阅读说明：本技术 一种用于设计半导体制造洁净室系统多级电场除尘系统的方法 (Method for designing multistage electric field dust removal system of semiconductor manufacturing clean room system ) 是由 唐万福 赵晓云 王大祥 段志军 邹永安 奚勇 于 2020-04-24 设计创作，主要内容包括：一种用于设计半导体制造洁净室系统多级电场除尘系统的方法,包括如下步骤：选择多级电场除尘系统中电场装置个数n以及各电场装置电源的电压使电场除尘系统总除尘效率(100％-(100％-P-(1)％)*(100％-P-(2)％)*……*(100％-P-(n)％))大于或等于一个预定值,并且臭氧输出量小于或等于一个预定值,其中,P-(1)％、P-(2)％……P-(n)％依次分别为第1级、第2级、……第n级电场装置的除尘效率,n为大于1的整数。本方法可以在确保总除尘效率的同时,将臭氧产生量控制在预定值以下。(A method for designing a multi-stage electric field dust removal system for a semiconductor manufacturing clean room system, comprising the steps of: the total dust removal efficiency (100% - (100% -P) of the electric field dust removal system is realized by selecting the number n of the electric field devices in the multistage electric field dust removal system and the voltage of the power supply of each electric field device 1 ％)*(100％‑P 2 ％)*……*(100％‑P n %) is greater than or equal to a predetermined value, and the ozone output is less than or equal to a predetermined value, wherein P 1 ％、P 2 ％……P n % is the dust removal efficiency of the 1 st, 2 nd and … … nth stage electric field devices respectively in sequence, and n is an integer larger than 1. The method can control the ozone generation amount below a preset value while ensuring the total dust removal efficiency.)