阅读说明：本技术 一种电流体喷印微结构形貌调控方法、系统及装置 (Method, system and device for regulating morphology of electrofluid spray printing microstructure ) 是由 尹周平 陈建魁 肖小亮 朱红 喻梦雯 于 2021-09-24 设计创作，主要内容包括：本发明公开了一种电流体喷印微结构形貌调控方法,具体为：启用电纺丝喷头在基板上喷印线阵,喷印后在喷印线阵上方施加形貌调控电场；检测喷印线与基板的接触角以及喷印线阵交叉点的厚度分布,将其与目标值比较,依据比较结果施加电场调控信号,由此实施对线形貌、线阵交叉点形貌的调控；采用电雾化模式在线阵围成的网格中喷印液滴形成微结构,检测微结构的厚度和形状,将其与目标值比较,依据比较结果施加电场调控信号,由此实施对微结构形貌的调控。本发明还提供实现上述方法的系统和装置。本发明采用电纺丝与电喷雾技术结合进行微结构制造,并利用附加电场调控形貌,大幅提高微结构的制造效率和形貌精度。(The invention discloses a shape regulation and control method for an electrofluid spray printing microstructure, which specifically comprises the following steps: starting an electric spinning nozzle to spray and print the linear array on the substrate, and applying a morphology regulating and controlling electric field above the spray and printing linear array after spray printing; detecting a contact angle between the jet printing line and the substrate and the thickness distribution of the cross points of the jet printing linear arrays, comparing the contact angle with a target value, and applying an electric field regulation signal according to a comparison result so as to regulate and control the line morphology and the linear array cross point morphology; and spraying and printing liquid drops in a grid formed by the linear arrays in an electric atomization mode to form a microstructure, detecting the thickness and the shape of the microstructure, comparing the thickness and the shape with a target value, and applying an electric field regulation and control signal according to a comparison result, thereby regulating and controlling the appearance of the microstructure. The invention also provides a system and a device for realizing the method. The invention adopts the combination of the electrospinning technology and the electrospray technology to manufacture the microstructure, and utilizes the additional electric field to regulate and control the morphology, thereby greatly improving the manufacturing efficiency and the morphology precision of the microstructure.)

1. An electrofluid spray printing microstructure morphology regulation and control method is characterized by comprising the following steps:

(1) starting an electric spinning nozzle to spray and print the linear array on the substrate, and applying a morphology regulating and controlling electric field above the spray and printing linear array after spray printing;

(2) detecting a contact angle between the jet printing line and the substrate, comparing the contact angle with a target contact angle, and applying an electric field regulation signal according to the comparison result so as to regulate and control the line morphology;

(3) detecting the thickness distribution of the cross points of the jet printing linear array, comparing the thickness distribution with a target thickness distribution, and applying an electric field regulation signal according to the comparison result so as to regulate and control the appearance of the cross points of the linear array;

(4) adopting an electric atomization mode to spray and print liquid drops in a grid surrounded by the linear arrays, and forming a microstructure after the liquid drops are leveled;

(5) and detecting the thickness and the shape of the microstructure, comparing the thickness and the shape with the target thickness and the target shape, and applying an electric field regulation signal according to the comparison result so as to regulate and control the microstructure morphology.

2. The method for regulating the morphology of the electrofluidic jet printing microstructure according to claim 1, wherein the step (2) applies the morphology regulating electric field by using an electrode array, and the electric field regulating signal is generated as follows:

wherein the content of the first and second substances,representing a line profile electrode regulation signal; theta_pThe contact angle of the p line and the substrate is shown; k_l、C_lFor the correlation coefficient between applied voltage and target contact angle, K_l、C_lSelecting a relation curve for calibrating the voltage and the contact angle; m represents the row number of the electrode array, and n represents the column number of the electrode array;the electrode state control signals for rows i and j indicate that the electrodes are assigned a value of 1 when a positive voltage is applied, a value of-1 when a negative voltage is applied, and a value of 0 when no voltage is applied.

3. The method for regulating the morphology of the electrofluidic jet printing microstructure according to claim 1, wherein in the step (3), the electrode array is used for applying the morphology regulating electric field, and the electric field regulating signal is generated as follows:

wherein the content of the first and second substances,representing a linear array intersection point shape electrode regulation signal; h is_cRepresenting the average thickness of the electrode of the ith row and j columns corresponding to the intersection point area of the linear arrays;representing the average thickness of the whole area of the intersection point of the linear arrays; k_c、C_cFor the correlation coefficient of applied voltage and thickness difference, K_c、C_cSelecting a relation curve of the voltage and the thickness calibration at the intersection point; m represents the row number of the electrode array, and n represents the column number of the electrode array;the state control signals representing the ith row and j column electrodes are assigned a value of 1 when a positive voltage is applied, a value of-1 when a negative voltage is applied, and a value of 0 when no voltage is applied.

4. The method for regulating the morphology of the electrofluidic jet printing microstructure according to claim 1, wherein the step (5) applies the morphology regulating electric field by using an electrode array, and the electric field regulating signal is generated as follows:

wherein the content of the first and second substances,representing a microstructure morphology electrode regulation signal; the microstructure topography comprises h_max、h_minAnd d, h_maxRepresents the maximum thickness value, h, of the microstructure to be controlled_minA value representing the minimum thickness of the microstructure; d is the minimum diameter of the overlooking projection circumscribed circle of the microstructure; k_h、K_d、C_mFor applying a voltage between the microstructure topographyCoefficient of correlation of, K_h、K_d、C_mSelecting a relation curve for calibrating the voltage and the microstructure shape; m represents the row number of the plate-shaped electrode array, and n represents the column number of the plate-shaped electrode array;the state control signals for the electrode plates in row i and column j are assigned a value of 1 when a positive voltage is applied to the electrodes, a value of-1 when a negative voltage is applied to the electrodes, and a value of 0 when no voltage is applied to the electrodes.

5. An electrohydrodynamic jet printing microstructure topography control system for implementing the method of any one of claims 1 to 4, comprising:

the appearance observation module is used for detecting a contact angle between the jet printing line and the substrate, the thickness distribution of a cross point of the jet printing linear array and the thickness and shape of the microstructure;

a system control module for generating an electrode conditioning signal according to the method of any one of claims 1 to 4;

the appearance regulating and controlling module is used for regulating the voltage of the electrode array according to the electrode regulating and controlling signal;

the electrode array comprises a plurality of electrodes, and after the electrodes are charged, an electric field is formed on the substrate so as to regulate and control the line morphology, the linear array cross point morphology and the microstructure morphology.

6. The system for regulating and controlling the morphology of an electrofluidic jet printing microstructure according to claim 5, wherein the morphology observation module comprises a morphology observation camera, a three-dimensional morphology observation unit and a vision processing unit; the appearance observation camera is used for acquiring image information of the linear array and the side profile of the microstructure, transmitting the image information to the visual processing unit, and obtaining contact angle information after image processing; and the three-dimensional appearance observation unit is used for measuring and acquiring the thickness distribution condition of the linear array and the microstructure, transmitting data to the visual processing unit, and extracting the maximum thickness, the minimum thickness and the minimum circumscribed circle diameter of the overlooking projection of the microstructure.

7. An electrohydrodynamic jet printing microstructure topography control device for implementing the method of any one of claims 1 to 4, comprising:

the electrofluid spray printing module comprises an electrospinning spray head unit and an electric atomizing spray head unit, wherein the electrospinning spray head unit is used for spraying and printing linear arrays on a substrate, the electric atomizing spray head unit is used for spraying and printing liquid drops in grids enclosed by the linear arrays, and a microstructure is formed after the liquid drops are leveled;

the electrofluid spouts seal microstructure topography regulation and control system includes: the appearance observation module is used for detecting a contact angle between the jet printing line and the substrate, the thickness distribution of a cross point of the jet printing linear array and the thickness and shape of the microstructure; a system control module for generating an electrode conditioning signal according to the method of any one of claims 1 to 4; the appearance regulating and controlling module is used for regulating the voltage of the electrode array according to the electrode regulating and controlling signal; the electrode array comprises a plurality of electrodes, and each electrode forms an electric field on the substrate so as to regulate and control the line morphology, the linear array cross point morphology and the microstructure morphology.

8. The electrohydrodynamic jet printing microstructure topography conditioning device according to claim 7, further comprising a curing module comprising a photo-curing unit and a thermal-curing unit; the light curing unit is used for performing light curing on the linear array and the microstructure, and the heat curing unit is used for performing heat curing on the linear array and the microstructure and performing drying treatment on the substrate.

9. The electrohydrodynamic jet printing microstructure morphology regulating device according to claim 7 or 8, further comprising a surface treatment module comprising a hydrophilic material spraying unit, a hydrophobic material spraying unit and a drying unit; the hydrophilic spraying device is used for spraying hydrophilic solution on the substrate, the hydrophobic material spraying unit is used for spraying hydrophobic material on the substrate of the printing linear array, and the drying unit is used for drying and solidifying the leveling solution.

10. The device for regulating and controlling the morphology of the electrofluid jet printing microstructure according to claim 7 or 8, characterized by further comprising an atmosphere control module, wherein the atmosphere control module comprises a box body, a filtering and purifying unit, a temperature control unit, a sensor feedback unit and an atmosphere controller; the box body is of a closed structure and is used for providing a self-assembly manufacturing space of the microstructure; the filtering and purifying unit is used for removing water vapor, oxygen and fine particles in the air and generating an inert gas environment; the temperature control unit is used for adjusting the temperature to keep the temperature in the box body stable; the sensor feedback unit is used for monitoring the oxygen content, pressure and temperature of water in the box body and feeding back signals to the atmosphere controller; the atmosphere controller is used for regulating and controlling other units according to the signals of the sensor feedback unit so as to maintain the ultra-pure environment and stable temperature in the box body.

Technical Field

The invention belongs to the technical field of electrofluid ink jet printing manufacturing, and particularly relates to a method and a device for regulating and controlling the appearance of an electrofluid jet printing microstructure.

Background

The microstructure array refers to the arrangement of micro-nano structures with certain morphologies according to a certain mode, and the micro-structures have excellent performances of surface hydrophobicity and surface modification of products, so that the microstructure array is widely applied to the fields of medical treatment, micro-electro-mechanical systems, optics, buildings, traffic and the like.

The electrofluid spray printing technology is a high-resolution printing technology, can spray liquid drops far smaller than the size of a spray head of the electrofluid spray printing technology, and has wide prospects in the field of micro-nano manufacturing. At present, the microstructure array is usually manufactured by photoetching, thermal reflow, soft imprinting and other modes, heating or complex process is required, the method is not suitable for large-area manufacturing, and the electrofluid jet printing process is widely concerned with the process characteristics that the electrofluid jet printing process does not need a mask plate, is simple and convenient, and is compatible with large-area manufacturing. The principle of the electrofluid spray printing technology is that an electric field is applied between a spray head and a substrate, when the electric stress applied to liquid drops at the tip of a spray nozzle is increased to a certain degree, the liquid is sprayed out from the tip, and microstructures such as points, lines and the like can be manufactured according to different spray printing modes.

The shape of the microstructure array often has an important influence on the function of the microstructure array, and if the shape characteristics of the microstructure can be accurately controlled, the method has an important help for improving the performance of the microstructure array, so the method is very important for controlling the shape of the microstructure.

Disclosure of Invention

Aiming at the defects or improvement requirements of the prior art, the invention provides a method and a device for regulating the appearance of an electrofluid jet printing microstructure, and aims to improve the preparation efficiency and the appearance precision of the electrofluid jet printing microstructure.

An electrofluid spray printing microstructure morphology regulation and control method comprises the following steps:

(1) starting an electric spinning nozzle to spray and print the linear array on the substrate, and applying a morphology regulating and controlling electric field above the spray and printing linear array after spray printing;

(2) detecting a contact angle between the jet printing line and the substrate, comparing the contact angle with a target contact angle, and applying an electric field regulation signal according to the comparison result so as to regulate and control the line morphology;

(3) detecting the thickness distribution of the cross points of the jet printing linear array, comparing the thickness distribution with a target thickness distribution, and applying an electric field regulation signal according to the comparison result so as to regulate and control the appearance of the cross points of the linear array;

(4) adopting an electric atomization mode to spray and print liquid drops in a grid surrounded by the linear arrays, and forming a microstructure after the liquid drops are leveled;

(5) and detecting the thickness and the shape of the microstructure, comparing the thickness and the shape with the target thickness and the target shape, and applying an electric field regulation signal according to the comparison result so as to regulate and control the microstructure morphology.

Further, in the step (2), an electrode array is adopted to apply a morphology regulating electric field, and the electric field regulating signal is generated as follows:

wherein the content of the first and second substances,representing a line profile electrode regulation signal; theta_pThe contact angle of the p line and the substrate is shown; k_l、C_lFor the correlation coefficient between applied voltage and target contact angle, K_l、C_lSelecting a relation curve for calibrating the voltage and the contact angle; m represents the row number of the electrode array, and n represents the column number of the electrode array;the electrode state control signals for rows i and j indicate that the electrodes are assigned a value of 1 when a positive voltage is applied, a value of-1 when a negative voltage is applied, and a value of 0 when no voltage is applied.

Further, in the step (3), an electrode array is adopted to apply a morphology regulating electric field, and the electric field regulating signal is generated as follows:

wherein the content of the first and second substances,representing a linear array intersection point shape electrode regulation signal; h is_cRepresenting the average thickness of the electrode of the ith row and j columns corresponding to the intersection point area of the linear arrays;representing the average thickness of the whole area of the intersection point of the linear arrays; k_c、C_cFor the correlation coefficient of applied voltage and thickness difference, K_c、C_cSelecting a relation curve of the voltage and the thickness calibration at the intersection point; m represents the row number of the electrode array, and n represents the column number of the electrode array;the state control signals representing the ith row and j column electrodes are assigned a value of 1 when a positive voltage is applied, a value of-1 when a negative voltage is applied, and a value of 0 when no voltage is applied.

Further, in the step (5), an electrode array is adopted to apply a morphology regulating electric field, and the electric field regulating signal is generated as follows:

wherein the content of the first and second substances,representing a microstructure morphology electrode regulation signal; the microstructure topography comprises h_max、h_minAnd d, h_maxRepresents the maximum thickness value, h, of the microstructure to be controlled_minA value representing the minimum thickness of the microstructure; d is the minimum diameter of the overlooking projection circumscribed circle of the microstructure; k_h、K_d、C_mAs a correlation coefficient between applied voltage and microstructure morphology, K_h、K_d、C_mBy calibrating the relationship curve of voltage and microstructure morphologySelecting; m represents the row number of the plate-shaped electrode array, and n represents the column number of the plate-shaped electrode array;the state control signals for the electrode plates in row i and column j are assigned a value of 1 when a positive voltage is applied to the electrodes, a value of-1 when a negative voltage is applied to the electrodes, and a value of 0 when no voltage is applied to the electrodes.

An electrofluid spray printing microstructure topography regulation and control system for realizing the method comprises:

the appearance observation module is used for detecting a contact angle between the jet printing line and the substrate, the thickness distribution of a cross point of the jet printing linear array and the thickness and shape of the microstructure;

the system control module is used for generating an electrode regulation signal according to the method;

the appearance regulating and controlling module is used for regulating the voltage of the electrode array according to the electrode regulating and controlling signal;

the electrode array comprises a plurality of electrodes, and after the electrodes are charged, an electric field is formed on the substrate so as to regulate and control the line morphology, the linear array cross point morphology and the microstructure morphology.

Further, the appearance observation module comprises an appearance observation camera, a three-dimensional appearance observation unit and a visual processing unit; the appearance observation camera is used for acquiring image information of the linear array and the side profile of the microstructure, transmitting the image information to the visual processing unit, and obtaining contact angle information after image processing; and the three-dimensional appearance observation unit is used for measuring and acquiring the thickness distribution condition of the linear array and the microstructure, transmitting data to the visual processing unit, and extracting the maximum thickness, the minimum thickness and the minimum circumscribed circle diameter of the overlooking projection of the microstructure.

An electrofluid spray printing microstructure morphology regulating and controlling device for realizing the method comprises:

the electrofluid spray printing module comprises an electrospinning spray head unit and an electric atomizing spray head unit, wherein the electrospinning spray head unit is used for spraying and printing linear arrays on a substrate, the electric atomizing spray head unit is used for spraying and printing liquid drops in grids enclosed by the linear arrays, and a microstructure is formed after the liquid drops are leveled;

the electrofluid spouts seal microstructure topography regulation and control system includes: the appearance observation module is used for detecting a contact angle between the jet printing line and the substrate, the thickness distribution of a cross point of the jet printing linear array and the thickness and shape of the microstructure; the system control module is used for generating an electrode regulation signal according to the method; the appearance regulating and controlling module is used for regulating the voltage of the electrode array according to the electrode regulating and controlling signal; the electrode array comprises a plurality of electrodes, and each electrode forms an electric field on the substrate so as to regulate and control the line morphology, the linear array cross point morphology and the microstructure morphology.

Further, the device also comprises a curing module which comprises a light curing unit and a heat curing unit; the light curing unit is used for performing light curing on the linear array and the microstructure, and the heat curing unit is used for performing heat curing on the linear array and the microstructure and performing drying treatment on the substrate.

Further, the device also comprises a surface treatment module, a drying module and a control module, wherein the surface treatment module comprises a hydrophilic material spraying unit, a hydrophobic material spraying unit and a drying unit; the hydrophilic spraying device is used for spraying hydrophilic solution on the substrate, the hydrophobic material spraying unit is used for spraying hydrophobic material on the substrate of the printing linear array, and the drying unit is used for drying and solidifying the leveling solution.

The system further comprises an atmosphere control module, a temperature control module and a control module, wherein the atmosphere control module comprises a box body, a filtering and purifying unit, a temperature control unit, a sensor feedback unit and an atmosphere controller; the box body is of a closed structure and is used for providing a self-assembly manufacturing space of the microstructure; the filtering and purifying unit is used for removing water vapor, oxygen and fine particles in the air and generating an inert gas environment; the temperature control unit is used for adjusting the temperature to keep the temperature in the box body stable; the sensor feedback unit is used for monitoring the oxygen content, pressure and temperature of water in the box body and feeding back signals to the atmosphere controller; the atmosphere controller is used for regulating and controlling other units according to the signals of the sensor feedback unit so as to maintain the ultra-pure environment and stable temperature in the box body.

Generally, compared with the prior art, the above technical solution according to the present invention mainly has the following technical advantages:

the invention closely combines the electrohydrodynamic jet printing technology to manufacture the microstructure for research, and provides a scheme for manufacturing the microstructure by combining the electrospinning technology and the electrospray technology, the electrospinning technology can efficiently manufacture a linear array, atomized liquid drops generated by the electrospraying form the microstructure after the linear array is leveled, and the manufacturing efficiency of the microstructure can be greatly improved. The invention also utilizes an additional electric field to independently regulate and control the linear array, the microstructure appearance and the linear array cross points after spray printing, and utilizes white light to relate to visual measurement to observe the microstructure appearance in real time so as to accurately regulate and control the linear array and the microstructure appearance.

Drawings

FIG. 1 is a flow chart of the method for regulating the morphology of an electrofluid jet printing microstructure according to the present invention;

FIG. 2 is a schematic view of an electrode array of the present invention;

FIG. 3 is a schematic diagram of the regulation of line morphology by the method of the present invention;

FIG. 4 is a schematic diagram of the method of the present invention for regulating and controlling linear array intersections;

FIG. 5 is a schematic diagram of the method of the present invention for controlling the morphology of a microstructure;

FIG. 6 is a schematic diagram of a microstructure morphology regulating system for electrofluid jet printing and a working principle of the system;

FIG. 7 is a block diagram of an overall apparatus for applying the topography control system of the present invention to electrofluid jet printing microstructures;

FIG. 8 is a schematic diagram of a process for manufacturing an electrofluid jet printing microstructure with microstructure topography control according to the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.

FIG. 1 shows a flow chart of the microstructure morphology regulating method of the present invention, the method for regulating the microstructure morphology by electrofluid spray printing comprises the following steps:

(1) starting an electric spinning nozzle to spray and print the linear array on the substrate, and applying a morphology regulating and controlling electric field above the spray and printing linear array after spray printing;

(2) detecting a contact angle between the jet printing line and the substrate, comparing the contact angle with a target contact angle, and applying an electric field regulation signal according to a comparison result so as to regulate and control the line morphology;

(3) detecting the thickness distribution of the cross points of the jet printing linear array, comparing the thickness distribution with a target thickness distribution, and applying an electric field regulation signal according to a comparison result so as to regulate and control the appearance of the cross points of the linear array;

(4) adopting an electric atomization mode to spray and print liquid drops in a grid surrounded by the linear arrays, and forming a microstructure after the liquid drops are leveled;

(5) and detecting the thickness and the shape of the microstructure, comparing the thickness and the shape with the target thickness and the target shape, and applying an electric field regulation signal according to the comparison result so as to regulate and control the microstructure morphology.

The above steps are further detailed below:

the present invention preferably applies the electric field regulation signal using the electrode array 4. Referring to fig. 2, the electrode array is a plate-shaped electrode array formed by a plurality of electrode layouts, and each electrode can apply voltages with different sizes, so that uniform electric fields with different sizes are generated at each part of the substrate.

FIG. 3 is a schematic diagram of the regulation of the line morphology by the method of the present invention. And (2) detecting the morphology of the jet printing line on line, comparing the morphology with the morphology of the target line, and outputting a line morphology regulation signal. The line morphology is characterized by adopting a contact angle between a jet printing line and a substrate, and the contact angle can be observed by acquiring a maximum profile surface image of a line section and processing the image to obtain the maximum profile surface image.

The electric field regulation signal is generated as follows:

wherein the content of the first and second substances,electric field modulation for representing line morphologyA control signal; theta_pThe contact angle of the p line and the substrate is shown; k_l、C_lFor the correlation coefficient between applied voltage and target contact angle, K_l、C_lSelecting a relation curve for calibrating the voltage and the contact angle; m represents the row number of the electrode array, and n represents the column number of the electrode array;the electrode state control signals for rows i and j indicate that the electrodes are assigned a value of 1 when a positive voltage is applied, a value of-1 when a negative voltage is applied, and a value of 0 when no voltage is applied.

Fig. 4 is a schematic diagram of linear array cross point regulation by the method of the present invention. And (3) detecting the intersection point appearance of the linear array on line, comparing the intersection point appearance with the intersection point appearance of the target linear array, and outputting a linear array intersection point appearance regulation and control signal. The cross point appearance of the linear array is characterized by the average thickness of the cross point area of the linear array and the average thickness of the whole cross point area of the linear array. The linear array intersection point morphology regulating and controlling electric field signal is generated as follows:

wherein the content of the first and second substances,representing a linear array intersection point appearance electric field regulation and control signal; h is_cRepresenting the average thickness of the electrode of the ith row and j columns corresponding to the intersection point area of the linear arrays;representing the average thickness of the whole area of the intersection point of the linear arrays; k_c、C_cFor the correlation coefficient of applied voltage and thickness difference, K_c、C_cSelecting a relation curve of the voltage and the thickness calibration at the intersection point; m represents the row number of the electrode array, and n represents the column number of the electrode array;showing the state of the ith row and j column electrodesThe control signal is assigned to 1 when the electrode is applied with a positive voltage, -1 when the electrode is applied with a negative voltage, and 0 when the electrode is not applied with a voltage.

FIG. 5 is a schematic diagram of the method of the present invention for controlling the morphology of a microstructure. And (4) comparing the microstructure morphology with a target microstructure morphology through online detection of the microstructure morphology, and outputting a microstructure morphology regulation signal. The microstructure appearance is characterized by adopting the maximum thickness value and the minimum thickness value of the microstructure and the overlooking projection minimum circumscribed circle diameter of the microstructure. The microstructure appearance electric field regulation and control signal is generated according to the following modes:

wherein the content of the first and second substances,representing an electric field regulation signal of the microstructure appearance; the microstructure topography comprises h_max、h_minAnd d, h_maxRepresents the maximum thickness value, h, of the microstructure to be controlled_minA value representing the minimum thickness of the microstructure; d is the minimum diameter of the overlooking projection circumscribed circle of the microstructure; k_h、K_d、C_mAs a correlation coefficient between applied voltage and microstructure morphology, K_h、K_d、C_mSelecting a relation curve for calibrating the voltage and the microstructure shape; m represents the row number of the plate-shaped electrode array, and n represents the column number of the plate-shaped electrode array;the state control signals for the electrode plates in row i and column j are assigned a value of 1 when a positive voltage is applied to the electrodes, a value of-1 when a negative voltage is applied to the electrodes, and a value of 0 when no voltage is applied to the electrodes.

FIG. 6 is a schematic diagram of a microstructure morphology regulating system for electrofluid jet printing and a working principle thereof. The electrofluid spouts seal microstructure topography and regulates and control device includes: the appearance observation module 1 is used for detecting a contact angle between a jet printing line and a substrate, the thickness distribution of a cross point of a jet printing linear array and the thickness and shape of a microstructure; the system control module generates an electrode regulation and control signal according to the method; the morphology regulating and controlling module 3 is used for regulating the voltage of the electrode array according to the electrode regulating and controlling signal; the electrode array 4 comprises a plurality of electrodes, and an electric field is formed between each electrode and the substrate after each electrode is charged so as to regulate and control the line morphology, the linear array cross point morphology and the microstructure morphology.

The morphology observation module 1 comprises a morphology observation camera 11, a three-dimensional morphology observation unit 12 and a visual processing unit 13, wherein the morphology observation camera 11 is used for observing the contact angle between a linear array and a microstructure, is horizontally arranged on a substrate, acquires the side profile information of the linear array and the microstructure, transmits the observed image information to the visual processing unit, and obtains the contact angle information after image processing; the three-dimensional topography observation unit 12 preferably adopts a white light interference vision scheme for measuring and acquiring the thickness distribution of the linear array and the microstructure, transmitting data to the vision processing unit 13, and extracting the maximum thickness, the minimum thickness and the minimum circumscribed circle diameter of the overlooking projection of the microstructure.

The shape regulating module 3 receives a regulating signal of the real-time processing controller to regulate the voltage of each electrode, so as to regulate and control the contact angles of the linear array and the microstructure, and further realize closed-loop regulation and control on the shapes of the linear array and the microstructure; the electrode array and the substrate motion structure are integrated together;

FIG. 7 is a schematic diagram of an overall apparatus for applying the topography control system of the present invention to electrofluid jet printing microstructures. The device includes a plurality of modules such as electrofluid spouts seal module, appearance detection module, solidification module, surface treatment module, appearance regulation and control module, atmosphere control module, system control module, wherein:

the electrofluid spray printing module 5 comprises a spray head unit 51, a spray printing auxiliary device 52 and a substrate 53; the head unit 51 integrates an ink supply system and a head, and applies a voltage between the head and the substrate to realize jet printing; the nozzle unit 51 is arranged on a motion module with X, Y, Z-direction moving freedom degree and Z-direction rotating freedom degree, and the jet printing auxiliary device 52 is connected with the nozzle unit through a connecting piece; the substrate 13 is provided on a motion module having X, Y-directional freedom of movement and Z-directional freedom of rotation.

The topography observation module 1 comprises a topography observation camera 11, a three-dimensional topography observation unit 12 and a vision processing unit 13. The three-dimensional shape detection unit is arranged on a motion assembly with Z freedom degree, preferably adopts a white light interference vision scheme and is used for respectively carrying out real-time vision detection on the thickness, the volume and the uniformity of the linear array and the dot matrix on the substrate before and after curing; the appearance observation camera is used for observing a contact angle between the linear array and the microstructure and is fixed on the substrate motion platform; and the system is used for detecting the spraying state, the linear array after spraying and printing and the microstructure.

The curing module 6 comprises a light curing unit 61 and a heat curing unit 62; the light curing unit 61 comprises a UVLED for performing light curing on the linear array and the microstructure on the substrate; the thermal curing unit 62 includes a hot plate for curing the linear arrays and microstructures on the substrate and drying the substrate; the light curing unit 61 is mounted on a moving member having X, Y degrees of freedom; the thermal curing unit 62 is integrated with the substrate moving structure; the curing module and the spray printing module are integrated together, so that the linear array and the microstructure after spray printing can be cured conveniently.

The surface treatment module 7 includes a hydrophilic material spraying unit 71, a hydrophobic material spraying unit 72, and a drying device 73. The hydrophilic spraying device 71 can spray hydrophilic solution on the substrate, the hydrophobic material spraying device 72 sprays hydrophobic material on the substrate of the printing linear array, and the drying device 73 can dry and solidify the leveling solution. The surface treatment module is arranged in the independent chamber and used for adjusting the hydrophilicity and hydrophobicity of the substrate and the linear array of the jet printing.

The electrode back plate 4 is composed of a plate-shaped electrode array, and each electrode can apply voltages with different sizes respectively to generate uniform electric fields with different sizes at each part of the substrate. The electrode back plate is integrated with the substrate motion structure. The shape regulating module 3 receives the regulating signal of the real-time processing control module to regulate the voltage of each electrode, and realizes the regulation of the contact angles of the linear array and the microstructure, thereby realizing the closed-loop regulation of the shapes of the linear array and the microstructure.

The atmosphere control module 8 comprises a box body, a filtering and purifying unit, a temperature control unit, a sensor feedback unit and an atmosphere controller; the box body is of a closed structure and provides a self-assembly manufacturing space of the microstructure; the filtering and purifying unit removes water vapor, oxygen, fine particles in the air and the like and generates an inert gas environment according to the requirement; the temperature control unit keeps the temperature in the box body stable; the sensor feedback unit is used for monitoring the oxygen content, pressure and temperature of water in the box body and feeding back signals to the atmosphere control unit; the atmosphere controller regulates and controls the atmosphere in the box body according to the signal of the sensor feedback unit, and ensures the stability of the ultra-pure environment and the temperature in the box body.

The system control module 2 comprises a real-time processing control module 21, a spray head controller 22 and a curing controller 23; the nozzle controller 22 is used for regulating and controlling the nozzle voltage and the parameters of the jet printing auxiliary device and controlling the movement of the nozzle unit and the substrate; the curing controller 23 is configured to control the light curing unit and the heat curing unit; the real-time processing controller 21 is respectively connected with the nozzle controller, the morphology regulating and controlling module, the visual processing unit and the curing controller, wherein the system control module carries out closed-loop control on the morphology regulating and controlling module according to the detection results of the linear array and the microstructure.

For the electrofluid spray printing module 5, the electrofluid spray printing module is provided with a plurality of sets of nozzle units 51, preferably a set of electrospinning nozzle units and a set of electric atomizing nozzle units, and an electrofluid electrospinning spray printing mode and an electric atomizing spray printing mode are matched with each other to finish the self-assembly high-efficiency manufacture of the microstructure, wherein the electrofluid electrospinning mode is used for spraying and printing a linear array, atomizing and spraying are carried out above the linear array by adopting the electric atomizing mode, and the microstructure is formed by self-assembly in an area surrounded by the linear array after liquid drops are leveled; the spray printing assisting device 52 may select one or more of an electrostatic focusing assisting device, an extraction electrode assisting device, and a trajectory inducing device according to the requirements of electrospinning spray printing or electrospray spray printing, and preferably integrates the extraction electrode assisting device when printing on an insulating substrate, the electrostatic focusing assisting device when satellite droplets need to be suppressed, and the trajectory inducing device when the trajectory of the ink droplets flying in the air needs to be controlled.

For the nozzle unit 51, the nozzle unit is composed of a single row of multiple nozzles, the nozzle controller rotates the nozzles along the Z axis to realize linear array jet printing with different pitches, and the linear array pitch is preferably regulated according to the following formula:

L_p＝k_p·L·cosα

wherein L is_pThe interval between the p-th line and the (p +1) -th line representing jet printing; l represents the distance between two adjacent spray holes; k is a radical of_pRepresenting the interval number between two jet holes for jet printing the p line and the (p +1) line; alpha denotes the angle of rotation of the spray head along the Z-axis.

FIG. 8 is a schematic diagram of a process for manufacturing an electrofluid jet printing microstructure with microstructure topography control according to the present invention, comprising the steps of:

(a) initializing a system, and inputting a plurality of set parameters such as voltage amplitude of a spray head and the like according to experimental requirements; placing the substrate in a surface treatment module for hydrophilic treatment;

(b) firstly, an electrospinning spray head module is used for spraying and printing linear arrays on a substrate, the linear arrays form a net shape along two directions, and the two directions can be vertical or at other angles according to requirements;

(c) rotating the substrate to enable the appearance observation camera to observe the maximum profile surface of the cross section of the linear array, observing the contact angle and the appearance of the linear array on the substrate in real time, and when the contact angle and the appearance are not in accordance with preset values, sending an adjusting signal to the appearance adjusting and controlling module by the system control module, and generating an electric field through the adjusting and controlling electrode back plate to adjust the contact angle of the linear array;

(d) the white light interference vision unit is adopted to detect the shape of the linear array cross point, the thickness distribution of the area near the cross point is obtained, when the distribution does not meet the requirement, the system control module sends an adjusting signal to the shape adjusting and controlling module, and an electric field is generated by adjusting and controlling the electrode back plate to promote the leveling of liquid drops;

(e) starting the substrate to heat or curing the linear array by using a curing lamp;

(f) carrying out surface treatment on the cured substrate and the linear array by using the surface treatment module to make the spray drain the linear array and the substrate;

(g) the electric atomization module is adopted to carry out atomization spraying on the linear array, atomized liquid drops form a microstructure after leveling, the defects of the spray head are detected before spraying, different spraying modes are selected according to the defects of the spray head, and preferably, the defect spray head and a part of defect-free spray head are closed to carry out patterned spraying; after the sprayed liquid drops are leveled, the optical detection module is used for detecting the shape and consistency of the formed microstructure, a defect distribution diagram is recorded, and if the consistency is poor, the step can be repeatedly changed to carry out local additional spraying according to the defect condition;

(h) according to the defect distribution map, the system control module sends an adjusting signal to the morphology adjusting and controlling module, an electric field is generated by adjusting and controlling the electrode back plate, the curvature of the microstructure is adjusted, and the consistency of the microstructure is detected in real time through the optical detection module to form closed-loop control;

(i) and heating and curing or photocuring the microstructure by adopting the curing module.

It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.