阅读说明：本技术 一种多晶硅生产尾气回收方法 (Method for recovering tail gas in polycrystalline silicon production ) 是由 陈红飚 谢强 于 2021-09-29 设计创作，主要内容包括：本发明涉及一种多晶硅生产尾气回收方法,包括冷却步骤：向筒体内具有双层管道的换热管中通入低温液体,液体从靠近换热管外壁的管道向换热管轴线处的管道流动,使所述筒体内与所述换热管接触的活性炭处于低温状态；提纯步骤：向所述筒体内通入氢气尾气,使氢气尾气通过所述活性炭,提纯后的氢气从所述筒体内排出；加热步骤：向所述换热管中通入高温液体；活性炭再生步骤：向所述筒体内通入氢气尾气,氢气尾气通过所述活性炭,氢气尾气携带着杂质组分从所述筒体内排出。通过上述步骤,使活性炭能重复利用,不仅降低了运行成本,同时使得采用该多晶硅生产尾气回收方法的装置的换热效果好,活性炭的再生过程用时短,氢气的提纯效果好。(The invention relates to a method for recovering tail gas in polysilicon production, which comprises the following cooling steps: introducing low-temperature liquid into a heat exchange tube with a double-layer pipeline in a barrel, wherein the liquid flows from the pipeline close to the outer wall of the heat exchange tube to the pipeline at the axis of the heat exchange tube, so that the activated carbon in the barrel, which is in contact with the heat exchange tube, is in a low-temperature state; a purification step: introducing hydrogen tail gas into the cylinder, allowing the hydrogen tail gas to pass through the activated carbon, and discharging purified hydrogen from the cylinder; a heating step: introducing high-temperature liquid into the heat exchange tube; and (3) activated carbon regeneration: and introducing hydrogen tail gas into the cylinder, wherein the hydrogen tail gas passes through the activated carbon and is discharged from the cylinder along with impurity components. Through the steps, the activated carbon can be recycled, the operation cost is reduced, and meanwhile, the device adopting the method for recovering the tail gas in the polycrystalline silicon production has good heat exchange effect, the time of the regeneration process of the activated carbon is short, and the purification effect of hydrogen is good.)

1. A method for recovering tail gas in polysilicon production is characterized by comprising the following steps: the method comprises the following steps:

and (3) cooling: introducing low-temperature liquid into a heat exchange tube in the cylinder, wherein the heat exchange tube is a double-layer pipeline, and the liquid flows to a pipeline at the axis of the heat exchange tube from a pipeline close to the outer wall of the heat exchange tube, so that the activated carbon in the cylinder, which is in contact with the heat exchange tube, is in a low-temperature state;

a purification step: introducing hydrogen tail gas into the cylinder, enabling the hydrogen tail gas to pass through the activated carbon, removing impurity components in the hydrogen tail gas by using the activated carbon, and discharging purified hydrogen from the cylinder;

a heating step: introducing high-temperature liquid into the heat exchange tube to enable the activated carbon to be in a high-temperature state;

and (3) activated carbon regeneration: and introducing hydrogen tail gas into the cylinder, wherein the hydrogen tail gas passes through the activated carbon, the activated carbon removes impurity components, and the hydrogen tail gas carries the impurity components to be discharged from the cylinder.

2. The method for recovering the tail gas in the production of polysilicon according to claim 1, wherein the method comprises the following steps: further comprising a start-up step, said start-up step being provided before said cooling step, said start-up step: the heat exchange tube is connected with a water inlet device and a water outlet device, an exhaust pipe is arranged on the water inlet device, the exhaust pipe on the water inlet device is opened, liquid is introduced into the water inlet device, the exhaust pipe exhausts air at the initial stage, and then the exhaust pipe is closed.

3. The method for recovering the tail gas in the production of polysilicon according to claim 2, wherein the method comprises the following steps: the cooling step further comprises: and introducing low-temperature liquid/gas into a jacket spirally wound on the cylinder.

4. The method for recovering the tail gas in the production of polysilicon according to claim 3, wherein the method comprises the following steps: the heating step further comprises: high temperature liquid/gas was passed into the jacket.

5. The method for recovering the tail gas in the production of polycrystalline silicon according to any one of claims 1 to 4, characterized by comprising the following steps: the heat exchange tube includes the outer tube and sets up inner tube in the outer tube, the one end of outer tube is sealed, the outer wall of inner tube with keep away from the inner wall sealing connection of sealed end on the outer tube, be close to on the outer tube the inner tube with the part of outer tube connection is provided with the opening, be provided with a plurality of fin board on the outer wall of outer tube.

6. The method for recovering the tail gas in the production of polysilicon according to claim 5, wherein the method comprises the following steps: the cross-sectional shapes of the outer sleeve and the inner tube are both circular, and the outer sleeve and the inner tube are concentrically arranged.

7. The method for recovering the tail gas in the production of polysilicon according to claim 6, wherein the method comprises the following steps: the plane of the fin plate is parallel to the axis of the outer sleeve.

8. The method for recovering the tail gas in the production of polysilicon according to claim 7, wherein the method comprises the following steps: the water inlet device comprises a water inlet pipe and a plurality of water inlet ring pipes, the water inlet pipe is connected with the water inlet ring pipes, a plurality of water inlet branch pipes are arranged on the water inlet ring pipes, and the water inlet branch pipes are connected with the openings of the outer sleeve in a sealing mode.

9. The method for recovering the tail gas in the production of polysilicon according to claim 8, wherein the method comprises the following steps: the water outlet device comprises a water outlet pipe and a plurality of water outlet ring pipes, the water outlet pipe is connected with the water outlet ring pipes, a plurality of water outlet branch pipes are arranged on the water outlet ring pipes, and the water outlet branch pipes are connected with the inner pipe in a sealing mode.

10. The method for recovering the tail gas in the polysilicon production according to claim 9, wherein the method comprises the following steps: the cross section of the jacket is semicircular.

Technical Field

The invention relates to the technical field of polycrystalline silicon production, in particular to a method for recovering tail gas in polycrystalline silicon production.

Background

Polycrystalline silicon is a form of simple substance silicon, is a direct raw material for producing monocrystalline silicon, and is an electronic information base material of semiconductor devices of contemporary artificial intelligence, automatic control, information processing, photoelectric conversion and the like. During the production of polysilicon, hydrogen tail gas containing impurities is generated, and active carbon is usually used for adsorption and purification of hydrogen.

The temperature swing adsorption technology is mostly adopted in the industry to purify hydrogen, and the principle of the temperature swing adsorption is that high-boiling-point impurity components in raw material gas are adsorbed at normal temperature under the condition of selective adsorption of an adsorbent by utilizing the characteristic that the adsorption capacities of the adsorbent to different components are greatly different along with the difference of temperature, and the impurities are removed at high temperature, so that the adsorbent is regenerated. In practical application, the inventor finds that the current temperature swing adsorption technology has the defects that:

when the activated carbon adsorbent is subjected to heat exchange operation, a mode that the heat exchange device is contacted with the adsorbent is generally adopted, when liquid is introduced into the heat exchange device, the liquid is contacted with the device wall of the heat exchange device and exchanges heat, the liquid close to the axis of the heat exchange device in the heat exchange device is far away from the device wall of the heat exchange device, so that the heat exchange effect of the liquid at the axis of the heat exchange device is poor, the heat exchange utilization rate of the liquid introduced into the heat exchange device is low, the heat exchange effect of the heat exchange device is poor, the heat exchange effect of the adsorbent is poor, and the purification of hydrogen in tail gas generated in polycrystalline silicon production is not facilitated.

Therefore, in view of the above problems, there is a need to design a method for improving the purification effect of hydrogen in the polysilicon production tail gas recovery system.

Disclosure of Invention

The invention aims to: aiming at the problems that the heat exchange effect of a heat exchange device in the tail gas produced by polysilicon is poor, the heat exchange effect of an adsorbent is poor, and the purification of hydrogen is not facilitated, the method for improving the purification effect of hydrogen in the tail gas produced by polysilicon is designed.

In order to achieve the above purpose, the invention provides the following technical scheme:

a method for recovering tail gas in polysilicon production comprises the following steps:

and (3) cooling: introducing low-temperature liquid into a heat exchange tube in the cylinder, wherein the heat exchange tube is a double-layer pipeline, and the liquid flows to a pipeline at the axis of the heat exchange tube from a pipeline close to the outer wall of the heat exchange tube, so that the activated carbon in the cylinder, which is in contact with the heat exchange tube, is in a low-temperature state;

a purification step: introducing hydrogen tail gas into the cylinder, enabling the hydrogen tail gas to pass through the activated carbon, removing impurity components in the hydrogen tail gas by using the activated carbon, and discharging purified hydrogen from the cylinder;

a heating step: introducing high-temperature liquid into the heat exchange tube to enable the activated carbon to be in a high-temperature state;

and (3) activated carbon regeneration: and introducing hydrogen tail gas into the cylinder, wherein the hydrogen tail gas passes through the activated carbon, the activated carbon removes impurity components, and the hydrogen tail gas carries the impurity components to be discharged from the cylinder.

As a preferred technical solution of the present application, the method further includes a starting step, the starting step is provided before the cooling step, and the starting step: the heat exchange tube is connected with a water inlet device and a water outlet device, an exhaust pipe is arranged on the water inlet device, the exhaust pipe on the water inlet device is opened, liquid is introduced into the water inlet device, the exhaust pipe exhausts air at the initial stage, and then the exhaust pipe is closed.

As a preferred embodiment of the present application, the cooling step further includes: and introducing low-temperature liquid/gas into a jacket spirally wound on the cylinder.

As a preferred embodiment of the present application, the heating step further includes: high temperature liquid/gas was passed into the jacket.

As the preferential technical scheme of this application, the heat exchange tube includes the outer tube and sets up inner tube in the outer tube, the one end of outer tube is sealed, the outer wall of inner tube with keep away from the inner wall sealing connection of sealed end on the outer tube, be close to on the outer tube the inner tube with outer tube connection's part is provided with the opening, be provided with a plurality of fin board on the outer wall of outer tube.

As the preferential technical scheme of this application, the outer tube with the cross-sectional shape of inner tube is circular, the outer tube with the inner tube sets up with one heart.

As a preferential technical scheme of the application, the plane where the fin plate is located is parallel to the axis of the outer sleeve.

As the preferential technical scheme of this application, water installations includes inlet tube and a plurality of ring canal of intaking, advance water piping connection the ring canal of intaking, it is provided with a plurality of branch pipes of intaking on the ring canal to intake, the branch pipe of intaking with the opening sealing connection of outer tube.

As the preferential technical scheme of this application, go out water installation and include outlet pipe and a plurality of water ring canal, go out water piping connection go out the water ring canal, it is provided with a plurality of water branch pipes on the water ring canal to go out, go out the water branch pipe with inner tube sealing connection.

As a preferential technical scheme of the application, the cross section of the jacket is semicircular.

Compared with the prior art, the invention has the beneficial effects that:

according to the scheme, firstly, activated carbon is cooled, low-temperature liquid is introduced into a heat exchange tube, the heat exchange tube is a double-layer tube, the low-temperature liquid flows to a tube at the axis of the heat exchange tube from the tube close to the outer wall of the heat exchange tube, the low-temperature liquid exchanges heat with the outer wall of the heat exchange tube, and the part, in which the heat exchange tube is arranged, of a barrel is filled with the activated carbon, so that the activated carbon exchanges heat with the heat exchange tube, and the activated carbon is in a low-temperature state; then purifying the hydrogen, introducing hydrogen tail gas into the cylinder, allowing the hydrogen tail gas to pass through the activated carbon in a low-temperature state, adsorbing impurity components in the hydrogen tail gas by the activated carbon in a low-temperature environment, separating the impurity components from the hydrogen in the hydrogen tail gas, obtaining high-purity hydrogen, and discharging the purified hydrogen from the cylinder; then heating the activated carbon, introducing high-temperature liquid into the heat exchange tube, exchanging heat between the high-temperature liquid and the outer wall of the heat exchange tube and acting on the activated carbon in the barrel to enable the activated carbon to be in a high-temperature state; introducing hydrogen tail gas into the cylinder, so that the hydrogen tail gas passes through the activated carbon, impurity components in the activated carbon are separated from the activated carbon at a high temperature, and the impurity components are discharged from the cylinder along with the hydrogen tail gas, thereby realizing the regeneration of the adsorption capacity of the activated carbon; through the steps, the active carbon is enabled to adsorb impurity components in hydrogen tail gas in a low-temperature environment and obtain high-purity hydrogen, the active carbon is enabled to remove the impurity components on the active carbon in a high-temperature environment, the adsorption capacity of the active carbon is enabled to be regenerated, the active carbon can be repeatedly utilized, the operation cost is reduced, meanwhile, the heat exchange effect of the device adopting the polycrystalline silicon production tail gas recovery method is good, the time of the regeneration process of the active carbon is short, and the purification effect of the hydrogen is good.

Description of the drawings:

FIG. 1 is a schematic flow chart of a method for recovering tail gas from polysilicon production according to the present application;

FIG. 2 is a schematic structural diagram of one embodiment of a method for recovering tail gas from polysilicon production according to the present application;

FIG. 3 is a schematic partial structure diagram of one embodiment of a method for recovering tail gas from polysilicon production according to the present application;

FIG. 4 is a partial schematic structural diagram of a heat exchange tube according to one embodiment of the method for recovering tail gas from polysilicon production of the present application;

FIG. 5 is a schematic structural diagram of a water inlet device of one embodiment of the method for recovering the tail gas from the production of polycrystalline silicon;

FIG. 6 is a schematic structural diagram of a water outlet device according to one embodiment of the method for recovering tail gas from polysilicon production of the present application;

the following are marked in the figure: 41-cylinder body, 42-heat exchange tube, 43-water inlet device, 44-water outlet device, 45-exhaust tube, 46-jacket, 47-outer sleeve, 48-inner tube, 49-fin plate, 410-water inlet tube, 411-water inlet ring tube, 412-water inlet branch tube, 413-water outlet tube, 414-water outlet ring tube and 415-water outlet branch tube.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments.

Thus, the following detailed description of the embodiments of the invention is not intended to limit the scope of the invention as claimed, but is merely representative of some embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

It should be noted that the embodiments of the present invention and the features and technical solutions thereof may be combined with each other without conflict.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, it should be noted that the terms "upper", "lower", and the like refer to orientations or positional relationships based on those shown in the drawings, or orientations or positional relationships that are conventionally arranged when the products of the present invention are used, or orientations or positional relationships that are conventionally understood by those skilled in the art, and such terms are used for convenience of description and simplification of the description, and do not refer to or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used merely to distinguish one description from another, and are not to be construed as indicating or implying relative importance.

The first embodiment is as follows: as shown in reference to figures 1-2,

the method for recovering tail gas in polycrystalline silicon production provided by the embodiment comprises the following steps:

and (3) cooling: introducing low-temperature liquid into the heat exchange tube 42 in the cylinder 41, wherein the heat exchange tube 42 is a double-layer pipeline, and the liquid flows to the pipeline at the axis of the heat exchange tube 42 from the pipeline close to the outer wall of the heat exchange tube 42, so that the activated carbon in the cylinder 41 and in contact with the heat exchange tube 42 is in a low-temperature state;

a purification step: introducing hydrogen tail gas into the cylinder 41, allowing the hydrogen tail gas to pass through the activated carbon, removing impurity components in the hydrogen tail gas by using the activated carbon, and discharging purified hydrogen from the cylinder 41;

a heating step: introducing high-temperature liquid into the heat exchange tube 42 to enable the activated carbon to be in a high-temperature state;

and (3) activated carbon regeneration: and introducing hydrogen tail gas into the cylinder 41, wherein the hydrogen tail gas passes through the activated carbon, the activated carbon removes impurity components, and the hydrogen tail gas carries the impurity components and is discharged from the cylinder 41. Firstly, cooling activated carbon, introducing low-temperature liquid into a heat exchange tube 42, wherein the heat exchange tube 42 is a double-layer tube, the low-temperature liquid flows to a tube at the axis of the heat exchange tube 42 from the tube close to the outer wall of the heat exchange tube 42, the low-temperature liquid exchanges heat with the outer wall of the heat exchange tube 42, and the part, in which the heat exchange tube 42 is arranged, of the cylinder 41 is filled with the activated carbon, so that the activated carbon exchanges heat with the heat exchange tube 42 and is in a low-temperature state; then, purifying the hydrogen, introducing hydrogen tail gas into the cylinder 41, allowing the hydrogen tail gas to pass through the activated carbon in a low-temperature state, adsorbing impurity components in the hydrogen tail gas by the activated carbon in a low-temperature environment, separating the impurity components from the hydrogen in the hydrogen tail gas, obtaining high-purity hydrogen, and discharging the purified hydrogen from the cylinder 41; then, the activated carbon is heated, high-temperature liquid is introduced into the heat exchange tube 42, and the high-temperature liquid exchanges heat with the outer wall of the heat exchange tube 42 and acts on the activated carbon in the cylinder 41 to enable the activated carbon to be in a high-temperature state; introducing hydrogen tail gas into the cylinder 41, so that the hydrogen tail gas passes through the activated carbon, impurity components in the activated carbon are separated from the activated carbon at a high temperature, and the impurity components are discharged from the cylinder 41 along with the hydrogen tail gas, thereby realizing the regeneration of the adsorption capacity of the activated carbon; through the steps, the active carbon is enabled to adsorb impurity components in hydrogen tail gas in a low-temperature environment and obtain high-purity hydrogen, the active carbon is enabled to remove the impurity components on the active carbon in a high-temperature environment, the adsorption capacity of the active carbon is enabled to be regenerated, the active carbon can be repeatedly utilized, the operation cost is reduced, meanwhile, the heat exchange effect of the device adopting the polycrystalline silicon production tail gas recovery method is good, the time of the regeneration process of the active carbon is short, and the purification effect of the hydrogen is good.

As a preferred embodiment, in addition to the above-mentioned mode, the method further comprises a starting step, provided before the cooling step, the starting step: the heat exchange tube 42 is connected with a water inlet device 43 and a water outlet device 44, an exhaust pipe 45 is arranged on the water inlet device 43, the exhaust pipe 45 on the water inlet device 43 is opened, liquid is introduced into the water inlet device 43, and the exhaust pipe 45 exhausts air at the initial stage and closes the exhaust pipe 45. In the method for recovering the tail gas in the production of polycrystalline silicon, the method further comprises a starting step, wherein the starting step is positioned before the cooling step, in the initial stage, the exhaust pipe 45 on the water inlet device 43 is opened, liquid is introduced into the water inlet device 43, air in the water inlet device 43 is exhausted, the exhaust pipe 45 is closed, and the influence of the air in the pipeline on the heat exchange effect is avoided through the starting step, so that the heat exchange effect is further improved.

As a preferred embodiment, in addition to the above aspect, the cooling step further includes: a cryogenic liquid/gas is fed into a jacket 46 spirally wound around the cylinder 41. When the cooling step is performed, low-temperature liquid/gas is introduced into the jacket 46 spirally wound on the cylinder 41, so that the temperature of the jacket 46 changes, and the jacket 46 is spirally wound on the cylinder 41, so that the contact area between the jacket 46 and the cylinder 41 is large, the temperature is transferred to the cylinder 41 and exchanges heat with the activated carbon in the cylinder 41, the cooling time of the activated carbon in the cooling step is further shortened, and the heat exchange effect is improved.

As a preferred embodiment, in addition to the above aspect, the heating step further includes: high temperature liquid/gas is fed into the jacket 46. When the heating step is carried out, high-temperature liquid/gas is introduced into the jacket 46, the temperature of the cylinder 41 which is in contact with the jacket 46 is changed through heat conduction and acts on the activated carbon in the cylinder 41, the heating time of the activated carbon is further accelerated, the regeneration of the adsorption capacity of the activated carbon is facilitated, and the heat exchange effect is improved.

In a preferred embodiment, based on the above manner, the heat exchange tube 42 further includes an outer sleeve 47 and an inner tube 48 disposed inside the outer sleeve 47, one end of the outer sleeve 47 is sealed, an outer wall of the inner tube 48 is connected to an inner wall of the outer sleeve 47, which is far from the sealed end, an opening is disposed on the outer sleeve 47 near a portion where the inner tube 48 is connected to the outer sleeve 47, and a plurality of fin plates 49 are disposed on the outer wall of the outer sleeve 47. The heat exchange tube 42 comprises an outer sleeve 47 and an inner tube 48 arranged in the outer sleeve 47, the inner wall of the outer sleeve 47 and the outer wall of the inner tube 48 form a communication space, one end of the outer sleeve 47 is sealed, the outer wall of the inner tube 48 and the inner wall far away from the sealed end on the outer sleeve 47 are connected in a sealing way, an opening is arranged on the part, close to the connection part of the inner tube 48 and the outer tube, on the outer sleeve 47, so that a through space formed by the inner wall of the outer sleeve 47 and the outer wall of the inner tube 48 and then the inner tube 48 jointly form a flow channel of liquid in the heat exchange tube 42, when a cooling step or a heating step is carried out, the liquid introduced into the heat exchange tube 42 firstly passes through the communication space formed by the inner wall of the outer sleeve 47 and the outer wall of the inner tube 48, the liquid in the communication space is close to the wall of the outer sleeve 47, thereby facilitating the heat exchange between the liquid and the heat exchange tube 42, and the liquid flows into the inner tube 48 after contacting with the inner wall of the outer sleeve 47, the influence of the heat-exchanged liquid on the heat exchange effect is reduced, the plurality of fin plates 49 are arranged on the outer wall of the outer sleeve 47, and the fin plates 49 have a good heat transfer effect, so that the heat exchange effect of the heat exchange tube 42 is further improved.

Example two: as shown with reference to figures 2-6,

the difference between this embodiment and the first embodiment is: the cross-sectional shapes of the outer sleeve 47 and the inner tube 48 are both circular, and the outer sleeve 47 and the inner tube 48 are concentrically arranged. Set up the cross-section of outer tube 47 and inner tube 48 to circular to make outer tube 47 and inner tube 48 set up with one heart, make the inner wall of outer tube 47 be the ring that two concentric circles constitute in the cross-section of the intercommunication space that the outer wall of inner tube 48 formed, when letting in low temperature/high temperature liquid in the heat exchange tube 42, liquid evenly distributed is near the inner wall of outer tube 47, make the heat transfer of liquid and outer tube 47 more even and carry out the heat transfer with fin plate 49, thereby make the heat transfer of active carbon and heat exchange tube 42 more even, the heat transfer effect is better.

In a preferred embodiment, in addition to the above, the plane of the fin plate 49 is parallel to the axis of the outer sleeve 47. Because the active carbon in the cylinder body 41 has a certain mass, if the plane of the fin plate 49 is not parallel to the axis of the outer sleeve 47, the active carbon can exert pressure on the larger plane of the fin plate 49, so that the structure of the fin plate 49 is unstable, the plane of the fin plate 49 is further parallel to the axis of the outer sleeve 47, when the cylinder body 41 is vertically placed, the heat exchange tube 42 and the fin plate 49 are also vertically placed, so that the pressure action exerted on the fin plate 49 by the active carbon is greatly reduced, the deformation and pulling of the active carbon on the connection part of the fin plate 49 and the outer sleeve 47 are reduced, and the structural stability of the fin plate 49 is improved.

In a preferred embodiment, based on the above manner, the water inlet device 43 further includes a water inlet pipe 410 and a plurality of water inlet loops 411, the water inlet pipe 410 is connected to the water inlet loops 411, a plurality of water inlet branch pipes 412 are disposed on the water inlet loops 411, and the water inlet branch pipes 412 are hermetically connected to the openings of the outer sleeve 47. The water inlet pipe 410 is connected with a plurality of water inlet ring pipes 411, a plurality of water inlet branch pipes 412 arranged on the water inlet ring pipes 411 are hermetically connected with openings of the outer sleeve 47, high-temperature/low-temperature liquid is injected through the water inlet pipe 410, the liquid enters the water inlet ring pipes 411, and enters the heat exchange pipes 42 along with the water inlet branch pipes 412 from the openings of the outer sleeve 47, the water inlet pipe 410, the water inlet ring pipes 411 and the water inlet branch pipes 412 are arranged, the liquid is divided and transmitted into the heat exchange pipes 42, the temperature change range of the liquid flowing in each heat exchange pipe 42 is approximate, and the heat exchange effect of the heat exchange pipes 42 is further more uniform.

In a preferred embodiment, based on the above manner, the water outlet device 44 further includes a water outlet pipe 413 and a plurality of water outlet loops 414, the water outlet pipe 413 is connected to the water outlet loops 414, a plurality of water outlet branch pipes 415 are disposed on the water outlet loops 414, and the water outlet branch pipes 415 are hermetically connected to the inner pipe 48. The water outlet pipe 413 is connected with a plurality of water outlet ring pipes 414, a plurality of water outlet branch pipes 415 are arranged on the water outlet ring pipes 414, the water outlet branch pipes 415 are hermetically connected with the inner pipe 48, when liquid passes through the heat exchange pipe 42 and flows out of the inner pipe 48 and passes through the water outlet branch pipes 415, the water outlets on the heat exchange pipe 42 are communicated by the water outlet ring pipes 414, and the flowing liquid is discharged through the water outlet pipe 413, so that the liquid can flow out of the heat exchange pipe 42 assembly conveniently, and meanwhile, the connection of the water outlet device 44 matched with the water outlet pipe 413 and the collection of the discharged liquid are facilitated.

In a preferred embodiment, in addition to the above embodiment, the jacket 46 has a semicircular cross-sectional shape. The cross section of the jacket 46 is semicircular, when low-temperature/high-temperature liquid or gas is filled in the jacket 46, the temperature of the jacket 46 is changed, and due to the semicircular cross section of the jacket 46, the contact area between the jacket 46 and the outer wall of the cylinder 41 is further increased, the temperature change influence of the jacket 46 on the cylinder 41 and the activated carbon in the cylinder 41 is improved, and therefore the heat exchange effect of the activated carbon is improved.

The above embodiments are only used for illustrating the invention and not for limiting the technical solutions described in the invention, and although the present invention has been described in detail in the present specification with reference to the above embodiments, the present invention is not limited to the above embodiments, and therefore, any modification or equivalent replacement of the present invention is made; all such modifications and variations are intended to be included herein within the scope of this disclosure and the appended claims.