阅读说明：本技术 一种激光转移打印氧化石墨烯湿度传感器的制备方法 (A kind of preparation method of laser transfer printing graphene oxide humidity sensor ) 是由 王兴盛 章剑 徐斌 于 2019-09-25 设计创作，主要内容包括：本发明涉及传感器制造领域,具体提供了一种激光转移打印氧化石墨烯湿度传感器的制备方法。本发明方法为：采用激光转移打印金属墨水或金属浆料在硬质或柔性基底上制备金属叉指电极,然后采用同一激光扫描进行金属叉指电极烧结固化；进一步继续采用激光转移打印氧化石墨烯墨水在金属叉指电极的叉指区域制备氧化石墨烯湿敏薄膜,最后采用激光扫描实现氧化石墨烯溶剂蒸发。本发明提供的制备方法灵活可控,加工精度高,能够在硬质或柔性基底上制备湿度传感器,激光转移打印过程可通过电脑程序一步实现,加工效率高,便于规模化生产,有利于湿度传感器性能的提高和商业化应用。(The present invention relates to sensor manufacturing fields, specifically provide a kind of preparation method of laser transfer printing graphene oxide humidity sensor.The method of the present invention are as follows: metallic ink is printed using laser transfer or metal paste prepares metal interdigital electrode on hard or flexible substrates, metal interdigital electrode sintering curing is then carried out using same laser scanning；It continues to prepare graphene oxide humidity sensitive thin film in the inter-digital area of metal interdigital electrode using laser transfer printing graphene oxide ink, the evaporation of graphene oxide solvent is finally realized using laser scanning.Preparation method provided by the invention is flexibly controllable; machining accuracy is high; humidity sensor can be prepared on hard or flexible substrates; laser transfer print procedure can be realized by one step of computer program; it is high in machining efficiency; convenient for large-scale production, be conducive to the raising and commercial applications of humidity sensor performance.)

1. a kind of preparation method of laser transfer printing graphene oxide humidity sensor, which comprises the steps of:

(1) commercial graphene oxide powder is dissolved in deionized water, ethyl alcohol and ethylene glycol mixed solution, ultrasonic vibration processing 30-60min is configured to the graphene oxide ink that concentration is 2-10mg/ml；

(2) graphene oxide ink made from step (1) is prepared one on transparent glass slide by way of spin coating or blade coating Layer is with a thickness of 10-30 μm of graphene oxide film；

(3) commercial metal ink or metal paste are prepared into a layer thickness on transparent glass slide by way of spin coating or blade coating For 10-30 μm of metallic film；

(4) substrate is mounted on laser processing device platform, while transparent glass slide made from step (2) and (3) is installed Above substrate, graphene oxide film and metallic film face substrate, adjust substrate and 50-300 μm of glass slide distance transparent；

(5) metallic film on the transparent glass slide of laser scanning is controlled by computer program, adjustment laser processing parameter is as follows: swashing Optical pulse energy 1-50 μ J, 5-30 μm of spot diameter, repetition rate 500-2000Hz, scanning speed 5-30mm/s, laser irradiation Site absorption energy forms bubble and unvaporized metal is pushed to rush at substrate, realizes that the transfer of metal interdigital electrode in substrate is beaten Print；

(6) the metal interdigital electrode of the control direct scanning step of laser (5) transfer printing, adjustment laser processing parameter are as follows: swashing Optical pulse energy 1-10 μ J, realizes that metal is interdigital by 5-30 μm of spot diameter, repetition rate 1-2MHz, scanning speed 5-30mm/s Electrode sintering curing；

(7) graphene oxide film on the transparent glass slide of laser scanning is controlled, adjustment laser processing parameter is as follows: laser pulse Energy 1-10 μ J, 5-30 μm of spot diameter, repetition rate 500-2000Hz, scanning speed 5-30mm/s, laser irradiation position is inhaled Receiving energy formation bubble pushes unvaporized graphene oxide to rush at substrate, and metal interdigital electrode is pitched after realizing step (6) sintering Refer to that the graphene oxide in region shifts printing；

(8) graphene oxide of the control direct scanning step of laser (7) transfer printing, adjustment laser processing parameter are as follows: laser Pulse energy 1-10 μ J, realizes graphene oxide by 5-30 μm of spot diameter, repetition rate 1-2MHz, scanning speed 5-30mm/s Solvent evaporation.

2. as right 1 requires a kind of preparation method of laser transfer printing graphene oxide humidity sensor, feature Be, the metallic ink or metal paste be in silver ink water, Jin Moshui, copper ink, silver paste, gold paste and copper slurry at least It is a kind of.

3. as right 1 requires a kind of preparation method of laser transfer printing graphene oxide humidity sensor, feature It is, the substrate is selected from hard substrate glass, ceramics, silicon chip and quartz or flexible substrates polyethylene terephthalate One of ester, polyethylene naphthalate, dimethyl silicone polymer and polyimides.

4. as right 1 requires a kind of preparation method of laser transfer printing graphene oxide humidity sensor, feature It is, the laser is same laser, and step (5)-(8) can be realized by one step of computer program.

Technical field

The invention belongs to sensor manufacturing fields, and in particular to a kind of laser transfer printing graphene oxide humidity sensor Preparation method.

Background technique

Humidity sensor plays an important role in fields such as industry, agricultural and measuring of human health.It is common based on fork The humidity sensor for referring to electrode mainly includes interdigital electrode and humidity-sensitive material, converts other for humidity variation by humidity-sensitive material Signal can be tested, has many advantages, such as that small in size, detection limit is low, high sensitivity, stability are good.Graphene oxide has very big Specific surface area and oxygen-containing functional group abundant, be easy to adsorbed water molecule, be highly suitable as the humidity-sensitive material of humidity sensor.

Interdigitated electrode structure is prepared frequently with the methods of lithographic printing, silk-screen printing, inkjet printing.Lithographic printing method needs Mask plate, it is not flexible, and processing technology is complicated；Silk-screen printing also needs mask plate, and interdigital electrode is relatively large sized, printing Being heating and curing for long period is needed afterwards；Inkjet printing be easy to cause spray nozzle clogging, more demanding to ink material, needs after printing Long-time heating is wanted to solidify.Graphene oxide humidity sensitive thin film preparation method includes spraying, spin coating, drop coating and inkjet printing etc..Spray Painting, spin coating and drop coating are difficult to control accurately film thickness and preparation region, influence the performance of sensor；Inkjet printing is to oxidation stone Black alkene size has higher requirements, and be easy to cause spray nozzle clogging；The graphene oxide film of preparation needs to carry out long-time post-processing Evaporate solvent.Currently, the interdigital electrode of humidity sensor and the preparation of graphene oxide film generally require separated progress, simultaneously Later period is respectively necessary for the heat treatment of long period, increases the complexity of technique.

Summary of the invention

To overcome above-mentioned the deficiencies in the prior art, the present invention provides a kind of laser transfer printing graphene oxide humidity sensor The preparation method of device, the advantages such as this method has simple process, flexibility is good, machining accuracy is high and processing efficiency is high, is conducive to The raising and commercial applications of humidity sensor performance.

Technical solution: the present invention is a kind of preparation method of laser transfer printing graphene oxide humidity sensor, described Humidity sensor include substrate, metal interdigital electrode and graphene oxide humidity sensitive thin film, metal interdigital electrode is located in substrate, Graphene oxide humidity sensitive thin film is located at the inter-digital area of metal interdigital electrode.

Specific step is as follows for preparation method:

(1) commercial graphene oxide powder is dissolved in deionized water, ethyl alcohol and ethylene glycol mixed solution, at ultrasonic vibration 30-60min is managed, the graphene oxide ink that concentration is 2-10mg/ml is configured to；

(2) graphene oxide ink made from step (1) is made on transparent glass slide by way of spin coating or blade coating The graphene oxide film that standby a layer thickness is 10-30 μm；

(3) commercial metal ink or metal paste are prepared on transparent glass slide to one layer by way of spin coating or blade coating With a thickness of 10-30 μm of metallic film；

(4) substrate is mounted on laser processing device platform, while by transparent glass slide made from step (2) and (3) It is mounted on above substrate, graphene oxide film and metallic film face substrate, adjust substrate and transparent glass slide distance 50- 300μm；

(5) metallic film on the transparent glass slide of laser scanning is controlled by computer program, adjustment laser processing parameter is such as Under: pulsed laser energy 1-50 μ J, 5-30 μm of spot diameter, repetition rate 500-2000Hz, scanning speed 5-30mm/s, laser Irradiated site absorbs energy formation bubble and unvaporized metal is pushed to rush at substrate, realizes the transfer of metal interdigital electrode in substrate Printing；

(6) the metal interdigital electrode of the control direct scanning step of laser (5) transfer printing, adjustment laser processing parameter is such as Under: pulsed laser energy 1-10 μ J, realizes metal by 5-30 μm of spot diameter, repetition rate 1-2MHz, scanning speed 5-30mm/s Interdigital electrode sintering curing；

(7) graphene oxide film on the transparent glass slide of laser scanning is controlled, adjustment laser processing parameter is as follows: laser Pulse energy 1-10 μ J, 5-30 μm of spot diameter, repetition rate 500-2000Hz, scanning speed 5-30mm/s, laser irradiating part Position absorbs energy formation bubble and unvaporized graphene oxide is pushed to rush at substrate, realizes the interdigital electricity of metal after step (6) sintering The graphene oxide of pole inter-digital area shifts printing；

(8) graphene oxide of the control direct scanning step of laser (7) transfer printing, adjustment laser processing parameter are as follows: Pulsed laser energy 1-10 μ J, realizes oxidation stone by 5-30 μm of spot diameter, repetition rate 1-2MHz, scanning speed 5-30mm/s Black alkene solvent evaporation.

Optionally, the metallic ink or metal paste are selected from silver ink water, Jin Moshui, copper ink, silver paste, gold paste and copper At least one of slurry.

Optionally, the substrate is poly- to benzene two selected from hard substrate glass, ceramics, silicon chip and quartz or flexible substrates One of formic acid glycol ester, polyethylene naphthalate, dimethyl silicone polymer and polyimides.

Preferably, the laser is picosecond pulse laser, pulse width 10ps, output wavelength 532nm.

The invention has the benefit that preparation method provided by the invention is flexibly controllable, machining accuracy is high, can be in hard Or the metal interdigital electrode of different shape structure is prepared in flexible substrates, while accurately controlling the preparation of graphene oxide film Region, film thickness and pattern form, it is ensured that the performance of humidity sensor is stablized.The humidity sensor of preparation has structure Simply, the advantages that small in size, compatible rigidity and flexible substrates, step (5)-(8) can be realized by one step of computer program, processing effect Rate is high, is convenient for large-scale production.

Detailed description of the invention

Fig. 1 is the structural schematic diagram of graphene oxide humidity sensor in the present invention, in which: 1 is substrate, and 2 be metallic tines Refer to electrode, 3 be graphene oxide humidity sensitive thin film.

Specific embodiment

The present invention will be further described below by way of examples.It should be understood that specific reality described herein Example is only used as explaining the present invention, does not limit the present invention.