Preparation method of intelligent glass with glass ambiguity regulation and control function

文档序号:1899908 发布日期:2021-11-30 浏览:35次 中文

阅读说明:本技术 一种具有调控玻璃模糊度的智能玻璃制备方法 (Preparation method of intelligent glass with glass ambiguity regulation and control function ) 是由 陈龙泉 曾阳 冯浩岩 句英强 于 2021-09-01 设计创作,主要内容包括:本发明涉及一种具有调控玻璃模糊度的智能玻璃制备方法,利用紫外掩膜光刻法,在玻璃的基底上进行光刻,制作光刻胶覆盖的周期平面网格,将带有光刻胶的所述玻璃表面进行氟化,得到具有亲水网格和疏水网格相间的智能玻璃,对智能玻璃表面进行测试,智能玻璃表面通过冷凝形成液滴,亲水网格表面引导液滴生长。有益效果在于:通过利用修饰过的亲水疏水相见的网格,引导液滴周期均匀生长,可以达到控制液滴生长半径以及面积覆盖率的效果,通过控制玻璃表面的温度,采用双面模糊网格错位的方式将液滴的覆盖率提高到95.6%。(The invention relates to a method for preparing intelligent glass with adjustable glass fuzziness, which comprises the steps of photoetching a glass substrate by utilizing an ultraviolet mask photoetching method, manufacturing a periodic plane grid covered by a photoresist, fluorinating the surface of the glass with the photoresist to obtain the intelligent glass with a hydrophilic grid and a hydrophobic grid, testing the surface of the intelligent glass, forming liquid drops on the surface of the intelligent glass through condensation, and guiding the liquid drops to grow on the surface of the hydrophilic grid. Has the advantages that: the modified hydrophilic and hydrophobic grids are used for guiding the liquid drops to uniformly grow periodically, the effect of controlling the growth radius and the area coverage rate of the liquid drops can be achieved, and the coverage rate of the liquid drops is improved to 95.6% by controlling the temperature of the surface of the glass and adopting a mode of dislocation of double-sided fuzzy grids.)

1. A preparation method of intelligent glass with glass ambiguity regulation and control functions is characterized by comprising the following steps:

step S1, photoetching on a glass substrate by using an ultraviolet mask photoetching method to manufacture a periodic plane grid covered by photoresist;

step S2, fluorinating the glass surface with the photoresist to obtain intelligent glass with alternate hydrophilic grids and hydrophobic grids;

step S3, testing the surface of the intelligent glass, wherein the surface of the intelligent glass forms liquid drops through condensation, the surface of the hydrophilic grid guides the liquid drops to grow, and light rays passing through the hydrophilic grid are scattered;

the step S1 specifically operates as follows:

s11, ultrasonically cleaning the surface of the glass for 5-10 min by sequentially using acetone, isopropanol, ethanol and deionized water, and then drying the surface of the glass by using high-purity nitrogen for later use;

step S12, designing a mask plate comprising a light shielding part and a light transmitting part, wherein the light shielding part is arranged in an ordered two-dimensional lattice;

step S13, brushing a layer of photoresist on the surface of the glass, placing the mask plate prepared in the step S12 on the photoresist, irradiating the glass by ultraviolet light, and placing the surface of the glass into a developing solution for developing to form a periodic planar grid covered by the photoresist on the surface of the glass;

the specific operation of step S2 is as follows:

step S21, putting the glass etched in the step S13 into an instrument for performing plasma bombardment to enable the surface of the glass to have hydroxyl groups;

step S22, sealing the glass surface with hydroxyl groups obtained in the step S21 and 1H,1H,2H, 2H-perfluorodecyl trimethoxy silane, putting the glass surface into a vacuum drying oven, heating for 10 hours to obtain a hydrophobic fluorinated surface, and taking out the hydrophobic fluorinated surface for later use;

and S23, carrying out ultrasonic cleaning on the glass surface obtained in the step S22 by sequentially using acetone and ethanol, wherein the cleaning time is 10min each, and then washing with deionized water and drying with nitrogen to obtain the intelligent glass surface with alternate hydrophilic and hydrophobic grids.

2. The method for preparing intelligent glass with glass fuzziness regulation of claim 1, wherein: the light shielding parts are circular with the radius of 30 mu m, the arrangement mode of the light shielding parts is one of rectangular or hexagonal periodic lattice points, the pitch of the rectangular periodic lattice points is 10 mu m or 30 mu m, and the pitch of the hexagonal periodic lattice points is 10 mu m.

3. The method for preparing intelligent glass with glass fuzziness regulation of claim 2, wherein: and step S1, photoetching the single-side surface of the glass by using the ultraviolet mask photoetching method to manufacture a periodic planar grid of single-side glass, and obtaining the single-side intelligent glass.

4. The method for preparing intelligent glass with glass fuzziness regulation of claim 2, wherein: and step S1, photoetching the surfaces of the two sides of the glass by using the ultraviolet mask photoetching method to manufacture periodic plane grids of the double-sided glass, wherein the two mask plates on the surfaces of the two sides of the glass are displaced by a distance of a shading part radius relatively to each other to manufacture the double-sided intelligent glass with the hydrophilic grids and the hydrophobic grids arranged in a staggered manner.

5. The method for preparing intelligent glass with glass fuzziness regulation of claim 2, wherein: step S1, respectively carrying out photoetching on the surfaces of one side of two pieces of glass by using an ultraviolet mask photoetching method to obtain two pieces of single-sided intelligent glass, wherein the mask plates on the surfaces of the two pieces of single-sided intelligent glass are arranged in a staggered manner by relatively moving a distance of the radius of the shading part, and the modified surfaces of the two pieces of single-sided intelligent glass are attached together in an outward facing manner to prepare the double-sided intelligent glass with the hydrophilic grids and the hydrophobic grids arranged in a staggered manner.

6. The method for preparing intelligent glass with glass fuzziness regulation of claim 1, wherein: step S3 is to condense the surface of the intelligent glass by utilizing the contact of a condensation sheet during testing, and the contact area of the condensation sheet and the intelligent glass is 4-6 cm2

7. The method for preparing intelligent glass with glass fuzziness regulation of claim 1, wherein: the temperature in the vacuum drying oven in the step S22 is 80-100 ℃, and the single surface treatment dosage of the 1H,1H,2H, 2H-perfluorodecyl trimethoxy silane is 20 uL.

8. The method for preparing intelligent glass with glass fuzziness regulation of claim 1, wherein: the plasma bombardment power is 200W, and the duration is 1 min.

Technical Field

The invention relates to the field of intelligent glass manufacturing, in particular to a preparation method of intelligent glass with a function of regulating and controlling glass fuzziness.

Background

The fuzziness or transmittance of common industrial glass cannot be changed once being produced, but in daily life, the requirements of people on the fuzziness and transmittance of the glass can be changed correspondingly due to different living scenes. For example, people in the daytime require low glass ambiguity and high light transmittance due to work and other needs, and at night, require high glass ambiguity and low light transmittance due to privacy needs, so that the intelligent glass capable of regulating and controlling the ambiguity has huge application potential in life and work scenes.

Disclosure of Invention

The invention provides a preparation method of intelligent glass capable of regulating and controlling glass fuzziness, and mainly aims to regulate and control the fuzziness of the intelligent glass through temperature change.

In order to achieve the purpose, the invention provides a method for preparing intelligent glass with glass ambiguity regulation and control function, which comprises the following steps:

step S1, photoetching on a glass substrate by using an ultraviolet mask photoetching method to manufacture a periodic plane grid covered by photoresist;

step S2, fluorinating the surface of the glass with the photoresist to obtain intelligent glass with alternate hydrophilic grids and hydrophobic grids;

step S3, testing the surface of the intelligent glass, wherein the surface of the intelligent glass forms liquid drops through condensation, the surface of the hydrophilic grid guides the liquid drops to grow, and light rays passing through the hydrophilic grid are scattered;

the step S1 specifically operates as follows:

s11, ultrasonically cleaning the surface of the glass for 5-10 min by sequentially using acetone, isopropanol, ethanol and deionized water, and then drying the surface of the glass by using high-purity nitrogen for later use;

step S12, designing a mask plate comprising a light shielding part and a light transmitting part, wherein the light shielding part is arranged in an ordered two-dimensional lattice;

step S13, brushing a layer of photoresist on the surface of the glass, placing the mask plate prepared in the step S12 on the photoresist, irradiating the surface of the glass by ultraviolet light, and placing the surface of the glass into a developing solution for developing to form a periodic planar grid covered by the photoresist;

the specific operation of step S2 is as follows:

step S21, putting the glass etched in the step S13 into an instrument for performing plasma for plasma bombardment, wherein the bombardment power is 200W, the duration is 1min, and the surface of the glass is provided with hydroxyl groups to obtain a hydrophobic fluorinated surface;

step S22, sealing the glass surface with hydroxyl groups obtained in the step S21 and 1H,1H,2H, 2H-perfluorodecyl trimethoxy silane, putting the glass surface into a vacuum drying oven, heating for 10 hours, and taking out for later use;

and S23, carrying out ultrasonic cleaning on the glass surface obtained in the step S22 by sequentially using acetone and ethanol, wherein the cleaning time is 10min each, and then washing with deionized water and drying with nitrogen to obtain the intelligent glass surface with alternate hydrophilic and hydrophobic grids.

Furthermore, the shading parts are circular with the radius of 30 μm, the arrangement mode of the shading parts on the mask plate is one of rectangular or hexagonal periodic lattice points, the pitch of the rectangular periodic lattice points is 10 μm or 30 μm, and the pitch of the hexagonal periodic lattice points is 10 μm.

Further, step S1 is to perform photolithography on a single-side surface of the glass by using an ultraviolet mask photolithography method to produce a periodic planar grid of single-side glass, thereby obtaining single-side smart glass.

Further, in step S1, the ultraviolet mask lithography is used to perform lithography on the surfaces of both sides of the glass to produce periodic planar grids of double-sided glass, wherein the two mask plates on the surfaces of both sides of the glass are displaced by a distance corresponding to the radius of the light-shielding portion, so as to produce double-sided smart glass with the hydrophilic grids and the hydrophobic grids being displaced.

Further, step S1 is to respectively perform photolithography on the single-side surfaces of the two pieces of glass by using an ultraviolet mask photolithography method to obtain two pieces of single-sided intelligent glass, wherein the mask plates on the surfaces of the two pieces of single-sided intelligent glass are displaced by a distance corresponding to the radius of the light shielding portion, and the modified surfaces of the two pieces of single-sided intelligent glass are bonded together to form the double-sided intelligent glass with the hydrophilic grids and the hydrophobic grids arranged in a displaced manner.

Further, in the step S3, the surface of the intelligent glass is condensed by utilizing the contact of a condensation sheet during the test, and the contact area of the condensation sheet and the intelligent glass is 4-6 cm2

Further, the temperature in the vacuum drying oven in the step S22 is between 80 and 100 ℃, and the single surface treatment dosage of the 1H,1H,2H, 2H-perfluorodecyl trimethoxy silane is 20 uL.

Has the advantages that:

1. the modified hydrophilic and hydrophobic phase-meeting grids are utilized to guide the liquid drops to grow uniformly in a periodic mode, and the effect of controlling the growth radius and the area coverage rate of the liquid drops can be achieved;

2. the temperature of the surface of the glass is controlled to condense or (evaporate) liquid drops so as to intelligently regulate and control the ambiguity of the glass;

3. the coverage rate of the liquid drops can be improved to 95.6% by the glass with double-sided fuzzy function and grid dislocation.

Drawings

FIG. 1 is a structural view of a mask plate;

FIG. 2 is a flow chart of a process for preparing single-sided smart glass by ultraviolet lithography;

FIG. 3 is a graph of the effect of droplet condensation;

FIG. 4 is a schematic view of a double-sided smart glass;

FIG. 5 is a schematic view of light scattering of a smart glass;

FIG. 6 is a schematic illustration of smart glass surface blur;

figure 7 is a graphical representation of the change in droplet mean radius and coverage over time.

The reference numbers are as follows:

1. glass; 2. photoresist; 3. a mask plate; 4. a hydrophobic fluorinated surface; 5. a light-transmitting portion; 6. a light shielding portion; 7. a hydrophilic grid; 8. a hydrophobic mesh; 9. a droplet.

Detailed Description

It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

Example 1

As shown in fig. 1-2, the method for preparing intelligent glass with controlled glass fuzziness comprises the following steps:

step S1, performing photolithography on the substrate of the glass 1 by using the uv mask photolithography to fabricate a periodic planar grid covered by a photoresist, specifically including:

s11, ultrasonically cleaning the surface of one side of the glass 1 for 10min by using acetone, isopropanol, ethanol and deionized water in sequence, and then drying the glass by using high-purity nitrogen for later use;

step S12, designing a mask plate 3 including light-shielding portions 6 and light-transmitting portions 5, where the light-shielding portions 6 are arranged in an ordered two-dimensional lattice, the light-shielding portions 6 are circular with a radius of 30 μm, the arrangement of the light-shielding portions 6 on the mask plate 3 is one of rectangular or hexagonal periodic lattice points, the pitch of the rectangular periodic lattice points is 10 μm or 30 μm, and the pitch of the hexagonal periodic lattice points is 10 μm, specifically referring to fig. 1, fig. 1(a) and fig. 1(b) are arrangement of the rectangular periodic lattice points 10 μm and 30 μm, respectively, and fig. 1(c) is arrangement of the hexagonal periodic lattice points;

step S13, brushing a layer of photoresist 2 on the surface of the glass 1, placing the mask plate 3 prepared in the step S12 on the photoresist 2, irradiating the surface of the glass 1 by ultraviolet light, and placing the surface of the glass in a developing solution for developing to form a periodic planar grid covered by the photoresist;

step S2, fluorinating the surface of the glass 1 with the photoresist to obtain the intelligent glass with the hydrophilic grids 7 and the hydrophobic grids 8, which specifically comprises the following steps:

step S21, putting the glass 1 etched in the step S13 into an instrument for performing plasma bombardment, wherein the bombardment power is 200W, and the time is 1min, so that the surface of the glass is provided with hydroxyl groups;

step S22, sealing the glass surface with hydroxyl groups obtained in the step S21 and 20uL of 1H,1H,2H, 2H-perfluorodecyl trimethoxy silane in a vacuum drying oven at the temperature of 90 ℃, heating for 10 hours to obtain a hydrophobic fluorinated surface 4, and taking out for later use;

s23, carrying out ultrasonic cleaning on the glass surface obtained in the S22 by sequentially using acetone and ethanol, wherein the cleaning time is 10min each, and then washing with deionized water and drying with nitrogen to obtain the single-sided intelligent glass with alternate hydrophilic and hydrophobic grids;

step S3, for the sheetThe surface of the intelligent glass forms liquid drops through contact condensation of the condensation sheet, the liquid drops are guided to grow on the surface of the hydrophilic grid, light passing through the hydrophilic grid is scattered, the condensation time is 5min, the liquid drop arrangement condition on the surface of the glass is observed by using a magnifying lens, and the contact area of the condensation sheet and the intelligent glass is 6cm2The power was 8W and the blur effect of the glass was recorded with a camera.

Example 2

As shown in fig. 1-2, the method for preparing intelligent glass with controlled glass fuzziness comprises the following steps:

step S1, performing photolithography on the substrate of the glass 1 by using the uv mask photolithography to fabricate a periodic planar grid covered by a photoresist, specifically including:

s11, ultrasonically cleaning the surfaces of the two sides of the glass 1 for 10min by using acetone, isopropanol, ethanol and deionized water in sequence, and then drying the glass by using high-purity nitrogen for later use;

step S12, designing a mask plate 3 including light-shielding portions 6 and light-transmitting portions 5, where the light-shielding portions 6 are arranged in an ordered two-dimensional lattice, the light-shielding portions 6 are circular with a radius of 30 μm, the arrangement of the light-shielding portions 6 on the mask plate 3 is one of rectangular or hexagonal periodic lattice points, the pitch of the rectangular periodic lattice points is 10 μm or 30 μm, and the pitch of the hexagonal periodic lattice points is 10 μm, specifically referring to fig. 1, fig. 1(a) and fig. 1(b) are arrangement of the rectangular periodic lattice points 10 μm and 30 μm, respectively, and fig. 1(c) is arrangement of the hexagonal periodic lattice points;

step S13, brushing a layer of photoresist 2 on the surfaces of both sides of glass 1, placing two mask plates 3 prepared in step S12 on the photoresist 2 on the surfaces of both sides, moving the two mask plates 3 on the surfaces of both sides of the glass 1 relatively by a distance of a radius of a shading part 6 to be placed in a staggered manner, irradiating the surface of the glass 1 by ultraviolet light, and placing the surface of the glass in a developing solution for developing to form a periodic plane grid covered by the photoresist;

step S2, fluorinating the surfaces of the two sides of the glass 1 with the photoresist to obtain the intelligent glass with the hydrophilic grids 7 and the hydrophobic grids 8, which specifically comprises the following steps:

step S21, putting the glass 1 etched in the step S13 into an instrument for performing plasma bombardment, wherein the bombardment power is 200W, and the time is 1min, so that the surface of the glass is provided with hydroxyl groups;

step S22, sealing the glass surface with hydroxyl groups obtained in the step S21 and 40uL of 1H,1H,2H, 2H-perfluorodecyl trimethoxy silane in a vacuum drying oven at the temperature of 80-100 ℃, heating for 10 hours to obtain a hydrophobic fluorinated surface 4, and taking out for later use;

s23, carrying out ultrasonic cleaning on the glass surface obtained in the S22 by sequentially using acetone and ethanol, wherein the cleaning time is 10min each, then washing with deionized water, and drying with nitrogen to obtain double-sided intelligent glass with hydrophilic grids and hydrophobic grids arranged in a staggered manner on two sides;

s3, the surface of the double-sided intelligent glass is contacted and condensed through a condensing sheet to form liquid drops, the surface of the hydrophilic grid guides the liquid drops to grow, light passing through the hydrophilic grid is scattered, the condensing time is 5min, the arrangement condition of the liquid drops on the surface of the glass is observed through a magnifier, and the contact area of the condensing sheet and the intelligent glass is 6cm2The power was 8W and the blur effect of the glass was recorded with a camera.

Example 3

As shown in fig. 1-2 and 4-5, the method for preparing the intelligent glass with the controlled glass fuzziness comprises the following steps:

step S1, performing photolithography on the substrates of the two pieces of glass 1 by using an ultraviolet mask photolithography to manufacture a periodic planar grid covered by a photoresist, specifically including:

step S11, respectively ultrasonically cleaning the surfaces of one side of two pieces of glass 1 for 10min by using acetone, isopropanol, ethanol and deionized water in sequence, and then blowing the glass to dry by using high-purity nitrogen for later use;

step S12, designing a mask plate 3 including light-shielding portions 6 and light-transmitting portions 5, where the light-shielding portions 6 are arranged in an ordered two-dimensional lattice, the light-shielding portions 6 are circular with a radius of 30 μm, the arrangement of the light-shielding portions 6 on the mask plate 3 is one of rectangular or hexagonal periodic lattice points, the pitch of the rectangular periodic lattice points is 10 μm or 30 μm, and the pitch of the hexagonal periodic lattice points is 10 μm, specifically referring to fig. 1, fig. 1(a) and fig. 1(b) are arrangement of the rectangular periodic lattice points 10 μm and 30 μm, respectively, and fig. 1(c) is arrangement of the hexagonal periodic lattice points;

step S13, brushing a layer of photoresist 2 on the surfaces of one side of two pieces of glass 1, placing two mask plates 3 prepared in step S12 on the surfaces of the two pieces of glass 1 coated with the photoresist 2 respectively, moving the two mask plates 3 relative to each other by the radius of a shading part 6 to be placed in a staggered manner, irradiating the surfaces of the two pieces of glass 1 by ultraviolet light, and placing the surfaces of the glass into a developing solution for developing to form periodic plane grids covered by the photoresist;

step S2, fluorinating the surfaces of the two pieces of glass 1 with the photoresist to obtain the intelligent glass with the hydrophilic grids 7 and the hydrophobic grids 8 arranged alternately, which specifically comprises the following steps:

step S21, respectively putting the two pieces of glass 1 which are well etched in the step S13 into an instrument for executing plasma for plasma bombardment, wherein the bombardment power is 200W, and the time duration is 1min, so that the surfaces of the two pieces of glass are provided with hydroxyl groups;

step S22, sealing the glass surface with hydroxyl groups obtained in the step S21 and 20uL of 1H,1H,2H, 2H-perfluorodecyl trimethoxy silane in a vacuum drying oven at the temperature of 90 ℃, heating for 10 hours to obtain a hydrophobic fluorinated surface 4, and taking out for later use;

s23, carrying out ultrasonic cleaning on the glass surface obtained in the S22 by sequentially using acetone and ethanol, wherein the cleaning time is 10min each, then washing with deionized water and drying with nitrogen to obtain two pieces of single-sided intelligent glass, and attaching the obtained modified surfaces of the two pieces of single-sided intelligent glass outwards to obtain double-sided intelligent glass with hydrophilic grids on two sides and hydrophobic grids arranged in a staggered manner;

s3, the surface of the double-sided intelligent glass is contacted and condensed through a condensing sheet to form liquid drops, the surface of the hydrophilic grid guides the liquid drops to grow, light passing through the hydrophilic grid is scattered, the condensing time is 5min, the arrangement condition of the liquid drops on the surface of the glass is observed through a magnifier, and the contact area of the condensing sheet and the intelligent glass is 6cm2The power is 8W, and useThe camera records the blurring effect of the glass.

In this embodiment, due to the misalignment between the hydrophilic grid and the hydrophobic grid, the coverage of the droplet is above 95.6%, specifically referring to fig. 4 and 5, fig. 4(a) - (c) show the preparation process of the double-sided smart glass, fig. 4(d) is a schematic diagram of the droplet on the surface of the double-sided smart glass, and fig. 5(a) - (b) all show the growth of the droplet 9 on the surface of the double-sided smart glass, and the light scattering rate can almost reach 100%.

The three embodiments are also different from the growth arrangement of the droplets of the common glass, as shown in fig. 3, the growth and arrangement of the droplets are shown in fig. 3(a) - (c), fig. 3(d) is the growth arrangement of the droplets of the common glass, and compared with fig. 3(d), the surface with the alternated hydrophilic and hydrophobic grids can certainly guide the generation of the droplets and improve the coverage rate of the droplets on the surface;

the situation of the liquid drop coverage in the above embodiment is different for the condensation at different times, as shown in fig. 7, the change of the area coverage of the liquid drop of fig. 7(a) with time and the change of the average radius of the liquid drop on each surface of fig. 7(b) with time can be obtained by condensing, taking a picture by using a magnifying camera, and processing the picture, as can be seen from fig. 7(a), the area coverage of the liquid drop on the surface of the smart glass with alternate hydrophilic and hydrophobic grids after photoetching is more than 50%, the highest is in hexagonal distribution, the area coverage reaches 70%, as can be seen from fig. 7(b), the average radius of the liquid drop on the surface of the smart glass is 30-50 μm when the liquid drop is condensed for about 5min, and the radius of the liquid drop can be controlled by controlling the radius of the light shielding part 6.

Known from above-mentioned embodiment, timely long intelligent glass under the different temperature environment can produce different liquid drop growth condition, lead to different coverage simultaneously also can cause the change of its shading degree, the glass that makes through above-mentioned method can be effectual arranges the control water droplet growth situation according to the range of net, thereby adjust glass's ambiguity, can wide application in the great north of difference in temperature, and simultaneously, also have the requirement to shading nature in numerous experiments at present, can make intelligent glass according to its experiment requirement, realize the relevant condition of shading nature through temperature control, and wide application.

The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes, which are made by the present specification and contents, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.

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