阅读说明：本技术 一种外延片的快速研磨方法及装置 (Rapid grinding method and device for epitaxial wafer ) 是由 王岩 徐鹏飞 罗帅 季海铭 于 2021-10-27 设计创作，主要内容包括：本发明外延片加工技术领域,公开了一种外延片的快速研磨装置,包括机架以及设于机架上的上料机构和研磨机构,其中上料机构包括上料架,上料架上设有前后方向上设置的滑轨,滑轨上通过滑块设置上料平台,上料架上设有用于驱动上料平台沿滑轨前后方向上移动的直线驱动机构；上料平台上设有上料带,上料带包括多个料座,料座上设有用于容纳工件的圆筒,料座的底部设有用于控制圆筒底部开口的开合的开关单元；上料带前侧或后侧的上料平台上设有与开关单元的拨片配合的挡板,料座通过挡板时开关单元的拨片被挡板推动打开圆筒的开口；本发明通过上料机构对外延片工件进行自动化的上料,提高外延片研磨加工的自动化程度。(The invention discloses a quick grinding device for epitaxial wafers, which belongs to the technical field of epitaxial wafer processing and comprises a rack, and a feeding mechanism and a grinding mechanism which are arranged on the rack, wherein the feeding mechanism comprises a feeding frame, a slide rail arranged in the front-rear direction is arranged on the feeding frame, a feeding platform is arranged on the slide rail through a slide block, and a linear driving mechanism for driving the feeding platform to move upwards along the front-rear direction of the slide rail is arranged on the feeding frame; the feeding platform is provided with a feeding belt, the feeding belt comprises a plurality of material seats, the material seats are provided with cylinders for accommodating workpieces, and the bottoms of the material seats are provided with switch units for controlling the opening and closing of openings at the bottoms of the cylinders; a baffle plate matched with the shifting sheet of the switch unit is arranged on the feeding platform on the front side or the rear side of the feeding belt, and the shifting sheet of the switch unit is pushed by the baffle plate to open the opening of the cylinder when the material seat passes through the baffle plate; according to the automatic feeding device, the epitaxial wafer workpiece is automatically fed through the feeding mechanism, so that the automation degree of the grinding processing of the epitaxial wafer is improved.)

1. A quick grinding device for epitaxial wafers is characterized by comprising a rack, a feeding mechanism and a grinding mechanism, wherein the feeding mechanism and the grinding mechanism are arranged on the rack, the feeding mechanism comprises a feeding frame, a sliding rail is arranged on the feeding frame in the front-rear direction, a feeding platform is arranged on the sliding rail through a sliding block, and a linear driving mechanism for driving the feeding platform to move upwards along the front-rear direction of the sliding rail is arranged on the feeding frame; the feeding platform is provided with a feeding belt, the feeding belt comprises a plurality of material seats, the material seats are connected through a flexible connecting belt to form a belt-shaped structure, the material seats are provided with cylinders for accommodating workpieces, the bottoms of the material seats are provided with switch units for controlling opening and closing of openings at the bottoms of the cylinders, each switch unit comprises a ring body, the ring bodies are connected with the bottoms of the material seats, the ring bodies are internally provided with a plurality of switch pieces which are uniformly distributed in an annular array mode by taking the axis of the ring bodies as the center, the switch pieces are connected with the ring bodies through switch frames, the switch pieces are connected with one side, close to the inner wall of the ring body, of each switch piece in a rotating mode through switch shafts, an inner gear ring matched with the teeth of the switch pieces is arranged on the inner wall of the ring bodies, the inner gear ring is connected with the ring bodies in a rotating mode, a shifting piece is connected to the periphery of the inner gear ring, and an arc-shaped groove matched with the shifting piece is arranged on the ring body;

a baffle matched with the shifting sheet is arranged on the feeding platform on the front side or the rear side of the feeding belt, and when the material seat passes through the baffle, the shifting sheet of the switch unit is pushed by the baffle to slide in the arc-shaped groove of the ring body to open the opening of the cylinder;

the feeding platform is provided with a strip-shaped groove matched with the feeding belt, the width of the strip-shaped groove is greater than that of the material seat, and the width of the strip-shaped groove is smaller than that of the feeding belt; the feeding belt can move rightwards along the strip-shaped groove of the feeding platform;

the grinding mechanism comprises an upper grinding disc, the top of the upper grinding disc is connected with a piston rod of a lifting hydraulic cylinder through an upper grinding frame, the upper grinding frame is rotationally connected with the piston rod of the lifting hydraulic cylinder through a bearing, the lifting hydraulic cylinder is connected with a frame through the upper grinding frame, the lifting hydraulic cylinder is positioned above a feeding platform, a lower grinding disc is arranged below the upper grinding disc, a mandrel penetrating through the lower grinding disc is arranged in the center of the lower grinding disc, a baffle is positioned right in front of the mandrel, the mandrel is connected with the lower grinding disc through a bearing, a spline is arranged at the upper end of the mandrel, a spline groove matched with the upper end of the mandrel is arranged in the center of the upper grinding disc, a plurality of material discs distributed in an even annular array mode by taking the mandrel as the center are arranged on the top surface of the lower grinding disc, the center of each material disc is rotationally connected with the lower grinding disc through a rotating shaft, a plurality of through holes used for placing workpieces are formed in each material disc, and a first gear ring is arranged on the periphery of each material disc, a second gear ring is arranged on the outer side of the lower grinding disc, the second gear ring takes the mandrel as the center, the second gear ring is meshed with the first gear ring of the material disc, and the second gear ring is fixedly connected with the tray;

the mandrel is connected with a first motor through a first transmission mechanism, the lower grinding disc is connected with the first motor through a second transmission mechanism, and the tray is connected with the second motor through a third transmission mechanism.

2. The rapid grinding device for the epitaxial wafer as claimed in claim 1, wherein the linear driving mechanism comprises a pneumatic or hydraulic cylinder disposed on the loading frame, and a piston rod of the pneumatic or hydraulic cylinder is connected to the loading platform.

3. The rapid grinding device for the epitaxial wafer as claimed in claim 1, wherein the linear driving mechanism comprises a ball screw pair disposed on the loading frame, two ends of a screw of the ball screw pair are connected to the loading frame through a bearing, one end of the screw of the ball screw pair is connected to the first linear driving motor, and a nut of the ball screw pair is connected to the loading platform.

4. The rapid grinding device for the epitaxial wafer as claimed in claim 1, wherein the first transmission mechanism comprises a first driven gear disposed on the spindle and a first driving gear connected to an output end of the first motor, the first driven gear is engaged with the first driving gear.

5. The rapid grinding device for the epitaxial wafer as claimed in claim 1, wherein the second transmission mechanism comprises a first sleeve connected with the lower grinding plate, the first sleeve is sleeved on the mandrel and connected with the mandrel through a bearing, a second driven gear is arranged on the first sleeve and meshed with a second driving gear, and the second driving gear is connected with an output end of a first motor.

6. The rapid grinding device for the epitaxial wafer as claimed in claim 5, wherein the third transmission mechanism comprises a second shaft sleeve connected with the tray, the second shaft sleeve is sleeved on the first shaft sleeve and connected with the first shaft sleeve through a bearing, a third driven gear is arranged on the second shaft sleeve and meshed with a third driving gear, and the third driving gear is connected with an output end of a second motor.

7. The grinding method of the rapid grinding device of the epitaxial wafer according to claim 1, characterized by comprising the following steps:

step S1, a first motor drives a material tray to move to the front of a mandrel, a second motor drives two through holes of the material tray to move to the front of the mandrel, and a linear driving mechanism drives a material loading platform to move backwards to enable a cylinder of a material loading belt to align with the through holes on the material tray;

step S2, the feeding belt moves rightwards, a material seat passes through a baffle, and workpieces in a cylinder of the material seat fall into a through hole of a material tray below the material seat;

step S3, the second motor drives the material tray in front of the mandrel to rotate, so that the next through hole of the material tray in front of the mandrel moves to the position under the cylinder of the material seat, then the material loading belt moves to the right, the next material seat passes through the baffle, and the workpiece in the cylinder of the material seat falls into the through hole of the material tray below;

step S4, the step S3 is repeatedly executed until workpieces are placed in all through holes of the tray right in front of the mandrel;

step S5, the first motor drives the next tray to move to the front of the mandrel, and the steps S2 to S4 are repeatedly executed until workpieces are placed in all through holes of all trays;

step S6, the linear driving mechanism drives the feeding platform to move forwards to be separated from the lower part of the upper grinding disc, then the lifting hydraulic cylinder drives the upper grinding disc to move downwards, so that the bottom surface of the upper grinding disc is contacted with a workpiece, and the upper end of the mandrel is inserted into the center of the upper grinding disc;

and step S7, starting the first motor and the second motor, driving the material tray to revolve by the first motor, driving the material tray to rotate by the second motor, performing double-side grinding on the workpiece by matching the upper grinding disc and the lower grinding disc, driving the upper grinding disc to ascend by the lifting hydraulic cylinder after the grinding is finished, and then taking out the workpiece.

8. The rapid grinding device for the epitaxial wafer as claimed in claim 1, wherein a winding roller seat is arranged on the right side of the loading platform, a winding roller is arranged on the winding roller seat, and one end of the winding roller is connected with an output end of a third motor.

9. The apparatus as claimed in claim 8, wherein the take-up roller holder comprises a base, the base is provided with a shaft, the shaft is connected to the base via a bearing, the left end of the base is provided with a rotating sleeve, the rotating sleeve is disposed at the left end of the shaft and rotatably connected to the lower edge of the shaft via a pin, the rotating sleeve is provided with a hole in clearance fit with the left end of the shaft, and the left end of the shaft is provided with a square groove.

Technical Field

The invention relates to the technical field of epitaxial wafer processing, in particular to a rapid grinding device for an epitaxial wafer.

Background

The epitaxial wafer grinding in the prior art is generally to take the epitaxial wafer out of a card plug box and put the epitaxial wafer into a grinding machine for grinding by manpower, and the automation degree is low.

Disclosure of Invention

The invention provides a quick grinding device for epitaxial wafers, which solves the technical problem of low automation degree of manually taking the epitaxial wafers out of a clamping plug box and putting the epitaxial wafers into a grinding machine for grinding in the related technology.

According to one aspect of the invention, the quick grinding device for the epitaxial wafer comprises a rack, a feeding mechanism and a grinding mechanism, wherein the feeding mechanism and the grinding mechanism are arranged on the rack; the feeding platform is provided with a feeding belt, the feeding belt comprises a plurality of material seats, the material seats are connected through a flexible connecting belt to form a belt-shaped structure, the material seats are provided with cylinders for accommodating workpieces, the bottom of each material seat is provided with a switch unit for controlling opening and closing of an opening at the bottom of each cylinder, each switch unit comprises a ring body, the ring bodies are connected with the bottom of each material seat, a plurality of switch pieces which are distributed in an even annular array mode by taking the axis of each ring body as the center are arranged in each ring body, each switch piece is connected with the corresponding ring body through a switch frame, one side, close to the inner wall of each ring body, of each switch piece, which is connected with the corresponding switch piece through a switch shaft and a switch frame in a rotating mode, is provided with an inner gear ring matched with the corresponding switch piece, the inner gear ring is connected with the corresponding ring body in a rotating mode, a shifting piece is connected to the periphery of the inner gear ring, and an arc-shaped groove matched with the shifting piece is formed in each ring body. The shifting sheet drives the inner gear ring to rotate, the inner gear ring is matched with the teeth of the switch sheet to drive the switch sheet to rotate around the switch shaft, so that the inner edge of the switch sheet is close to or far away from the center of the cylinder, and the opening and closing of the opening of the cylinder are controlled.

A baffle matched with the shifting sheet is arranged on the feeding platform on the front side or the rear side of the feeding belt, and when the material seat passes through the baffle, the shifting sheet of the switch unit is pushed by the baffle to slide in the arc-shaped groove of the ring body to open the opening of the cylinder;

the feeding platform is provided with a strip-shaped groove matched with the feeding belt, the width of the strip-shaped groove is greater than that of the material seat, and the width of the strip-shaped groove is smaller than that of the feeding belt; the material loading area can move to the right along the bar groove of material loading platform. When the material loading belt moves along the strip-shaped groove, the material seat is embedded into the strip-shaped groove, so that the workpiece can fall into the lower part of the material loading platform from the material seat.

The grinding mechanism comprises an upper grinding disc, the top of the upper grinding disc is connected with a piston rod of a lifting hydraulic cylinder through an upper grinding frame, the upper grinding frame is rotationally connected with the piston rod of the lifting hydraulic cylinder through a bearing, the lifting hydraulic cylinder is connected with a frame through the upper grinding frame, the lifting hydraulic cylinder is positioned above a feeding platform, a lower grinding disc is arranged below the upper grinding disc, a mandrel penetrating through the lower grinding disc is arranged in the center of the lower grinding disc, a baffle is positioned right in front of the mandrel, the mandrel is connected with the lower grinding disc through a bearing, a spline is arranged at the upper end of the mandrel, a spline groove matched with the upper end of the mandrel is arranged in the center of the upper grinding disc, a plurality of material discs distributed in an even annular array mode by taking the mandrel as the center are arranged on the top surface of the lower grinding disc, the center of each material disc is rotationally connected with the lower grinding disc through a rotating shaft, a plurality of through holes used for placing workpieces are formed in each material disc, and a first gear ring is arranged on the periphery of each material disc, a second gear ring is arranged on the outer side of the lower grinding disc, the second gear ring takes the mandrel as the center, the second gear ring is meshed with the first gear ring of the material disc, and the second gear ring is fixedly connected with the tray;

the mandrel is connected with a first motor through a first transmission mechanism, the lower grinding disc is connected with the first motor through a second transmission mechanism, and the tray is connected with the second motor through a third transmission mechanism.

The first motor can drive the mandrel and the lower grinding disc to rotate, the lower grinding disc can rotate to change the position of the material disc relative to the mandrel, the second motor can drive the tray to rotate, the tray can drive the second gear ring to rotate, the second gear ring and the first gear ring are matched to drive the material disc to rotate, and the position of the through hole of the material disc relative to the axis of the material disc is changed.

The linear driving mechanism comprises an air cylinder or a hydraulic cylinder or a ball screw pair arranged on the feeding frame, a piston rod of the air cylinder or the hydraulic cylinder is connected with the feeding platform, two ends of a lead screw of the ball screw pair are connected with the feeding frame through bearings, one end of the lead screw of the ball screw pair is connected with a first linear driving motor, and a nut of the ball screw pair is connected with the feeding platform.

The first transmission mechanism comprises a first driven gear arranged on the mandrel and a first driving gear connected with the output end of the first motor, and the first driven gear is meshed with the first driving gear. The second transmission mechanism comprises a first shaft sleeve connected with the lower grinding disc, the first shaft sleeve is sleeved on the mandrel and connected with the mandrel through a bearing, a second driven gear is arranged on the first shaft sleeve and meshed with a second driving gear, and the second driving gear is connected with the output end of the first motor. The third transmission mechanism comprises a second shaft sleeve connected with the tray, the second shaft sleeve is sleeved on the first shaft sleeve and connected with the first shaft sleeve through a bearing, a third driven gear is arranged on the second shaft sleeve and meshed with a third driving gear, and the third driving gear is connected with the output end of the second motor.

Furthermore, a winding roller seat is arranged on the right side of the feeding platform, a winding roller is arranged on the winding roller seat, and one end of the winding roller is connected with the output end of the third motor. The winding roller is driven to rotate through the third motor to wind the feeding belt, and the feeding belt is driven to move.

Further, the rolling roller seat includes the pedestal, is equipped with the axis body on the pedestal, is connected through the bearing between axis body and the pedestal, and the left end of pedestal is equipped with the swivel sleeve, and the left end of axis body is located to the swivel sleeve cover, and the swivel sleeve is connected through the lower edge rotation of round pin axle with the axis body, is equipped with on the swivel sleeve with the left end clearance fit's of axis body hole, the left end of axis body is equipped with square recess.

According to an aspect of the present invention, there is provided a method for polishing an epitaxial wafer rapid polishing apparatus, comprising the steps of:

step S1, a first motor drives a material tray to move to the front of a mandrel, a second motor drives two through holes of the material tray to move to the front of the mandrel, and a linear driving mechanism drives a material loading platform to move backwards to enable a cylinder of a material loading belt to align with the through holes on the material tray;

at this time, the vertical distance a = B + C between the axis of the cylinder of the feeding belt located right in front of the mandrel and the axis of the mandrel, where B is the vertical distance between the axis of the tray and the axis of the mandrel, and C is the vertical distance between the axis of the through hole of the tray and the axis of the tray.

Step S2, the feeding belt moves rightwards, a material seat passes through a baffle, and workpieces in a cylinder of the material seat fall into a through hole of a material tray below the material seat;

step S3, the second motor drives the material tray in front of the mandrel to rotate, so that the next through hole of the material tray in front of the mandrel moves to the position under the cylinder of the material seat, then the material loading belt moves to the right, the next material seat passes through the baffle, and the workpiece in the cylinder of the material seat falls into the through hole of the material tray below;

step S4, the step S3 is repeatedly executed until workpieces are placed in all through holes of the tray right in front of the mandrel;

step S5, the first motor drives the next tray to move to the front of the mandrel, and the steps S2 to S4 are repeatedly executed until workpieces are placed in all through holes of all trays;

step S6, the linear driving mechanism drives the feeding platform to move forwards to be separated from the lower part of the upper grinding disc, then the lifting hydraulic cylinder drives the upper grinding disc to move downwards, so that the bottom surface of the upper grinding disc is contacted with a workpiece, and the upper end of the mandrel is inserted into the center of the upper grinding disc;

and step S7, starting the first motor and the second motor, driving the material tray to revolve by the first motor, driving the material tray to rotate by the second motor, performing double-side grinding on the workpiece by matching the upper grinding disc and the lower grinding disc, driving the upper grinding disc to ascend by the lifting hydraulic cylinder after the grinding is finished, and then taking out the workpiece.

The invention has the beneficial effects that:

according to the automatic feeding device, the epitaxial wafer workpiece is automatically fed through the feeding mechanism, so that the automation degree of the grinding processing of the epitaxial wafer is improved.

Drawings

Fig. 1 is a plan view of an apparatus for rapid polishing of an epitaxial wafer according to an embodiment of the present invention;

FIG. 2 is a schematic view of FIG. 1 with the upper abrasive disk and hydraulic lift cylinder removed in accordance with an embodiment of the present invention;

FIG. 3 is an enlarged view at A of FIG. 2;

FIG. 4 is a top view of a loading platform according to an embodiment of the present invention;

FIG. 5 is a top view of a material holder according to an embodiment of the present invention;

FIG. 6 is a bottom view of the material holder of the embodiment of the present invention;

FIG. 7 is a front view of a material holder according to an embodiment of the present invention;

FIG. 8 is a schematic structural diagram of a switch unit according to an embodiment of the present invention;

FIG. 9 is a top view of a grinding mechanism according to an embodiment of the present invention;

FIG. 10 is a cross-sectional view of a grinding mechanism of an embodiment of the present invention;

fig. 11 is a flowchart of a polishing method of a rapid polishing apparatus for an epitaxial wafer according to an embodiment of the present invention;

fig. 12 is a top view of another rapid polishing apparatus for an epitaxial wafer in accordance with an embodiment of the present invention;

FIG. 13 is an overall schematic view of a take-up roller housing of an embodiment of the present invention;

fig. 14 is a cross-sectional view of a take-up roller housing in an embodiment of the present invention.

In the figure: the feeding device comprises a feeding frame 101, a sliding rail 102, a feeding platform 103, a linear driving mechanism 104, a feeding belt 105, a material seat 106, a connecting belt 107, a cylinder 108, a ring body 109, a switch sheet 110, a switch frame 111, an inner gear ring 112, a shifting sheet 113, a baffle plate 114, an upper grinding disc 201, an upper grinding frame 202, a lifting hydraulic cylinder 203, a lower grinding disc 204, a mandrel 205, a material disc 206, a first gear ring 207, a second gear ring 208, a tray 209, a first motor 210, a second motor 211, a first driven gear 212, a first shaft sleeve 213, a second driven gear 214, a second shaft sleeve 215, a third driven gear 216, a seat body 301, a shaft body 302, a rotating sleeve 303, a winding roller 304 and a third motor 305.

Detailed Description

The subject matter described herein will now be discussed with reference to example embodiments. It should be understood that these embodiments are discussed only to enable those skilled in the art to better understand and thereby implement the subject matter described herein, and are not intended to limit the scope, applicability, or examples set forth in the claims. Changes may be made in the function and arrangement of elements discussed without departing from the scope of the disclosure. Various examples may omit, substitute, or add various procedures or components as needed. In addition, features described with respect to some examples may also be combined in other examples.

As shown in fig. 1 to 10, a rapid grinding device for epitaxial wafers comprises a frame, and a feeding mechanism and a grinding mechanism which are arranged on the frame, wherein the feeding mechanism comprises a feeding frame 101, a slide rail 102 which is arranged in the front-rear direction is arranged on the feeding frame 101, a feeding platform 103 is arranged on the slide rail 102 through a slide block, and a linear driving mechanism 104 which is used for driving the feeding platform 103 to move in the front-rear direction along the slide rail 102 is arranged on the feeding frame 101; the feeding platform 103 is provided with a feeding belt 105, the feeding belt 105 comprises a plurality of material seats 106, the material seats 106 are connected through a flexible connecting belt 107 to form a belt-shaped structure, the material seats 106 are provided with cylinders 108 for accommodating workpieces, the bottom of the material seats 106 is provided with a switch unit for controlling opening and closing of the bottom opening of the cylinders 108, the switch unit comprises a ring body 109, the ring body 109 is connected with the bottom of the material seats 106, the ring body 109 is internally provided with a plurality of switch sheets 110 which are uniformly and annularly distributed by taking the axis of the ring body 109 as the center, the switch sheets 110 are connected with the ring body 109 through a switch frame 111, one surface of the switch sheet 110, which is connected with the switch frame 111 through a switch shaft in a rotating manner, close to the inner wall of the ring body 109 is provided with a plurality of teeth, the inner gear ring 112 matched with the teeth of the switch sheet 110 is arranged on the inner wall of the ring body 109, the inner gear 112 is rotatably connected with the ring body 109, and the periphery of the inner gear 112 is connected with a shifting sheet 113, the ring body 109 is provided with an arc-shaped slot matched with the shifting sheet 113. The poking sheet 113 drives the inner gear ring 112 to rotate, the matching of the inner gear ring 112 and the teeth of the switch sheet 110 can drive the switch sheet 110 to rotate around the switch shaft, so that the inner edge of the switch sheet 110 is close to or far away from the center of the cylinder 108, and the opening and closing of the opening of the cylinder 108 are controlled.

A baffle plate 114 matched with the shifting sheet 113 is arranged on the feeding platform 103 on the front side or the rear side of the feeding belt 105, and when the material seat 106 passes through the baffle plate 114, the shifting sheet 113 of the switch unit is pushed by the baffle plate 114 to slide in the arc-shaped groove of the ring body 109 to open the opening of the cylinder 108;

a strip-shaped groove matched with the feeding belt 105 is arranged on the feeding platform 103, the width of the strip-shaped groove is greater than that of the material seat 106, and the width of the strip-shaped groove is less than that of the feeding belt 105; the feeding belt 105 can move to the right along the strip groove of the feeding platform 103. When the feeding belt 105 moves along the strip-shaped groove, the material seat 106 is embedded into the strip-shaped groove, so that the workpiece can fall into the lower part of the feeding platform 103 from the material seat 106.

The grinding mechanism comprises an upper grinding disc 201, the top of the upper grinding disc 201 is connected with a piston rod of a lifting hydraulic cylinder 203 through an upper grinding frame 202, the upper grinding frame 202 is rotationally connected with the piston rod of the lifting hydraulic cylinder 203 through a bearing, the lifting hydraulic cylinder 203 is connected with a frame through the upper grinding frame 202, the lifting hydraulic cylinder 203 is positioned above a feeding platform 103, a lower grinding disc 204 is arranged below the upper grinding disc 201, a mandrel 205 penetrating through the lower grinding disc 204 is arranged at the center of the lower grinding disc 204, a baffle plate 114 is positioned right in front of the mandrel 205, the mandrel 205 is connected with the lower grinding disc 204 through a bearing, a spline is arranged at the upper end of the mandrel 205, a spline groove matched with the upper end of the mandrel 205 is arranged at the center of the upper grinding disc 201, a plurality of material discs 206 uniformly and annularly distributed by taking the mandrel 205 as the center are arranged on the top surface of the lower grinding disc 204, and the centers of the material discs 206 are rotationally connected with the lower grinding disc 204 through a rotating shaft, a plurality of through holes for placing workpieces are formed in the material tray 206, a first gear ring 207 is arranged on the periphery of the material tray 206, a second gear ring 208 is arranged on the outer side of the lower grinding disc 204, the second gear ring 208 takes the mandrel 205 as the center, the second gear ring 208 is meshed with the first gear ring 207 of the material tray 206, and the second gear ring 208 is fixedly connected with a tray 209;

the mandrel 205 is connected with a first motor 210 through a first transmission mechanism, the lower grinding disc 204 is connected with the first motor 210 through a second transmission mechanism, and the tray 209 is connected with a second motor 211 through a third transmission mechanism.

The first motor 210 can drive the spindle 205 and the lower grinding disc 204 to rotate, the lower grinding disc 204 can change the position of the tray 206 relative to the spindle 205 through rotation, the second motor 211 can drive the tray 209 to rotate, the tray 209 can drive the second gear ring 208 to rotate, the second gear ring 208 is matched with the first gear ring 207 to drive the tray 206 to rotate, and the position of the through hole of the tray 206 relative to the axis of the tray 206 is changed.

In one embodiment of the present invention, the linear driving mechanism 104 comprises an air cylinder or a hydraulic cylinder disposed on the loading frame 101, and a piston rod of the air cylinder or the hydraulic cylinder is connected to the loading platform 103.

In an embodiment of the present invention, the linear driving mechanism 104 includes a ball screw pair disposed on the feeding frame 101, two ends of a screw of the ball screw pair are connected to the feeding frame 101 through a bearing, one end of the screw of the ball screw pair is connected to the first linear driving motor, and a nut of the ball screw pair is connected to the feeding platform 103.

In one embodiment of the present invention, the first transmission mechanism includes a first driven gear 212 disposed on the spindle 205 and a first driving gear connected to an output end of the first motor 210, and the first driven gear 212 is engaged with the first driving gear.

In an embodiment of the present invention, the second transmission mechanism includes a first shaft sleeve 213 connected to the lower grinding plate 204, the first shaft sleeve 213 is sleeved on the shaft 205 and connected to the shaft 205 through a bearing, the first shaft sleeve 213 is provided with a second driven gear 214, the second driven gear 214 is engaged with a second driving gear, and the second driving gear is connected to an output end of the first motor 210.

The third transmission mechanism comprises a second shaft sleeve 215 connected with the tray 209, the second shaft sleeve 215 is sleeved on the first shaft sleeve 213 and is connected with the first shaft sleeve 213 through a bearing, a third driven gear 216 is arranged on the second shaft sleeve 215, the third driven gear 216 is meshed with a third driving gear, and the third driving gear is connected with the output end of the second motor 211.

As shown in fig. 11, based on the above-mentioned rapid polishing apparatus for epitaxial wafers, the present invention provides a polishing method for the rapid polishing apparatus for epitaxial wafers, which includes the following steps:

step S1, the first motor 210 drives a tray 206 to move right in front of the mandrel 205, the second motor 211 drives two through holes of the tray 206 to move right in front of the mandrel 205, and the linear driving mechanism 104 drives the feeding platform 103 to move backward, so that the cylinders 108 of the feeding belt 105 are aligned with the through holes on the tray 206;

at this time, a vertical distance a = B + C between the axis of the cylinder 108 of the upper tape 105 located just in front of the mandrel 205 and the axis of the mandrel 205, where B is the vertical distance between the axis of the tray 206 and the axis of the mandrel 205, and C is the vertical distance between the axis of the through hole of the tray 206 and the axis of the tray 206.

Step S2, the feeding belt 105 moves to the right, a seat 106 passes through the baffle 114, and the workpiece in the cylinder 108 of the seat 106 falls into the through hole of the tray 206 below;

step S3, the second motor 211 drives the tray 206 right in front of the spindle 205 to rotate, so that the next through hole of the tray 206 right in front of the spindle 205 moves to the position right below the cylinder 108 of the seat 106, and then the upper tape 105 moves to the right, so that the next seat 106 passes through the baffle 114, and the workpiece in the cylinder 108 of the seat 106 falls into the through hole of the tray 206 below;

step S4, repeating step S3 until all through holes of the tray 206 right in front of the spindle 205 have workpieces;

step S5, the first motor 210 drives the next tray 206 to move to the front of the mandrel 205, and the steps S2 to S4 are repeatedly executed until all through holes of all trays 206 are filled with workpieces;

step S6, the linear driving mechanism 104 drives the feeding platform 103 to move forward to be separated from the lower part of the upper grinding disc 201, then the lifting hydraulic cylinder 203 drives the upper grinding disc 201 to move downward, so that the bottom surface of the upper grinding disc 201 contacts the workpiece, and the upper end of the mandrel 205 is inserted into the center of the upper grinding disc 201;

step S7, the first motor 210 and the second motor 211 are started, the first motor 210 drives the tray 206 to revolve, the second motor 211 drives the tray 206 to rotate, the workpiece is double-side ground by matching the upper grinding plate 201 and the lower grinding plate 204, the lifting hydraulic cylinder 203 drives the upper grinding plate 201 to ascend after grinding is finished, and then the workpiece is taken out.

In one embodiment of the present invention, the supply tape 105 is moved by manual actuation.

As shown in fig. 12, in an embodiment of the present invention, a winding roller seat is disposed on the right side of the feeding platform 103, a winding roller 304 is disposed on the winding roller seat, and one end of the winding roller 304 is connected to an output end of a third motor 305. The winding roller 304 is driven by the third motor 305 to rotate so as to wind the feeding belt 105, and the feeding belt 105 is driven to move.

Further, an unwinding roller seat can be arranged on the left side of the feeding platform 103, an unwinding roller is arranged on the unwinding roller seat, and a winding feeding belt 105 is arranged on the unwinding roller and used for unwinding.

Further, as shown in fig. 13 and 14, the winding roller seat and the unwinding roller seat all include pedestal 301, be equipped with axis body 302 on the pedestal 301, be connected through the bearing between axis body 302 and the pedestal 301, the left end of pedestal 301 is equipped with swivel sleeve 303, the left end of axis body 302 is located to swivel sleeve 303 cover, swivel sleeve 303 is connected along rotating through round pin axle and axis body 302's lower edge, be equipped with on the swivel sleeve 303 with the left end clearance fit's of axis body 302 hole, the left end of axis body 302 is equipped with square recess. The both ends of unreeling roller and wind-up roll 304 set up the square recess complex rectangle end with the left end of axis body 302, rotate the swivel sleeve 303 right during the installation, will unreel the square recess of the left end of axis body 302 in with the tip of wind-up roll or wind-up roll 304, then rotate the swivel sleeve 303 and reset, make the tip of unreeling roller or wind-up roll 304 restricted on the axis body 302 to can transmit the moment of torsion through the axis body 302 and unreel on the roller or the wind-up roll 304.

The embodiments of the present invention have been described with reference to the drawings, but the present invention is not limited to the above-mentioned specific embodiments, which are only illustrative and not restrictive, and those skilled in the art can make many forms without departing from the spirit and scope of the present invention and the protection scope of the claims.