阅读说明：本技术 低能散高亮度负氧离子产生装置 (Low-energy-dispersion high-brightness negative oxygen ion generating device ) 是由 孙良亭 金钱玉 赵红卫 于 2021-09-06 设计创作，主要内容包括：本发明涉及一种低能散高亮度负氧离子产生装置,包括放电室、陶瓷窗、射频天线以及进气管道；所述放电室为一端开口,另一端封闭的腔体结构,所述放电室的开口端设置有金属法兰,所述放电室的封闭端设置有离子引出孔；所述陶瓷窗与所述金属法兰的法兰面贴合设置,并将所述金属法兰的法兰口封闭；所述射频天线设置在所述陶瓷窗上；所述进气管道设置在所述金属法兰的顶部,且位于所述陶瓷窗的后方,所述进气管道与所述放电室连通。本发明能够产生低能散、高亮度的负氧离子束,提高离子束亮度及空间分辨率。(The invention relates to a low-energy-dissipation high-brightness negative oxygen ion generating device, which comprises a discharge chamber, a ceramic window, a radio frequency antenna and an air inlet pipeline, wherein the discharge chamber is arranged on the ceramic window; the discharge chamber is of a cavity structure with one end open and the other end closed, a metal flange is arranged at the open end of the discharge chamber, and an ion leading-out hole is arranged at the closed end of the discharge chamber; the ceramic window is attached to the flange surface of the metal flange, and the flange opening of the metal flange is sealed; the radio frequency antenna is arranged on the ceramic window; the gas inlet pipeline is arranged at the top of the metal flange and behind the ceramic window, and the gas inlet pipeline is communicated with the discharge chamber. The invention can generate the negative oxygen ion beam with low energy dispersion and high brightness, and improve the brightness and the spatial resolution of the ion beam.)

1. A low-energy-dispersion high-brightness negative oxygen ion generating device is characterized by comprising a discharge chamber, a ceramic window, a radio frequency antenna and an air inlet pipeline;

the discharge chamber is of a cavity structure with one end open and the other end closed, a metal flange is arranged at the open end of the discharge chamber, and an ion leading-out hole is arranged at the closed end of the discharge chamber;

the ceramic window is attached to the flange surface of the metal flange, and the flange opening of the metal flange is sealed;

the radio frequency antenna is arranged on the ceramic window;

the gas inlet pipeline is arranged at the top of the metal flange and behind the ceramic window, and the gas inlet pipeline is communicated with the discharge chamber.

2. The device for generating low-energy-dissipation high-brightness negative oxygen ions according to claim 1, further comprising a multi-peak magnet, wherein the multi-peak magnet is sleeved outside the discharge chamber.

3. The device for generating negative oxygen ions with low energy dispersion and high brightness as claimed in claim 1, wherein the radio frequency antenna is formed by spirally winding a tubular antenna body on the ceramic window and forming leading-out terminals at two ends of the tubular antenna body.

4. The device of claim 1, wherein the ceramic window is made of a high strength, high thermal conductivity ceramic material.

5. The device of claim 1, wherein the discharge chamber is made of a non-magnetic material.

6. The device of claim 5, wherein the non-magnetic material is aluminum.

7. The device for generating negative oxygen ions with low energy dissipation and high brightness according to claim 1, wherein the metal flange is made of copper material.

8. The device as claimed in claim 3, wherein the tubular antenna body is made of copper material.

9. The device for generating negative oxygen ions with low energy dissipation and high brightness as claimed in claim 8, wherein cooling water is introduced into said tubular antenna body.

Technical Field

The invention relates to the technical field of negative oxygen ion generating devices, in particular to a low-energy-dissipation high-brightness negative oxygen ion generating device.

Background

The secondary ion mass spectrometer has high-precision and high-resolution in-situ element analysis capability, is widely applied to multiple subject fields such as earth science and the like, and is one of the most advanced micro-area element analysis instruments at present. The chronology research of geology is carried out on a mass spectrometer, the incident primary ion beam is required to be negative oxygen ion, and the target test ion is electropositive radioisotope ionAnd (4) adding the active ingredients. Due to strong electronegativity of O^-、O₂ ^-The ions can effectively improve the yield of electropositive secondary ions and reduce the influence of charge effect on analysis, and other types of ion sources can not efficiently generate the secondary ions, so that the double plasma ion source or the radio frequency ion source can be used as a primary ion beam ion source of a secondary ion mass spectrometer to generate negative oxygen ions and can be widely applied to in-situ analysis of geological and chronology micro-areas.

However, the ion source currently used on secondary ion mass spectrometers generates O^-、O₂ ^-The ion beam can be dispersed greatly, which is not beneficial to the formation of tiny beam spots (can disperse dozens of electron volts, even hundreds of electron volts), so a technical scheme is needed to generate the negative oxygen ion beam with low energy dispersion and high brightness, and the brightness and the spatial resolution of the ion beam are improved.

Disclosure of Invention

In view of the above problems, an object of the present invention is to provide a low energy dispersion high brightness negative oxygen ion generating device, which can generate a low energy dispersion high brightness negative oxygen ion beam, and improve the brightness and spatial resolution of the ion beam.

In order to achieve the purpose, the invention adopts the following technical scheme:

the invention relates to a low-energy-dissipation high-brightness negative oxygen ion generating device, which comprises a discharge chamber, a ceramic window, a radio frequency antenna and an air inlet pipeline, wherein the discharge chamber is arranged on the ceramic window; the discharge chamber is of a cavity structure with one end open and the other end closed, a metal flange is arranged at the open end of the discharge chamber, and an ion leading-out hole is arranged at the closed end of the discharge chamber; the ceramic window is attached to the flange surface of the metal flange, and the flange opening of the metal flange is sealed; the radio frequency antenna is arranged on the ceramic window; the gas inlet pipeline is arranged at the top of the metal flange and behind the ceramic window, and the gas inlet pipeline is communicated with the discharge chamber.

The device for generating negative oxygen ions with low energy dispersion and high brightness preferably further comprises a multi-peak magnet, and the multi-peak magnet is sleeved outside the discharge chamber.

Preferably, the radio frequency antenna is formed by spirally winding a tubular antenna body on the ceramic window and forming leading-out ends at two ends of the tubular antenna body.

The low-energy-dispersion high-brightness negative oxygen ion generating device is preferably characterized in that the ceramic window is made of a ceramic material with high strength and high thermal conductivity coefficient.

The negative oxygen ion generating device with low energy dispersion and high brightness is preferably characterized in that the discharge chamber is made of a nonmagnetic material.

Preferably, the non-magnetic material is aluminum.

Preferably, the metal flange is made of a copper material.

The low-energy-dispersion high-brightness negative oxygen ion generating device is preferably characterized in that the tubular antenna body is made of a copper material.

Preferably, the tubular antenna body is filled with cooling water.

Due to the adoption of the technical scheme, the invention has the following advantages:

(1) the invention can improve the ion beam brightness and the spatial resolution of the existing mass spectrometer by several times, and simultaneously, the design structure of the ion source is simple and compact, and the manufacturing cost is lower.

(2) The negative oxygen ion source can completely replace the existing negative oxygen ion source on a secondary ion mass spectrometer, and the analysis effect, the service life, the maintenance period and the like of a mass spectrometer sample are comprehensively improved.

Drawings

FIG. 1 is a schematic cross-sectional view of the present invention;

fig. 2 is a schematic perspective view of the present invention.

The figures are numbered:

1-a radio frequency antenna; 2-a ceramic window; 3-an air inlet duct; 4-a multimodal magnet; 5-a discharge chamber; 6-ion extraction hole; 7-metal flange.

Detailed Description

The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings so that the objects, features and advantages of the invention can be more clearly understood. It should be understood that the embodiments shown in the drawings are not intended to limit the scope of the present invention, but are merely intended to illustrate the spirit of the technical solution of the present invention.

The invention provides a low-energy-dissipation high-brightness negative oxygen ion generating device, which comprises a discharge chamber, a ceramic window, a radio frequency antenna and an air inlet pipeline, wherein the discharge chamber is arranged in the ceramic window; the discharge chamber is of a cavity structure with one end open and the other end closed, a metal flange is arranged at the open end of the discharge chamber, and an ion leading-out hole is arranged at the closed end of the discharge chamber; the ceramic window is attached to the flange surface of the metal flange, and the flange opening of the metal flange is sealed; the radio frequency antenna is arranged on the ceramic window; the gas inlet pipeline is arranged at the top of the metal flange and behind the ceramic window, and the gas inlet pipeline is communicated with the discharge chamber. The invention can generate the negative oxygen ion beam with low energy dispersion and high brightness, and improve the brightness and the spatial resolution of the primary ion beam of the spectrometer.

As shown in FIG. 1, the device for generating negative oxygen ions with low energy dissipation and high brightness provided by the present invention comprises a discharge chamber 5, a ceramic window 2, a radio frequency antenna 1 and an air inlet pipe 3; the discharge chamber 5 is of a cavity structure with one end open and the other end closed, the open end of the discharge chamber 5 is provided with a metal flange 7, and the closed end of the discharge chamber 5 is provided with an ion extraction hole 6 for extracting negative oxygen ions; the ceramic window 2 is attached to the flange surface of the metal flange 7, and the flange opening of the metal flange 7 is sealed; the radio frequency antenna 1 is arranged on the ceramic window 2, and the radio frequency antenna 1 is connected with a radio frequency power supply and used for emitting radio frequency power to heat gas to generate plasma; the gas inlet pipeline 3 is arranged at the top of the metal flange 7 and is positioned behind the ceramic window 2, the gas inlet pipeline 3 is communicated with the discharge chamber 5, one end of the gas inlet pipeline 3 is connected with an oxygen source, the other end of the gas inlet pipeline is communicated into the discharge chamber 5, and oxygen entering from the gas inlet pipeline 3 is heated by fed-in radio frequency power near the ceramic window 2 to generate plasma so as to form negative oxygen ions.

In the above embodiment, preferably, the present invention further includes a multimodal magnet 4, the multimodal magnet 4 is sleeved outside the discharge chamber 5, and the multimodal magnet 4 is formed by splicing permanent magnets, and can generate a multimodal magnetic field to confine plasma, so as to increase plasma density.

In the above embodiment, preferably, as shown in fig. 2, the rf antenna 1 is formed by spirally winding a tubular antenna body on the ceramic window 2 and forming the terminals at both ends of the tubular antenna body. Wherein, the number of turns of the spiral winding is 3-5, and the radio frequency antenna 1 is arranged on the ceramic window 2 in the middle.

In the above embodiment, preferably, the ceramic window 2 is made of a high-hardness, high-thermal-conductivity ceramic material, such as aluminum nitride; the ceramic window 2 is attached to the radio frequency antenna 1, radio frequency power can penetrate through the ceramic window and feed into the discharge chamber 5, the thickness of the ceramic window 2 is larger than 3mm, and the diameter of the ceramic window is larger than the whole size of the spiral winding part of the radio frequency antenna 1; wherein, the ceramic window is adhered to the metal flange by adopting high heat conduction silicon rubber and is sealed and vacuumized.

In the above embodiment, it is preferable that the discharge chamber 5 is made of a nonmagnetic material, wherein the nonmagnetic material is aluminum, the diameter of the discharge chamber is larger than the overall size of the spirally wound portion of the radio frequency antenna, and the axial length is not less than 1.5 times the axial size of the radio frequency antenna; the radio frequency heating discharge generates plasma in the discharge chamber 5, the discharge chamber 5 is vacuum, and the plasma is confined therein.

In the above embodiment, the metal flange 7 is preferably made of a copper material.

In the above embodiment, preferably, the tubular antenna body is made of a copper material.

In the above embodiment, it is preferable that cooling water is introduced into the tubular antenna body, whereby the ceramic window 2 can be cooled by taking away heat by heat conduction.

The working process of the invention is as follows: oxygen is fed into the discharge chamber 5 through the gas inlet pipe 3, and the vacuum of the discharge chamber 5 is adjusted at 10^-2mbar magnitude is about; then, radio frequency power is fed in through the ceramic window 2 to enter the discharge chamber 5, and the gas is heated and ionized to generate plasma, so that negative oxygen ions are generated; the negative oxygen ion beam with low energy dispersion and high brightness can be extracted and accelerated through the ion extraction hole 6 on one side of the discharge chamber 5.

Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.