is generated in the light that the light projection unit is emitted, and the light is made to be focused at the measurement pair On first face of elephant；

Second head unit comprising the second confocal optical system, second confocal optical system have the second diffraction lens, In The chromatic aberation along optical axis direction is generated in the light that the light projection unit is emitted, and the light is made to be focused at the measurement pair On second face of elephant；

First optical splitter, for for each wavelength to by first face reflect and have passed through first confocal optical system First light is divided；

First light receiving unit for the first light after being divided for each wavelength reception, and obtains the strong of the light for being directed to each wavelength Degree；And

Control device is configured to using the reference feature with first face parallel to each other and second face The optical axis of first head unit is adjusted instead of the measurement object,

Wherein, first head unit is configured so that: vertical with first face in the optical axis of first head unit In the case of, emit the first level-one light with a wavelength to first face by described first via first head unit Face reflection, and first confocal optical system is passed through via the path of the first multi-stage light with one wavelength,

Second head unit is configured so that: in the optical axis of second head unit situation vertical with second face Under, it is anti-by second face to emit the second level-one light with a wavelength to second face via second head unit It penetrates, and passes through second confocal optical system via the path of the second multi-stage light with one wavelength, and

The control device includes strength information display control unit, and the strength information display control unit is used in adjustment institute When stating the optical axis of the first head unit, the reference feature is disposed between first head unit and second head unit Under state, display unit is made to show the intensity for judging light with first in the intensity of light received by first light receiving unit Related information is as the first strength information, wherein described first judges that light is anti-by first face from the first level-one light It penetrates and is had passed through accessed by first confocal optical system via the path of first multi-stage light.

4. confocal displacement sensor according to claim 3, further includes:

Second optical splitter, for for each wavelength to by second face reflect and have passed through second confocal optical system Second light is divided；And

Second light receiving unit for the second light after being divided for each wavelength reception, and obtains the strong of the light for being directed to each wavelength Degree,

Wherein, the control device is configured to further adjust second head unit using the reference feature Optical axis, and

The strength information display control unit is when adjusting the optical axis of second head unit, in first head unit and institute It states and is disposed between the second head unit in the state of the reference feature, show that the display unit also and second light Second in the intensity of light received by unit judges the related information of the intensity of light as the second strength information, wherein described Second judges that light is to be reflected from the second level-one light by second face and have passed through via the path of second multi-stage light Accessed by second confocal optical system.

5. confocal displacement sensor according to claim 4, wherein

First strength information indicates the time change for the intensity that described first judges light, and

Second strength information indicates the time change for the intensity that described second judges light.

6. confocal displacement sensor according to claim 5, wherein

The control device further includes maximum intensity display control unit, and the maximum intensity display control unit is described for making Display unit shows the first maximum intensity information, and the display unit is made to show the second maximum intensity information, wherein described First maximum intensity information indicates the maximum until current point in time in the time change for the intensity that described first judges light Intensity and the second maximum intensity information indicate to arrive current time in the time change for the intensity that described second judges light Maximum intensity until point.

7. confocal displacement sensor according to claim 5, wherein

Described first judges that the spike length of light changes according to the distance between first face and first head unit, and Described second judges that the spike length of light changes according to the distance between second face and second head unit, and

The control device further includes range display control unit, and the range display control unit is single for controlling the display Member so that: judge that the waveform of light is shown in wavelength axis for described first, according to first face and first head unit The distance between variation change the position of the waveform that described first in the wavelength axis judges light, and in first face Light is judged by described first in the case that the distance between described first head unit is within the scope of predetermined first distance The range of wavelength be shown in the wavelength axis as first wavelength range, and the range display control unit controls institute State display unit so that: judge that the waveform of light is shown in wavelength axis for described second, according to second face and described The distance between two head units change to change the position for the waveform that described second in the wavelength axis judges light, and in institute By described in the case where the distance between the second face and second head unit are stated within the scope of predetermined second distance Two judge that the range of the wavelength of light is shown in the wavelength axis as second wave length range.

8. confocal displacement sensor according to claim 7, wherein

First light receiving unit and second light receiving unit the reference feature do not exist in first head unit and In the state of between second head unit, obtains from first confocal optical system of first head unit and emit and enter Penetrate the intensity of the light on second confocal optical system of second head unit and the institute from second head unit State the strong of the transmitting of the second confocal optical system and the light that is incident on first confocal optical system of first head unit At least one intensity in degree, and

The control device further includes consistent degree display control unit, and the consistent degree display control unit is for making the display Unit shows table based at least one intensity described in accessed by first light receiving unit and second light receiving unit Show the consistent degree information of the consistent degree of the optical axis of first head unit and the optical axis of second head unit.

9. confocal displacement sensor according to claim 8, wherein

The control device further include:

Distance adjustment image display control unit, in the optical axis and second head unit for adjusting first head unit When optical axis, the display unit is set to show first distance adjustment image and second distance adjustment image, wherein the first distance Adjustment picture cues are used to adjust the operation and described second of the distance between first head unit and described reference feature Distance adjustment picture cues are used to adjust the operation of the distance between second head unit and described reference feature；

Stance adjustment image display control unit, in the optical axis and second head unit for adjusting first head unit When optical axis, after the display unit shows the first distance adjustment image and second distance adjustment image, make institute It states display unit and shows prime adjustment image and second adjustment image, wherein the prime adjusts picture cues For adjusting operation and the second adjustment image of posture of first head unit relative to the reference feature Prompt the operation for adjusting posture of second head unit relative to the reference feature；And

Axial adjustment image display control unit, for the light in the optical axis and second head unit for adjusting first head unit When axis, after the display unit shows the prime adjustment image and second adjustment image, make described Display unit shows that axial adjustment image, the axial adjustment picture cues are used for by making first head unit and second described The consistent operation of optical axis that at least one unit moves to make the optical axis and second head unit of first head unit.

10. confocal displacement sensor according to claim 9, further includes:

First operating unit, is operated by user, to indicate the first distance adjustment image and second distance adjustment The display of image；

Second operating unit, is operated by user, to show the first wavelength range in the range display control unit After the second wave length range, the display of the prime adjustment image and second adjustment image is indicated； And

Third operating unit, is operated by user, to show first intensity in the strength information display control unit After information and second strength information, the display of the axial adjustment image is indicated.

11. confocal displacement sensor according to claim 8, wherein

The light projection unit includes:

First light projection unit, for emitting light to first confocal optical system；And

Second light projection unit is used to emit light to second confocal optical system, and

The control device further include:

Light control unit, in the case where the consistent degree display control unit show consistent degree information, progress the At least one one control and the second control, wherein first control is for based on the light exported from second light receiving unit Signal come control the light in the first light projection unit transmitting and it is described second control for based on from described first by The transmitting that the light in the second light projection unit is controlled by optical signal of light unit output.

12. confocal displacement sensor according to claim 4, wherein

First strength information and second strength information are simultaneously displayed on institute by the strength information display control unit It states on the single picture of display unit.

13. confocal displacement sensor according to claim 4, wherein

The confocal displacement sensor is arranged to situation facing with each other in first head unit and second head unit Under, it is adjusted using the light of another head unit is incident on from a head unit in first head unit and second head unit The optical axis of whole another head unit.

14. a kind of confocal displacement sensor, can measure the thickness for the measurement object having the first face and the second face in opposite side Degree, the confocal displacement sensor include:

Light projection unit, for emitting multiple light with multiple wavelength；

First head unit and the second head unit；

First optical component is arranged in first head unit, has more for being emitted in the light projection unit The diffraction lens of the chromatic aberation along optical axis direction is generated in a light, and makes to have multiple light of chromatic aberation to be assembled with will be described Each light emitting in multiple light is to first face of the measurement object；

First pin hole component is arranged in first head unit and has multiple first pin holes, wherein by described first Optical component emits the multiple light for being focused and being reflected by first face into multiple light in first face as multiple One light passes through the multiple first pin hole；

Second optical component is arranged in second head unit, has more for being emitted in the light projection unit The diffraction lens of the chromatic aberation along optical axis direction is generated in a light, and makes to have multiple light of chromatic aberation to be assembled with will be described Each light emitting in multiple light is to second face of the measurement object；

Second pin hole component is arranged in second head unit and has multiple second pin holes, wherein by described second Optical component emits the multiple light for being focused and being reflected by second face into multiple light in second face as multiple Two light pass through the multiple second pin hole；

Acquiring unit, for obtain have passed through the multiple first pin hole the multiple first light it is strong for each wavelength Degree, and obtain the intensity for each wavelength for having passed through the multiple second light of the multiple second pin hole；

Thickness calculation unit, for being directed to the strong of each wavelength based on the multiple first light accessed by the acquiring unit The intensity for each wavelength of degree and the multiple second light, to calculate first face and described second of the measurement object Thickness between face；And

Control device is configured to using described in the reference feature replacement with the first face parallel to each other and the second face Measurement object adjusts the optical axis of first optical component and the optical axis of second optical component,

Wherein, first head unit is configured so that: vertical with first face in the optical axis of first optical component In the case where, it is described to emit the first level-one light with a wavelength to first face via first optical component First face is reflected and passes through first pin hole via the path of the first multi-stage light with one wavelength,

Second head unit is configured so that: in the optical axis of second optical component situation vertical with second face Under, emit the second level-one light with a wavelength to second face by second face via second optical component It reflects and passes through second pin hole via the path of the second multi-stage light with one wavelength, and

The control device includes strength information display control unit, and the strength information display control unit is used in adjustment institute State the first head unit optical axis and second head unit optical axis when, first head unit and second head unit it Between be disposed in the state of the reference feature, show display unit strong with multiple light accessed by the acquiring unit First in degree judge the related information of the intensity of light as the first strength information, and show with acquired in the acquiring unit To multiple light intensity in second judge the related information of intensity of light as the second strength information, wherein described first sentences Disconnected light is to be reflected from the first level-one light by first face and have passed through described via the path of first multi-stage light Accessed by one pin hole and described second judges that light is reflected from the second level-one light by second face and via institute The path for stating the second multi-stage light has passed through accessed by second pin hole.

15. confocal displacement sensor according to claim 14, wherein

First strength information is judged in multiple intensity of light based on corresponding with first head unit multiple first Maximum intensity value and minimal intensity value between difference value, and

Second strength information is judged in multiple intensity of light based on corresponding with second head unit multiple second Maximum intensity value and minimal intensity value between difference value.

Technical field

The present invention relates to the confocal displacement sensors for the thickness that can measure measurement object.

Background technique

The equipment of displacement as the surface for measuring measurement object by non-contact method, there are confocal displacement sensings Device.In confocal displacement sensor, there is the light of wide wavelength band via optical component to measurement object transmitting, and based on by The surface of measurement object focus and the light that reflects by optical signal come measure measurement object surface displacement.

It has been known that there is following methods: two optical components of confocal displacement sensor are arranged to facing with each other, and survey Amount is arranged in the thickness of the measurement object between the two optical components.In the method, in order to measure with high precision measurement pair The thickness of elephant, need accurately to make an optical component of confocal displacement sensor optical axis and the confocal displacement sensor it is another The optical axis of one optical component is consistent.

Japanese Unexamined Patent Publication 2015-169546 (patent document 1) describes two sensor heads for making two confocal measurement equipment The optical axis optic axis adjusting method consistent with each other to measure the thickness of measurement object as described above.In the optic axis adjusting method In, two sensor heads are configured to posture (orientation) and position facing with each other, and roughly adjusting sensor head by operator It sets.

Later, detection light is generated from a sensor head, measures the intensity for the detection light being incident on another sensor head, And the position of at least one two sensor heads is adjusted upward in three sides perpendicular to one another, so that by accessed by measurement Detection light waveform have a peak value.

Summary of the invention

In the method described in patent document 1, operator adjusts the posture of two sensor heads, so that two sensor heads Optical axis it is parallel to each other.However, in practice, it is not easy to accurately adjust the posture of two sensor heads so that two sensings The optical axis of device head is parallel to each other.If inclined light shaft of the optical axis of a sensor head relative to another sensor head, even if The positional relationship between two sensor heads is adjusted, the optical axis of two sensor heads can not be consistent with each other.Therefore, measurement object Thickness measurement accuracy decline.

It is not limited to above-mentioned example, even if in the case where measuring the measurement of object using a sensor head, also phase The posture for easily and securely adjusting sensor head is hoped, more accurately to measure.

The object of the present invention is to provide can easily and securely adjust the posture of measurement head unit, allow to high-precision Ground measures the confocal displacement sensor of the measurement of object.

(1) according to the first aspect of the invention, a kind of confocal displacement sensor is provided, comprising: light projection unit, for sending out Penetrate the light with multiple wavelength；First head unit comprising the first confocal optical system, first confocal optical system have First diffraction lens generates the chromatic aberation along optical axis direction in the light that the light projection unit is emitted, and makes the light It is focused on the first face of measurement object；First optical splitter, for reflecting and having passed through to by first face for each wavelength First light of first confocal optical system is divided；First light receiving unit, after for the light splitting of each wavelength reception First light, and obtain the intensity of the light for each wavelength；And control device, it is configured to using with described Reference feature on one side adjusts the optical axis of first head unit, wherein first head unit is configured so that: in institute State the first head unit optical axis it is vertical with first face in the case where, emit via first head unit to first face The first level-one light with a wavelength reflected by first face, and it is multistage via first with one wavelength The path of light passes through first confocal optical system and the control device includes strength information display control unit, institute Strength information display control unit is stated for being arranged in the light emitting side of first head unit when adjusting the optical axis In the state of stating reference feature, show that display unit and first in the intensity of light received by first light receiving unit The related information of the intensity of light is judged as the first strength information, wherein described first judges that light is from the first level-one light quilt First face is reflected and is had passed through accessed by first confocal optical system via the path of first multi-stage light.

In the confocal displacement sensor, when adjusting the optical axis of the first head unit, in the light emitting side of the first head unit It is disposed in the state of reference feature, will judge that the related information of the intensity of light is shown as the first strength information aobvious with first Show on unit.First judges that the intensity of light is got higher as the optical axis of the first head unit is got higher relative to the verticality in the first face, And it is lower as the optical axis of the first head unit is lower relative to the verticality in the first face.Therefore, user can be from view While identifying the first strength information in feel, the posture of the first head unit is easily and securely adjusted, so that the first head unit Optical axis is vertical with the first face of reference feature.

As a result, user can easily and securely adjust appearance of first head unit relative to the measuring surface of measurement object Gesture, to measure with high precision.

(2) according to the second aspect of the invention, a kind of confocal displacement sensor is provided, can measure has in opposite side The thickness of the measurement object in the first face and the second face, the confocal displacement sensor include: light projection unit, are had for emitting The light of multiple wavelength；First head unit comprising the first confocal optical system, first confocal optical system have first to spread out Lens are penetrated, the chromatic aberation along optical axis direction are generated in the light that the light projection unit is emitted, and be focused at the light On first face of the measurement object；Second head unit comprising the second confocal optical system, second confocal optics System has the second diffraction lens, and the chromatic aberation along optical axis direction is generated in the light that the light projection unit is emitted, and And it is focused at the light on second face of the measurement object；First optical splitter, for for each wavelength to by described the It reflects on one side and the first light for having passed through first confocal optical system is divided；First light receiving unit, for for each The first light after wavelength reception light splitting, and obtain the intensity of the light for each wavelength；And control device, it is configured to It is enough to replace the measurement object to adjust using the reference feature with first face parallel to each other and second face State the optical axis of the first head unit, wherein first head unit is configured so that: optical axis and institute in first head unit State the first face it is vertical in the case where, emit via first head unit to the 1st with a wavelength in first face Grade light is reflected by first face, and is passed through described first via the path of the first multi-stage light with one wavelength and be total to Focus optical system, second head unit are configured so that: vertical with second face in the optical axis of second head unit In the case where, emit to the second level-one light with a wavelength in second face via second head unit by described The reflection of two faces, and second confocal optical system is passed through via the path of the second multi-stage light with one wavelength, And the control device includes strength information display control unit, the strength information display control unit is used in adjustment institute When stating the optical axis of the first head unit, the reference feature is disposed between first head unit and second head unit Under state, display unit is made to show the intensity for judging light with first in the intensity of light received by first light receiving unit Related information is as the first strength information, wherein described first judges that light is anti-by first face from the first level-one light It penetrates and is had passed through accessed by first confocal optical system via the path of first multi-stage light.

In the confocal displacement sensor, when adjusting the optical axis of the first head unit, in the first head unit and second list It is disposed in the state of reference feature between member, will judge that the related information of the intensity of light is shown as the first strength information with first Show on the display unit.First judge the intensity of light as the optical axis of the first head unit is got higher relative to the verticality in the first face and It gets higher, and is lower as the optical axis of the first head unit is lower relative to the verticality in the first face.Therefore, user can be While visually identifying the first strength information, the posture of the first head unit is easily and securely adjusted, so that first list The optical axis of member is vertical with the first face of reference feature.

As described above, user can be by adjusting the posture and the first head unit of adjustment of the first head unit and second Relative positional relationship between unit, to keep the optical axis of the first head unit and the second head unit consistent.

As a result, user can be after adjusting the optical axis of the first head unit and the second head unit, measurement is surveyed with high precision Measure the thickness of object.

(3) the confocal displacement sensor can also include: the second optical splitter, for being directed to each wavelength to by described second Face, which is reflected and has passed through the second light of second confocal optical system, to be divided；And second light receiving unit, for being directed to The second light after the light splitting of each wavelength reception, and obtain the intensity of the light for each wavelength, wherein the control device can be by It is configured to further adjust the optical axis of second head unit using the reference feature and the strength information is aobvious Show control unit can when adjusting the optical axis of second head unit, first head unit and second head unit it Between be disposed in the state of the reference feature, make the display unit also show with second light receiving unit received by Second in the intensity of light judge the related information of the intensity of light as the second strength information, wherein described second judge light be from The second level-one light is reflected by second face and has passed through the described second confocal light via the path of second multi-stage light Accessed by system.

In this case, when adjusting the optical axis of the second head unit, the cloth between the first head unit and the second head unit It is equipped in the state of reference feature, will judge that the related information of the intensity of light is shown as the second strength information with second and showing On unit.Second judges that the intensity of light is got higher as the optical axis of the second head unit is got higher relative to the verticality in the second face, with And it is lower as the optical axis of the second head unit is lower relative to the verticality in the second face.Therefore, user can be from vision While the second strength information of upper identification, the posture of the second head unit is easily and securely adjusted, so that the light of the second head unit Axis is vertical with the second face of reference feature.

As described above, user can be by adjusting the posture and the first head unit of adjustment of the second head unit and second Relative positional relationship between unit, to keep the optical axis of the first head unit and the second head unit consistent.

As a result, user can be after adjusting the optical axis of the first head unit and the second head unit, measurement is surveyed with high precision Measure the thickness of object.

(4) first strength information can indicate the time change and described for the intensity that described first judges light Two strength informations can indicate the time change for the intensity that described second judges light.

In this case, user can be by visually identifying the first strength information and the second strength information come more Easily and securely adjust the posture of the first head unit and the second head unit.

(5) control device can also include maximum intensity display control unit, the maximum intensity display control list Member makes the display unit show that the second maximum intensity is believed for making the display unit show the first maximum intensity information Breath, wherein the first maximum intensity information indicates to arrive current point in time in the time change for the intensity that described first judges light Until maximum intensity and the second maximum intensity information indicate that described second judges in the time change of intensity of light Maximum intensity until current point in time.

In this case, user can be by visually identifying the first maximum intensity information and the second maximum intensity Information even more easily and accurately to adjust the posture of the first head unit and the second head unit.

(6) described first judges that the spike length of light can be according to the distance between first face and first head unit And change, and described second judges that the spike length of light changes according to the distance between second face and second head unit Become and the control device can also include range display control unit, the range display control unit is for controlling institute State display unit so that: judge that the waveform of light is shown in wavelength axis for described first, according to first face and described The distance between one head unit changes to change the position for the waveform that described first in the wavelength axis judges light, and in institute By described in the case where the distance between the first face and first head unit are stated within the scope of predetermined first distance One judges that the range of the wavelength of light is shown in the wavelength axis as first wavelength range, and the range display control list Member control the display unit so that: judge that the waveform of light is shown in wavelength axis for described second, according to second face The distance between second head unit changes to change the position for the waveform that described second in the wavelength axis judges light It sets, and in the case that the distance between second face and second head unit is within the scope of predetermined second distance The range for the wavelength that described second judges light is shown in the wavelength axis as second wave length range.

In this case, user adjusts the distance between the first face and the first head unit, so that institute on display unit The first of display judges the waveform of light in first wavelength range.The distance between the first face and the first head unit are as a result, In one distance range.In addition, user adjusts the distance between the second face and the second head unit, so that shown on display unit Second judge the waveform of light within the scope of second wave length.As a result, the distance between the second face and the second head unit second away from From in range.As a result, can be easy and suitably adjust on the direction vertical with the first face of reference feature and the second face The distance between one head unit and the second head unit.

(7) first light receiving unit and second light receiving unit can not exist in described in the reference feature In the state of between one head unit and second head unit, first confocal optics system from first head unit is obtained System transmitting and the intensity of light being incident on second confocal optical system of second head unit and from described second Second confocal optical system of head unit emits and is incident on first confocal optical system of first head unit On light intensity at least one intensity and the control device can also include consistent degree display control unit, institute Consistent degree display control unit is stated for making the display unit be based on first light receiving unit and second light receiving unit At least one accessed described intensity shows the light of the optical axis and second head unit that indicate first head unit The consistent degree information of the consistent degree of axis.

In this case, user can easily make the first head unit by visually identifying consistent degree information Optical axis and the second head unit optical axis it is consistent.

(8) control device can also include: distance adjustment image display control unit, in adjustment described first When the optical axis of the optical axis of head unit and second head unit, the display unit is made to show first distance adjustment image and second Distance adjustment image, wherein first distance adjustment picture cues are for adjusting first head unit and the reference feature The distance between operation and second distance adjustment picture cues for adjusting second head unit and the benchmark The operation of the distance between component；Stance adjustment image display control unit, in the optical axis for adjusting first head unit When with the optical axis of second head unit, the first distance adjustment image and the second distance are shown in the display unit After adjusting image, the display unit is made to show prime adjustment image and second adjustment image, wherein described the One stance adjustment picture cues are used to adjust the operation of posture of first head unit relative to the reference feature, Yi Jisuo State the operation that second adjustment picture cues are used to adjust posture of second head unit relative to the reference feature；With And axial adjustment image display control unit, for the optical axis in the optical axis and second head unit for adjusting first head unit When, after the display unit shows the prime adjustment image and second adjustment image, make described aobvious Show that unit shows that axial adjustment image, the axial adjustment picture cues are used for by making first head unit and second list The consistent operation of optical axis that at least one member moves to make the optical axis and second head unit of first head unit.

In this case, by first distance adjust image and second distance adjustment image show on the display unit it Afterwards, display prime adjustment image and second adjust image.Prime is being adjusted into image and second adjustment After image is shown on the display unit, axial adjustment image is shown.User can be according to shown on display unit as a result, Image adjusts position and the posture of the first head unit and the second head unit in appropriate order.As a result, user can be efficiently Adjust the optical axis of the first optical component and the second optical component.

(9) the confocal displacement sensor can also include: the first operating unit, be operated by user, to indicate State the display of first distance adjustment image and second distance adjustment image；Second operating unit, is operated by user, with After the range display control unit shows the first wavelength range and the second wave length range, instruction described first The display of stance adjustment image and second adjustment image；And third operating unit, operated by user, with After the strength information display control unit shows first strength information and second strength information, the axis is indicated Adjust the display of image.

In this case, user can be grasped by the first operating unit of sequential operation, the second operating unit and third Adjust position and the posture of the first head unit and the second head unit in appropriate order as unit.

(10) the light projection unit includes: the first light projection unit, for emitting to first confocal optical system Light；And the second light projection unit, it can be with for emitting light and the control device to second confocal optical system It include: light control unit, in the case where the consistent degree display control unit show consistent degree information, progress the At least one one control and the second control, wherein first control is for based on the light exported from second light receiving unit Signal come control the light in the first light projection unit transmitting and it is described second control for based on from described first by The transmitting that the light in the second light projection unit is controlled by optical signal of light unit output.

In this case, the transmitting that the light in the first light projection unit is controlled according to the first control, so that second The light with appropriate intensity is received in light receiving unit.The hair of the light in the second light projection unit is controlled according to the second control It penetrates, so that receiving the light with appropriate intensity in the first light receiving unit.As a result, consistent degree information is appropriately viewed in aobvious Show on unit.

(11) the strength information display control unit can be by first strength information and second strength information It is simultaneously displayed on the single picture of the display unit.

In this case, the first strength information and the second strength information are simultaneously displayed on to the single picture of display unit On.Therefore, user can adjust the first head unit and second while comparing the first strength information and the second strength information The posture of head unit.

(12) the confocal displacement sensor can be arranged to that in first head unit and second head unit In the case that this is faced, other end is incident on using from a head unit in first head unit and second head unit The light of unit adjusts the optical axis of another head unit.

In such a case, it is possible to which the light based on a head unit in the first head unit and the second head unit is come quasi- Really adjust the posture of another head unit.

(13) according to the third aspect of the invention we, a kind of confocal displacement sensor is provided, can measure and have in opposite side There is the thickness of the measurement object in the first face and the second face, the confocal displacement sensor includes: light projection unit, for emitting tool There are multiple light of multiple wavelength；First head unit and the second head unit；First optical component is arranged in first head unit In, have saturating along the diffraction of the chromatic aberation of optical axis direction for being generated in multiple light that the light projection unit is emitted Mirror, and make to have multiple light of chromatic aberation to be assembled with by the institute of each light emitting in the multiple light to the measurement object State the first face；First pin hole component is arranged in first head unit and has multiple first pin holes, wherein by described First optical component emits the multiple light for being focused and being reflected by first face into multiple light in first face as more A first light passes through the multiple first pin hole；Second optical component, be arranged in second head unit, have for The diffraction lens of the chromatic aberation along optical axis direction is generated in multiple light that the light projection unit is emitted, and is made with color Multiple light of aberration are assembled with by second face of each light emitting in the multiple light to the measurement object；Second needle Pole is arranged in second head unit and has multiple second pin holes, wherein being sent out by second optical component The multiple light for being focused and being reflected by second face being incident upon in multiple light in second face pass through institute as multiple second light State multiple second pin holes；Acquiring unit has passed through the multiple first light of the multiple first pin hole and is directed to for obtaining The intensity of each wavelength, and obtain the strong for each wavelength of the multiple second light for having passed through the multiple second pin hole Degree；Thickness calculation unit, for being directed to the strong of each wavelength based on the multiple first light accessed by the acquiring unit The intensity for each wavelength of degree and the multiple second light, to calculate first face and described second of the measurement object Thickness between face；And control device, it is configured to using the base with the first face parallel to each other and the second face Quasi- component replaces the measurement object to adjust the optical axis of first optical component and the optical axis of second optical component, In, first head unit is configured so that: in the optical axis of first optical component situation vertical with first face Under, emit the first level-one light with a wavelength to first face by first face via first optical component It reflects and passes through first pin hole, second head unit via the path of the first multi-stage light with one wavelength It is configured so that: in the case where the optical axis of second optical component is vertical with second face, via second light It learns component and emits to the second level-one light with a wavelength in second face and reflected by second face and via having The path of second multi-stage light of one wavelength passes through second pin hole and the control device includes that strength information is aobvious Show control unit, the strength information display control unit is used in the optical axis that adjusts first head unit and second described When the optical axis of unit, in the state of being disposed with the reference feature between first head unit and second head unit, It shows display unit and judges that the intensity of light is related with first in the intensity of multiple light accessed by the acquiring unit Information is shown and the second judgement in the intensity of multiple light accessed by the acquiring unit as the first strength information The related information of the intensity of light is as the second strength information, wherein described first judges that light is described from the first level-one light It the reflection of first face and is had passed through accessed by first pin hole via the path of first multi-stage light and described second Judge that light is to be reflected and have passed through via the path of second multi-stage light described by second face from the second level-one light Accessed by second pin hole.

In the confocal displacement sensor, when adjusting the optical axis of the first optical component and the second optical component, first It is disposed in the state of reference feature between head unit and the second head unit, the first strength information is shown on the display unit. Therefore, user can easily and securely adjust the first head unit while visually identifying the first strength information Posture, so that the optical axis of the first optical component is vertical with the first face of reference feature.

In addition, the second intensity is believed in the state of being disposed with reference feature between the first head unit and the second head unit Breath display is on the display unit.Therefore, user can be easy and accurate while visually identifying the second strength information Ground adjusts the posture of the second head unit, so that the optical axis of the second optical component is vertical with the second face of reference feature.

As described above, user can be by adjusting the posture of the first head unit and the second head unit and adjustment first Relative positional relationship between unit and the second head unit, to keep the optical axis of the first optical component and the second optical component consistent.

As a result, user can survey with high precision after adjusting the optical axis of the first optical component and the second optical component The thickness of measurement object.

(14) first strength information is to judge the more of light based on corresponding with first head unit multiple first The value of the difference between maximum intensity value and minimal intensity value in a intensity and second strength information be based on it is described Second head unit corresponding multiple second judges the difference between maximum intensity value and minimal intensity value in multiple intensity of light Value.

In such a case, it is possible to judge the maximum intensity value and minimum strength in multiple intensity of light based on multiple first Difference between value adjusts the posture of the first head unit.Furthermore, it is possible to judge in multiple intensity of light most based on multiple second Difference between big intensity value and minimal intensity value adjusts the posture of the second head unit.

(15) the confocal displacement sensor can have measurement pattern for measuring the measurement object and for adjusting The optical axis adjustment modes of the optical axis of whole first head unit.

In this case, the measurement of object is measured by making confocal displacement sensor with measurement pattern operation. The optical axis of head unit is adjusted by operating confocal displacement sensor with optical axis adjustment modes.

According to the present invention it is possible to which the posture of measurement head unit can easily and securely be adjusted, allow to height by providing Precision measures the confocal displacement sensor of the measurement of object.

Detailed description of the invention

Fig. 1 is the schematic diagram for showing the structure of confocal displacement sensor according to first embodiment.

Fig. 2 be show when measuring the thickness of measurement object, the optical axis of measuring head inconsistent situation each other it is exemplary Schematic diagram.

Fig. 3 be show when measuring the thickness of measurement object, inconsistent the other of situation show the optical axis of measuring head each other The schematic diagram of example.

Fig. 4 is the figure for the operating principle for illustrating the confocal displacement sensor of the measuring head using Fig. 1.

Fig. 5 A is the row for showing the light with multiple wavelength in the optical axis of measuring head and the vertical surface of measurement object The exemplary figure and Fig. 5 B of inbound path are to show to get when measuring head and measurement object are in the positional relationship of Fig. 5 A By the exemplary figure of the waveform of optical signal.

Fig. 6 A be show measuring head optical axis and measurement object surface out of plumb when the light with multiple wavelength The exemplary figure and Fig. 6 B of travel path are to show to get when measuring head and measurement object are in the positional relationship of Fig. 6 A The waveform by optical signal exemplary figure.

Fig. 7 is the exemplary figure for showing the holding meanss for being able to maintain measuring head.

Fig. 8 is to show showing for the guide picture sequentially shown when adjusting the optical axis of measuring head, on the main display unit of Fig. 1 The figure of example.

Fig. 9 is to show showing for the guide picture sequentially shown when adjusting the optical axis of measuring head, on the main display unit of Fig. 1 The figure of example.

Figure 10 is to show the guide picture sequentially shown when adjusting the optical axis of measuring head, on the main display unit of Fig. 1 Exemplary figure.

Figure 11 is to show the guide picture sequentially shown when adjusting the optical axis of measuring head, on the main display unit of Fig. 1 Exemplary figure.

Figure 12 is to show the guide picture sequentially shown when adjusting the optical axis of measuring head, on the main display unit of Fig. 1 Exemplary figure.

Figure 13 is to show the guide picture sequentially shown when adjusting the optical axis of measuring head, on the main display unit of Fig. 1 Exemplary figure.

Figure 14 is to show the guide picture sequentially shown when adjusting the optical axis of measuring head, on the main display unit of Fig. 1 Exemplary figure.

Figure 15 is to show the guide picture sequentially shown when adjusting the optical axis of measuring head, on the main display unit of Fig. 1 Exemplary figure.

Figure 16 is the block diagram for showing the functional structure of confocal displacement sensor of Fig. 1.

Figure 17 is the flow chart for showing the optical axis adjustment processing carried out in PC.

Figure 18 is the flow chart for showing the optical axis adjustment processing carried out in PC.

Figure 19 is the schematic diagram for showing the structure of confocal displacement sensor according to the second embodiment.

Figure 20 is to show to show on main display unit in the four steps of optical axis according to the second embodiment adjustment The exemplary figure of guide picture.

Figure 21 is to show to show on main display unit in the four steps of optical axis according to the second embodiment adjustment The exemplary figure of guide picture.

Specific embodiment

Illustrate confocal displacement sensor according to an embodiment of the present invention below with reference to attached drawing.

[1] first embodiment

(1) basic structure of confocal displacement sensor

Fig. 1 is the schematic diagram for showing the structure of confocal displacement sensor according to first embodiment.As shown in Figure 1, confocal Displacement sensor 500 includes measuring unit 100A and 100B, measuring head 200A and 200B, light element 300A and 300B, control Unit 400 and personal computer (PC) 600.Light element 300A includes multiple optical fiber, and makes measuring unit 100A and measurement Head 200A is optically connected with.

Measuring unit 100A includes shell 110, light projection unit 120, spectrophotometric unit 130, light receiving unit 140, measurement control Unit 150 processed and secondary display unit 190.Shell 110 accommodates light projection unit 120, spectrophotometric unit 130, light receiving unit 140 and surveys Measure control unit 150.Secondary display unit 190 includes the display of seven-segment display or dot-matrix display etc., and attached It is connected to shell 110.Light projection unit 120 be configured to transmitting have wide wavelength band (for example, 500nm~700nm) light, I.e. with the light of multiple wavelength.The light that light projection unit 120 is emitted is input to the light of light element 300A as described below Fibre 311.

Spectrophotometric unit 130 includes diffraction grating 131 and multiple (being in the present embodiment two) lens 132 and 133.Such as It will be described later, a part of the light of surface reflection that is that light projection unit 120 is emitted and being measured object S is from leaded light What the optical fiber 312 that will be described later of unit 300A exported.The light exported from optical fiber 312 is by passing through lens 132 substantially Parallelization, and be incident on diffraction grating 131.In the present embodiment, diffraction grating 131 is reflection-type diffraction grating.It is incident It is divided in a manner of being reflected for each wavelength by different angle in the light on diffraction grating 131, and by passing through lens 133 and focus on for each wavelength and it is different it is one-dimensional in position.

Light receiving unit 140 includes the photographing element (one dimensional line sensor) that multiple pixels arrange in a one-dimensional fashion.Camera shooting member Part can be multi-split photodiode (PD), charge-coupled device (CCD) camera or complementary metal oxide semiconductor (CMOS) imaging sensor, or can be other devices.Light receiving unit 140 is configured to: multiple pixels of photographing element point It is not received in the multiple focal positions different for each wavelength that the light by the lens 133 for passing through spectrophotometric unit 130 is formed Light.Export analog electrical signal corresponding with light income from each pixel of light receiving unit 140 (hereinafter referred to as by optical signal).By Optical signal indicates the intensity of light received by each pixel.

Measure-controlling unit 150 includes central processing unit (CPU), memory or microcomputer.Measure-controlling unit 150 Storage controls the various data of program and measuring condition for displacement measurement etc..These data are from will be described later What control unit 400 provided.Measure-controlling unit 150 controls light projection unit based on the control program and data that are stored 120 and light receiving unit 140, and based on exporting by optical signal the position for calculating the surface of measurement object S from light receiving unit 140 It moves.Measure-controlling unit 150 shows the calculated result of displacement on secondary display unit 190.

Measure-controlling unit 150 is connected to control unit 400, and control unit 400 is further attached to PC 600.It surveys What amount control unit 150 was exported by the calculated result of displacement and from light receiving unit 140 is provided to control unit 400 by optical signal. Control unit 400 and PC 600 will be described later structurally and operationally.

Measuring head 200 includes shell 210, optical fiber 314 with axisymmetric shape (being in the present embodiment cylindrical shape) With lens unit 220.Shell 210 accommodates optical fiber 314 and lens unit 220.

(being illustrated below) optical fiber connector 330 of light element 300A is attached to one end of shell 210.Optical fiber 314 Optical fiber connector 330 is connected in shell 210.Light is directed to optical fiber via light element 300A from measuring unit 100A 314.The light for being directed to optical fiber 314 exports from optical fiber 314 in shell 210 and is directed to lens unit 220.

Lens unit 220 includes refractor 221, diffraction lens 222 and object lens 223.It is directed to lens unit 220 Fairing time passes through refractor 221 and diffraction lens 222.As a result, generating chromatic aberation in light along optical axis direction.Object lens 223 It is arranged to: the position near the surface of measurement object S can be focused on there are the light of chromatic aberation.

Light element 300A includes multiple (being in the present embodiment three) optical fiber 311,312 and 319, fiber coupler 320 and optical fiber connector 330.In the example of fig. 1, the shell 110 of measuring unit 100A is arranged in fiber coupler 320 In.Optical fiber connector 330 is attached to the shell 210 of measuring head 200.

Fiber coupler 320 has so-called 1 × 2 type structure, and including three ports 321~323 and main body 324. Port 321 and 322 and port 323 are connected to main body 324 in the mode facing with each other of holder body 324.It is input to port 321 Light at least one 322 is exported from port 323.The light for being input to port 323 is exported from each port in port 321 and 322.

Optical fiber 311 and 312 is respectively connected to the port 321 and 322 of fiber coupler 320.The port of fiber coupler 320 323 and optical fiber connector 330 connected by optical fiber 319.

According to this structure, the light that the light projection unit 120 of measuring unit 100A emits is input to optical fiber via optical fiber 311 The port 321 of coupler 320.The light for being input to port 321 is exported from port 323, and is input to light via optical fiber 319 Fiber connector 330.The light for being input to optical fiber connector 330 passes through optical fiber 314 and lens unit 220, to be transmitted to measurement pair As S.

The a part for the light that the surface of measurement object S is reflected is input to optical fiber via lens unit 220 and optical fiber 314 Connector 330.The light for being input to optical fiber connector 330 is input to the port 323 of fiber coupler 320 via optical fiber 319.It is defeated Enter and is exported to the light of port 323 from port 321 and 322.The light exported from port 322 is directed to light splitting via optical fiber 312 Unit 130.Thus, based on emitting to the light of measurement object S the displacement for calculating measurement object S from measuring unit 100A.

Measuring unit 100A and measuring unit 100B structure having the same, measuring head 200A and measuring head 200B have phase Same structure, and light element 300A and light element 300B structure having the same.With above-mentioned measuring unit 100A and The example of measuring head 200A is identical, and measuring unit 100B and measuring head 200B are optically connected with by light element 300B.Measurement 150 (not shown) of measure-controlling unit of unit 100B is connected to control unit 400.

The light emitted from 120 (not shown) of light projection unit of measuring unit 100B is transmitted to survey via measuring head 200B Measure object S.The a part for being measured the light of the surface reflection of object S returns to measuring unit 100B via measuring head 200B.By This, based on emitting to the light of measurement object S the displacement for calculating measurement object S from measuring unit 100B.In this case, it surveys Measure 150 (not shown) of measure-controlling unit set in unit 100B by the calculated result of displacement and from light receiving unit 140 it is defeated Out control unit 400 is provided to by optical signal.

Control unit 400 includes CPU and memory or microcomputer.By the displacement in such as measuring unit 100A and 100B Measuring condition be input to control unit 400 from PC 600.Measuring condition includes the light emitting in such as light projection unit 120 Light emitting timing in amount, light projection unit 120 and the light exposure in light receiving unit 140.The survey that control unit 400 will be inputted Amount condition is provided to the respective measure-controlling unit 150 of measuring unit 100A and 100B.As a result, in measuring unit 100A and 100B In respectively, operation is measured based on provided measuring condition.

PC 600 includes CPU 601 and memory 602.Memory 602 stores thickness measure program and is used for thickness measure Various data.When CPU 601 executes the thickness measure program stored in memory 602, PC 600 with measurement pattern and The operation of optical axis adjustment modes.The calculated result of the displacement of control unit 400 will be respectively provided to from measuring unit 100A and 100B PC 600 is provided to from control unit 400 with by optical signal.

Main display unit 610 and operating unit 620 are connected to PC 600.Main display unit 610 is for example including such as organic The display device of electroluminescent (EL) panel or liquid crystal display panel etc..Operating unit 620 includes keyboard and pointing device.It gives directions Device includes mouse or control stick etc..User can be by being operable to operating unit 620 to make the operation mould of PC 600 Formula switches between measurement pattern and optical axis adjustment modes.

In the confocal displacement sensor 500 according to the present embodiment, as shown in Figure 1, measuring head 200A and 200B are arranged At facing with each other in a manner of clamping measurement object S.Measurement object S has a face and another side relative to each other.This Under state, if it is known that the distance between measuring head 200A and 200B (hereinafter referred to as distance between head), then it can be single based on measurement Distance calculates measurement object between a face of measurement object S measured by first 100A and 100B and the displacement and head of another side The thickness of S.

In measurement pattern, measurement is arranged in the thickness of the measurement object S between measuring unit 100A and 100B.It is measuring In mode, CPU 601, which is received, passes through distance user is operated inputted head between operating unit 620.In addition, CPU 601 measure displacement via control unit 400 order measuring unit 100A and 100B.Then, CPU 601 is based on received head Between distance and calculate the thickness of measurement object S from the calculated result of measuring head 200A and the 200B displacement provided, and will The calculated thickness of institute is shown on main display unit 610 as measurement result.

As described above, needing to make the lens unit 220 of measuring head 200A in the case where measuring the thickness of measurement object S Optical axis it is consistent with the optical axis of lens unit 220 of measuring head 200B.In the following description, by the lens unit of measuring head 200A 220 optical axis is known as the optical axis of measuring head 200A, and the optical axis of the lens unit of measuring head 200B 220 is known as measuring head The optical axis of 200B.

Fig. 2 be show when measuring the thickness of measurement object S, the optical axis of measuring head 200A and 200B inconsistent feelings each other The exemplary schematic diagram of condition.In the case of figure 2, the axis oa2 of measuring head 200B inclines relative to the optical axis oa1 of measuring head 200A Tiltedly, and optical axis oa1 and oa2 is inconsistent each other.In this case, inclined in the thickness direction relative to measurement object S The thickness of measurement object S is measured on direction.Therefore, the measurement accuracy decline of the thickness of measurement object S.

Fig. 3 be show when measuring the thickness of measurement object S, the optical axis of measuring head 200A and 200B it is inconsistent another each other One exemplary schematic diagram.In the fig. 3 embodiment, the lens unit 220 of the optical axis oa1 and measuring head 200B of measuring head 200A Optical axis oa2 is parallel to each other, but is separated from each other.In this case, using measuring head 200A and 200B displacement measurement position It shifts on the direction parallel with measurement object S face and another side.Therefore, the measurement of the thickness of measurement object S Accuracy decline.

In optical axis adjustment modes, before with the thickness of measurement pattern measurement measurement object S, survey facing with each other is adjusted Measure the optical axis oa1 and oa2 of head 200A and 200B.The details of the optical axis adjustment of measuring head 200A and 200B will be described later.

(2) operating principle

Here, explanation is used into the operating principle of the confocal displacement sensor 500 of the measuring head 200A and 200B of Fig. 1.It will Illustrate the example of measuring head 200A as its representative.Fig. 4 is the confocal displacement sensing for illustrating the measuring head 200A using Fig. 1 The figure of the operating principle of device 500.As shown in figure 4, optical fiber 314 includes core 310a and covering 310b.Core 310a is by covering 310b packet It covers.The light for being input to one end of core 310a is exported from the other end of core 310a.

The light exported from optical fiber 314 passes through refractor 221 and diffraction lens 222.As a result, generating colour in the light Difference.There are the light of chromatic aberation to focus on the position different for each wavelength by passing through object lens 223.For example, having short wavelength Light focus on the position close to object lens 223, and the light with long wavelength focuses on the position far from object lens 223.From object lens Range between 223 nearest focal position F1 and the focal position F2 farthest from object lens 223 is measurement range MR.

In the case where the surface of measurement object S is present in measurement range MR, the light for having passed through object lens 223 is transmitted to On the surface of measurement object S, then reflected in a wide range by the surface.Here, in the present embodiment, the end of optical fiber 314 Part is used as the spatial filter with small pin hole.

The light with specific wavelength for focusing on the position on the surface of measurement object S passes through lens and by surface reflection Unit 220, and it is input to the front end portion of the core 310a of optical fiber 314.The wavelength for being input to the light of optical fiber 314 indicates measurement Distance.Here, measurement distance is the distance from predetermined reference position RP until the position on the surface of measurement object S.In In the example, base position RP is the position of the end nearest from measurement object S of shell 210.

The light for being input to optical fiber 314 is directed to the measuring unit 100A of Fig. 1, is diffracted the light splitting of grating 131, and by saturating Mirror 133 is focused on for each wavelength and different positions.Multiple pixels of light receiving unit 140 are arranged respectively at different wave length Multiple light focus position.Therefore, each pixel of light receiving unit 140 receives the light with wavelength corresponding with the pixel, And it exports by optical signal.

In the measure-controlling unit 150 of Fig. 1, position that the pixel of light receiving unit 140 is stored in advance, the wave by optical signal The wavelength at the peak in shape and the conversion formula of measurement distance.The specified output of measure-controlling unit 150 indicate peak value by optical signal Light output unit 140 pixel position, and the position based on specified pixel and pre-stored conversion formula come Calculate measurement distance.In addition, measure-controlling unit 150 based on calculated measurement distance calculate the surface of measurement object S Displacement.

(3) path of the light formed by diffraction lens 222

In the lens unit 220 of Fig. 4 used in measuring head 200A and 200B, formd respectively by diffraction lens 222 There is the path of the diffraction light of the different orders of diffraction from each wavelength for the light across diffraction lens 222.

Fig. 5 A is to show to have multiple wavelength when the optical axis oa1 of measuring head 200A is vertical with the surface of measurement object S Light travel path exemplary figure and Fig. 5 B be to show to be in the position of Fig. 5 A in measuring head 200A and measurement object S The exemplary figure of the waveform by optical signal got when relationship.

Measuring head 200A will be in the light emitting with multiple wavelength to the surface of measurement object S.For with each wavelength Light, there are level-one light and multiple multi-stage lights (secondary light and three-level light etc.).In the example of Fig. 5 A, as utilized heavy line institute Show, the level-one in emitting the light with multiple wavelength to the surface of measurement object S, on the surface for focusing on measurement object S In the case that light L1 is measured the surface reflection of object S, the level-one light L1 reflected is input to the optical fiber 314 of Fig. 4.With with Most of level-one light of the different wavelength of the wavelength of level-one light L1 is not input to the optical fiber 314 of Fig. 4.

As utilized the level-one light L2 shown in double dot dash line, with the wavelength different from the wavelength of level-one light L1 in fig. 5 not It focuses on the surface of measurement object S, but focuses on the position lower than the surface of measurement object S.As in fig. 5 using thick Shown in dotted line, the multi-stage light L3 with wavelength identical with level-one light L2 is not focused on the surface of measurement object S, but is focused Position F0 in the surface of measurement object S.In this case, it is assumed that multi-stage light L3 is reflected at the F0 of position, then instead It penetrates light and is input to optical fiber 314.Therefore, the path of multi-stage light L3 is passed through in the level-one light L2 for being measured the surface reflection of object S In the case where, level-one light L2 is input to optical fiber 314.

As a result, as shown in Figure 5 B, occurring in the waveform by optical signal of light for being input to optical fiber 314 from measurement object S The peak P1 as caused by the level-one light L1 and peak P2 as caused by level-one light L2.The intensity of peak P2 is lower than the intensity of peak P1.

In the present embodiment, the lens unit 220 of measuring head 200A is configured to: being located on the surface of measurement object S and is surveyed In amount range MR and when the optical axis oa1 of measuring head 200A is vertical with the surface of measurement object S, in the waveform by optical signal There is the peak P2 as caused by the level-one light L2 for being input to optical fiber 314 via the path of multi-stage light L3.

Such as measuring head 200A optical axis oa1 relative to measurement object S surface angle in 90 ° ± 0.2 ° when, Occur via the peak P2 that the path of multi-stage light L3 is input to the level-one light L2 of optical fiber 314 as the waveform by optical signal.

Fig. 6 A is to show to have multiple waves in the surface out of plumb of the optical axis oa1 and measurement object S of measuring head 200A The exemplary figure and Fig. 6 B of the travel path of long light are to show to be in the position of Fig. 6 A in measuring head 200A and measurement object S The exemplary figure of the waveform by optical signal got when setting relationship.

In this example, as the example of Fig. 5 A, in the light with multiple wavelength of transmitting to the surface of measurement object S In, when the level-one light L1 for focusing on the surface of measurement object S is measured the surface reflection of object S, the level-one light L1 that is reflected It is input to the optical fiber 314 of Fig. 4.

However, different from the example of Fig. 5 A, level-one light L2 does not pass through multi-stage light as utilized shown in double dot dash line in fig. 6 The path of L3.Therefore, level-one light L2 is not input to the optical fiber 314 of Fig. 4.

As a result, as shown in Figure 6B, occurring in the waveform by optical signal of light for being input to optical fiber 314 from measurement object S The only peak P1 as caused by level-one light L1, and the peak P2 as caused by level-one light L2 does not occur.

As described above, getting packet in the case where the optical axis oa1 of measuring head 200A is vertical with the surface of measurement object S Include the waveform by optical signal that the peak P2 of level-one light L2 of optical fiber 314 is input to via the path of multi-stage light L3.The peak value of peak P2 (intensity) highest when the optical axis oa1 of lens unit 220 is vertical with the surface of measurement object S, and with lens unit 220 Optical axis oa1 relative to the verticality on the surface of measurement object S reduction and reduce.Therefore, in the present embodiment, using via more The path of grade light L3 is input to the level-one light L2 of optical fiber 314 as the optical axis oa1 of expression lens unit 220 relative to measurement object The judgement light of the positive verticality of S.

(4) the optical axis adjustment of measuring head 200A and 200B

In the present embodiment, the optical axis of measuring head 200A and 200B is adjusted using reference feature.Reference feature has flat Plate shape, and with the first face and the second face parallel to each other and relative to each other.In the present embodiment, by the thickness of reference feature The measurement range MR that degree, i.e. the distance between the first face and the second face were set equal to or were substantially equal to measuring head 200A and 200B (Fig. 4).

Reference feature is arranged between measuring head 200A and 200B, so that the light emitting unit of measuring head 200A is towards first Face, and the light emitting unit of measuring head 200B is towards the second face.In this state, based on by from measuring head 200A and 200B respectively to judge accessed by the first face of reference feature and the second surface launching light light by optical signal come adjust measurement The optical axis of head 200A and 200B.

In the present embodiment, using for keeping the holding meanss of measuring head 200A and 200B adjust measuring head 200A and The optical axis of 200B.Fig. 7 A and 7B are the exemplary figures for showing the holding meanss for being able to maintain measuring head 200A and 200B.Fig. 7 A is The stereoscopic figure for the holding meanss 900 for keeping measuring head 200A such as watched from front and obliquely from above.Figure 7B is the stereoscopic for the holding meanss 900 for keeping measuring head 200A such as watched from rear and obliquely from above Figure.

As shown in figs. 7 a-b, it in this exemplary holding means 900, is provided on pedestal 910 in holding meanss 900 Front-rear direction on moveable first supporting member 920.In the front of the first supporting member 920, relative to the first support Component 920 is swingable around horizontally extending trunnion axis and the second supporting member is arranged around the swingable mode of vertical axis 930。

In the center of the second supporting member 930, with vertically can with horizontal direction relative to the second supporting member 930 Third supporting member 940 is arranged in mobile mode.Third supporting member 940 has cylindrical shape and extends along the longitudinal direction. In the front of third supporting member 940, holding member is set in such a way that the central axis around third supporting member 940 is rotatable 950.Measuring head 200A is kept by holding member 950.

Pedestal 910 is provided with the anteroposterior position for moving the first supporting member 920 along the longitudinal direction relative to pedestal 910 Set knob 911.User as utilized operation front-rear position knob 911 shown in block arrow a1 in fig. 7.As a result, measuring head 200A It moves along the longitudinal direction.

First supporting member 920 is provided with for making the second supporting member 930 relative to the first supporting member 920 along vertical The vertical angle knob 921 that direction is swung.User as utilized operation vertical angle knob shown in block arrow a2 in figure 7b 921.As a result, the posture (orientation) of measuring head 200A vertically changes as utilized shown in hollow arrow b2 in figure 7b.

First supporting member 920 is provided with for making the second supporting member 930 relative to the first supporting member 920 along level The level angle knob 922 that direction is swung.User as utilized operation level angle knob shown in block arrow a3 in figure 7b 922.As a result, the posture (orientation) of measuring head 200A changes in the horizontal direction as utilized shown in hollow arrow b3 in figure 7b.

Second supporting member 930 is provided with for making third supporting member 940 relative to the second supporting member 930 along vertical The mobile upright position knob 931 in direction.User as utilized operation upright position knob shown in block arrow a4 in fig. 7 931.As a result, measuring head 200A is moved in the vertical direction.

Second supporting member 930 is provided with for making third supporting member 940 relative to the second supporting member 930 along level The mobile horizontal position knob 932 in direction.User as utilized operation horizontal position knob shown in block arrow a5 in fig. 7 932.As a result, measuring head 200A is moved in the horizontal direction.

Third supporting member 940 is provided with for supporting holding member 950 around third relative to third supporting member 940 The axis rotating driver plate 941 of the central axis rotation of component 940.User as utilized operating shaft shown in block arrow a6 to rotate in fig. 7 Driver plate 941.As a result, measuring head 200A is rotated around its optical axis oa1.

After preparing reference feature and holding meanss 900, the operating unit 620 of user's operation diagram 1 is in optical axis tune The PC 600 of operation diagram 1 under integral pattern.As a result, in the main display unit 610 of Fig. 1, in response to user to operating unit 620 Operation and sequentially show multiple guide pictures, these guide pictures include represent optical axis adjustment the operation to be carried out The information of the adjustment degree of the image and expression optical axis of content.

Fig. 8~Figure 15 be show adjust measuring head 200A and 200B optical axis when on the main display unit 610 of Fig. 1 it is suitable The exemplary figure of the guide picture of secondary display.

As shown in figure 8, the guide picture 691 being initially displayed on main display unit 610 includes original state image im1, the One message tx1 and next button 611.Original state image im1 is shown in the center of guide picture 691, and indicates initial Positional relationship between the measuring head 200A to be arranged and 200B and reference feature.First message tx1 is shown in original state figure As the lower section of im1, and including facing with each other in a manner of clamping reference feature for being configured to measuring head 200A and 200B Operation instruction.Next button 611 is shown in the lower right corner of guide picture 691.

Here, such as Fig. 8 and below will described in Fig. 9~Figure 15 shown in, in main display unit 610 in optical axis adjustment modes On the topmost of guide picture 691~698 that sequentially shows, display indicates optical axis adjustment in the figure of the progress of current point in time Picture.In the present embodiment, optical axis adjustment is substantially by this four steps of first step, second step, third step and four steps It is rapid to carry out.Therefore, in the respective topmost of guide picture 691~698, being shown in mode distinct from each other is indicated and guidance picture The index of the corresponding step in face and the index for indicating step corresponding with other navigational figures.For example, in guide picture 691 ~698 respectively in, only highlight the index of expression step corresponding with guide picture.

In the first step, measuring head 200A and 200B is configured to facing with each other in a manner of clamping reference feature, and And the second face and the measuring head 200B of the distance between the first face and measuring head 200A for adjusting reference feature and reference feature The distance between.In the second step, adjust measuring head 200A and 200B posture so that the optical axis oa1 of measuring head 200A with First face of reference feature is vertical, and the optical axis oa2 of measuring head 200B is vertical with the second face of reference feature.

In third step, the relative positional relationship between measuring head 200A and 200B is roughly adjusted, so that measuring head The optical axis oa2 of the optical axis oa1 and measuring head 200B of 200A are consistent with each other or substantially consistent.In four steps, subtly adjust Relative positional relationship between whole measuring head 200A and 200B, so that the light of the optical axis oa1 and measuring head 200B of measuring head 200A Axis oa2 is accurately consistent each other.

In the first step, measuring head is arranged while visually identifying guide picture 691 shown in Fig. 8 in user Then positional relationship between 200A and 200B and reference feature is come shown in operation diagram 8 using operating unit 620 shown in FIG. 1 Next button 611.As a result, showing the guide picture 692 of Fig. 9 on main display unit 610.

As shown in figure 9, guide picture 692 include distance adjustment image im2, holding meanss image im3, second message tx2, Next button 611 and return push-button 612.Distance adjustment image im2 is shown in guidance picture relative to the center of guide picture 692 The left side in face 692, and holding meanss image im3 is shown in the right side of guide picture 692 relative to the center of guide picture 692 Side.Second message tx2 is shown in the lower section of distance adjustment image im2 and holding meanss image im3.It next button 611 and returns Go back to the lower right corner that button 612 is shown in guide picture 692.

Distance adjustment image im2 is the figure for making user adjust the distance between measuring head 200A and 200B and reference feature Picture, and indicate that measuring head 200A and 200B are moved along the longitudinal direction while facing with each other in a manner of clamping reference feature State.Second message tx2 includes for adjusting the distance between first face of measuring head 200A and reference feature and measurement The operation instruction in the distance between the second face of head 200B and reference feature.In holding meanss image im3, show in adjustment period Between the holding meanss 900 (Fig. 7) to be operated front-rear position knob 911 (Fig. 7) position.

User is identified by visually identifying the guide picture 692 of Fig. 9 in the operation that user to be carried out Hold the operation object with holding meanss 900 (Fig. 7).Then, user carrys out the next of operation diagram 9 using the operating unit 620 of Fig. 1 Walk button 611.As a result, showing the guide picture 693 of Figure 10 on main display unit 610.At this point, measuring head 200A and 200B points Light is not emitted towards reference feature.Carry out the return push-button 612 of operation diagram 9 by using the operating unit 620 of Fig. 1, user can So that main display unit 610 shows the guide picture 691 of tight preceding Fig. 8.

As shown in Figure 10, guide picture 693 includes waveform display area da1, waveform display area da2, third message Tx3, next button 611 and return push-button 612.

Waveform display area da1 is shown in the left side of guide picture 693, and wave relative to the center of guide picture 693 Shape display area da2 is shown in the right side of guide picture 693 relative to the center of guide picture 693.Third message tx3 is shown in The lower section of waveform display area da1 and da2.Next button 611 and return push-button 612 are shown in the bottom right of guide picture 693 Angle.

On the da1 of waveform display area, display indicates the longitudinal axis by the intensity of optical signal and indicates the horizontal axis (wavelength of wavelength Axis), and show based on the wave accessed by the light emitted from measuring head 200A to the first face of reference feature by optical signal Shape.On the da2 of waveform display area, display indicates the longitudinal axis by the intensity of optical signal and indicates the horizontal axis (wavelength axis) of wavelength, And it shows based on the waveform accessed by the light emitted from measuring head 200B to the second face of reference feature by optical signal.

In the da1 of waveform display area, at optical axis oa1 and substantially vertical the first face of measuring head 200A, show simultaneously The spike shape for the level-one light for focusing on the first face of reference feature and the spike shape for judging light.Therefore, user, which adjusts, keeps surveying Posture and the position for measuring the holding meanss 900 (Fig. 7) of head 200A, so that the two spike shapes are shown in waveform display area da1 In.

In the da1 of waveform display area, in the state of showing two spike shapes, changing measuring head 200A and benchmark structure When the distance between first face of part, on waveform axis, the position change of the spike shape of level-one light and the spike shape for judging light.

In the present embodiment, by the model of the distance when adjusting optical axis between the measuring head 200A to be adjusted and reference feature It encloses and is previously determined to be first distance range.First distance range be confirmed as include for example from the front end of measuring head 200A until The distance until predetermined position in the measurement range MR of measuring head 200A.In the da1 of waveform display area, in measuring head 200A In the case that the range in the distance between the first face of reference feature is within the scope of first distance, the long model of the spike of light is judged It is trapped among in wavelength axis and is shown as first wavelength range wr1.

In the da2 of waveform display area, at optical axis oa2 and substantially vertical the second face of measuring head 200B, show simultaneously The spike shape for the level-one light for focusing on the second face of reference feature and the spike shape for judging light.Therefore, user, which adjusts, keeps surveying Posture and the position for measuring the holding meanss 900 (Fig. 7) of head 200B, so that the two spike shapes are shown in waveform display area da2 In.

In the da2 of waveform display area, change measuring head 200B and reference feature in the state of showing two spike shapes The distance between the second face when, on waveform axis, the spike shape of level-one light and judge light spike shape position change.

In the present embodiment, by the model of the distance when adjusting optical axis between the measuring head 200B to be adjusted and reference feature It encloses and is previously determined to be second distance range.Second distance range be confirmed as include for example from the front end of measuring head 200B until The distance until predetermined position in the measurement range MR of measuring head 200B.In the da2 of waveform display area, in measuring head 200B In the case that the range in the distance between the second face of reference feature is within the scope of second distance, the long model of the spike of light is judged It is trapped among in wavelength axis and is shown as second wave length range wr2.

Third message tx3 includes following operation instruction, and the operation instruction is for adjusting measuring head 200A and 200B preceding Position in rear direction, so that the relatively small peak in two peaks, which is located at, indicates first wavelength range wr1's and second wave length range wr2 In the frame of dotted line.

Therefore, user is visually identifying the waveform by optical signal shown in waveform display area da1 and da2 While, operation keeps the front-rear position knob 911 (Fig. 7) of the holding meanss 900 (Fig. 7) of measuring head 200A and 200B respectively. User adjusts the distance between measuring head 200A and the first face of reference feature as a result,.User also adjusts measuring head 200B The distance between second face of reference feature.

Here, in the guide picture of Figure 10 693, in waveform display area, the top of da1 and da2 show decision block respectively Mk1 and mk2.In decision block mk1, via judging that the spike of light long is located at first wave length model accessed by measuring head 200A In the case where enclosing in wr1 and judging that the peak value of light is more than predetermined threshold, show " OK ", and show " NG " in other cases. In decision block mk2, via judge accessed by measuring head 200B light spike it is long be located in second wave length range wr2 and In the case where judging that the peak value of light is more than predetermined threshold, show " OK ", and show " NG " in other cases.Therefore, it uses Person can be based on information shown in decision block mk1 and mk2 to determine whether continuing the operation of adjustment optical axis.

Distance and measuring head 200B and reference feature between adjustment measuring head 200A and the first face of reference feature The distance between the second face after (after completing first step), user carrys out operation diagram using the operating unit 620 of Fig. 1 10 next button 611.As a result, showing the guide picture 694 of Figure 11 on main display unit 610, and start second step Suddenly.

As shown in figure 11, guide picture 694 includes stance adjustment image im4, the 4th message tx4,611 and of next button Return push-button 612.Stance adjustment image im4 is shown in the center of guide picture 694, and the 4th message tx4 is shown in posture Adjust the lower section of image im4.Next button 611 and return push-button 612 are shown in the lower right corner of guide picture 694.

Stance adjustment image im4 is the figure for making the posture of measuring head 200A and 200B of user's adjustment towards reference feature Picture, and indicate to adjust the state of the posture of the measuring head 200A towards reference feature.In the stance adjustment image of the present embodiment In im4, the vertical angle knob 921 (Fig. 7) and horizontal angle of the holding meanss 900 (Fig. 7) to be operated during the adjustment are shown Spend the position of knob 922 (Fig. 7).4th message tx4 includes following operation instruction, and the operation instruction is for adjusting measuring head The posture of 200A and 200B, so that the optical axis oa1 and oa2 of measuring head 200A and 200B and the first face of reference feature and the second face Vertically.

User is identified by the stance adjustment image im4 and the 4th message tx4 shown in visual identity Figure 11 to be used The content of person's operation to be carried out and the operation object of holding meanss 900 (Fig. 7).Then, user uses the operation list of Fig. 1 Member 620 carrys out the next button 611 of operation diagram 11.As a result, showing the guide picture 695 of Figure 12 on main display unit 610.

As shown in figure 12, guide picture 695 includes variation display area da3 and da4, the 5th message tx5, next button 611 and return push-button 612.Variation display area da3 is shown in a left side for guide picture 695 relative to the center of guide picture 695 Side, and change the right side that display area da4 is shown in guide picture 695 relative to the center of guide picture 695.5th message Tx5 is shown in the lower section of variation display area da3 and da4.Next button 611 and return push-button 612 are shown in guide picture 695 lower right corner.

In variation display area da3, display indicates the longitudinal axis by the intensity of optical signal and indicates the horizontal axis (time of time Axis), and scroll the time change until current point in time of the intensity of judgement light corresponding with measuring head 200A. In addition, being indicated by chain-dotted line display via judging the strong of light accessed by measuring head 200A in variation display area da3 The history maximum intensity value of the maximum value until current point in time in the time change of degree.In addition, in variation display area The top of da3 shows the intensity value and history for judging light of current time corresponding with measuring head 200A in a manner of numerical value Maximum intensity value.

In variation display area da4, as the case where variation display area da3, display is indicated by the strong of optical signal The longitudinal axis of degree and the horizontal axis (time shaft) for indicating the time, and scroll the intensity of judgement light corresponding with measuring head 200B The time change until current point in time.In addition, variation display area da4 in, by chain-dotted line display indicate via The history of the maximum value until current point in time in the time change of the intensity of light is judged accessed by measuring head 200B Maximum intensity value.In addition, being shown in a manner of numerical value corresponding with measuring head 200B on the top of variation display area da4 The intensity value for judging light and history maximum intensity value of current time.

Variation display area da3 and da4 respectively in, according to the value for the intensity for judging light come adjust automatically and the intensity phase The indication range of the corresponding longitudinal axis allows user easily to grasp the time change for judging the intensity of light.It is aobvious in variation Show that the respective lower section region da3 and da4 shows reset button rb.Reset button rb will be for that will change in display area da3 and da4 The longitudinal axis and the indication range of horizontal axis reset to pre-set initial value and reset history maximum intensity value.

5th message tx5 includes following operation instruction, which is used to adjust the appearance of measuring head 200A and 200B Gesture, so that the intensity by optical signal of measuring head 200A and 200B increase.

The time of user's intensity for judging light shown in visually identification variation display area da3 and da4 While variation, the vertical angle knob 921 (Fig. 7) and level angle knob 922 (Fig. 7) of holding meanss 900 (Fig. 7) are operated. In this way, user adjusts the posture of measuring head 200A, so that the first of the optical axis oa1 of measuring head 200A and reference feature Face is vertical.In addition, user adjusts the posture of measuring head 200B, so that the of the optical axis oa2 of measuring head 200B and reference feature Two faces are vertical.As a result, the optical axis oa1 and oa2 of measuring head 200A and 200B become parallel to each other.

In the present embodiment, variation display area da3 and da4 are shown simultaneously on the single picture of main display unit 610. As a result, user can will via judge accessed by measuring head 200A the intensity of light with via acquired in measuring head 200B To the intensity for judging light be compared while, adjust measuring head 200A and 200B posture.

After keeping the optical axis oa1 and oa2 of measuring head 200A and 200B vertical with the first face of reference feature and the second face (after completing second step), user carrys out the next button 611 of operation diagram 12 using the operating unit 620 of Fig. 1.Knot Fruit, shows the guide picture 696 of Figure 13 on main display unit 610, and starts third step.

As shown in figure 13, guide picture 696 includes axial adjustment image im5, the 6th message tx6, next button 611 and returns Return button 612.Axial adjustment image im5 is shown in the center of guide picture 696, and the 6th message tx6 is shown in axial adjustment figure As the lower section of im5.Next button 611 and return push-button 612 are shown in the lower right corner of guide picture 696.

Axial adjustment image im5 is to carry out user for making the optical axis oa1 and oa2 of measuring head 200A and 200B each other one The image adjusted roughly caused, and indicate to replace reference feature between measuring head 200A and 200B but the shape of arrangement thin slice State.In the axial adjustment image im5 of the present embodiment, the upright position for the holding meanss 900 (Fig. 7) that user to be operated is shown The position of knob 931 (Fig. 7) and horizontal position knob 932 (Fig. 7).

6th message tx6 includes following operation instruction, which places the sheet in for removing reference feature Between measuring head 200A, 200B, and the positional relationship of measuring head 200A, 200B is adjusted so that two light being projected on thin slice Spot overlapping.

User identifies use by visually identifying axial adjustment image im5 and the 6th message tx6 shown in Figure 13 The content of person's operation to be carried out and the operation object of holding meanss 900 (Fig. 7).Roughly adjustment measuring head 200A and After relative positional relationship between 200B (after completing third step), user is grasped using the operating unit 620 of Fig. 1 Make the next button 611 of Figure 13.As a result, show the guide picture 697 of Figure 14 on main display unit 610, and start the Four steps.

When four steps starts, measuring head 200A and 200B are changed into following state: from measuring head 200A and 200B In any one measuring head (be in this example that measuring head 200A) emits light, and (in this example from another measuring head Do not emit light for measuring head 200B).Here, the optical axis oa1 and oa2 in measuring head 200A and 200B are consistent with each other or basic each other Under unanimous circumstances, the light emitted from measuring head 200A is incident on measuring head 200B.As a result, the optical axis of measuring head 200A and 200B The consistent degree of oa1 and oa2 is higher, bigger via the intensity accessed by measuring head 200B by optical signal.

As shown in figure 14, guide picture 697 includes axial adjustment image im6, the 7th message tx7, next button 611 and returns Return button 612.Axial adjustment image im6 is shown in the center of guide picture 697, and the 7th message tx7 is shown in axial adjustment figure As the lower section of im6.Next button 611 and return push-button 612 are shown in the lower right corner of guide picture 697.

Axial adjustment image im6 is to carry out user for keeping the optical axis oa1 and oa2 of measuring head 200A and 200B consistent The image of intense adjustment, and the case where be expressed as follows: measuring head 200A and 200B are arranged opposite to each other, and in measuring head Other components are not present between 200A and 200B.In the axial adjustment image im6 of the present embodiment, show what user to be operated The upright position knob 931 (Fig. 7) of holding meanss 900 (Fig. 7) and the position of horizontal position knob 932 (Fig. 7).7th message Tx7 includes following operation instruction, which is used to remove the thin slice between measuring head 200A and 200B, and makes to measure The head 200A and optical axis oa1 of 200B is accurately consistent with oa2.

User identifies use by visually identifying axial adjustment image im6 and the 7th message tx7 shown in Figure 14 The content of person's operation to be carried out and the operation object of holding meanss 900 (Fig. 7).Then, user uses the operation list of Fig. 1 Member 620 carrys out the next button 611 of operation diagram 14.As a result, showing the guide picture 698 of Figure 15 on main display unit 610.

As shown in figure 15, guide picture 698 includes variation display area da5, the 8th message tx8, return push-button 612 and knot Beam button 613.Variation display area da5 is shown in the center of guide picture 698, and the 8th message tx8 is shown in variation and shows Show the lower section of region da5.Return push-button 612 and conclusion button 613 are shown in the lower right corner of guide picture 698.

In variation display area da5, display indicates the longitudinal axis by the intensity of optical signal and indicates the horizontal axis (time of time Axis), and scroll emit from measuring head 200A and the intensity of light that is incident in measuring head 200B to current point in time Until time change.In addition, indicating to be incident on measuring head 200B's by chain-dotted line display in variation display area da5 The history maximum intensity value of the maximum value until current point in time in the time change of the intensity of light.In addition, aobvious in variation Show that the top of region da5 shows the current intensity value and history maximum intensity for being incident on the light of measuring head 200B in a manner of numerical value Value.

In variation display area da5, according to the intensity for the light for being incident on measuring head 200B come adjust automatically and the light The indication range of the corresponding longitudinal axis of intensity, allows user easily to grasp the time change of the intensity of the light.Becoming That changes display area da5 is displayed next to reset button rb.Reset button rb will be for that will change the longitudinal axis in the da5 of display area and cross The indication range of axis resets to pre-set initial value and resets history maximum intensity value.

8th message tx8 includes following operation instruction, and the operation instruction is for adjusting between measuring head 200A and 200B Positional relationship so that increase by optical signal intensity.User is shown in visually identification variation display area da5 Light intensity time change while, operate holding meanss 900 (Fig. 7) upright position knob 931 (Fig. 7) and horizontal position Set knob 932 (Fig. 7).The positional relationship for adjusting measuring head 200A and 200B as a result, so that the optical axis of measuring head 200A and 200B Oa1 is accurately consistent each other with oa2.

After keeping measuring head 200A and the optical axis oa1 of 200B and oa2 accurately consistent (after completing four steps), User carrys out the conclusion button 613 of operation diagram 15 using the operating unit 620 of Fig. 1.Measuring head 200A and 200B are completed as a result, Optical axis adjustment, and the operation mode of PC shown in FIG. 1 600 is switched to measurement pattern from optical axis adjustment modes.

(5) functional structure and operation of confocal displacement sensor 500

Figure 16 is the block diagram for showing the functional structure of confocal displacement sensor 500 of Fig. 1.As shown in figure 16, the PC of Fig. 1 600 include light control unit 651, order receiving unit 652, light signal acquiring unit 653, judge light extraction unit 654, by force Spend acquiring unit 655, maximum intensity holding unit 656, consistent degree display control unit 657, range display control unit 658, Time change display control unit 659, maximum intensity display control unit 660, distance adjustment image display control unit 661, Stance adjustment image display control unit 662 and axial adjustment image display control unit 663 are used as functional structure.These elements Function executes the thickness measure program stored in memory 602 by the CPU 601 of Fig. 1 of composition PC 600 to realize.On State some or all of element can by electronic circuit etc. hardware configuration at.In addition, a part of said elements or It all can be by control unit 400 by the way that part or all of thickness measure program to be stored in control unit 400 come real It is existing.

Order receiving unit 652 receives the order based on user to the operation of operating unit 620, and will be received Order be provided to light control unit 651, light signal acquiring unit 653, distance adjustment image display control unit 661, appearance Gesture adjusts image display control unit 662 and axial adjustment image display control unit 663.

Light control unit 651 provides order to control unit 400, so that each spontaneous emission light of measuring head 200A and 200B, directly Until first step~third step adjustment of optical axis adjustment is completed.In this case, control unit 400 is in response to coming From the order of light control unit 651, measuring head 200A and 200B is made to emit light respectively.

In addition, light control unit 651 provides order to control unit 400, so that in the four steps of optical axis adjustment only Measuring head 200A emits light.At this point, light control unit 651 is also received via the light signal acquiring unit 653 that will be described later From measuring unit 100B output by optical signal.Then, light control unit 651 based on it is received by optical signal come order control Amount of the control of unit 400 processed from the measuring head 200A light emitted.That is, light control unit 651 controls measuring unit 100A Light projection unit 120 operation so that the light of appropriate amount is incident on the light receiving unit 140 of measuring unit 100B.

Light control unit 651 can provide order to control unit 400, so that only measuring head 200B emits light, and can With receive exported from measuring unit 100A by optical signal.Optionally, light control unit 651 can be provided to control unit 400 Order can be received alternately defeated from measuring unit 100A and 100B with alternately emitting light from measuring head 200A and 200B Out by optical signal.In this case, light control unit 651 can be controlled list by optical signal based on received come order The light that 400 control of member emits from one of measuring head 200A and 200B.

Light signal acquiring unit 653 obtain export from measuring head 200A and 200B by optical signal, and will acquired in To be provided to light control unit 651 by optical signal, judge light extraction unit 654 and consistent degree display control unit 657.

Consistent degree display control unit 657 make winner's display unit 610 by the four steps of adjustment optical axis from measurement The time change of the intensity by optical signal of head 200B output is shown as indicating the optical axis oa1 and oa2 of measuring head 200A and 200B Consistent degree information.In the example that above-mentioned optical axis adjusts, the information pair shown in the variation display area da5 of Figure 15 It should be in the information for indicating consistent degree.

Judge light extraction unit 654 in the first step and second step that optical axis adjusts from measuring unit 100A and 100B output is included judging the waveform of light, and the extracted waveform including judging light is provided to by extracting in optical signal Intensity acquiring unit 655 and range display control unit 658.

In the first step of optical axis adjustment, range display control unit 658 shows the waveform of extracted judgement light In wavelength axis.At this point, range display control unit 658 controls main display unit 610, so that the wave for judging light in wavelength axis The position of shape changes according to the distance between the respective variation of reference feature and measuring head 200A and 200B.In addition, range is aobvious Show that control unit 658 will be opposite with scheduled first range to be adjusted between measuring head 200A and the first face of reference feature The first wavelength range wr1 (Figure 10) answered is shown in wavelength axis corresponding with measuring head 200A.In addition, range display control Unit 658 is by corresponding with scheduled second range to be adjusted between measuring head 200B and the second face of reference feature Two wave-length coverage wr2 (Figure 10) are shown in wavelength axis corresponding with measuring head 200B.

In the second step of optical axis adjustment, intensity acquiring unit 655 obtains opposite with measuring head 200A and 200B respectively The intensity for the extracted judgement light answered, and accessed intensity is provided to maximum intensity holding unit 656 and time Change display control unit 659.

In the second step of optical axis adjustment, time change display control unit 659 obtains the main display of display unit 610 The time change of the intensity for the judgement light corresponding with measuring head 200A got.In the example that above-mentioned optical axis adjusts, In Information shown in the variation display area da3 of Figure 12 corresponds to accessed judgement light corresponding with measuring head 200A The time change of intensity.In the second step of optical axis adjustment, time change display control unit 659 makes main display unit 610 The time change of the intensity of the accessed judgement light corresponding with measuring head 200B of display.Show what above-mentioned optical axis adjusted In example, the information shown in the variation display area da4 of Figure 12 corresponds to the judgement light accessed by measuring head 200B Intensity time change.

In the second step of optical axis adjustment, maximum intensity holding unit 656 is updated and is kept and accessed measurement Maximum intensity until current point in time in the time change of the intensity of the corresponding judgement light of head 200A, and by institute The intensity of holding is provided to maximum intensity display control unit 660.In the second step of optical axis adjustment, maximum intensity keeps single Member 656 update and keep it is accessed it is corresponding with measuring head 200B judgement light intensity time change in until working as Maximum intensity until preceding time point, and the intensity kept is provided to maximum intensity display control unit 660.

In the second step of optical axis adjustment, maximum intensity display control unit 660 makes main display unit 610 will be maximum strong The intensity for the judgement light corresponding with measuring head 200A that degree holding unit 656 is kept is shown as history maximum intensity value.In In the second step of optical axis adjustment, maximum intensity display control unit 660 makes main display unit 610 by maximum intensity holding unit The intensity of the 656 judgement light corresponding with measuring head 200B kept is shown as history maximum intensity value.

In the first step of optical axis adjustment, distance adjustment image display control unit 661 shows main display unit 610 For prompting the distance operated as follows to adjust image im2 and second message tx2, the operation is for adjusting measuring head 200A and benchmark The distance between the distance between first face of component and measuring head 200B and the second face of reference feature.

In the second step of optical axis adjustment, stance adjustment image display control unit 662 shows main display unit 610 For prompting the stance adjustment image im4 operated as follows and the 4th message tx4, the operation is for adjusting measuring head 200A and 200B Posture so that optical axis oa1 and oa2 is vertical with the first face of reference feature and the second face.

In the third step and four steps of optical axis adjustment, axial adjustment image display control unit 663 keeps main display single 610 display of member is for prompting the axial adjustment image for making the consistent operation of optical axis oa1 and oa2 of measuring head 200A and 200B Im5 and im6, the 6th message tx6 and the 7th message tx7.

(6) optical axis adjusts measurement processing

Figure 17 and Figure 18 is the flow chart for showing the optical axis adjustment processing carried out in PC 600.It is held in the CPU 601 of Fig. 1 The thickness measure program that is stored in line storage 602 and PC 600 are in response to user to the operating unit 620 of Fig. 1 Operation and with optical axis adjustment modes operation in the case where, carry out Figure 17 and Figure 18 optical axis adjustment processing.

When optical axis adjusts processing beginning, distance adjustment image display control unit 661 shows that main display unit 610 just Beginning status image im1, original state image im1 are indicated between initially set measuring head 200A and 200B and reference feature Positional relationship (step S10).

Then, operation of the distance adjustment image display control unit 661 in response to user to operating unit 620, makes to lead 610 display distance of display unit adjusts image im2, so that user adjusts between measuring head 200A and 200B and reference feature Distance (step S11).

Then, 651 command control unit 400 of light control unit makes two measuring head 200A and 200B transmitting light (steps S12).As a result, from each spontaneous emission light of measuring head 200A and 200B under the control of control unit 400.

Then, operation of the range display control unit 658 in response to user to operating unit 620 makes main display unit Waveform and wavelength axis (step S13) by optical signal of 610 displays from measuring head 200A and the 200B light emitted.Range is shown Control unit 658 will judge the position of light first wave length region wr1 consistent with each other and second wave length region wr2 show with survey It measures in corresponding two wavelength axis of head 200A and 200B (step S14).

Then, operation of the stance adjustment image display control unit 662 in response to user to operating unit 620 makes to lead Display unit 610 shows stance adjustment image im4, so that user adjusts measuring head 200A's and 200B towards reference feature Posture (step S15).

Then, operation of the time change display control unit 659 in response to user to operating unit 620 makes main display Unit 610 display with measuring head 200A and 200B respectively it is corresponding judge light intensity time change (step S16).It is maximum Intensity display control unit 660 makes the main display of display unit 610 judge light via accessed by measuring head 200A and 200B The history maximum intensity value (step S17) of intensity.

Then, operation of the axial adjustment image display control unit 663 in response to user to operating unit 620 makes main aobvious Show that unit 610 shows axial adjustment image im5, so that user carries out the optical axis oa1 and oa2 for making measuring head 200A and 200B Consistent rough adjustment (step S18).

Then, operation of the axial adjustment image display control unit 663 in response to user to operating unit 620 makes main aobvious Show that unit 610 shows axial adjustment image im6, so that user carries out the optical axis oa1 and oa2 for making measuring head 200A and 200B Consistent accurate adjustment (step S19).

At this point, 651 command control unit 400 of light control unit makes the only one measuring head in measuring head 200A and 200B Emit light (step S20).As a result, the only one measuring head under the control of control unit 400, from measuring head 200A and 200B Emit light.

651 command control unit 400 of light control unit, based on a measurement being incident in measuring head 200A and 200B Light on head by optical signal come control another measuring head in measuring head 200A and 200B light transmitting (step S21)。

Later, consistent degree display control unit 657 makes main display unit 610 will be from one in measuring head 200A and 200B Measuring head is incident on the time change of the intensity of the light of another measuring head and history maximum intensity value is shown as indicating optical axis oa1 With the information (step S22) of the consistent degree of oa2.

Finally, order receiving unit 652 terminates at optical axis adjustment the operation of operating unit 620 in response to user Reason.

(7) effect

Second step in above-mentioned confocal displacement sensor 500, when adjusting the optical axis of measuring head 200A and 200B In, it, will be accessed by measuring head 200A and 200B in the state of being disposed with reference feature between measuring head 200A and 200B Judge that the time change of the intensity of light is display together on main display unit 610 together with history maximum intensity value.With measuring head The optical axis oa1 and oa2 of 200A and 200B increases relative to the first face of reference feature or the verticality in the second face, each judgement light Intensity increase.In addition, as the optical axis oa1 and oa2 of measuring head 200A and 200B are relative to the vertical of the first face or the second face Degree is lower, and the intensity of each judgement light is lower.Therefore, user can visually identify it is each judgement light intensity when Between while change, the posture of measuring head 200A and 200B are easily and securely adjusted, so that the light of measuring head 200A and 200B Axis oa1 and oa2 is vertical with the first face of reference feature and the second face.

Later, user can by adjusting the relative positional relationship of measuring head 200A and 200B come make measuring head 200A and The optical axis oa1 of 200B is accurately consistent with oa2.As a result, by making PC after the optical axis of adjustment measuring head 200A and 200B 600 are operated with measurement pattern, to measure the thickness of measurement object S with high precision.

In the optical axis adjustment of measuring head 200A and 200B, operation in response to user to operating unit 620 will be indicated Multiple guide pictures 696~698 of the content of user's operation to be carried out are shown in main display unit 610 in a predetermined order On.Therefore, user can carry out optical axis adjustment in appropriate order.

[2] second embodiment

It will illustrate according to second embodiment about the point different from confocal displacement sensor 500 according to first embodiment Confocal displacement sensor.Figure 19 is the schematic diagram for showing the structure of confocal displacement sensor according to the second embodiment.Such as figure Shown in 19, four optical fiber 314 are set in the measuring unit 100A according to the present embodiment.Four 314 quilts of optical fiber of the present embodiment It is arranged to be located at four angles of the square centered on optical axis oa1 in the face vertical with the optical axis oa1 of lens unit 220 Place, and be arranged to close to each other.

Four light elements corresponding with four optical fiber 314 are provided between measuring head 200A and measuring unit 100A 300A.In such a configuration, light is input to the light of four light element 300A by the light projection unit 120 of measuring unit 100A 311 (Fig. 1) of fibre.In this case, the light for being input to the optical fiber 311 of each light element 300A passes through in measuring unit 100A Corresponding optical fiber 314 and lens unit 220, and it is transmitted to the surface of measurement object S.

Emit from measuring head 200A to the direction of travel and measuring head of four light of measurement object S via four optical fiber 314 The optical axis oa1 of 200A is parallel.Therefore, it in the case where the optical axis oa1 of measuring head 200A is vertical with the surface of measurement object S, surveys At four angles for measuring the square that four light emitting positions on the surface of object S are located at centered on optical axis oa1.

From the transmitting of each optical fiber 314 to measurement object S and the light of the surface reflection of measured object S is input to optical fiber 314. The light for being input to optical fiber 314 is directed to light splitting via the optical fiber 312 (Fig. 1) of light element 300A corresponding with optical fiber 314 Unit 130.

In the present embodiment, the light receiving unit 140 of spectrophotometric unit 130 includes the camera shooting that multiple pixels are arranged with two dimensional form Element (two-dimensional line sensor).Light receiving unit 140 is corresponding with rectangle shape with four optical fiber 314 with measuring head 200A Four light areas of shape.Each light area is used as one dimensional line sensor.

It separates, and gathers in spectrophotometric unit 130 respectively from four light of four optical fiber 314 guidance to spectrophotometric units 130 Coke in four light areas for each wavelength it is different it is one-dimensional in position.It, will from each pixel in each light area It is corresponding with light income to be exported by optical signal to measure-controlling unit 150.In this case, measure-controlling unit 150 obtains Four waveforms by optical signal corresponding with four light areas are taken, and four accessed waveforms are averaged Processing.Handling averagely in the example, which means to generate, is evenly distributed the processing of signal, this, which is evenly distributed signal and corresponds to, wears The average value of the intensity for each wavelength of four light of four optical fiber 314 (pin hole) is crossed.Handling averagely is, for example, to integrate Processing.In addition, measure-controlling unit 150 based on by the waveform by optical signal that is received accessed by handling averagely come Calculate the displacement on the surface of measurement object S.

Measuring unit 100A and measuring unit 100B structure having the same, measuring head 200A and measuring head 200B have phase Same structure, and four light element 300A and four light element 300B structures having the same.Therefore, measuring unit The measure-controlling unit 150 of 100B from measuring head 200B based on emitting to the light of measurement object S and four light being reflected letter Number waveform calculate the displacement on the surface of measurement object S.

When CPU 601 executes the thickness measure program stored in memory 602, PC 600 is with measurement pattern and optical axis Adjustment modes operation.In measurement pattern, measurement is arranged in the thickness of the measurement object S between measuring unit 100A and 100B. In optical axis adjustment modes, before the thickness that measurement object S is measured in measurement pattern, measuring head 200A facing with each other is adjusted With the optical axis of 200B.

According to the measuring unit 100A and 200B of the present embodiment respectively in, obtain four waveforms by optical signal.Therefore, According to the optical axis of the present embodiment adjustment in, in the first step using four by the only one in optical signal by optical signal.That is, In the first step, by measuring head 200A and 200B respectively accessed four by one of optical signal (hereinafter referred to as generation Mass color) waveform and intensity be shown on main display unit 610 (referring to Figure 10).User can visually know as a result, Do not represent light by optical signal waveform and intensity while, easily and securely adjust measuring head 200A and 200B between away from From.

In the second step, it is extracted from four light accessed by measuring head 200A and 200B respectively and judges light.For Measuring head 200A and 200B respectively, extract the judgement light with maximum intensity that four judge in light and judge light as maximum.This Outside, it extracts the judgement light with minimum strength that four judge in light and judges light as minimum.

For each measuring head 200A and 200B, the intensity and the minimum difference judged between the intensity of light that maximum judges light are absolutely To value as the optical axis oa1 and oa2 of measuring head 200A and 200B are relative to the first face of reference feature and the verticality in the second face Increase and reduce.On the other hand, the maximum intensity for judge light and minimum judge the absolute difference between the intensity of light with The optical axis oa1 and oa2 of measuring head 200A and 200B relative to the first face of reference feature and the verticality in the second face reduction and Increase.

Therefore, in the present embodiment, judge that the intensity of light and the minimum difference judged between the intensity of light are absolute using maximum The first face and the second face reciprocal as the optical axis oa1 and oa2 of expression measuring head 200A and 200B relative to reference feature of value Verticality verticality evaluation of estimate.In this case, verticality evaluation of estimate is bigger, the optical axis of measuring head 200A and 200B Oa1 and oa2 is higher relative to the first face of reference feature and the verticality in the second face.On the other hand, verticality evaluation of estimate is smaller, The optical axis oa1 and oa2 of measuring head 200A and 200B are lower relative to the first face of reference feature and the verticality in the second face.

Therefore, in optical axis according to the second embodiment adjustment, in the second step, in the variation display area of Figure 12 The time change of verticality estimated value corresponding with measuring head 200A and 200B is shown in da3 and da4.Thus, user can Easily and securely to adjust measuring head 200A and 200B while visually identifying the time change of verticality evaluation of estimate Posture.

As verticality evaluation of estimate, can be used the maximum intensity for judge light and minimum judge it is simple between the intensity of light Poor absolute value.In this case, verticality evaluation of estimate is smaller, the optical axis oa1 and oa2 of measuring head 200A and 200B relative to First face of reference feature and the verticality in the second face are higher.In addition, verticality evaluation of estimate is bigger, measuring head 200A's and 200B Optical axis oa1 and oa2 is lower relative to the first face of reference feature and the verticality in the second face.

In the second step, it instead of verticality evaluation of estimate, can be shown in the variation display area da3 and da4 of Figure 12 It is corresponding with measuring head 200A and 200B all four judge the time change of the intensity of light.In this case, user Four can be made to judge that the intensity of light is consistent with each other by adjusting the posture of measuring head 200A and 200B, Lai Zengjia measuring head Verticality of the optical axis oa1 and oa2 of 200A and 200B relative to the first face and the second face.

Here, as described above, emitting from measuring head 200A to the row of four light of measurement object S via four optical fiber 314 It is parallel with the optical axis oa1 of measuring head 200A into direction but not consistent with the optical axis oa1 of measuring head 200A.Therefore, in measuring head In the case where four optical fiber 314 of four optical fiber 314 of 200A not towards measuring head 200B, optical axis oa1 and oa2 is different each other It causes.

Therefore, in the optical axis adjustment according to the measuring head 200A and 200B of the present embodiment, main aobvious in four steps Show that the guide picture shown on unit 610 includes for adjusting measuring head 200A and 200B around the rotational angle of optical axis oa1 and oa2 Operational order.In four steps, on main display unit 610 on shown guide picture, scroll from measuring head The time change until current point in time of the intensity of 200A transmitting and four light being incident on measuring head 200B.

Figure 20 and Figure 21 is shown in the four steps of optical axis according to the second embodiment adjustment in main display unit 610 The exemplary figure of the guide picture of upper display.As shown in figure 20, in the present embodiment, when starting the four steps of optical axis adjustment The guide picture 681 shown on main display unit 610 includes axial adjustment image im7, the 9th message tx9, next button 611 With return push-button 612.Axial adjustment image im7 is shown in the center of guide picture 681, and the 9th message tx9 is shown in axis tune The lower section of whole image im7.Next button 611 and return push-button 612 are shown in the lower right corner of guide picture 681.

It is identical with the first embodiment, axial adjustment image im7 carries out user for making measuring head 200A and 200B The consistent image accurately adjusted of optical axis oa1 and oa2, and indicate measuring head 200A and 200B be arranged to opposite to each other and The case where other components are not present between measuring head 200A and 200B.In the axial adjustment image im7 of the present embodiment, use is shown Upright position knob 931 (Fig. 7), horizontal position knob 932 (Fig. 7) and the axis of person's holding meanss 900 (Fig. 7) to be operated turn The position of dynamic driver plate 941 (Fig. 7).9th message tx9 includes following operation instruction, and the operation instruction is for removing measuring head Thin slice between 200A and 200B, and keep measuring head 200A and the optical axis oa1 of 200B accurately consistent with oa2.

9th message tx9 includes following operation instruction, which is used for through operation 931 He of upright position knob Horizontal position knob 932 adjusts the position of measuring head 200A and 200B, to keep optical axis oa1 accurately consistent with oa2.This Outside, the 9th message tx9 further includes following operation instruction, and the operation instruction by operating shaft rotating driver plate 941 for being adjusted Rotational angle of the measuring head 200A and 200B around optical axis oa1 and oa2.

User identifies use by visually identifying axial adjustment image im7 and the 9th message tx9 shown in Figure 20 The content of person's operation to be carried out and the operation object of holding meanss 900 (Fig. 7).Then, user uses behaviour shown in FIG. 1 Make unit 620 to operate next button 611.As a result, showing the guide picture 682 of Figure 21 on main display unit 610.

As shown in figure 21, guide picture 682 includes variation display area da6, the tenth message tx10,612 and of return push-button Conclusion button 613.Variation display area da6 is shown in the center of guide picture 682, and

Tenth message tx10 is shown in the lower section of variation display area da6.Return push-button 612 and conclusion button 613 are shown In the lower right corner of guide picture 682.

In the present embodiment, it in variation display area da6, is scrolled in mode distinct from each other from measuring head 200A emit and be incident on measuring head 200B four light intensity the predetermined time until current point in time in when Between change.

In the case where four optical fiber 314 of four optical fiber 314 of measuring head 200A and measuring head 200B are facing with each other, from The major part of the light of four optical fiber 314 transmitting of measuring head 200A is accurately incident on four optical fiber 314 of measuring head 200B. Therefore, the maximum intensity of four light.Therefore, user is visually identifying four shown by changing in the da6 of display area While the time change of the intensity of a light, upright position knob 931 (Fig. 7), the horizontal position of holding meanss 900 (Fig. 7) are operated Set knob 932 (Fig. 7) and axis rotating driver plate 941 (Fig. 7).As a result, user adjusts the positional relationship of measuring head 200A and 200B And rotational angle, so that measuring head 200A and the optical axis oa1 of 200B are accurately consistent each other with oa2.

In the variation display area da6 of the present embodiment, indicate to be incident on the four of measuring head 200B by chain-dotted line display The history maximum intensity value of the maximum value until current point in time in the time change of the intensity of representative light in a light.This Outside, it is shown in a manner of numerical value in the top of variation display area da6 and is incident on the current intensity of the representative light of measuring head 200B Value and history maximum intensity value.Reset button rb is displayed next in variation display area da6.Reset button rb will be for that will change The indication range of the longitudinal axis and horizontal axis in the da6 of display area resets to pre-set initial value and resets history maximum by force Angle value.

Identical as the 9th message tx9, the tenth message tx10 includes the behaviour for adjusting the position of measuring head 200A and 200B Make the operation instruction of instruction and the rotational angle for adjusting measuring head 200A and 200B.

After keeping measuring head 200A and the optical axis oa1 of 200B and oa2 accurately consistent (after completing four steps), User operates conclusion button 613 using operating unit 620 shown in FIG. 1.Measuring head 200A and 200B are completed as a result, Optical axis adjustment, and the operation mode of PC shown in FIG. 1 600 is switched to measurement pattern from optical axis adjustment modes.

In the confocal displacement sensor 500 according to the present embodiment, as first embodiment, adjusted by optical axis, it can Easily and securely to make the optical axis oa1 and oa2 of measuring head 200A and 200B consistent with each other.

In the measuring unit 100A and 100B according to the present embodiment, based on emitting from measuring head 200A and 200B to measurement Four light of object S obtain four by optical signal.Based on by accessed by four handling averagelies by optical signal by Optical signal calculates the displacement on the surface of measurement object S.In this case, for each wavelength to after equalization by optical signal In the multiple light for having passed through multiple pin holes intensity be averaging.As a result, counteracting due to diffusing reflection and generating random measurement mistake The ingredient of the light of difference.Therefore, measuring unit 100A and 100B respectively in the displacement error on the surface of measurement object S that measures Reduce.As a result, the measurement error of the thickness of measurement object S reduces.

[3] other embodiments

(1) in the above-described embodiments, the range of the distance between measuring head 200A and the first face of reference feature is In the case where in one distance range, the long range of the spike of light will be judged as first wave length in the second step of optical axis adjustment Range wr1 is shown on main display unit 610, however, the present invention is not limited thereto.

In the second step, the range of the distance between measuring head 200A and the first face of reference feature is in first distance It, can be using the long range of the spike for the level-one light for being focused and being reflected by the first face as first wavelength range in the case where in range It is shown on main display unit 610.In this case, user adjusts between measuring head 200A and the first face of reference feature Distance so that the spike morpheme of level-one light is in first wavelength range.As a result, by the first of measuring head 200A and reference feature The range in the distance between face is adjusted to first distance range.

In the above-described embodiments, the range of the distance between measuring head 200B and the second face of reference feature second away from In the case where in range, the long range of the spike of light will be judged as second wave length range in the second step of optical axis adjustment Wr2 is shown on main display unit 610, however, the present invention is not limited thereto.

In the second step, the range of the distance between measuring head 200B and the second face of reference feature is in second distance It, can be using the long range of the spike for the level-one light for being focused and being reflected by the second face as second wave length range in the case where in range It is shown on main display unit 610.In this case, user adjusts between measuring head 200B and the second face of reference feature Distance so that the spike morpheme of level-one light is within the scope of second wave length.The second face of measuring head 200B and reference feature as a result, The distance between range be adjusted to second distance range.

(2) as shown in first embodiment and second embodiment, the type of only one light used in transmitting displacement measurement is used Type with multiple light used in transmitting displacement measurement is as measuring head 200A and 200B.Therefore, measuring unit 100A and 100B Type correspond to connected measuring head 200A and 200B type.

Control unit 400 can be configured to identify the type for the measuring unit for being connected to control unit 400.This In the case of, in the CPU 601 of PC 600, in the class of two measuring units 100A and 100B that control unit 400 is identified In the case that type is different from each other, it can will indicate that the message that not can be carried out thickness measure and optical axis adjustment is shown in main display unit On 610.

(3) in confocal displacement sensor 500 according to the second embodiment, by from measuring head 200A and 200B to measurement Object S emits four light, is measured the displacement on the surface of measurement object S by optical signal based on this four light, but the present invention is not It is limited to this.Measuring head 200A and 200B respectively can irradiate measurement object with multiple light of two light, three light or five or more S.In such a case, it is possible to measure measurement object S's based on the quantity by optical signal corresponding with the transmitting quantity of light The displacement on surface.

(4) in the above-described embodiments, have been described that adjustment is arranged to measuring head 200A and 200B facing with each other Posture is to obtain the example of the thickness of measurement object S, however, the present invention is not limited thereto.

For example, the displacement using one of measuring head 200A and 200B to measure the surface of measurement object S the case where Under, it is expected that the optical axis of measuring head is vertical with the surface of measurement object S to measure with high precision.In this case, on The method of stating can be used for adjusting the posture of one of measuring head 200A and 200B.

That is, at the position to be arranged of the surface that reference feature is arranged in measurement object S.Later, such as above-mentioned implementation Example example it is such, the stance adjustment of one of 200A and 200B can be measured in the same manner so that optical axis with The first face or the second face of reference feature are vertical.

The posture of adjustable measuring head 200A and 200B, so that the optical axis of measuring head 200A and 200B are parallel to each other.Example Such as, as the example of above-described embodiment, the stance adjustment of both 200A and 200B can be measured in the same manner, So that optical axis is vertical with the first face of single reference feature or the second face.In such a case, it is possible to based on respectively with measuring head The height etc. for the step that two displacements that 200A and 200B are correspondingly got are formed on the surface to measure measurement object S.

[4] corresponding relationship between the element of claims and the unit of embodiment

It will be described below the example of the corresponding relationship between each component of claims and each unit of embodiment, But the present invention is not limited to following example.

In the above-described embodiments, the lens unit 220 of measuring head 200A and the optical fiber 314 of measuring head 200A are first confocal The example of optical system, the lens unit 220 of measuring head 200B and the optical fiber 314 of measuring head 200B are the second confocal optical systems Example, the spectrophotometric unit 130 of measuring unit 100A is the example of the first spectrophotometric unit, and the light splitting list of measuring unit 100B Member 130 is the example of the second spectrophotometric unit.

Confocal displacement sensor 500 is the example of confocal displacement sensor, the light projection list of measuring unit 100A and 100B Member 120 is the example of light projection unit, and measuring head 200A is the example of the first head unit, and measuring head 200B is the second head unit Example, the lens unit 220 of measuring head 200A are the examples of the first optical component, and the optical fiber 314 of measuring head 200A is the first needle The example of pole, the lens unit 220 of measuring head 200B are the examples of the second optical component, and the optical fiber of measuring head 200B 314 be the example of the second pin hole component.

Spectrophotometric unit 130, light receiving unit 140 and the measure-controlling unit 150 of measuring unit 100A and 100B are to obtain list The example of member, the CPU 601 of PC 600 is the example of thickness calculation unit, and PC 600 is the example of control device, time change Display control unit 659 is the example of strength information display control unit, and maximum intensity display control unit 660 is maximum The example of intensity display control unit.

First wavelength range wr1 is the example of first wavelength range, and second wave length range wr2 is showing for second wave length range Example, range display control unit 658 is the example of range display control unit, and consistent degree display control unit 657 is consistent degree The example of display control unit, distance adjustment image im2, holding meanss image im3 and second message tx2 are first distance adjustment The example of image and second distance adjustment image, and be that distance adjustment image is aobvious apart from adjustment image display control unit 661 Show the example of control unit.

Stance adjustment image im4 and the 4th message tx4 is that prime adjustment image and second adjust showing for image Example, stance adjustment image display control unit 662 are the examples of stance adjustment image display control unit, axial adjustment image im5, Im6 and im7, the 6th message tx6, the 7th message tx7 and the 9th message tx9 are the examples of axial adjustment image, and axial adjustment image is aobvious Show that control unit 663 is the example of axial adjustment image display control unit, and next step shown on main display unit 610 Button 611 and operating unit 620 are the first operating unit~third operating unit examples.

The light projection unit 120 of measuring unit 100A is the example of the first light projection unit, and the light of measuring unit 100B is thrown The example that unit 120 is the second light projection unit is penetrated, the light receiving unit 140 of measuring unit 100A is showing for the first light receiving unit Example, the light receiving unit 140 of measuring unit 100B is the example of the second light receiving unit, and light control unit 651 is showing for photocontrol portion Example, and main display unit 610 is the example of display unit.

The various other elements with feature or function described in the claims can be used as claims Each element.