阅读说明：本技术 一种制备大规模集成电路用高纯钨粉的混料装置 (Mixing device for preparing high-purity tungsten powder for large-scale integrated circuit ) 是由 林坤 王少波 王亚峰 马朝选 于 2021-08-23 设计创作，主要内容包括：本发明提供了一种制备大规模集成电路用高纯钨粉的混料装置,包括承载台,所述承载台上表面一侧固定有竖杆,所述竖杆上端转动连接有混合箱下表面的一端；所述承载台内设有空腔,所述空腔内安装有液压缸,所述液压缸的活塞杆末端固定有移动板,所述移动板上表面两端均转动连接有斜杆,两个斜杆上端均转动连接在混合箱下表面,且远离所述竖杆；所述混合箱一侧外壁安装有第一搅拌机构,所述混合箱上方设置有第二搅拌机构。本发明通过第一搅拌机构和第二搅拌机构保证原料的混合效果,能够有效提高制备高纯钨粉的制备效率,为后续加工提供充分的条件。(The invention provides a mixing device for preparing high-purity tungsten powder for a large-scale integrated circuit, which comprises a bearing table, wherein a vertical rod is fixed on one side of the upper surface of the bearing table, and the upper end of the vertical rod is rotatably connected with one end of the lower surface of a mixing box; a cavity is formed in the bearing table, a hydraulic cylinder is installed in the cavity, a movable plate is fixed at the tail end of a piston rod of the hydraulic cylinder, two ends of the upper surface of the movable plate are rotatably connected with inclined rods, and the upper ends of the two inclined rods are rotatably connected to the lower surface of the mixing box and far away from the vertical rod; a first stirring mechanism is installed on the outer wall of one side of the mixing box, and a second stirring mechanism is arranged above the mixing box. According to the invention, the mixing effect of the raw materials is ensured by the first stirring mechanism and the second stirring mechanism, the preparation efficiency of preparing the high-purity tungsten powder can be effectively improved, and sufficient conditions are provided for subsequent processing.)

1. The mixing device for preparing the high-purity tungsten powder for the large-scale integrated circuit comprises a bearing table (10), and is characterized in that a vertical rod (16) is fixed on one side of the upper surface of the bearing table (10), and the upper end of the vertical rod (16) is rotatably connected with one end of the lower surface of a mixing box (5); a cavity is formed in the bearing table (10), a hydraulic cylinder (17) is installed in the cavity, a movable plate (22) is fixed at the tail end of a piston rod of the hydraulic cylinder (17), two ends of the upper surface of the movable plate (22) are rotatably connected with inclined rods (8), the upper ends of the two inclined rods (8) are rotatably connected to the lower surface of the mixing box (5) and far away from the vertical rod (16); a first stirring mechanism is installed on the outer wall of one side of the mixing box (5), and a second stirring mechanism is arranged above the mixing box (5).

2. The mixing device for preparing high-purity tungsten powder for the large-scale integrated circuit according to claim 1, wherein the first stirring mechanism comprises a first motor mounting support (24), the first motor mounting support (24) is fixedly mounted on the outer wall of one end of the mixing box (5) in the horizontal direction, a first driving motor (20) is mounted on the first motor mounting support (24), a first rotating rod (6) is connected to an output shaft end coupler (25) of the first driving motor (20), the end of the first rotating rod (6) is rotatably connected to the inner wall of the other end of the mixing box (5), and a plurality of first stirring blades (7) are fixed on the periphery side of the first rotating rod (6) at equal intervals.

3. The mixing device for preparing high-purity tungsten powder for the large-scale integrated circuit according to claim 1, wherein the second stirring mechanism comprises a transverse plate (3) arranged above the mixing box (5), four support rods (19) are fixed on the lower surface of the transverse plate (3), a second motor mounting support (2) is fixed on the upper surface of the transverse plate (3), a second driving motor (1) is mounted on the second motor mounting support (2), the tail end of an output shaft of the second driving motor (1) is connected with a second rotating rod (13) through a coupling, and a plurality of second stirring blades (4) are fixed on the periphery of the second rotating rod (13) at equal intervals.

4. The mixing device for preparing high-purity tungsten powder for the large-scale integrated circuit according to claim 1, wherein sliding blocks (9) are fixed on two sides of the moving plate (22), the sliding blocks (9) are installed in sliding grooves (21), and the sliding grooves (21) are installed on opposite side walls in the cavity of the bearing table (10); two fixing pieces (23) are fixedly mounted on the moving plate (22), and the two fixing pieces (23) are rotatably connected with the two inclined rods (8).

5. The mixing device for preparing high-purity tungsten powder for the LSI according to claim 1, wherein a feeding hole is formed on one side of the upper surface of the mixing box (5), a connecting cover (14) is installed on the feeding hole, a discharging pipe (15) is arranged on the outer wall of the mixing box (5) on the other side opposite to the first stirring mechanism, and a sealing cover is arranged on the discharging pipe (15).

6. The mixing device for preparing high-purity tungsten powder for the large-scale integrated circuit according to claim 3, wherein an opening (12) is formed in the upper surface of the mixing box (5), a cloth cover (11) is sleeved on the opening (12), a fixing sleeve (26) is fixed in the middle of the cloth cover (11), and the second rotating rod (13) penetrates through the fixing sleeve (26) and extends into the mixing box (5) through the opening (12).

Technical Field

The invention belongs to the technical field of high-purity tungsten powder preparation devices, and particularly relates to a mixing device for preparing high-purity tungsten powder for a large-scale integrated circuit.

Background

High purity tungsten and its silicides are used in very large scale integrated circuits as resistive layers, diffusion barrier layers, etc. and in metal oxide semiconductor type transistors as gate materials, connection materials, etc.

The improvement of the integration level of large scale integrated circuits in microelectronics technologies puts higher demands on materials, and the traditional Si-based devices are no longer suitable. High-purity tungsten or ultra-pure tungsten (5N or 6N) is widely used as gate electrode materials, wiring materials and shielding metal materials of semiconductor large-scale integrated circuits due to its high electromigration resistance, high temperature stability and very high electron emission coefficient. The high-purity metal tungsten target is one of basic materials for manufacturing integrated circuits, and the market prospect of the high-purity metal tungsten target is closely related to the development of the integrated circuits; if the purity of the tungsten target is not high, the operation reliability of the large-scale integrated circuit is reduced, and even a current leakage phenomenon is generated. The high-purity tungsten is adopted, so that the influence of harmful impurities can be reduced and even eliminated, and the performance of a terminal product is improved.

The existing high-purity tungsten needs to be mixed and stirred in advance during preparation and then is subjected to subsequent processing, but the existing preparation mechanism has low mixing efficiency during premixing, the subsequent processing is seriously influenced, and the problem that the purity of the produced tungsten powder is not high is caused. Therefore, it is important to provide a method for preparing high purity tungsten powder for large scale integrated circuit and a mixing device thereof.

Disclosure of Invention

The invention aims to solve the technical problem of providing a mixing device for preparing high-purity tungsten powder for a large-scale integrated circuit, which aims at overcoming the defects of the prior art.

In order to solve the technical problems, the invention adopts the technical scheme that: a mixing device for preparing high-purity tungsten powder for a large-scale integrated circuit comprises a bearing table, wherein a vertical rod is fixed on one side of the upper surface of the bearing table, and the upper end of the vertical rod is rotatably connected with one end of the lower surface of a mixing box; a cavity is formed in the bearing table, a hydraulic cylinder is installed in the cavity, a movable plate is fixed at the tail end of a piston rod of the hydraulic cylinder, two ends of the upper surface of the movable plate are rotatably connected with inclined rods, and the upper ends of the two inclined rods are rotatably connected to the lower surface of the mixing box and far away from the vertical rod; a first stirring mechanism is installed on the outer wall of one side of the mixing box, and a second stirring mechanism is arranged above the mixing box.

Preferably, first rabbling mechanism includes first motor erection support, first motor erection support fixed mounting is on the one end outer wall of mixing box horizontal direction, install a driving motor on the first motor erection support, a driving motor's output shaft end coupling has first rotation pole, the end of first rotation pole is rotated and is connected on mixing box other end inner wall, the week side of first rotation pole is equidistant to be fixed with a plurality of first stirring leaves.

Preferably, second rabbling mechanism is including setting up on the diaphragm that is located the mixing box top, surface mounting has four bracing pieces under the diaphragm, surface mounting has second motor erection support on the diaphragm, install second driving motor on the second motor erection support, there is the second dwang second driving motor's output shaft end through the coupling joint, all sides equidistant of second dwang is fixed with a plurality of second stirring leaves.

Preferably, the two sides of the moving plate are both fixed with sliding blocks, the sliding blocks are arranged in sliding grooves, and the sliding grooves are arranged on the opposite side walls in the cavity of the bearing platform; two fixing pieces are fixedly mounted on the moving plate and are rotatably connected with the two inclined rods.

Preferably, a feed inlet is formed in one side of the upper surface of the mixing box, a connecting cover is installed on the feed inlet, a discharge pipe is arranged on the outer wall of the mixing box, opposite to the first stirring mechanism, on the outer wall of the mixing box, and a sealing cover is arranged on the discharge pipe.

Preferably, the mixing box upper surface is equipped with the opening, the cover is equipped with the cloth cover on the opening, cloth cover middle part is fixed with fixed cover, the second dwang runs through fixed cover to extend to the mixing box in through the opening.

Compared with the prior art, the invention has the following advantages:

according to the invention, the first stirring mechanism and the second stirring mechanism are adopted to fully mix the raw materials in the transverse direction and the vertical direction respectively, so that the preparation efficiency of the high-purity tungsten powder can be effectively improved, the piston rod of the hydraulic cylinder moves to drive the mixing box to oscillate, the mixing efficiency is further improved, the mixing effect of the raw materials is fully ensured, and sufficient conditions are provided for subsequent processing.

The present invention will be described in further detail with reference to the accompanying drawings and examples.

Drawings

Fig. 1 is an external structural view of the present invention.

Fig. 2 is a schematic view of the internal structure of the present invention.

Fig. 3 is a schematic view of the structure of the moving plate of the present invention.

Fig. 4 is an enlarged view of the structure of fig. 2 according to the present invention.

Fig. 5 is an enlarged view of the structure of fig. 2B according to the present invention.

Description of reference numerals:

1-a second drive motor; 2, mounting a support for a second motor; 3, a transverse plate;

4-second stirring blade; 5-a mixing box; 6-a first rotating rod;

7-first stirring blade; 8, a diagonal rod; 9-a slide block;

10, a bearing table; 11-a cloth cover; 12-an opening;

13-second swivelling levers; 14-a connecting cover; 15-a discharge pipe;

16-vertical rod; 17-a hydraulic cylinder; 18-a sealing cover;

19-a support bar; 20 — a first drive motor; 21-a chute;

22-a moving plate; 23-a fixing piece; 24-a first motor mount;

25, a coupler; and 26, fixing the sleeve.

Detailed Description

Example 1

As shown in fig. 1-5, the mixing device for preparing high-purity tungsten powder for a large-scale integrated circuit according to the embodiment includes a bearing table 10, wherein a vertical rod 16 is fixed on one side of the upper surface of the bearing table 10, and the upper end of the vertical rod 16 is rotatably connected with one end of the lower surface of a mixing box 5; a cavity is formed in the bearing table 10, a hydraulic cylinder 17 is installed in the cavity, a movable plate 22 is fixed at the tail end of a piston rod of the hydraulic cylinder 17, two ends of the upper surface of the movable plate 22 are rotatably connected with inclined rods 8, and the upper ends of the two inclined rods 8 are rotatably connected to the lower surface of the mixing box 5 and far away from the vertical rod 16; first rabbling mechanism is installed to 5 one side outer walls of mixing box, 5 tops of mixing box are provided with the second rabbling mechanism. In this embodiment, the platform 10 is fixed on the ground or a plane.

As shown in fig. 2 and 5, in this embodiment, the first stirring mechanism includes a first motor mounting support 24, the first motor mounting support 24 is fixedly mounted on the outer wall of the left end of the mixing box 5, a first driving motor 20 is mounted on the first motor mounting support 24, a first rotating rod 6 is connected to an output shaft end coupling 25 of the first driving motor 20, the end of the first rotating rod 6 is rotatably connected to the inner wall of the other end of the mixing box 5, and a plurality of first stirring blades 7 are fixed on the circumferential side of the first rotating rod 6 at equal intervals. The first rotating rod 6 is arranged between the inner walls of the mixing box 5 and can fully stir the raw materials in the transverse direction.

As shown in fig. 1 and fig. 2, in this embodiment, the second stirring mechanism includes that the second stirring mechanism is arranged on a transverse plate 3 located above a mixing box 5, surface fixing has four supporting rods 19 under the transverse plate 3, the supporting rods 19 are supported on the ground, surface fixing has a second motor mounting support 2 on the transverse plate 3, a second driving motor 1 is installed on the second motor mounting support 2, the end of the output shaft of the second driving motor 1 is connected with a second rotating rod 13 through a coupling, the second rotating rod 13 extends into the mixing box 5, and a plurality of second stirring blades 4 are equidistantly fixed on the peripheral side of the second rotating rod 13. The second stirring mechanism can vertically fully stir the raw materials.

As shown in fig. 2 and 3, in this embodiment, two sides of the moving plate 22 are fixed with sliders 9, the sliders 9 are installed in the sliding grooves 21, and the sliding grooves 21 are installed on the opposite side walls in the cavity of the plummer 10; two fixing pieces 23 are fixedly mounted on the moving plate 22, and the two fixing pieces 23 are rotatably connected with the two inclined rods 8.

As shown in fig. 1 and fig. 2, in this embodiment, a feed inlet is disposed on one side of the upper surface of the mixing box 5, a connection cover 14 is installed on the feed inlet, a discharge pipe 15 is disposed on the outer wall of the mixing box 5 on the other side relative to the first stirring mechanism, and a sealing cover is disposed on the discharge pipe 15. Set up sealed lid on discharging pipe 15, can prevent when stirring the raw materials in mixing box 5, the raw materials splashes outside mixing box 5.

As shown in fig. 2 and 4, in this embodiment, an opening 12 is formed in an upper surface of the mixing box 5, a cloth cover 11 is sleeved on the opening 12, a fixing sleeve 26 is fixed in the middle of the cloth cover 11, and the second rotating rod 13 penetrates through the fixing sleeve 26 and extends into the mixing box 5 through the opening 12. When the cloth cover 11 can prevent the second stirring mechanism from stirring, the raw materials splash to the outside of the mixing box 5, the fixed sleeve 26 can fix the position of the cloth cover 11, and the cloth cover 11 can be effectively ensured to play a role.

The working principle of the mixing device for preparing the high-purity tungsten powder for the large-scale integrated circuit in the embodiment is as follows: the terminal movable plate 22 that is fixed with of piston rod of pneumatic cylinder 17, can drive movable plate 22 motion when the piston rod reciprocating motion of pneumatic cylinder 17, movable plate 22 motion can drive two down tube 8 removal rather than being connected, two down tube 8 are connected with 5 lower surfaces of mixing box, consequently, two down tube 8 take place to remove and can drive 5 removals of mixing box and produce the oscillation, with the raw materials homogeneous mixing in the mixing box 5, in addition first rabbling mechanism and second rabbling mechanism stir at horizontal and vertical two directions respectively, further improve stirring efficiency, effectively promote the preparation efficiency of high pure tungsten powder.

The method for preparing the high-purity tungsten powder for the large-scale integrated circuit by adopting the mixing device comprises the following steps of:

s1, taking tungsten oxide and tungsten powder as raw materials, and putting the raw materials into a mixing box 5 to be uniformly mixed; the mass ratio of the tungsten oxide to the tungsten powder is 9:1, and the particle diameters of the tungsten oxide and the tungsten powder are both 0.2-1.0 mu m;

s2, taking out the uniformly mixed raw materials, putting the raw materials into a tubular furnace, introducing argon into the tubular furnace as a protective gas, keeping the temperature of the tubular furnace for 1 hour after the temperature of the tubular furnace rises to a set reduction temperature, wherein the reduction temperature is 1500 ℃, then closing the argon, and introducing pure hydrogen into the tubular furnace for reduction to prepare ultra-coarse tungsten powder;

s3, heating the ultra-coarse tungsten powder carried by the nitrogen, and spraying tungsten powder particles formed by heating into distilled water for cooling;

and S4, collecting the tungsten powder particle liquid in the S3, and then drying to obtain the spherical tungsten powder.

The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention in any way. Any simple modification, change and equivalent changes of the above embodiments according to the technical essence of the invention are still within the protection scope of the technical solution of the invention.