阅读说明：本技术 一种氩气自动回收工艺装置 (Automatic argon recovery process device ) 是由 徐美兰 郭翠玲 于 2020-06-06 设计创作，主要内容包括：本发明公开了一种氩气自动回收工艺装置,包括：液氩储罐；液氮储罐；以及氩气回收组件；其分别与所述液氩储罐及所述液氮储罐相连通；其中,所述氩气回收组件包括：氩气换热器,其与所述液氩储罐相连通；氩冷凝器,其分别与所述氩气换热器及所述液氮储罐相连通；液氩计量装置,其与所述氩冷凝器相连通；以及液氩泵,其分别与所述液氩计量装置、液氩储罐及所述氩冷凝器相连通。本发明具有结构简单,便于零部件的组装,能够实现自动、安全、高效的氩气回收,避免氩放空浪费,节省人工成本的有益效果。(The invention discloses an automatic argon recovery process device, which comprises the following steps: a liquid argon storage tank; a liquid nitrogen storage tank; and an argon recovery assembly; the liquid argon storage tank and the liquid nitrogen storage tank are respectively communicated; wherein, the argon gas recovery subassembly includes: the argon gas heat exchanger is communicated with the liquid argon storage tank; the argon condenser is respectively communicated with the argon heat exchanger and the liquid nitrogen storage tank; a liquid argon metering device in communication with the argon condenser; and the liquid argon pump is respectively communicated with the liquid argon metering device, the liquid argon storage tank and the argon condenser. The argon recovery device has the advantages of being simple in structure, convenient for assembly of parts, capable of achieving automatic, safe and efficient argon recovery, avoiding waste of argon emptying and saving labor cost.)

1. An automatic argon recovery process unit is characterized by comprising: a liquid argon storage tank (11); a liquid nitrogen storage tank (13); and an argon recovery assembly (12); which are respectively communicated with the liquid argon storage tank (11) and the liquid nitrogen storage tank (13);

wherein the argon recovery assembly (12) comprises: an argon gas heat exchanger (121) communicated with the liquid argon storage tank (11);

an argon condenser (122) which is respectively communicated with the argon heat exchanger (121) and the liquid nitrogen storage tank (13);

a liquid argon metering device (123) in communication with the argon condenser (122); and

and the liquid argon pump (124) is respectively communicated with the liquid argon metering device (123), the liquid argon storage tank (11) and the argon condenser (122).

2. The argon automatic recovery process unit according to claim 1, wherein the liquid argon storage tank (11) is provided with a first pressure transmitter (111), the first pressure transmitter (111) is used for monitoring the pressure value inside the liquid argon storage tank (11);

and a first automatic valve (112) is arranged between the liquid argon storage tank (11) and the argon heat exchanger (121).

3. The argon automatic recovery process device according to claim 1, wherein the argon condenser (122) is internally provided with a nitrogen heat exchange channel (1221) and an argon heat exchange channel (1222), respectively.

4. The argon automatic recovery process device according to claim 3, wherein the surface of the argon condenser (122) is respectively provided with a liquid nitrogen inlet (1226), a first nitrogen outlet (1227), a first argon inlet (1228) and a first liquid argon outlet (1229);

the surface of the argon heat exchanger (121) is respectively provided with a nitrogen inlet (1211), a second nitrogen outlet (1212), a second argon inlet (1213) and an argon outlet (1214);

wherein, liquid nitrogen import (1226), first nitrogen gas export (1227) respectively with nitrogen heat transfer passageway (1221) is linked together, first argon gas import (1228) and first liquid argon export (1229) respectively with argon heat transfer passageway (1222) is linked together, liquid nitrogen import (1226) with liquid nitrogen storage tank (13) are linked together, first nitrogen gas export (1227) with nitrogen gas import (1211) is linked together, first argon gas import (1228) with argon gas export (1214) is linked together, first liquid argon export (1228) with liquid argon metering device (123) are linked together, second argon gas import (1213) with liquid argon storage tank (11) are linked together.

5. The argon automatic recovery process unit according to claim 4, wherein the surface of the argon condenser (122) is provided with a first liquid level meter (1223) to detect the liquid level of liquid nitrogen inside the argon condenser (122);

a second automatic valve (131) is arranged at the position of the liquid nitrogen inlet (1226) to control the inlet amount of the liquid nitrogen into the argon condenser (122);

the first nitrogen outlet (1227) is positioned with a second pressure transducer (1224) to monitor the pressure inside the argon condenser (122);

and a third automatic valve (1225) is arranged at the position of the first nitrogen outlet (1227) so as to control the discharge amount and the pressure of the nitrogen.

6. The argon automatic recovery process device according to claim 1, wherein the surface of the liquid argon metering device (123) is provided with a first liquid argon inlet (1233), a second liquid argon inlet (1234) and a second liquid argon outlet (1235);

the liquid argon pump (124) is provided with a third liquid argon inlet (1244), a liquid argon pump gas phase outlet (1245) and a third liquid argon outlet (1246);

wherein, first liquid argon import (1233) with first liquid argon export (1229) is linked together, second liquid argon export (1235) with third liquid argon import (1244) is linked together, liquid argon pump gaseous phase export (1245) with first argon gas import (1228) is linked together, third liquid argon export (1246) respectively with second liquid argon import (1234) and liquid argon storage tank (11) are linked together.

7. The argon automatic recovery process unit according to claim 1, characterized in that the surface of the liquid argon metering device (123) is provided with a third pressure transmitter (1231), the third pressure transmitter (1231) monitors the pressure value inside the liquid argon metering device (123);

the surface of liquid argon metering device (123) still is equipped with second level gauge (1232), second level gauge (1232) monitors the liquid level of the inside liquid argon of liquid argon metering device (123).

8. The argon automatic recovery process device according to claim 1, wherein a temperature measuring device (1241) is arranged at an outlet of the liquid argon pump (124), and the temperature measuring device (1241) can detect the temperature of the liquid argon at the outlet of the liquid argon pump (124).

9. The argon automatic recovery process unit according to claim 8, wherein a fourth automatic valve (1243) is arranged between the liquid argon pump (124) and the liquid argon metering device (123);

and a fifth automatic valve (1242) is arranged between the liquid argon pump (124) and the liquid argon storage tank (11).

10. The argon automatic recovery process unit of claim 1, further comprising: the control device (14) is electrically connected or wirelessly connected with the first pressure transmitter (111), the first automatic valve (112), the first liquid level meter (1223), the second automatic valve (131), the second pressure transmitter (1224), the third automatic valve (1225), the third pressure transmitter (1231), the second liquid level meter (1232), the temperature measuring device (1241), the fourth automatic valve (1243) and the fifth automatic valve (1242) respectively.

Technical Field

The present invention relates to the field of gas recovery. More particularly, the invention relates to an automatic argon recovery process device.

Background

Argon is an inert gas, the boiling point and the melting point of the argon are-185.7 ℃ and-189.2 ℃ respectively, the argon is widely applied to the field of protective gas of lighting lamps and arc welding due to stable chemical properties of the argon, the argon has higher economic value, in industry, the argon is generally extracted from air by a distillation process method at present and condensed into liquid argon to be stored in a tank body, and the production cost of the process method is higher.

In jar body storage process, there is some liquid argon to volatilize into argon gas, for preventing excessive pressure in the holding vessel, there is automatic atmospheric pressure valve at the top of holding vessel usually device, promptly when jar interior volatilizing argon gas pressure surpasss when setting for the threshold value, automatic atmospheric pressure valve is automatic to be opened, it is partly to empty the argon gas that volatilizees in the holding vessel, make jar internal pressure resume to the threshold value within range, simultaneously in order to improve holding vessel factor of safety, the breather valve still is equipped with on the holding vessel, its function is for after automatic atmospheric pressure valve became invalid, the breather valve is automatic to be opened, discharge superpressure argon gas. It can be seen that in the above process, in order to prevent the overpressure in the liquid argon storage tank, the conventional method is to directly discharge the volatilized argon outwards, which causes a great amount of waste of argon;

in view of the above, it is necessary to develop an automatic argon recovery process apparatus to solve the above problems.

Disclosure of Invention

Aiming at the defects in the prior art, the invention aims to provide an automatic argon recovery process device which is simple in structure, convenient for assembly of parts, capable of realizing automatic, safe and efficient argon recovery, avoiding waste of argon emptying and saving labor cost.

To achieve these objects and other advantages and in accordance with the purpose of the invention, there is provided an automatic argon gas recovery process apparatus comprising: a liquid argon storage tank; a liquid nitrogen storage tank; and an argon recovery assembly; the liquid argon storage tank and the liquid nitrogen storage tank are respectively communicated;

wherein, the argon gas recovery subassembly includes: the argon gas heat exchanger is communicated with the liquid argon storage tank;

the argon condenser is respectively communicated with the argon heat exchanger and the liquid nitrogen storage tank;

a liquid argon metering device in communication with the argon condenser; and

and the liquid argon pump is respectively communicated with the liquid argon metering device, the liquid argon storage tank and the argon condenser.

Preferably, the liquid argon storage tank is provided with a first pressure transmitter, and the first pressure transmitter is used for monitoring the pressure value inside the liquid argon storage tank;

and a first automatic valve is arranged between the liquid argon storage tank and the argon heat exchanger.

Preferably, a nitrogen heat exchange channel and an argon heat exchange channel are respectively arranged in the argon condenser.

Preferably, the surface of the argon condenser is respectively provided with a liquid nitrogen inlet, a first nitrogen outlet, a first argon inlet and a first liquid argon outlet;

the surface of the argon heat exchanger is respectively provided with a nitrogen inlet, a second nitrogen outlet, a second argon inlet and an argon outlet;

wherein, the liquid nitrogen import first nitrogen gas export respectively with nitrogen heat transfer passageway is linked together, first argon gas import and first liquid argon export respectively with argon heat transfer passageway is linked together, the liquid nitrogen import with the liquid nitrogen storage tank is linked together, first nitrogen gas export with the nitrogen gas import is linked together, first argon gas import with the argon gas export is linked together, first liquid argon export with liquid argon metering device is linked together, second argon gas import with the liquid argon storage tank is linked together.

Preferably, the surface of the liquid argon metering device is provided with a first liquid argon inlet, a second liquid argon inlet and a second liquid argon outlet;

the liquid argon pump is provided with a third liquid argon inlet, a liquid argon pump gas phase outlet and a third liquid argon outlet;

wherein, first liquid argon import with first liquid argon export is linked together, second liquid argon export with third liquid argon import is linked together, liquid argon pump gaseous phase export with first argon gas import is linked together, third liquid argon export respectively with second liquid argon import reaches the liquid argon storage tank is linked together.

Preferably, a first liquid level meter is arranged on the surface of the argon condenser to detect the liquid level of liquid nitrogen in the argon condenser;

a second automatic valve is arranged at the position of the liquid nitrogen inlet so as to control the inlet amount of the liquid nitrogen entering the argon condenser;

a second pressure transmitter is arranged at the position of the first nitrogen outlet so as to monitor the pressure in the argon condenser;

and a third automatic valve is arranged at the position of the first nitrogen outlet so as to control the discharge amount and pressure of the nitrogen.

Preferably, a third pressure transmitter is arranged on the surface of the liquid argon metering device, and the third pressure transmitter monitors the pressure value inside the liquid argon metering device;

the surface of the liquid argon metering device is also provided with a second liquid level meter which monitors the liquid level of the liquid argon in the liquid argon metering device.

Preferably, a temperature measuring device is arranged at the outlet of the liquid argon pump, and the temperature measuring device can detect the temperature of the liquid argon at the outlet of the liquid argon pump.

Preferably, a fourth automatic valve is arranged between the liquid argon pump and the liquid argon metering device;

and a fifth automatic valve is arranged between the liquid argon pump and the liquid argon storage tank.

Preferably, the method further comprises the following steps: and the control device is respectively electrically or wirelessly connected with the first pressure transmitter, the first automatic valve, the first liquid level meter, the second automatic valve, the second pressure transmitter, the third automatic valve, the third pressure transmitter, the second liquid level meter, the temperature measuring device, the fourth automatic valve and the fifth automatic valve.

The invention at least comprises the following beneficial effects: the invention provides an automatic argon recovery process device which is simple in structure, convenient for assembly of parts, capable of realizing automatic, safe and efficient argon recovery, avoiding waste of argon emptying and saving labor cost.

Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention.

Drawings

Fig. 1 is a schematic structural diagram in one embodiment of the present invention.

Detailed Description

The foregoing and other objects, features, aspects and advantages of the present invention will become more apparent from the following detailed description of the present invention when taken in conjunction with the accompanying drawings, which will enable those skilled in the art to practice the present invention with reference to the accompanying specification.

In the drawings, the shape and size may be exaggerated for clarity, and the same reference numerals will be used throughout the drawings to designate the same or similar components.

In the following description, terms such as center, thickness, height, length, front, back, rear, left, right, top, bottom, upper, lower, and the like are used based on the orientation or positional relationship shown in the drawings. In particular, "height" corresponds to the dimension from top to bottom, "width" corresponds to the dimension from left to right, and "depth" corresponds to the dimension from front to back. These relative terms are for convenience of description and are not generally intended to require a particular orientation.

Terms concerning attachments, coupling and the like (e.g., "connected" and "attached") refer to a relationship wherein structures are secured or attached, either directly or indirectly, to one another through intervening structures, as well as both movable or rigid attachments, unless expressly described otherwise.

According to an embodiment of the present invention, with reference to fig. 1, the present invention provides an automatic argon gas recycling process apparatus, which includes: a liquid argon storage tank 11; a liquid nitrogen storage tank 13; and an argon recovery assembly 12; which are respectively communicated with the liquid argon storage tank 11 and the liquid nitrogen storage tank 13;

wherein the argon recovery assembly 12 comprises: the argon gas heat exchanger 121 is communicated with the liquid argon storage tank 11;

an argon condenser 122 which is respectively communicated with the argon gas heat exchanger 121 and the liquid nitrogen storage tank 13;

a liquid argon metering device 123 in communication with the argon condenser 122; and

and a liquid argon pump 124 which is respectively communicated with the liquid argon metering device 123, the liquid argon storage tank 11 and the argon condenser 122.

Further, the automatic argon recovery process device also comprises a control device 14.

Further, the liquid argon storage tank 11 is provided with a first pressure transmitter 111, and the first pressure transmitter 111 is used for monitoring the pressure value inside the liquid argon storage tank 11;

a first automatic valve 112 is arranged between the liquid argon storage tank 11 and the argon gas heat exchanger 121.

The first pressure transmitter 111 and the first automatic valve 112 are electrically connected or wirelessly connected to the control device 14, respectively.

In an embodiment of the present invention, when the first pressure transmitter 111 detects that the pressure inside the liquid argon storage tank 11 reaches 10Kpa, it transmits a signal to the control device 14, and the control device 14 controls the first automatic valve 112 to open, so that the argon gas inside the liquid argon storage tank 11 is discharged.

Further, a nitrogen heat exchange passage 1221 and an argon heat exchange passage 1222 are respectively provided in the argon condenser 122.

The surface of the argon condenser 122 is respectively provided with a liquid nitrogen inlet 1226, a first nitrogen outlet 1227, a first argon inlet 1228 and a first liquid argon outlet 1229;

the surface of the argon heat exchanger 121 is respectively provided with a nitrogen inlet 1211, a second nitrogen outlet 1212, a second argon inlet 1213 and an argon outlet 1214;

the liquid nitrogen inlet 1226 and the first nitrogen outlet 1227 are respectively communicated with the nitrogen heat exchange channel 1221, the first argon inlet 1228 and the first liquid argon outlet 1229 are respectively communicated with the argon heat exchange channel 1222, the liquid nitrogen inlet 1226 is communicated with the liquid nitrogen storage tank 13, the first nitrogen outlet 1227 is communicated with the nitrogen inlet 1211, the first argon inlet 1228 is communicated with the argon outlet 1214, the first liquid argon outlet 1228 is communicated with the liquid argon metering device 123, and the second argon inlet 1213 is communicated with the liquid argon storage tank 11.

Further, a first liquid level meter 1223 is disposed on a surface of the argon condenser 122 to detect a liquid level of liquid nitrogen inside the argon condenser 122;

the liquid nitrogen inlet 1226 is provided with a second automatic valve 131 to control the inlet amount of liquid nitrogen into the argon condenser 122;

the first nitrogen outlet 1227 is positioned with a second pressure transducer 1224 to monitor the pressure inside the argon condenser 122;

a third automatic valve 1225 is further provided at the first nitrogen outlet 1227 to control the discharge amount and pressure of nitrogen.

The control device 14 is electrically or wirelessly connected to the first liquid level meter 1223, the second automatic valve 131, the second pressure transmitter 1224, the third automatic valve 1225 and the third pressure transmitter 1231, respectively.

In an embodiment of the present invention, when the first liquid level meter 1233 monitors that the liquid level of the liquid nitrogen in the nitrogen heat exchange passage 1221 exceeds a set value, a signal is transmitted to the control device 14, and the control device 14 adjusts the second automatic valve 131 to control the entering amount of the liquid nitrogen, so as to adjust the liquid level of the liquid nitrogen in the nitrogen heat exchange passage 1221; when the second pressure transmitter 1224 monitors that the pressure in the nitrogen heat exchange passage 1221 reaches a set value, the second pressure transmitter 1224 transmits a signal to the control device 14, the control device 14 controls the third automatic valve 1225 to be opened, and nitrogen in the nitrogen heat exchange passage 1221 is discharged, so that the liquid argon is prevented from being solidified after the temperature is reduced.

In a preferred embodiment of the present invention, the liquid level of the liquid nitrogen in the nitrogen heat exchange passage 1221 is controlled to be between 40% and 60%.

It can be understood that liquid nitrogen in the liquid nitrogen storage tank 13 enters the nitrogen heat exchange channel 1221 through the liquid nitrogen inlet 1226 to provide cooling capacity for the argon condenser 122, at the same time, the nitrogen heat exchange channel 1227 enters throttled nitrogen through the nitrogen inlet 1211 into the argon heat exchanger 121 through the third automatic valve 1225, argon discharged from the liquid argon storage tank 11 enters the argon heat exchanger 121 through the second argon inlet 1213, argon discharged from the liquid argon storage tank 11 is cooled to a saturated state by the throttled nitrogen and then exits the argon heat exchanger through the argon outlet 1214 and the first argon inlet 1228 into the argon heat exchange channel 1222, and nitrogen is discharged into air through the second nitrogen outlet 1212;

and after the saturated argon enters the argon heat exchange channel 1222, the cold energy of the liquid nitrogen in the nitrogen heat exchange channel 1221 is absorbed, the liquid argon is condensed to the liquid argon, and the liquid argon is discharged into the liquid argon metering device 123 through the first liquid argon outlet 1228.

Further, a first liquid argon inlet 1233, a second liquid argon inlet 1234 and a second liquid argon outlet 1235 are disposed on the surface of the liquid argon metering device 123;

the liquid argon pump 124 is provided with a third liquid argon inlet 1244, a liquid argon pump gas phase outlet 1245 and a third liquid argon outlet 1246;

the first liquid argon inlet 1233 is communicated with the first liquid argon outlet 1229, the second liquid argon outlet 1235 is communicated with the third liquid argon inlet 1244, the liquid argon pump gas phase outlet 1245 is communicated with the first argon inlet 1228, and the third liquid argon outlet 1246 is respectively communicated with the second liquid argon inlet 1234 and the liquid argon storage tank 11.

It is understood that the liquid argon discharged from the argon condenser 122 enters the liquid argon metering device 123 through the first liquid argon inlet 1233, enters the liquid argon pump 124 through the second liquid argon outlet 1235 and the third liquid argon inlet 1244, wherein the argon gasified by the liquid argon enters the argon condenser 122 again through the liquid argon pump gas phase outlet 1245 and the first argon inlet 1228 for condensation, and the liquid argon is selectively discharged into the liquid argon metering device 12 or the liquid argon storage tank according to the liquid level value of the liquid argon in the liquid argon metering device 123.

Further, a third pressure transmitter 1231 is disposed on the surface of the liquid argon metering device 123, and the third pressure transmitter 1231 monitors the pressure value inside the liquid argon metering device 123;

the surface of liquid argon metering device 123 still is equipped with second level gauge 1232, second level gauge 1232 monitors the liquid level of the inside liquid argon of liquid argon metering device 123.

A temperature measuring device 1241 is arranged at the outlet of the liquid argon pump 124, and the temperature measuring device 1241 can detect the temperature of the liquid argon at the outlet of the liquid argon pump 124.

A fourth automatic valve 1243 is arranged between the liquid argon pump 124 and the liquid argon metering device 123;

a fifth automatic valve 1242 is arranged between the liquid argon pump 124 and the liquid argon storage tank 11.

The control device 14 is electrically or wirelessly connected to the third pressure transmitter 1231, the second liquid level meter 1232, the temperature measuring device 1241, the fourth automatic valve 1243 and the fifth automatic valve 1242, respectively.

In one embodiment of the present invention, when the second level meter 1232 detects that the level of the liquid argon in the liquid argon metering device 123 is increased to 80%, the second level gauge 1232 transmits a signal to the control device 14, the control device 14 controls the fourth automatic valve 1243 to be closed, the fifth automatic valve 1242 to be opened, meanwhile, the liquid argon pump 124 is automatically turned on to a set frequency, liquid argon is discharged into the liquid argon storage tank 11, when the second level meter 1232 detects a level of liquid argon in the liquid argon metering device 123 as low as 30%, the second level gauge 1232 transmits a signal to the control device 14, the control device 14 controls the fourth automatic valve 1243 to be opened, the fifth automatic valve 1242 to be closed, meanwhile, the liquid argon pump 124 operates at a low speed, liquid argon is discharged into the liquid argon metering device 123, and the liquid argon pump 124 and inlet and outlet pipelines are prevented from being rapidly started after being reheated and heated.

When the temperature measuring device 1241 detects that the temperature is higher than the set value, it transmits a signal to the control device 14, the control device 14 controls the fourth automatic valve 1243 to be opened to the maximum, the fifth automatic valve 1242 to be closed, and at the same time, the liquid argon pump 124 is automatically opened up to the set frequency, liquid argon is discharged into the liquid argon metering device 123, when the temperature measuring device 1241 detects that the temperature is reduced to the set value, it transmits a signal to the control device 14, the control device 14 controls the fourth automatic valve 1243 to be returned to the normal state, the fifth automatic valve 1242 is opened, and liquid argon is discharged into the liquid argon storage tank 11.

In a preferred embodiment of the present invention, the argon gas recovery unit 12 does not need to be placed at a high level, and can be placed at the same level as the liquid argon storage tank 11, so as to reduce the equipment investment.

The argon gas recovery assembly 12 is arranged in a cold box, and the interior of the cold box is insulated by using pearlife, so that the cold loss of equipment is reduced.

The working process of the argon automatic recovery process device comprises the following steps: when monitoring that the pressure inside the liquid argon storage tank 11 reaches 10Kpa, the first pressure transmitter 111 transmits a signal to the control device 14, the control device 14 controls the first automatic valve 112 to open, argon inside the liquid argon storage tank 11 is discharged, the argon enters the argon heat exchanger 121 and is reduced to a saturation temperature, then the argon enters the argon heat exchange channel 1222 inside the argon condenser 122, liquid nitrogen in the liquid nitrogen storage tank 13 enters the nitrogen heat exchange channel 1221 to provide cold for the argon condenser 122, and the argon is liquefied into liquid argon; meanwhile, a first liquid level meter 1223 is arranged on the surface of the argon condenser 122, a second automatic valve 131 is arranged at the position of the liquid nitrogen inlet 1226 and is controlled by the control device 14, liquid nitrogen in the nitrogen heat exchange channel 1221 keeps the liquid level of the liquid nitrogen to be controlled between 40% and 60%, the liquid nitrogen is heated and gasified to become nitrogen gas, the nitrogen gas is throttled by a third automatic valve 1225 and then enters an argon gas heat exchanger, and the nitrogen gas is reheated and then discharged to the atmosphere;

the liquid argon in the argon condenser 122 automatically enters the liquid argon metering device 123, a third pressure transmitter 1231 and a second liquid level meter 1232 are arranged on the surface of the liquid argon metering device 123, when the second liquid level meter 1232 detects that the liquid level of the liquid argon in the liquid argon metering device 123 rises to 80%, the second liquid level meter 1232 transmits a signal to the control device 14, the control device 14 controls the fourth automatic valve 1243 to be closed, the fifth automatic valve 1242 is opened, meanwhile, the liquid argon pump 124 is automatically opened to a set frequency, the liquid argon is discharged into the liquid argon storage tank 11, when the second liquid level meter 1232 detects that the liquid level of the liquid argon in the liquid argon metering device 123 is as low as 30%, the second liquid level meter 1232 transmits a signal to the control device 14, the control device 14 controls the fourth automatic valve 1243 to be opened, the fifth automatic valve 1242 is closed, and meanwhile, the liquid argon pump 124 runs in a low-speed state, liquid argon is discharged into the liquid argon metering device 123, so that the liquid argon pump 124 and the inlet and outlet pipelines cannot be quickly started after being reheated and heated.

In conclusion, the invention provides the argon automatic recovery process device which is simple in structure, convenient for assembly of parts, capable of realizing automatic, safe and efficient argon recovery, avoiding waste of argon emptying and saving labor cost.

The number of apparatuses and the scale of the process described herein are intended to simplify the description of the present invention. Applications, modifications and variations of the present invention will be apparent to those skilled in the art.

While embodiments of the invention have been disclosed above, it is not intended to be limited to the uses set forth in the specification and examples. It can be applied to all kinds of fields suitable for the present invention. Additional modifications will readily occur to those skilled in the art. It is therefore intended that the invention not be limited to the exact details and illustrations described and illustrated herein, but fall within the scope of the appended claims and equivalents thereof.