阅读说明：本技术 绝缘子及石英舟 (Insulator and quartz boat ) 是由 宋德鹏 姜良斌 于 2019-09-23 设计创作，主要内容包括：本发明公开了一种绝缘子及石英舟,其中绝缘子,用于石英舟上电极片间的定位和绝缘,包括：绝缘子本体,具有第一端和与该第一端相对的第二端；第一定位部,在第一端和第二端各有一个,以使第一端与第一端侧电极片间,以及第二端与第二端侧电极片间脱开第一距离；其中,第一定位部外径小于绝缘子本体外径,而由所述第一距离确定出第一狭缝。依据本发明的绝缘子可有效的降低因沉积碳而倒置的绝缘性能下降问题的影响。(The invention discloses a kind of insulator and quartz boats, and wherein insulator, the positioning and insulation between pole piece are powered on for quartz boat, comprising: insulator body has first end and the second end opposite with the first end；First positioning region respectively has one in first end and second end, so as to disengage first distance between first end and first end lateral electrode piece and between second end and second end lateral electrode piece；Wherein, the first positioning region outer diameter is less than insulator body outer diameter, and determines the first slit by the first distance.Insulator according to the present invention can effectively reduce the influence of the inverted decreasing insulating problem because depositing carbon.)

1. a kind of insulator powers on positioning and insulation between pole piece for quartz boat characterized by comprising

Insulator body has first end and the second end opposite with the first end；

First positioning region respectively has one in first end and second end, so that between first end and first end lateral electrode piece and second First distance is disengaged between end and second end lateral electrode piece；

Wherein, the first positioning region outer diameter is less than insulator body outer diameter, and determines the first slit by the first distance.

2. insulator according to claim 1, which is characterized in that the depth of the first slit is 4 ~ 15 times of first distance.

3. insulator according to claim 1 or 2, which is characterized in that first distance is not less than 0.8mm, and and electrode slice Institute's on-load voltage is positively correlated；

First distance is not more than 3mm.

4. insulator according to claim 1, which is characterized in that the first ring washer is in the first positioning region or is molded over insulation The protrusion with center via hole at sub- body end center.

5. insulator according to claim 1, which is characterized in that insulator body includes

First structure: the insulator body for having the first structure includes an outer barrel and an interior bucket, interior bucket bucket bottom and outer barrel bucket bottom It is provided with via hole；Be embedded into outer barrel by inlet of interior bucket bung hole end, and make interior bucket bung hole end and outer barrel bucket bottom there are second away from From or directly engaged with outer barrel bucket bottom；There are third distances between radial direction, interior bucket outer wall and outer barrel inner wall；Interior bucket bucket bottom lateral surface First end end face is constituted, outer barrel bucket bottom lateral surface constitutes second end end face；

Second structure: the insulator body for having second structure includes one group of insulating trip of axial alignment, between adjacent insulating trip Second distance is determined based on the second positioning region, and the second slit is determined by the second distance；Or

Third structure: the insulator body for having the third structure includes the identical staving of an enantiomorph, two staving bottom pairings； Staving is multilayered structure, each interlayer coaxial line, and there are the 4th distances for adjacent interlayer.

6. insulator according to claim 5, which is characterized in that in first structure, provide a sleeve or positioning component with For the axially position between outer barrel and interior bucket；

If positioning component, which includes that a grade sleeve and one second ring washer, the diameter of second ring washer are big In the diameter of secondary sleeve；There are also an adjustment gasket between the second ring washer and outer barrel bottom, the diameter of the adjustment gasket is less than the The diameter of two ring washers；

Second distance is 0.5 ~ 2mm.

7. insulator according to claim 1, which is characterized in that the insulator body and first positioning region are Quartz material.

8. one kind has the quartz boat of any insulator of claim 1 ~ 7, the insulator is used for quartz boat top electrode Insulation between piece.

9. quartz boat according to claim 8, which is characterized in that the fixed link for powering on pole piece assembling for quartz boat is stone English bar, the quantity of quartz rod are 3 ~ 6；

Correspondingly, the fixation hole of respective numbers is provided on electrode slice, quartz rod successively wears electrode slice by fixation hole, adjacent The insulator is arranged on quartz rod between electrode slice.

10. quartz boat according to claim 9, which is characterized in that quartz rod one end is bolt head, and the other end is screw rod, It is adapted to quartzy nut, for fastening.

Technical field

The present invention relates to a kind of insulators, and the invention further relates to a kind of quartz boats equipped with the insulator.

Background technique

As the great development of new material industry, such as graphene, gallium nitride, silicon carbide material are divided into application end ten It is ripe, it can be applied to the fields such as display, laser projection, illumination, electrotechnical, electronic, aerospace and space flight, but raw material preparation cost is high High become limits the major obstacles that its Rapid Popularization is applied, at present LPCVD(Low Pressure Chemical Vapor Deposition, low-pressure chemical vapour deposition technique) it is a kind of higher production technology of production graphene efficiency, and product quality It is higher.

It needs to use graphite boat during the LPCVD growth technique of graphene, by the radio frequency between graphite boat electrode Electric discharge, the carbon in atmosphere is deposited on substrate, to obtain high-quality graphene film.Fig. 1 show a kind of quartz Boat structure, there are multiple first electrode sheets 1 and multiple second electrode sheets 6 on quartz boat, first electrode sheet 1 and second electrode sheet 6 Between be parallel to each other and successively interval setting.The component for realizing interval is between adjacent second electrode plates 6 and first electrode sheet 1 Insulator 4, thus make between second electrode sheet 6 and first electrode sheet 1 keep to set a distance, to obtain desired electric-field strength Degree.

Insulator mostly 4 is spacer structure used in known quartz boat, can be sleeved on fixed link 2 as shown in Figure 1, There are six fixed links 2 in figure, first electrode sheet 1, the insulator 4 of spacer shape, second electrode sheet 6 are successively threaded through in fixed link 2, The interval of insulator 4 based on spacer shape keeps adjacent second electrode sheet 6 and first electrode sheet 1 to set a distance.Insulator On the opposite face of the second electrode sheet 6 or first electrode sheet 1 at end where 4 both ends are supported directly on.In LPCVD growth technique, Since, there are carbon, these carbons, also can be in the insulation for electrode slice to be isolated while depositing on workpiece in atmosphere Sub 4 surfaces deposition, after the carbon-coating being deposited on insulator 4 reaches certain thickness, insulator 4 loses insulating properties.Insulator 4 The critical period of conducting can generate electric spark because electrical conductance is poor (resistance is big) during this period, it is possible to will lead to electrode slice and be burnt It ruins.And with the progressive additive of carbon-coating, the conduction property of insulator is more and more stronger, and the electric field strength between electrode slice is more and more weaker, And the technique execution time of the LPCVD made substantially extends, and generates additional energy consumption.

Aiming at the problem that insulator 4 above-mentioned is connected because depositing carbon, effective solution is had no at present in the industry.Some In realization, insulator 4 uses ceramic material, it is intended to by reducing the surface roughness of the insulator 4 of ceramic material, to reduce carbon Deposition, but effect is extremely limited, and current ceramic material surfaces roughness can accomplish Ra0.4, then improves surface essence The cost of degree is too big, therefore, is direct replacement insulator 4 in more selections, thus can generate very big later maintenance.

Summary of the invention

The purpose of the present invention is to provide one kind can effectively mitigate the insulation performance generated because depositing carbon on insulator The insulator for gradually decreasing problem, the present invention also provides a kind of quartz boats for having the insulator.

In an embodiment of the present invention, a kind of insulator is provided, positioning and insulation between pole piece are powered on for quartz boat, is wrapped It includes:

Insulator body has first end and the second end opposite with the first end；

First positioning region respectively has one in first end and second end, so that between first end and first end lateral electrode piece and second First distance is disengaged between end and second end lateral electrode piece；

Wherein, the first positioning region outer diameter is less than insulator body outer diameter, and determines the first slit by the first distance.

Optionally, the depth of the first slit is 4 ~ 15 times of first distance.

Optionally, first distance is not less than 0.8mm, and is positively correlated with electrode slice institute's on-load voltage；

First distance is not more than 3mm.

Optionally, the first positioning region be the first ring washer or be molded over insulator body end center with center via hole Protrusion.

Optionally, insulator body includes

First structure: the insulator body for having the first structure includes an outer barrel and an interior bucket, interior bucket bucket bottom and outer barrel bucket bottom It is provided with via hole；Be embedded into outer barrel by inlet of interior bucket bung hole end, and make interior bucket bung hole end and outer barrel bucket bottom there are second away from From or directly engaged with outer barrel bucket bottom；There are third distances between radial direction, interior bucket outer wall and outer barrel inner wall；Interior bucket bucket bottom lateral surface First end end face is constituted, outer barrel bucket bottom lateral surface constitutes second end end face；

Second structure: the insulator body for having second structure includes one group of insulating trip of axial alignment, between adjacent insulating trip Second distance is determined based on the second positioning region, and the second slit is determined by the second distance；Or

Third structure: the insulator body for having the third structure includes the identical staving of an enantiomorph, two staving bottom pairings； Staving is multilayered structure, each interlayer coaxial line, and there are the 4th distances for adjacent interlayer.

Optionally, in first structure, a sleeve or positioning component are provided for the axially position between outer barrel and interior bucket；

If positioning component, which includes that a grade sleeve and one second ring washer, the diameter of second ring washer are big In the diameter of secondary sleeve；There are also an adjustment gasket between the second ring washer and outer barrel bottom, the diameter of the adjustment gasket is less than the The diameter of two ring washers；

Second distance is 0.5 ~ 2mm.

Optionally, the insulator body and first positioning region are quartz material.

In an embodiment of the present invention, a kind of quartz boat for having aforementioned dielectric is additionally provided, the insulator is used for Quartz boat powers on the insulation between pole piece.

Optionally, the fixed link for powering on pole piece assembling for quartz boat is quartz rod, and the quantity of quartz rod is 3 ~ 6；

Correspondingly, the fixation hole of respective numbers is provided on electrode slice, quartz rod successively wears electrode slice by fixation hole, adjacent The insulator is arranged on quartz rod between electrode slice.

Optionally, quartz rod one end is bolt head, and the other end is screw rod, quartzy nut is adapted to, for fastening.

, it should be understood that the air-flow for carrying carbon dust flows between electrode slice is formed by electric field in such as PLCVD growth technique Dynamic, flowing of the carbon dust between electrode slice shows the advection state for being roughly parallel to electrode slice.It is whole relative to traditional insulator Body is exposed to the situation in the air-flow for carrying carbon dust, and in an embodiment of the present invention, insulator body cooperates the first positioning region For the setting and insulation of adjacent electrode distance between commutator segments, wherein the first positioning region is relatively small, thus the two of insulator body End forms the first slit.On the one hand first slit in end side, is based on newton internal friction, in end side portion (i.e. side where electrode slice) Air-flow velocity is relatively low, meanwhile, the first slit can generate bigger flow resistance, further reduced air-flow velocity or complete inhibition Air-flow passes through.And machinery field predictably, when fit clearance is sufficiently small, or even being capable of complete barrier fluid Pass through, the principle of this i.e. labyrinth seal.To sum up, based on boundary friction and slit to the inhibiting effect of air-flow velocity, so that carbon Deposition of the element at the first slit can be effectively suppressed perhaps reduce thus at the first positioning region will not or longer Time in will not deposit the carbon-coatings of enough conductings, significantly reduce the later maintenance burden of quartz boat.

Detailed description of the invention

Fig. 1 is a kind of known quartz boat structure schematic diagram.

Fig. 2 is a kind of known fit structure schematic diagram of electrode slice and insulator.

Fig. 3 is by being adapted to insulator structure schematic diagram in first embodiment.

Fig. 4 is by being adapted to insulator structure schematic diagram in second embodiment.

Fig. 5 is by being adapted to insulator structure schematic diagram in 3rd embodiment.

In figure: 1. first electrode sheets, 2. fixed links, 3. nuts, 4. insulators, 5. slots, 6. second electrode sheets, 7. supports Block, 8. supporting blocks, 9. connecting rods, 10. stabilizer blades, 11. connecting rods, 12. interior buckets, 13. outer barrels, 14. first gaskets, 15. positioning sleeves, 16. the second gasket, 17 third gaskets, 18. insulating trips, 19. the 4th gaskets, 20 insulation sleeves.

Specific embodiment

Used insulator 4 is generally set type structure on quartz boat, as shown in Figure 1,7 electrode slices are (also known as electric in Fig. 1 Pole plate) what is be parallel to each other is an entirety, the insulator being sleeved in fixed link 2 by six 2 attaching nut 3 of fixed link assembly 4 for the insulation between adjacent electrode piece, and determines the distance between adjacent electrode plates by the axial length of insulator 4.

In general, the air-flow for carrying carbon dust is flowed through in a manner of advection the space between electrode plate.About newton The boundary friction effect of internal friction is more proximate to based on the conventional experience of life it may also be appreciated that such as the water flow in river Line, water velocity is faster, conversely, being more proximate to bank, water velocity is slower, and the boundary for being that riverbank generates avris water flow is rubbed Stress effect is wiped, avris water flow generates internal friction to inside water flow, and so on, riverbank is to the damping of water flow with one apart from negative It closes, the water flow distance on the distance, that is, riverbank and specified region.Similarly, electrode slice also complies in newton the damping of air-flow and rubs The principle of power, close to electrode slice side, air-flow it is relatively lower speed.

In addition, another principle that the present invention is relied on actually is also based on the principle of newton internal friction, Ke Yili Solution is at labyrinth seal structure, only in an embodiment of the present invention, first provides the first slit, since it is determined that the first slit Distance is smaller between two components, and boundary friction effect is stronger, and in some implementations, when the first slit is sufficiently small, boundary is rubbed The flowing for being enough to completely inhibit the first slit interior air-flow is wiped, in more applications, when the first slit is relatively large, boundary friction It then can at least weaken the speed of air-flow.

To sum up, under conditions of 4 axial length of insulator determines, two the first slits are constructed in the both ends of insulator 4, Significantly to reduce because of later maintenance problem caused by insulation.

Wherein, the axial length of insulator 4 is used to determine as previously described the distance between adjacent electrode piece, and the first slit Then constitute the structure for weakening air velocity or completely inhibiting air-flow flowing at the first slit.

Fig. 3 ~ 5 are shown in three embodiments, and shared feature is respectively to be formed with one in two end sides of insulator 4 First slit remembers that part of the insulator 4 between two first slits is insulator body, the portion of insulator body and electrode slice It is divided into the first positioning region.

The first slit is formed between the outer peripheral surface of first positioning region, insulator body and electrode slice.

It is an external member on the whole for insulator 4 used on quartz boat, is similar to axis Sleeve in upper part, for the axially position between parts on shaft.In quartz boat technical field, electricity is being provided using insulator 4 Between pole piece under conditions of axially position, should also have insulating properties.

Fig. 3 ~ three embodiments shown in fig. 5 are that more preferred embodiment, insulator body part is one total At part, it is to be understood that under the requirement of the bottom of the present invention time, insulator body may be constructed a monomer structure, Rather than assembly structure.

Currently, it is set type structure with the foundation structure of the insulator 4 on quartz boat, can covers as shown in Figure 1 In fixed link 2, in an embodiment of the present invention, determined based on fixed link 2 axial, radial.It is set accordingly, due to insulator 4 Part, referential are consistent with fixed link 2.

External member feature based on insulator body, and there is first end and the second end opposite with the first end.Traditional Insulator 4 is an isometrical round buss structure, electrode chip bonding of the both ends directly with place end, when 4 table of insulator on the whole Face deposits more carbon after forming carbon-coating, and the insulation performance of insulator 4 disappears.

In an embodiment of the present invention, insulator body and the first positioning region are formed by insulator 4 and are equivalent to drill holder Cylinder, wherein the first positioning region respectively has one at the both ends of insulator body, thus make between first end and first end lateral electrode piece, And first distance is disengaged between second end and second end lateral electrode piece；The first distance is obviously true by the length institute of the first positioning region It is fixed.

It is subject to corresponding, the first positioning region outer diameter is less than insulator body outer diameter, and determines the by the first distance One slit.Due to the presence of slit, based on the principle that the embodiment of the present invention above-mentioned is relied on, it is not easy to sink on the first positioning region Carbon distribution will not may deposit carbon if slit depth-to-width ratio is sufficiently large completely on first positioning region, open circuit formed here, even if It is that thicker carbon-coating is deposited in insulator body, still will not lead to the problem of is connected insulator 4 because of carbon-coating conduction.

Typically, it is located at second gasket 16 at both ends as shown in Figure 3,17 He of third gasket at both ends is located in Fig. 4 The 4th gasket 19 in Fig. 5, these gaskets constitute the first positioning region, and outer diameter is relatively small, relative to the outer of such as outer barrel 13 Diameter is much smaller, to will form slit between outer barrel 13 and such as first electrode sheet 1, i.e., the first slit above-mentioned is based on side Boundary's friction, the first slit can generate very big flow resistance, to even have on Carbon deposition to such as the second gasket 16, be deposited Amount is also very limited, is not enough to generate conducting, to greatly reduce the later maintenance of quartz boat.

In general, the first slit is deeper, about few but too deep slit on Carbon deposition to such as the second gasket 16 needs The outer diameter of the insulator body of adaptation is bigger, so that bigger electrode slice surface can be covered.Therefore, available, the first slit Depth be 4 ~ 15 times of first distance.

It is further preferred that the depth of the first slit is 5 times of first distance.

It is understood that entire length is usually more than 18mm, relatively for insulator 4 used in quartz boat For, insulator body occupies the major part of 4 entire length of insulator, in contrast, the first slit be adapted to first away from From will not be very big.

In a preferred embodiment, first distance be not less than 0.8mm, the first factor that first distance is considered be breakdown away from From when insulator body deposited carbon layer forms conductor, first distance to be hit between insulator body and electrode slice It wears.

The operating voltage being adapted to accordingly, due to different quartz boats is not identical, and voltage is bigger, and striking distance is also Bigger, therefore, first distance and electrode slice institute's on-load voltage are positively correlated.

In addition, first distance is not more than 3mm.

In the structure shown in Fig. 3 ~ 5, the first positioning region is all made of gasket, in an embodiment of the present invention, the first positioning The characteristics of portion and preferred quartz material production of insulator body, quartz material is that molding is relatively easy, and therefore, the first positioning region can To construct in insulator body, and protrusion is molded in insulator body end.

Fig. 3 ~ Fig. 5 shows three kinds of 4 structures of insulator, explains one by one below to the structure of these three insulators 4.

The first structure of insulator 4 embodies in the embodiment shown in fig. 3, as it can be seen that insulator body has one in figure Outer barrel 13 and an interior bucket 12, " bucket " therein are used to indicate the cylinder at one end band bottom, and the bottom of institute's band adapts to tube-in-tube structure, answers It is provided with centre bore, which is used as the via hole for wearing fixed link 2.

Wherein, interior bucket 12 is embedded into outer barrel 13 by inlet of interior bucket bung hole end, is specifically found in Fig. 3, interior bucket 12 and outer 13 coaxial lines of bucket, can be based on the cooperation between the two and fixed link 2 to guarantee concentricity.

In structure shown in Fig. 3, there are second distances with outer barrel bucket bottom at interior bucket bung hole end, and the second distance is by Fig. 3 Shown in second gasket 16 determine.In some embodiments, interior bucket bung hole can directly be engaged with outer barrel bucket bottom.

Second distance is 0.5 ~ 2mm.

In Fig. 3, interior bucket 12 is nested with outer barrel 13, itself forms a labyrinth structure, is easy to generate frictional property in more preferably Energy.

There are third distances between radial direction, interior bucket outer wall and outer barrel inner wall；Interior bucket bucket bottom lateral surface constitutes first end end face, Outer barrel bucket bottom lateral surface constitutes second end end face.

The via hole and the via hole at outer barrel bucket bottom at interior bucket bucket bottom bucket bottom and the cooperation of fixed link 2 generally use the side of clearance fit Formula, therefore, the concentricity between interior bucket 12 and outer barrel 13 are relatively poor, in a preferred embodiment, need using axial component, It is compressed by axial, to eliminate the deflection of outer barrel 13 and interior bucket 12 caused by fit clearance.

Specifically, referring to structure shown in Fig. 3, each second gasket 16 positioned at both ends constitutes above-mentioned first Positioning region, as gasket part, the pretightning force based on assembly and kept between insulator body and corresponding terminal electrode film close Engagement.

There are 15, first gaskets 14 of a positioning sleeve, between 13 bottom of the first gasket 14 and outer barrel also in interior bucket 12 One the second gasket 16, wherein 14 outer diameter of the first gasket is relatively large, greater than the outer diameter of the second gasket 16, also greater than positioning sleeve 15 Outer diameter, to form labyrinth structure.The positioning sleeve 15, the first gasket 14 and the second gasket 16 that set gradually can be used One sleeve member replacement.

Sleeve member ontology can be variable-diameter structure, and form desired labyrinth structure.

4 structure of insulator shown in Fig. 4 is second of structure, is denoted as the second structure, has the insulator of second structure Ontology includes one group of insulating trip 18 of axial alignment, is based on the second positioning region between adjacent insulating trip 18 and determines second distance, and Second slit is determined by the second distance.Second positioning region therein is third gasket 17 shown in Fig. 4.

In Fig. 4, the second slit between adjacent insulating trip 18 insulator 4 can be led caused by significantly more efficient reduction Carbon deposition Logical problem.

In addition, insulator 4 is made of multiple second gaskets 17 and multiple insulating trips 18 in structure shown in Fig. 4, assembly It is relatively easy.

In structure shown in fig. 5, to have the insulator 4 of third structure, has the insulator body packet of the third structure Include the identical staving of an enantiomorph, two staving bottom pairings；Staving is multilayered structure, each interlayer coaxial line, and adjacent interlayer stays There is the 4th distance.

There are two the identical insulation sleeve 20 of structure, back-to-back setting, insulation therein for 4 structure of insulator tool shown in fig. 5 Set 20 is made of multiple stavings of coaxial line, and the gap between staving is conducive to generate bigger flow resistance.

Traditional insulator generallys use ceramics, and ceramics are easy to deposit carbon, and surface smoothness is not easy to improve, at this In the embodiment of invention, the insulator body and first positioning region are quartz material, and quartz material is easily obtained 1 grade Or 2 class precisions, i.e. mirror surface accuracy, it is not easy to be infiltrated by fluid.

Quartz boat according to claim 9, which is characterized in that quartz rod one end is bolt head, and the other end is screw rod, It is adapted to quartzy nut, for fastening.