阅读说明：本技术 一种带故障诊断功能的气体负压动力调节系统及诊断方法 (Gas negative pressure power regulating system with fault diagnosis function and diagnosis method ) 是由 万勇 刘宜仔 刘莉 刘雅杰 陈奕湘 田鹏 于 2021-09-30 设计创作，主要内容包括：本发明公开了一种带故障诊断功能的气体负压动力调节系统,包括：流量设定模块,用于设定气体的流量；气体缓冲器,用于形成稳定的负压环境；负压动力单元,用于提供负压,包括通过管线相连的真空泵和第一截止阀,第一截止阀出气口通过第一在线校验转换接头与第一压力表连接,第一截止阀的进气口通过第二在线校验转换接头与第二压力表连接；还公开了一种诊断方法,包括压力表示值误差在线校验；气体换向器功能测试；截止阀功能测试；真空泵能力测试。本发明提供了一种带故障诊断功能的气体负压动力调节系统及诊断方法,当系统出现故障时,可以准确定位故障部件并及时进行维修处理,提高了系统故障排查工作效率。(The invention discloses a gas negative pressure power regulating system with a fault diagnosis function, which comprises: the flow setting module is used for setting the flow of the gas; the gas buffer is used for forming a stable negative pressure environment; the negative pressure power unit is used for providing negative pressure and comprises a vacuum pump and a first stop valve which are connected through a pipeline, wherein the air outlet of the first stop valve is connected with a first pressure gauge through a first online checking conversion joint, and the air inlet of the first stop valve is connected with a second pressure gauge through a second online checking conversion joint; the diagnosis method comprises online checking of the indication error of the pressure gauge; testing the function of the gas commutator; testing the function of the stop valve; and testing the capacity of the vacuum pump. The invention provides a gas negative pressure power regulating system with a fault diagnosis function and a diagnosis method, when a system has a fault, a fault part can be accurately positioned and maintained in time, and the working efficiency of troubleshooting of the system is improved.)

1. The utility model provides a take gaseous negative pressure power governing system of failure diagnosis function which characterized in that includes:

the flow setting module is used for setting the flow of the gas;

a gas buffer for forming a stable negative pressure environment;

the negative pressure power unit is used for providing negative pressure and comprises a vacuum pump and a first stop valve which are connected through a pipeline, an air outlet of the first stop valve is connected with a first pressure gauge through a first online checking adapter, and an air inlet of the first stop valve is connected with a second pressure gauge through a second online checking adapter.

2. The system of claim 1, wherein the online calibration adapter comprises a pressure measurement valve, an inlet of the pressure measurement valve is connected to a pipeline through a pressure measurement interface, and an outlet of the pressure measurement valve is connected to a pressure gauge through an instrument interface; and the gas outlet of the pressure measuring valve is connected with the gas inlet of the check valve, and the gas outlet of the check valve is connected with the standard pressure gauge through a check interface.

3. The system of claim 1 or 2, wherein the negative pressure power unit gas inlet is connected to a first end of a gas diverter, a second end of the gas diverter is connected to a flow limiting device, and a third end of the gas diverter is connected to a gas outlet of a gas buffer.

4. The gas negative pressure power regulating system with the fault diagnosis function as claimed in claim 3, wherein the negative pressure power unit gas outlet is connected with the gas inlet of a second stop valve, and the gas outlet of the second stop valve discharges gas outwards.

5. A diagnostic method applied to the pneumatic negative pressure power regulating system with the fault diagnosis function according to claim 4, characterized by comprising:

s1, checking the indication error of the pressure gauge, entering S2 if the indication error of the pressure gauge passes, and indicating the fault of the pressure gauge if the indication error of the pressure gauge does not pass;

s2, performing a function test on the gas commutator, if the function test is passed, entering S3, and if the function test is not passed, indicating that the gas commutator is in fault;

s3, performing function test on the stop valve, if the test result is passed, entering S4, and if the test result is not passed, indicating that the stop valve is in fault;

s4, testing the capacity of the vacuum pump, entering S5 if the capacity is passed, and indicating the fault of the vacuum pump if the capacity is not passed;

and S5, completing fault diagnosis of the gas negative pressure power regulating system, and normally using the system.

6. The diagnostic method of claim 5, wherein the pressure gauge error check comprises the steps of:

s11, connecting the pressure gauge to be detected and the standard pressure gauge to form a closed system;

s12, selecting a check point, reading and recording indication values of the standard pressure gauge and the pressure gauge to be detected;

s13, selecting different check points, repeating S12, and completing the check of all the check points;

s14, when all indication values of the pressure gauge to be detected are within the error range, the step is S2, and when the indication value of a check point of the pressure gauge to be detected exceeds the error range, the step is S15;

and S15, adjusting, maintaining or replacing the pressure gauge to be detected, and returning to S11 after the pressure gauge is adjusted, maintained or replaced.

7. The diagnostic method of claim 5, wherein the gas diverter functional test comprises the steps of:

s21, communicating the flow limiting device and the negative pressure power unit through the gas reverser, and starting a vacuum pump and a stop valve of the negative pressure power unit;

s22, the gas reverser communicates the gas buffer and the negative pressure power unit in a reversing way, and the pressure value in the gas buffer is tested;

s23, when the pressure value in the gas buffer is reduced, the process goes to S3; when the rest condition occurs, the process goes to S24;

and S24, repairing or replacing the gas reverser, and returning to S21 after the repairing or replacing is finished.

8. The diagnostic method of claim 5, wherein the shut-off valve function test comprises the steps of:

s31, testing the closing function of the stop valve, closing the stop valve, starting a vacuum pump connected with the stop valve, and testing the pressure values of the air outlet and the air inlet of the stop valve respectively;

s32, testing the opening function of the stop valve, namely opening the stop valve on the basis of S31, and respectively testing the pressure values of the air outlet and the air inlet of the stop valve;

s33, when the stop valve passes the function test, the process enters S4; when the stop valve does not pass the function test, the step S34 is entered;

and S34, repairing or replacing the stop valve, and returning to S31 after the repair or replacement is completed.

9. The diagnostic method of any one of claims 5 to 7, wherein the vacuum pump capability test comprises the steps of:

s41, starting the vacuum pump, and starting a stop valve connected with the vacuum pump;

s42, testing the pressure value of the air inlet of the vacuum pump;

s43, comparing the pressure value obtained by the test with the rated working pressure of the vacuum pump, if the pressure value is close to the rated working pressure, entering S5, and if the pressure value is greater than the rated working pressure, entering S44;

and S44, resetting the working condition of the pump, maintaining or replacing the vacuum pump, and returning to S41 after the maintenance or replacement is finished.

Technical Field

The invention relates to the field of control or regulation systems, in particular to a gas negative pressure power regulation system with a fault diagnosis function and a diagnosis method.

Background

The gas negative pressure power regulating system is a power control device for forming gas negative pressure environment, mainly consists of vacuum pump (group), pipeline, gas buffer and flow rate setting module, generally uses air as medium, and can be extensively used in various negative pressure method gas standard devices or some vacuum-pumping systems. As shown in figure 1, the system is a traditional gas negative pressure power regulation system, and a power part is formed by connecting one or more vacuum pumps in parallel. The vacuum pump can be a water ring vacuum pump or a Roots vacuum pump, and the number of the vacuum pumps is determined according to the design capability of the system. When the device works, the required system pressure is determined according to the flow set by the flow setting module, a single vacuum pump or different vacuum pumps in different combinations are started, and the actions of all the parts are controlled, so that a stable negative pressure environment is formed in the gas buffer.

As shown in FIG. 1, a conventional gas negative pressure power regulating system, a vacuum pump VP₁Vacuum pump VP₂Vacuum pump VP₃And a vacuum pump VP₄In a parallel connection mode, the air outlets of the vacuum pumps are converged at one position through a pipeline and discharged to an external space; a pressure gauge P is respectively arranged at the air inlet of each vacuum pump₁₃Pressure gauge P₂₃Pressure gauge P₃₃And a pressure gauge P₄₃Measuring the air inlet pressure when the vacuum pump operates; each vacuum pump air inlet is respectively connected with an automatic stop valve FA₁₃Automatic stop valve FA₂₃Automatic stop valve FA₃₃And automatic stop valve FA₄₃A connection for connecting or disconnecting the pump to the gas buffer (default to a normally closed state); the stop valves are gathered together through pipelines and connected to the gas buffer; the gas buffer is provided with a pressure gauge Pe for measuring the pressure in the gas buffer; the gas buffer is connected with a flow setting module, and a flow monitoring instrument Fe is arranged on the flow setting module.

The traditional gas negative pressure power regulating system firstly sets the system flow through a flow setting module; determining the required system pressure according to the set flow; according to the rated working capacity of each vacuum pump, the required vacuum pumps or the combination thereof are selected and opened one by one, and the corresponding stop valves are also opened synchronously. The system generates vacuum suction force, and the air flows are converged together and discharged to the external space after passing through the flow setting module, the air buffer, the automatic stop valve and the opened vacuum pump. The pressure gauge Pe and the pressure gauge P are used in the working process₁₃To P₄₃And monitoring the pressure of the system, and monitoring the flow of the system through a flow monitoring instrument Fe.

However, the conventional gas negative pressure power regulating system has the following disadvantages:

(1) because the air inlets of the vacuum pumps are gathered together after passing through the stop valves, when the regulating system breaks down, the problems of the pumps, the stop valves and the pressure gauge are difficult to accurately diagnose, namely, the fault diagnosis can not be effectively carried out, and great difficulty is brought to the maintenance work of the power regulating system.

(2) Because the air inlets of the vacuum pumps are gathered together, when one automatic stop valve is not closed tightly or can not be closed, the air suction effect of other pumps can be seriously reduced, and even the pumps can completely fail. For example, now assume a shut-off valve FA₂₃The closing is not tight, and a vacuum pump VP is used at the moment₁While (without vacuum pump VP)₂) The outside air can be passed through the vacuum pump VP₂Pump body, via stop valve FA₂₃Flows into a vacuum pump VP₁Equivalently, the leakage of the negative pressure system reduces the VP of the vacuum pump₁The actual working capacity of the vacuum pump VP can be ensured in severe cases₁And completely failed.

(3) When the regulating system leaks, the number of the vacuum pumps which are started must be increased in order to make the gas buffer reach the same negative pressure environment, and serious system resource waste is caused.

(4) Because the air outlets of the vacuum pumps are directly gathered together, when a certain pump needs to be maintained due to faults, other pumps cannot work, and the power regulating system cannot be used.

Disclosure of Invention

The invention provides a gas negative pressure power regulating system with a fault diagnosis function and a diagnosis method, aiming at overcoming the problem that the gas negative pressure power regulating system in the prior art cannot carry out fault diagnosis when the system fails.

In order to achieve the purpose, the invention adopts the following technical scheme:

a gas negative pressure power regulating system with a fault diagnosis function comprises:

the flow setting module is used for setting the flow of the gas;

a gas buffer for forming a stable negative pressure environment;

the negative pressure power unit is used for providing negative pressure and comprises a vacuum pump and a first stop valve which are connected through a pipeline, an air outlet of the first stop valve is connected with a first pressure gauge through a first online checking adapter, and an air inlet of the first stop valve is connected with a second pressure gauge through a second online checking adapter.

In the invention, the gas negative pressure power regulating system can have a single or a plurality of parallel negative pressure power units, the gas inlets of the plurality of parallel negative pressure power units are combined together and connected with the gas buffer, and the single or a plurality of negative pressure power units can be opened to generate vacuum suction according to actual requirements. The first pressure gauge is connected with the air outlet of the first stop valve, is equivalently connected with the air inlet of the vacuum pump and is used for monitoring the pressure condition of the air inlet of the vacuum pump; the second pressure gauge is connected to the air inlet of the first stop valve, and when the function of the stop valve is detected, the stop valve is judged to be normal or not by comparing the readings of the first pressure gauge and the second pressure gauge at two ends of the stop valve. And an online check adapter is connected between the pipeline and the pressure gauge and can be used for connecting the pressure gauge and a standard pressure gauge to perform online check of the pressure gauge.

Preferably, the online verification adapter comprises a pressure measuring valve, an air inlet of the pressure measuring valve is connected with a pipeline through a pressure measuring interface, and an air outlet of the pressure measuring valve is connected with a pressure gauge through an instrument interface; and the gas outlet of the pressure measuring valve is connected with the gas inlet of the check valve, and the gas outlet of the check valve is connected with the standard pressure gauge through a check interface.

In the invention, the pressure measuring valve is opened, the pressure gauge is communicated with the pipeline when the check valve is closed, and the pressure gauge can be used for detecting the pressure value in the pipeline; and closing the pressure taking valve, opening the check valve, disconnecting the pressure gauge from the pipeline, connecting the pressure gauge with a standard pressure gauge, and checking the pressure gauge by using the standard pressure gauge.

Preferably, the negative pressure power unit air inlet is connected with a first end of the gas commutator, a second end of the gas commutator is connected with a flow limiting device, and a third end of the gas commutator is connected with an air outlet of the gas buffer.

In the invention, the gas commutator has two connection modes, one mode is that the gas outlet of the gas buffer is communicated with the gas inlet of the negative pressure power unit, the other mode is that the flow limiting device is communicated with the gas inlet of the negative pressure power unit, and whether the negative pressure power unit connected with the gas commutator is connected with the whole gas negative pressure power regulating system or not can be determined by switching the two modes.

Preferably, the air outlet of the negative pressure power unit is connected with the air inlet of a second stop valve, and the air outlet of the second stop valve discharges air outwards.

When the second stop valve is closed, the connection relation between the negative pressure power unit connected with the second stop valve and other negative pressure power units can be disconnected, and the negative pressure power unit is isolated together with the gas reverser.

A diagnosis method of a gas negative pressure power regulation system with a fault diagnosis function comprises the following steps:

s1, checking the indication error of the pressure gauge, entering S2 if the indication error of the pressure gauge passes, and indicating the fault of the pressure gauge if the indication error of the pressure gauge does not pass;

s2, performing a function test on the gas commutator, if the function test is passed, entering S3, and if the function test is not passed, indicating that the gas commutator is in fault;

s3, performing function test on the stop valve, if the test result is passed, entering S4, and if the test result is not passed, indicating that the stop valve is in fault;

s4, testing the capacity of the vacuum pump, entering S5 if the capacity is passed, and indicating the fault of the vacuum pump if the capacity is not passed;

and S5, completing fault diagnosis of the gas negative pressure power regulating system, and normally using the system.

In the invention, when a certain component on the gas negative pressure power regulating system breaks down, the problem that negative pressure cannot be generated or the negative pressure effect is not ideal can occur, so the problem of the fault needs to be found out. Typical failure problems of system components are: the indication value of the pressure gauge is inaccurate; a failure of the commutator; the stop valve can not be opened or closed, or the opening and the closing are incomplete; insufficient or damaged pump capacity, etc. Therefore, a specific diagnosis method needs to be designed according to the factors which can cause the gas negative pressure power regulation system to work imperfectly, so that the fault problem can be found quickly.

Preferably, the pressure gauge indication error check comprises the following steps:

s11, connecting the pressure gauge to be detected and the standard pressure gauge to form a closed system;

s12, selecting a check point, reading and recording indication values of the standard pressure gauge and the pressure gauge to be detected;

s13, selecting different check points, repeating S12, and completing the check of all the check points;

s14, when all indication values of the pressure gauge to be detected are within the error range, the step is S2, and when the indication value of a check point of the pressure gauge to be detected exceeds the error range, the step is S15;

and S15, adjusting, maintaining or replacing the pressure gauge to be detected, and returning to S11 after the pressure gauge is adjusted, maintained or replaced.

In the diagnosis method, the calibration of the pressure gauge is the basis of the whole diagnosis method, and the diagnosis of other system components needs to use the reading of the pressure gauge as the basis, so the pressure gauge needs to be calibrated firstly, and the accuracy of the reading of the pressure gauge is ensured.

Preferably, the gas commutator function test comprises the following steps:

s21, communicating the flow limiting device and the negative pressure power unit through the gas reverser, and starting a vacuum pump and a stop valve of the negative pressure power unit;

s22, the gas reverser communicates the gas buffer and the negative pressure power unit in a reversing way, and the pressure value in the gas buffer is tested;

s23, when the pressure value in the gas buffer is reduced, the process goes to S3; when the rest condition occurs, the process goes to S24;

and S24, repairing or replacing the gas reverser, and returning to S21 after the repairing or replacing is finished.

Preferably, the stop valve function test comprises the following steps:

s31, testing the closing function of the stop valve, closing the stop valve, starting a vacuum pump connected with the stop valve, and testing the pressure values of the air outlet and the air inlet of the stop valve respectively;

s32, testing the opening function of the stop valve, namely opening the stop valve on the basis of S31, and respectively testing the pressure values of the air outlet and the air inlet of the stop valve;

s33, when the stop valve passes the function test, the process enters S4; when the stop valve does not pass the function test, the step S34 is entered;

and S34, repairing or replacing the stop valve, and returning to S31 after the repair or replacement is completed.

The diagnosis of the stop valve needs to be performed before the capability test of the vacuum pump, and the problematic stop valve can greatly influence the result of the capability test of the vacuum pump because the capability test of the vacuum pump needs to be performed under the condition that the stop valve can normally work.

Preferably, the vacuum pump capability test comprises the following steps:

s41, starting the vacuum pump, and starting a stop valve connected with the vacuum pump;

s42, testing the pressure value of the air inlet of the vacuum pump;

s43, comparing the pressure value obtained by the test with the rated working pressure of the vacuum pump, if the pressure value is close to the rated working pressure, entering S5, and if the pressure value is greater than the rated working pressure, entering S44;

and S44, resetting the working condition of the pump, maintaining or replacing the vacuum pump, and returning to S41 after the maintenance or replacement is finished.

The capability test of the vacuum pump in the invention is at the end of the whole diagnosis test process, the working state of the vacuum pump can be accurately detected only under the condition that the pressure gauge, the gas reverser and the stop valve can work normally, and the capability of the vacuum pump can not meet the requirement when the working condition of the pump does not meet the requirement or the pump has a fault problem.

The invention has the following beneficial effects: the invention designs the negative pressure power regulating system with the fault diagnosis function and the diagnosis method, when the system has a fault, the fault part can be accurately positioned and maintained in time, and the working efficiency of troubleshooting of the system is improved; because the air inlet of each vacuum pump adopts the double-insurance design of the stop valve and the gas commutator, even if a certain stop valve cannot be closed or is not closed tightly, the negative pressure power regulating system cannot be affected by leakage when the vacuum pump corresponding to the stop valve is not used; the working state of system components is mastered in real time, so that the negative pressure power regulation of the system is accurately controlled, and energy is saved; because the air outlets of the vacuum pumps are gathered together after passing through the stop valve, when a certain vacuum pump needs to be maintained, other pumps can still work normally, and the system can be used normally.

Drawings

FIG. 1 is a schematic diagram of a conventional pneumatic negative pressure power conditioning system;

FIG. 2 is a schematic view of the pneumatic negative pressure power modulating system of the present invention;

FIG. 3 is a schematic view of an on-line verification crossover joint of the present invention;

fig. 4 is a flow chart of a fault diagnosis method in the present invention.

Detailed Description

The invention is further described with reference to the following figures and detailed description.

A gas negative pressure power regulating system with a fault diagnosis function comprises: the flow setting module is used for setting the flow of the gas; the gas buffer is used for forming a stable negative pressure environment; the negative pressure power unit is used for providing negative pressure and comprises a vacuum pump and a first stop valve which are connected through a pipeline, an air outlet of the first stop valve is connected with a first pressure gauge through a first online checking adapter, and an air inlet of the first stop valve is connected with a second pressure gauge through a second online checking adapter.

The negative pressure power unit air inlet is connected with the first end of the gas commutator, the second end of the gas commutator is connected with the flow limiting device, and the third end of the gas commutator is connected with the gas outlet of the gas buffer. The gas outlet of the negative pressure power unit is connected with the gas inlet of the second stop valve, and the gas outlet of the second stop valve discharges gas outwards.

As shown in FIG. 3, the on-line verification crossover sub includes a pressure relief valve FA_dPressure tapping valve FA_dThe air inlet is connected with the pipeline through a pressure-taking interface, and a pressure-taking valve FA_dThe air outlet is connected with a pressure gauge through an instrument interface; pressure-taking valve FA_dAir outlet and check valve FA_bAir inlet connection, check valve FA_bThe air outlet passes through the check interface and the standard pressure gauge P_bAnd (4) connecting.

In the invention, the gas negative pressure power regulating system can have a single or a plurality of parallel negative pressure power units, the gas inlets of the plurality of parallel negative pressure power units are combined together and connected with the gas buffer, and the single or a plurality of negative pressure power units can be opened to generate vacuum suction according to actual requirements. The first pressure gauge is connected with the air outlet of the first stop valve, is equivalently connected with the air inlet of the vacuum pump and is used for monitoring the pressure condition of the air inlet of the vacuum pump; the second pressure gauge is connected with the air inlet of the first stop valve, and when the function of the stop valve is detected, whether the stop valve is normal or not is judged by comparing the first pressure gauge and the second pressure gauge at two ends of the stop valve. And an online check adapter is connected between the pipeline and the pressure gauge and can be used for connecting the pressure gauge and a standard pressure gauge to perform online check of the pressure gauge.

In the invention, the pressure measuring valve is opened, the pressure gauge is communicated with the pipeline when the check valve is closed, and the pressure gauge can be used for detecting the pressure value in the pipeline; and closing the pressure taking valve, opening the check valve, disconnecting the pressure gauge from the pipeline, connecting the pressure gauge with a standard pressure gauge, and checking the pressure gauge by using the standard pressure gauge.

In the invention, the gas commutator has two connection modes, one mode is that the gas outlet of the gas buffer is communicated with the gas inlet of the negative pressure power unit, the other mode is that the flow limiting device is communicated with the gas inlet of the negative pressure power unit, and whether the negative pressure power unit connected with the gas commutator is connected with the whole gas negative pressure power regulating system or not can be determined by switching the two modes.

When the second stop valve is closed, the connection relation between the negative pressure power unit connected with the second stop valve and other negative pressure power units can be disconnected, and the negative pressure power unit is isolated together with the gas reverser.

A diagnosis method of a gas negative pressure power regulation system with a fault diagnosis function comprises the following steps:

s1, checking the indication error of the pressure gauge, entering S2 if the indication error of the pressure gauge passes, and indicating the fault of the pressure gauge if the indication error of the pressure gauge does not pass;

s2, performing a function test on the gas commutator, if the function test is passed, entering S3, and if the function test is not passed, indicating that the gas commutator is in fault;

s3, performing function test on the stop valve, if the test result is passed, entering S4, and if the test result is not passed, indicating that the stop valve is in fault;

s4, testing the capacity of the vacuum pump, entering S5 if the capacity is passed, and indicating the fault of the vacuum pump if the capacity is not passed;

and S5, completing fault diagnosis of the gas negative pressure power regulating system, and normally using the system.

The pressure gauge indication error checking comprises the following steps:

s11, connecting the pressure gauge to be detected and the standard pressure gauge to form a closed system;

s12, selecting a check point, reading and recording indication values of the standard pressure gauge and the pressure gauge to be detected;

s13, selecting different check points, repeating S12, and completing the check of all the check points;

s14, when all indication values of the pressure gauge to be detected are within the error range, the step is S2, and when the indication value of a check point of the pressure gauge to be detected exceeds the error range, the step is S15;

and S15, adjusting, maintaining or replacing the pressure gauge to be detected, and returning to S11 after the pressure gauge is adjusted, maintained or replaced.

The functional test of the gas commutator comprises the following steps:

s21, communicating the flow limiting device and the negative pressure power unit through the gas reverser, and starting a vacuum pump and a stop valve of the negative pressure power unit;

s22, the gas reverser communicates the gas buffer and the negative pressure power unit in a reversing way, and the pressure value in the gas buffer is tested;

s23, when the pressure value in the gas buffer is reduced, the process goes to S3; when the rest condition occurs, the process goes to S24;

and S24, repairing or replacing the gas reverser, and returning to S21 after the repairing or replacing is finished.

The function test of the stop valve comprises the following steps:

s31, testing the closing function of the stop valve, closing the stop valve, starting a vacuum pump connected with the stop valve, and testing the pressure values of the air outlet and the air inlet of the stop valve respectively;

s32, testing the opening function of the stop valve, namely opening the stop valve on the basis of S31, and respectively testing the pressure values of the air outlet and the air inlet of the stop valve;

s33, when the stop valve passes the function test, the process enters S4; when the stop valve does not pass the function test, the step S34 is entered;

and S34, repairing or replacing the stop valve, and returning to S31 after the repair or replacement is completed.

The vacuum pump capacity test comprises the following steps:

s41, starting the vacuum pump, and starting a stop valve connected with the vacuum pump;

s42, testing the pressure value of the air inlet of the vacuum pump;

s43, comparing the pressure value obtained by the test with the rated working pressure of the vacuum pump, and entering S5 if the pressure value is close to the rated working pressure of the vacuum pump; if the pressure value is larger than the rated working pressure, the step S44 is carried out;

and S44, re-determining the working condition of the pump, maintaining or replacing the vacuum pump, and returning to S41 after the maintenance or replacement is finished.

In the invention, when a certain component on the gas negative pressure power regulating system breaks down, the problem that negative pressure cannot be generated or the negative pressure effect is not ideal can occur, so the problem of the fault needs to be found out. Typical failure problems of system components are: the indication value of the pressure gauge is inaccurate; a failure of the commutator; the stop valve can not be opened or closed, or the opening and the closing are incomplete; insufficient or damaged pump capacity, etc. Therefore, a specific diagnosis method needs to be designed according to the factors which can cause the gas negative pressure power regulation system to work imperfectly, so that the fault problem can be found quickly.

In the diagnosis method, the calibration of the pressure gauge is the basis of the whole diagnosis method, and the diagnosis of other system components needs to use the reading of the pressure gauge as the basis, so the pressure gauge needs to be calibrated firstly, and the accuracy of the reading of the pressure gauge is ensured.

The diagnosis of the stop valve needs to be performed before the capability test of the vacuum pump, and the problematic stop valve can greatly influence the result of the capability test of the vacuum pump because the capability test of the vacuum pump needs to be performed under the condition that the stop valve can normally work.

The capability test of the vacuum pump in the invention is at the end of the whole diagnosis test process, the working state of the vacuum pump can be accurately detected only under the condition that the pressure gauge, the gas reverser and the stop valve can work normally, and the capability of the vacuum pump can not meet the requirement when the working condition of the pump does not meet the requirement or the pump has a fault problem.

As shown in fig. 2, in the embodiment of the present invention, the connections between the components not specifically described are all connected by pipelines. The flow setting module is provided with a flow monitoring instrument F₀The gas outlet of the flow setting module is connected with the gas inlet of the gas buffer, and the gas buffer is provided with an on-line checking adapter T₀Is connected with a pressure gauge P₀. Gas commutator H₁C terminal of (A)Gas commutator H₂C terminal of (1), gas commutator H₃C terminal of (1) and gas commutator H₄And the ends c are connected together and connected with the gas outlet of the gas buffer. Gas commutator H₁End b and current limiting device X₁Connecting, gas commutator H₂End b and current limiting device X₂Connecting, gas commutator H₃End b and current limiting device X₃Connecting, gas commutator H₄End b and current limiting device X₄And (4) connecting. The default state of the gas commutator is that the end a is communicated with the end b, the flow limiting device is mainly used for simulating the working condition of the vacuum pump, the designed flow is the same as the rated flow of the corresponding vacuum pump, and the flow limiting device usually adopts a pore plate or a flow limiting nozzle.

Vacuum pump V₁Vacuum pump V₂Vacuum pump V₃And a vacuum pump V₄The arrangement is in parallel.

Vacuum pump V₁The air outlet of the manual stop valve FA₁₂Vacuum pump V₁Air inlet and automatic stop valve FA₁₁Is connected with the air outlet. Vacuum pump V₁The air inlet of the air conditioner is connected with the adapter T through on-line checking₁₁Connecting pressure gauge P₁₁For measuring vacuum pump V₁Intake pressure during operation. Automatic stop valve FA₁₁The air inlet of the air conditioner is connected with the adapter T through on-line checking₁₂Connecting pressure gauge P₁₂For measuring automatic stop valve FA₁₁The front gas pressure. Automatic stop valve FA₁₁For switching off or on the vacuum pump V₁The connection to the gas buffer is by default in a normally closed state. Automatic stop valve FA₁₁Gas inlet and gas reversing device H₁The a terminal of (a) is connected.

Vacuum pump V₂The air outlet of the manual stop valve FA₂₂Vacuum pump V₂Air inlet and automatic stop valve FA₂₁Is connected with the air outlet. Vacuum pump V₂The air inlet of the air conditioner is connected with the adapter T through on-line checking₂₁Connecting pressure gauge P₂₁For measuring vacuum pump V₂Intake pressure during operation. Automatic stop valve FA₂₁The air inlet of the air conditioner is connected with the adapter T through on-line checking₂₂Connecting pressure gauge P₂₂For measuring automatic stop valve FA₂₁The front gas pressure. Automatic stop valve FA₂₁For switching off or on the vacuum pump V₂The connection to the gas buffer is by default in a normally closed state. Automatic stop valve FA₂₁Gas inlet and gas reversing device H₂The a terminal of (a) is connected.

Vacuum pump V₃The air outlet of the manual stop valve FA₃₂Vacuum pump V₃Air inlet and automatic stop valve FA₃₁Is connected with the air outlet. Vacuum pump V₃The air inlet of the air conditioner is connected with the adapter T through on-line checking₃₁Connecting pressure gauge P₃₁For measuring vacuum pump V₃Intake pressure during operation. Automatic stop valve FA₃₁The air inlet of the air conditioner is connected with the adapter T through on-line checking₃₂Connecting pressure gauge P₃₂For measuring automatic stop valve FA₃₁The front gas pressure. Automatic stop valve FA₃₁For switching off or on the vacuum pump V₃The connection to the gas buffer is by default in a normally closed state. Automatic stop valve FA₃₁Gas inlet and gas reversing device H₃The a terminal of (a) is connected.

Vacuum pump V₄The air outlet of the manual stop valve FA₄₂Vacuum pump V₄Air inlet and automatic stop valve FA₄₁Is connected with the air outlet. Vacuum pump V₄The air inlet of the air conditioner is connected with the adapter T through on-line checking₄₁Connecting pressure gauge P₄₁For measuring vacuum pump V₄Intake pressure during operation. Automatic stop valve FA₄₁The air inlet of the air conditioner is connected with the adapter T through on-line checking₄₂Connecting pressure gauge P₄₂For measuring automatic stop valve FA₄₁The front gas pressure. Automatic stop valve FA₄₁For switching off or on the vacuum pump V₄The connection to the gas buffer is by default in a normally closed state. Automatic stop valve FA₄₁Gas inlet and gas reversing device H₄The a terminal of (a) is connected.

Manual stop valve FA₁₂Manual stop valve FA₂₂Manual stop valve FA₃₂And a manual stop valve FA₄₂Is collected at the air outletTogether are communicated with the outside. The four manual stop valves can also be respectively communicated with the outside without being collected together.

As shown in FIG. 3, the on-line verification crossover sub includes a pressure relief valve FA_dPressure tapping valve FA_dThe air inlet is connected with the pipeline through a pressure-taking interface, and a pressure-taking valve FA_dThe air outlet is connected with a pressure gauge through an instrument interface; pressure-taking valve FA_dAir outlet and check valve FA_bAir inlet connection, check valve FA_bThe air outlet is connected with a standard pressure gauge Pb through a checking interface.

The working process of the embodiment is as follows: at initial state, four automatic stop valves FA₁₁To FA₄₁Kept closed; four manual stop valves FA₁₂To FA₄₂Keeping opening; on-line checking adapter pressure-tapping valve FA_dOpening, checking the valve FA_bClosing; four gas commutators H₁To H₄The a end and the b end of (1) are communicated.

Firstly, flow setting is carried out by utilizing a flow setting module; determining the required system pressure according to the set flow; and selecting the required vacuum pumps or the combination thereof according to the rated working capacity of the vacuum pumps, and starting the vacuum pumps one by one. By means of a vacuum pump V₁For example, the vacuum pump V is turned on₁While the corresponding automatic stop valve FA₁₁Also synchronously open, gas commutator H₁The end b is switched to the end c, the system generates vacuum suction, and the air flow passes through the flow setting module, the air buffer and the air commutator H₁Automatic stop valve FA₁₁Turned on vacuum pump V₁Manual stop valve FA₁₂And then discharged to the external space. The other vacuum pumps V₂Vacuum pump V₃And a vacuum pump V₄Process and vacuum pump V₁The same is true. When a plurality of vacuum pumps work, air flows at all positions are collected at the air outlet of the manual stop valve and then are discharged to the external space together. In the working process, the pressure gauge P is used₀Pressure gauge P₁₁To P₄₁And a pressure gauge P₁₂To P₄₂Monitoring system pressure, via flow monitoring instrument F₀And monitoring the flow of the system.

As shown in fig. 4, which is a flow chart of fault diagnosis in the present embodiment, when a component of the negative pressure power regulating system is faulty, there may be a problem that negative pressure cannot be generated or negative pressure effect is not ideal. Typical failure problems of system components are: the indication value of the pressure gauge is inaccurate; a failure of the commutator; the stop valve can not be opened or closed, or the opening and the closing are incomplete; insufficient or damaged pump capacity, etc. Therefore, it is necessary to test these failure problems, and the negative pressure power regulating system can be normally used after all the failure problems are tested at one time and solved.

Firstly, the error of the indication value of the pressure gauge is checked to check the pressure gauge P₁₁For example, the pressure gauge P₁₁Is a pressure gauge to be tested. Firstly, the on-line check adapter T is closed₁₁Pressure tapping valve FA on_dThe standard pressure gauge P is connected to the check interface_b(ii) a Reopening the check valve FA_bAt this time, the pressure gauge P₁₁Disconnected with the negative pressure power regulating system and disconnected with the standard meter P_bJoined to form a closed system. And (5) starting formal verification operation: vacuumizing the closed system according to the check point, and reading and recording a standard pressure gauge P after the pressure is stable_bAnd pressure gauge P₁₁An indication of (d); changing the input pressure value, and checking the next point until all the points are checked; dismantling standard pressure gauge P_bOpen pressure-taking valve FA_dClosing the check valve FA_bPressure gauge P₁₁And restoring the system measurement function. When the pressure gauge P₁₁When the indication error of a certain check point exceeds an allowable value, the check point can be used only after being mechanically or digitally adjusted, and the pressure gauge needs to be maintained or replaced when necessary and is checked again. Checking modes of other pressure gauges and pressure gauge P₁₁Similarly, the pressure gauges in question can be checked one by one or accurately to ensure the normal function and accurate indication of the pressure gauges on the system.

After the correction of the indication error of the pressure gauge is completed, the function test of the gas commutator is carried out to test the gas commutator H₁Function as an example, first make the gas commutator H₁The a and b ends are communicated. Starting the vacuum pump V₁Corresponding to the stop valveFA₁₁Synchronously opening, and sucking the air flow into the pump through a flow limiting device at the end b; operating gas commutator H₁The end a is communicated with the end c, no gas is sucked in front of the flow limiting device at the end b, the pressure in the gas buffer begins to drop, namely the pressure gauge P₀The reading decreases. This indicates the gas diverter H₁The function is normal; if the pressure gauge P₀If the indication number does not fall or the falling amplitude is extremely slow, the gas commutator H is indicated₁There may be a failure. And the failed gas commutator needs to be repaired or replaced, and the function test of the gas commutator is carried out again. Test mode of other gas commutators and gas commutators H₁Likewise, the functionality of the gas diverter in question can be tested on a bench-by-bench or on a bench-by-bench basis.

After the function test of the gas commutator is finished, the function test of the stop valve is carried out to test the automatic stop valve FA₁₁Function as an example, test for other automatic stop valves or manual stop valves and automatic stop valve FA₁₁The same is true. Firstly, testing the closing function of the automatic stop valve and opening the vacuum pump V₁. Holding the stop valve FA first₁₁Closing and observing the pressure gauge P₁₁And a pressure gauge P₁₂The indication of (a). If the pressure gauge P₁₁Pressure gauge P with rapid reduction of reading₁₂If the indication number remains unchanged, the indication indicates the stop valve FA₁₁The closing function is normal; if the pressure gauge P₁₂The reading also drops immediately, indicating the stop valve FA₁₁Cannot be closed or is not closed tightly. And testing the opening function on the basis of testing the closing function of the automatic stop valve. Opening stop valve FA₁₁Gas commutator H₁The end a is communicated with the end b, and at the moment, airflow is sucked into the pump through the flow limiting device at the end b, and the pressure gauge P is observed₁₁The reading rapidly rises, the pressure gauge P₁₂The reading drops rapidly. If the two numbers are basically close after stabilization, the opening function of the stop valve is normal; if the pressure gauge P₁₁The reading is far less than the pressure gauge P₁₂And the indication proves that the stop valve can not be opened or can not be opened completely. The failed stop valve needs to be repaired or replaced, and the function test of the stop valve is carried out again. Hand (W.E.)The dynamic stop valve also requires the following test steps: to test manual stop valve FA₁₂Function as an example, in testing the automatic stop valve FA₁₁On the basis of the opening function, the stop valve FA is manually and slowly closed₁₂Observe the pressure gauge P₁₁And a pressure gauge P₁₂The indication value of (A) continuously rises until the pressure is close to the atmospheric pressure, the indication indicates the stop valve FA₁₂The closing function is normal; otherwise indicating a shut-off valve FA₁₂Can not be closed or not be closed tightly, and a manual stop valve FA is required₁₂And maintaining or replacing the valve, and performing the function test of the stop valve again.

After the function test of the stop valve is completed, the capability test of the vacuum pump is carried out to test the vacuum pump V₁Capacity is for example determined when vacuum pump V is determined₁On the premise that the corresponding stop valve, the gas commutator and the pressure gauge are normal, the vacuum pump V is started₁Operation of automatic stop valve FA₁₁Opening, gas commutator H₁The a and b ends are communicated. Because the b end is connected with a suitable vacuum pump V in advance₁The current limiting device, therefore, after the system is stabilized, if the pressure gauge P is in a stable state₁₁Is close to the vacuum pump V₁The rated working pressure of the vacuum pump indicates the vacuum pump V₁The capacity is normal; otherwise it indicates the vacuum pump V₁The capacity is not required, and the reason for further checking is needed, such as that the working condition of the vacuum pump is not required or the vacuum pump per se is in failure. The failed vacuum pump needs to be repaired or replaced and the vacuum pump capability test is performed again. Test modes of other vacuum pumps and vacuum pump V₁Likewise, the capability of the vacuum pump in question can be tested on a per-unit basis or on a per-unit basis. After the vacuum pump capability test is completed, the whole diagnosis process is completed, and the system can be used for working.

When one vacuum pump is in failure and needs to be replaced, the vacuum pump V is used₁For example, when the vacuum pump V₁There is a fault. At this time, the automatic stop valve FA₁₁Closed, manual stop valve FA₁₂Closing, gas commutator H₁End a is communicated with end b, which is equivalent to a vacuum pump V₁Temporarily separated from the whole negative pressure power regulating system. Vacuum pump V after separation₁Can proceedThe maintenance or replacement operation does not affect the normal use of other vacuum pumps, and the system can still work normally within a certain pressure range. Vacuum pump V₂Vacuum pump V₃And a vacuum pump V₄Replacement mode and vacuum pump V₁The same is true.

The above embodiments are further illustrated and described in order to facilitate understanding of the invention, and no unnecessary limitations are to be understood therefrom, and any modifications, equivalents, and improvements made within the spirit and principle of the invention should be included therein.