阅读说明：本技术 石英舟装卸片装置、处理系统及控制方法 (Quartz boat loading and unloading device, processing system and control method ) 是由 王永亮 岳胜斌 高慧杰 陈刚 于 2021-08-10 设计创作，主要内容包括：本发明适用于太阳能电池片生产和加工领域,提供一种石英舟装卸片装置、处理系统及控制方法,该石英舟装卸片装置包括,机架、机架上沿纵向设有第一舟托,第一舟托上设有多个用于存储电池片的石英舟,机架上设有用于对装卸片位置处的石英舟进行错位插片和卸片的第一装卸装置,机架上设有第一碎片检测装置,以及控制装置。通过第一碎片检测装置对位于装卸片位置的石英舟进行实时检测和监控,无需人工检测和监控,降低了人工成本,提高了装卸片的效率；另外,避免了因舟杆表面存在碎片,导致插片机不能将电池片正常插到舟齿内或出现倾斜的问题；同时避免了插片时会和之前倾斜的电池片发生碰撞,从而造成电池片损坏或碎片的问题。(The invention is suitable for the field of solar cell production and processing, and provides a quartz boat loading and unloading device, a processing system and a control method. The quartz boat at the loading and unloading position is detected and monitored in real time through the first fragment detection device, manual detection and monitoring are not needed, the labor cost is reduced, and the loading and unloading efficiency is improved; in addition, the problem that the battery piece cannot be normally inserted into the boat teeth or is inclined due to the fact that fragments exist on the surface of the boat rod is avoided; meanwhile, the problem that the battery piece is damaged or broken due to collision with the inclined battery piece during insertion is avoided.)

1. A quartz boat loading and unloading device is characterized in that,

the quartz boat loading and unloading device comprises a rack, a first boat support which is arranged on the rack along the longitudinal direction and used for driving and fixing a quartz boat, a plurality of quartz boats used for storing battery pieces, a first loading and unloading device which is arranged on the rack and used for carrying out dislocation insertion and unloading on the quartz boat at the position of loading and unloading pieces, and a first piece detection device which is arranged on the rack and used for detecting whether pieces exist in the quartz boat or not,

and a control device connected with the first boat support, the first loading and unloading device and the first fragment detection device; the control device is used for controlling the first loading and unloading device to stop inserting the wafers when fragments exist in the quartz boat.

2. The quartz boat handler of claim 1,

the first fragment detection device comprises a camera unit, a light source unit and a processing unit, wherein the camera unit is arranged on the rack and is positioned above the quartz boat in an inclined manner, the light source unit is positioned below the quartz boat, and the processing unit is used for processing pictures shot by the camera unit.

3. The quartz boat handler of claim 2,

the camera shooting unit comprises a camera shooting support arranged on the rack and positioned above the quartz boat and a camera shooting module arranged above the camera shooting support; the light source unit comprises a light source support arranged below the quartz boat and a light source module arranged on the light source support.

4. The quartz boat handler of claim 1,

the first loading and unloading device comprises a mechanical arm used for grabbing the battery piece in a staggered mode and a servo unit driving the mechanical arm to move transversely and vertically in the vertical direction, and the servo unit is connected with the control device.

5. The quartz boat handler of claim 2,

the battery pack ejecting mechanism is characterized in that a tooth ejecting mechanism which moves up and down along the vertical direction and is used for ejecting the battery piece is arranged below the light source unit on the rack, the tooth ejecting mechanism comprises a U-shaped groove and a linear module which drives the U-shaped groove to move, and a plurality of groove teeth used for ejecting the battery piece are arranged on two end faces of the U-shaped groove.

6. The quartz boat handler of claim 5,

the light source unit comprises two white light sources which are arranged in parallel, penetrates through the U-shaped groove and is connected with the linear module through a connecting piece.

7. The quartz boat handler of claim 1,

the rack is also provided with a second boat support symmetrically arranged with the first boat support, a second loading and unloading device corresponding to the first loading and unloading device and a second fragment detection device corresponding to the first fragment detection device, and the control device is connected with the first boat support, the second boat support, the first loading and unloading device, the second loading and unloading device, the first fragment detection device and the second fragment detection device.

8. The quartz boat handler of claim 1,

the quartz boat loading and unloading device further comprises an alarm device, wherein the alarm device is connected with the control device and used for sending alarm information when fragments exist in the quartz boat.

9. A processing system for loading and unloading quartz boat chips is characterized in that,

comprising the quartz boat handling device of any of claims 1-8 and a diffusion furnace or annealing furnace used in conjunction with the quartz boat handling device.

10. A control method for loading and unloading quartz boat chips is characterized in that,

conveying the treated quartz boat to a wafer loading and unloading position for unloading wafers;

detecting whether the unloading of the battery plate in the quartz boat at the plate loading and unloading position is finished;

when unloading is finished, controlling the camera shooting unit to shoot and detecting whether fragments exist in the quartz boat or not;

when no fragments exist, the loading and unloading device is controlled to load the quartz boat; and when the fragments exist, the loading and unloading device is controlled to stop loading the quartz boat.

Technical Field

The invention belongs to the technical field of solar cells, and particularly relates to a quartz boat loading and unloading device, a processing system and a control method.

Background

The battery piece diffusion and annealing process is to place the battery piece into a high-temperature diffusion furnace or an annealing furnace, introduce special gas and process at high temperature. When high-temperature treatment is carried out, the battery plate is placed on a quartz boat, and then the quartz boat is sent into a pipeline for baking.

In the prior art, fragments often appear on the surface of the boat rod of the quartz boat after diffusion and annealing, when an automatic wafer inserting machine grabs by hand to suck the battery wafer, the battery wafer is inserted into the quartz boat, and the battery wafer cannot be normally inserted into boat teeth by the wafer inserting machine due to the existence of the fragments on the surface of the boat rod, so that the battery wafer can incline. Or the inserting machine grabs the subsequent battery piece in the flower basket by hand and takes out the battery piece, when the inserting machine is inserted into the quartz boat, the battery piece can collide with the inclined battery piece before, large-area damage of the battery piece is caused, a large amount of fragments are generated, the probability of the occurrence of the condition is relatively frequent, although the manual inspection is carried out, real-time detection cannot be achieved, the problem that the battery piece is damaged or the fragments are caused due to the existence of the fragments cannot be avoided, and the loading and unloading efficiency is low.

Disclosure of Invention

The embodiment of the invention provides a quartz boat loading and unloading device, aiming at solving the problem that a battery piece is damaged or broken because fragments exist in the existing quartz boat after diffusion or annealing.

The embodiment of the invention is realized in such a way that a quartz boat loading and unloading device is provided, and the quartz boat loading and unloading device comprises a rack, wherein a first boat support used for driving and fixing a quartz boat is longitudinally arranged on the rack, a plurality of quartz boats used for storing battery pieces are arranged on the first boat support, a first loading and unloading device used for carrying out dislocation inserting and unloading on the quartz boat at a loading and unloading piece position is arranged on the rack, the quartz boat is correspondingly arranged at the loading and unloading piece position, a first fragment detection device used for detecting whether fragments exist in the quartz boat is arranged on the rack, and a control device connected with the first boat support, the first loading and unloading device and the first fragment detection device; the control device is used for controlling the first loading and unloading device to stop inserting the wafers when fragments exist in the quartz boat.

Furthermore, the first fragment detection device comprises a camera unit arranged on the rack and positioned obliquely above the quartz boat, a light source unit positioned below the quartz boat and a processing unit used for processing pictures shot by the camera unit.

Furthermore, the camera shooting unit comprises a camera shooting support arranged on the rack and positioned above the quartz boat, and a camera shooting module arranged above the camera shooting support; the light source unit comprises a light source support arranged below the quartz boat and a light source module arranged on the light source support.

Furthermore, the first loading and unloading device comprises a manipulator used for grabbing the battery piece in a staggered mode and a servo unit driving the manipulator to move transversely and vertically in the vertical direction, and the servo unit is connected with the control device.

Furthermore, a tooth pushing mechanism which moves up and down along the vertical direction and is used for pushing out the battery piece is arranged below the light source unit on the rack, the tooth pushing mechanism comprises a U-shaped groove and a linear module which drives the U-shaped groove to move, and a plurality of groove teeth used for pushing out the battery piece are arranged on two end faces of the U-shaped groove.

Further, the light source unit comprises two white light sources arranged in parallel, and the light source unit penetrates through the U-shaped groove and is connected with the linear module through a connecting piece.

Furthermore, the rack is also provided with a second boat support which is symmetrically arranged with the first boat support, a second loading and unloading device which corresponds to the first loading and unloading device, and a second fragment detection device which corresponds to the first fragment detection device, and the control device is connected with the first boat support, the second boat support, the first loading and unloading device, the second loading and unloading device, the first fragment detection device and the second fragment detection device.

Furthermore, the quartz boat loading and unloading device also comprises an alarm device, wherein the alarm device is connected with the control device and used for sending alarm information when fragments exist in the quartz boat.

The embodiment of the invention also provides a quartz boat loading and unloading piece processing system which comprises the quartz boat loading and unloading piece device and a diffusion furnace or an annealing furnace matched with the quartz boat loading and unloading piece device.

The embodiment of the invention also provides a control method for loading and unloading the quartz boat, which comprises the following steps:

conveying the treated quartz boat to a wafer loading and unloading position for unloading wafers;

detecting whether the unloading of the battery plate in the quartz boat at the plate loading and unloading position is finished;

when unloading is finished, controlling the camera shooting unit to shoot and detecting whether fragments exist in the quartz boat or not;

when no fragment exists, the loading and unloading device is controlled to load the chip; and controlling the loading and unloading device to stop loading the chips when the chips exist.

The quartz boat loading and unloading device comprises a rack, wherein a first boat support used for driving and fixing a quartz boat is longitudinally arranged on the rack, a plurality of quartz boats used for storing battery pieces are arranged on the first boat support, a first loading and unloading device used for carrying out dislocation inserting and unloading on the quartz boat at a loading and unloading position is arranged on the rack, a first fragment detection device used for detecting whether fragments exist in the quartz boat is arranged on the rack, and a control device connected with the first boat support, the first loading and unloading device and the first fragment detection device; the control device is used for controlling the first loading and unloading device to stop inserting the wafers when fragments exist in the quartz boat. According to the quartz boat loading and unloading device, the quartz boat positioned at the loading and unloading position is detected and monitored in real time through the first fragment detection device, manual detection and monitoring are not needed, the labor cost is reduced, and the loading and unloading efficiency is improved; in addition, the problem that the battery piece cannot be normally inserted into the boat teeth or is inclined due to the fact that fragments exist on the surface of the boat rod is avoided; meanwhile, the problem that the battery piece is damaged or broken due to collision with the inclined battery piece during insertion is avoided.

Drawings

FIG. 1 is a schematic side view of a quartz boat wafer handling device according to an embodiment of the present invention;

FIG. 2 is a schematic top view of the quartz boat wafer handling device according to the embodiment of the present invention.

Description of the reference numerals

10. A frame; 11. a loading and unloading position;

20. a first boat support; 21. a quartz boat;

31. an image pickup unit; 32. a light source unit;

40. a first handling device;

50. a flower basket.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

The invention provides a quartz boat loading and unloading device which comprises a rack 10, wherein a first boat support 20 used for driving and fixing a quartz boat is longitudinally arranged on the rack 10, a plurality of quartz boats 21 used for storing battery pieces are arranged on the first boat support 20, a first loading and unloading device 40 used for carrying out dislocation inserting and unloading on the quartz boat at a loading and unloading piece position 11 is arranged on the rack 10, a first piece detection device used for detecting whether pieces exist in the quartz boat 21 or not is arranged on the rack 10, and a control device connected with the first boat support 20, the first loading and unloading device 40 and the first piece detection device; the control device is used for controlling the first loading and unloading device 40 to stop inserting the wafers when fragments exist in the quartz boat 21. The quartz boat at the loading and unloading position is detected and monitored in real time through the first fragment detection device, manual detection and monitoring are not needed, the labor cost is reduced, and the loading and unloading efficiency is improved; in addition, the problem that the battery piece cannot be normally inserted into the boat teeth or is inclined due to the fact that fragments exist on the surface of the boat rod is avoided; meanwhile, the problem that the battery piece is damaged or broken due to collision with the inclined battery piece during insertion is avoided.

Example one

As shown in fig. 1 to fig. 2, the embodiment provides a quartz boat loading and unloading device, which includes a frame 10, a first boat support 20 disposed on the frame 10 along a longitudinal direction for driving and fixing the quartz boat, a plurality of quartz boats 21 disposed on the first boat support 20 for storing battery plates, a first loading and unloading device 40 disposed on the frame 10 for dislocating insert sheets and unloading sheets at loading and unloading sheet positions 11, the quartz boat 21 correspondingly disposed at the loading and unloading sheet positions 11, a first fragment detecting device disposed on the frame 10 for detecting whether fragments exist in the quartz boat 21, and a control device connected to the first boat support 20, the first loading and unloading device 40, and the first fragment detecting device; the control device is used for controlling the first loading and unloading device 40 to stop inserting the wafers when fragments exist in the quartz boat 21.

In this embodiment, the first boat support 20 is provided with a plurality of quartz boats 21, which can be matched with a diffusion furnace or an annealing furnace, and when diffusion or annealing is performed, the first boat support 20 is pushed into the diffusion furnace or the annealing furnace, and after that, the first boat support 20 is pulled out from the diffusion furnace or the annealing furnace. The rack 10 is provided with a loading and unloading position 11 matched with the first loading and unloading device 40 and used for inserting and unloading wafers, namely, the quartz boat 21 corresponding to the first boat support 20 moves to the loading and unloading position 11, at this time, the first loading and unloading device 40 unloads the wafers in the quartz boat 21, and after the wafer unloading is finished, the wafer inserting is carried out. And then driving the first boat support 20 to move, moving the next quartz boat 21 to the wafer loading and unloading position 11 to complete wafer loading and unloading work, and circularly reciprocating until all the quartz boats 21 on the first boat support 20 are completely loaded with wafers and unloaded with wafers.

In the present embodiment, the first boat support 20 is disposed along the longitudinal direction of the rack 10, and the first boat support 20 is driven by a driving cylinder connected to the control device to move along the longitudinal direction. The first handling device 40 is movable in the lateral direction on the frame and can be moved up and down in the vertical direction. A plurality of flower baskets 50 for storing the battery pieces are arranged below the first loading and unloading device 40.

Specifically, when the wafer is unloaded, the first loading and unloading device 40 moves to the wafer loading and unloading position 11, and the battery wafer positioned on the quartz boat 21 is captured in a staggered manner, and the captured battery wafer is placed in the flower basket 50. In the embodiment, the distance between two adjacent battery plates in the flower basket 50 is equal to twice the distance between two adjacent battery plates in the quartz boat 21. The distance between two opposite suckers on the first handling device 40 is equal to the distance between two adjacent battery pieces in the flower basket 50, and in order to conveniently and quickly insert the battery pieces grabbed from the quartz boat 21 into the flower basket 50, the first handling device 40 needs to be grabbed in a staggered manner when the quartz boat 21 grabs the battery pieces. For example: the quartz boat 21 is internally provided with 1, 2, 3, 4, 5 and 6 groups of battery pieces, the first loading and unloading device 40 grabs the 1 st, 3 and 5 th group of battery pieces when grabbing for the first time, the control device controls the first boat support 20 to drive the quartz boat 21 to move, so that the first loading and unloading device 40 grabs the 2 nd, 4 and 6 th group of battery pieces when grabbing for the second time, and all the battery pieces in the quartz boat 21 are grabbed twice.

It is understood that in other embodiments, in order to prevent the adjacent two battery plates from interfering during the grabbing process, the battery plates inside the quartz boat 21 can be grabbed in a staggered manner by adjusting the distance between the two suction cups on the first handling device.

In the present embodiment, the first debris detecting device includes a camera unit 31 located obliquely above the quartz boat 21, a light source unit 32 located below the quartz boat 21, and a processing unit for analyzing the photographed picture. The quartz boat 21 is a quartz boat located at the loading/unloading position 11.

The quartz boat is a quartz material, has the printing opacity characteristic, and light can pass through, and the battery piece is opaque, and light passes through nontransparent, and the inconsistent condition of the trafficability characteristic of two kinds of materials to the light source is utilized to this embodiment, detects whether there is the piece.

The light source unit 32 is located below the quartz boat 21, and if there is debris in the quartz boat 21, the debris will leave a black image in the image and form a sharp contrast with the background under the irradiation of the light source. Whether fragments exist in the quartz boat 21 can be judged by taking pictures and carrying out comparative analysis.

In this embodiment, the quartz boat 21 has a boat rod with boat teeth, and the battery pieces are inserted into the corresponding boat teeth. After the wafer unloading is finished, the image of the vacant quartz boat 21 in the wafer loading and unloading position 11 is shot by the image pick-up unit 31, and the processing and analysis are carried out, so that whether the battery wafer exists on the boat rod in the quartz boat 21 can be judged.

According to the quartz boat loading and unloading device, the first fragment detection device is used for detecting and monitoring the quartz boat in real time, so that whether fragments exist in a boat rod of the quartz boat can be automatically detected after the wafer is unloaded, manual detection and monitoring are not needed, the labor cost is reduced, and the wafer loading and unloading efficiency is improved; the problem that the battery piece cannot be normally inserted into the boat teeth or inclined due to the fact that fragments exist on the surface of the boat rod is solved. In addition, the problem that the battery piece is damaged in a large area and generates a large amount of fragments due to collision with the inclined battery piece in the prior art when the battery piece is inserted is also avoided.

Example two

On the basis of the first embodiment, the present embodiment provides a quartz boat loading and unloading device, wherein the image capturing unit 31 includes an image capturing bracket disposed on the rack 10 and located obliquely above the quartz boat 21, and an image capturing module disposed above the image capturing bracket; the light source unit 32 includes a light source bracket disposed on the frame and below the quartz boat, and a light source module disposed on the light source bracket.

In this embodiment, a camera bracket is disposed on the rack 10 at a position obliquely above the quartz boat 21, and a CCD camera module is disposed on the camera bracket. A light source support is arranged below the quartz boat 21 on the frame 10, and a light source module is arranged on the light source support. Wherein, the light source module is white bar light source to the quartz boat is shone in a comprehensive clear way.

Further, a tooth ejecting mechanism is further disposed on the frame 10 below the light source module, and is used for ejecting the battery piece during piece unloading, so that the first handling device 40 can unload the battery piece conveniently.

In this embodiment, the tooth ejecting mechanism includes a U-shaped groove and a linear module driving the U-shaped groove to move up and down along a vertical direction. And a plurality of groove teeth used for ejecting the battery piece are arranged on two end faces of the U-shaped groove.

For example: the quartz boat 21 is internally provided with 1, 2, 3, 4, 5 and 6 groups of battery pieces, at the position 11 of a piece loading and unloading position, the groove teeth of the top tooth mechanism correspond to the 1 st, 3 and 5 th group of battery pieces, when the piece is unloaded, the top tooth mechanism moves upwards to eject the 1 st, 3 and 5 th group of battery pieces, and when the first loading and unloading device 40 first grabs, the 1 st, 3 th and 5 th group of battery pieces are taken out. Then the control device drives the first boat support 20 to drive the quartz boat 21 to move, the 2 nd, 4 th and 6 th groups of battery plates are aligned to the tooth ejecting mechanism, so that the first loading and unloading device 40 can grab the 2 nd, 4 th and 6 th groups of battery plates when grabbing for the second time, and therefore all the battery plates in the quartz boat 21 are grabbed twice. The light source unit 32 passes through the U-shaped groove and is parallel to the boat rod in the quartz boat 21, and the light source bracket is connected with one end face of the linear module through the connecting piece. So as to fix the light source module on the end surface of the linear module.

In the present embodiment, the distance from the light source module to the bottom of the U-shaped groove is greater than the up-and-down movement distance of the U-shaped groove, so as to avoid the interference between the tooth ejecting mechanism and the light source unit 32.

Furthermore, the light source module is arranged in parallel with the end face of the U-shaped groove. In this embodiment, the light source module includes two white light sources arranged in parallel so as to clearly and comprehensively irradiate the quartz boat. The two white light sources are parallel to the tooth ejecting mechanism, so that the tooth ejecting mechanism is prevented from being influenced to move in the vertical direction.

The quartz boat loading and unloading piece device of this embodiment sets up the light source module in the centre of pushing up tooth mechanism, fixes the light source support on linear module through the connecting piece, makes the angularly adjustable of light source support to keep parallel with pushing up tooth mechanism, avoid influencing the motion of pushing up tooth mechanism, and the better quartz boat that shines, further improve and detect the precision.

EXAMPLE III

On the basis of the first embodiment, the present embodiment provides a quartz boat loading and unloading device, the first loading and unloading device 40 includes a robot for grabbing the cell in a staggered manner, and a servo unit for driving the robot to move in a lateral direction and a vertical direction, and the servo unit is connected to the control device.

In this embodiment, including first sucking disc and second sucking disc on the manipulator, first sucking disc and second sucking disc all are equipped with a plurality of claws of inhaling, and every claw of inhaling corresponds an absorption battery piece. Wherein the distance between two adjacent battery pieces in the flower basket 50 is equal to the distance between two suction claws. Specifically, the distance between two adjacent battery plates in the flower basket 50 is equal to 2 times of the distance between two adjacent battery plates in the quartz boat 21, so the first handling device 40 performs the dislocation adsorption to take out all the battery plates in the quartz boat 21.

In other embodiments, the staggered grabbing of the battery plates in the quartz boat 21 is performed according to the relationship between the spacing between the battery plates in the quartz boat 21 and the spacing between two adjacent battery plates in the flower basket 50.

According to the quartz boat loading and unloading device, the first loading and unloading device carries out staggered adsorption on the loading and unloading position, so that mutual interference between adjacent battery pieces is avoided, and the battery pieces are damaged; meanwhile, the battery pieces are directly inserted into the flower basket through dislocation adsorption, and the piece loading and unloading efficiency is further improved.

Example four

In addition to the first embodiment, the present embodiment provides a quartz boat loading and unloading device, wherein the rack 10 is further provided with a second boat support symmetrically disposed with respect to the first boat support 20, a second loading and unloading device corresponding to the first loading and unloading device 40, and a second fragment detection device corresponding to the first fragment detection device, and the control device is connected to the first boat support 20, the second boat support, the first loading and unloading device 40, the second loading and unloading device, the first fragment detection device, and the second fragment detection device.

In the present embodiment, the first boat support 20 and the second boat support have the same structure, the first handling device 40 and the second handling device have the same structure, and the first fragment detection device and the second fragment detection device have the same structure. This embodiment is not described in detail.

The quartz boat loading and unloading piece device of this embodiment through the duplex position setting, has improved the inserted sheet and has unloaded the efficiency of piece to through duplex position and annealing stove or diffusion furnace cooperation, improved the treatment effeciency of battery piece.

EXAMPLE five

On the basis of any one of the above embodiments, the present embodiment provides a quartz boat loading and unloading device, which further includes an alarm device disposed on the rack 10, wherein the alarm device is connected to the control device, and is configured to control the alarm device to send an alarm to remind a worker to clean up the chips when the control device receives a signal from the first chip detection device or the second chip detection device.

In this embodiment, the alarm device may be an audible and visual alarm or a voice alarm.

The quartz boat loading and unloading piece device of this embodiment through setting up alarm device, when detecting that there is the piece on quartz boat or boat pole, in time reminds the staff to clear up the piece to control first loading and unloading device or second loading and unloading device and stop the inserted sheet, avoid causing the damage to the battery piece, improved loading and unloading piece efficiency, reduced manufacturing cost.

EXAMPLE six

In addition to any of the above embodiments, the present embodiment provides a loading and unloading device for a quartz boat, wherein the first debris detecting device is a debris sensor.

In this embodiment, the debris sensor is preferably a fiber optic sensor, such as: and during installation of the fx-101 optical fiber sensor, the detection position of the optical fiber sensor is parallel and level to the lowest point of the top tooth structure, so that the optical fiber sensor sensitively detects fragments falling to the area above the bottom of the top tooth.

According to the quartz boat loading and unloading device, whether fragments exist in the sensing area in the quartz boat is sensed through the optical fiber sensor, so that automatic detection and monitoring are realized, the labor cost is reduced, and the loading and unloading efficiency is improved; and timely remind the staff to clear up when detecting that the fragments exist.

EXAMPLE seven

On the basis of any of the above embodiments, the present embodiment provides a quartz boat loading and unloading wafer processing system, which includes the above quartz boat loading and unloading wafer device and a diffusion furnace and/or an annealing furnace matched with the same.

In this embodiment, after the feeding of the battery piece is completed, the quartz boat filled with the battery piece is sent to the annealing furnace or the diffusion furnace through the first boat support or the second boat support, and then the next annealing or diffusion process is performed, and after the completion, the quartz boat is extracted from the annealing furnace or the diffusion furnace. The battery piece after the process treatment is unloaded by a quartz boat loading and unloading device, whether fragments exist in the quartz boat is automatically detected after the unloading is finished, and the work of inserting the battery piece is continuously finished when the fragments do not exist; when detecting that there is the piece, in time remind the staff to clear up to after the clearance is accomplished, continue to accomplish the inserted sheet work, reciprocate with this circulation.

According to the quartz boat loading and unloading processing system, the quartz boat positioned at the loading and unloading position is detected and monitored in real time through the fragment detection device, manual detection and monitoring are not needed, the labor cost is reduced, and the loading and unloading efficiency is improved; in addition, the problem that the battery piece cannot be normally inserted into the boat teeth or is inclined due to the fact that fragments exist on the surface of the boat rod is avoided; meanwhile, the problem that the battery pieces are damaged or broken due to collision with the inclined battery pieces during insertion is avoided; and the processing system improves the processing efficiency of the battery piece.

Example eight

The embodiment provides a quartz boat loading and unloading control method, which comprises the following steps:

step 1, conveying the treated quartz boat to a wafer loading and unloading position for unloading wafers;

step 2, detecting whether the unloading of the battery plate in the quartz boat at the plate loading and unloading position is finished;

step 3, when unloading is finished, controlling a camera unit to take a picture, and detecting whether fragments exist in the quartz boat or not;

step 4, controlling the loading and unloading device to load the quartz boat if no fragments exist; if the chips exist, the loading and unloading device is controlled to stop loading the chips on the quartz boat.

In this embodiment, the treated quartz boat may be a quartz boat after a diffusion or annealing process, or a quartz boat after being treated by other processes.

Specifically, whether the unloading of the battery plate in the quartz boat 21 at the plate loading and unloading position 11 is finished is detected by a sensor in the quartz boat.

In this embodiment, the handling device is taken as the first handling device 40 for illustration, the processed quartz boat 21 is transported to the loading and unloading position 11 for unloading, and whether the unloading of the battery piece in the quartz boat 21 located at the loading and unloading position 11 is completed is detected; after unloading, the camera shooting module is controlled to shoot, and the shot pictures are compared and analyzed by the processing unit. Specifically, the quartz boat is a quartz material, has the printing opacity characteristic, and light can pass through, and the battery piece is opaque, and light passes through not, and the inconsistent condition of the trafficability characteristic of two kinds of materials to the light source is utilized to this embodiment, detects whether there is the piece. If debris exists in the quartz boat, under the irradiation of the light source, the debris can leave a black shadow in the image and form a sharp contrast with the background. If the image has a shadow through the comparative analysis of the shot picture, the existence of fragments in the quartz boat can be judged. If no shadow exists in the image, it can be judged that no debris exists in the quartz boat 21.

If no fragments exist in the quartz boat 21, the control device controls the first loading and unloading device 40 to take out the battery pieces from the flower basket for the insert operation. And if fragments exist in the quartz boat 21, controlling the first loading and unloading device 40 to stop working, informing a worker to clean the fragments in time, and controlling the first loading and unloading device 40 to continue inserting the chips after the cleaning is finished. After the quartz boat 21 is loaded, the first boat support is controlled to move, and the next quartz boat is transported to the wafer loading/unloading position 11.

If fragments exist in the quartz boat 21, the control device sends alarm information and controls the first loading and unloading device to stop loading the chips into the quartz boat.

The control method of the double-station quartz boat loading and unloading device is the same as that of the above method, and the embodiment is not particularly limited.

According to the quartz boat loading and unloading control method, after the quartz boat is unloaded, whether fragments exist in the quartz boat or not is automatically detected, damage or fragments to the battery piece caused by the existence of the fragments are avoided, the efficiency of loading and unloading the wafer is improved, and the labor and production cost are reduced.

According to the quartz boat loading and unloading device, the first fragment detection device is used for detecting and monitoring the quartz boat in real time, so that whether fragments exist in the boat rod of the quartz boat can be automatically detected after the wafer is unloaded, manual detection and monitoring are not needed, and the labor cost is reduced; the problem that the battery piece cannot be normally inserted into the boat teeth or inclined due to the fact that fragments exist on the surface of the boat rod is solved. In addition, the problem that the battery piece is damaged in a large area and generates a large amount of fragments due to collision with the inclined battery piece in the prior art when the battery piece is inserted is also avoided.

The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.